CN103511230A - Double-cavity type electric actuator valveless micropump - Google Patents
Double-cavity type electric actuator valveless micropump Download PDFInfo
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- CN103511230A CN103511230A CN201310465357.2A CN201310465357A CN103511230A CN 103511230 A CN103511230 A CN 103511230A CN 201310465357 A CN201310465357 A CN 201310465357A CN 103511230 A CN103511230 A CN 103511230A
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Abstract
A double-cavity type electric actuator valveless micropump comprises drive films and a micropump body. The micropump body comprises a pump body and a pump cover. The pump body comprises an upper pump body (2) and a lower pump body (1); the left end and the right end of the upper pump body (2) are provided with an outlet cavity and an inlet cavity respectively; the left end and the right end of the lower pump body (1) are provided with an inlet cavity and an outlet cavity respectively; an upper pump cavity (9) is arranged between the inlet cavity and the outlet cavity of the upper pump body (2); a lower pump cavity (18) is arranged between the inlet cavity and the outlet cavity of the lower pump body (1); the upper pump cavity (9) and the lower pump cavity (18) are opposite. The pump cover is divided into an upper pump cover (3), a middle pump cover (13) and a lower pump cover (15); the upper pump body (2) is located between the upper pump cover (3) and the middle pump cover (13); the lower pump body (1) is located between the middle pump cover (13) and the lower pump cover (15); the upper pump cavity (9) is communicated with the outlet cavity and the inlet cavity through a shrinkage flow pass and a diffusion flow pass; the lower pump cavity (18) is communicated with the outlet cavity and the inlet cavity through a shrinkage flow pass and a diffusion flow pass; the inlet cavity of the upper pump body (2) and the outlet cavity of the lower pump body (1) are communicated through a middle layer small hole (14); the three drive films cover a large hole in the upper pump cover (3), a large hole in the middle pump cover (13) and a large hole in the lower pump cover (15) respectively.
Description
Technical field
The present invention relates to a kind of feedway of micro-flow liquid.
Background technique
Micrometeor system can accurately detect and control the flow of microlitre magnitude per minute.As the micropump of these system core parts, become recent domestic scholar's study hotspot.Micropump because of can infusion quantitative liquid, control infusion velocity, thereby it is accurate to be used for infusion requirement, the specific drugs that input speed is stable.As cardiotonic, vasoactive agent etc., thereby be widely used in biopharmacy.For example, diabetes patient was the insulin of shot larger dose in the past, and this has not only caused waste, and the drug action time is also shorter, so the utmost point needs the lasting dropper of a kind of flow energy trace control.In the meticulous Direct box of this class flow and detection system, microminiature pump is a primary element.
Micropump is according to having or not movable valve block to be divided into have two kinds of valve Micropump and valve free pumps, and the research outside Present Domestic mainly concentrates on valve free pump.The advantages such as because compared valve Micropump, valve free pump does not exist mechanical movable member, has structure and preparation process is simple, and intensity is high, and the life-span is long, and liquid is difficult for blocking, and complete function, is easy to control, and reliability is high, and processing compatibility is good, and cost is low.Wherein existing valve free pump mainly comprises: single chamber simple oscialltor valve free pump, single-cavity double-oscillator valve free pump, dual chamber valve free pump in parallel etc.Improving micro-pump performance, increase output flow aspect, two-chamber valveless Micropump will be far superior to single chamber valve free pump.
Valve free pump about dual chamber structure, obtained part Study achievement both at home and abroad: the people such as nineteen ninety-five and A.Olsson in 1996 start to attempt manufacturing the valve free pump of two-chamber, two pump chambers are parastate, all adopt Piezoelectric Driving, drive single spin-echo, can greatly reduce like this flow pulsation of Micropump output.Then, the people such as Olsson adopts respectively again isotropy wet etching and reactive ion etching to process to take the two-chamber Micropump that silicon is agent structure.The Jin-Ho Kim of 2004 Nian， Korea S Myongji universities, C.J.Kang and Yong-Sang Kim develop a kind of micro valveless pump driving with piezo-electric sheet, and two pump chambers are also parallel.This Micropump top pump housing adopts dimethyl silicone polymer (PDMS), utilizes micro-duplication process to make.The displacement of pumping diaphragm increases along with executing alive rising on piezo-electric sheet, thereby the flow velocity of pump also increases gradually.The Chen Yi of Dalian University of Technology scholar has designed double-cavity parallel formula Valveless Piezoelectric Micropump for 2009, and Micropump is comprised of two pump chambers in parallel, and each pump chamber has corresponding contraction/diffusing tube pair, and to realize mobile one-way, two pump chambers share a Piexoelectric actuator.Piezoelectric vibrator, under alternating voltage drives, is done up and down reciprocatingly vibration.By runner and buffer cavity, the water intake of two Micropumps in parallel, water outlet are communicated with respectively, have just formed parallel pump structure.From the working procedure of double-cavity parallel formula valve free pump, it has secondary imbibition, secondary pump liquid.The for once imbibition in a vibrational period of Er Dan chamber valve free pump, a pump liquid.Therefore the efficiency of double-cavity parallel formula valve free pump is higher in theory.
The valveless film type Micropump that patent CN1442612A proposes is a kind of two-chamber three vibrator integratedization series connection valve free pumps.With dual chamber Micropump in parallel, compare, the variation of two-chamber three each pump chamber volume of vibrator integratedization series connection valve free pump drives by two oscillators are common, therefore the amplitude of Volume Changes is larger, and reduced the dead volume in pump chamber, flow is increased dramatically, and is approximately the twice of parallel double-chamber Micropump.By intermediate coat, upper and lower two cavitys are linked into an integrated entity in addition, make micro-pump structure compact, thereby saved space, adapt to microminiaturized needs.Its film adopts Piezoelectric Driving film.
But this structure is monofilm structure, upper and lower cavity shares a film, and its flow is affected, and can not make full use of its cavity space capacity.
The Micropump of the acrotism dynamic formula output of patent CN101042130A based on Electromagnetic Drive is also the two-chamber three vibrator integratedization series connection valve free pumps of monofilm structure, but employing is the mode of Electromagnetic Drive film.
Xia Dongmei, Pang Xuanming, Chen Xiaonan, the single chamber valve free pump driving based on electric actuation intellectual material that Li Bowen proposes (XI AN JIAOTONG UNIVERSITY Subject Index the 43rd volume the 7th phase p:92～95.2009 year July), take macromolecule as main structure material, and bio-compatibility is better.But due to defect intrinsic on single cavity structure, it also exists some shortcomings: because monofilm driving force is limited, dead volume is larger, flow output is less than normal, and working efficiency is lower.
Summary of the invention
The object of the invention is to overcome existing valve free pump output capability lower, easily produce the shortcoming of Periodic pulsing flow, propose a kind of bicavate electric actuation valve free pump.The present invention can alleviate the pulsating nature of liquid stream, improves existing valve free pump inefficiency, the problem that exists pulsating nature to disturb.Original volume of the present invention and quiet volume is smaller, compression ratio is large, reproducibility is good, reliability is high.
Technical solution of the present invention is as follows:
Bicavate electric actuation valve free pump of the present invention comprises drive membrane and Micropump.Described Micropump is divided into the pump housing and pump cover two-part.The described pump housing is divided into upper pump casing and lower pump body.The material of the described pump housing is silicon chip or thick film photoresistance SU-8.The two ends, left and right of upper pump casing and lower pump body all have snout cavity and outlet plenum, are upper pump chamber and lower pump chamber between snout cavity and outlet plenum.Upper pump chamber is relative with lower pump chamber, and upper and lower pump chamber is communicated with outlet plenum and snout cavity by contracted channel and diffusion runner.
Described pump cover is divided into three of upper, middle and lower pump cover, and the material of described pump cover is pyrex7740 glass or thick film photoresistance SU-8.Upper pump casing is between upper pump cover and middle pump cover, and lower pump body is between middle pump cover and lower pump cover, and pump cover and pump housing interval overlapping like this, forms Micropump.On upper pump cover, have outlet aperture, on middle pump cover, have middle level aperture, on lower pump cover, have import aperture.The snout cavity of upper pump casing and the outlet plenum of lower pump body are interconnected by middle pump cover Shang middle level aperture.On upper pump cover, middle pump cover and lower pump cover, also have macropore, three drive membrane cover respectively the macropore on pump cover, middle pump cover and lower pump cover, the first drive membrane covers the macropore on upper pump cover, the macropore during the second drive membrane covers on pump cover, and the 3rd drive membrane covers the macropore on lower pump cover.
Working principle and the working procedure of bicavate electric actuation valve free pump of the present invention are as follows:
Under the first drive membrane and the 3rd drive membrane, convex becomes, during the second drive membrane epirelief deformation, it is large that the volume of lower pump chamber becomes, liquid enters into lower pump body the second snout cavity by described import aperture, through lower pump body the second diffusion runner, enter into lower pump chamber, the volume of meanwhile going up pump chamber diminishes, liquid in upper pump chamber enters the first outlet plenum of upper pump casing by upper pump casing the first contracted channel, then under the first drive membrane and the 3rd drive membrane, convex becomes epirelief deformation, the second drive membrane becomes lower convex from epirelief deformation and becomes, the volume of lower pump chamber diminishes, the liquid of lower pump chamber enters the second outlet plenum of lower pump body by the second contracted channel of lower pump body, the volume of meanwhile going up pump chamber becomes large, the liquid of upper pump casing the first snout cavity enters in upper pump chamber by upper pump casing the first diffusion runner, the liquid of lower pump body outlet plenum is because pressure reduction reason enters into the supplementary liquid that flows to upper pump chamber in upper pump casing the first snout cavity through described middle level aperture.Drive membrane is under the control of voltage signal, and repeated deformation, reaches with this object that continuous pump goes out liquid continuously.
With dual chamber Micropump in parallel, compare, the variation of each pump chamber volume of two-chamber valveless Micropump of the present invention drives by three drive membrane are common, so the amplitude of Volume Changes is larger, and has reduced the dead volume in pump chamber, flow is increased dramatically, and is approximately the twice of parallel double-chamber Micropump.
In addition, diffusion runner/contracted channel mouth of upper pump chamber of the present invention and lower pump chamber is designed to be supplied with fluid or carried fluid by a total runner.The benefit of design is like this: when upper pump chamber is in supply model, suck fluid, lower pump chamber is in pumping pattern, while carrying fluid, the pressure and the flow that due to upper pump chamber, suck fluid are greater than lower pump chamber head pressure and flow, therefore a part for the liquid that lower pump chamber refluxes is sucked by upper pump chamber again, only has sub-fraction to be back in the snout cavity of lower pump body.In like manner, when upper pump chamber is in pumping pattern, carry fluid, lower pump chamber is in supply model, while sucking fluid, the liquid that lower pump chamber is discharged can reflux and will suck a part for liquid with going on pump chamber, also only has sub-fraction to be back in upper pump casing outlet plenum, so it has reduced capacity of reflux to a certain extent.
The present invention vibrates drive membrane by controlling the change of voltage signal.Ripple voltage is applied to and is adopted in three drive membrane that electroactive polymer film makes, make drive membrane up-down vibration, the supply model of valve free pump and pump pattern alternation.The frequency that changes square wave direct current ripple voltage is adjusted the flow of Micropump, and the frequency of square wave direct current ripple voltage is exactly the frequency of okperation of Micropump.The drive displacement decline rate of square wave direct current ripple voltage is the slowest, and the driving successful of DC pulse moving voltage is better than alternating voltage, and not only stable, deformation time is longer, and driver frequency is higher, and deformation process is stable.
From analyzing above, output flow and the efficiency of valve free pump of the present invention are all increased dramatically.
The present invention also tool has the following advantages:
1. the present invention has adopted two-chamber three vibrator integratedization structures, by controlling the variation of voltage signal, drive membrane is vibrated, and the volume of two cavitys is alternately changed, to reach the output of liquid.Have simple in structure, the feature such as flow and pressure are large, and energy consumption is low.
2. volume of the present invention is little, and cost is low, the material that uses harmless, be applicable to medically medicine dispensing, the aspects such as drug delivery.
Accompanying drawing explanation
Fig. 1 is the sectional view of structure of the present invention, in figure: pump cover, 15 times pump covers in pump cover, 13 on pump chamber on 1 lower pump body, 2 upper pump casings, 9,18 times pump chambers, 3,5 first outlet plenums, 16 second outlet plenums, 12 first snout cavities, 23 second snout cavities, 6 first contracted channels, 11 first diffusion runners, 17 second contracted channels, 22 second contracted channels, 4 outlet aperture ,14 middle level apertures, 24 import apertures, macropore on macropore in macropore on 7 on pump cover 3,10 on pump cover 13,21 times pump covers 15,8 first drive membrane, 19 second drive membrane, 20 the 3rd drive membrane;
Fig. 2 is flow direction flow diagram of the present invention;
Fig. 3 is external view of the present invention;
Fig. 4 is STRUCTURE DECOMPOSITION figure of the present invention;
Fig. 5 is control circuit connection diagram of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
As shown in Figure 1, the present invention includes drive membrane and Micropump two-part.Described Micropump is divided into the pump housing and pump cover two-part, and the described pump housing is divided into upper pump casing 2 and lower pump body 1.Described pump cover is divided into pump cover 3, middle pump cover 13 and lower pump cover 15.Upper pump casing 2 is between upper pump cover 3 and middle pump cover 13, and lower pump body 1 is between middle pump cover 13 and lower pump cover 15, and pump cover and pump housing interval overlapping like this, forms Micropump.Upper pump cover 3 center positions have macropore 7, and the left end of macropore 7 is outlet apertures 4, and middle pump cover 13 middles have macropore 10, and the right-hand member of macropore 10 is middle level apertures 14, and lower pump cover 15 middles have macropore 21, and the left end of macropore 21 is import apertures 24.The first drive membrane 8 utilizes himself adhesive paste on upper pump casing 2, and is clipped between upper pump casing 2 and pump cover 3, the macropore 7 of pump cover 3 sealing in covering, the extraneous seal action that also plays of isolation; The second drive membrane 19 utilizes himself adhesive paste on middle pump cover 13, and is clipped between middle pump cover 13 and upper pump casing 2, the macropore 10 of pump cover 13 sealing in covering, pump chamber 9 and lower pump chamber 18 in isolation; The 3rd drive membrane 20 utilizes himself adhesive paste on lower pump cover 15, and is clipped between lower pump cover 15 and lower pump body 1, covers macropore 21 sealing of lower pump cover 15, plays sealing and isolates extraneous effect.
The right-hand member of upper pump casing 2 is the first snout cavity 12, and left end is the first outlet plenum 5, and centre is upper pump chamber 9, and upper pump chamber 9 is communicated with the first outlet plenum 5 and the first snout cavity 12 respectively by the first contracted channel 6, the first diffusion runner 11.The left end of lower pump body 1 is the second snout cavity 23, and right-hand member is the second outlet plenum 16, and centre is lower pump chamber 18.Upper pump chamber 9 is relative with lower pump chamber 18.Lower pump chamber 18 is communicated with the second outlet plenum 16 and the second snout cavity 23 respectively by the second contracted channel 17, the second diffusion runner 22.
Pump chamber 9 on the neutral position of upper pump casing 2 is, the left side of upper pump chamber 9 is the first contracted channel 6 and the first outlet plenum 5, the right side of upper pump chamber 9 is the first diffusion runner 11 and the first snout cavity 12.The first contracted channel 6 and the first diffusion runner 11 are taper.First contracted channel 6 diameter compare little one end are connected with upper pump chamber 9, and first contracted channel 6 diameter compare great one end are connected with the first outlet plenum 5; First diffusion runner 11 diameter compare great one end are connected with upper pump chamber 9, and first diffusion runner 11 diameter compare little one end are connected with the first snout cavity 12.Lower pump chamber 18 is positioned at the middle of lower pump body 1, and the left side of lower pump chamber 18 is the second diffusion runner 22 and the second snout cavity 23, and lower pump chamber 18 right side is the second contracted channel 17 and the second outlet plenum 16.The second diffusion runner 22 and the second contracted channel 17 are taper.Second diffusion runner 22 diameter compare great one end are connected with lower pump chamber 18, and second diffusion runner 22 diameter compare little one end are connected with the second outlet plenum 23; Second contracted channel 17 diameter compare little one end are connected with lower pump chamber 18, and second diffusion runner 17 diameter compare great one end are connected with the second snout cavity 16.Upper pump chamber 9 is communicated with the outlet aperture 4 of upper pump cover 3 by the first contracted channel 6 and the first outlet plenum 5; Upper pump chamber 9 is connected with the aperture 14 on middle pump cover 13 with the first snout cavity 12 by the first diffusion runner 11.Lower pump chamber 18 is communicated with the import aperture 24 on lower pump cover 15 by the second diffusion runner 22 and the second snout cavity 23, and lower pump chamber 18 is communicated with middle pump cover 13Shang middle level aperture 14 by the second contracted channel 17 and the second outlet plenum 16.Upper pump casing 2 and lower pump body 1 are communicated with by middle pump cover 13Shang middle level aperture 14.The angle of taper of the first contracted channel 6, the second diffusion runner 11, the second contracted channel 17, the second diffusion runner 22 is all identical.
On upper pump cover 3, middle pump cover 13 and lower pump cover 15, have 7,10,21, three macropores 7 of macropore, 10,21 position over against upper pump chamber 9 and lower pump chamber 18, upper pump chamber 9 is relative with lower pump chamber 18.The first drive membrane 8 is clipped between pump cover 3 and upper pump casing 2, is positioned at the downside of the macropore 7 of pump cover 3, and in covering, the macropore 7 of pump cover 3 sealing, separate pump chamber 9 and the external world; The second drive membrane 19 is clipped between middle pump cover 13 and upper pump casing 2, is arranged in the upside of the macropore 10 of pump cover 13, and the macropore 10 of pump cover 13 in covering separates pump chamber 9 and lower pump chamber 18; The 3rd drive membrane 20 is clipped between lower pump cover 15 and lower pump body 1, is positioned at the upside of the macropore 21 of lower pump cover 15, covers the macropore 21 of lower pump cover 15, isolated lower pump chamber 18 and the external world; The first drive membrane 8, the second drive membrane 19 and the 3rd drive membrane 20 be both over against upper pump chamber 9 and lower pump chamber 18, again respectively over against the macropore 21 of the macropore 7 of upper pump cover 3, the macropore 10 of middle pump cover 13 and lower pump cover 15.Described drive membrane is the electroactive polymer film of being made by electroactive polymer (electroactive polymer, EAP).
Liquid is in the runner process of circulation of this Micropump as shown in Figure 2:
Liquid enters into the second snout cavity 23 by import aperture 24, through the second diffusion runner 22, enter into lower pump chamber 18, through the second contracted channel 17, enter the second outlet plenum 16 again, the liquid that enters the second outlet plenum 16 enters the first snout cavity 12 by middle level aperture 14, through the first diffusion runner 11, enter pump chamber 9, through the first contracted channel 6, enter the first outlet plenum 5 again, then flow out Micropump by outlet aperture 4.
The present invention controls the concavo-convex deformation of drive membrane by additional control signal.The Placement of control circuit as shown in Figure 5.The present invention adopts the PLC of Mitsubishi to produce pulse signal and drives relay, make the high voltage direct current generator being connected with relay produce square wave direct current ripple voltage, then ripple voltage is applied to and is adopted in three drive membrane that electroactive polymer film makes, make drive membrane up-down vibration, the supply model of valve free pump and pump pattern alternation.The frequency that changes square wave direct current ripple voltage is adjusted the flow of Micropump, and the frequency of square wave direct current ripple voltage is the frequency of okperation of Micropump.The drive displacement decline rate of square wave direct current ripple voltage is the slowest, and the driving successful of DC pulse moving voltage is better than alternating voltage, not only the steady-state deformation time longer, driver frequency is higher, and deformation process is stable.
Specific works principle of the present invention as shown in Figure 2.In the first drive membrane 8, the second drive membrane 19 and the 3rd drive membrane 20, coat conductive paste, lead-in wire is attached between conductive paste and drive membrane, by lead-in wire, connect high-pressure generator.First, second, third 3 drive membrane 8,19,20 are connected in parallel under same square wave high-pressure generator, in the first drive membrane 8 and the 3rd drive membrane 20, apply same square-wave voltage, make the first drive membrane 8 and the 3rd drive membrane 20 keep same frequency, the concavo-convex deformation of equidirectional, in the second drive membrane 19, apply the voltage contrary with the 3rd drive membrane 20 voltage both positive and negative polarities with the first drive membrane 8, make the frequency of the second drive membrane 10 and first, the 3rd drive membrane identical, realize the concavo-convex deformation of different direction.Up-down vibration with first, second, third 3 drive membrane periodically shakes, and makes increase and the minimizing of the volume generating period of pump chamber 9 and lower pump chamber 18.
Hypothesis driven film is in positive voltage convex change at present, epirelief deformation when negative voltage.Control circuit applies voltage signal to drive membrane, the first drive membrane 8 and the 3rd drive membrane 20 are in the convex change at present of identical positive voltage, the epirelief deformation when negative voltage of the second drive membrane 19, as shown in Figure 2 a, this is the volume increase of pump chamber 18 at present, the volume of upper pump chamber 9 reduces, and lower pump chamber 18 is in suction condition, and upper pump chamber 9 is in the state of pumping.After half period, the positive voltage being added in the first drive membrane 8 and the 3rd drive membrane 20 becomes negative voltage, the negative voltage of the second drive membrane 19 becomes positive voltage, the first drive membrane 8, the 3rd drive membrane 20 are become and are changed into epirelief deformation by lower convex, the second drive membrane 19 changes lower convex into by epirelief deformation and becomes, as shown in Figure 2 b, this at present the volume of pump chamber 18 reduce, in the state of pumping, the volume of upper pump chamber 9 increases, in suction condition, to this, complete the variation of one-period, enter into the voltage of next cycle.By changing the direction of control signal, make the fluid of lower pump body 1 output flow into upper pump casing 2 thus, realized the Micropump that pressure and flow are large.
Detailed process is as follows, liquid enters the second snout cavity 23 of lower pump body 1 from the import aperture 24 of lower pump cover 15, by the second diffusion runner 22, enter in lower pump chamber 18, when 8,20 times convexs of the first, the 3rd drive membrane become, during the second drive membrane 19 epirelief deformation, it is large that the volume of lower pump chamber 18 becomes, and the volume of upper pump chamber 9 diminishes, as shown in Figure 2 a, the input flow rate of setting the taper second diffusion runner 22 of the pump housing 1 left end is Q
1, the output flow of taper second contracted channel 17 of lower pump body 1 right-hand member is Q
2, according to the flow characteristic of tapered runner inner fluid, flow Q now
1>Q
2, the net flow of generation is △ Q, fluid flows into from the import aperture 24 of lower pump cover 15.When the first, the 3rd drive membrane 8,20 epirelief deformation, when the second drive membrane 19 times convex becomes, the volume of lower pump chamber 18 diminishes, and it is large that the volume of upper pump chamber 9 becomes, and as shown in Figure 2 b, the output flow of establishing taper first contracted channel 6 of upper pump casing 2 left ends is Q
3, the flow of taper first diffusion runner 11 outputs of upper pump casing 2 right-hand members is Q
4, according to the flow characteristic of tapered runner inner fluid, flow Q now
3>Q
4, the net flow of generation is △ Q, fluid flows out from the outlet aperture 4 of upper pump cover 2.Control signal makes the first, the 3rd drive membrane 8,20 and the second drive membrane 19 produce different concavo-convex deformed state at synchronization, within an operation cycle, change the positive and negative of control signal, make the fluid of lower pump body 1 output flow into upper pump casing 2, realized the Micropump that pressure and flow are large.By changing the frequency of control signal, can change the vibration velocity of film, thereby also can change the output flow of Micropump.
Claims (9)
1. a bicavate electric actuation valve free pump, is characterized in that: described Micropump comprises drive membrane and Micropump two-part; Described Micropump is divided into the pump housing and pump cover; The described pump housing is divided into upper pump casing (2) and lower pump body (1); The two ends, left and right of upper pump casing (2) and lower pump body (1) all have snout cavity and outlet plenum, are upper pump chamber (9) and lower pump chamber (18) between snout cavity and outlet plenum, and upper pump chamber (9) is relative with lower pump chamber (18); Described pump cover is divided into pump cover (3), middle pump cover (13) and lower pump cover (15); Upper pump casing (2) is arranged between pump cover (3) and pump cover (13), and lower pump body (1) is arranged between pump cover (13) and lower pump cover (15); Upper pump chamber (9) and lower pump chamber (18) are communicated with outlet plenum and snout cavity by contracted channel and diffusion runner; On upper pump cover (3), have outlet aperture (4), on middle pump cover (13), have middle level aperture (14), on lower pump cover (15), have import aperture (24); The outlet plenum of the snout cavity of upper pump casing (2) and lower pump body (1) is interconnected by middle pump cover (3) Shang middle level aperture (14); On upper pump cover (3), middle pump cover (13) and lower pump cover (15), also have macropore, three drive membrane cover respectively the macropore on pump cover (3), middle pump cover (13) and lower pump cover (15).
2. according to a kind of bicavate electric actuation valve free pump claimed in claim 1, it is characterized in that: the center position of described upper pump cover (3) has macropore (7), the left end of macropore (7) is outlet aperture (4), the center position of middle pump cover (13) has macropore (10), the right-hand member of macropore (10) is middle level aperture (14), the center position of lower pump cover (15) has macropore (21), and the left end of macropore (21) is import aperture (24); It is upper that the first drive membrane (8) is pasted on upper pump casing (2), is positioned between upper pump casing (2) and pump cover (3) macropore (7) of pump cover in covering (3) sealing; The second drive membrane (19) utilizes himself adhesive paste upper in middle pump cover (13), and between middle pump cover (13) and upper pump casing (20), the macropore (10) of pump cover in covering (13) also seals; The 3rd drive membrane (20) utilizes himself adhesive paste upper in lower pump cover (15), between lower pump cover (15) and lower pump body (1), covers the macropore (21) of lower pump cover (15) and seals.
3. according to a kind of bicavate electric actuation valve free pump claimed in claim 1, it is characterized in that: the right-hand member of described upper pump casing (2) is snout cavity (12), left end is outlet plenum (5), and centre is upper pump chamber (9); Upper pump chamber (9) is communicated with the first outlet plenum (5) by first contracted channel (6) in its left side, spreads runner (11) be communicated with the first snout cavity (12) by first of its right side; The left end of lower pump body (1) is snout cavity (23), and right-hand member is outlet plenum (16), and centre is lower pump chamber (18); Lower pump chamber (18) is communicated with the second outlet plenum (16) by second contracted channel (17) on its right side, spreads runner (22) be communicated with the second snout cavity (23) by second of its left side.
4. according to a kind of bicavate electric actuation valve free pump claimed in claim 3, it is characterized in that: described the first contracted channel (6) and the first diffusion runner (11) are taper; The first contracted channel (6) diameter compare little one end is connected with upper pump chamber (9), and the first contracted channel (6) diameter compare great one end is connected with the first outlet plenum (5); First diffusion runner (11) diameter compare great one end is connected with upper pump chamber (9), and first diffusion runner (11) diameter compare little one end is connected with the first snout cavity (12); Described the second diffusion runner (22) and the second contracted channel (17) are taper; Second diffusion runner (22) diameter compare great one end is connected with lower pump chamber (18), and second diffusion runner (22) diameter compare little one end is connected with the second outlet plenum (23); The second contracted channel (17) diameter compare little one end is connected with lower pump chamber (18), and second diffusion runner (17) diameter compare great one end is connected with the second snout cavity (16); The angle of taper of the first contracted channel (6), the second diffusion runner (11), the second contracted channel (17) and the second diffusion runner (22) is all identical.
5. according to a kind of bicavate electric actuation valve free pump claimed in claim 1, it is characterized in that: described upper pump chamber (9) is communicated with the outlet aperture (4) of upper pump cover (3) by the first contracted channel (6) and the first outlet plenum (5); Upper pump chamber (9) is connected with the aperture (14) on middle pump cover (13) with the first snout cavity (12) by the first diffusion runner (11); Lower pump chamber (18) is communicated with the import aperture (24) on lower pump cover (15) by the second diffusion runner (22) and the second snout cavity (23), and lower pump chamber (18) is communicated with middle pump cover (13) Shang middle level aperture (14) by the second contracted channel (17) and the second outlet plenum (16); Upper pump casing (2) and lower pump body (1) are communicated with by middle pump cover (13) Shang middle level aperture (14).
6. according to a kind of bicavate electric actuation valve free pump claimed in claim 1, it is characterized in that: described drive membrane (8,19,20) adopts electroactive polymer film.
7. according to a kind of bicavate electric actuation valve free pump claimed in claim 1, it is characterized in that: the material of described pump cover is pyrex7740 glass or thick film photoresistance SU-8.
8. according to a kind of bicavate electric actuation valve free pump claimed in claim 1, it is characterized in that the material of the described pump housing is silicon chip or thick film photoresistance SU-8.
9. according to a kind of bicavate electric actuation valve free pump claimed in claim 1, it is characterized in that the variation that is applied to the voltage in the drive membrane described in three by control changes the deformation direction of drive membrane, thereby change the volume of upper and lower pump chamber, pump liquid.
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| CN201310465357.2A CN103511230B (en) | 2013-10-08 | 2013-10-08 | A kind of bicavate electric actuation valve free pump |
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| CN201310465357.2A CN103511230B (en) | 2013-10-08 | 2013-10-08 | A kind of bicavate electric actuation valve free pump |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106837759A (en) * | 2017-03-10 | 2017-06-13 | 广东捷成科创电子股份有限公司 | A kind of three chamber supercharging air pumps |
| CN107339228A (en) * | 2017-06-26 | 2017-11-10 | 歌尔股份有限公司 | Miniflow pumping configuration, system and preparation method |
| CN107605713A (en) * | 2017-10-26 | 2018-01-19 | 电子科技大学 | A kind of valve free pump of big flow |
| CN107731766A (en) * | 2017-09-14 | 2018-02-23 | 电子科技大学 | A kind of self-loopa fluid means for systems-on-a-chip radiating |
| CN108397373A (en) * | 2018-02-23 | 2018-08-14 | 清华大学深圳研究生院 | A kind of valveless electromagnetism Micropump and preparation method thereof |
| CN111030418A (en) * | 2019-12-03 | 2020-04-17 | 广州大学 | Double-cavity micropump based on electrowetting phenomenon |
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| JP2011144692A (en) * | 2010-01-12 | 2011-07-28 | Panasonic Corp | Fluid transport device using conductive high polymer |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106837759A (en) * | 2017-03-10 | 2017-06-13 | 广东捷成科创电子股份有限公司 | A kind of three chamber supercharging air pumps |
| CN107339228A (en) * | 2017-06-26 | 2017-11-10 | 歌尔股份有限公司 | Miniflow pumping configuration, system and preparation method |
| CN107731766A (en) * | 2017-09-14 | 2018-02-23 | 电子科技大学 | A kind of self-loopa fluid means for systems-on-a-chip radiating |
| CN107605713A (en) * | 2017-10-26 | 2018-01-19 | 电子科技大学 | A kind of valve free pump of big flow |
| CN108397373A (en) * | 2018-02-23 | 2018-08-14 | 清华大学深圳研究生院 | A kind of valveless electromagnetism Micropump and preparation method thereof |
| CN111030418A (en) * | 2019-12-03 | 2020-04-17 | 广州大学 | Double-cavity micropump based on electrowetting phenomenon |
| CN111030418B (en) * | 2019-12-03 | 2021-04-02 | 广州大学 | Double-cavity micropump based on electrowetting phenomenon |
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