CN102691693B - Precision stepping hydraulic cylinder driven by piezo-electricity wafer - Google Patents
Precision stepping hydraulic cylinder driven by piezo-electricity wafer Download PDFInfo
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- CN102691693B CN102691693B CN201210175464.7A CN201210175464A CN102691693B CN 102691693 B CN102691693 B CN 102691693B CN 201210175464 A CN201210175464 A CN 201210175464A CN 102691693 B CN102691693 B CN 102691693B
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Abstract
The invention relates to a precision stepping hydraulic cylinder driven by a piezo-electricity wafer, and belongs to technical field of mechanical-electrical-hydraulic integration. Cylinder heads are mounted at two ends of the cylinder body; a double-headed piston is mounted inside the cylinder body and divides the cylinder body into a first cylinder cavity and a second cylinder cavity; 2 to 20 piezo-electricity vibrators are crimped respectively between the first pump cover and the cylinder body and between the second pump cover and the cylinder body, so as to form a series pump I and a series pump II; the outlet of the series pump I is communicated with the first cylinder cavity of the cylinder body, and the inlet of the series pump I is communicated with a first accumulator through a pipeline, and then connected with the second cylinder cavity through a first switch valve and a first through hole in the cylinder body; and similarly, the outlet of the series pump II is communicated with the second cylinder cavity of the cylinder body, and the inlet of the series pump II is communicated with the second accumulator through a pipeline, and then connected with the first cylinder cavity through a second switch valve and a second through hole in the cylinder body. The precision stepping hydraulic cylinder has the advantages that fluid is driven by the piezo-electricity vibrators from two sides, the drive capability is strong, the reliability and stepping precision are high, and precision digital stepping drive and positioning control of larger journey can be achieved by circulating one liquid drop each time.
Description
Technical field
The invention belongs to technical field of mechanical-electrical-hydraulic integration, be specifically related to the accurate step type hydraulic cylinder that a kind of piezoelectric chip drives, for the accurate stepper drive of Long Distances, location and vibration control.
Background technique
Along with the development of the field such as precision optical machinery processing, precision measuremnt, micro-medical science, precision optics engineering and Aero-Space, the accurate stepper drive of Long Distances, location and vibration control technology research are subject to the extensive concern of countries in the world scholar.At present for constructing the functional materials such as the mainly electromagnetism of accurate displacement driver, magnetostriction, memory alloy and piezoelectric constant, wherein piezoelectric constant is because having high-energy-density, high power, High power output, high response frequency response, high-resolution and without advantages such as electromagnetic interference, is widely used.Common Precision Piezoelectric driver can be summarized as 4 classes simply: the direct-push type piezoelectric actuator 1) directly utilizing piezoelectric stack dilatation ouput force and displacement; 2) piezoelectric actuator of the enlarger such as lever or flexible hinge is adopted; 3) the clamped formula step actuator of multiple pressure electricity stack configurations is adopted; 4) the ultrasonic-type linear actuator utilizing ultrasonic wave principle to be formed.The structure of front two class piezoelectric actuators is simple, High power output, but because of movement travel or control range too small, practical application receives certain restriction; Though rear two class piezoelectric actuators can obtain larger movement travel, but structure and control complicated, require that the machining accuracy of parts is high, and rely on frictional force transmitting force and displacement, therefore feed accuracy and rigidity is low, ouput force is far below the driving force of piezoelectrics self, only has a few to tens of newton, driving force and all larger use occasion of displacement cannot be met, and precision can be caused when surface of friction pair serious wear to reduce even cannot use.
In view of the narrow limitation of conventional piezoelectric driver self and association area are to the demand of compact structure, high ouput force, Large travel range, highi degree of accuracy, the accurate step actuator of high energy efficiency, people successively propose several New Stepping piezoelectric hydraulic driver based on piezoelectricity and fluid couple drive, namely piezoelectric pump circulation of fluid is utilized to realize the driving of oil hydraulic cylinder, as Chinese patent 200810051156.7,200920093242.4,201020180067.5 etc.Because the distortion of piezoelectric vibrator is extremely small, real fluid has compressibility, therefore for improving system stiffness, avoiding hydraulic cylinder piston to creep, piezoelectric hydraulic driver must adopt accumulator to provide back pressure.But piezoelectric vibrator is all one-sided driving in existing piezoelectric hydraulic driver, namely piezoelectric vibrator only side directly or indirectly with fluid contact, therefore system back pressure can become piezoelectric vibrator load, seriously reduce the overall useful horsepower of driver and export, excessive system back pressure also can cause chip type piezoelectric vibrator damaged, thus the energy efficiency of existing piezoelectric hydraulic driver and reliability all very low.
Summary of the invention
For the narrow limitation on existing piezoelectric actuator and piezoelectric hydraulic driver applications, and the field such as Aero-Space, robot, precision machining is to the demands status of highi degree of accuracy, Long Distances precision driver, the present invention proposes the accurate step type hydraulic cylinder that a kind of piezoelectric chip drives.
The technical solution used in the present invention is: cylinder body two ends are provided with cylinder cap by screw; Be provided with double-head piston in cylinder body, described inner chamber of cylinder block is divided into the first cylinder chamber and the second cylinder chamber by described piston; Outer wall of cylinder block is provided with the first pump cover and the second pump cover by screw; Described outer wall of cylinder block is provided with the pump chamber and two valve pockets that two groups of quantity are 2-20, in described same group of pump chamber between two adjacent pump chambers and adjacent pump chamber connect respectively by runner between the chamber of two on described cylinder body with between valve pocket; First and second pump covers are respectively provided with the pump chamber that one group of quantity is 2-20, described same pump cover is connected respectively by runner between the chamber on its place pump cover between adjacent two pump chambers; Valve block is equipped with in two valve pockets in each pump chamber described and on cylinder body; Be crimped with piezoelectric vibrator by seal ring between series connection pump chamber on cylinder body first group series connection pump chamber and the first pump cover, the outlet of the series connection pump chamber on the import of first group of series connection pump chamber on cylinder body and the first pump cover, forms pumps in series I; Be crimped with piezoelectric vibrator by seal ring between series connection pump chamber on cylinder body second group series connection pump chamber and the second pump cover, the outlet of the series connection pump chamber on the import of second group of series connection pump chamber on cylinder body and the second pump cover, forms pumps in series II; The outlet of pumps in series I is communicated with the first cylinder chamber on cylinder body, and import is communicated with the first accumulator by the road, the first through hole again on the first switch valve and cylinder body is connected with the second cylinder chamber; Similarly, the outlet of described pumps in series II is communicated with the second cylinder chamber of cylinder body, and import is communicated with the second accumulator by the road, the second through hole again on second switch valve and cylinder body is connected with the first cylinder chamber.
Work when pumps in series I, II of the present invention are different; During work, in same pumps in series, in adjacent two pump chambers, the phase difference of piezoelectric vibrator driving voltage is 180 degree, and piezoelectric vibrator bending deflection direction is contrary.
In the present invention, the effect of two pumpss in series is to provide fluid driving forces, realizes the circulation of fluid and the driving of piston and control; The effect of switch valve is the break-make between the import of control two pumpss in series and two cylinder chambeies; The effect of accumulator improves the rigidity of fluid and the speed of response of piston.
In a non-operative state, the first switch valve and second switch valve are all in closed condition, and the set pressure of the first accumulator and the second accumulator is equal, and piezoelectric vibrator both sides hydrodynamic pressure is equal, do not produce bending deflection, and piston rest is motionless.
When pumps in series I works, the first switch valve is opened, and first through hole of import on the first switch valve and cylinder body of pumps in series I is communicated with the second cylinder chamber; When piezoelectric vibrator produces cyclic bending distortion by voltage effect, the hydrodynamic pressure in pump chamber alternately increases or reduces, thus promotes piston to left movement.
As shown in Figure 6, Figure 7, when pumps in series II works, second switch valve is opened, and second through hole of import on second switch valve and cylinder body of pumps in series II is communicated with the first cylinder chamber; When piezoelectric vibrator produces cyclic bending distortion by voltage effect, pump chamber fluid pressure alternately increases or reduces, thus promotion piston moves right.
According to the working principle of oil hydraulic cylinder of the present invention, the maximum movement speed of piston is
maximum feeding step-length is
maximum driving force is F=2 η
fnpS, wherein: η
vand η
ffor the coefficient relevant with piezoelectric vibrator structure and material parameter, energy storage pressure, fluid characteristics etc., the pump chamber variable quantity of Δ V caused by piezoelectric vibrator distortion, p is subject to the maximum fluid driving pressure that produces during voltage effect for piezoelectric vibrator, n is piezoelectric vibrator quantity, and S is the net sectional area of piston.
Distinguishing feature of the present invention and advantage are:
1) piezoelectric vibrator both sides all and fluid contact, namely bilateral drives, advantage brought thus is: 1. system back pressure acts on piezoelectric vibrator both sides, fluid back pressure power is system internal force, the load that can not become piezoelectric vibrator or piezoelectric vibrator is damaged, comparatively Iarge-scale system back pressure can be adopted to avoid hydraulic cylinder piston to creep, thus reliability and stepping accuracy high; 2. driving force is strong, even if when without system back pressure, the driving force that piezoelectric vibrator bilateral drives and efficiency are also all far above the situation of the one-sided driving of piezoelectric vibrator;
2) utilize multiple chip type piezoelectric vibrator tandem drive oil hydraulic cylinder, High power output, speed are high, and cost is low: piezoelectric chip price only several yuans, far below the piezoelectric stack of thousands of unit even up to ten thousand;
3) driver element and hydraulic cylinder integrated, volume is little, level of integration is high, good airproof performance, can be used as independently standarized component application, and realizes Precision digital stepper drive in larger row journey and positioning control by the method for an once circulation drop.
Accompanying drawing explanation
Fig. 1 is the structural profile schematic diagram of a preferred embodiment of the present invention;
Fig. 2 is the A-A direction view of Fig. 1;
Fig. 3 is the B direction view of Fig. 1;
Fig. 4 is the first half operation cycle configuration diagram of a preferred embodiment of the present invention pumps in series I;
Fig. 5 is the later half operation cycle configuration diagram of a preferred embodiment of the present invention pumps in series I;
Fig. 6 is the first half operation cycle configuration diagram of a preferred embodiment of the present invention pumps in series II;
Fig. 7 is the later half operation cycle configuration diagram of a preferred embodiment of the present invention pumps in series II;
Embodiment:
As shown in Figure 1, Figure 2, Figure 3 shows, cylinder body 1 two ends are provided with cylinder cap 2 and 2 ' by screw, and be provided with double-head piston 3 in cylinder body 1, the inner chamber of described cylinder body 1 is divided into the first cylinder chamber C1 and the second cylinder chamber C2 by described piston 3; Cylinder body 1 outer wall is provided with the first pump cover 4 and the second pump cover 4 ' by screw; Described cylinder body 1 outer wall is provided with pump chamber 103 and 103 ' that two groups of quantity are 2-20 and two valve pockets 102 and 102 ', in described same group of pump chamber between two adjacent pump chambers and two adjacent pump chambers with between valve pocket respectively by runner 104 or 104 between the chamber on cylinder body 1 ' connect; First pump cover 4 and the second pump cover 4 ' are respectively provided with the pump chamber 403 and 403 ' that one group of quantity is 2-20, on described same pump cover between adjacent two pump chambers respectively by runner 104 or 104 between two chambeies on its place pump cover ' series connection; In each pump chamber 103,103 ', 403 and 403 ' described, and be equipped with valve block 6 in two valve pockets on cylinder body 1 102 and 102 '; Piezoelectric vibrator 5 is crimped with by seal ring between first group of series connection pump chamber 103 on cylinder body 1 and the series connection pump chamber 403 on the first pump cover 4, the import 105 of first group of series connection pump chamber 103 on cylinder body 1 is communicated with the outlet 401 of the series connection pump chamber 403 on the first pump cover 4, forms pumps in series I; Piezoelectric vibrator 5 is crimped with by seal ring between second group of series connection pump chamber 103 ' on cylinder body 1 and the series connection pump chamber 403 ' on the second pump cover 4 ', second group of series connection import 105 ' of pump chamber 103 ' on cylinder body 1 is communicated with the outlet 401 ' of the series connection pump chamber 403 ' on the second pump cover 4 ', forms pumps in series II; The outlet 101 of pumps in series I is communicated with the first cylinder chamber C1 on cylinder body 1, and import 405 is communicated with the first accumulator 8 by the road, the first through hole 106 again on the first switch valve 7 and cylinder body 1 is connected with the second cylinder chamber C2; Similarly, the outlet 101 ' of described pumps in series II is communicated with the second cylinder chamber C2 of cylinder body 1, and import 405 ' is communicated with the second accumulator 8 ' by the road, the second through hole 106 ' again on second switch valve 7 ' and cylinder body 1 is connected with the first cylinder chamber C1.
Work when pumps in series I, II of the present invention are different; During work, in same pumps in series, in adjacent two pump chambers, the phase difference of piezoelectric vibrator driving voltage is 180 degree, and piezoelectric vibrator bending deflection direction is contrary.
As shown in Figure 1, in a non-operative state, the first switch valve 7 and second switch valve 7 ' are all in closed condition, and the set pressure of the first accumulator 8 and the second accumulator 8 ' is equal, piezoelectric vibrator 5 both sides hydrodynamic pressure, do not produce bending deflection, piston 3 transfixion.
As shown in Figure 4, Figure 5, when pumps in series I works, the first switch valve 7 is opened, and first through hole 106 of import 405 on the first switch valve 7 and cylinder body 1 of pumps in series I is communicated with the second cylinder chamber C2; When piezoelectric vibrator 5 produces cyclic bending distortion by voltage effect, hydrodynamic pressure in pump chamber 103 and 403 alternately increases or reduces, thus promote piston 3 to left movement: for the halftime before shown in Fig. 4, the pump chamber 403 that pump cover 4 is communicated with outlet 405 sucks fluid from the second cylinder chamber C2, the pump chamber 103 that cylinder body 1 is communicated with valve pocket 102 is to the first cylinder chamber C1 displacement fluids, and piston 3 is to left movement one step; For the later half cycle shown in Fig. 5, the valve block in valve pocket 102 and the valve block near import 405 place are all closed, without fluid expulsion or suction, and piston 3 transfixion.
As shown in Figure 6, Figure 7, when pumps in series II works, second switch valve 7 ' is opened, and second through hole 106 ' of import 405 ' on second switch valve 7 ' and cylinder body 1 of pumps in series II is communicated with the first cylinder chamber C1; When piezoelectric vibrator 5 produces cyclic bending distortion by voltage effect, hydrodynamic pressure in pump chamber 103 ' and 403 ' alternately increases or reduces, thus promote piston 3 and move right: for the halftime before shown in Fig. 6, the upper pump chamber 403 ' be communicated with outlet 405 ' of pump cover 4 ' sucks fluid from the first cylinder chamber C1, the pump chamber 103 ' that cylinder body 1 is communicated with valve pocket 102 ' is to the second cylinder chamber C2 displacement fluids, and piston 3 moves right a step; For the later half cycle shown in Fig. 7, the valve block in valve pocket 102 ' and the valve block near import 405 ' place are all closed, without fluid expulsion or suction, and piston 3 transfixion.
Claims (1)
1. an accurate step type hydraulic cylinder for piezoelectric chip driving, is characterized in that: cylinder cap is equipped with by screw in cylinder body two ends; In cylinder body, double-head piston is housed, cylinder chamber is divided into first, second cylinder chamber by described piston; Outer wall of cylinder block is equipped with first, second pump cover by screw; It is respectively pump chamber and two valve pockets of 2-20 that outer wall of cylinder block is provided with two groups of quantity, in same group of pump chamber between two adjacent pump chambers and adjacent pump chamber connect respectively by runner between the chamber on cylinder body with between valve pocket; First, second pump cover is respectively set one group of quantity as the pump chamber of 2-20, on same pump cover, adjacent two pump chambers are by runner series connection between the chamber of its place pump cover; Valve block is equipped with in two valve pockets in each pump chamber and on cylinder body; Be crimped with piezoelectric vibrator by seal ring between series connection pump chamber on cylinder body on first group of series connection pump chamber and the first pump cover, the series connection pump chamber outlet on cylinder body on first group of series connection import of pump chamber and the first pump cover, forms pumps in series I; Be crimped with piezoelectric vibrator by seal ring between series connection pump chamber on cylinder body second group series connection pump chamber and the second pump cover, the outlet of the series connection pump chamber on the import of second group of series connection pump chamber on cylinder body and the second pump cover, forms pumps in series II; The outlet of pumps in series I is communicated with the first cylinder chamber, and import is communicated with the first accumulator by the road, be connected with the second cylinder chamber through the first through hole of the first switch valve and cylinder body again; Equally, the outlet of described pumps in series II is communicated with the second cylinder chamber, and import is communicated with the second accumulator by the road, the second through hole again on second switch valve and cylinder body is connected with the first cylinder chamber;
Work when pumps in series I, II are different; During work, in same pumps in series, in adjacent two pump chambers, the phase difference of piezoelectric vibrator driving voltage is 180 degree; When pumps in series I works, first switch valve is opened, and first through hole of import on the first switch valve and cylinder body of pumps in series I is communicated with the second cylinder chamber, when piezoelectric vibrator produces cyclic bending distortion by voltage effect, pump chamber fluid pressure alternately increases or reduces, and promotes piston to left movement; When pumps in series II works, second switch valve is opened, and second through hole of import on second switch valve and cylinder body of pumps in series II is communicated with the first cylinder chamber; When piezoelectric vibrator produces cyclic bending distortion by voltage effect, pump chamber fluid pressure alternately increases or reduces, and promotes piston and moves right.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210175464.7A CN102691693B (en) | 2012-05-23 | 2012-05-23 | Precision stepping hydraulic cylinder driven by piezo-electricity wafer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210175464.7A CN102691693B (en) | 2012-05-23 | 2012-05-23 | Precision stepping hydraulic cylinder driven by piezo-electricity wafer |
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| CN102691693A CN102691693A (en) | 2012-09-26 |
| CN102691693B true CN102691693B (en) | 2015-02-04 |
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| CN201210175464.7A Expired - Fee Related CN102691693B (en) | 2012-05-23 | 2012-05-23 | Precision stepping hydraulic cylinder driven by piezo-electricity wafer |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101514715A (en) * | 2009-03-23 | 2009-08-26 | 吉林大学 | Piezoelectric/electrorheological mixed ultraprecise hydraulic step drive device |
| CN201705743U (en) * | 2010-04-30 | 2011-01-12 | 浙江师范大学 | Long-stroke precise stepping driver |
| CN202579445U (en) * | 2012-05-23 | 2012-12-05 | 浙江师范大学 | Precision stepping hydraulic cylinder driven by piezoelectric chip |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3427079B2 (en) * | 1994-10-05 | 2003-07-14 | 学校法人東海大学 | Piezo-hydraulic hybrid actuator |
| JP3559213B2 (en) * | 2000-03-03 | 2004-08-25 | 株式会社半導体先端テクノロジーズ | Load port and production method using it |
| JP2005083512A (en) * | 2003-09-10 | 2005-03-31 | Koganei Corp | Fluid-hydraulic cylinder |
| JP2008038829A (en) * | 2006-08-09 | 2008-02-21 | Alps Electric Co Ltd | Piezoelectric pump and piezoelectric vibrator |
-
2012
- 2012-05-23 CN CN201210175464.7A patent/CN102691693B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101514715A (en) * | 2009-03-23 | 2009-08-26 | 吉林大学 | Piezoelectric/electrorheological mixed ultraprecise hydraulic step drive device |
| CN201705743U (en) * | 2010-04-30 | 2011-01-12 | 浙江师范大学 | Long-stroke precise stepping driver |
| CN202579445U (en) * | 2012-05-23 | 2012-12-05 | 浙江师范大学 | Precision stepping hydraulic cylinder driven by piezoelectric chip |
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