CN115263714B - Micropump device for driving micro gear by acoustic surface wave - Google Patents
Micropump device for driving micro gear by acoustic surface wave Download PDFInfo
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- CN115263714B CN115263714B CN202210932064.XA CN202210932064A CN115263714B CN 115263714 B CN115263714 B CN 115263714B CN 202210932064 A CN202210932064 A CN 202210932064A CN 115263714 B CN115263714 B CN 115263714B
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- interdigital electrode
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- pump body
- gear
- body cavity
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- 238000010897 surface acoustic wave method Methods 0.000 claims abstract description 34
- 238000005086 pumping Methods 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 230000005284 excitation Effects 0.000 claims description 23
- 239000012530 fluid Substances 0.000 claims description 15
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 230000001276 controlling effect Effects 0.000 claims description 4
- 239000002245 particle Substances 0.000 abstract description 7
- 230000001133 acceleration Effects 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012742 biochemical analysis Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005370 electroosmosis Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000000813 microbial effect Effects 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02685—Grating lines having particular arrangements
- H03H9/02724—Comb like grating lines
- H03H9/02732—Bilateral comb like grating lines
Abstract
The invention discloses a micropump device for driving a micro gear by using surface acoustic waves. The piezoelectric pump comprises a piezoelectric substrate and a pump body cavity fixed on the piezoelectric substrate; the pump body chamber is paved on the top end surface of the piezoelectric substrate, and a medium flows from one end to the other end of the pump body chamber in the pump body chamber; the two sides of the two ends of the pump body cavity are respectively provided with an interdigital electrode, a first micro gear and a second micro gear are arranged in the pump body cavity at intervals, the upper cover plate is arranged on the top end face of the pump body cavity after being aligned with the pump body cavity, the two ends of the upper cover plate are respectively provided with a first flow passage opening and a second flow passage opening, and sound surface waves excited by the interdigital electrodes propagate into the pump cavity, so that the micro gears in the pump cavity are driven to rotate by sound energy of the sound surface waves. The invention can realize functions of micro-flow pumping, particle acceleration transmission, pumping direction switching, stepless speed regulation and the like, and has the characteristics of strong robustness, simple operation, simple equipment, high accuracy and the like.
Description
Technical Field
The invention relates to a micropump in the field of microfluidics, in particular to a micropump device for driving a micro gear through surface acoustic waves.
Background
In current scientific research, the development of micro-motors capable of converting energy into millimeter-sized motions has become a very important subject in the research fields of biochemical analysis and the like, and these micro-motor devices can provide unique functions. Microfluidic devices, for example, can be used for quantitative analysis of chemical and microbial samples to reduce analysis time and required sample volume. Pumping is a fundamental function connecting the micro and macro environments, among others, that enables precise manipulation of fluids, including drug delivery, cell separation, biomedical analysis, etc., by specific pumping systems. Micropump is an important component for transporting samples in such a microanalytical system. Thus, micropumps have now become a hotspot for microfluidics research.
While micropump functionality may be achieved by a variety of techniques, including electroosmosis, shock valves, piezoelectric membranes, etc., these techniques often still rely on complex driving devices, greatly limiting the portability of micropumps made based on these techniques.
And one type of micropump suitable for microfluidic experimental platform integration is a surface acoustic wave based micropump device. A surface acoustic wave is a mechanical wave having an amplitude of several nanometers, and a high-frequency acoustic wave is generated by exciting an inverse piezoelectric effect on the surface of a piezoelectric material by applying a high-frequency electric signal to interdigital electrodes, and can be driven using a simple portable circuit. The excited surface acoustic wave is limited to a region within a wavelength thickness range of the surface of the piezoelectric material, and a longitudinal pressure wave with high power density can be formed in the action range for driving a mechanical micro-component, a fluid and other media. For example, surface acoustic waves are often used in applications such as driving microdroplets, regularly arranging suspended particles, and achieving precise separation of different particles. In addition, surface acoustic waves are also commonly used to drive mechanical micro-components in open or closed microfluidic systems, and are thus widely used in fields such as assembly of micro-components and precise manipulation of micro-robots. The acoustic surface wave integrated in the micropump technology is hopeful to integrate the pumping function into a microfluidic experimental platform by utilizing the remote control characteristic and the stepless speed regulation characteristic of a sound field, so that the size, the complexity, the power supply requirement and the system cost of the micropump device can be effectively reduced to improve the portability of the micropump device, and the functions such as remote control in a microchannel and accurate regulation of ultra-low flow velocity are realized, thereby being widely applied to the fields such as medical point diagnosis and the like.
Disclosure of Invention
In order to realize the precise switching of the stepless speed regulation and the pumping direction of the pumping speed of the gear micropump, the invention provides a micropump device for driving a micropump by using the characteristics that the rotation speed of the micropump driven by the surface acoustic wave increases linearly along with the increase of the excitation voltage of an external power supply and the combination of the excitation of interdigital electrodes can be switched in real time. The surface acoustic wave is excited by exciting a group of interdigital electrodes to drive the micro gear to rotate, so that high-speed pumping of fluid medium and particulate medium is realized in the pump body cavity, and switching of pumping directions can be realized by changing the excitation combination of the interdigital electrodes. And by adjusting the excitation voltage input to the interdigital electrode, stepless speed regulation of the gear micropump can be realized. The functions of micro-flow pumping, particle acceleration transmission, pumping direction switching, stepless speed regulation and the like can be realized.
The technical scheme adopted by the invention is as follows:
the invention comprises a piezoelectric substrate, a first micro gear, a second micro gear, a pump body cavity, a gear shaft, an upper cover plate, a first interdigital electrode, a second interdigital electrode, a third interdigital electrode and a fourth interdigital electrode which are fixed on the piezoelectric substrate; the pump body chamber is horizontally paved on the top end surface of the piezoelectric substrate, so that a medium flows from one end of the pump body chamber to the other end of the pump body chamber in the pump body chamber; the first interdigital electrode and the second interdigital electrode are symmetrically distributed on two sides of one end of the pump body cavity, the third interdigital electrode and the fourth interdigital electrode are symmetrically distributed on two sides of the other end of the pump body cavity, two gear shafts are vertically arranged in the pump body cavity between two ends of the pump body cavity along the direction perpendicular to the medium flowing direction at intervals, the first micro gear and the second micro gear are respectively sleeved on the two gear shafts, the upper cover plate is arranged on the top end face of the pump body cavity after being aligned with the pump body cavity, and a first fluid channel opening and a second fluid channel opening for circulating the medium are respectively formed in two ends of the upper cover plate, so that acoustic surface waves excited by the first interdigital electrode, the second interdigital electrode, the third interdigital electrode and the fourth interdigital electrode propagate into the pump cavity, and the micro gear and the second micro gear in the pump cavity are driven to rotate through acoustic energy of the acoustic surface waves.
The first interdigital electrode and the second interdigital electrode are distributed at one end of the pump body cavity, which is provided with the first channel opening.
The first interdigital electrode, the second interdigital electrode, the third interdigital electrode and the fourth interdigital electrode are all electrically connected with an external power supply.
Each interdigital electrode and the piezoelectric substrate form a surface acoustic wave transducer respectively for exciting the surface acoustic wave.
And a gap is reserved between the first micro gear and the second micro gear.
The medium is a fluid medium or a particulate medium.
The opening of the first interdigital electrode, the second interdigital electrode, the third interdigital electrode and the fourth interdigital electrode is controlled mainly by regulating and controlling the excitation voltage of an external power supply.
The beneficial effects of the invention are as follows:
(1) The invention realizes the stepless speed regulation of the pumping rate of the gear micropump by utilizing the characteristic that the rotating speed of the acoustic surface wave driving micro gear increases linearly along with the increase of the excitation voltage of an external power supply;
(2) The device used by the invention is simple and convenient to operate, and can realize the efficient switching of the pumping direction by changing the excitation combination of the interdigital electrodes, thereby realizing the functions of medium pumping direction switching, particle acceleration transmission and the like;
(3) The invention effectively reduces the size, complexity, power supply requirement and system cost of the micropump device, improves the portability of the device, and has the characteristics of easy combination with other microfluidic technologies and low cost.
The invention can excite the acoustic surface waves with different powers by adjusting the excitation voltage input to the interdigital electrode, thereby realizing stepless speed regulation of the gear micropump. The invention can realize functions of micro-flow pumping, particle acceleration transmission, pumping direction switching, pumping speed regulation and the like, and has the characteristics of strong robustness, simple operation, simple equipment, high accuracy and the like.
Drawings
FIG. 1 is an exploded view of the apparatus of the present invention;
FIG. 2 is a schematic view of the overall structure of the device of the present invention;
FIG. 3 is a top view of a first and second interdigital electrodes actuated to rotate a micro-gear;
FIG. 4 is a top view of an opening of a third interdigital electrode and a fourth interdigital electrode driving a micro gear to rotate;
FIG. 5 is a graph of excitation voltage of interdigital electrodes versus rotational speed of a driven micro-gear;
FIG. 6 is a schematic diagram of an embodiment in which a driving fluid medium is pumped from a second flow port to a first flow port;
FIG. 7 is a schematic diagram of an embodiment in which a driving fluid medium is pumped from a first flow port to a second flow port;
FIG. 8 is a schematic diagram of an embodiment of a drive for pumping particulate medium from a first flow port to a second flow port;
fig. 9 is a schematic diagram of an embodiment of a pump driving particulate medium from a first flow port to a second flow port.
In the figure: 1. a piezoelectric base plate, 2, a first micro-gear, 3, a second micro-gear, 4, a pump body chamber, 5, a gear shaft, 6, an upper cover plate, 7, a first runner port, 8, a second runner port, 9, a first interdigital electrode, 10, a second interdigital electrode, 11, a third interdigital electrode, 12, a fourth interdigital electrode, 13, a surface acoustic wave, 14, a fluid medium, 15 and a particulate medium.
Detailed Description
The invention will be described in further detail with reference to the accompanying drawings and specific examples.
As shown in fig. 1 and 2, the device comprises a piezoelectric substrate 1, a first micro gear 2, a second micro gear 3, a pump body cavity 4, a gear shaft 5, an upper cover plate 6, a first interdigital electrode 9, a second interdigital electrode 10, a third interdigital electrode 11 and a fourth interdigital electrode 12 which are fixed on the piezoelectric substrate 1; the medium-shaped pump body cavity 4 is horizontally paved on the top end surface of the piezoelectric substrate 1, so that a medium flows from one end of the pump body cavity 4 to the other end of the pump body cavity 4 in the pump body cavity 4; the first interdigital electrode 9 and the second interdigital electrode 10 are symmetrically distributed on two sides of one end of the pump body cavity 4, the third interdigital electrode 11 and the fourth interdigital electrode 12 are symmetrically distributed on two sides of the other end of the pump body cavity 4, two gear shafts 5 are vertically arranged in the pump body cavity 4 between the two ends of the pump body cavity 4 at intervals along the direction perpendicular to the medium flowing direction, the first micro gear 2 and the second micro gear 3 are respectively sleeved on the two gear shafts 5, the upper cover plate 6 is arranged on the top end surface of the pump body cavity 4 after being aligned with the pump body cavity 4 and used for preventing liquid leakage, and the first runner port 7 and the second runner port 8 for circulating the medium are respectively arranged at the two ends of the upper cover plate 6 and used for injecting or guiding out the fluid medium 14 and the particle medium 15. The acoustic surface wave 13 excited by the first interdigital electrode 9, the second interdigital electrode 10, the third interdigital electrode 11 and the fourth interdigital electrode 12 propagates into the pump body cavity 4, so that the micro gear 2 and the second micro gear 3 in the pump body cavity 4 are driven to rotate by the acoustic energy of the acoustic surface wave 13.
The first interdigital electrode 9 and the second interdigital electrode 10 are distributed at one end of the pump body cavity 4 provided with the first runner port 7.
Wherein, the first interdigital electrode 9, the second interdigital electrode 10, the third interdigital electrode 11 and the fourth interdigital electrode 12 are all electrically connected with an external power supply so as to excite the surface acoustic wave 13.
As shown in fig. 3 and 4, when an external power supply inputs an electric signal to the connected interdigital electrode, the interdigital electrode excites a surface acoustic wave 13 on the piezoelectric substrate 1, and the surface acoustic wave 13 propagates into the pump body chamber 4, so that the micro gear 2 in the propagation direction of the surface acoustic wave 13 is driven to rotate by acoustic energy; when the first interdigital electrode 9 and the second interdigital electrode 10 are started through an external power supply, the surface acoustic wave 13 is transmitted into the pump body cavity 4 along the opening direction of the interdigital electrode, so that the first micro gear 2 is driven to rotate clockwise, and the second micro gear 3 is driven to rotate anticlockwise. When the third interdigital electrode 11 and the fourth interdigital electrode 12 are started by an external power supply, the surface acoustic wave 13 is transmitted into the pump body cavity 4 along the opening direction of the interdigital electrodes, so that the first micro gear 2 is respectively driven to rotate anticlockwise, and the second micro gear 3 is driven to rotate clockwise. Wherein the rotational speeds of the first and second micro gears 2 and 3 are in a linear relationship with the excitation voltage of the external power source. Thus, stepless speed regulation of the micro-gear can be realized by adjusting the excitation voltage of an external power supply.
Each interdigital electrode forms a surface acoustic wave transducer with the piezoelectric substrate 1, respectively, for exciting the surface acoustic wave 13.
A gap is reserved between the first micro gear 2 and the second micro gear 3. As shown in fig. 5, the rotational speeds of the first and second micro gears 2 and 3 are in a linear relationship with the excitation voltage of the external power source. Thus, stepless speed regulation of the micro-gear can be realized by adjusting the excitation voltage of an external power supply.
By regulating and controlling the excitation voltage of an external power supply, the stepless speed regulation of the first micro gear 2 and the second micro gear 3 can be realized, so that the accurate and adjustable pumping rate can be realized. By switching the excitation combination of the interdigital electrodes, the pumping direction of the medium can be switched.
Preferably, the medium is a fluid medium 14 or a particulate medium 15.
Preferably, the opening of the first interdigital electrode 9, the second interdigital electrode 10, the third interdigital electrode 11 and the fourth interdigital electrode 12 is controlled mainly by regulating the excitation voltage of an external power supply.
The working process of the micro pump device for driving the micro gear by the surface acoustic wave specifically comprises the following steps:
as shown in fig. 6 and 8, medium is injected into the pump body cavity 4 through the second fluid passage opening 8, so that the medium flows to the middle part of the pump body cavity 4, then the first interdigital electrode 9 and the second interdigital electrode 10 are started to excite the surface acoustic wave 13, and the excited surface acoustic wave 13 is transmitted into the pump body cavity 4 to drive the first micro gear 2 to rotate clockwise and drive the second micro gear 3 to rotate anticlockwise; the high speed rotation of the first and second micro-gears 2, 3 then further drives the rapid movement of the media in a direction approaching the first flow port 7, thereby achieving rapid pumping of the fluid medium 14 or particulate medium 15. By regulating the excitation voltage of an external power supply, stepless speed regulation of the micro gear can be realized, so that the pumping rate can be accurately regulated.
As shown in fig. 7 and 9, medium is injected into the pump body chamber 4 from the first runner 7, so that the medium flows to the middle part of the pump body chamber 4, then the third interdigital electrode 11 and the fourth interdigital electrode 12 are started to excite the surface acoustic wave 13, and the excited surface acoustic wave 13 is transmitted into the pump body chamber 4 to drive the first micro gear 2 to rotate anticlockwise and drive the second micro gear 3 to rotate clockwise; the high speed rotation of the first and second micro gears 2, 3 then further drives the rapid movement of the medium in a direction approaching the second flow port 8, causing the medium to rapidly pump in the opposite direction.
In summary, the invention can realize stepless speed regulation of the micro gear by regulating and controlling the excitation voltage of the external power supply, thereby realizing accurate and adjustable pumping rate. By switching the excitation combination of the interdigital electrodes, the switching of the pumping direction can be realized. The embodiment of the invention realizes stepless speed regulation and pumping direction switching of the gear micropump for fluid and particulate media under the drive of the surface acoustic wave, and has the advantages of strong robustness, simple and convenient operation, simple equipment and high accuracy.
Claims (6)
1. A surface acoustic wave driven micro-pump device comprising a micro-gear, characterized in that: the piezoelectric micro-gear pump comprises a piezoelectric substrate (1) and a first micro-gear (2), a second micro-gear (3), a pump body cavity (4), a gear shaft (5), an upper cover plate (6), a first interdigital electrode (9), a second interdigital electrode (10), a third interdigital electrode (11) and a fourth interdigital electrode (12) which are fixed on the piezoelectric substrate (1);
the pump body cavity (4) is horizontally paved on the top end surface of the piezoelectric substrate (1), so that a medium flows from one end of the pump body cavity (4) to the other end of the pump body cavity (4) in the pump body cavity (4); the first interdigital electrode (9) and the second interdigital electrode (10) are symmetrically distributed on two sides of one end of the pump body cavity (4), the third interdigital electrode (11) and the fourth interdigital electrode (12) are symmetrically distributed on two sides of the other end of the pump body cavity (4), two gear shafts (5) are vertically arranged in the pump body cavity (4) between the two ends of the pump body cavity (4) along the direction perpendicular to the medium flow at intervals, the first micro gear (2) and the second micro gear (3) are sleeved on the two gear shafts (5) respectively, an upper cover plate (6) is aligned with the pump body cavity (4) and then is arranged on the top end face of the pump body cavity (4), and a first runner port (7) and a second runner port (8) for circulating medium are respectively formed at two ends of the upper cover plate (6), so that acoustic surface waves (13) excited by the first interdigital electrode (9), the second interdigital electrode (10), the third interdigital electrode (11) and the fourth interdigital electrode (12) are transmitted into the pump body cavity (4) at intervals, and the acoustic waves (4) are driven by the first micro gear (3) and the second micro gear (4) to rotate;
the rotating speeds of the first micro gear (2) and the second micro gear (3) are in linear relation with the excitation voltage of an external power supply, stepless speed regulation of the micro gears is realized by adjusting the excitation voltage of the external power supply, and the pumping direction of a medium is switched by switching the excitation combination of the interdigital electrodes;
a gap is reserved between the first micro gear (2) and the second micro gear (3).
2. A surface acoustic wave driven micro-pump apparatus as defined in claim 1, wherein: the first interdigital electrode (9) and the second interdigital electrode (10) are distributed at one end of the pump body cavity (4) provided with the first runner port (7).
3. A surface acoustic wave driven micro-pump apparatus as defined in claim 1, wherein: the first interdigital electrode (9), the second interdigital electrode (10), the third interdigital electrode (11) and the fourth interdigital electrode (12) are electrically connected with an external power supply.
4. A surface acoustic wave driven micro-pump apparatus as defined in claim 1, wherein: each interdigital electrode and the piezoelectric substrate (1) form a surface acoustic wave transducer for exciting a surface acoustic wave (13).
5. A surface acoustic wave driven micro-pump apparatus as defined in claim 1, wherein: the medium is a fluid medium (14) or a particulate medium (15).
6. A surface acoustic wave driven micro-pump apparatus as defined in claim 1, wherein: the opening of the first interdigital electrode (9), the second interdigital electrode (10), the third interdigital electrode (11) and the fourth interdigital electrode (12) is controlled mainly by regulating and controlling the excitation voltage of an external power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210932064.XA CN115263714B (en) | 2022-08-04 | 2022-08-04 | Micropump device for driving micro gear by acoustic surface wave |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210932064.XA CN115263714B (en) | 2022-08-04 | 2022-08-04 | Micropump device for driving micro gear by acoustic surface wave |
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| Publication Number | Publication Date |
|---|---|
| CN115263714A CN115263714A (en) | 2022-11-01 |
| CN115263714B true CN115263714B (en) | 2024-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210932064.XA Active CN115263714B (en) | 2022-08-04 | 2022-08-04 | Micropump device for driving micro gear by acoustic surface wave |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1214418A (en) * | 1997-09-16 | 1999-04-21 | 詹姆斯B·蒂本 | Hydraulic system and pump |
| US6010316A (en) * | 1996-01-16 | 2000-01-04 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic micropump |
| JP2006090155A (en) * | 2004-09-21 | 2006-04-06 | Fuji Xerox Co Ltd | Micro pump |
| CN102418684A (en) * | 2011-08-19 | 2012-04-18 | 中国科学院上海微系统与信息技术研究所 | Modular assembled micropump as well as use method and application thereof |
| CN202971121U (en) * | 2012-12-07 | 2013-06-05 | 胡军 | Piezoelectric micro pump |
| CN103573576A (en) * | 2013-11-21 | 2014-02-12 | 西南交通大学 | Magnetohydrodynamic micropump |
| CN105020121A (en) * | 2015-07-24 | 2015-11-04 | 浙江大学 | Acoustically-driven micro pump |
| CN209818292U (en) * | 2019-01-29 | 2019-12-20 | 毛海燕 | Miniature gear pump |
| CN112963326A (en) * | 2020-10-19 | 2021-06-15 | 天津大学 | Acoustic fluid micropump based on micro electro mechanical technology |
-
2022
- 2022-08-04 CN CN202210932064.XA patent/CN115263714B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6010316A (en) * | 1996-01-16 | 2000-01-04 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic micropump |
| CN1214418A (en) * | 1997-09-16 | 1999-04-21 | 詹姆斯B·蒂本 | Hydraulic system and pump |
| JP2006090155A (en) * | 2004-09-21 | 2006-04-06 | Fuji Xerox Co Ltd | Micro pump |
| CN102418684A (en) * | 2011-08-19 | 2012-04-18 | 中国科学院上海微系统与信息技术研究所 | Modular assembled micropump as well as use method and application thereof |
| CN202971121U (en) * | 2012-12-07 | 2013-06-05 | 胡军 | Piezoelectric micro pump |
| CN103573576A (en) * | 2013-11-21 | 2014-02-12 | 西南交通大学 | Magnetohydrodynamic micropump |
| CN105020121A (en) * | 2015-07-24 | 2015-11-04 | 浙江大学 | Acoustically-driven micro pump |
| CN209818292U (en) * | 2019-01-29 | 2019-12-20 | 毛海燕 | Miniature gear pump |
| CN112963326A (en) * | 2020-10-19 | 2021-06-15 | 天津大学 | Acoustic fluid micropump based on micro electro mechanical technology |
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| CN115263714A (en) | 2022-11-01 |
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