CN112963326B - Acoustic fluid micropump based on micro electro mechanical technology - Google Patents
Acoustic fluid micropump based on micro electro mechanical technology Download PDFInfo
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- CN112963326B CN112963326B CN202110151561.1A CN202110151561A CN112963326B CN 112963326 B CN112963326 B CN 112963326B CN 202110151561 A CN202110151561 A CN 202110151561A CN 112963326 B CN112963326 B CN 112963326B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
Abstract
The invention discloses an acoustic fluid micropump based on a micro electro mechanical technology, which comprises: a pump chamber having an inlet and an outlet; a GHz-level resonator is arranged in the pump cavity; a conduit extends from the outlet to the resonator and is disposed in non-contact with the resonator. The invention can obtain stable and rapid unidirectional acoustic jet flow by arranging the GHz-level resonator in the pump cavity, a pipeline which is not in contact with the resonator and is arranged right above the GHz-level resonator, and an external power amplifier and a signal generator, thereby realizing efficient and continuous pumping of liquid. The wireless drive type semiconductor laser has the advantages of miniature size, simple structure, low power consumption, wide application range, compatibility with a semiconductor process, more portability through a wireless drive mode and the like.
Description
Technical Field
The invention relates to the field of microelectronic devices, in particular to an acoustic fluid micropump based on a micro-electromechanical technology.
Background
Micropumps have been proposed as the main driving components of microfluidic systems, have been attracted to and studied by many researchers, and are now widely used in various fields such as biomedicine, biochemical sensing, drug delivery, drug development, and fuel cells. Existing active micropumps can be roughly classified into two types: mechanical micropumps and non-mechanical micropumps. The mechanical micropump drives fluid flow by displacement of a moving part, and common working principles are piezoelectric driving, thermal driving, electrostatic driving, phase change driving, electromagnetic driving and driving by materials with special shapes. The non-mechanical micropump converts non-mechanical energy into liquid kinetic energy to pump fluid, and common working principles include electrohydrodynamics, magnetohydrodynamics, electroosmosis, ultrasonic driving and the like.
Currently, mechanical pumps that restrict fluid movement through check valves to a unidirectional flow have been developed over the years, such as wireless controlled passive nitinol pumps. Heating the nickel-titanium alloy by radio frequency to change the shape of the nickel-titanium alloy, and extruding a pump chamber to spray liquid; after the radio frequency is turned off, the nickel-titanium alloy is cooled and recovered, liquid is sucked from the storage tank, and the nickel-titanium alloy is switched between two states by controlling a radio frequency signal source, so that liquid pumping is realized. However, the technology adopts a relatively complex one-way valve structure, the pumping time of a single time is long, the pumping liquid amount is low, continuous and quick pumping cannot be carried out, and the minimum temperature for deformation of the nickel-titanium alloy reaches 65 ℃ during working, so that the problems of sample storage, thermal safety and the like are caused.
In 2019, there was a related research reporting an acoustic fluid pump that generates a stable unidirectional flow in a microchannel by interacting with triangular side walls with a surface acoustic wave driven local fluid produced by a C-shaped interdigital transducer. However, the acoustic fluid pump cannot realize effective conversion of electric energy, acoustic energy and kinetic energy, the pumping flow rate is less than 50nL/min under the input power of 6W, the power consumption is high, and the whole miniaturization is difficult.
In summary, the mechanical micropump has a complicated geometric structure, which hinders the development of the size and the manufacture thereof, and limits the application thereof. The non-mechanical micropumps have various problems, such as the electro/magneto-hydrodynamic formula has special requirements on the electromagnetic properties of the liquid and needs very high voltage; the electrochemical pump generates additional product and is not sustainable, etc. In recent years, the performance of various micro pumps is optimized and improved, but the key problems are still not solved, and the requirements of practical application cannot be met. Therefore, there is a need for a commonly applicable and easily integrated micro-pump that can be well combined with different micro-fluidic systems to solve the problems of biomedicine, drug delivery, and biochemical detection.
Disclosure of Invention
In view of this, the main objective of the present invention is to provide an acoustic fluid micropump based on micro electro mechanical technology, which can utilize an acoustic jet excited by a high-frequency solid package type acoustic wave resonator with a resonant frequency of 1 to 3GHz manufactured based on micro electro mechanical technology, and intercept the acoustic jet by separating the acoustic jet from other fluids in a cavity, so as to obtain a stable and fast unidirectional flow and realize continuous pumping of the fluid.
In order to achieve the above object, the present invention discloses an acoustic fluid micropump based on micro electro mechanical technology, which comprises:
a pump chamber having an inlet and an outlet;
a GHz-level resonator is arranged in the pump cavity;
a conduit extends from the outlet to the resonator and is disposed in non-contact with the resonator.
Therefore, the micro-electromechanical-technology-based acoustic fluid micropump does not need mechanical parts such as a one-way valve and the like, so that the micro-electromechanical-technology-based acoustic fluid micropump has the advantages of simple structure, low power consumption and capability of keeping miniaturization, can generate strong volume force to push liquid under GHz-level frequency, and can obtain stable and rapid one-way flow through the arranged pipeline so as to realize continuous and rapid pumping of fluid.
As a possible implementation manner, the resonator is arranged opposite to the outlet, and the inner diameter of the pipeline is in a trend of increasing or changing from one end close to the resonator to one end connected with the outlet as a whole. The pipeline adopts a two-dimensional axial symmetry mode, so that a flow field can be stable, the loss of frictional resistance of the inner wall of the pipeline on fluid is reduced, and the fluid is pushed to move outwards more quickly.
As a possible realization, the inner diameter of the pipe closest to the resonator is not more than 5 times the radius of the outer circumference of the resonator. The acoustic jet flow excited by the resonator can be completely covered in the pipeline, and the loss of volume force is reduced.
As a possible implementation, the end of the pipe close to the resonator is at a distance from the resonator in the range of 10-1000um. The energy of the bulk acoustic wave generated by the resonator is rapidly attenuated and converted into kinetic energy of the liquid within the distance range, so that the loss of the kinetic energy of the acoustic jet is reduced.
As one possible implementation, the inlet of the pump chamber is located at the bottom of the pump chamber, and the outlet is located at the top of the pump chamber and above the resonator; the resonator is located at the bottom of the pump cavity. The liquid to be pumped can be passed into the pump chamber and fill the entire chamber without air bubbles, and the resonator is located at the bottom of the pump chamber for easy use and installation.
As a possible implementation, the inlet and the outlet of the pump respectively externally connect to a pipe. Can be convenient for the input and the output of liquid, and has simple operation.
As one possible implementation, the inlet of the pump may be multiple. A variety of liquids may be input to achieve the liquid mixing function of the pump.
As a possible implementation manner, the device further comprises a circuit for driving the resonator to work; the circuit may be connected to an external signal generator. The pump of the liquid can be driven, the energy consumption is low, the applicability is high, and the pump can be compatible with a semiconductor process.
As one possible implementation, the connecting includes: a wired connection or a wireless connection. Can be a movable portable micro pump, and has wider application range.
In summary, the invention realizes the high-efficiency pumping of liquid by arranging the GHz-level resonator and the pipeline which is directly above the GHz-level resonator in the pump cavity, and connecting the GHz-level resonator with the power amplifier and the signal generator externally. The whole system has the advantages of miniature size, simple structure, low power consumption, wide application and the like, and overcomes the defects of complex unbalanced structure, incapability of continuous and rapid pumping, high energy consumption and the like in the prior art. In addition, the function of liquid mixing is added, so that the application range of the invention is wider.
Drawings
Fig. 1 is a schematic diagram of a main structure of an acoustic fluid micropump based on a micro-electromechanical technology according to an embodiment of the present invention.
Fig. 2 is a schematic view of a flow field of an acoustic fluid micropump based on a micro-electromechanical technology according to an embodiment of the present invention.
Description of the reference numerals
1. A pump chamber; 11. an outlet; 12. an inlet; 2. a resonator; 3. a pipeline; 4. circuit board
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments obtained by a person skilled in the art based on the embodiments of the present invention without any inventive step are within the scope of the present invention.
Example one
The invention provides an acoustic fluid micropump based on a micro electro mechanical technology, which comprises:
and the pump cavity can be used for fixing and storing the sample. The top of the cavity is provided with an opening for a hard pipeline to be inserted as an outlet, and the opening at the bottom of the cavity can be used as an inlet.
And the resonator is arranged at the bottom of the pump cavity, can be connected with an external signal generator through a circuit board and has GHz-level resonance frequency.
When the driven liquid in the pipeline works, the part of the driven liquid, which is contacted with the inner wall of the pipeline, is subjected to a force which hinders the driven liquid from upwards spreading, so that backflow is easily caused, the back pressure is reduced, and therefore, the inner diameter below the pipeline can be gradually reduced, the loss of volume force is reduced, the backflow is inhibited, the back pressure is increased, and the liquid is more quickly pushed to upwards move; the radius of the cross section of the port of the resonator is not more than 5 times of the radius of the peripheral circle of the resonator; the acoustic jet flow generated by the resonator can be separated by 10-1000um away from the resonator directly above the resonator so as to obtain stable and controllable unidirectional acoustic jet flow.
And the circuit board is positioned at the bottom of the resonator, and the outside of the circuit board can be connected with the signal generator by a wire.
For a more clear description of the technical solution of the present application, the operation principle of the micro-electromechanical-technology-based acoustic fluid micropump of the present application is described as follows:
firstly, liquid to be pumped is led into the pump cavity 1 through the inlet 12, so that the cavity is filled with the liquid and bubbles are removed; then, the external signal generator can apply signals with the same resonant frequency to the resonator 2 through the circuit board 4 so as to enable the vibration amplitude of the resonator 2 to be at the maximum value; the energy of the bulk acoustic wave generated by the resonator 2 is rapidly attenuated within ten microns above the energy of the bulk acoustic wave and converted into the kinetic energy of the liquid, so that acoustic jet flow is generated; the unidirectional acoustic jet can be obtained by intercepting the acoustic jet separated by the pipeline 3; the acoustic jet flows out in one direction through the outlet 11, meanwhile, the liquid at the inlet 12 is driven to flow in for supplement, and the state that the liquid in the pump cavity 1 is full is constantly maintained, so that continuous pumping is finished; under the condition of a pipeline and a resonator with determined area and structure, the pumping speed can be controlled by adjusting the power of an input signal, the highest pumping flow speed can reach 6ml/min under the input power of 1W, and the highest load pressure difference can reach 6 kilopascals.
Example two
In order to make the miniaturization and simplification of the present invention more prominent, the inventor has made further improvement on the basis of the first embodiment.
The resonator can be connected with the micro antenna through the circuit board, the resonator is driven to work in a wireless energy supply mode, the same function as the first embodiment can be achieved, the constraint of wired connection can be relieved, the portable micro pump becomes the movable portable micro pump, and the application range is wider and is not limited.
The invention realizes the high-efficiency pumping of liquid by combining the GHz solid packaging type acoustic wave resonator with the cavity with the intercepting pipeline, and provides the acoustic fluid micropump based on the micro-electro-mechanical technology. The three-dimensional size of the pump body of the micropump is about 10 millimeters, and the micropump has the advantage of miniaturization; and the structure is simple because no mechanical structures such as a valve, a membrane and the like are arranged; meanwhile, by adjusting the area of the resonator and the inner boundary condition of the channel, the pumping flow rate of 6ml/min and the load pressure difference of 6 kilopascals can be achieved under the input power of 1W, so that the power-saving type high-power-consumption resonant cavity has the advantage of low power consumption; the micro pump is based on the micro-electro-mechanical technology, is easy to array on the basis of a single micro pump, or the resonator of the single pump can also be arrayed to realize more complex fluid pumping, is easy to combine with the micro-fluidic technology, has wide application and can be manufactured in a large scale. In addition, the micropump has the advantages of high applicability, compatibility with semiconductor processes and the like.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, which is intended to cover any modifications, equivalents, improvements, etc. within the spirit and scope of the present invention.
For example, in the above-described embodiment, a GHz solid package type bulk acoustic wave resonator is used, and those skilled in the art may also use other types (such as different resonant frequencies, different sizes or shapes) of solid package type bulk acoustic wave resonators as the driving element of the micropump; the section of the port of the intercepting pipeline can be the same as or slightly smaller than the vibration area of the resonator, and can intercept the acoustic jet flow; the inner diameter below the pipeline can be gradually reduced, and can also be kept unchanged, so that the flow field can be stable, and the loss of the frictional resistance of the inner wall of the pipeline, which is borne by fluid, is reduced; the inlets of the pump body can be arranged in a plurality of ways, or liquid is pumped in from a plurality of liquid pumps through branch pipes, and different liquids are rapidly mixed by utilizing the mixing function of the micro pump; the outlet of the pump body can be in a honeycomb shape through the interior of the bifurcated pipe or the outlet pipe so as to realize multi-outlet pumping; pumping of various performances is achieved by varying the distance between the resonator and the intercepting pipe within a limited range.
In addition, in the above embodiments, some parameter ranges of the acoustic fluid micropump based on the micro electro mechanical technology are described, however, these parameters do not limit the present invention, and other parameters may be adopted in the present invention.
Claims (8)
1. An acoustic fluid micropump based on micro electro mechanical technology, comprising:
a pump chamber having an inlet and an outlet;
a resonator with the 1-3GHz level is arranged in the pump cavity; so that the energy of the bulk acoustic wave generated by the resonator is converted into the kinetic energy of the liquid, thereby generating an acoustic jet;
a pipeline is arranged in a non-contact manner from the outlet to the resonator and is used for separating the acoustic jet flow generated by the resonator to obtain a unidirectional acoustic jet flow;
the resonator is arranged opposite to the outlet, and the inner diameter of the pipeline is increased from one end close to the resonator to the end connected with the outlet.
2. An acoustic fluid micropump based on micro electro mechanical technology, as claimed in claim 1, wherein the inner diameter of the end of the conduit close to the resonator is not more than 5 times the radius of the outer circumference of the resonator.
3. A microelectromechanical technology-based acoustic fluid micropump of claim 1, wherein the end of the conduit proximate the resonator is located at a distance in the range of 10-1000um from the resonator.
4. A microelectromechanical technology-based acoustic fluid micropump of claim 1, wherein the inlet of the pump chamber may be located at the bottom, top or side wall of the pump chamber, and the outlet is located at the top of the pump chamber and above the resonator;
the resonator is located at the bottom of the pump cavity.
5. The microelectromechanical based acoustic fluid micropump of claim 1, wherein the pump inlet and outlet each externally connect a conduit.
6. An acoustic fluid micropump based on microelectromechanical techniques as claimed in claim 1, characterized in that the number of inlets of the pump is two or more.
7. An acoustic fluid micropump based on microelectromechanical techniques, as set forth in claim 1, further comprising circuitry for driving said resonator;
the circuit may be connected to an external signal generator.
8. A microelectromechanical technology-based acoustic fluid micropump of claim 7, wherein the coupling comprises: a wired connection or a wireless connection.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011121420 | 2020-10-19 | ||
| CN2020111214207 | 2020-10-19 |
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| CN112963326B true CN112963326B (en) | 2022-11-11 |
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| CN115263714B (en) * | 2022-08-04 | 2024-02-09 | 浙江大学 | Micropump device for driving micro gear by acoustic surface wave |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5525041A (en) * | 1994-07-14 | 1996-06-11 | Deak; David | Momemtum transfer pump |
| US6010316A (en) * | 1996-01-16 | 2000-01-04 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic micropump |
| US20030053915A1 (en) * | 2001-04-09 | 2003-03-20 | George Keilman | Ultrasonic pump and methods |
| US8173078B2 (en) * | 2004-04-28 | 2012-05-08 | Industrial Technology Research Institute | Gravity-driven micropump |
| DE102005043034A1 (en) * | 2005-09-09 | 2007-03-15 | Siemens Ag | Apparatus and method for moving a liquid |
| WO2010093383A1 (en) * | 2009-02-12 | 2010-08-19 | The Board Of Trustees Of The University Of Illinois | Magnetically driven micropump |
| KR101142430B1 (en) * | 2010-01-20 | 2012-05-08 | 포항공과대학교 산학협력단 | Micro pump and driving method thereof |
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Effective date of registration: 20230906 Address after: 300220 Meinian Square 2-1403-40, northwest of the intersection of Dongting Road and Nujiang Road, Hexi District, Tianjin City Patentee after: Kangwosi (Tianjin) Biotechnology Co.,Ltd. Address before: 300072 Tianjin City, Nankai District Wei Jin Road No. 92 Patentee before: Tianjin University |
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