CN202579118U - Serial pump for driving fluid on double sides of piezoelectric vibrator - Google Patents
Serial pump for driving fluid on double sides of piezoelectric vibrator Download PDFInfo
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- CN202579118U CN202579118U CN 201220245371 CN201220245371U CN202579118U CN 202579118 U CN202579118 U CN 202579118U CN 201220245371 CN201220245371 CN 201220245371 CN 201220245371 U CN201220245371 U CN 201220245371U CN 202579118 U CN202579118 U CN 202579118U
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- 239000012530 fluid Substances 0.000 title claims abstract description 23
- 230000008676 import Effects 0.000 claims description 19
- 230000002146 bilateral effect Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 229960000074 biopharmaceutical Drugs 0.000 description 1
- 238000013270 controlled release Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
The utility model relates to a serial pump for driving fluid on double sides of a piezoelectric vibrator and belongs to the field of fluid transmission and control. Upper and lower pump bodies are connected through a screw, 2-20 piezoelectric vibrators are compression-jointed between pump cavities of the two pump bodies, and valve pieces are adhered at inlets of the pump cavities and an inlet of the pump cavity of the lower pump body; an external inlet of the upper pump body is communicated with the adjacent pump cavity, the two adjacent pump cavities and an inner outlet are respectively communicated with the adjacent pump cavity through flow channels among the cavities so as to form a serial pump I with the piezoelectric vibrators; an internal inlet of the lower pump body is communicated with the adjacent pump cavity, the two adjacent pump cavities through flow channels among the cavities, as well as the valve cavity and the adjacent pump cavity are communicated through flow channels among the cavities so as to form a serial pump II with the piezoelectric vibrators; and the internal inlet of the serial pump I is communicated with the internal inlet of the pump II, and the valve cavity of the pump II is communicated with the external outlet on the upper pump body. The serial pump has the advantages of utilizing a plurality of piezoelectric vibrators simultaneously driving the fluid on the two sides to form the serial piezoelectric pump, so that the flow rate is large, the pressure and the energy efficiency are high, and the serial pump is suitable for piezoelectric hydraulic driving with relativley high system back pressure.
Description
Technical field
The utility model belongs to the small accurate piezoelectric pump of microfluid transmission and the application of control field, is specifically related to a kind of pumps in series of piezoelectric vibrator bilateral driving fluid.
Background technique
As the important component part of MEMS, the research of piezoelectric pump receives the extensive concern of Chinese scholars always deeply.Initial piezoelectric pump only is output as purpose with microfluid, goes through the development of many decades, and the piezoelectric pump of some type is obtaining practical application aspect conveying of microfluids such as chemical analysis, bio-pharmaceuticals, Medicines controlled release and the control.Except simple FLUID TRANSPORTATION; The microminiature hydraulic system that drives based on piezoelectric pump again of people in recent years; Be called for short piezoelectric hydraulic driver or piezoelectric hydraulic motor:, its objective is that the coupling that utilizes fluid converts the double vibrations a little of piezoelectrics to macroscopical straight line motion of hydraulic cylinder piston like Chinese patent 200810051156.7,200920093242.4,201020180067.5 etc.
For satisfying different application requirements, people have proposed polytype piezoelectric chip pump and piezoelectric stack pump; For further improving the delivery pressure and the flow of pump; Satisfy the demand of emerging applications such as fuel-cell fuel supply, piezoelectric hydraulic driver; Series connection that people have successively proposed again to drive based on a plurality of chip type piezoelectric vibrators and parallel-connected pumps and the two-chamber parallel-connected pumps that drives based on two piezoelectric stacks; Like Chinese patent 02132855.2,201010118038.0 etc., piezoelectric stack pump wherein can obtain higher delivery pressure and big flow, but cost is too high; The price of piezoelectric stack is generally thousands of even up to ten thousand yuans, is unfavorable for applying of pump; Though piezoelectric chip pump driving force relatively a little less than, with low cost, only several units of the price of piezoelectric chip, and be convenient to improve through the multi-cavity serial or parallel connection output capability of pump have more practicability.
The common feature of above-mentioned many oscillator piezoelectric pumps is the one-sided driving fluid of piezoelectric vibrator, that is: the pump chamber barrier film of piezoelectric stack pump and chip type piezoelectric vibrator self is only one-sided contacts with fluid, and the driving force of piezoelectric vibrator convection cell is not fully exerted; More mainly, such pump is inappropriate for structure piezoelectric hydraulic driver.Reason is: the extremely small and real fluid of the distortion of piezoelectric vibrator has compressibility, and the piezoelectric hydraulic driver must adopt accumulator to provide back pressure to increase system stiffness, to avoid hydraulic cylinder piston to creep; But because piezoelectric vibrator or the pump chamber barrier film is one-sided contacts with fluid; The system back pressure of this moment has become the load of piezoelectric vibrator, has seriously reduced the overall useful horsepower output of driver; Also can cause the chip type piezoelectric vibrator damaged when system back pressure is excessive, reduce the energy efficiency and the reliability of piezoelectric hydraulic driver.
Summary of the invention
To existing piezoelectric pump self intrinsic some narrow limitation or drawback; And emerging applications such as fuel cell and piezoelectric hydraulic driver are to the demands status of high pressure, big flow piezoelectric pump; The utility model proposes a kind of pumps in series of piezoelectric vibrator bilateral driving fluid, thereby promotes output flow, pressure, energy efficiency and the reliability of piezoelectric pump synchronously.
The technological scheme that the utility model adopts is: upper pump casing is connected through screw with lower pump body; 2-20 piezoelectric vibrator is crimped on through seal ring between the pump chamber of pump chamber and lower pump body of upper pump casing, and said piezoelectric vibrator is by metal substrate and piezoelectric chip is bonding forms; All be bonded with valve block at the inlet of the pump chamber of upper pump casing and the pump chamber of lower pump body and the inlet of valve pocket; On said upper pump casing; Outside import is adjacent pump chamber and is communicated with; Is communicated with through runner between the chamber respectively between two adjacent pump chambers and between inner outlet and the adjacent pump chamber, the valve block and the piezoelectric vibrator that saidly are positioned at outside import, the pump chamber of connecting on the upper pump casing, inside exports and are positioned at said pump chamber constitute pumps in series I jointly; On described lower pump body; Inner import is adjacent between the pump chamber, be communicated with through runner between the chamber respectively between two adjacent pump chambers and between valve pocket and the adjacent pump chamber, and the valve block and the piezoelectric vibrator that saidly are positioned at inside import on the lower pump body, connect pump chamber, valve pocket and are positioned at said pump chamber and valve pocket constitute pumps in series II jointly; The inside import connection of outlet of the inside of said pumps in series I and pumps in series II, the valve pocket of said pumps in series II be positioned at upper pump casing on externally ported the connection.
A kind of mode of execution of the utility model is, the alternating voltage phase difference that piezoelectric vibrator applied in two adjacent pump chambers is 180 degree.During work; The distortion of cyclic bending that piezoelectric vibrator is produced under the alternating voltage effect pump chamber of pumps in series I and pumps in series II is alternately increased or reduce, valve block alternately opens and closes, thereby make fluid from the outside import A on the upper pump casing 1 flow into, externally ported B ' outflow.
When the piezoelectric pump of the utility model is worked, also be cascaded structure between pumps in series I and the pumps in series II, the pumps in series that is constituted comprises 2n series connection pump chamber altogether, so delivery pressure is P=2nP
o, flow does
Wherein: n is the quantity of piezoelectric vibrator, Q
oAnd P
oOutput flow and the pressure of pumps in series I or pumps in series II when being respectively the work of single piezoelectric vibrator.
The characteristic of the utility model is to adopt a plurality of both sides piezoelectric vibrator formation series voltage pump of driving fluid simultaneously, the advantage of being brought thus: the energy converting between mechanical efficient that 1. can improve output flow, pressure and the piezoelectric vibrator of piezoelectric pump significantly; When 2. being used to construct the piezoelectric hydraulic driver, system back pressure can not become the load of piezoelectric vibrator, also the unlikely piezoelectric vibrator that makes because of system back pressure is excessive is damaged.
Description of drawings
Fig. 1 is the structural profile schematic representation of a preferred embodiment piezoelectric pump of the utility model;
Fig. 2 is that the C-C of Fig. 1 is to view;
Fig. 3 a is the structural profile schematic representation of a preferred embodiment piezoelectric vibrator of the utility model;
Fig. 3 b is the left view of Fig. 3 a;
Fig. 4 is the utility model structural profile schematic representation of preceding half operation cycle of preferred embodiment piezoelectric pump;
Fig. 5 is the structural profile schematic representation of a later half operation cycle of preferred embodiment piezoelectric pump of the utility model;
Embodiment:
Like Fig. 1, Fig. 2, shown in Figure 3, upper pump casing 1 and lower pump body 2 are connected through screw; 2-20 piezoelectric vibrator 3 is crimped between the pump chamber 101 and the pump chamber 201 on the lower pump body 2 on the said upper pump casing 1 through seal ring 4, and said piezoelectric vibrator 3 is by metal substrate 301 and piezoelectric chip 302 bonding forming; All be bonded with valve block 5 at the inlet of the pump chamber 101 of upper pump casing 1 and the pump chamber 201 of lower pump body 2 and the inlet of valve pocket 203; On described upper pump casing 1; The pump chamber 101 that outside import A is adjacent is communicated with; Is communicated with through runner between the chamber 102 respectively between two adjacent pump chambers 101 and between inner outlet B and the adjacent pump chamber 101, said valve block 5 and the piezoelectric vibrator 3 that is positioned at outside import A, series connection pump chamber 101, the inner outlet B on the upper pump casing 1 and is in said pump chamber 101 be formation pumps in series I jointly; On described lower pump body 2; Is communicated with through runner between the chamber 202 respectively between the pump chamber 201 that inner import A ' is adjacent, between two adjacent pump chambers 201 and between valve pocket 203 and the adjacent pump chamber 201, said valve block 5 and the piezoelectric vibrator 3 that is positioned at inside import A ', series connection pump chamber 201, the valve pocket 203 on the lower pump body 2 and is in said pump chamber 201 and valve pocket 203 be formation pumps in series II jointly; The inside import A ' of the inside of said pumps in series I outlet B and pumps in series II is communicated with, valve pocket 203 connections of said pumps in series II also be positioned at upper pump casing 1 on externally ported B ' be communicated with.
A kind of mode of execution of the utility model is, the alternating voltage phase difference that piezoelectric vibrator applied in two adjacent pump chambers is 180 degree.During work; The distortion of cyclic bending that piezoelectric vibrator is produced under the alternating voltage effect pump chamber of pumps in series I and pumps in series I I is alternately increased or reduce, valve block alternately opens and closes, thereby make fluid from the outside import A on the upper pump casing 1 flow into, externally ported B ' outflow.
In the preceding halftime as shown in Figure 4; Dextrosinistral first and the 3rd piezoelectric vibrator 3 downwarpings distortion, second piezoelectric vibrator 3 are bent upwards distortion; Thereby make: among the pumps in series I; The dextrosinistral first and the 3rd pump chamber 101 volumes increase, second pump chamber, 101 volumes reduce, and the first and the 3rd valve block 5 is opened, second valve block 5 is closed, and fluid from outside import A gets into first pump chamber, gets into the 3rd pump chamber from second pump chamber; Simultaneously; Among the pumps in series II; The first and the 3rd pump chamber 201 volumes from left to right reduce, second pump chamber, 201 volumes increase, and the first and the 3rd valve block 5 is closed, the second and the 4th valve block is opened, and fluid gets into second chamber, gets into valve pocket 203 from the 3rd chamber, discharges through externally ported B ' from first chamber.
Second half as shown in Figure 5 is interim; Dextrosinistral first and the 3rd piezoelectric vibrator 3 is bent upwards distortion, second piezoelectric vibrator 3 downwarpings distortion; Thereby make: among the pumps in series I; The dextrosinistral first and the 3rd pump chamber 101 volumes reduce, second pump chamber, 101 volumes increase, and the first and the 3rd valve block 5 is closed, second valve block 5 is opened, and fluid gets into second pump chamber, gets into inner outlet B from the 3rd pump chamber from first chamber; Simultaneously; Among the pumps in series II; The first and the 3rd pump chamber 201 volumes from left to right increase, second pump chamber, 201 volumes reduce; The first and the 3rd valve block 5 is opened, the second and the 4th valve block is closed, and fluid gets into first chamber, gets into the 3rd chamber from second chamber from the inside import A ' that is communicated with the inside outlet B of pumps in series I, and no fluid is discharged in this halftime.
Claims (2)
1. the pumps in series of a piezoelectric vibrator bilateral driving fluid, it is characterized in that: upper pump casing is connected through screw with lower pump body; 2-20 piezoelectric vibrator is crimped on through seal ring between the pump chamber of pump chamber and lower pump body of upper pump casing, and said piezoelectric vibrator is by metal substrate and piezoelectric chip is bonding forms; All be bonded with valve block at the inlet of the pump chamber of upper pump casing and the pump chamber of lower pump body and the inlet of valve pocket; On said upper pump casing; Outside import is adjacent pump chamber and is communicated with; Is communicated with through runner between the chamber respectively between two adjacent pump chambers and between inner outlet and the adjacent pump chamber, the valve block and the piezoelectric vibrator that saidly are positioned at outside import, the pump chamber of connecting on the upper pump casing, inside exports and are positioned at said pump chamber constitute pumps in series I jointly; On described lower pump body; Inner import is adjacent between the pump chamber, be communicated with through runner between the chamber respectively between two adjacent pump chambers and between valve pocket and the adjacent pump chamber, and the valve block and the piezoelectric vibrator that saidly are positioned at inside import on the lower pump body, connect pump chamber, valve pocket and are positioned at said pump chamber and valve pocket constitute pumps in series II jointly; The inside import connection of outlet of the inside of said pumps in series I and pumps in series II, the valve pocket of said pumps in series II be positioned at upper pump casing on externally ported the connection.
2. according to the pumps in series of the said a kind of piezoelectric vibrator bilateral driving fluid of claim 1, it is characterized in that the alternating voltage phase difference that piezoelectric vibrator applied in two adjacent pump chambers is 180 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220245371 CN202579118U (en) | 2012-05-23 | 2012-05-23 | Serial pump for driving fluid on double sides of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220245371 CN202579118U (en) | 2012-05-23 | 2012-05-23 | Serial pump for driving fluid on double sides of piezoelectric vibrator |
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| Publication Number | Publication Date |
|---|---|
| CN202579118U true CN202579118U (en) | 2012-12-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220245371 Expired - Fee Related CN202579118U (en) | 2012-05-23 | 2012-05-23 | Serial pump for driving fluid on double sides of piezoelectric vibrator |
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| Country | Link |
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| CN (1) | CN202579118U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102678527A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Piezoelectric vibrator bilateral fluid driven series connection pump |
| CN109723629A (en) * | 2019-03-01 | 2019-05-07 | 浙江师范大学 | A kind of piezoelectric chip pump |
| CN110639075A (en) * | 2019-09-20 | 2020-01-03 | 浙江师范大学 | Piezoelectric peristaltic pump for blood conveying |
-
2012
- 2012-05-23 CN CN 201220245371 patent/CN202579118U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102678527A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Piezoelectric vibrator bilateral fluid driven series connection pump |
| CN109723629A (en) * | 2019-03-01 | 2019-05-07 | 浙江师范大学 | A kind of piezoelectric chip pump |
| CN110639075A (en) * | 2019-09-20 | 2020-01-03 | 浙江师范大学 | Piezoelectric peristaltic pump for blood conveying |
| CN110639075B (en) * | 2019-09-20 | 2022-06-10 | 浙江师范大学 | Piezoelectric peristaltic pump for blood conveying |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121205 Termination date: 20130523 |