CN103511230B - A kind of bicavate electric actuation valve free pump - Google Patents
A kind of bicavate electric actuation valve free pump Download PDFInfo
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- CN103511230B CN103511230B CN201310465357.2A CN201310465357A CN103511230B CN 103511230 B CN103511230 B CN 103511230B CN 201310465357 A CN201310465357 A CN 201310465357A CN 103511230 B CN103511230 B CN 103511230B
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Abstract
A kind of bicavate electric actuation valve free pump, comprises drive membrane and Micropump; Micropump is divided into the pump housing and pump cover; The pump housing is divided into upper pump casing (2) and lower pump body (1); The two ends, left and right of upper pump casing (2) and lower pump body (1) all have snout cavity and outlet plenum, and be upper pump chamber (9) and lower pump chamber (18) between snout cavity and outlet plenum, upper pump chamber (9) is relative with lower pump chamber (18).Pump cover is divided into pump cover (3), middle pump cover (13) and lower pump cover (15); Upper pump casing (2) is arranged between pump cover (3) and pump cover (13), and lower pump body (1) is arranged between pump cover (13) and lower pump cover (15); Upper pump chamber (9) is communicated with snout cavity with outlet plenum with diffusion runner by contracted channel with lower pump chamber (18); The snout cavity of upper pump casing (2) and the outlet plenum of lower pump body (1) are interconnected by middle level aperture (14); Three pieces of drive membrane cover the macropore on pump cover (3), middle pump cover (13) and lower pump cover (15) respectively.
Description
Technical field
The present invention relates to a kind of feedway of micro-flow liquid.
Background technique
Micrometeor system can the flow of accurate detection and control microlitre magnitude per minute.As the micropump of these system core parts, become the study hotspot of recent domestic scholar.Micropump, because of energy infusion quantitative liquid, controls infusion velocity, thus is used for infusion requirement accurately, the specific drugs that input speed is stable.As cardiotonic, vasoactive agent etc., thus widely use in biopharmacy.Such as, diabetes patient was the insulin of shot larger dose in the past, and this not only causes waste, and the drug action time is also shorter, and therefore pole needs the dropper continued that a kind of flow can micro-ly control.In this kind of flow precise controlling box and detection system, microminiature pump is a primary element.
Micropump has valve Micropump and valve free pump two kinds according to being divided into or without movable valve block, and the research outside Present Domestic mainly concentrates on valve free pump.Because compared valve Micropump, there are not mechanical movable parts in valve free pump, and have structure and preparation process simple, intensity is high, and the life-span is long, not easily blocks liquid, complete function, is easy to control, the advantages such as reliability is high, and processing compatibility is good, and cost is low.Wherein existing valve free pump mainly comprises: single chamber simple oscialltor valve free pump, single-cavity double-oscillator valve free pump, dual chamber valve free pump in parallel etc.In the micro-pump performance of raising, increase output flow aspect, two-chamber valveless Micropump will be far superior to single chamber valve free pump.
About the valve free pump of dual chamber structure, achieve part achievement in research both at home and abroad: the people such as nineteen ninety-five and A.Olsson in 1996 start the valve free pump attempting manufacturing two-chamber, two pump chambers are parastate, all adopt Piezoelectric Driving, driving phase place is contrary, greatly can reduce the flow pulsation that Micropump exports like this.Then, the people such as Olsson adopts again isotropy wet etching and reactive ion etching to process with silicon to be the two-chamber Micropump of agent structure respectively.2004, the Jin-HoKim of Myongji university of Korea S, C.J.Kang and Yong-SangKim developed a kind of micro valveless pump using piezo-electric sheet to drive, and two pump chambers are also parallel.This Micropump top pump housing adopts dimethyl silicone polymer (PDMS), utilizes micro-duplication process to make.The displacement of pumping diaphragm increases along with piezo-electric sheet being executed alive rising, and thus the flow velocity of pump also increases gradually.Dalian University of Technology Chen Yi scholar devises double-cavity parallel formula Valveless Piezoelectric Micropump for 2009, and Micropump is made up of two pump chambers in parallel, and each pump chamber has corresponding contraction/diffusing tube pair, and to realize the one-way flowed, two pump chambers share Piexoelectric actuators.Piezoelectric vibrator, under alternating voltage drives, does and up and down reciprocatingly vibrates.With buffer cavity, the water intake of two Micropumps in parallel, water outlet are communicated with respectively by runner, just define parallel pump structure.From the working procedure of double-cavity parallel formula valve free pump, it has secondary imbibition, secondary pump liquid.And for once imbibition in a vibrational period of single chamber valve free pump, Primary pumps liquid.Therefore the efficiency of double-cavity parallel formula valve free pump is higher in theory.
The valveless film type Micropump that patent CN1442612A proposes is a kind of two-chamber three vibrator integratedization series connection valve free pump.Compare with dual chamber Micropump in parallel, the change of each pump chamber volume of two-chamber three vibrator integratedization series connection valve free pump is driven jointly by two oscillators, therefore the amplitude of Volume Changes is larger, and the dead volume reduced in pump chamber, flow is increased dramatically, and is approximately the twice of parallel double-chamber Micropump.Additionally by intermediate coat, upper and lower two cavitys are linked into an integrated entity, make micro-pump structure compact, thus save space, adapt to microminiaturized needs.Its film adopts Piezoelectric Driving film.
But this structure is monofilm structure, upper and lower cavity shares a film, and its flow is affected, and can not make full use of its cavity space capacity.
Patent CN101042130A is also the two-chamber three vibrator integratedization series connection valve free pump of monofilm structure based on the Micropump that the acrotism dynamic formula of Electromagnetic Drive exports, but what adopt is the mode of Electromagnetic Drive film.
Xia Dongmei, the single chamber valve free pump (XI AN JIAOTONG UNIVERSITY Subject Index the 43rd volume the 7th phase p:92 ~ 95.2009 year July) driven based on electric actuation intellectual material that Pang Xuanming, Chen Xiaonan, Li Bowen propose, be primary structural material with macromolecule, and bio-compatibility is better.But due to defect intrinsic on single cavity structure, it also exists some shortcomings: because monofilm driving force is limited, dead volume is comparatively large, and flow exports less than normal, and working efficiency is lower.
Summary of the invention
The object of the invention is to overcome existing valve free pump output capability lower, easily produce the shortcoming of Periodic pulsing flow, propose a kind of bicavate electric actuation valve free pump.The present invention can alleviate the pulsating nature of liquid stream, improves existing valve free pump inefficiency, there is the problem of pulsating nature interference.Original volume of the present invention and quiet volume is smaller, compression ratio is large, reproducibility is good, reliability is high.
Technical solution of the present invention is as follows:
Bicavate electric actuation valve free pump of the present invention comprises drive membrane and Micropump.Described Micropump is divided into the pump housing and pump cover two-part.The described pump housing is divided into upper pump casing and lower pump body.The material of the described pump housing is silicon chip or thick film photoresistance SU-8.The two ends, left and right of upper pump casing and lower pump body all have snout cavity and outlet plenum, are upper pump chamber and lower pump chamber between snout cavity and outlet plenum.Upper pump chamber is relative with lower pump chamber, and upper and lower pump chamber is communicated with snout cavity with outlet plenum with diffusion runner by contracted channel.
Described pump cover is divided into three, upper, middle and lower pump cover, and the material of described pump cover is pyrex7740 glass or thick film photoresistance SU-8.Upper pump casing is between upper pump cover and middle pump cover, and lower pump body is between middle pump cover and lower pump cover, and pump cover and pump housing interval overlapping like this, form Micropump.Upper pump cover has exit orifice, middle pump cover has middle level aperture, lower pump cover has import aperture.The snout cavity of upper pump casing and the outlet plenum of lower pump body are interconnected by the middle level aperture on middle pump cover.Upper pump cover, middle pump cover and lower pump cover also have macropore, three pieces of drive membrane cover the macropore on pump cover, middle pump cover and lower pump cover respectively, first drive membrane covers the macropore on upper pump cover, the macropore during the second drive membrane covers on pump cover, and the 3rd drive membrane covers the macropore on lower pump cover.
Working principle and the working procedure of bicavate electric actuation valve free pump of the present invention are as follows:
When convex under the first drive membrane and the 3rd drive membrane becomes, during the second drive membrane epirelief deformation, the volume of lower pump chamber becomes large, liquid enters into lower pump body second snout cavity by described import aperture, spread runner through lower pump body second and enter into lower pump chamber, the volume meanwhile going up pump chamber diminishes, liquid in upper pump chamber enters the first outlet plenum of upper pump casing by upper pump casing first contracted channel, then under the first drive membrane and the 3rd drive membrane, convex becomes epirelief deformation, second drive membrane becomes lower convex from epirelief deformation and becomes, the volume of lower pump chamber diminishes, the liquid of lower pump chamber enters the second outlet plenum of lower pump body by the second contracted channel of lower pump body, the volume meanwhile going up pump chamber becomes large, the liquid of upper pump casing first snout cavity spreads runner by upper pump casing first and enters in upper pump chamber, the liquid of lower pump body outlet plenum passes described middle level aperture due to pressure reduction reason and enters into the liquid supplementing in upper pump casing first snout cavity and flow to upper pump chamber.Drive membrane is under the control of voltage signal, and continuous repeated deformation, reaches with this object that continuous pump goes out liquid.
Compare with dual chamber Micropump in parallel, the change of each pump chamber volume of two-chamber valveless Micropump of the present invention is driven jointly by three drive membrane, and therefore the amplitude of Volume Changes is comparatively large, and reduces the dead volume in pump chamber, flow is increased dramatically, and is approximately the twice of parallel double-chamber Micropump.
In addition, the diffusion runner/contractive set road junction of upper pump chamber of the present invention and lower pump chamber is designed to by a total runner delivering fluids or conveying fluid.The benefit of such design is: when upper pump chamber is in supply model, namely fluid is sucked, lower pump chamber is in pumping mode, when namely carrying fluid, the pressure of fluid is sucked and flow is greater than lower pump chamber head pressure and flow due to upper pump chamber, therefore a part for the liquid of lower pump chamber backflow is sucked by upper pump chamber again, only has sub-fraction to be back in the snout cavity of lower pump body.In like manner, when upper pump chamber is in pumping mode, namely fluid is carried, lower pump chamber is in supply model, when namely sucking fluid, the lower pump chamber liquid of discharging can a part with going on pump chamber backflow and will suck liquid, also only has sub-fraction to be back in upper pump casing outlet plenum, so it reduces capacity of reflux to a certain extent.
The present invention makes drive membrane vibrate by the change of control voltage signal.Ripple voltage is applied to adopt electroactive polymer film to make three pieces of drive membrane on, make drive membrane up-down vibration, the supply model of valve free pump and pump pattern alternation.Change the flow of the frequency adjustment Micropump of square wave direct current ripple voltage, the frequency of square wave direct current ripple voltage is exactly the frequency of okperation of Micropump.The drive displacement decline rate of square wave direct current ripple voltage is the slowest, and the driving successful of DC pulse moving voltage is better than alternating voltage, not only stablizes, and deformation time is longer, and driver frequency is higher, and deformation process is stablized.
From analyzing above, output flow and the efficiency of valve free pump of the present invention are all increased dramatically.
The present invention also tool has the following advantages:
1. present invention employs two-chamber three vibrator integratedization structure, by the change of control voltage signal, drive membrane is vibrated, the volume of two cavitys is alternately changed, to reach the output of liquid.There is structure simple, flow and pressure large, the features such as energy consumption is low.
2. volume of the present invention is little, and cost is low, use material harmless, be applicable to medically medicine dispensing, the aspects such as drug delivery.
Accompanying drawing explanation
Fig. 1 is the sectional view of structure of the present invention, in figure: pump cover, 15 times pump covers in pump cover, 13 on pump chamber on 1 lower pump body, 2 upper pump casings, 9,18 times pump chambers, 3,5 first outlet plenums, 16 second outlet plenums, 12 first snout cavities, 23 second snout cavities, 6 first contracted channels, 11 first diffusion runner, 17 second contracted channels, 22 second contracted channels, 4 exit orifice, 14 middle level apertures, 24 import apertures, macropore on macropore in macropore on 7 on pump cover 3,10 on pump cover 13,21 times pump covers 15,8 first drive membrane, 19 second drive membrane, 20 the 3rd drive membrane;
Fig. 2 is flow direction flow diagram of the present invention;
Fig. 3 is external view of the present invention;
Fig. 4 is STRUCTURE DECOMPOSITION figure of the present invention;
Fig. 5 is control circuit connection diagram of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
As shown in Figure 1, the present invention includes drive membrane and Micropump two-part.Described Micropump is divided into the pump housing and pump cover two-part, and the described pump housing is divided into upper pump casing 2 and lower pump body 1.Described pump cover is divided into pump cover 3, middle pump cover 13 and lower pump cover 15.Upper pump casing 2 is between upper pump cover 3 and middle pump cover 13, and lower pump body 1 is between middle pump cover 13 and lower pump cover 15, and pump cover and pump housing interval overlapping like this, form Micropump.Upper pump cover 3 center position has macropore 7, and the left end of macropore 7 is exit orifice 4, and middle pump cover 13 middle has macropore 10, and the right-hand member of macropore 10 is middle level apertures 14, and lower pump cover 15 middle has macropore 21, and the left end of macropore 21 is import apertures 24.First drive membrane 8 utilizes himself adhesive paste on upper pump casing 2, and is clipped between upper pump casing 2 and pump cover 3, in covering pump cover 3 macropore 7 and seal, isolation is extraneous also plays seal action; Second drive membrane 19 utilizes himself adhesive paste on middle pump cover 13, and is clipped between middle pump cover 13 and upper pump casing 2, in covering pump cover 13 macropore 10 and seal, pump chamber 9 and lower pump chamber 18 in isolation; 3rd drive membrane 20 utilizes himself adhesive paste on lower pump cover 15, and is clipped between lower pump cover 15 and lower pump body 1, covers the macropore 21 of lower pump cover 15 and seals, and plays the effect in sealing and the isolation external world.
The right-hand member of upper pump casing 2 is the first snout cavity 12, and left end is the first outlet plenum 5, and centre is upper pump chamber 9, and upper pump chamber 9 spreads runner 11 by the first contracted channel 6, first and is communicated with the first snout cavity 12 with the first outlet plenum 5 respectively.The left end of lower pump body 1 is the second snout cavity 23, and right-hand member is the second outlet plenum 16, and centre is lower pump chamber 18.Upper pump chamber 9 is relative with lower pump chamber 18.Lower pump chamber 18 spreads runner 22 by the second contracted channel 17, second and is communicated with the second snout cavity 23 with the second outlet plenum 16 respectively.
Pump chamber 9 on the neutral position of upper pump casing 2 is, the left side of upper pump chamber 9 is first contracted channel 6 and first outlet plenums 5, and the right side of upper pump chamber 9 is first diffusion runner 11 and first snout cavities 12.First contracted channel 6 and the first diffusion runner 11 are taper.One end that first contracted channel 6 diameter is less is connected with upper pump chamber 9, and one end that the first contracted channel 6 diameter is larger is connected with the first outlet plenum 5; One end that first diffusion runner 11 diameter is larger is connected with upper pump chamber 9, and one end that the first diffusion runner 11 diameter is less is connected with the first snout cavity 12.Lower pump chamber 18 is positioned at the middle of lower pump body 1, and the left side of lower pump chamber 18 is second diffusion runner 22 and second snout cavities 23, and the right side of lower pump chamber 18 is second contracted channel 17 and second outlet plenums 16.Second diffusion runner 22 and the second contracted channel 17 are taper.One end that second diffusion runner 22 diameter is larger is connected with lower pump chamber 18, and one end that the second diffusion runner 22 diameter is less is connected with the second outlet plenum 23; One end that second contracted channel 17 diameter is less is connected with lower pump chamber 18, and one end that the second diffusion runner 17 diameter is larger is connected with the second snout cavity 16.Upper pump chamber 9 is communicated with the exit orifice 4 of the first outlet plenum 5 with upper pump cover 3 by the first contracted channel 6; Upper pump chamber 9 is connected with the aperture 14 on middle pump cover 13 with the first snout cavity 12 by the first diffusion runner 11.Lower pump chamber 18 is communicated with the import aperture 24 on lower pump cover 15 with the second snout cavity 23 by the second diffusion runner 22, and lower pump chamber 18 is communicated with the middle level aperture 14 on middle pump cover 13 with the second outlet plenum 16 by the second contracted channel 17.Upper pump casing 2 is communicated with by the middle level aperture 14 on middle pump cover 13 with lower pump body 1.The angle of taper that first contracted channel 6, second spreads runner 11, second contracted channel 17, second diffusion runner 22 is all identical.
Upper pump cover 3, middle pump cover 13 and lower pump cover 15 have macropore 7,10,21, and the position of three macropores 7,10,21 is just to upper pump chamber 9 and lower pump chamber 18, and upper pump chamber 9 is relative with lower pump chamber 18.First drive membrane 8 is clipped between pump cover 3 and upper pump casing 2, is positioned at the downside of the macropore 7 of pump cover 3, in covering pump cover 3 macropore 7 and seal, separate pump chamber 9 and the external world; Second drive membrane 19 is clipped between middle pump cover 13 and upper pump casing 2, is arranged in the upside of the macropore 10 of pump cover 13, the macropore 10 of pump cover 13 in covering, separates pump chamber 9 and lower pump chamber 18; 3rd drive membrane 20 is clipped between lower pump cover 15 and lower pump body 1, is positioned at the upside of the macropore 21 of lower pump cover 15, covers the macropore 21 of lower pump cover 15, isolated lower pump chamber 18 and the external world; First drive membrane 8, second drive membrane 19 and the 3rd drive membrane 20, both just to upper pump chamber 9 and lower pump chamber 18, are distinguished just to the macropore 21 of the macropore 7 of upper pump cover 3, the macropore 10 of middle pump cover 13 and lower pump cover 15 again.Described drive membrane is the electroactive polymer film be made up of electroactive polymer (electroactivepolymer, EAP).
Liquid this Micropump the runner process of circulation as shown in Figure 2:
Liquid enters into the second snout cavity 23 by import aperture 24, lower pump chamber 18 is entered into through the second diffusion runner 22, the second outlet plenum 16 is entered again through the second contracted channel 17, the liquid entering the second outlet plenum 16 enters the first snout cavity 12 by middle level aperture 14, upper pump chamber 9 is entered through the first diffusion runner 11, enter the first outlet plenum 5 through the first contracted channel 6 again, then flow out Micropump by exit orifice 4.
The present invention controls the concavo-convex deformation of drive membrane by additional control signal.The Placement of control circuit as shown in Figure 5.The present invention adopts the PLC of Mitsubishi to drive relay to produce pulse signal, the high voltage direct current generator be connected with relay is made to produce square wave direct current ripple voltage, then ripple voltage is applied in the three pieces of drive membrane adopting electroactive polymer film to make, make drive membrane up-down vibration, the supply model of valve free pump and pump pattern alternation.Change the flow of the frequency adjustment Micropump of square wave direct current ripple voltage, namely the frequency of square wave direct current ripple voltage is the frequency of okperation of Micropump.The drive displacement decline rate of square wave direct current ripple voltage is the slowest, and the driving successful of DC pulse moving voltage is better than alternating voltage, and not only the steady-state deformation time is longer, and driver frequency is higher, and deformation process is stablized.
Specific works principle of the present invention as shown in Figure 2.First drive membrane 8, second drive membrane 19 and the 3rd drive membrane 20 coat conductive paste, lead-in wire is attached between conductive paste and drive membrane, connect high-pressure generator by lead-in wire.Under first, second, third 3 drive membrane 8,19,20 are connected in parallel on same square wave high-pressure generator, first drive membrane 8 and the 3rd drive membrane 20 apply same square-wave voltage, the first drive membrane 8 and the 3rd drive membrane 20 is made to keep same frequency, the concavo-convex deformation of equidirectional, second drive membrane 19 applies the voltage contrary with the 3rd drive membrane 20 voltage both positive and negative polarity with the first drive membrane 8, make the frequency of the second drive membrane 10 and first, the 3rd drive membrane identical, realize the concavo-convex deformation of different direction.Periodically shake with the up-down vibration of first, second, third 3 drive membrane, make increase and the minimizing of the volume generating period of pump chamber 9 and lower pump chamber 18.
Hypothesis driven film positive voltage at present convex become, the epirelief deformation when negative voltage.Control circuit applies voltage signal to drive membrane, first drive membrane 8 and the 3rd drive membrane 20 are in the convex change at present of identical positive voltage, the epirelief deformation when negative voltage of second drive membrane 19, as shown in Figure 2 a, this at present pump chamber 18 volume increase, the volume of upper pump chamber 9 reduces, and lower pump chamber 18 is in suction condition, and upper pump chamber 9 is in the state of pumping.After half period, the positive voltage be added in the first drive membrane 8 and the 3rd drive membrane 20 becomes negative voltage, the negative voltage of the second drive membrane 19 becomes positive voltage, first drive membrane 8, the 3rd drive membrane 20 are become by lower convex and change epirelief deformation into, second drive membrane 19 changes lower convex into by epirelief deformation and becomes, as shown in Figure 2 b, this at present pump chamber 18 volume reduce, be in the state of pumping, the volume of upper pump chamber 9 increases, be in suction condition, complete the change of one-period to this, enter into the voltage of next cycle.Thus by changing the direction of control signal, the fluid that lower pump body 1 is exported inflow upper pump casing 2, achieves pressure and the large Micropump of flow.
Detailed process is as follows, liquid enters the second snout cavity 23 of lower pump body 1 from the import aperture 24 of lower pump cover 15, enter in lower pump chamber 18 by the second diffusion runner 22, when the first, the 3rd drive membrane 8,20 times convexs become, during the second drive membrane 19 epirelief deformation, the volume of lower pump chamber 18 becomes large, and the volume of upper pump chamber 9 diminishes, as shown in Figure 2 a, the input flow rate that runner 22 is spread in the taper second setting the pump housing 1 left end is Q
1, the output flow of taper second contracted channel 17 of lower pump body 1 right-hand member is Q
2, according to the flow characteristic of tapered runner inner fluid, flow Q now
1>Q
2, the net flow of generation is △ Q, and fluid flows into from the import aperture 24 of lower pump cover 15.When the first, the 3rd drive membrane 8,20 epirelief deformation, when the second drive membrane 19 times convex becomes, the volume of lower pump chamber 18 diminishes, and the volume of upper pump chamber 9 becomes large, as shown in Figure 2 b, if the output flow of taper first contracted channel 6 of upper pump casing 2 left end is Q
3, it is Q that the flow that runner 11 exports is spread in the taper first of upper pump casing 2 right-hand member
4, according to the flow characteristic of tapered runner inner fluid, flow Q now
3>Q
4, the net flow of generation is △ Q, and fluid flows out from the exit orifice 4 of upper pump cover 2.Control signal makes the first, the 3rd drive membrane 8,20 and second drive membrane 19 produce different concavo-convex deformed state at synchronization, within an operation cycle, change control signal positive and negative, the fluid inflow upper pump casing 2 that lower pump body 1 is exported, achieve pressure and the large Micropump of flow.The vibration velocity of film can be changed by the frequency changing control signal, thus also can change the output flow of Micropump.
Claims (9)
1. a bicavate electric actuation valve free pump, is characterized in that: described Micropump comprises drive membrane and Micropump two-part; Described Micropump is divided into the pump housing and pump cover; The described pump housing is divided into upper pump casing (2) and lower pump body (1); The two ends, left and right of upper pump casing (2) and lower pump body (1) all have snout cavity and outlet plenum, be upper pump chamber (9) and lower pump chamber (18) between snout cavity and outlet plenum, upper pump chamber (9) is relative with lower pump chamber (18); Described pump cover is divided into pump cover (3), middle pump cover (13) and lower pump cover (15); Upper pump casing (2) is arranged between pump cover (3) and pump cover (13), and lower pump body (1) is arranged between pump cover (13) and lower pump cover (15); Upper pump chamber (9) is communicated with snout cavity with outlet plenum with diffusion runner by contracted channel with lower pump chamber (18); Upper pump cover (3) has exit orifice (4), middle pump cover (13) has middle level aperture (14), lower pump cover (15) has import aperture (24); The snout cavity of upper pump casing (2) and the outlet plenum of lower pump body (1) are interconnected by the middle level aperture (14) on middle pump cover (13); Upper pump cover (3), middle pump cover (13) and lower pump cover (15) also have macropore, and three pieces of drive membrane cover the macropore on pump cover (3), middle pump cover (13) and lower pump cover (15) respectively.
2. according to a kind of bicavate electric actuation valve free pump according to claim 1, it is characterized in that: the center position of described upper pump cover (3) has macropore (7), the left end of macropore (7) is exit orifice (4), the center position of middle pump cover (13) has macropore (10), the right-hand member of macropore (10) is middle level aperture (14), the center position of lower pump cover (15) has macropore (21), and the left end of macropore (21) is import aperture (24); First drive membrane (8) is pasted on upper pump casing (2), is positioned between upper pump casing (2) and upper pump cover (3), in covering pump cover (3) macropore (7) and seal; Second drive membrane (19) utilizes himself adhesive paste on middle pump cover (13), between middle pump cover (13) and upper pump casing (2), in covering pump cover (13) macropore (10) and seal; 3rd drive membrane (20) utilizes himself adhesive paste on lower pump cover (15), between lower pump cover (15) and lower pump body (1), cover the macropore (21) of lower pump cover (15) and seal.
3. according to a kind of bicavate electric actuation valve free pump according to claim 1, it is characterized in that: the right-hand member of described upper pump casing (2) is the first snout cavity (12), left end is the first outlet plenum (5), and centre is upper pump chamber (9); Upper pump chamber (9) is communicated with the first outlet plenum (5) by the first contracted channel (6) on the left of it, is communicated with the first snout cavity (12) by the first diffusion runner (11) on the right side of it; The left end of lower pump body (1) is the second snout cavity (23), and right-hand member is the second outlet plenum (16), and centre is lower pump chamber (18); Lower pump chamber (18) is communicated with the second outlet plenum (16) by the second contracted channel (17) on the right side of it, is communicated with the second snout cavity (23) by the second diffusion runner (22) on the left of it.
4. according to a kind of bicavate electric actuation valve free pump according to claim 3, it is characterized in that: described the first contracted channel (6) and the first diffusion runner (11) are taper; One end that first contracted channel (6) diameter is less is connected with upper pump chamber (9), and one end that the first contracted channel (6) diameter is larger is connected with the first outlet plenum (5); One end that first diffusion runner (11) diameter is larger is connected with upper pump chamber (9), and one end that the first diffusion runner (11) diameter is less is connected with the first snout cavity (12); The second described diffusion runner (22) and the second contracted channel (17) are taper; One end that second diffusion runner (22) diameter is larger is connected with lower pump chamber (18), and one end that the second diffusion runner (22) diameter is less is connected with the second outlet plenum (23); One end that second contracted channel (17) diameter is less is connected with lower pump chamber (18), and one end that the second diffusion runner (17) diameter is larger is connected with the second snout cavity (16); The angle of taper that first contracted channel (6), first spreads runner (11), the second contracted channel (17) and second spreads runner (22) is all identical.
5. according to a kind of bicavate electric actuation valve free pump according to claim 1, it is characterized in that: described upper pump chamber (9) is communicated with the exit orifice (4) of upper pump cover (3) with the first outlet plenum (5) by the first contracted channel (6); Upper pump chamber (9) is connected with the middle level aperture (14) on middle pump cover (13) with the first snout cavity (12) by the first diffusion runner (11); Lower pump chamber (18) is communicated with the import aperture (24) on lower pump cover (15) with the second snout cavity (23) by the second diffusion runner (22), and lower pump chamber (18) is communicated with the middle level aperture (14) on middle pump cover (13) with the second outlet plenum (16) by the second contracted channel (17); Upper pump casing (2) is communicated with by the middle level aperture (14) on middle pump cover (13) with lower pump body (1).
6. according to a kind of bicavate electric actuation valve free pump according to claim 1, it is characterized in that: described drive membrane (8,19,20) adopts electroactive polymer film.
7. according to a kind of bicavate electric actuation valve free pump according to claim 1, it is characterized in that: the material of described pump cover is pyrex7740 glass or thick film photoresistance SU-8.
8. according to a kind of bicavate electric actuation valve free pump according to claim 1, it is characterized in that: the material of the described pump housing is silicon chip or thick film photoresistance SU-8.
9. according to a kind of bicavate electric actuation valve free pump according to claim 1, it is characterized in that: the deformation direction being changed drive membrane by the change controlling the voltage be applied in the drive membrane described in three pieces, thus change the volume of upper and lower pump chamber, pump liquid.
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| CN201310465357.2A CN103511230B (en) | 2013-10-08 | 2013-10-08 | A kind of bicavate electric actuation valve free pump |
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| CN201310465357.2A CN103511230B (en) | 2013-10-08 | 2013-10-08 | A kind of bicavate electric actuation valve free pump |
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| CN106837759A (en) * | 2017-03-10 | 2017-06-13 | 广东捷成科创电子股份有限公司 | A kind of three chamber supercharging air pumps |
| CN107339228A (en) * | 2017-06-26 | 2017-11-10 | 歌尔股份有限公司 | Miniflow pumping configuration, system and preparation method |
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| CN107605713A (en) * | 2017-10-26 | 2018-01-19 | 电子科技大学 | A kind of valve free pump of big flow |
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