CN102691693A - Precision stepping hydraulic cylinder driven by piezo-electricity wafer - Google Patents
Precision stepping hydraulic cylinder driven by piezo-electricity wafer Download PDFInfo
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Abstract
The invention relates to a precision stepping hydraulic cylinder driven by a piezo-electricity wafer, and belongs to technical field of mechanical-electrical-hydraulic integration. Cylinder heads are mounted at two ends of the cylinder body; a double-headed piston is mounted inside the cylinder body and divides the cylinder body into a first cylinder cavity and a second cylinder cavity; 2 to 20 piezo-electricity vibrators are crimped respectively between the first pump cover and the cylinder body and between the second pump cover and the cylinder body, so as to form a series pump I and a series pump II; the outlet of the series pump I is communicated with the first cylinder cavity of the cylinder body, and the inlet of the series pump I is communicated with a first accumulator through a pipeline, and then connected with the second cylinder cavity through a first switch valve and a first through hole in the cylinder body; and similarly, the outlet of the series pump II is communicated with the second cylinder cavity of the cylinder body, and the inlet of the series pump II is communicated with the second accumulator through a pipeline, and then connected with the first cylinder cavity through a second switch valve and a second through hole in the cylinder body. The precision stepping hydraulic cylinder has the advantages that fluid is driven by the piezo-electricity vibrators from two sides, the drive capability is strong, the reliability and stepping precision are high, and precision digital stepping drive and positioning control of larger journey can be achieved by circulating one liquid drop each time.
Description
Technical field
The invention belongs to the mechanical-electrical-hydraulic integration technical field, be specifically related to the accurate step type hydraulic cylinder that a kind of piezoelectric chip drives, be used for accurate stepper drive, location and the vibration control of big stroke.
Background technique
Along with the development of fields such as precision optical machinery processing, precision measuremnt, micro-medical science, precision optics engineering and Aero-Space, the accurate stepper drive of big stroke, location and vibration control technology research receive countries in the world scholar's extensive concern.What be used at present to construct the accurate displacement driver mainly is functional materials such as electromagnetism, magnetostriction, memory alloy and piezoelectric constant; Wherein piezoelectric constant is widely used because of having big, high response frequency response, the high-resolution of high-energy-density, high power, ouput force and not having advantage such as electromagnetic interference.Common piezoelectricity precision driver can reduce 4 types simply: the direct-push type piezoelectric actuator that 1) directly utilizes piezoelectric stack dilatation ouput force and displacement; 2) the clamped formula step actuator of the employing multiple pressure electricity stack configurations piezoelectric actuator 3 of enlargers such as employing lever or flexible hinge); 4) the ultrasonic-type linear actuator that utilizes the ultrasound principle to form.Preceding two types of piezoelectric actuators simple in structure, ouput force is big, but too small because of movement travel or control range, practical application has received certain restriction; Though the two types of piezoelectric actuators in back can obtain bigger movement travel; But structure and control machining accuracy complicated, that require parts is high; And rely on frictional force to transmit power and displacement,, have only a few to tens of newton so feed accuracy and rigidity are low, ouput force is far below the driving force of piezoelectrics self; Can't satisfy all bigger use occasion of driving force and displacement, and when the surface of friction pair serious wear, can cause precision to reduce even can't use.
Seeing that the narrow limitation of conventional piezoelectric driver self and association area are to the demand of compact structure, high ouput force, big displacement, highi degree of accuracy, the accurate step actuator of high energy efficiency; People have successively proposed several kinds of novel step-by-step movement piezoelectric hydraulic drivers based on piezoelectricity and fluid couple drive; Promptly utilize piezoelectric pump circulation of fluid to realize the driving of oil hydraulic cylinder, like Chinese patent 200810051156.7,200920093242.4,201020180067.5 etc.Because the distortion of piezoelectric vibrator is extremely small, real fluid has compressibility, therefore for improving system stiffness, avoiding hydraulic cylinder piston to creep, the piezoelectric hydraulic driver must adopt accumulator that back pressure is provided.But piezoelectric vibrator all is one-sided driving in the existing piezoelectric hydraulic driver; Be piezoelectric vibrator only a side contact with fluid directly or indirectly; Therefore system back pressure can become the load of piezoelectric vibrator, seriously reduce the overall useful horsepower output of driver; Excessive system back pressure also can cause the chip type piezoelectric vibrator damaged, so the energy efficiency and the reliability of existing piezoelectric hydraulic driver are all very low.
Summary of the invention
To the narrow limitation on existing piezoelectric actuator and the piezoelectric hydraulic driver applications; And fields such as Aero-Space, robot, precision machining are to the demands status of highi degree of accuracy, big stroke precision driver, and the present invention proposes the accurate step type hydraulic cylinder that a kind of piezoelectric chip drives.
The technological scheme that the present invention adopts is: the cylinder body two ends are equipped with cylinder cap through screw; Double-head piston is installed in the cylinder body, and said piston is divided into the first cylinder chamber and the second cylinder chamber with said inner chamber of cylinder block; Through screw first pump cover and second pump cover are installed on the outer wall of cylinder block; Said outer wall of cylinder block is provided with pump chamber and two valve pockets that two groups of quantity are 2-20, connects through runner between two chambeies on the said cylinder body respectively between the two adjacent pump chambers and between adjacent pump chamber and the valve pocket in the said same group of pump chamber; Respectively being provided with one group of quantity on first and second pump covers is the individual pump chamber of 2-20, connects through runner between the chamber on its place pump cover respectively between adjacent two pump chambers on the said same pump cover; Be equipped with valve block in two valve pockets in said each pump chamber and on the cylinder body; Be crimped with piezoelectric vibrator through seal ring between the series connection pump chamber on first group of connect pump chamber and first pump cover on the cylinder body, the import of first group of series connection pump chamber on the cylinder body and the outlet of the series connection pump chamber on first pump cover are communicated with, and constitute pumps in series I; Be crimped with piezoelectric vibrator through seal ring between the series connection pump chamber on second group of connect pump chamber and second pump cover on the cylinder body, the import of second group of series connection pump chamber on the cylinder body and the outlet of the series connection pump chamber on second pump cover are communicated with, and constitute pumps in series II; The outlet of pumps in series I is communicated with the first cylinder chamber on the cylinder body, and import is communicated with first accumulator by the road, first through hole on first switch valve and cylinder body is connected with the second cylinder chamber again; Likewise, the outlet of said pumps in series II is communicated with the second cylinder chamber of cylinder body, and import is communicated with second accumulator by the road, second through hole on second switch valve and cylinder body is connected with the first cylinder chamber again.
Pumps in series I of the present invention and pumps in series II do not work simultaneously; During work in the same pumps in series in adjacent two pump chambers the phase difference of piezoelectric vibrator driving voltage be 180 the degree, piezoelectric vibrator bending deflection is in the opposite direction.
Among the present invention, the effect of two pumpss in series provides fluid drives power, realizes the circulation of fluid and the driving and the control of piston; The effect of switch valve is the import of two pumpss in series of control and the break-make between two cylinder chambeies; The effect of accumulator is to improve the rigidity of fluid and the speed of response of piston.
Under off working state, first switch valve and second switch valve all are in closed condition, and the set pressure of first accumulator and second accumulator equates that piezoelectric vibrator both sides hydrodynamic pressure equates, do not produce bending deflection, piston transfixion.
During pumps in series I work, first switch valve is opened, and first through hole of the import of pumps in series I on first switch valve and cylinder body is communicated with the second cylinder chamber; When piezoelectric vibrator received the voltage effect to produce the cyclic bending distortion, the hydrodynamic pressure in the pump chamber alternately increased or reduces, thereby promoted piston to left movement.
Like Fig. 6, shown in Figure 7, during pumps in series II work, the second switch opening of valves, second through hole of the import of pumps in series II on second switch valve and cylinder body is communicated with the first cylinder chamber; When piezoelectric vibrator received the voltage effect to produce the cyclic bending distortion, the pump chamber fluid pressure alternately increased or reduces, and moved right thereby promote piston.
According to the working principle of oil hydraulic cylinder according to the invention, the maximum movement speed of piston does
Maximum feeding step-length does
Maximum driving force is F=2 η
FNpS, wherein: η
vAnd η
FFor with relevant coefficients such as piezoelectric vibrator structure and material parameter, energy storage pressure, fluid characteristics; Δ V is that piezoelectric vibrator is out of shape caused pump chamber variable quantity; P is that piezoelectric vibrator receives voltage to make the maximum fluid driving pressure that the time spent produces; N is a piezoelectric vibrator quantity, and S is the net sectional area of piston.
Distinguishing feature of the present invention and advantage are:
1) the piezoelectric vibrator both sides all contact with fluid; Be that bilateral drives; The advantage of being brought thus is: 1. system back pressure acts on the piezoelectric vibrator both sides; Fluid back pressure power is system's internal force, can become the load of piezoelectric vibrator or piezoelectric vibrator is damaged, can adopt big system back pressure to avoid hydraulic cylinder piston to creep, so reliability and stepping accuracy are high; 2. driving force is strong, even when no system back pressure, driving force that the piezoelectric vibrator bilateral drives and efficient are also all far above the situation of the one-sided driving of piezoelectric vibrator;
2) utilize a plurality of chip type piezoelectric vibrator tandem drive oil hydraulic cylinders, ouput force is big, speed is high, and cost is low: only several yuans of piezoelectric chip prices, far below the piezoelectric stack of thousands of even units up to ten thousand;
3) driver element and hydraulic cylinder are integrated, and volume is little, level of integration is high, good airproof performance, can be used as the independent standard parts and use, and realize precision digital formula stepper drive and positioning control in the big stroke through the method for the drop that once circulates.
Description of drawings
Fig. 1 is the structural profile schematic representation of a preferred embodiment of the present invention;
Fig. 2 is that the A-A of Fig. 1 is to view;
Fig. 3 is that the B of Fig. 1 is to view;
Fig. 4 is the preceding half operation cycle configuration diagram of a preferred embodiment pumps in series of the present invention I;
Fig. 5 is the later half operation cycle configuration diagram of a preferred embodiment pumps in series of the present invention I;
Fig. 6 is the preceding half operation cycle configuration diagram of a preferred embodiment pumps in series of the present invention II;
Fig. 7 is the later half operation cycle configuration diagram of a preferred embodiment pumps in series of the present invention II;
Embodiment:
Like Fig. 1, Fig. 2, shown in Figure 3, cylinder body 1 two ends are equipped with cylinder cap 2 and 2 ' through screw, and double-head piston 3 is installed in the cylinder body 1, and said piston 3 is divided into the first cylinder chamber C1 and the second cylinder chamber C2 with the inner chamber of said cylinder body 1; Through screw first pump cover 4 and second pump cover 4 ' are installed on cylinder body 1 outer wall; Said cylinder body 1 outer wall is provided with pump chamber 103 and 103 ' and two valve pocket 102 and 102 ' that two groups of quantity are 2-20, connects through runner between the chamber on the cylinder body 1 104 or 104 ' respectively between the two adjacent pump chambers and between two adjacent pump chambers and the valve pocket in the said same group of pump chamber; Respectively being provided with one group of quantity on first pump cover 4 and second pump cover 4 ' is the individual pump chamber 403 and 403 ' of 2-20, connects through runner 104 or 104 ' between two chambeies on its place pump cover respectively between adjacent two pump chambers on the said same pump cover; In said each pump chamber 103,103 ', 403 and 403 ', and be equipped with valve block 6 in two valve pockets 102 on the cylinder body 1 and 102 '; Be crimped with piezoelectric vibrator 5 through seal ring between the series connection pump chamber 403 on first group of connect pump chamber 103 and first pump cover 4 on the cylinder body 1; The import 105 of first group of series connection pump chamber 103 on the cylinder body 1 and the outlet 401 of the series connection pump chamber 403 on first pump cover 4 are communicated with, and constitute pumps in series I; Be crimped with piezoelectric vibrator 5 through seal ring between the series connection pump chamber 403 ' on second group of connect pump chamber 103 ' and second pump cover 4 ' on the cylinder body 1; The import 105 ' of second group of series connection pump chamber 103 ' on the cylinder body 1 and the outlet 401 ' of the series connection pump chamber 403 ' on second pump cover 4 ' are communicated with, and constitute pumps in series II; The outlet 101 of pumps in series I is communicated with the first cylinder chamber C1 on the cylinder body 1, and import 405 is communicated with first accumulator 8 by the road, the through hole 106 on first switch valve 7 and cylinder body 1 is connected with the second cylinder chamber C2 again; Likewise, the outlet 101 ' of said pumps in series II is communicated with the second cylinder chamber C2 of cylinder body 1, and import 405 ' is communicated with second accumulator 8 ' by the road, second through hole 106 ' on second switch valve 7 ' and cylinder body 1 is connected with the first cylinder chamber C1 again.
Pumps in series I of the present invention and pumps in series II do not work simultaneously; During work in the same pumps in series in adjacent two pump chambers the phase difference of piezoelectric vibrator driving voltage be 180 the degree, piezoelectric vibrator bending deflection is in the opposite direction.
As shown in Figure 1; Under off working state, first switch valve 7 all is in closed condition with second switch valve 7 ', and the set pressure of first accumulator 8 and second accumulator 8 ' equates; Piezoelectric vibrator 5 both sides hydrodynamic pressures, do not produce bending deflection, piston 3 transfixions.
Like Fig. 4, shown in Figure 5, during pumps in series I work, first switch valve 7 is opened, and first through hole 106 of import 405 on first switch valve 7 and cylinder body 1 of pumps in series I is communicated with the second cylinder chamber C2; When piezoelectric vibrator 5 receives the voltage effect to produce the cyclic bending distortion; Hydrodynamic pressure in the pump chamber 103 and 403 alternately increases or reduces; Thereby promote piston 3 to left movement: for the preceding halftime shown in Figure 4; The pump chamber 403 that is communicated with outlet 405 on the pump cover 4 sucks fluid from the second cylinder chamber C2, the pump chamber 103 that is communicated with valve pocket 102 on the cylinder body 1 is discharged fluid to the first cylinder chamber C1, and piston 3 is to one step of left movement; For the later half cycle shown in Figure 5, the valve block in the valve pocket 102 reaches and all closes near the valve block at import 405 places, and no fluid is discharged or sucked piston 3 transfixions.
Like Fig. 6, shown in Figure 7, during pumps in series II work, second switch valve 7 ' is opened, and second through hole 106 ' of the import 405 ' of pumps in series II on second switch valve 7 ' and cylinder body 1 is communicated with the first cylinder chamber C1; When piezoelectric vibrator 5 receives the voltage effect to produce the cyclic bending distortion; Hydrodynamic pressure in the pump chamber 103 ' and 403 ' alternately increases or reduces; Thereby promoting piston 3 moves right: for the preceding halftime shown in Figure 6; Pump cover 4 ' is gone up the pump chamber 403 ' that is communicated with outlet 405 ' and from the first cylinder chamber C1, is sucked fluid, and the pump chamber 103 ' that is communicated with valve pocket 102 ' on the cylinder body 1 is discharged fluid to the second cylinder chamber C2, and piston 3 moves right a step; For the later half cycle shown in Figure 7, the valve block in the valve pocket 102 ' reaches the valve block of locating near import 405 ' and all closes, and no fluid is discharged or sucked piston 3 transfixions.
Claims (2)
1. the accurate step type hydraulic cylinder that drives of a piezoelectric chip, it is characterized in that: cylinder cap is equipped with at the cylinder body two ends; Double-head piston is housed in the cylinder body, and said piston is divided into first, second cylinder chamber with cylinder chamber; First, second pump cover is housed on the outer wall of cylinder block; Outer wall of cylinder block is provided with pump chamber and two valve pockets that two groups of quantity are 2-20, connects through runner between the chamber on the cylinder body respectively between the two adjacent pump chambers and between adjacent pump chamber and the valve pocket in the said same group of pump chamber; Respectively establishing one group of quantity on first, second pump cover is the individual pump chamber of 2-20, and adjacent two pump chambers are through runner series connection between chamber of its place pump cover on the same pump cover; In said each pump chamber, and cylinder body on two valve pockets in be equipped with valve block; Be crimped with piezoelectric vibrator through seal ring between the series connection pump chamber on the cylinder body on first group of series connection pump chamber and first pump cover, the import of first group of series connection pump chamber and the outlet of the series connection pump chamber on first pump cover are communicated with on the cylinder body, constitute pumps in series I; Be crimped with piezoelectric vibrator through seal ring between the series connection pump chamber on second group of connect pump chamber and second pump cover on the cylinder body, the import of second group of series connection pump chamber on the cylinder body and the outlet of the series connection pump chamber on second pump cover are communicated with, and constitute pumps in series II; The outlet of pumps in series I is communicated with the first cylinder chamber, and import is communicated with first accumulator by the road, first through hole through first switch valve and cylinder body is connected with the second cylinder chamber again; Equally, the outlet of said pumps in series II is communicated with the second cylinder chamber, and import is communicated with second accumulator by the road, second through hole on second switch valve and cylinder body is connected with the first cylinder chamber again.
2. the accurate step type hydraulic cylinder that drives according to the said a kind of piezoelectric chip of claim 1, it is characterized in that: pumps in series I, II do not work simultaneously; During work, in the same pumps in series in adjacent two pump chambers the phase difference of piezoelectric vibrator driving voltage be 180 the degree.
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| CN201210175464.7A CN102691693B (en) | 2012-05-23 | 2012-05-23 | Precision stepping hydraulic cylinder driven by piezo-electricity wafer |
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| CN201210175464.7A CN102691693B (en) | 2012-05-23 | 2012-05-23 | Precision stepping hydraulic cylinder driven by piezo-electricity wafer |
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| CN102691693B CN102691693B (en) | 2015-02-04 |
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| CN104405716A (en) * | 2014-11-04 | 2015-03-11 | 哈尔滨工业大学 | Two-end pre-tightening type low-friction-characteristic cylinder with cylinder body in multi-mode vibration caused by piezoelectric stacks |
| CN105031764A (en) * | 2014-06-17 | 2015-11-11 | 南京山诺生物科技有限公司 | Micro piezoelectric type infusion apparatus |
| CN109723629A (en) * | 2019-03-01 | 2019-05-07 | 浙江师范大学 | A kind of piezoelectric chip pump |
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| CN111577686A (en) * | 2020-05-18 | 2020-08-25 | 广东志成电液科技有限公司 | Stepping hydraulic equipment and control method thereof |
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Cited By (25)
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| CN105031764A (en) * | 2014-06-17 | 2015-11-11 | 南京山诺生物科技有限公司 | Micro piezoelectric type infusion apparatus |
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| CN104405716A (en) * | 2014-11-04 | 2015-03-11 | 哈尔滨工业大学 | Two-end pre-tightening type low-friction-characteristic cylinder with cylinder body in multi-mode vibration caused by piezoelectric stacks |
| CN109869304A (en) * | 2019-03-01 | 2019-06-11 | 浙江师范大学 | A kind of microminiature air compressor machine |
| CN109944779A (en) * | 2019-03-01 | 2019-06-28 | 浙江师范大学 | A kind of CUP water-cooling system circulating pump |
| CN109764024A (en) * | 2019-03-01 | 2019-05-17 | 浙江师范大学 | A kind of cylinder |
| CN109812454A (en) * | 2019-03-01 | 2019-05-28 | 浙江师范大学 | A kind of self-powered is taken offence cylinder |
| CN109821102A (en) * | 2019-03-01 | 2019-05-31 | 浙江师范大学 | A kind of drug delivery device of gas step by step compression driving |
| CN109821096A (en) * | 2019-03-01 | 2019-05-31 | 浙江师范大学 | A kind of Portable medicine injector |
| CN109826842A (en) * | 2019-03-01 | 2019-05-31 | 浙江师范大学 | One kind is from driving hydraulic cylinder |
| CN109821101A (en) * | 2019-03-01 | 2019-05-31 | 浙江师范大学 | A kind of pneumatic infusion device being pressurized step by step |
| CN109869360A (en) * | 2019-03-01 | 2019-06-11 | 浙江师范大学 | Portable pure water hydraulics system |
| CN109723629A (en) * | 2019-03-01 | 2019-05-07 | 浙江师范大学 | A kind of piezoelectric chip pump |
| CN109882470A (en) * | 2019-03-01 | 2019-06-14 | 浙江师范大学 | A kind of step-by-step movement cylinder |
| CN109763967A (en) * | 2019-03-01 | 2019-05-17 | 浙江师范大学 | A kind of electronic device water-cooling system transfer tube |
| CN109973364A (en) * | 2019-03-01 | 2019-07-05 | 浙江师范大学 | A kind of micro- cooling system liquid pump |
| CN110094330A (en) * | 2019-03-01 | 2019-08-06 | 浙江师范大学 | Self-driving type pneumatic device |
| CN109821102B (en) * | 2019-03-01 | 2021-04-30 | 浙江师范大学 | Gas step-by-step compression driven dosing device |
| CN110094330B (en) * | 2019-03-01 | 2020-06-02 | 浙江师范大学 | Self-driving pneumatic device |
| CN109944779B (en) * | 2019-03-01 | 2020-06-30 | 浙江师范大学 | Circulating pump of CPU water cooling system |
| CN109821096B (en) * | 2019-03-01 | 2021-02-19 | 浙江师范大学 | Portable medicine injector |
| CN109826842B (en) * | 2019-03-01 | 2020-09-25 | 浙江师范大学 | Self-driven hydraulic cylinder |
| CN110639075A (en) * | 2019-09-20 | 2020-01-03 | 浙江师范大学 | Piezoelectric peristaltic pump for blood conveying |
| CN110639075B (en) * | 2019-09-20 | 2022-06-10 | 浙江师范大学 | Piezoelectric peristaltic pump for blood conveying |
| CN111577686A (en) * | 2020-05-18 | 2020-08-25 | 广东志成电液科技有限公司 | Stepping hydraulic equipment and control method thereof |
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