CN102678528A - Series-parallel hybrid-driven piezoelectric pump - Google Patents
Series-parallel hybrid-driven piezoelectric pump Download PDFInfo
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- CN102678528A CN102678528A CN2012101755067A CN201210175506A CN102678528A CN 102678528 A CN102678528 A CN 102678528A CN 2012101755067 A CN2012101755067 A CN 2012101755067A CN 201210175506 A CN201210175506 A CN 201210175506A CN 102678528 A CN102678528 A CN 102678528A
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Abstract
The invention relates to a series-parallel hybrid-driven piezoelectric pump, and belongs to the fields of fluid transmission and control. Upper and lower pump bodies are connected through screws; 2 to 20 piezoelectric vibrators are connected between pump cavities of the two pump bodies in a pressed mode; valve sheets are adhered to the pump cavities of the upper and lower pump bodies and the inlets of valve cavities; the inlet of the upper pump body and the adjacent pump cavity, two adjacent pump cavities, and the valve cavities and the adjacent pump cavities are communicated through inter-cavity flow channels; the valve cavities are communicated with outlets; a series pump I is formed by the pump cavities and the piezoelectric vibrators; the inlet of the lower pump body and the adjacent pump cavity, two adjacent pump cavities, and the valve cavities and the adjacent pump cavities are communicated through inter-cavity flow channels; a series pump II is formed by the pump cavities and the piezoelectric vibrators; the inlets of the series pumps I and II are communicated; and the valve cavities of the series pumps I and II are communicated and communicated with the outlet on the upper valve body. The pump has the advantages that a series-parallel pump is formed by a plurality of piezoelectric vibrators of which the two sides drive fluid simultaneously, so that the pump is high in flow, pressure and energy efficiency, low in pulsation and suitable for constructing a piezoelectric hydraulic driver with high system back pressure.
Description
Technical field
The invention belongs to the small accurate piezoelectric pump that use in microfluid transmission and control field, be specifically related to a kind of series-multiple connection combination drive piezoelectric pump.
Background technique
As the important component part of MEMS, the research of piezoelectric pump receives the extensive concern of Chinese scholars always deeply.Initial piezoelectric pump only is output as purpose with microfluid, goes through the development of many decades, and the piezoelectric pump of some type is obtaining practical application aspect conveying of microfluids such as chemical analysis, bio-pharmaceuticals, Medicines controlled release and the control.Except simple FLUID TRANSPORTATION; The microminiature hydraulic system that drives based on piezoelectric pump again of people in recent years; Be called for short piezoelectric hydraulic driver or piezoelectric hydraulic motor:, its objective is that the coupling that utilizes fluid converts the double vibrations a little of piezoelectrics to macroscopical straight line motion of hydraulic cylinder piston like Chinese patent 200810051156.7,200920093242.4,201020180067.5 etc.
For satisfying different application requirements, people have proposed polytype piezoelectric chip pump and piezoelectric stack pump; For further improving the delivery pressure and the flow of pump; Satisfy the demand of emerging applications such as fuel-cell fuel supply, piezoelectric hydraulic driver; Series connection that people have successively proposed again to drive based on a plurality of chip type piezoelectric vibrators and parallel-connected pumps and the two-chamber parallel-connected pumps that drives based on two piezoelectric stacks; Like Chinese patent 02132855.2,201010118038.0 etc., piezoelectric stack pump wherein can obtain higher delivery pressure and big flow, but cost is too high; The price of piezoelectric stack is generally thousands of even up to ten thousand yuans, is unfavorable for applying of pump; Though piezoelectric chip pump driving force relatively a little less than, with low cost, only several units of the price of piezoelectric chip, and be convenient to improve through the multi-cavity serial or parallel connection output capability of pump have more practicability.
The common feature of above-mentioned many oscillator piezoelectric pumps is the one-sided driving fluid of piezoelectric vibrator, that is: the pump chamber barrier film of piezoelectric stack pump and chip type piezoelectric vibrator self is only one-sided contacts with fluid, and the driving force of piezoelectric vibrator convection cell is not fully exerted; More mainly, such pump is inappropriate for structure piezoelectric hydraulic driver.Reason is: the extremely small and real fluid of the distortion of piezoelectric vibrator has compressibility, and the piezoelectric hydraulic driver must adopt accumulator to provide back pressure to increase system stiffness, to avoid hydraulic cylinder piston to creep; Because piezoelectric vibrator or the pump chamber barrier film is one-sided contacts with fluid; The system back pressure of this moment has become the load of piezoelectric vibrator, has seriously reduced the overall useful horsepower output of driver; Also can cause the chip type piezoelectric vibrator damaged when system back pressure is excessive, so the energy efficiency and the reliability of existing many oscillator piezoelectric pumps are all very low.
Summary of the invention
To existing piezoelectric pump self intrinsic some narrow limitation or drawback; And emerging applications such as fuel cell and piezoelectric hydraulic driver are to the demands status of high pressure, big flow piezoelectric pump; The present invention proposes the series-multiple connection combination drive piezoelectric pump that a kind of multiple pressure electric tachometer indicator constitutes, thereby promotes output flow, pressure and the energy efficiency of piezoelectric pump synchronously.
The technological scheme that the present invention adopts is: upper pump casing is connected through screw with lower pump body; 2-20 piezoelectric vibrator is crimped between the pump chamber and the pump chamber on the lower pump body on the said upper pump casing through seal ring, and said piezoelectric vibrator is by metal substrate and piezoelectric chip is bonding forms; All be bonded with valve block at the inlet of the pump chamber of upper pump casing and outlet valve pocket and the pump chamber of lower pump body and the inlet of outlet valve pocket; On described upper pump casing; Import is adjacent between the pump chamber, be communicated with through runner between the chamber respectively between two adjacent pump chambers and between outlet valve pocket and the adjacent pump chamber; The outlet valve pocket also is communicated with outlet, and said series connection pump chamber and the piezoelectric vibrator that is positioned on the upper pump casing constitutes pumps in series I jointly; On described lower pump body; Import is adjacent between the pump chamber, be communicated with through runner between the chamber respectively between two adjacent pump chambers and between outlet valve pocket and the adjacent pump chamber, and said series connection pump chamber and the piezoelectric vibrator that is positioned on the lower pump body constitutes pumps in series II jointly; The import of the import of said pumps in series I and pumps in series II is communicated with, the outlet valve pocket of said pumps in series I is communicated with the outlet valve pocket of pumps in series II, again be positioned at upper pump casing on outlet be communicated with, thereby pumps in series I and II pumps in series is parallelly connected.
Among the present invention, the alternating voltage phase difference that piezoelectric vibrator applied in two adjacent pump chambers is 180 degree.The distortion of cyclic bending that piezoelectric vibrator is produced under the alternating voltage effect pump chamber of pumps in series I and pumps in series II is alternately increased or reduce, valve block alternately opens and closes, thereby make fluid from the import of said two pumpss in series flow into, the outlet outflow.
During piezoelectric pump of the present invention work, exist twice fluid to suck and discharge process in each cycle period, so it is little to effluent steadily, pulse.Flow and pressure that pumps in series I and pumps in series II export fluid separately equate that respectively pressure is P
c=nP
o, flow does
Wherein: n is the quantity of piezoelectric vibrator, Q
oAnd P
oOutput flow and the pressure of pumps in series I or pumps in series II when being respectively the work of single piezoelectric vibrator.Therefore, pumps in series I and the series-multiple connection combination drive piezoelectric pump that is constituted after pumps in series II is parallelly connected output flow be P
b=P
c=nP
o, delivery pressure does
Characteristic of the present invention is: adopt a plurality of both sides piezoelectric vibrator formation series-multiple connection combination drive piezoelectric pump of driving fluid simultaneously, the advantage of being brought thus: the energy efficiency that 1. can improve output flow, pressure and the piezoelectric vibrator of piezoelectric pump significantly; 2. twice fluid output arranged in each operation cycle, and fluid output is steady, pulsation is little; When 3. being used to construct the piezoelectric hydraulic driver, system back pressure can not become the load of piezoelectric vibrator, also the unlikely piezoelectric vibrator that makes because of system back pressure is excessive is damaged.
Description of drawings
Fig. 1 is the structural profile schematic representation of a preferred embodiment piezoelectric pump of the present invention;
Fig. 2 is that the C-C of Fig. 1 is to view;
Fig. 3 a is the structural profile schematic representation of a preferred embodiment piezoelectric vibrator of the present invention;
Fig. 3 b is the left view of Fig. 3 a;
Fig. 4 is the present invention's structural profile schematic representation of preceding half operation cycle of preferred embodiment piezoelectric pump;
Fig. 5 is the structural profile schematic representation of a later half operation cycle of preferred embodiment piezoelectric pump of the present invention;
Embodiment:
Like Fig. 1, Fig. 2, shown in Figure 3, upper pump casing 1 and lower pump body 2 are connected through screw; 2-20 piezoelectric vibrator 3 is crimped between the pump chamber 102 and the pump chamber 202 on the lower pump body 2 on the said upper pump casing 1 through seal ring 4, and said piezoelectric vibrator 3 is by metal substrate 301 and piezoelectric chip 302 bonding forming; All be bonded with valve block 5 in the inlet of pump chamber on the upper pump casing 1 102 and outlet valve pocket 103 and the inlet of pump chamber 202 on the lower pump body 2 and outlet valve pocket 203; On described upper pump casing 1; Import A is adjacent between the pump chamber 102, be communicated with through runner between the chamber 101 respectively between two adjacent pump chambers 102 and between outlet valve pocket 103 and the adjacent pump chamber 102; Outlet valve pocket 103 also is communicated with outlet B, the said series connection pump chamber 102 and piezoelectric vibrator 3 common formation pumps in series I that is positioned on the upper pump casing 1; On described lower pump body 2; Import A ' is adjacent between the pump chamber 202, is communicated with through runner between the chamber 201 respectively between two adjacent pump chambers 202 and between outlet valve pocket 203 and the adjacent pump chamber 202, said series connection pump chamber 202 and the piezoelectric vibrator 3 formation pumps in series II jointly that are positioned on the lower pump body 2; The import A of said pumps in series I and the import A ' of pumps in series II are communicated with, the outlet valve pocket 103 of said pumps in series I is communicated with the outlet valve pocket 203 of pumps in series II, again be positioned at upper pump casing 1 on outlet B be communicated with, thereby pumps in series I and II pumps in series is parallelly connected.
Among the present invention; The alternating voltage phase difference that piezoelectric vibrator 3 is applied in two adjacent pump chambers is 180 degree; The distortion of cyclic bending that piezoelectric vibrator is produced under the alternating voltage effect make the pump chamber of pumps in series I and pumps in series II alternately increase or reduce, valve block 5 alternately opens and closes, thereby makes fluid flow into, export the B outflow from described two pumps in series import A and A '.
In the preceding halftime as shown in Figure 4; First and the 3rd piezoelectric vibrator 3 downwarpings distortion from left to right, second piezoelectric vibrator 3 are bent upwards distortion; Thereby make: among the pumps in series I; The first and the 3rd pump chamber 102 volumes from left to right increase, second pump chamber, 102 volumes reduce, and the first and the 3rd valve block 5 is opened, the second and the 4th valve block 5 is closed, and fluid gets into first pump chamber, gets into the 3rd pump chamber from second pump chamber from import A; Simultaneously; Among the pumps in series II; The first and the 3rd pump chamber 202 volumes from left to right reduce, second pump chamber, 202 volumes increase, and the first and the 3rd valve block 5 is closed, the second and the 4th valve block is opened, and fluid gets into second chamber, gets into valve pocket 203 from the 3rd chamber, discharges through outlet B from first chamber.
Second half as shown in Figure 5 is interim; First and the 3rd piezoelectric vibrator 3 from left to right is bent upwards distortion, second piezoelectric vibrator 3 downwarpings distortion; Thereby make: among the pumps in series II; The first and the 3rd pump chamber 202 volumes from left to right increase, second pump chamber, 202 volumes reduce, and the first and the 3rd valve block 5 is opened, the second and the 4th valve block 5 is closed, and fluid gets into first chamber, gets into the 3rd chamber from second chamber through import A ' from import A; Simultaneously; Among the pumps in series I; The first and the 3rd pump chamber 102 volumes from left to right reduce, second pump chamber, 102 volumes increase, and the first and the 3rd valve block 5 is closed, the second and the 4th valve block is opened, and fluid gets into second chamber, gets into valve pocket 103 from the 3rd chamber, discharges through outlet B from first chamber.
Claims (2)
1. the piezoelectric pump of a series-multiple connection combination drive, it is characterized in that: upper pump casing is connected through screw with lower pump body; 2-20 piezoelectric vibrator is crimped between the pump chamber and the pump chamber on the lower pump body on the said upper pump casing through seal ring, and said piezoelectric vibrator is by metal substrate and piezoelectric chip is bonding forms; All be bonded with valve block at the inlet of the pump chamber of upper pump casing and outlet valve pocket and the pump chamber of lower pump body and the inlet of outlet valve pocket; On described upper pump casing; Import is adjacent between the pump chamber, be communicated with through runner between the chamber respectively between two adjacent pump chambers and between outlet valve pocket and the adjacent pump chamber; The outlet valve pocket also is communicated with outlet, and said series connection pump chamber and the piezoelectric vibrator that is positioned on the upper pump casing constitutes pumps in series I jointly; On described lower pump body; Import is adjacent between the pump chamber, be communicated with through runner between the chamber respectively between two adjacent pump chambers and between outlet valve pocket and the adjacent pump chamber, and said series connection pump chamber and the piezoelectric vibrator that is positioned on the lower pump body constitutes pumps in series II jointly; The import of the import of said pumps in series I and pumps in series II is communicated with, the outlet valve pocket of said pumps in series I is communicated with the outlet valve pocket of pumps in series II, again be positioned at upper pump casing on outlet be communicated with.
2. according to the piezoelectric pump of the said a kind of series-multiple connection combination drive of claim 1, it is characterized in that: the alternating voltage phase difference that piezoelectric vibrator applied in two adjacent pump chambers is 180 degree.
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| CN2012101755067A CN102678528A (en) | 2012-05-23 | 2012-05-23 | Series-parallel hybrid-driven piezoelectric pump |
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| CN106837759A (en) * | 2017-03-10 | 2017-06-13 | 广东捷成科创电子股份有限公司 | A kind of three chamber supercharging air pumps |
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Application publication date: 20120919 |