CN101922442A - Dual-cavity dual-drive piezoelectric stack pump - Google Patents
Dual-cavity dual-drive piezoelectric stack pump Download PDFInfo
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- CN101922442A CN101922442A CN 201010118038 CN201010118038A CN101922442A CN 101922442 A CN101922442 A CN 101922442A CN 201010118038 CN201010118038 CN 201010118038 CN 201010118038 A CN201010118038 A CN 201010118038A CN 101922442 A CN101922442 A CN 101922442A
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Abstract
The invention relates to a dual-cavity dual-drive piezoelectric stack pump, and belongs to the field of micro-electrical mechanics. Rough-adjustment pre-tightening nuts and fine-adjustment pre-tightening nuts on the two sides are respectively threaded with a stack supporting body; piezoelectric stacks on the two sides are fixedly adhered to a stack seat and are connected with the rough-adjustment pre-tightening nuts through inclined block pre-tightening devices in a contact way; the piezoelectric stacks are connected with a stack through a lead wire; vibrating diaphragms on the two sides are fixedly adhered to the stack seat; the vibrating diaphragms and valve seats on the two sides form cavities on the two sides respectively; inlet check valves are fixedly connected with the valve seats; outlet check valves are fixedly connected with the valve seats and are connected with a flow channel respectively; and the valve seats on the two sides are fixedly connected with each other through bolts. The dual-cavity dual-drive piezoelectric stack pump has the following advantages of: novel structure, high output flow rate, strong bearing capacity and higher pressure output, and simultaneously has good controllability and output stability.
Description
Technical field
The invention belongs to the microelectron-mechanical field, refer in particular to piezoelectric actuator.
Background technique
Piezoelectric actuator is based on the novel control of fluctuation principle and the microdrive of driving.It utilizes the inverse piezoelectric effect of piezoelectric element, converts electrical energy into the novel driving device of mechanical energy.Piezoelectric pump is a kind of novel fluid driver based on Piezoelectric Driving, micropump with conventional pump and other driving mode is compared, that piezoelectric pump has is simple in structure, volume is little, in light weight, power consumption is low, noiseless, no electromagnetic interference, can be according to applying voltage or FREQUENCY CONTROL output tiny flow quantity.Invention that let it be to the greatest extent and development be the history in more than 20 year only, but be widely used in fields such as aerospace vehicle, robot, automobile, medical apparatus, biological gene engineering, micromechanics.The driving element of common piezoelectric pump mostly is list/twin-wafer type piezo-electric sheet, the advantage of chip-type piezoelectric pump is that volume is little, simple in structure, stable performance, cost are low, be easy to control, shortcoming is that the voltage that piezoelectric vibrator can bear is low, output accuracy is low, cavity volume is little, output flow is little, bearing capacity relatively a little less than.
Summary of the invention
The invention provides a kind of dual-cavity dual-drive piezoelectric stack pump, the voltage that can bear with solution chip-type piezoelectric pump piezoelectric vibrator is low, output accuracy is low, cavity volume is little, output flow is little, bearing capacity is more weak problem relatively, the present invention is achieved through the following technical solutions: the coarse adjustment pre-load nut of both sides, the fine setting pre-load nut respectively with stack support and be threaded, the piezoelectric stack of both sides with stack a fixed bonding, be connected with the contact of coarse adjustment pre-load nut by the skewback pre-tightening apparatus, piezoelectric stack with stack lead and be connected, the vibrating diaphragm of both sides with stack a fixed bonding, the valve seat of vibrating diaphragm and both sides forms the cavity of both sides respectively, inlet one-way valve is fixedlyed connected with valve seat, the outlet one-way valve is fixedlyed connected with valve seat, be connected with runner respectively, the valve seat of these both sides is bolted to connection; What inlet one-way valve, outlet one-way valve adopted is interior distribution overhang valve.
As dual-cavity dual-drive piezoelectric stack pump, cavity volume is compressed to hour as starting point, its working procedure can be divided into following several stages:
1, the outlet closed check valve stage: this stage is that the vibrating diaphragm vibration increases the pump cavity volume gradually, because the outlet one-way valve is not also closed, at this moment will there be fluid to flow backwards back in the pump chamber in the outlet port, along with the vibration of vibrating diaphragm further increases pump chamber, the outlet one-way valve is closed gradually, and fluid refluence phenomenon stops.
2, inlet one-way valve opening stage: when the vibrating diaphragm vibration further increases pump chamber, the pump chamber internal volume drops to a certain degree, makes the ingress one-way valve opens, and at this moment fluid will constantly flow in the pump chamber, when pump chamber increased to maximum, fluid flowed into the pump chamber process and finishes.
3, inlet one-way valve dwell period: when cavity volume increases to maximum, vibrating diaphragm continues vibration will make cavity volume begin to diminish, the increase of pump chamber internal pressure will make in the ingress that inlet one-way valve is not closed fully has fluid to flow backwards, along with closing fully of inlet one-way valve, the refluence phenomenon stops.
4, the outlet one-way valve opens stage: after the inlet one-way valve closure, vibrating diaphragm continues vibration further reduces pump chamber, and the pump chamber internal pressure increases makes the outlet one-way valve opens, at this moment will have fluid constantly to flow out in pump chamber, when pump chamber fades to hour, fluid flows out and stops.
More than four working procedure constituted operation cycle of piezoelectric stack pump, realized the input and the output of a certain amount of fluid, so going round and beginning again has just formed the continuous duty of piezoelectric stack pump.
The invention has the advantages that novel structure, utilize that response characteristic is good, ouput force is big, the high piezoelectric stack of displacement resolution is as driving element, adopt vibrating diaphragm and the seal membrane structure that stacks a convolution, increase the amount of deformation of vibrating diaphragm, cause the variation of bigger pump chamber, vibrating diaphragm provides certain elastic-restoring force simultaneously, has greatly reduced the loss of pressure.What one-way valve adopted is interior distribution overhang valve, has reduced the hysteresis quality and the leak of liquid of valve, has therefore also reduced the resistance of liquid by valve, and backflow phenomenon has also obtained inhibition greatly.Designed the pre-tightening mechanism of bolt coarse adjustment and wedge shape fine setting, can better more accurate pretightening force have been adjusted.Therefore, this pump can realize that output flow is big, bearing capacity is strong, can realize bigger pressure output, has good controllability simultaneously and exports stable.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
The coarse adjustment pre-load nut 6 of both sides, fine setting pre-load nut 3 respectively with stack support and be threaded, the piezoelectric stack 5 of both sides with stack seat 8 fixed bondings, contact by skewback pre-tightening apparatus 4 and coarse adjustment pre-load nut and be connected, piezoelectric stack with stack lead 7 and be connected, the vibrating diaphragm 12 of both sides with stack seat 8 fixed bondings, the valve seat 13 of vibrating diaphragm 12 and both sides forms the cavity 2 of both sides respectively, inlet one-way valve 1 is fixedlyed connected with valve seat, outlet one-way valve 10 is fixedlyed connected with valve seat, be connected with runner 9 respectively, the valve seat of these both sides is fixedly connected by bolt 11.
What wherein inlet one-way valve, outlet one-way valve adopted is interior distribution overhang valve.
Working principle: required pretightening force is carried out coarse adjustment by the coarse adjustment pre-load nut, finely tunes by the fine setting pre-load nut of skewback pre-tightening apparatus; When adding alternating voltage, piezoelectric stack periodically extends shortening, is attached thereto also up-down vibration thereupon of the vibrating diaphragm that connects, and the variation that causes cavity 2 pressure realizes the one-way flow of fluid.Concrete working procedure is: when big traffic driven, the both sides piezoelectric stack is switched on simultaneously, the both sides pump cavity reduces simultaneously, and cavity pressure increases, and at this moment, inlet one-way valve is closed, the outlet one-way valve opens, and fluid flows out by the outlet one-way valve.Piezoelectric stack cuts off the power supply simultaneously when both sides, and the both sides pump cavity increases simultaneously, and cavity pressure reduces, and at this moment, inlet one-way valve is opened, the outlet closed check valve, and fluid is by population one-way valve inflow pump cavity.Repeat this process, then fluid at this moment, if use the piezoelectric stack maximum distortion, can be realized big flow work with big flow continuous-flow.When one-sided piezoelectric stack work, the opposite side piezoelectric stack is static, and when giving one-sided piezoelectric stack energising with minimum driving voltage, then fluid can be realized accurate flow work.Therefore, when big flow and the work of accurate coordinating flow quantity, can realize grand/little Continuous Drive to hydraulic executing system.
Claims (2)
1. dual-cavity dual-drive piezoelectric stack pump, it is characterized in that: the coarse adjustment pre-load nut of both sides, the fine setting pre-load nut respectively with stack support and be threaded, the piezoelectric stack of both sides with stack a fixed bonding, be connected with the contact of coarse adjustment pre-load nut by the skewback pre-tightening apparatus, piezoelectric stack with stack lead and be connected, the vibrating diaphragm of both sides with stack a fixed bonding, the valve seat of vibrating diaphragm and both sides forms the cavity of both sides respectively, inlet one-way valve is fixedlyed connected with valve seat, the outlet one-way valve is fixedlyed connected with valve seat, be connected with runner respectively, the valve seat of these both sides is bolted to connection.
2. dual-cavity dual-drive piezoelectric stack pump according to claim 1 is characterized in that: what inlet one-way valve, outlet one-way valve adopted is interior distribution overhang valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010118038 CN101922442A (en) | 2010-03-05 | 2010-03-05 | Dual-cavity dual-drive piezoelectric stack pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010118038 CN101922442A (en) | 2010-03-05 | 2010-03-05 | Dual-cavity dual-drive piezoelectric stack pump |
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| Publication Number | Publication Date |
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| CN101922442A true CN101922442A (en) | 2010-12-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201010118038 Pending CN101922442A (en) | 2010-03-05 | 2010-03-05 | Dual-cavity dual-drive piezoelectric stack pump |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102817817A (en) * | 2012-05-23 | 2012-12-12 | 南京航空航天大学 | Piezo-stack pump |
| CN103511230A (en) * | 2013-10-08 | 2014-01-15 | 新疆大学 | Double-cavity type electric actuator valveless micropump |
| CN104454473A (en) * | 2013-09-25 | 2015-03-25 | 马小康 | Cavity separation type film pump |
| CN104806488A (en) * | 2014-01-24 | 2015-07-29 | 胡军 | Parallel piezoelectric micro-pump |
| CN105889039A (en) * | 2014-11-10 | 2016-08-24 | 林淑媛 | Double-ceramic-chip piezoelectric pump |
| CN106549625A (en) * | 2016-12-08 | 2017-03-29 | 清华大学 | A kind of composite pavement energy collecting device |
| CN109723628A (en) * | 2019-03-01 | 2019-05-07 | 浙江师范大学 | A kind of piezoelectric stack pump |
| CN110094329A (en) * | 2019-04-16 | 2019-08-06 | 合肥工业大学 | A kind of resonant mode piezoelectric pump under power frequency that works |
| CN113007077A (en) * | 2020-04-22 | 2021-06-22 | 合肥工业大学 | Array type piezoelectric diaphragm pump |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2469208Y (en) * | 2001-03-23 | 2002-01-02 | 清华大学 | Dual cavity, double metallic film and heat driven type miniature pump |
| CN1605755A (en) * | 2004-11-12 | 2005-04-13 | 南京航空航天大学 | Piezoelectric pump |
| DE102006043219B3 (en) * | 2006-09-11 | 2008-02-28 | Richter, Siegfried, Dipl.-Ing. (FH) | Piezo electric pump drive system, particularly for air pumps, has membrane as pumping organ with resonance oscillating system, which has resonance mass, supported elastically by resonance spring |
| CN101216027A (en) * | 2008-01-11 | 2008-07-09 | 吉林大学 | Piezoelectric stack pump |
-
2010
- 2010-03-05 CN CN 201010118038 patent/CN101922442A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2469208Y (en) * | 2001-03-23 | 2002-01-02 | 清华大学 | Dual cavity, double metallic film and heat driven type miniature pump |
| CN1605755A (en) * | 2004-11-12 | 2005-04-13 | 南京航空航天大学 | Piezoelectric pump |
| DE102006043219B3 (en) * | 2006-09-11 | 2008-02-28 | Richter, Siegfried, Dipl.-Ing. (FH) | Piezo electric pump drive system, particularly for air pumps, has membrane as pumping organ with resonance oscillating system, which has resonance mass, supported elastically by resonance spring |
| CN101216027A (en) * | 2008-01-11 | 2008-07-09 | 吉林大学 | Piezoelectric stack pump |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102817817A (en) * | 2012-05-23 | 2012-12-12 | 南京航空航天大学 | Piezo-stack pump |
| CN104454473A (en) * | 2013-09-25 | 2015-03-25 | 马小康 | Cavity separation type film pump |
| CN103511230A (en) * | 2013-10-08 | 2014-01-15 | 新疆大学 | Double-cavity type electric actuator valveless micropump |
| CN103511230B (en) * | 2013-10-08 | 2016-01-20 | 新疆大学 | A kind of bicavate electric actuation valve free pump |
| CN104806488B (en) * | 2014-01-24 | 2018-11-06 | 胡军 | A kind of parallel piezoelectric micropump |
| CN104806488A (en) * | 2014-01-24 | 2015-07-29 | 胡军 | Parallel piezoelectric micro-pump |
| CN105889039A (en) * | 2014-11-10 | 2016-08-24 | 林淑媛 | Double-ceramic-chip piezoelectric pump |
| CN106549625A (en) * | 2016-12-08 | 2017-03-29 | 清华大学 | A kind of composite pavement energy collecting device |
| CN109723628A (en) * | 2019-03-01 | 2019-05-07 | 浙江师范大学 | A kind of piezoelectric stack pump |
| CN110094329A (en) * | 2019-04-16 | 2019-08-06 | 合肥工业大学 | A kind of resonant mode piezoelectric pump under power frequency that works |
| CN110094329B (en) * | 2019-04-16 | 2021-04-09 | 合肥工业大学 | Resonant piezoelectric pump working at power frequency |
| CN113007077A (en) * | 2020-04-22 | 2021-06-22 | 合肥工业大学 | Array type piezoelectric diaphragm pump |
| CN113007077B (en) * | 2020-04-22 | 2022-06-07 | 合肥工业大学 | Array type piezoelectric diaphragm pump |
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Open date: 20101222 |