CN209892419U

CN209892419U - Series-parallel cavity driven miniature piezoelectric gas compressor

Info

Publication number: CN209892419U
Application number: CN201920311543.3U
Authority: CN
Inventors: 俞迈; 陈松; 罗罕频; 何力钧
Original assignee: Zhejiang Normal University CJNU
Current assignee: Zhejiang Normal University CJNU
Priority date: 2019-03-03
Filing date: 2019-03-03
Publication date: 2020-01-03
Anticipated expiration: 2029-03-03

Abstract

The utility model belongs to the technical field of miniature gas compressors, in particular to a miniature piezoelectric gas compressor driven by a series-parallel cavity, which integrally comprises a sleeve, an upper cover, an upper plate, a lower cover, a first driving block, a second driving block, a third driving block, a sealing ring and a cooling jacket; a first driving block is arranged between the lower end face of the upper cover and the upper end face of the upper plate, a second driving block is arranged between the lower end face of the upper plate and the upper end face of the lower plate, and a third driving block is arranged between the lower end face of the lower plate and the upper end face of the lower cover; the first driving block comprises three first piezoelectric vibrators, the second driving block comprises two second piezoelectric vibrators, and the third driving block comprises a third piezoelectric vibrator. Features and advantages: the gas accumulation pressurization is realized in a mode that the number of the cavities in each driving block is decreased progressively, the large flow and the large pressure can be realized simultaneously in work, and the whole piezoelectric booster pump is simple in structure and low in cost and consists of the piezoelectric vibrators, the one-way valves and the cover plate.

Description

Series-parallel cavity driven miniature piezoelectric gas compressor

Technical Field

The utility model belongs to the technical field of miniature gas compressor, concretely relates to series-parallel cavity driven miniature piezoelectric gas compressor.

Background

Due to the advantages of small volume, compact structure, high control precision and the like, the micro compressor is widely applied to the fields of electronic cooling, chemical synthesis, gas delivery, aerospace and the like. Chinese patent CN105321404A proposes an electromagnetic compressor, which mainly comprises a fixed shell, an air inlet pipe, an air outlet pipe, a cylinder, a piston, a transmission frame, an armature core and an electromagnetic coil, and the electromagnetic compressor is easy to control and has large electromagnetic force; chinese patent CN207048923U proposes a single-drive natural gas micro-circulation compressor, which adopts a vertical structure to design the compressor structure, and is driven by a motor, so that the occupied area is small, and the maintenance and the transportation are convenient. However, the micro gas compressor driven by the motor has a complex structure, a large volume, high power consumption and electromagnetic interference, and is not suitable for system integration and miniaturization. Pneumatic and electrostatic gas compressors have been proposed in succession. The pneumatic type needs a separate air source for driving, and cannot be used for portable or independent instruments and equipment; in the electrostatic driving type, since the driving force of the diaphragm is small and high voltage is required for driving, it is difficult to output high pressure gas.

The micro piezoelectric gas compressor has the advantages of simple structure, low power consumption, high energy density, no electromagnetic interference and easy control, and is an effective method for constructing the micro gas compressor. However, most of the existing miniature piezoelectric gas compressors are of single-cavity structures, so that the pressure rise capacity of the compressors is insufficient, the pressure level for pumping fluid can only be reached, and the energy density is not high due to the limitation of the compressibility of gas and the driving capacity of a single piezoelectric vibrator, so that the practical application of the miniature piezoelectric gas compressors is limited.

The invention content is as follows:

to current miniature piezoelectric gas compressor not enough, the utility model provides a series-parallel cavity driven miniature piezoelectric gas compressor (following be abbreviated as miniature piezoelectric gas compressor) adopts following technical scheme: the whole body consists of a sleeve, an upper cover, an upper plate, a lower cover, a first driving block, a second driving block, a third driving block, a sealing ring and a cooling jacket; the upper cover, the upper plate, the lower plate and the lower cover are sequentially connected from top to bottom; a first driving block is arranged between the upper cover and the upper plate; the first driving block comprises three gas compression units, the three gas compression units are uniformly distributed between the upper cover and the upper plate, and each gas compression unit consists of a first piezoelectric vibrator, a first one-way valve, an upper cavity and a sealing ring; the upper plate is provided with upper chambers towards the three groups of first piezoelectric vibrators, and the three groups of first piezoelectric vibrators can realize volume change of the three groups of upper chambers corresponding to the upper plates through driving, so that gas driving in the chambers is realized; a second driving block is arranged between the upper plate and the lower plate; the second driving block comprises two gas compression units, the two gas compression units are uniformly distributed between the upper plate and the lower plate, and each gas compression unit consists of a second piezoelectric vibrator, a middle cavity, a second one-way valve and a sealing ring; the lower plate is provided with middle cavities towards the two groups of second piezoelectric vibrators, and the deformation of the two groups of second piezoelectric vibrators can realize the volume change of the two groups of middle cavities corresponding to the two groups of second piezoelectric vibrators, so that the gas drive in the cavities is realized; a third driving block is arranged between the lower plate and the lower cover; the third driving block comprises a gas compression unit, and the gas compression unit consists of a third piezoelectric vibrator, a lower cavity, a third one-way valve and a sealing ring; the lower cover is provided with a lower cavity facing the direction of the third piezoelectric vibrator, and the deformation of the third piezoelectric vibrator can realize the volume change of the corresponding lower cavity, so that the gas drive in the cavity is realized; it should be noted that the gas compression unit structures included in the first driving block, the second driving block and the third driving block are completely the same; the upper cover is provided with a gas inlet, and a first gas flow channel is formed inside the upper cover and the upper plate; one end of the first air flow channel is communicated with the air inlet, and the other end of the first air flow channel is connected with the three groups of upper cavities; first one-way valves are arranged between the first air flow channel and the three groups of upper chambers, and the first one-way valves realize one-way flow of air from the air inlet to the upper chambers; a second airflow channel is formed in the upper plate and the lower plate; one end of the second air flow channel is communicated with the three groups of upper cavities, and the other end of the second air flow channel is connected with the two groups of middle cavities; second one-way valves are arranged between the second channel and the two groups of middle cavities, and the second one-way valves realize one-way flow of gas from the upper cavities to the middle cavities; a third airflow channel is formed in the lower plate and the lower cover; one end of the third airflow channel is communicated with the two groups of middle cavities, and the other end of the third airflow channel is connected with the lower cavities; a third one-way valve is arranged between the third channel and the lower cavity, and the third one-way valve realizes the one-way flow of gas from the middle cavity to the lower cavity; a gas outlet is formed in the lower cover; an outlet valve is arranged between the gas outlet and the lower cavity, and the outlet valve realizes the unidirectional flow of gas from the lower cavity to the gas outlet; the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are formed by concentrically bonding a metal substrate and a piezoelectric ceramic piece; sealing rings are arranged on the sides, facing the cavity, of the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator in a matched mode, so that the sealing performance of the corresponding cavities is guaranteed; the number of the first piezoelectric vibrators, the number of the second piezoelectric vibrators and the number of the third piezoelectric vibrators are sequentially reduced, and the number of the corresponding upper cavities, the number of the corresponding middle cavities and the number of the corresponding lower cavities are also sequentially reduced, namely the number of the gas compression units is sequentially reduced along the gas flowing direction, so that the progressive cumulative compression of the compressor can be realized; it should be noted that the series-parallel cavity driving means that the numbers of the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are arranged in a stepped manner from top to bottom to form a series cavity with the numbers of the upper cavity, the middle cavity and the lower cavity decreasing step by step, and meanwhile, each independent gas compression unit included in the first driving block, the second driving block and the third driving block respectively forms a group of parallel cavities; in order to effectively dissipate heat when the miniature piezoelectric gas compressor works, a cooling jacket is arranged on the outer side of the miniature piezoelectric gas compressor, is sleeved on the periphery of the upper cover, the upper plate, the lower plate and the lower cover connector and fully contacts with the peripheral surfaces of the upper cover, the upper plate, the lower plate and the lower cover connector, and heat-conducting glue is coated on the contact surface; the upper cover, the upper plate, the lower plate and the lower cover connecting body are connected to form a whole; a cooling pipeline is arranged on the outer surface of the cooling jacket; the cooling pipeline is a spiral cooling pipeline; it should be noted that the spiral cooling pipeline is arranged to enable the cooling liquid to stay in the cooling jacket for a longer time, so as to enhance the heat dissipation effect; the periphery of the cooling jacket is connected with a sleeve, and a cooling liquid inlet and a cooling liquid outlet are formed in the sleeve; when the miniature piezoelectric gas compressor works, cooling liquid flows in from the cooling liquid inlet and flows out from the cooling liquid outlet through the cooling pipeline to take away heat, and the heat dissipation effect is achieved.

Due to the limitation of the material characteristics (brittleness) of the piezoelectric ceramic, the diameter of a single piezoelectric vibrator cannot be too large (large deformation), so that the piezoelectric wafer is prevented from being broken, the volume change of the inlet cavity is limited (namely the output flow is limited), the micro piezoelectric gas compressor obtains the large volume change of the inlet cavity by expanding the parallel connection number of the gas compression units, the limitation that the diameter of the single wafer type piezoelectric vibrator cannot be too large is broken through, and the large flow output can be realized. Meanwhile, the miniature piezoelectric gas compressor respectively performs first-stage compression, second-stage compression and third-stage gas accumulation compression on gas in the upper cavity, the middle cavity and the lower cavity. In the process of high-frequency vibration driving of the piezoelectric vibrator, the one-way valve can have certain gas reverse leakage, large-volume gas is sucked through the front-stage cavity to sufficiently supply accumulated compression to the next-stage cavity (the gas which is supplied by the front-stage cavity more can make up the gas reverse leakage of the one-way valve), the gas compression amount of each stage of cavity can be effectively accumulated, large pressure is obtained, and the miniature piezoelectric gas compressor has larger energy density.

The ideal working process of this embodiment can be divided into an initial state, a first working state and a second working state.

Initial state: and no alternating voltage is applied, and all the piezoelectric vibrators are not deformed.

The first working state: applying voltage opposite to the polarization direction of the piezoelectric ceramic piece to three first piezoelectric vibrators in the first driving assembly and a third piezoelectric vibrator in the third driving assembly, and applying voltage in the same polarization direction as the piezoelectric ceramic piece to two second piezoelectric vibrators in the second driving assembly; three first piezoelectric vibrators in the first driving assembly and a third piezoelectric vibrator in the third driving assembly vibrate upwards, two second piezoelectric vibrators in the second driving assembly vibrate downwards, the pressure in all the cavities is increased when the volume of the upper cavity is increased, the pressure in all the cavities is decreased when the volume of the middle cavity is decreased, the pressure in the cavities is increased when the volume of the lower cavity is increased, the pressure in the lower cavity is decreased when the volume of the lower cavity is increased, all the first check valves and the third check valves are opened, and gas enters the upper cavity through the gas inlet and the first gas flow channel in sequence; the gas in the middle chamber is forced into the lower chamber.

The second working state: applying voltages in the same polarization direction as the piezoelectric ceramic pieces to three first piezoelectric vibrators in the first driving assembly and three piezoelectric vibrators in the third driving assembly, and applying voltages in the opposite polarization direction to the piezoelectric ceramic pieces to two second piezoelectric vibrators in the second driving assembly; three first piezoelectric vibrators in the first driving assembly and a third piezoelectric vibrator in the third driving assembly vibrate downwards, two second piezoelectric vibrators in the second driving assembly vibrate upwards, the pressure in all the upper cavities is reduced, the pressure in all the middle cavities is reduced, the pressure in the lower cavities is reduced, the pressure in all the middle cavities is increased, the pressure in the lower cavities is reduced, all the second one-way valves and the outlet valves are enabled to be opened, and the gas in the upper cavities is pressed into the middle cavities; the lower chamber discharges high-pressure gas through the gas outlet.

The micro piezoelectric gas compressor respectively performs first-stage compression, second-stage compression and third-stage gas accumulation compression on gas in the upper cavity, the middle cavity and the lower cavity, large-volume gas is supplied through the previous-stage cavity to sufficiently supply the next-stage cavity for effective pressurization, reverse leakage of the check valve is compensated, and excellent gas pressurization effect can be obtained through multi-stage accumulation compression; under the continuous driving of the alternating voltage, the first working state and the second working state are repeatedly changed, and continuous large-flow/high-pressure gas can be output.

The utility model discloses a characteristic and advantage lie in: 1. the large volume change of the inlet cavity is obtained by expanding the parallel number of the gas compression units, the limitation that the diameter of a single piezoelectric vibrator cannot be too large is broken through, and large flow output can be realized; 2. the cavity of the previous stage of driving block sucks a large amount of gas to sufficiently supply the cavity of the next stage of driving block for compression, the reverse leakage of the one-way valve is compensated, the gas compression amount of each stage of cavity can be effectively accumulated, the energy density is high, the energy conversion efficiency is high, and high-pressure gas output can be realized; 3. the whole piezoelectric vibrator, the one-way valve and the cover plate are arranged, so that the structure is simple and the integration is easy.

Description of the drawings:

fig. 1 is a cross-sectional view of the structure in an initial state according to a preferred embodiment of the present invention;

fig. 2 is a cross-sectional view of the structure of a first working state in a preferred embodiment of the present invention;

fig. 3 is a cross-sectional view of a second operation state of a preferred embodiment of the present invention;

fig. 4 is a layout of spiral cooling passages according to a preferred embodiment of the present invention.

Wherein: 1-a sleeve; 11-coolant inlet; 12-coolant outlet; 2-covering the upper cover; 20-a first airflow channel; 21-gas inlet; 3-upper plate; 30-a second airflow channel; 31-an upper chamber; 4-lower plate; 40-a third airflow channel; 41-lumen; 5-lower cover; 51-a lower cavity; 52-gas outlet; 61-a first piezoelectric vibrator; 62-a second piezoelectric vibrator; 63-a third piezoelectric vibrator; 6 a-piezoelectric ceramic plate; 6 b-a metal substrate; 71-a first one-way valve; 72-a second one-way valve; 73-a third one-way valve; 74-an outlet valve; 8-sealing ring; 9-cooling jacket; 91-a cooling channel; 92-heat conducting glue; i-a first drive block; II-a second driving block; III-third drive block.

The specific implementation mode is as follows:

the technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the directions or positional relationships based on the directions or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings. It is to be understood that the description of the embodiments herein is for purposes of illustration and explanation only and is not intended to limit the invention.

Referring to fig. 1, 2, 3 and 4, the present invention provides a series-parallel cavity driven micro piezoelectric gas compressor, which integrally comprises a sleeve 1, an upper cover 2, an upper plate 3, a lower plate 4, a lower cover 5, a first driving block I, a second driving block II, a third driving block III, a sealing ring 8 and a cooling jacket 9; the upper cover 2, the upper plate 3, the lower plate 4 and the lower cover 5 are sequentially connected from top to bottom; a first driving block I is arranged between the upper cover 2 and the upper plate 3; the first driving block I comprises three gas compression units, the three gas compression units are uniformly distributed between the upper cover 2 and the upper plate 3, and each gas compression unit consists of a first piezoelectric vibrator 61, a first one-way valve 71, an upper cavity 31 and a sealing ring 8; the upper plate 3 is provided with upper chambers 31 towards the three groups of first piezoelectric vibrators 61, and the deformation of the three groups of first piezoelectric vibrators 61 can realize the volume change of the three groups of upper chambers 31 corresponding to the deformation of the three groups of first piezoelectric vibrators, so that the gas drive in the cavity is realized; a second driving block II is arranged between the upper plate 3 and the lower plate 4; the second driving block II comprises two gas compression units, the two gas compression units are uniformly distributed between the upper plate 3 and the lower plate 4, and each gas compression unit consists of a second piezoelectric vibrator 62, a middle cavity 41, a second one-way valve 72 and a sealing ring 8; the lower plate 4 is provided with middle cavities 41 towards the two groups of second piezoelectric vibrators 62, and the deformation of the two groups of second piezoelectric vibrators 62 can realize the volume change of the two groups of middle cavities 41 corresponding to the two groups of second piezoelectric vibrators, so that the gas driving in the cavity is realized; a third driving block III is arranged between the lower plate 4 and the lower cover 5; the third driving block III comprises a gas compression unit, and the gas compression unit is composed of a third piezoelectric vibrator 63, a lower cavity 51, a third one-way valve 73 and a sealing ring 8; a lower cavity 51 is formed in the direction of the lower cover 5 facing the third piezoelectric vibrator 63, and the deformation of the third piezoelectric vibrator 63 can realize the volume change of the lower cavity 51 corresponding to the deformation, so that the gas driving in the cavity is realized; it should be noted that the gas compression unit structures included in the first driving block I, the second driving block II, and the third driving block III are completely the same; the upper cover 2 is provided with a gas inlet 21, and the upper cover 2 and the upper plate 3 are internally provided with a first gas flow channel 20; one end of the first air flow channel 20 is communicated with the air inlet 21, and the other end is connected with the three groups of upper chambers 31; a first one-way valve 71 is arranged between the first air flow channel 20 and the three groups of upper chambers 31, and the first one-way valve 71 realizes the one-way flow of air from the air inlet 21 to the upper chambers 31; a second airflow channel 30 is formed inside the upper plate 3 and the lower plate 4; one end of the second air flow channel 30 is communicated with the three groups of upper cavities 31, and the other end is connected with the two groups of middle cavities 41; a second one-way valve 72 is arranged between the second channel 30 and the two groups of middle cavities 41, and the second one-way valve 72 realizes the one-way flow of gas from the upper cavity 31 to the middle cavities 41; a third airflow channel 40 is formed inside the lower plate 4 and the lower cover 5; one end of the third air flow channel 40 is communicated with the two groups of middle cavities 41, and the other end is connected with the lower cavity 51; a third one-way valve 73 is arranged between the third channel 40 and the lower cavity 51, and the third one-way valve 73 realizes the one-way flow of gas from the middle cavity 41 to the lower cavity 51; a gas outlet 52 is formed in the lower cover 5; an outlet valve 74 is arranged between the gas outlet 52 and the lower cavity 51, and the outlet valve 74 realizes the unidirectional flow of gas from the lower cavity 51 to the gas outlet 52; the first piezoelectric vibrator 61, the second piezoelectric vibrator 62 and the third piezoelectric vibrator 63 are all formed by concentrically bonding a metal substrate 6b and a piezoelectric ceramic piece 6 a; the sealing rings 8 are arranged on the sides, facing the cavity, of the first piezoelectric vibrator 61, the second piezoelectric vibrator 62 and the third piezoelectric vibrator 63 in a matched mode, so that the sealing performance of the corresponding cavities is guaranteed; the number of the first piezoelectric vibrators 61, the second piezoelectric vibrators 62 and the third piezoelectric vibrators 63 is sequentially reduced, and the number of the corresponding upper cavities 31, the middle cavities 41 and the lower cavities 51 is also sequentially reduced, namely the number of the gas compression units is sequentially reduced along the gas flowing direction, so that the gradual accumulative compression of the compressor can be realized; it should be noted here that the series-parallel cavity driving means that the numbers of the first piezoelectric vibrators 61, the second piezoelectric vibrators 62 and the third piezoelectric vibrators 63 are arranged in a stepped manner from top to bottom to form a series cavity with the numbers of the upper cavity 31, the middle cavity 41 and the lower cavity 51 decreasing step by step, and meanwhile, each independent gas compression unit included in the first driving module I, the second driving module II and the third driving module III respectively forms a group of parallel cavities; in order to effectively dissipate heat when the miniature piezoelectric gas compressor works, a cooling jacket 9 is arranged on the outer side of the miniature piezoelectric gas compressor, the cooling jacket 9 is sleeved on the periphery of a connecting body of the upper cover 2, the upper plate 3, the lower plate 4 and the lower cover 5 and fully contacts with the peripheral surfaces of the connecting body of the upper cover 2, the upper plate 3, the lower plate 4 and the lower cover 5, and heat-conducting glue 92 is coated on the contact surface; the upper cover 2, the upper plate 3, the lower plate 4 and the lower cover 5 are connected together to form a whole; a cooling pipeline 91 is arranged on the outer surface of the cooling jacket 9; the cooling pipeline 91 is a spiral cooling pipeline; it should be noted that the spiral cooling pipe 91 is provided to enable the cooling liquid to stay in the cooling jacket for a longer time, so as to enhance the heat dissipation effect; the periphery of the cooling jacket 9 is connected with a sleeve 1, and the sleeve 1 is provided with a cooling liquid inlet 11 and a cooling liquid outlet 12; when the miniature piezoelectric gas compressor works, cooling liquid flows in from the cooling liquid inlet 11 and flows out from the cooling liquid outlet 12 through the cooling pipeline 91 so as to take away heat, and the heat dissipation effect is achieved.

Due to the limitation of the material characteristics (brittleness) of the piezoelectric ceramic, the diameter of a single piezoelectric vibrator cannot be too large (large deformation), so that the piezoelectric wafer is prevented from being broken, the volume change of the inlet cavity is limited (namely the output flow is limited), the micro piezoelectric gas compressor obtains the large volume change of the inlet cavity by expanding the parallel connection number of the gas compression units, the limitation that the diameter of the single wafer type piezoelectric vibrator cannot be too large is broken through, and the large flow output can be realized. Meanwhile, the micro piezoelectric gas compressor respectively performs first-stage compression, second-stage compression and third-stage gas accumulation compression on gas in the upper cavity 31, the middle cavity 41 and the lower cavity 51. In the process of high-frequency vibration driving of the piezoelectric vibrator, the one-way valve can have certain gas reverse leakage, large-volume gas is sucked through the front-stage cavity to sufficiently supply accumulated compression to the next-stage cavity (the gas which is supplied by the front-stage cavity more can make up the gas reverse leakage of the one-way valve), the gas compression amount of each stage of cavity can be effectively accumulated, large pressure is obtained, and the miniature piezoelectric gas compressor has larger energy density.

The first working state: applying voltage opposite to the polarization direction of the piezoelectric ceramic plates to three first piezoelectric vibrators 61 in the first driving block I and a third piezoelectric vibrator 63 in the third driving block III, and applying voltage in the same polarization direction as the piezoelectric ceramic plates to two second piezoelectric vibrators 62 in the second driving block II; three first piezoelectric vibrators 61 in the first driving block I and a third piezoelectric vibrator 63 in the third driving block III vibrate upwards, two second piezoelectric vibrators 62 in the second driving block II vibrate downwards, the pressure in all the cavities is reduced when the volume of the upper cavity 31 is increased, the pressure in all the cavities is increased when the volume of the middle cavity 41 is reduced, the pressure in all the cavities is increased when the volume of the lower cavity 51 is increased, all the first check valves 71 and the third check valves 73 are opened, and gas enters the upper cavity 31 through the gas inlet 21 and the first gas flow channel 20 in sequence; the gas in the middle chamber 41 is forced into the lower chamber 51.

The second working state: applying voltages in the same polarization direction as the piezoelectric ceramic plates to three first piezoelectric vibrators 61 in the first driving block I and a third piezoelectric vibrator 63 in the third driving block III, and applying voltages in the opposite polarization direction to the piezoelectric ceramic plates to two second piezoelectric vibrators 62 in the second driving block II; three first piezoelectric vibrators 61 in the first driving block I and a third piezoelectric vibrator 63 in the third driving block III vibrate downwards, two second piezoelectric vibrators 62 in the second driving block II vibrate upwards, the pressure in all the upper cavities 31 is increased when the volumes of the upper cavities 31 are reduced, the pressure in all the middle cavities 41 is reduced when the volumes of the middle cavities 41 are increased, the pressure in the lower cavities 51 is increased when the volumes of the lower cavities 51 are reduced, all the second one-way valves 72 and the outlet valves 74 are opened, and the gas in the upper cavities 31 is pressed into the middle cavities 41; the lower chamber 51 discharges high pressure gas through the gas outlet 52.

The micro piezoelectric gas compressor respectively performs first-stage compression, second-stage compression and third-stage gas accumulation compression on gas in the upper cavity 31, the middle cavity 41 and the lower cavity 51, large-volume gas is supplied through the previous-stage cavity to sufficiently supply the next-stage cavity for effective pressurization, reverse leakage of the check valve is compensated, and excellent gas pressurization effect can be obtained through multi-stage accumulation compression; under the continuous driving of the alternating voltage, the three working states are repeatedly changed, and continuous large-flow/high-pressure gas can be output.

The above embodiments are provided for understanding the present invention, and not for limiting, and those skilled in the art may make various changes and modifications without departing from the principle of the invention, but these corresponding changes and modifications should fall within the scope of the appended claims.

Claims

1. The utility model provides a miniature piezoelectric gas compressor of series-parallel cavity driven which characterized in that: the whole body consists of a sleeve, an upper cover, an upper plate, a lower cover, a first driving block, a second driving block, a third driving block, a sealing ring and a cooling jacket; the upper cover, the upper plate, the lower plate and the lower cover are sequentially connected from top to bottom; a first driving block is arranged between the upper cover and the upper plate; the first driving block comprises three gas compression units, the three gas compression units are uniformly distributed between the upper cover and the upper plate, and each gas compression unit consists of a first piezoelectric vibrator, a first one-way valve, an upper cavity and a sealing ring; the upper plates are provided with upper cavities towards the three groups of first piezoelectric vibrators; a second driving block is arranged between the upper plate and the lower plate; the second driving block comprises two gas compression units, the two gas compression units are uniformly distributed between the upper plate and the lower plate, and each gas compression unit consists of a second piezoelectric vibrator, a middle cavity, a second one-way valve and a sealing ring; the lower plate is provided with middle cavities towards the two groups of second piezoelectric vibrators; a third driving block is arranged between the lower plate and the lower cover; the third driving block comprises a gas compression unit, and the gas compression unit consists of a third piezoelectric vibrator, a lower cavity, a third one-way valve and a sealing ring; a lower cavity is formed in the lower cover towards the third piezoelectric vibrator; the upper cover is provided with a gas inlet, and a first gas flow channel is formed inside the upper cover and the upper plate; one end of the first air flow channel is communicated with the air inlet, and the other end of the first air flow channel is connected with the three groups of upper cavities; first one-way valves are arranged between the first air flow channel and the three groups of upper cavities; a second airflow channel is formed in the upper plate and the lower plate; one end of the second air flow channel is communicated with the three groups of upper cavities, and the other end of the second air flow channel is connected with the two groups of middle cavities; second one-way valves are arranged between the second channel and the two groups of middle cavities; a third airflow channel is formed in the lower plate and the lower cover; one end of the third airflow channel is communicated with the two groups of middle cavities, and the other end of the third airflow channel is connected with the lower cavities; a third one-way valve is arranged between the third channel and the lower cavity; a gas outlet is formed in the lower cover; an outlet valve is arranged between the gas outlet and the lower cavity; the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator are formed by concentrically bonding a metal substrate and a piezoelectric ceramic piece; sealing rings are arranged on one sides, facing the cavity, of the first piezoelectric vibrator, the second piezoelectric vibrator and the third piezoelectric vibrator in a matched mode; the number of the first piezoelectric vibrators, the number of the second piezoelectric vibrators and the number of the third piezoelectric vibrators are sequentially reduced, and the number of the corresponding upper cavities, the corresponding middle cavities and the corresponding lower cavities are also sequentially reduced, namely the number of the gas compression units is sequentially reduced along the gas flowing direction.

2. The micro piezoelectric gas compressor driven by the series-parallel cavity of claim 1, wherein: the cooling sleeve is sleeved on the periphery of the upper cover, the upper plate, the lower plate and the lower cover connecting body and is fully contacted with the peripheral surfaces of the upper cover, the upper plate, the lower plate and the lower cover connecting body, and the contact surface is coated with heat-conducting glue; the cooling jacket is provided with a cooling pipeline; the periphery of the cooling jacket is connected with a sleeve, and a cooling liquid inlet and a cooling liquid outlet are formed in the sleeve.

3. The micro piezoelectric gas compressor driven by the series-parallel cavity according to claim 2, wherein: the cooling pipeline is a spiral cooling pipeline.