CN109854567B - Hydraulic driver - Google Patents
Hydraulic driver Download PDFInfo
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- CN109854567B CN109854567B CN201910187742.2A CN201910187742A CN109854567B CN 109854567 B CN109854567 B CN 109854567B CN 201910187742 A CN201910187742 A CN 201910187742A CN 109854567 B CN109854567 B CN 109854567B
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- 239000007788 liquid Substances 0.000 claims abstract description 37
- 238000007789 sealing Methods 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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Abstract
The invention belongs to the technical field of hydraulic pressure, and particularly relates to a hydraulic driver. The end covers with the inlet and outlet valves are arranged at the left end and the right end of the shell and form a left cylinder cavity and a right cylinder cavity together with the cylinder cavity and the piston; cover plates are arranged on the upper side and the lower side of the shell, and the cover plates press the transducer in the pump cavity of the shell through sealing rings and respectively form an inner pump cavity and an outer pump cavity with the shell and the cover plates; the cover plate respectively presses the large and small sealing rings in the large and small sunken cavities of the shell to form a hole outlet cavity and a hole inlet cavity; the inlet cavity, the inner pump cavities and the outlet cavity are connected in series to form an inner pump, and the inlet cavity, the outer pump cavities and the outlet cavity are connected in series to form an outer pump; the inner and outer pumps on the upper and lower sides of the shell are respectively connected in parallel to form an upper and lower liquid supply unit, the inlet hole of the upper and lower liquid supply unit is connected with the energy accumulator and the left and right outlet valves through pipelines, and the outlet hole of the upper and lower liquid supply unit is connected with the left and right inlet valves through pipelines; the transducer is composed of two piezoelectric drivers with driving and sensing units and a gasket, the driving unit is deformed under the action of direct current driving voltage, the driving voltage is reversed when the output voltage of the sensing unit reaches an extreme value, and the drivers realize self-excitation driving.
Description
Technical Field
The invention belongs to the technical field of hydraulic drive and control, and particularly relates to a hydraulic driver.
Background
The hydraulic and pneumatic transmission and control system has the advantages of high energy density, low noise, no impact and the like, and has been successfully applied to various industries of national economy and national defense industry for many years. The traditional pneumatic power system is usually driven by a motor and a mechanical air pump with larger size, and the effective control of output force, speed, position and the like is realized through the combined operation of various valves such as a reversing valve, a pressure reducing valve, a speed regulating valve and the like, so that the system is large in size, complicated in structural connection and control and has great limitation in application: the device can not be used for micro systems such as aerospace and walking robots and remote control systems; meanwhile, the existing pneumatic power system adopts a plurality of air valves for combined control, so that accurate control and adjustment of driving force, speed and position are difficult to realize, and the pneumatic power system cannot be used in the fields of precision machining and assembly, precision measurement, precision optical driving and the like which require high driving, positioning and control precision. Therefore, various types of micro hydraulic and pneumatic systems have been proposed in succession, such as chinese patents 201510843026.7, 201310132556.1, 201410611173.7, etc., because the existing micro hydraulic or pneumatic systems are all driven by a fixed frequency, the driving force and speed thereof are greatly affected by the working load in the actual work, when the deviation between the resonant frequency of the driving element under specific working conditions and the set excitation frequency is large, the gas output and pressure will be greatly reduced, and the accuracy of the driving force and speed calculated according to the set driving voltage and frequency is also low.
Disclosure of Invention
The invention provides a hydraulic driver, and the implementation scheme of the invention is as follows: the left end cover and the right end cover are arranged at the left end and the right end of the shell through screws and form a left cylinder cavity and a right cylinder cavity together with the cylinder cavity and a piston arranged in the cylinder cavity, a left inlet and outlet valve is arranged on the left end cover, and a right inlet and outlet valve is arranged on the right end cover; cover plates are arranged on the upper side and the lower side of the shell through screws, the cover plates press the transducer in a pump cavity of the shell through sealing rings, the sealing rings are positioned on the upper side and the lower side of the transducer, and the transducer, the sealing rings and the shell form an inner pump cavity and form an outer pump cavity together with the cover plates; the cover plate presses the small sealing ring in the small sinking cavity of the shell to form a hole inlet cavity, and presses the large sealing ring in the large sinking cavity of the shell to form a hole outlet cavity; the inlet cavity is communicated with the inlet hole, and the outlet cavity is communicated with the outlet hole; the inlet cavity, each inner pump cavity and the outlet cavity are sequentially connected in series to form an inner pump, namely: between the interior pump chamber of inlet chamber and its adjacent, between two adjacent interior pump chambers and between interior pump chamber and the outlet chamber all through interior through-hole and the interior valve chamber intercommunication of taking the valve block and establish ties in proper order and constitute the internal pump: the inlet cavity, the outer pump cavities and the outlet cavity are sequentially connected in series to form an outer pump, namely: the inlet cavity and the adjacent outer pump cavity, the two adjacent outer pump cavities and the outer pump cavity and the outlet cavity are communicated with the outer valve cavity with the valve plate through the outer through hole and are sequentially connected in series to form an outer pump; the inner pump and the outer pump above the shell are connected in parallel into an upper liquid supply unit through the hole cavities, and the inner pump and the outer pump below the shell are connected in parallel into a lower liquid supply unit through the hole cavities; the inlet holes of the upper and lower liquid supply units are connected with the energy accumulator and the left and right outlet valves through pipelines, and the outlet holes of the upper and lower liquid supply units are connected with the left and right inlet valves through pipelines; the upper liquid supply unit and the lower liquid supply unit are connected in parallel, the left inlet valve and the right inlet valve are connected in parallel, and the left outlet valve and the right outlet valve are connected in parallel.
The transducer is composed of two drivers and a gasket, wherein each driver is formed by bonding a substrate and a piezoelectric sheet, and the piezoelectric sheet is arranged close to the gasket; two drivers in at least one transducer comprise a driving unit and a sensing unit, namely, the surface electrode of the piezoelectric sheet is divided into two parts which respectively form the driving unit and the sensing unit with the substrate; the driving voltage of the driver and the driving unit is direct current voltage or alternating current voltage; in operation, the deformation directions of two drivers in the same transducer are the same and represent the deformation directions of the transducers, and the deformation directions of two transducers adjacent to each other on the left and right in the same liquid supply unit are opposite; the driving unit is deformed under the action of the direct current driving voltage, and when the output voltage of the sensing unit reaches an extreme value, the driving voltage is reversed, and the driver realizes self-excitation driving; the output voltage of the sensing unit is also used to characterize the speed of movement and the driving force of the piston.
The invention relates to a liquid supply device, which comprises a left inlet and outlet valve, a right inlet and outlet valve, a driver and an upper liquid supply unit, wherein the left inlet and outlet valve and the right inlet and outlet valve are both normally closed switch valves, and are in a stop state when opening is not mentioned in the working process, the driving process of the driver comprises ① driving stage, when the upper and lower liquid supply unit works in a state, the left inlet valve and the right outlet valve are opened, a piston moves rightwards when the left outlet valve and the right inlet valve are closed, the piston moves leftwards when the left inlet valve and the right outlet valve are closed, and the left inlet valve and the right inlet valve are opened, ② positioning and maintaining stage, after the piston.
The invention determines the number of needed transducers according to the needed driving force and speed of the driver; the driver is formed by bonding a PZT4 wafer with equal thickness and a brass substrate, the working medium is pure water, and the upper and lower liquid supply sheetsThe relationship between the speed v of the piston and the driving force F in the meta-synchronous operation is
Wherein, ηq、ηpSpeed and driving force coefficient of the valve plate, R, H radius and height of the inner and outer pump cavity, hpIs the thickness of the piezoelectric plate, f is the excitation frequency, U0For the driving voltage, N is the number of transducers in the upper liquid supply unit, A, FfRespectively the effective area of the piston and the sliding friction.
The characteristics and advantages are as follows: the liquid supply unit is integrated with the shell, so that the volume is small, the integration level is high, an additional pump station is not needed, and the liquid supply unit can be used as an independent standard component; the precise driving and positioning control in a larger stroke is realized by a stepping method, so that the creeping phenomenon can be avoided; the direct current driving voltage is reversed according to the deformation state of the driver, self-excitation driving of the transducer is realized, the adaptability of variation of load of excitation frequency and the like is strong, the driving capability is strong, and the performance is stable; water is used as a working medium, and the cleaning and environmental protection are realized.
Drawings
FIG. 1 is a schematic diagram of the system architecture of a driver in accordance with a preferred embodiment of the present invention;
FIG. 2 is a schematic diagram of the driver driving process in accordance with a preferred embodiment of the present invention;
FIG. 3 is a waveform diagram of the driving voltage in accordance with a preferred embodiment of the present invention;
FIG. 4 is a waveform diagram of the sensing voltage in accordance with a preferred embodiment of the present invention;
FIG. 5 is a schematic structural view of the housing;
FIG. 6 is a top view of FIG. 5;
FIG. 7 is a schematic view of a cover plate according to a preferred embodiment of the present invention;
FIG. 8 is a bottom view of FIG. 7;
FIG. 9 is a schematic diagram of the construction of a transducer in accordance with a preferred embodiment of the present invention;
fig. 10 is a sectional view a-a of fig. 9.
Detailed Description
A left end cover x and a right end cover y are installed at the left end and the right end of the shell a through screws and form a left cylinder cavity B1 and a right cylinder cavity B2 together with the cylinder cavity a8 and a piston f arranged in the cylinder cavity a8, a left inlet valve v1 and a left outlet valve v2 are arranged on the left end cover x, and a right inlet valve v3 and a right outlet valve v4 are arranged on the right end cover y; cover plates b are mounted on the upper side and the lower side of the shell a through screws, the transducer D is pressed in the pump cavity a3 of the shell a through a sealing ring i by the cover plates b, the sealing ring i is located on the upper side and the lower side of the transducer D, the transducer D and the sealing ring i form an inner pump cavity C1 with the shell a, and an outer pump cavity C2 with the cover plates b; the cover plate b presses the small sealing ring g in the small sinking cavity a2 of the shell a to form a hole entering cavity C3, and presses the large sealing ring h in the large sinking cavity a4 of the shell a to form a hole exiting cavity C4; the inlet cavity C3 is communicated with the inlet hole a1, and the outlet cavity C4 is communicated with the outlet hole a 5; the inlet cavity C3, each inner pump cavity C1 and the outlet cavity C4 are connected in series in sequence to form an inner pump q1, namely: the inlet cavity C3 and the adjacent inner pump cavity C1, the two adjacent inner pump cavities C1 and the inner pump cavity C1 and the outlet cavity C4 are communicated through an inner through hole a6 and an inner valve cavity a7 with a valve plate e and are sequentially connected in series to form an inner pump q 1; the inlet cavity C3, each outer pump cavity C2 and the outlet cavity C4 are connected in series in sequence to form an outer pump q2, namely: the inlet cavity C3 and the adjacent outer pump cavity C2, the two adjacent outer pump cavities C2 and the outer pump cavity C2 and the outlet cavity C4 are communicated through an outer through hole b6 and an outer valve cavity b7 with a valve plate e and are sequentially connected in series to form an outer pump q 2; an inner pump q1 and an outer pump q2 above the shell are connected in parallel to form an upper liquid supply unit 1 through an inlet hole cavity C3 and an outlet hole cavity C4, and an inner pump q1 and an outer pump q2 below the shell a are connected in parallel to form a lower liquid supply unit II through an inlet hole cavity C3 and an outlet hole cavity C4; the inlet holes a1 of the upper liquid supply unit 1 and the lower liquid supply unit II are mutually connected with an energy accumulator k, a left outlet valve v2 and a right outlet valve v4 through pipelines, and the outlet holes a5 of the upper liquid supply unit I and the lower liquid supply unit II are connected with a left inlet valve v1 and a right inlet valve v3 through pipelines; the upper liquid supply unit I and the lower liquid supply unit II are connected in parallel, the left inlet valve v1 and the right inlet valve v3 are connected in parallel, and the left outlet valve v2 and the right outlet valve v4 are connected in parallel.
The transducer D is composed of two drivers D and a gasket D0, wherein the driver D is formed by bonding a substrate D1 and a piezoelectric sheet D2, and the piezoelectric sheet D2 is installed close to the gasket D0; two drivers D in the at least one transducer D comprise a driving unit D21 and a sensing unit D22, namely, the surface electrode of the piezoelectric sheet D2 is divided into two parts and forms a driving unit D21 and a sensing unit D22 together with the substrate D1 respectively; the driving voltage of the driver d and the driving unit d21 is direct current voltage or alternating current voltage; in operation, the deformation directions of two drivers D in the same transducer D are the same and represent the deformation direction of the transducer D, and the deformation directions of two adjacent transducers D on the left and right in the same liquid supply unit are opposite; when the driving voltage is direct-current voltage, the driving unit d21 in the driver d is deformed under the action of the driving voltage, and the driving voltage is reversed when the output voltage of the sensing unit d22 reaches an extreme value, so that the driver d realizes self-excitation driving; the output voltage of the sensing unit d22 is also used to characterize the speed of movement and the driving force of the piston f.
In the invention, a left inlet valve v1, a left outlet valve v2, a right inlet valve v3 and a right outlet valve v4 are all normally closed switch valves, and are all in a stop state when opening is not mentioned in work, the driving process of the driver comprises a ① driving stage, when an upper liquid supply unit I and a lower liquid supply unit II work in a state, a left inlet valve v1 and a right outlet valve v4 are opened, a piston f moves rightwards when the left outlet valve v2 and the right inlet valve v3 are closed, the piston f moves leftwards when the left inlet valve v1 and the right outlet valve v4 are closed, a left outlet valve v2 and the right inlet valve v3 are opened, and a ② positioning and maintaining stage, after the piston f moves to a preset position, the left inlet valve v1, the left outlet valve v2, the right inlet valve v3 and the right outlet valve v4 are all closed, and the upper liquid supply unit I and the lower.
The invention determines the number of transducers D required according to the required driver driving force and speed; the driver d is formed by bonding a PZT4 wafer with equal thickness and a brass substrate, the working medium is pure water, and the relation between the speed v of the piston F and the driving force F when the upper liquid supply unit I and the lower liquid supply unit II synchronously work is
Wherein, ηq、ηpSpeed and driving force coefficient of the valve sheet e, R, H radius and height of the inner pump chamber C1 and the outer pump chamber C2, hpThickness of the piezoelectric sheet d2, f excitation frequency, U0For the driving voltage, N is the number of transducers D in the upper liquid supply unit I, A, FfRespectively effective area of piston fAnd sliding friction.
Claims (1)
1. A hydraulic actuator, characterized by: the left end cover and the right end cover are arranged at the left end and the right end of the shell and form a left cylinder cavity and a right cylinder cavity together with the cylinder cavity and the piston, a left inlet and outlet valve is arranged on the left end cover, and a right inlet and outlet valve is arranged on the right end cover; cover plates are arranged on the upper side and the lower side of the shell, the cover plates press the transducer in the pump cavity of the shell through sealing rings, and the transducer, the sealing rings and the shell form an inner pump cavity and an outer pump cavity together with the cover plates; the cover plate presses the small sealing ring in the small sinking cavity of the shell to form a hole inlet cavity, and presses the large sealing ring in the large sinking cavity of the shell to form a hole outlet cavity; the inlet cavity is communicated with the inlet hole, and the outlet cavity is communicated with the outlet hole; the inlet cavity, the inner pump cavities and the outlet cavity are sequentially connected in series to form an inner pump, and the inlet cavity, the outer pump cavities and the outlet cavity are sequentially connected in series to form an outer pump; the inner pump and the outer pump above the shell are connected in parallel into an upper liquid supply unit through the hole cavities, and the inner pump and the outer pump below the shell are connected in parallel into a lower liquid supply unit through the hole cavities; the inlet holes of the upper and lower liquid supply units are connected with the energy accumulator and the left and right outlet valves through pipelines, and the outlet holes of the upper and lower liquid supply units are connected with the left and right inlet valves through pipelines; the transducer is composed of two drivers and a gasket, and the drivers are formed by bonding a substrate and a piezoelectric sheet; two drivers in the at least one transducer comprise a driving unit and a sensing unit; in operation, the deformation directions of two adjacent transducers on the left and right in the same liquid supply unit are opposite; the driving unit is deformed under the action of the direct current driving voltage, the driving voltage is reversed when the output voltage of the sensing unit reaches an extreme value, and the driver realizes self-excitation driving.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910187742.2A CN109854567B (en) | 2019-03-01 | 2019-03-01 | Hydraulic driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910187742.2A CN109854567B (en) | 2019-03-01 | 2019-03-01 | Hydraulic driver |
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| Publication Number | Publication Date |
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| CN109854567A CN109854567A (en) | 2019-06-07 |
| CN109854567B true CN109854567B (en) | 2020-05-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910187742.2A Active CN109854567B (en) | 2019-03-01 | 2019-03-01 | Hydraulic driver |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201705743U (en) * | 2010-04-30 | 2011-01-12 | 浙江师范大学 | Long-stroke precise stepping driver |
| CN102678528A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Series-parallel hybrid-driven piezoelectric pump |
| CN102691694A (en) * | 2012-05-23 | 2012-09-26 | 浙江师范大学 | Self-driven precise stepwise hydraulic power device |
| CN202579446U (en) * | 2012-05-23 | 2012-12-05 | 浙江师范大学 | Self-driven precision stepping hydraulic power device |
| CN106014907A (en) * | 2016-06-15 | 2016-10-12 | 浙江师范大学 | Plunger pump driven by piezoelectric chip vibrators |
| CN106443054A (en) * | 2016-06-15 | 2017-02-22 | 浙江师范大学 | Pipe flow velocity monitor |
| CN108035869A (en) * | 2018-01-10 | 2018-05-15 | 浙江师范大学 | A kind of adaptive miniature piezoelectric pump installation capable of reversing of non-resonant |
-
2019
- 2019-03-01 CN CN201910187742.2A patent/CN109854567B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201705743U (en) * | 2010-04-30 | 2011-01-12 | 浙江师范大学 | Long-stroke precise stepping driver |
| CN102678528A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Series-parallel hybrid-driven piezoelectric pump |
| CN102691694A (en) * | 2012-05-23 | 2012-09-26 | 浙江师范大学 | Self-driven precise stepwise hydraulic power device |
| CN202579446U (en) * | 2012-05-23 | 2012-12-05 | 浙江师范大学 | Self-driven precision stepping hydraulic power device |
| CN106014907A (en) * | 2016-06-15 | 2016-10-12 | 浙江师范大学 | Plunger pump driven by piezoelectric chip vibrators |
| CN106443054A (en) * | 2016-06-15 | 2017-02-22 | 浙江师范大学 | Pipe flow velocity monitor |
| CN108035869A (en) * | 2018-01-10 | 2018-05-15 | 浙江师范大学 | A kind of adaptive miniature piezoelectric pump installation capable of reversing of non-resonant |
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| CN109854567A (en) | 2019-06-07 |
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Effective date of registration: 20231013 Address after: B205, No.179 Chezhan Road, Liushi Town, Leqing City, Wenzhou City, Zhejiang Province, 325600 Patentee after: Zhipu Qiwang (Wenzhou) Electric Power Technology Research Institute Co.,Ltd. Address before: 321004 Zhejiang Normal University, 688 Yingbin Avenue, Wucheng District, Jinhua City, Zhejiang Province Patentee before: ZHEJIANG NORMAL University |
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Effective date of registration: 20231113 Address after: 325600 Wenzhou Bridge Industrial Zone (Beibaixiang Town), Leqing City, Wenzhou City, Zhejiang Province (Branch premises: Room 306, Building 22, Zone C, Wuzhou Electrical and Electrical City, No. 3999 Liujiang Road, Liushi Town, Leqing City, office use only) Patentee after: JIANGNAN CNC MACHINE TOOL Co.,Ltd. Address before: B205, No.179 Chezhan Road, Liushi Town, Leqing City, Wenzhou City, Zhejiang Province, 325600 Patentee before: Zhipu Qiwang (Wenzhou) Electric Power Technology Research Institute Co.,Ltd. |
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