CN109869304B - Microminiature air compressor machine - Google Patents
Microminiature air compressor machine Download PDFInfo
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- CN109869304B CN109869304B CN201910166731.6A CN201910166731A CN109869304B CN 109869304 B CN109869304 B CN 109869304B CN 201910166731 A CN201910166731 A CN 201910166731A CN 109869304 B CN109869304 B CN 109869304B
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Abstract
The invention belongs to the field of microfluid transmission and control, and particularly relates to a micro-miniature air compressor. The upper cover is arranged on the box body, the upper inlet and lower outlet cavities and the one-way valve arranged in the upper inlet and lower outlet cavities respectively form an upper inlet and outlet valve and a lower inlet and outlet valve, a left boss of the upper cover is arranged in the left cavity of the box body and enables the upper inlet and lower inlet and outlet cavities to be communicated, and a right boss of the upper cover is arranged in the right cavity of the box body and enables the upper outlet and lower outlet cavities to be communicated with the; the body platform of the upper cover presses the driver in the body cavity of the box body through the sealing ring, and the driver is formed by bonding a substrate and a piezoelectric sheet; the driver, the upper cover, the upper inlet valve and the sealing ring form an upper compression cavity, and the upper compression cavities are connected in series to form an upper compression unit; the driver, the box body, the lower inlet valve and the sealing ring form a lower compression cavity, all the lower compression cavities are connected in series to form a lower compression unit, and the upper compression unit and the lower compression unit are connected in parallel; the radii of the upper and lower compression units which are opposite up and down are equal, the cavity radii of the upper and lower compression cavities from left to right are all reduced step by step, and the deformation directions of two left and right adjacent drivers are opposite in work.
Description
Technical Field
The invention belongs to the field of trace gas transmission and control, and particularly relates to a micro air compressor.
Background
The micro gas compressing and conveying device is also called a micro air compressor, an air pump, a gas compressing device and the like, and is mainly used for various aspects of gas sampling, gas circulation and supply, gas injection cooling, negative pressure maintaining, inflation pressurization, oxygenation and the like. According to the working principle, common gas compression devices can be divided into diaphragm type, electromagnetic type, impeller type, piston type and the like, and have the common characteristics of comprising mechanical transmission parts, so that the structure is complex, the volume, the weight and the power consumption are large, in addition, large noise and electromagnetic interference exist, the structure is inconvenient to miniaturize and integrate, and the application in the field of micro electro mechanical systems is limited to a certain extent. In recent years, various piezoelectric micro gas compressing and conveying devices have been proposed in succession, such as chinese patents 201110255709.2, 201410104036.4, 201410577904.0, 201510649212.7, 201710697409.7, etc. Although the structural principle and the performance difference of the gas compression and conveying device are large, the gas driving is realized by utilizing the bending deformation generated by the wafer type piezoelectric vibrator under the action of an electric field, the volume change of a compression cavity caused by the bending deformation of the piezoelectric vibrator is relatively small, the output flow and the pressure which can be realized by the conventional piezoelectric gas compression device are low, and particularly, the large output flow and the high output pressure cannot be simultaneously obtained, so the popularization and the application are limited to a certain extent.
Disclosure of Invention
In order to improve the output pressure of gas, the invention provides a micro air compressor, and the embodiment of the invention is as follows: the upper cover is installed on the box body through screws, a left boss, a right boss and at least two body platforms with different diameters are arranged at the bottom of the upper cover, the diameters of the body platforms from left to right are sequentially reduced, an upper inlet hole is formed in the left boss, an upper outlet cavity is formed in the right boss, and an upper inlet cavity and an upper outlet hole are formed in the body platforms; the upper inlet cavity of the leftmost body platform is communicated with the upper inlet hole, the upper outlet hole of the rightmost body platform is communicated with the upper outlet cavity, and the upper inlet cavities and the upper outlet holes of the other two adjacent body platforms are communicated with each other; the upper inlet and outlet cavity of the upper cover and the one-way valve arranged in the upper inlet and outlet cavity respectively form an upper inlet valve and an upper outlet valve, and the one-way valve is a cantilever beam valve or a butterfly valve; the top of the box body is provided with a left cavity, a right cavity and cavity bodies with the number and the diameter equal to those of the body platforms respectively, and the diameters of the cavity bodies from left to right are reduced in sequence; a lower inlet hole is formed in the bottom wall of the left cavity, a lower outlet cavity is formed in the bottom wall of the right cavity, and a lower inlet cavity and a lower outlet hole are formed in the bottom wall of the body cavity; the lower inlet cavity of the leftmost body cavity is communicated with the lower inlet hole, the lower outlet hole of the rightmost body cavity is communicated with the lower outlet cavity, and the lower inlet cavities and the lower outlet holes of the other two adjacent body cavities are communicated with each other; the bottom of the box body is provided with an air storage chamber communicated with the lower outlet cavity through the outflow hole; the lower inlet and outlet cavities of the box body and the one-way valve arranged in the lower inlet and outlet cavities respectively form a lower inlet valve and a lower outlet valve.
The left boss of the upper cover is arranged in the left cavity of the box body and enables the upper inflow hole of the upper cover to be communicated with the lower inflow hole of the box body, and the right boss of the upper cover is arranged in the right cavity of the box body and enables the upper outlet cavity of the upper cover to be communicated with the lower outlet cavity of the box body and the air storage chamber; the body platform of the upper cover presses the driver in the body cavity of the box body through a sealing ring, the sealing ring is positioned on the upper side and the lower side of the driver, the driver is formed by bonding a substrate and a piezoelectric sheet, and the surface of the driver is coated with insulating paint or bonded with an insulating film; the driver, the upper cover, the upper inlet valve and the sealing ring form an upper compression cavity, and the upper compression cavities are connected in series to form an upper compression unit; the driver, the box body, the lower inlet valve and the sealing ring form a lower compression cavity, all the lower compression cavities are connected in series to form a lower compression unit, and the upper compression unit and the lower compression unit are connected in parallel; the radii of the upper compression unit and the lower compression unit which are opposite up and down are equal, the cavity radii of the upper compression chamber and the lower compression chamber from left to right are all reduced step by step, and the cavity radii refer to the inner circle radii of the sealing rings in the upper compression chamber and the lower compression chamber; the deformation directions of two left and right adjacent drivers are opposite in operation.
Taking an air compressor with three drivers as an example, from left to right, the upper inlet valves are sequentially defined as an upper inlet valve I, an upper inlet valve II and an upper inlet valve III, the lower inlet valves are sequentially defined as a lower inlet valve I, an upper inlet valve II and a lower inlet valve III, the drivers are sequentially defined as a driver I, a driver II and a driver III, the upper compression cavities are sequentially defined as an upper compression cavity I, a lower compression cavity II and a lower compression cavity III; the working process is as follows: in the upper half cycle, the first and third drivers bend downwards and deform upwards, the first and third upper inlet valves, the second and lower outlet valves are opened, the second and third upper inlet valves, the first and third lower inlet valves are closed, the first and third upper compression cavities and the second lower compression cavity suck gas, and the second and third upper compression cavities and the first and third lower compression cavities discharge gas, which is an upper suction and lower discharge process; in the lower half cycle, the first driver and the third driver bend upwards and the second driver bends downwards, the first upper inlet valve and the third upper inlet valve, the second lower inlet valve and the lower outlet valve are closed, the second upper inlet valve, the second upper outlet valve and the first lower inlet valve and the third lower inlet valve are opened, the first upper compression cavity, the third upper compression cavity and the second lower compression cavity discharge gas, and the second upper compression cavity, the first lower compression cavity and the third lower compression cavity suck gas, which is an upper-discharge and lower-suction process; in the processes of upper suction, lower discharge, upper discharge and lower suction, the gas is sequentially compressed step by the upper compression cavities I, II and III or the lower compression cavities I, II and III, so that the output pressure is effectively improved.
In the invention, the radius, height and number of the upper and lower compression cavities on the upper and lower sides of the driver are respectively equal; the maximum gas storage pressure of the gas storage chamber is Pmax＝P0ηp{(1+α)/(1-α)[β+(1+α)/(1-α)]n-1-1}, wherein: p0At standard atmospheric pressure, ηpFor efficiency coefficient, α & gt 0 is compression ratio, i.e. the ratio of the volume variation of the upper compression cavity to the volume of the upper compression cavity caused by the deformation of the driver, β & gt 1 is the radius ratio of two left and right adjacent upper compression cavities, n & gt 2 is the number of the upper compression cavities, in operation, the two left and right adjacent upper compression cavities or lower compression cavities are communicated with each other, i.e. the volume variation of the larger radius when the one-way valve is opened is not less than the volume variation of the smaller radius, in order to obtain the maximum compression ratio, the height of the upper and lower compression cavities is equal to the deformation of the central point of the driver, and the height of the upper compression cavity is equal to the height of the lower compression cavity when the driver
ηh、U0Respectively dynamic correction factor and drive voltage, d31Is the piezoelectric constant, hpIs the thickness of the piezoelectric sheet, riThe radius of the upper compression cavity is the radius of the inner circle of the sealing ring in the upper compression cavity.
The characteristics and advantages are as follows: by adopting the method of serially connecting the variable-volume compression chambers and compressing the variable-volume compression chambers step by step, higher air supply pressure can be obtained in a quasi-static state; the upper and lower compression chambers work synchronously, the unit volume power is large, and the gas conveying capacity is strong.
Drawings
Fig. 1 is a schematic sectional view of an air compressor according to a preferred embodiment of the present invention;
FIG. 2 is a top, bottom and up-draft process of the gas in the upper half of the cycle in accordance with a preferred embodiment of the present invention;
FIG. 3 illustrates the process of gas downdraft and updraft in the lower half cycle of a preferred embodiment of the present invention;
FIG. 4 is a schematic structural view of the upper cover in a preferred embodiment of the present invention;
FIG. 5 is a bottom view of FIG. 4;
FIG. 6 is a schematic structural view of a case according to a preferred embodiment of the present invention;
FIG. 7 is a top view of FIG. 6;
fig. 8 is a schematic structural diagram of a driver according to a preferred embodiment of the present invention.
Detailed Description
The invention relates to a micro air compressor, which comprises an upper cover a, a box body b, a one-way valve c and a driver di. The upper cover a is installed on the box body b through screws, the bottom of the upper cover a is provided with a left boss a1, a right boss a2 and at least two body platforms a3i with different diameters, the diameters of the body platforms a3i from left to right are sequentially reduced, an upper inlet hole a4 is formed in the left boss a1, an upper outlet cavity a5 is formed in the right boss a2, and an upper inlet cavity a6 and an upper outlet hole a7 are formed in the body platforms a3 i; the upper inlet cavity a6 of the leftmost body station a3i is communicated with the upper inlet hole a4, the upper outlet hole a7 of the rightmost body station a3i is communicated with the upper outlet cavity a5, and the upper inlet cavity a6 and the upper outlet hole a7 of the other two adjacent body stations a3i are communicated with each other; an upper inlet cavity a6 and an upper outlet cavity a5 of the upper cover a and a one-way valve c arranged in the upper inlet cavity and the upper outlet cavity respectively form an upper inlet valve si and an upper outlet valve s, and the one-way valve c is a cantilever beam valve or a butterfly valve; the top of the box body b is provided with a left cavity b1, a right cavity b2 and a body cavity b3i with the number and the diameter equal to those of the body platform a3i, and the diameters of the body cavities b3i from left to right are reduced in sequence; a lower inlet hole b4 is formed in the bottom wall of the left cavity b1, a lower outlet cavity b5 is formed in the bottom wall of the right cavity b2, and a lower inlet cavity b6 and a lower outlet hole b7 are formed in the bottom wall of the body cavity b3 i; the lower inlet chamber b6 of the leftmost body chamber b3i communicates with the lower inflow hole b4, the lower outflow hole b7 of the rightmost body chamber b3i communicates with the lower outlet chamber b5, and the lower inlet chamber b6 and the lower outflow hole b7 of the remaining two adjacent body chambers b3i communicate with each other; the bottom of the box body b is provided with an air storage chamber b9 communicated with the lower outlet cavity b5 through an outflow hole b 8; the lower inlet chamber b6 and the lower outlet chamber b5 of the tank b and the check valve c installed therein constitute a lower inlet valve ti and a lower outlet valve t, respectively.
The left boss a1 of the upper cover a is placed in the left cavity b1 of the box body b and enables the upper inflow hole a4 of the upper cover a to be communicated with the lower inflow hole b4 of the box body b, the right boss a2 of the upper cover a is placed in the right cavity b2 of the box body b and enables the upper outlet cavity a5 of the upper cover a to be communicated with the lower outlet cavity b5 of the box body b and the air storage chamber b 9; the body platform a3i of the upper cover a crimps the driver di in the body cavity b3i of the box body b through a sealing ring, the sealing ring is positioned at the upper side and the lower side of the driver di, the driver di is formed by bonding a substrate di1 and a piezoelectric sheet di2, and the surface of the driver di is coated with insulating paint or bonded with an insulating film; the driver di, the upper cover a, the upper inlet valve si arranged on the upper cover a and the sealing ring form an upper compression cavity xi, and the upper compression cavities xi are connected in series to form an upper compression unit I; the driver di, the box body b, the lower inlet valve ti arranged on the box body b and the sealing ring form a lower compression cavity zi, the lower compression cavities zi are connected in series to form a lower compression unit II, and the upper compression unit I and the lower compression unit II are connected in parallel; the radii of the upper compression cavity xi and the lower compression cavity zi which are opposite up and down are equal, the cavity radii of the upper compression cavity xi from left to right and the lower compression cavity zi from left to right are all reduced step by step, and the cavity radii refer to the inner circle radii of the sealing rings in the upper compression cavity xi and the lower compression cavity zi; the deformation directions of two left and right adjacent drivers di are opposite in operation.
In the invention, i in an upper inlet valve si, a lower inlet valve ti, a driver di, an upper compression cavity xi and a lower compression cavity zi represent serial numbers from left to right, and i is 1, 2 and 3; taking an air compressor with three drivers di as an example, from left to right, an upper inlet valve si is sequentially defined as an upper inlet valve one s1, an upper inlet valve two s2 and an upper inlet valve three s3, a lower inlet valve ti is sequentially defined as a lower inlet valve one t1, a lower inlet valve two t2 and a lower inlet valve three t3, drivers di are sequentially defined as a driver one d1, a driver two d2 and a driver three d3, an upper compression cavity xi is sequentially defined as an upper compression cavity one x1, an upper compression cavity two x2 and an upper compression cavity three x3, and a lower compression cavity zi is sequentially defined as a lower compression cavity one z1, a lower compression cavity two z2 and a lower compression cavity three z 3; the specific working process is as follows: in the upper half cycle, the first drivers d1 and three d3 bend downwards, the second drivers d2 bend upwards, the first upper inlet valves s1 and three s3, the second lower inlet valves t2 and the lower outlet valves t are opened, the second upper inlet valves s2, the upper outlet valves s, the first lower inlet valves t1 and three t3 are closed, the first upper compression cavity x1 and three x3 and the second lower compression cavity z2 suck gas, and the second upper compression cavity x2, the first lower compression cavity z1 and three z3 exhaust gas, which is an upper suction and lower discharge process; in the lower half cycle, the first drivers d1 and three d3 bend upwards, the second drivers d2 bend downwards, the first upper inlet valves s1 and three s3, the second lower inlet valves t2 and the lower outlet valves t are closed, the second upper inlet valves s2, the upper outlet valves s, the first lower inlet valves t1 and three t3 are opened, the first upper compression cavity x1 and three x3 and the second lower compression cavity z2 discharge gas, and the second upper compression cavity x2, the first lower compression cavity z1 and three z3 suck gas, so that the upper-discharge and lower-suction processes are carried out; in the processes of the upper suction, the lower discharge, the upper discharge and the lower suction, the gas is sequentially compressed by the upper compression cavities of the first x1, the second x2 and the third x3 or the lower compression cavities of the first z1, the second z2 and the third z3, and the output pressure is effectively improved.
In the invention, the radius, height and number of the upper compression cavity xi and the lower compression cavity zi on the upper side and the lower side of the driver di are respectively equal: the maximum gas storage pressure of the gas storage chamber b9 is Pmax＝P0ηp{(1+α)/(1-α)[β+(1+α)/(1-α)]n-1-1}, wherein: p0At standard atmospheric pressure, ηpFor efficiency coefficient, α & gt 0 is compression ratio, i.e. the ratio of the volume variation of the upper compression cavity xi to the volume of the upper compression cavity xi caused by the deformation of the driver di, β & gt 1 is the ratio of the radius of the two left and right adjacent upper compression cavities xi, n & gt 2 is the number of the upper compression cavities xi, in operation, the two left and right adjacent upper compression cavities xi are communicated with each other, i.e. the volume variation of the larger radius is not less than the volume variation of the smaller radius when the one-way valve c is opened, in order to obtain the maximum compression ratio, the height of the upper compression cavity xi is equal to the deformation of the center point of the driver di, and the height of the upper compression cavity xi is equal to the deformation of the center point of the driver di when the driver di is formed by
ηh、U0Respectively dynamic correction factor and drive voltage, d31Is the piezoelectric constant, hpThickness of the piezoelectric sheet di2, riThe radius of the upper compression cavity xi is the inner circle radius of the sealing ring in the upper compression cavity xi.
Claims (1)
1. A microminiature air compressor machine which characterized in that: the upper cover is arranged on the box body, an upper inlet and outlet cavity of the upper cover and the one-way valve arranged in the upper inlet and outlet cavity form an upper inlet valve and an upper outlet valve respectively, a lower inlet and outlet cavity of the box body and the one-way valve arranged in the upper inlet and outlet cavity form a lower inlet valve and a lower outlet valve respectively, a left boss of the upper cover is arranged in a left cavity of the box body and enables an upper inlet hole of the upper cover to be communicated with a lower inlet hole of the box body, and a right boss of the upper cover is arranged in a right cavity ofThe upper outlet cavity of the upper cover is communicated with the lower outlet cavity of the box body and the air storage chamber; the body platform of the upper cover presses the driver in the body cavity of the box body through a sealing ring, the sealing ring is positioned on the upper side and the lower side of the driver, and the driver is formed by bonding a substrate and a piezoelectric sheet; the driver, the upper cover, the upper inlet valve and the sealing ring form an upper compression cavity, and the upper compression cavities are connected in series to form an upper compression unit; the driver, the box body, the lower inlet valve and the sealing ring form a lower compression cavity, all the lower compression cavities are connected in series to form a lower compression unit, and the upper compression unit and the lower compression unit are connected in parallel; the radii of the upper compression cavity and the lower compression cavity which are opposite up and down are equal, the cavity radii of the upper compression cavity and the lower compression cavity from left to right are all reduced step by step, and the height of the upper compression cavity and the lower compression cavity is equal to the deformation of the central point of the driver; in the working process, the deformation directions of the two left and right adjacent drivers are opposite, and when the two left and right adjacent upper compression cavities or lower compression cavities are communicated with each other, the volume variation of the larger radius is not smaller than the volume variation of the smaller radius; the maximum gas storage pressure of the gas storage chamber is Pmax＝P0ηp{(1+α)/(1-α)[β+(1+α)/(1-α)]n-1-1}, wherein: p0At standard atmospheric pressure, ηpFor the efficiency coefficient, α is more than 0 is the compression ratio, β is more than 1 is the radius ratio of two left and right adjacent upper compression cavities, and n is more than or equal to 2 is the number of the upper compression cavities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910166731.6A CN109869304B (en) | 2019-03-01 | 2019-03-01 | Microminiature air compressor machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910166731.6A CN109869304B (en) | 2019-03-01 | 2019-03-01 | Microminiature air compressor machine |
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| Publication Number | Publication Date |
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| CN109869304A CN109869304A (en) | 2019-06-11 |
| CN109869304B true CN109869304B (en) | 2020-06-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910166731.6A Active CN109869304B (en) | 2019-03-01 | 2019-03-01 | Microminiature air compressor machine |
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Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2674145Y (en) * | 2003-09-12 | 2005-01-26 | 清华大学 | Diaphragm air pump driven by double piezoelectric beam |
| JP5107767B2 (en) * | 2007-10-24 | 2012-12-26 | アルプス電気株式会社 | 4-valve diaphragm pump |
| CN102678528A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Series-parallel hybrid-driven piezoelectric pump |
| CN102691694B (en) * | 2012-05-23 | 2015-01-28 | 浙江师范大学 | Self-driven precise stepwise hydraulic power device |
| CN102691693B (en) * | 2012-05-23 | 2015-02-04 | 浙江师范大学 | Precision stepping hydraulic cylinder driven by piezo-electricity wafer |
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Effective date of registration: 20230308 Address after: 226000 south of Xingyuan West Road and north of No.2 east of Jinding Road, high tech Zone, Nantong City, Jiangsu Province Patentee after: Max fluid technology (Jiangsu) Co.,Ltd. Address before: 230000 Room 203, building 2, phase I, e-commerce Park, Jinggang Road, Shushan Economic Development Zone, Hefei City, Anhui Province Patentee before: Hefei Jiuzhou Longteng scientific and technological achievement transformation Co.,Ltd. Effective date of registration: 20230308 Address after: 230000 Room 203, building 2, phase I, e-commerce Park, Jinggang Road, Shushan Economic Development Zone, Hefei City, Anhui Province Patentee after: Hefei Jiuzhou Longteng scientific and technological achievement transformation Co.,Ltd. Address before: 321004 Zhejiang Normal University, 688 Yingbin Avenue, Wucheng District, Jinhua City, Zhejiang Province Patentee before: ZHEJIANG NORMAL University |