CN101354052A - Piezoelectric hydraulic linear motor - Google Patents
Piezoelectric hydraulic linear motor Download PDFInfo
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- CN101354052A CN101354052A CNA2008100511567A CN200810051156A CN101354052A CN 101354052 A CN101354052 A CN 101354052A CN A2008100511567 A CNA2008100511567 A CN A2008100511567A CN 200810051156 A CN200810051156 A CN 200810051156A CN 101354052 A CN101354052 A CN 101354052A
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Abstract
The invention relates to a piezoelectric hydraulic linear motor which pertains to the field of mechanical-electrical-hydraulic integration. An inlet of a piezoelectric pump is connected with an accumulator by a pipeline; the accumulator is also connected with a reversing valve by the pipeline; the reversing valve is connected with an outlet of the piezoelectric pump by the pipeline; the reversing valve is also connected with a cavity body of a hydraulic cylinder. The piezoelectric hydraulic linear motor has the advantages of novel structure, being capable of effectively converting the micro-amplitude reciprocating vibration of piezoelectric ceramic to the micro liner motion of a piston of the hydraulic cylinder by utilizing fluid media to transmit power, obtaining relatively large driving power and motion displacement and realizing precise driving and control by a method of accumulating a liquid drop for one time; meanwhile, the piezoelectric hydraulic motor has simple structure and control, small volume and good sealing property and can be applied to marking parts.
Description
Technical field
The invention belongs to the mechanical-electrical-hydraulic integration field, be specifically related to a kind of piezoelectric pump that utilizes and drive liquid circulation, convert piezoelectric constant high frequency, small double vibrations to the straight-line piezoelectric hydraulic driver of the regular macroscopic view of hydraulic cylinder piston, i.e. piezoelectric hydraulic linear motor.
Background technique
Piezoelectric constant has simple in structure, and response is fast, no electromagnetic interference, energy consumption are low, be easy to characteristics such as control, all is widely used in fields such as Aero-Space, machinery, optical engineering, biological medicine and fluid drives and controls.At present, be that power unit realizable force and straight-line displacement output/control piezoelectric actuator have various ways with the piezoelectric constant, can simply be summed up as 3 classes: the piezoelectric actuator that 1) directly utilizes piezoelectrics dilatation ouput force or displacement; 2) piezoelectric actuator of enlargers such as employing lever and flexible hinge; 3) the step-by-step movement piezo-electric motor that adopts clamped mechanism or ultrasound principle to form.Preceding two class piezoelectric actuators simple in structure, ouput force is big, but displacement is small, practical application has been subjected to certain restriction; The latter can obtain bigger movement travel, but the machining accuracy height that structure and control is complicated, require parts, transmit power and displacement owing to rely on frictional force, therefore the pressure that feeding rigidity is low, output drive strength produces far below the piezoelectrics distortion, have only a few to tens of newton, can't satisfy all bigger use occasion of power and displacement.Volume is little, and is in light weight, high ouput force, big displacement, and speed is fast, and the next-generation drive that efficiency is high is that a lot of field is badly in need of.For example, the applications such as ACTIVE CONTROL on material testing machine, rocket motor thrust measurement test stand, helicopter rotors small sway and conventional lighter-than-air vehicles surface, usually require driver to have the requirement that structure control is satisfied in bigger ouput force and displacement, the controlling object of this kind equipment mainly is a load, come load or unload (carrying out the two-way adjustment of thousands of Newton force in several millimeters/centimetres stroke range) by real-time accurate displacement on a large scale, this is that existing at present piezoelectric actuator is implacable.
Summary of the invention
The invention provides a kind of piezoelectric hydraulic linear motor, to solve the ouput force that piezoelectric actuator exists and displacement is small, can not satisfy the problem of actual demand.The technological scheme that the present invention takes is: the inlet of piezoelectric pump is connected by pipeline with accumulator, this accumulator also is connected with selector valve by pipeline, this selector valve is connected by pipeline with the piezoelectricity delivery side of pump, and this selector valve also is connected with the cavity of oil hydraulic cylinder by pipeline.
One embodiment of the present invention is: this selector valve adopts 34 logical valves.
One embodiment of the present invention is: piezoelectric pump adopts piezoelectric stack pump, and described piezoelectric stack pump is made of the pump housing, 1～10 piezoelectric stack oscillator, rigidity jacking block, elastic diaphragm and stop valve, and the described pump housing and elastic diaphragm constitute pump chamber jointly.
One embodiment of the present invention is: piezoelectric pump adopts the piezoelectric chip pump, and described piezoelectric chip pump is made of the pump housing, 1～10 piezoelectric chip oscillator and stop valve, and the described pump housing and piezoelectric chip oscillator constitute pump chamber jointly.
Piezoelectric pump is a dynamical element among the present invention, realizes the circulation and the driving of fluid; The function of selector valve is the moving direction of flowing of control fluid and hydraulic cylinder piston; The effect of accumulator is to receive high-pressure liquid, additional low-pressure fluid, and the storage side face of piston ring is long-pending not to wait the liquid capacity that causes poor; The function of oil hydraulic cylinder is the output of realizable force or displacement.Characteristics of the present invention are to obtain bigger ouput force and movement travel simultaneously.
The present invention utilizes piezoelectric pump to drive liquid circulation, realizes movement conversion and transmission of power by flowing medium, so with the high frequency of piezoelectric vibrator a little double vibrations convert the straight line motion of hydraulic cylinder piston to.
In an embodiment of the invention, comprise parts such as at least one piezoelectric pump, selector valve, accumulator, oil hydraulic cylinder and connecting pipeline.When the piezoelectric vibrator in the described piezoelectric pump deforms under the alternating voltage effect, piezoelectric pump pump chamber and hydrodynamic pressure change, and then promote the open and close of one-way valve: when the deformation of described piezoelectric vibrator make that the piezoelectric pump pump chamber reduces, when hydrodynamic pressure increases, the inlet valve of piezoelectric pump cuts out, outlet valve is opened, and pump chamber inner high voltage fluid enters certain cavity of oil hydraulic cylinder through selector valve; Simultaneously, the liquid in another cavity of oil hydraulic cylinder enters accumulator, and hydraulic cylinder piston fortune moves a step; After the alternating voltage commutation, the piezoelectric pump pump chamber increases, the interior fluid pressure of pump chamber reduces, and causes inlet valve unlatching, the outlet valve of piezoelectric pump to be closed, and liquid enters pump chamber in the accumulator, so far finishes a work cycle.When piezoelectric vibrator running hours under the alternating voltage effect, the pulsating fluid of piezoelectric pump output promotes hydraulic cylinder piston and carries out straight line motion.By selector valve control, can realize the advancing of hydraulic cylinder piston, retreat, swing or self-locking.
In yet another embodiment of the present invention, described piezoelectric pump comprise that at least one piezoelectric stack oscillator, pump chamber film are thin, rigidity jacking block and a pair of stop valve.When described piezoelectric stack oscillator under the alternating voltage effect dilatation takes place, change pump chamber and hydrodynamic pressure, and then promote the open and close of one-way valve, realize unidirectional, the continuous-flow of fluid by rigidity jacking block and pump chamber barrier film.
In another embodiment of the invention, described piezoelectric pump comprises at least one piezoelectric chip oscillator and a pair of stop valve.When described piezoelectric chip oscillator occurs bending and deformation under the alternating voltage effect, cause pump chamber and hydrodynamic pressure to change, and then promote the open and close of one-way valve, realize the continuous output of fluid.
The present invention's proposition promptly utilizes the method for piezoelectric pump circulating liquid to convert piezoelectrics micro-strain and dither to hydraulic cylinder piston straight line motion clocklike the piezoelectric hydraulic linear motor that Piezoelectric Ceramic combines with hydraulic transmission technology.This motor has that piezoelectric element response is fast, no electromagnetic interference, be easy to control, simple in structure, characteristics such as volume is little; Also have simultaneously characteristics such as hydraulicdriven high-energy-density, big movement travel, high output pressure, no impact.Compare with traditional hydraulic unit driver, it is simple in structure, and volume is little, can use separately or as the standarized component of complex system, is applicable to robot, microsystem and tele-control system; Compare with present existing piezoelectric linear motor, its advantage is the two-way control that can obtain bigger ouput force and movement travel, realizable force and displacement simultaneously.
The invention has the advantages that: novel structure, utilize the flowing medium transferring power, can effectively the double vibrations a little of piezoelectric constant be converted to macroscopical straight line motion of hydraulic cylinder piston, obtain bigger driving force and movement travel, and can realize accurate the driving and control by the method for once accumulating a drop; Simultaneously, the structure of piezoelectric hydraulic motor and control are simple, and volume is little, and good airproof performance can be used as the mark parts and uses.
Description of drawings
Fig. 1 is the structural representation of piezoelectric hydraulic linear motor of the present invention;
Fig. 2 is the structural representation of piezoelectric stack pump of the present invention;
Fig. 3 is a piezoelectric chip pump structure schematic representation of the present invention;
Embodiment
The inlet of piezoelectric pump is connected by pipeline with accumulator, and this accumulator also is connected with selector valve by pipeline, and this selector valve is connected by pipeline with the piezoelectricity delivery side of pump, and this selector valve also is connected with the cavity of oil hydraulic cylinder by pipeline; This selector valve adopts 34 logical valves.
As shown in Figure 1, piezoelectric pump 1, selector valve 2, oil hydraulic cylinder 3 and accumulator 4 connect into the system of sealing by pipeline; Described accumulator links to each other with the inlet of piezoelectric pump, and described selector valve is 34 logical valves; Under the situation that described piezoelectric pump 1 starts, the motion state of the position change hydraulic cylinder piston 301 by adjusting described selector valve 3: selector valve 2 is when (being in 202 positions), the fluid of piezoelectric pump 1 output directly returns pump chamber through selector valve 2, oil hydraulic cylinder cavity 302 and 303 does not all have fluid and enters and flow out, and hydraulic cylinder piston rod 301 is in the lock state; When the lower end of selector valve 2 (201 position) was connected, the piezoelectricity delivery side of pump was communicated with oil hydraulic cylinder cavity 303, the import of piezoelectric pump is communicated with the cavity 302 of oil hydraulic cylinder, and hydraulic cylinder piston rod 301 moves downward; On the contrary, when the upper end of selector valve 2 (203 position) connected, the inlet/outlet of piezoelectric pump was communicated with 303 and 302 cavitys of oil hydraulic cylinder respectively, and hydraulic cylinder piston 301 moves upward.
As shown in Figure 2, piezoelectric pump can be driven by the piezoelectric stack oscillator, be piezoelectric stack pump, described piezoelectric stack pump by the pump housing 101, piezoelectric stack 102, rigidity jacking block 103, elastic diaphragm 104, and stop valve 106 and 107 constitute.The described pump housing 101 and elastic diaphragm 104 common formation pump chambers 105.When described piezoelectric stack oscillator extends under extraneous alternating voltage effect, promote the pump chamber barrier film and make that pump chamber 105 volumes reduce, its fluid pressure increases, outlet valve 106 is opened, inlet valve 107 cuts out, and fluid flows out from outlet; On the contrary, after the alternating voltage commutation, piezoelectric stack oscillator 101 shortens, pump chamber 105 volumes increase, and causes hydrodynamic pressure to reduce, and outlet valve 106 cuts out, inlet valve 107 is opened, and fluid enters pump chamber.
As shown in Figure 3, piezoelectric pump can be driven by the piezoelectric chip oscillator, is the piezoelectric chip pump, and described piezoelectric chip pump is made of the pump housing 108, piezoelectric chip oscillator 109 and stop valve 111 and 112.The described pump housing 108 and piezoelectric chip oscillator 109 common formation pump chambers 110.When described piezoelectric chip oscillator when bending deflection reduces pump chamber 110 volumes in pump chamber under the extraneous alternating voltage effect, described pump chamber 110 fluid pressures increase, outlet valve 111 is opened, inlet valve 112 cuts out, fluid flows out from outlet; On the contrary, behind the voltage commutation, when the piezoelectric chip oscillator increased pump chamber 105 volumes to the pump chamber outside sweep, the pump chamber fluid pressure reduced, and outlet valve 111 cuts out, inlet valve 112 is opened, and fluid enters pump chamber.
Claims (6)
1, a kind of piezoelectric hydraulic linear motor, it is characterized in that: the inlet of piezoelectric pump is connected by pipeline with accumulator, this accumulator also is connected with selector valve by pipeline, and this selector valve is connected by pipeline with the piezoelectricity delivery side of pump, and this selector valve also is connected with the cavity of oil hydraulic cylinder.
2, piezoelectric hydraulic linear motor according to claim 1 is characterized in that: this selector valve adopts 34 logical valves.
3, piezoelectric hydraulic linear motor according to claim 1 and 2 is characterized in that: piezoelectric pump adopts piezoelectric stack pump.
4, piezoelectric hydraulic linear motor according to claim 1 and 2 is characterized in that: piezoelectric pump adopts the piezoelectric chip pump.
5, piezoelectric hydraulic linear motor according to claim 3 is characterized in that: piezoelectric pump adopts 1～10 piezoelectric stack oscillator.
6, piezoelectric hydraulic linear motor according to claim 4 is characterized in that: piezoelectric pump adopts 1～10 piezoelectric chip oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100511567A CN101354052A (en) | 2008-09-12 | 2008-09-12 | Piezoelectric hydraulic linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100511567A CN101354052A (en) | 2008-09-12 | 2008-09-12 | Piezoelectric hydraulic linear motor |
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| Publication Number | Publication Date |
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| CN101354052A true CN101354052A (en) | 2009-01-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA2008100511567A Pending CN101354052A (en) | 2008-09-12 | 2008-09-12 | Piezoelectric hydraulic linear motor |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011046857A1 (en) * | 2009-10-15 | 2011-04-21 | Mallinckrodt Inc. | Piezoelectrically-driven power injector |
| CN102287312A (en) * | 2011-03-25 | 2011-12-21 | 上海海洋大学 | Hydraulic wave energy generation device |
| WO2014047769A1 (en) * | 2012-09-25 | 2014-04-03 | Sun Wei | Reciprocating low-speed heavy-load hydraulic pump with variable action area |
| CN104009668A (en) * | 2014-06-04 | 2014-08-27 | 天津大学 | Power tuning excitation device |
| CN108656101A (en) * | 2018-06-06 | 2018-10-16 | 南京航空航天大学 | A kind of the deep-sea mechanical arm and its control method of hydraulic-driven |
| CN109763967A (en) * | 2019-03-01 | 2019-05-17 | 浙江师范大学 | A kind of electronic device water-cooling system transfer tube |
| CN109782690A (en) * | 2019-03-25 | 2019-05-21 | 浙江大学宁波理工学院 | Double drive electrichydraulic control formula accurate feeding system and its control method |
| CN111268119A (en) * | 2020-02-17 | 2020-06-12 | 上海申嘉航空科技有限公司 | Helicopter rotor pitch rod, helicopter automatic tilter and helicopter |
| CN113090610A (en) * | 2021-03-12 | 2021-07-09 | 上海卫星工程研究所 | Surface mount type piezoelectric screw pump hydraulic linear actuator and driving method thereof |
-
2008
- 2008-09-12 CN CNA2008100511567A patent/CN101354052A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011046857A1 (en) * | 2009-10-15 | 2011-04-21 | Mallinckrodt Inc. | Piezoelectrically-driven power injector |
| CN102287312A (en) * | 2011-03-25 | 2011-12-21 | 上海海洋大学 | Hydraulic wave energy generation device |
| US10280917B2 (en) | 2012-09-25 | 2019-05-07 | Zhejiang Haiju Technology Co., Ltd. | Reciprocating low-speed heavy-load hydraulic pump with variable action area |
| WO2014047769A1 (en) * | 2012-09-25 | 2014-04-03 | Sun Wei | Reciprocating low-speed heavy-load hydraulic pump with variable action area |
| CN104968940A (en) * | 2012-09-25 | 2015-10-07 | 孙威 | Reciprocating low-speed heavy-load hydraulic pump with variable action area |
| AU2012391449B2 (en) * | 2012-09-25 | 2016-04-21 | Wei Sun | Reciprocating low-speed heavy-load hydraulic pump with variable action area |
| CN104009668A (en) * | 2014-06-04 | 2014-08-27 | 天津大学 | Power tuning excitation device |
| CN108656101A (en) * | 2018-06-06 | 2018-10-16 | 南京航空航天大学 | A kind of the deep-sea mechanical arm and its control method of hydraulic-driven |
| CN108656101B (en) * | 2018-06-06 | 2023-07-25 | 南京航空航天大学 | Hydraulic-driven deep sea mechanical arm and control method thereof |
| CN109763967A (en) * | 2019-03-01 | 2019-05-17 | 浙江师范大学 | A kind of electronic device water-cooling system transfer tube |
| CN109782690A (en) * | 2019-03-25 | 2019-05-21 | 浙江大学宁波理工学院 | Double drive electrichydraulic control formula accurate feeding system and its control method |
| CN111268119A (en) * | 2020-02-17 | 2020-06-12 | 上海申嘉航空科技有限公司 | Helicopter rotor pitch rod, helicopter automatic tilter and helicopter |
| CN113090610A (en) * | 2021-03-12 | 2021-07-09 | 上海卫星工程研究所 | Surface mount type piezoelectric screw pump hydraulic linear actuator and driving method thereof |
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Open date: 20090128 |