CN106837759A - A kind of three chamber supercharging air pumps - Google Patents

A kind of three chamber supercharging air pumps Download PDF

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Publication number
CN106837759A
CN106837759A CN201710142274.8A CN201710142274A CN106837759A CN 106837759 A CN106837759 A CN 106837759A CN 201710142274 A CN201710142274 A CN 201710142274A CN 106837759 A CN106837759 A CN 106837759A
Authority
CN
China
Prior art keywords
pump
pump body
chamber
fluid passage
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710142274.8A
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Chinese (zh)
Inventor
周敏
黄显荣
欧明
姜知水
俞真
文理
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Shengdayu Technology Development Co Ltd
ZHAOQING LIANERCHUANG TECHNOLOGY Co Ltd
Guangdong Jc Technological Innovation Electronics Co Ltd
Original Assignee
Shenzhen Shengdayu Technology Development Co Ltd
ZHAOQING LIANERCHUANG TECHNOLOGY Co Ltd
Guangdong Jc Technological Innovation Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Shengdayu Technology Development Co Ltd, ZHAOQING LIANERCHUANG TECHNOLOGY Co Ltd, Guangdong Jc Technological Innovation Electronics Co Ltd filed Critical Shenzhen Shengdayu Technology Development Co Ltd
Priority to CN201710142274.8A priority Critical patent/CN106837759A/en
Publication of CN106837759A publication Critical patent/CN106837759A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10Adaptations or arrangements of distribution members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/122Cylinder block
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/125Cylinder heads

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention discloses a kind of three chamber supercharging air pump, including the air pump main body being made up of upper pump casing, middle pump body and lower pump body overlapping, piezoelectricity chamber is respectively arranged with upper pump casing, middle pump body and lower pump body, three described piezoelectricity chambers are separated by four pieces of piezoelectric patches, the fluid passage connection air inlet of the upper pump casing and lower pump body, the fluid passage of the fluid passage connection gas outlet of middle pump body, upper pump casing and lower pump body connects the fluid passage of middle pump body by connectivity slot.In the present invention, upper pump casing and lower pump body suction outside air, middle pump body discharge air-flow;When the piezoelectricity chamber smaller volume of upper pump casing and lower pump body is vented to connectivity slot, middle pump body piezoelectricity chamber volume enlargement, the gas in connectivity slot is set to accelerate in the fluid passage of suction middle pump body, tolerance in middle pump body is approximately equal to the tolerance sum of upper pump casing and lower pump body, the air pressure in middle pump body is discharged after pressurizeing twice from gas outlet simultaneously, its output pressure is much larger than the discharge pressure of single-chamber air pump, and the scope of application is wider.

Description

A kind of three chamber supercharging air pumps
Technical field
The present invention relates to piezoelectric pump field, and in particular to a kind of three chamber supercharging air pump.
Background technology
Piezoelectric pump is kind of a novel fluid driver, and it does not need additional drives motor, but utilizes the inverse pressure of piezoelectric ceramics Electrical effect is deformed piezoelectric vibrator, then produces the volume change of pump chamber to realize fluid output or shaken using piezoelectricity by deformation Son produces fluctuation to transmit fluid.Piezoelectric pump has the advantages that small volume, Jing Yin, long lifespan, is widely used in medical field, electricity The fields such as sub- product scope, the Shui nationality.Existing piezoelectric pump is typically in single-chamber pump, pump only have a chamber for variable volume, Its flow and pressure are relatively low, and range of application is restricted significantly, therefore, the research for improving flow and pressure is current piezoelectric pump Important research direction.
The content of the invention
It is right by three piezoelectricity chambers the invention provides a kind of three chamber supercharging air pump in order to overcome above-mentioned problem Fluid carries out classification pressurization, increases the output flow and output pressure of air pump.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of three chamber supercharging air pumps, including
Air pump main body, the air pump main body is made up of upper pump casing, middle pump body and lower pump body overlapping, the upper pump casing top, upper pump Between body and middle pump body, between middle pump body and lower pump body and lower pump body bottom is respectively arranged with a piezoelectric patches,
The piezoelectricity chamber of up/down perforation is respectively arranged with the upper pump casing, middle pump body and lower pump body, the piezoelectric patches is arranged on often The upper and lower ends in individual piezoelectricity chamber are sealed to piezoelectricity chamber, and the volume in piezoelectricity chamber is changed when the piezoelectric patches energization is acted,
The fluid passage of insertion front and back end is respectively arranged with the upper pump casing, middle pump body and lower pump body, the fluid passage connects The piezoelectricity chamber of the pump housing where logical, the front and back end of the fluid passage is respectively arranged with the check valve for making fluid passage unidirectionally supply gas,
The air pump main body is provided with protecgulum and bonnet, and two air inlets and a gas outlet are provided with the protecgulum, described Two air inlets correspond to the fluid passage of upper pump casing and lower pump body, the fluid passage of the gas outlet correspondence middle pump body, institute respectively Covered after stating and be provided with three connectivity slots of the fluid passage of the pump housing of connection.
The working condition of supercharging air pump of the invention includes:
Original state, all piezoelectric patches are parallel, two between upper pump casing and middle pump body, between middle pump body and lower pump body piece pressure Electric piece, is middle pump body piezoelectricity chamber piezoelectric patches shared with upper pump casing piezoelectricity chamber, lower pump body piezoelectricity chamber respectively;
First working condition, piezoelectric patches energization action, is arranged on the outside lateral bend of piezoelectric patches at upper pump casing piezoelectricity chamber two ends, sets In the outside lateral bend of piezoelectric patches at lower pump body piezoelectricity chamber two ends, make the piezoelectricity chamber volume expansion of upper pump casing and lower pump body, from air inlet Mouth sucks ambient atmos to upper pump casing and the fluid passage of lower pump body, while the piezoelectricity chamber smaller volume of middle pump body, pump in discharge Internal gas;
Second working condition, the state dress of piezoelectric patches is changed, and is arranged on the inside lateral bend of piezoelectric patches at upper pump casing piezoelectricity chamber two ends, if The piezoelectricity chamber smaller volume of the inside lateral bend of piezoelectric patches at lower pump body piezoelectricity chamber two ends, upper pump casing and lower pump body is put, fluid Gas in passage is pressed in connectivity slot, while the piezoelectricity chamber volume expansion of middle pump body, gas is sucked from connectivity slot;
Supercharging air pump of the invention in the course of the work, constantly change, wherein being pressurized by the first working condition and the second working condition Air pump carries out air-breathing and exhaust in the first working condition, and internal pressurization is carried out in the second working condition.
As the further improvement of above-mentioned technical proposal, between the air pump main body and protecgulum, air pump main body and bonnet it Between be respectively arranged with valve rack, the valve rack correspondence fluid passage is provided with valve mounting apertures, and the check valve is installed In valve mounting apertures.
Used as the further improvement of above-mentioned technical proposal, the piezoelectric patches edge is provided with elastic sealing ring.
Used as the further improvement of above-mentioned technical proposal, the piezoelectric patches connects power supply by lead-out wire, the upper pump casing, Middle pump body and lower pump body are separately provided for the recess that lead-out wire is passed.
Used as the further improvement of above-mentioned technical proposal, the upper pump casing upper end is provided with upper sealing plate, the lower pump body Bottom is provided with lower shrouding, and upper sealing plate and lower shrouding are provided for piezoelectricity of the covering protection positioned at air pump main body upper and lower end parts Piece.
As the further improvement of above-mentioned technical proposal, it is provided with the upper sealing plate and lower shrouding close for compressing elasticity The rib of seal ring and piezoelectric patches.
As the further improvement of above-mentioned technical proposal, the breach passed through for lead-out wire is provided with the rib, it is described Breach is corresponding with the installation site of recess.
As the further improvement of above-mentioned technical proposal, block is provided with the air inlet.
Used as the further improvement of above-mentioned technical proposal, the protecgulum has been wholely set connecting pipe at gas outlet.
Used as the further improvement of above-mentioned technical proposal, the check valve includes the straight-tube shape made using elastomeric material Valve body, the valve body is internally provided with the through hole at insertion valve body two ends, and valve body one end has been wholely set opening and closing part, the opening and closing part Formed to being drawn close in the middle of through hole from two relative inclined sides of valve body, opening and closing part is opened by the Stress control in through hole, Closed in the presence of natural resiliency restoring force.
The beneficial effects of the invention are as follows:
Three chamber of the invention supercharging air pump is provided with three pump housings, and wherein upper pump casing and lower pump body is used to suck outside air, in The pump housing is used to discharge the air-flow after supercharging;When the piezoelectricity chamber smaller volume of upper pump casing and lower pump body is vented to connectivity slot, middle pump body The volume enlargement in piezoelectricity chamber, makes the gas in connectivity slot accelerate in the fluid passage of suction middle pump body, and the tolerance in middle pump body is about Equal to upper pump casing and the tolerance sum of lower pump body, while the air pressure in middle pump body is discharged after pressurizeing twice from gas outlet, its Output pressure is much larger than the discharge pressure of single-chamber air pump, and the scope of application is wider.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation of three chamber of the invention supercharging air pump.
Fig. 2 is the explosive view of three chamber supercharging air pumps in Fig. 1.
Fig. 3 is the sectional view of three chamber supercharging air pumps in Fig. 1.
Specific embodiment
Referring to figs. 1 to Fig. 3, the invention provides a kind of preferred embodiment, a kind of three chamber supercharging air pump, including protecgulum 1, after Lid 5 and the air pump main body being arranged between protecgulum 1 and bonnet 5, the air pump main body is by upper pump casing 2, middle pump body 3 and lower pump body 4 Overlapping composition, the upper end of the upper pump casing 2 is provided with upper sealing plate 7, and the bottom of the lower pump body 4 is provided with lower shrouding 8.The gas Between pump main body and protecgulum 1, valve rack 6 is respectively arranged between air pump main body and bonnet 5.
The piezoelectricity chamber 42 of up/down perforation is respectively arranged with the upper pump casing 2, middle pump body 3 and lower pump body 4, while on described Between the pump housing 2 and upper sealing plate 7, between upper pump casing 2 and middle pump body 3, between middle pump body 3 and lower pump body 4, lower pump body 4 and lower shrouding 8 Between be respectively arranged with a piezoelectric patches 9, three piezoelectricity chambers 42 are separated setting by four pieces of piezoelectric patches 9, wherein positioned at middle pump body about 2 The piezoelectric patches 9 at end is the shared piezoelectric patches 9 in multiple piezoelectricity chambers;Due to the inverse piezoelectric effect of piezoelectric patches 9, piezoelectric patches 9 is after powered up Elastic deformation can occur, change the volume in each piezoelectricity chamber 42, so as to suck and discharge gas.The edge of the piezoelectric patches 9 sets Elastic sealing ring 91 is equipped with, the piezoelectric patches 9 is sealed by elastic sealing ring 91 to piezoelectricity chamber 42.Further, the pressure Electric piece 9 connects power supply by lead-out wire, and the upper pump casing 2, middle pump body 3 and lower pump body 4 are separately provided for lead-out wire and pass Recess 43.Further, it is provided with for compressing elastic sealing ring 91 and piezoelectric patches 9 on the upper sealing plate 7 and lower shrouding 8 Rib 81, the breach 82 passed through for lead-out wire is provided with rib 81, the breach 82 is relative with the installation site of recess 43 Should.
It is provided with the upper pump casing 2 in upper fluid passage 21, middle pump body 3 and is provided with intervening fluid channels 31, lower pump body 4 Inside it is provided with lower fluid passage 41.The pump housing where the front and back end of the pump housing where the fluid passage insertion, and fluid passage connection Piezoelectricity chamber 42.Two air inlets 11 with block and a gas outlet with connecting pipe 12 are provided with the protecgulum 1, it is described Two air inlets 11 correspond to upper fluid passage 21 and lower fluid passage 41, the gas outlet correspondence intervening fluid channels 31 respectively. Three connectivity slots of the fluid passage of the pump housing 51 of connection are provided with the bonnet 5.
Each fluid passage of the correspondence of the valve rack 6 is provided with valve mounting apertures 61, each described valve mounting apertures Check valve 10 is installed in 61.Wherein upper fluid passage 21 and lower fluid passage 41 make gas from air inlet by check valve 10 11 enter single flow direction connectivity slot 51 behind fluid passage;And intervening fluid channels 31 are by the control of check valve 10, make air-flow from Connectivity slot 51 is through the gas outlet one-way flow of intervening fluid channels 31.Preferably, the structure of the check valve 10 is as follows:Check valve 10 The valve body of the straight-tube shape including being made using elastomeric material, the valve body is internally provided with the through hole at insertion valve body two ends, valve body One end has been wholely set opening and closing part, and the opening and closing part is formed to being drawn close in the middle of through hole from two relative inclined sides of valve body, Opening and closing part is opened by the Stress control in through hole, is closed in the presence of natural resiliency restoring force.
The working condition of supercharging air pump of the invention includes original state, the first working condition and the second working condition:Just Beginning state, all piezoelectric patches 9 are parallel;First working condition, the energization of piezoelectric patches 9 action, is arranged on the piezoelectricity chamber two ends of upper pump casing 2 The outside lateral bend of piezoelectric patches 9, is arranged on the outside lateral bend of piezoelectric patches 9 at the piezoelectricity chamber two ends of lower pump body 4, makes upper pump casing 2 and lower pump The piezoelectricity chamber volume expansion of body 4, ambient atmos are sucked to upper fluid passage 21 and lower fluid passage 41 from air inlet 11, while in The piezoelectricity chamber smaller volume of the pump housing 3, the gas in discharge intervening fluid channels 31;Second working condition, the state dress of piezoelectric patches 9 Change, be arranged on the inside lateral bend of piezoelectric patches 9 at the piezoelectricity chamber two ends of upper pump casing 2, be arranged on the piezoelectric patches at the piezoelectricity chamber two ends of lower pump body 4 Gas in fluid passage, is pressed to connectivity slot 51 by the piezoelectricity chamber smaller volume of 9 inside lateral bends, upper pump casing 2 and lower pump body 4 It is interior, while the piezoelectricity chamber volume expansion of middle pump body 3, from the interior suction gas of connectivity slot 51.Supercharging air pump of the invention is worked Cheng Zhong, the first working condition and the second working condition are constantly changed, and wherein supercharging air pump carries out air-breathing in the first working condition And exhaust, internal pressurization is carried out in the second working condition.
Three chamber of the invention supercharging air pump is provided with three pump housings, and wherein upper pump casing 2 and lower pump body 4 is used to suck extraneous sky Gas, middle pump body 3 is used to discharge the air-flow after supercharging;In a second operative state, the piezoelectricity chamber volume of upper pump casing 2 and lower pump body 4 Reduce when being vented to connectivity slot 51, the volume enlargement in the piezoelectricity chamber of middle pump body 3, the gas in connectivity slot 51 is accelerated suction intermediate flow In body passage 31, the tolerance in middle pump body 3 is approximately equal to the tolerance sum of upper pump casing 2 and lower pump body 4, while the gas in middle pump body 3 Pressure is discharged after pressurizeing twice from gas outlet, and its output pressure is much larger than the discharge pressure of single-chamber air pump, and the scope of application is wider.
Above concrete structure and sized data are that presently preferred embodiments of the present invention is illustrated, but present invention wound Make and be not limited to the embodiment, those of ordinary skill in the art can also make kind on the premise of without prejudice to spirit of the invention The equivalent variations planted or replacement, these equivalent deformations or replacement are all contained in the application claim limited range.

Claims (10)

1. a kind of three chamber supercharging air pump, it is characterised in that:Including
Air pump main body, the air pump main body is made up of upper pump casing, middle pump body and lower pump body overlapping, the upper pump casing top, upper pump Between body and middle pump body, between middle pump body and lower pump body and lower pump body bottom is respectively arranged with a piezoelectric patches,
The piezoelectricity chamber of up/down perforation is respectively arranged with the upper pump casing, middle pump body and lower pump body, the piezoelectric patches is arranged on often The upper and lower ends in individual piezoelectricity chamber are sealed to piezoelectricity chamber, and the volume in piezoelectricity chamber is changed when the piezoelectric patches energization is acted,
The fluid passage of insertion front and back end is respectively arranged with the upper pump casing, middle pump body and lower pump body, the fluid passage connects The piezoelectricity chamber of the pump housing where logical, the front and back end of the fluid passage is respectively arranged with the check valve for making fluid passage unidirectionally supply gas,
The air pump main body is provided with protecgulum and bonnet, and two air inlets and a gas outlet are provided with the protecgulum, described Two air inlets correspond to the fluid passage of upper pump casing and lower pump body, the fluid passage of the gas outlet correspondence middle pump body, institute respectively Covered after stating and be provided with three connectivity slots of the fluid passage of the pump housing of connection.
2. a kind of three chamber supercharging air pump according to claim 1, it is characterised in that:Between the air pump main body and protecgulum, Valve rack is respectively arranged between air pump main body and bonnet, the valve rack correspondence fluid passage is provided with valve installation Hole, the check valve is arranged in valve mounting apertures.
3. a kind of three chamber supercharging air pump according to claim 2, it is characterised in that:The piezoelectric patches edge sets flexible Sealing ring.
4. a kind of three chamber supercharging air pump according to claim 3, it is characterised in that:The piezoelectric patches is connected by lead-out wire Power supply, the upper pump casing, middle pump body and lower pump body are separately provided for the recess that lead-out wire is passed.
5. a kind of three chamber supercharging air pump according to claim 4, it is characterised in that:The upper pump casing upper end is provided with Shrouding, the lower pump body bottom is provided with lower shrouding.
6. a kind of three chamber supercharging air pump according to claim 5, it is characterised in that:Set on the upper sealing plate and lower shrouding There is the rib for compressing elastic sealing ring and piezoelectric patches.
7. a kind of three chamber supercharging air pump according to claim 6, it is characterised in that:It is provided with the rib and supplies lead-out wire The breach for passing through, the breach is corresponding with the installation site of recess.
8. a kind of three chamber supercharging air pump according to claim 1, it is characterised in that:Block is provided with the air inlet.
9. a kind of three chamber supercharging air pump according to claim 1, it is characterised in that:The protecgulum integrally sets at gas outlet It is equipped with connecting pipe.
10. a kind of three chamber supercharging air pump according to claim 1, it is characterised in that:The check valve is included using elasticity The valve body of the straight-tube shape that material makes, the valve body is internally provided with the through hole at insertion valve body two ends, and valve body one end is wholely set There is an opening and closing part, the opening and closing part is formed to being drawn close in the middle of through hole from two relative inclined sides of valve body, and opening and closing part is by through hole Interior Stress control is opened, and is closed in the presence of natural resiliency restoring force.
CN201710142274.8A 2017-03-10 2017-03-10 A kind of three chamber supercharging air pumps Pending CN106837759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710142274.8A CN106837759A (en) 2017-03-10 2017-03-10 A kind of three chamber supercharging air pumps

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Application Number Priority Date Filing Date Title
CN201710142274.8A CN106837759A (en) 2017-03-10 2017-03-10 A kind of three chamber supercharging air pumps

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Publication Number Publication Date
CN106837759A true CN106837759A (en) 2017-06-13

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI656283B (en) * 2017-09-15 2019-04-11 研能科技股份有限公司 Gas transmitting device
CN109882388A (en) * 2019-03-01 2019-06-14 浙江师范大学 A kind of accumulation compression mini air compressor
CN113007077A (en) * 2020-04-22 2021-06-22 合肥工业大学 Array type piezoelectric diaphragm pump
CN113586404A (en) * 2021-06-28 2021-11-02 宁波工程学院 Four-chamber booster type piezoelectric pump

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JPS62228685A (en) * 1986-03-31 1987-10-07 Ckd Controls Ltd Piezo pump
CN1399070A (en) * 2002-09-03 2003-02-26 吉林大学 Multiple-cavity piezoelectric film driven pump
JP2004285883A (en) * 2003-03-20 2004-10-14 Casio Comput Co Ltd Pump device
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CN102678528A (en) * 2012-05-23 2012-09-19 浙江师范大学 Series-parallel hybrid-driven piezoelectric pump
CN103511230A (en) * 2013-10-08 2014-01-15 新疆大学 Double-cavity type electric actuator valveless micropump
CN103994056A (en) * 2014-06-16 2014-08-20 吉林大学 Multi-vibrator axial cross-flow piezoelectric pump
CN205955943U (en) * 2016-08-09 2017-02-15 广东捷成科创电子股份有限公司 Piezoelectric pump pneumatic valve
CN206571658U (en) * 2017-03-10 2017-10-20 广东捷成科创电子股份有限公司 A kind of three chamber supercharging air pumps

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JPS62228685A (en) * 1986-03-31 1987-10-07 Ckd Controls Ltd Piezo pump
CN1399070A (en) * 2002-09-03 2003-02-26 吉林大学 Multiple-cavity piezoelectric film driven pump
JP2004285883A (en) * 2003-03-20 2004-10-14 Casio Comput Co Ltd Pump device
JP2006132477A (en) * 2004-11-08 2006-05-25 Alps Electric Co Ltd Diaphragm gas pump
CN102678528A (en) * 2012-05-23 2012-09-19 浙江师范大学 Series-parallel hybrid-driven piezoelectric pump
CN103511230A (en) * 2013-10-08 2014-01-15 新疆大学 Double-cavity type electric actuator valveless micropump
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI656283B (en) * 2017-09-15 2019-04-11 研能科技股份有限公司 Gas transmitting device
CN109882388A (en) * 2019-03-01 2019-06-14 浙江师范大学 A kind of accumulation compression mini air compressor
CN113007077A (en) * 2020-04-22 2021-06-22 合肥工业大学 Array type piezoelectric diaphragm pump
CN113007077B (en) * 2020-04-22 2022-06-07 合肥工业大学 Array type piezoelectric diaphragm pump
CN113586404A (en) * 2021-06-28 2021-11-02 宁波工程学院 Four-chamber booster type piezoelectric pump

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Application publication date: 20170613

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