CN113482891B - Resonant frequency adjustable tuning fork type driver driven piezoelectric pump - Google Patents
Resonant frequency adjustable tuning fork type driver driven piezoelectric pump Download PDFInfo
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- CN113482891B CN113482891B CN202110826926.6A CN202110826926A CN113482891B CN 113482891 B CN113482891 B CN 113482891B CN 202110826926 A CN202110826926 A CN 202110826926A CN 113482891 B CN113482891 B CN 113482891B
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- 239000012530 fluid Substances 0.000 claims description 25
- 238000005452 bending Methods 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 7
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- 239000000919 ceramic Substances 0.000 claims description 3
- 239000003973 paint Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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- 238000004088 simulation Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0081—Special features systems, control, safety measures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
- F04B43/026—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel each plate-like pumping flexible member working in its own pumping chamber
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/22—Arrangements for enabling ready assembly or disassembly
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0015—Driving devices, e.g. vibrators using only bending modes
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
- H02N2/008—Means for controlling vibration frequency or phase, e.g. for resonance tracking
Abstract
The invention relates to a piezoelectric pump driven by a tuning fork type driver with adjustable resonant frequency, belonging to the technical field of piezoelectric pumps. The tuning fork type piezoelectric driver with adjustable resonant frequency and a pair of diaphragm pumps are included; the tuning fork type piezoelectric actuator comprises an inverted U-shaped tuning fork type body and a piezoelectric sheet which is fixed on the surface of the tuning fork type body in an adhering mode; the tuning fork type body consists of a cross beam, a pair of driving arms, a mass block at the lower end of each driving arm and an additional mass block fixedly connected to the bottom of the mass block through a bolt; piezoelectric sheets are respectively arranged on the top surface and the bottom surface of the beam and the inner side surface and the outer side surface of the pair of driving arms to form three pairs of piezoelectric bimorph structures; the pair of diaphragm pumps is fixedly connected with each other back to back and is fixedly arranged between the pair of driving arms of the tuning fork type body through the waist-shaped holes and the bolts. The piezoelectric pump can adjust the resonant frequency of the tuning fork type piezoelectric actuator in a large range by changing the size of the additional mass block, so that the resonant frequency is matched with the optimal working frequency of the one-way valve, and the output performance of the piezoelectric pump is improved.
Description
Technical Field
The invention belongs to the technical field of piezoelectric pumps, and particularly relates to a piezoelectric pump driven by a tuning fork type driver with adjustable resonant frequency.
Background
The piezoelectric pump is a novel fluid transmission device taking a piezoelectric vibrator as a power element, is the most typical one of precision fluid pumps, and converts electric energy into mechanical energy by utilizing the inverse piezoelectric effect of the piezoelectric element so as to deform the piezoelectric vibrator, thereby driving the volume change of a pump cavity or driving fluid to directionally flow by utilizing the fluctuation generated by the piezoelectric vibrator. The piezoelectric pump integrates the driver, the pump cavity and the one-way valve, thereby not only overcoming the leakage and frictional wear between relatively moving parts in the traditional pump, but also reducing the energy loss between different parts. Because the piezoelectric pump has the remarkable advantages which are not possessed by the traditional pump, such as simple structure, small volume, good reliability, high power density, high efficiency, high response speed, high control precision, no electromagnetic interference and the like, the piezoelectric pump has wide application prospect in the fields of aerospace, robot systems, automobiles, micro-electromechanical engineering, chemical analysis, biomedical treatment and the like although the occurrence time is not long.
Piezoelectric pumps can be classified into non-resonant piezoelectric pumps and resonant piezoelectric pumps according to their operation modes. In a non-resonant piezoelectric pump, a piezoelectric vibrator is generally arranged on the side wall of a pump cavity and directly drives fluid to work; because the piezoelectric vibrator works in a quasi-static state and is fixedly arranged on the periphery, larger vibration deformation cannot be generated to obtain larger volume change of the pump cavity, and the output performance of the non-resonant piezoelectric pump is relatively limited. The resonant piezoelectric pump generally separates a piezoelectric vibrator from a pump cavity diaphragm, amplifies the vibration displacement of the vibrator by using a resonance principle, and then drives the pump cavity diaphragm to realize fluid transmission.
The optimum operating frequency of the resonant piezoelectric pump is generally the resonant frequency of the piezoelectric driver, and on one hand, since the power density of the piezoelectric element is proportional to the operating frequency thereof, the operating frequency of the piezoelectric driver should be increased; on the other hand, the conventional one-way valve has poor dynamic response characteristics and has serious hysteresis when being matched with a piezoelectric driver for working, so that the improvement of the working frequency of the piezoelectric pump is hindered.
In order to optimize the operation of the conventional check valves, such as cantilever beam valves and bridge valves, the optimum operating frequency can be considered as the first-order bending resonance frequency of the conventional check valves, and the resonance frequency of the piezoelectric actuator should be as close as possible to the resonance frequency of the check valve in order to achieve the optimal operation state of the resonant piezoelectric pump. However, the resonant frequencies of the piezoelectric actuator and the one-way valve are related to the parameters of the piezoelectric actuator and the one-way valve, such as the structure, the size, the material, and the like, and cannot be flexibly adjusted due to the influence of the working state and the working medium, and the resonant frequencies of the piezoelectric actuator and the one-way valve are difficult to keep consistent, so that the piezoelectric pump cannot reach the optimal working state when working at the resonant frequency of the piezoelectric actuator, and the improvement of the output performance of the piezoelectric pump is limited.
Disclosure of Invention
In order to solve the problem that the piezoelectric driver and the diaphragm pump cannot work at the optimal working frequency simultaneously due to the fact that the resonant frequencies of the piezoelectric driver and the diaphragm pump are different in the resonant piezoelectric pump, the invention designs the piezoelectric pump driven by the tuning fork type driver with the adjustable resonant frequency.
A tuning fork type driver driven piezoelectric pump with adjustable resonant frequency comprises a tuning fork type piezoelectric driver 1 and a pair of diaphragm pumps 2;
the driver is a tuning fork type piezoelectric driver and comprises an inverted U-shaped tuning fork type body 3 and a piezoelectric sheet 4 which is fixedly adhered to the surface of the tuning fork type body;
the top of the tuning fork type body is provided with a beam 5, and two ends of the beam 5 are respectively connected with the upper ends of a pair of vertically downward driving arms 8; the pair of driving arms 8 comprises a left driving arm 81 and a right driving arm 82, and the pair of driving arms 8 have the same structure; the lower ends of the pair of driving arms 8 are respectively connected with a mass block 9, the bottom of the mass block 9 parallel to the cross beam 5 is fixedly connected with an additional mass block 10 through a bolt 11, and the mass of the additional mass block 10 can be adjusted by changing the volume or the material;
piezoelectric patches are respectively arranged on the inner surface and the outer surface of the beam 5, the inner side surface and the outer side surface of the left driving arm 81 and the inner side surface and the outer side surface of the right driving arm 82 to form a piezoelectric bimorph structure, and all the piezoelectric patches are connected in series or in parallel through a lead;
waist-shaped holes 7 are respectively formed in the middle parts of the driving arms 8; the pair of diaphragm pumps 2 are stacked diaphragm pumps and are fixedly connected together back to back, and are fixedly arranged between a pair of driving arms 8 of the tuning fork type body 3 through waist-shaped holes 7 and bolts 6;
when the excitation frequency of the alternating current power supply is the first-order inverse bending resonance frequency of the tuning-fork piezoelectric actuator 1, the tuning-fork piezoelectric actuator 1 drives a pair of diaphragm pumps 2 to continuously pump fluid at the same resonance frequency.
The further concrete technical scheme is as follows:
the tuning fork body 3 is made of metal, and the surfaces of the tuning fork body are coated with insulating paint except the surface adhered with the piezoelectric sheet.
The inner surface and the outer surface of the beam 5 are respectively provided with a first piezoelectric sheet 41 and a second piezoelectric sheet 42 to form a first piezoelectric bimorph 401; the inner side surface and the outer side surface of the left driving arm 81 are respectively provided with a third piezoelectric patch 43 and a fourth piezoelectric patch 44 to form a second piezoelectric bimorph 402; the inner side surface and the outer side surface of the right driving arm 82 are respectively provided with a fifth piezoelectric sheet 45 and a sixth piezoelectric sheet 46 to form a third piezoelectric bimorph 403.
The first piezoelectric sheet 41, the second piezoelectric sheet 42, the third piezoelectric sheet 43, the fourth piezoelectric sheet 44, the fifth piezoelectric sheet 45 and the sixth piezoelectric sheet 46 are all made of piezoelectric ceramics or piezoelectric single crystals, the thickness is 0.01-1 mm, and the width is the same as the width of the beam or the width of the driving arm.
The positions of the pair of diaphragm pumps 2 on the pair of driving arms 8 are adjusted through the matching of the waist-shaped holes 7 and the bolts 6, so that the mechanical impedance matching characteristic is adjusted, and the output characteristic of the piezoelectric pump is further adjusted.
The width of the cross beam 5 is 5-200 mm, the thickness is 0.5-5 mm, and the length is 10-50 mm; the width of the driving arms 8 is 5-200 mm, the thickness is 0.5-5 mm, and the length is 10-100 mm; the mass block 9 has a length of 1-25 mm, a width of 5-200 mm and a height of 0.5-5 mm.
The width of the additional mass block 10 is the same as that of the mass block 9, the length is 1-25 mm, and the height is 1-20 mm; the resonance frequency of the tuning-fork piezoelectric actuator 1 can be adjusted by changing the mass of the additional mass 10 to match the optimum operating frequency of the check valve, thereby improving the output performance and the operating efficiency of the piezoelectric pump.
Because the two diaphragm pumps in the pair of diaphragm pumps 2 synchronously suck in and discharge fluid, the inlet runners of the two diaphragm pumps are connected in parallel and the outlet runners of the two diaphragm pumps are connected in parallel by using pipelines, so that the flow of pumped fluid is increased.
When a vibration filter structure composed of the vibration filter film 21 and the vibration filter plate 20 is not employed in the pair of diaphragm pumps 2, the inlet flow passage and the outlet flow passage may be shared by both diaphragm pumps in the pair of diaphragm pumps 2.
Compared with the prior art, the beneficial technical effects of the invention are embodied in the following aspects:
(1) The first-order inverse bending resonance frequency of the tuning fork type piezoelectric actuator can be adjusted in a large range by adjusting the size of the additional mass block, and a finite element simulation result shows that the first-order resonance frequency of the tuning fork type piezoelectric actuator can be adjusted within 306-817 Hz; by adjusting the resonant frequency of the piezoelectric actuator to be consistent with the resonant frequency of the one-way valve used in the pair of diaphragm pumps, when the piezoelectric pump operates at the resonant frequency, the tuning fork type piezoelectric actuator and the pair of diaphragm pumps both reach the optimal operating state, thereby enabling the operating performance of the piezoelectric pump to be optimal.
(2) The tuning fork type piezoelectric driver adopts a symmetrical structural design, and has the advantages of simple structure, small volume and easy processing; the working mode is a first-order reverse-phase bending resonance mode, and under the resonance mode, the surface strain of the piezoelectric sheet is uniformly distributed, and the mechanical quality factor is high, so that the driving performance is high, and the working reliability is good.
(3) The invention adopts a detachable structure design, has a recyclable tuning fork type piezoelectric driver and a replaceable diaphragm pump, is easy to replace damaged parts and reduces the use cost; in addition, the installation positions of the two diaphragm pumps between the pair of driving arms can be adjusted through the matching of the waist-shaped holes on the driving arms and the bolts, so that the mechanical impedance matching characteristic between the tuning fork type piezoelectric driver and the diaphragm pumps is adjusted, and the optimal impedance matching is realized.
Drawings
FIG. 1 is a schematic diagram of the present invention.
Fig. 2 is an exploded view of the structure of the tuning fork piezoelectric actuator of the present invention.
Fig. 3 is a schematic view of the tuning fork piezoelectric actuator of the present invention with a small additional mass mounted.
Fig. 4 is a schematic view of the tuning fork piezoelectric actuator of the present invention with a large additional mass mounted.
Fig. 5 is a schematic view showing the arrangement of the polarization directions of the respective piezoelectric pieces and the connection of the driving power when the surface piezoelectric pieces of the tuning fork type piezoelectric actuator of the present invention are arranged as the parallel piezoelectric bimorph.
Fig. 6 is a schematic view showing the arrangement of the polarization direction of each piezoelectric piece and the connection mode of the driving power supply when the surface piezoelectric pieces of the tuning fork type piezoelectric actuator of the present invention are arranged as the piezoelectric bimorph in series.
Fig. 7 is a schematic view when a pair of diaphragm pumps are installed at positions away from the root of the drive arm.
Fig. 8 is a schematic view when a pair of diaphragm pumps are installed near the root of the drive arm.
Fig. 9 is a schematic diagram showing a deformation mode of the tuning-fork piezoelectric actuator and an operation state of the diaphragm pump when the excitation voltage of the drive power supply is positive.
Fig. 10 is a schematic diagram showing a deformation mode of the tuning-fork actuator and an operation state of the diaphragm pump when an excitation voltage of the driving power supply is negative.
FIG. 11 is a schematic illustration of a parallel connection between two diaphragm pumps within a pair of diaphragm pumps.
Fig. 12 is a schematic view of the inlet and outlet flow passages shared by two diaphragm pumps within a pair of diaphragm pumps.
Fig. 13 is a schematic view of the fixing by the long metal sheet.
FIG. 14 is a first order anti-phase bending resonant frequency variation curve of a tuning fork piezoelectric actuator simulated using finite element analysis software when varying the additional mass size.
Numbers in fig. 1-13: a tuning fork type piezoelectric driver 1, a pair of diaphragm pumps 2, a tuning fork type body 3, a piezoelectric sheet 4, a beam 5, a bolt 6, a kidney-shaped hole 7, a pair of driving arms 8, a mass 9, an additional mass 10, a bolt 11, a lead 12, a connector 13, a pump chamber diaphragm 14, a pump chamber 15, an inlet check valve array 16, an outlet check valve array 17, an inlet flow channel 18, an outlet flow channel 19, a vibration filter plate 20, a vibration filter film 21, a pipe 22, a long metal sheet 23, a first piezoelectric sheet 41, a second piezoelectric sheet 42, a third piezoelectric sheet 43, a fourth piezoelectric sheet 44, a fifth piezoelectric sheet 45, a sixth piezoelectric sheet 46, a left driving arm 81, a right driving arm 82, a first piezoelectric bimorph 401, a second piezoelectric bimorph 402, a third piezoelectric bimorph 403, and a driving power supply U1.
Detailed Description
The invention will now be further described by way of example with reference to the accompanying drawings.
Example 1
Referring to fig. 1, a piezoelectric pump driven by a tuning fork driver with a tunable resonance frequency includes a tuning fork piezoelectric driver 1 and a pair of diaphragm pumps 2.
Referring to fig. 2, the driver is a tuning fork type piezoelectric driver, and includes an inverted U-shaped tuning fork body 3 and a piezoelectric plate 4 adhesively fixed on the surface thereof.
The tuning fork body 3 is made of metal, and the rest surfaces except the surface adhered with the piezoelectric sheet are coated with insulating paint.
The top of the tuning fork body 3 is a beam 5, and two ends of the beam 5 are respectively connected with the upper ends of a pair of vertically downward driving arms 8; the pair of driving arms 8 comprises a left driving arm 81 and a right driving arm 82, and the pair of driving arms 8 have the same structure; the lower ends of the pair of driving arms 8 are respectively connected with a mass 9, the bottom of the mass 9 parallel to the beam 5 is fixedly connected with an additional mass 10 through a bolt 11, and the size of the additional mass 10 can be adjusted, as shown in fig. 3 and 4.
Referring to fig. 5, the inner surface and the outer surface of the beam 5 are respectively provided with a first piezoelectric sheet 41 and a second piezoelectric sheet 42 to form a first piezoelectric bimorph 401; the inner side surface and the outer side surface of the left driving arm 81 are respectively provided with a third piezoelectric patch 43 and a fourth piezoelectric patch 44 to form a second piezoelectric bimorph 402; the fifth piezoelectric sheet 45 and the sixth piezoelectric sheet 46 are respectively disposed on the inner side surface and the outer side surface of the right driving arm 82, and a third piezoelectric bimorph 403 is formed.
The first piezoelectric sheet 41, the second piezoelectric sheet 42, the third piezoelectric sheet 43, the fourth piezoelectric sheet 44, the fifth piezoelectric sheet 45 and the sixth piezoelectric sheet 46 are all made of piezoelectric ceramics, the thickness is 0.4mm, and the width is the same as the width of the beam or the width of the driving arm.
The beam 5 has a length of 50mm, a thickness of 3mm and a width of 25mm; each driving arm 8 has a length of 80mm, a thickness of 3mm and a width of 25mm; the mass block 9 has the length of 20mm, the width of 25mm and the thickness of 3mm; the additional mass 10 has the same width as the mass 9, a length of 20mm and a height of 2mm.
Referring to fig. 3, a pair of driving arms 8 are respectively provided with a waist-shaped hole 7 at the middle thereof. Referring to fig. 1, a pair of diaphragm pumps 2 are stacked diaphragm pumps and are fixedly connected back to back, and are fixedly mounted between a pair of driving arms 8 of a tuning fork type body 3 through a waist-shaped hole 7 and a bolt 6; the positions of the driving arms 8 are adjusted through the matching of the waist-shaped holes 7 and the bolts 6, so that the mechanical impedance matching characteristic is adjusted, and the output characteristic of the piezoelectric pump is adjusted. Referring to fig. 7, a state where the pair of diaphragm pumps are installed at positions away from the root of the driving arm; referring to fig. 8, a state in which a pair of diaphragm pumps are mounted near the root of the driving arm.
The inlet flow passages of the pair of diaphragm pumps 2 are connected in parallel, and the outlet flow passages are connected in parallel.
The working principle of example 1 is detailed as follows:
referring to fig. 5, when the polarization directions and connection modes of the first piezoelectric bimorph 401, the second piezoelectric bimorph 402 and the third piezoelectric bimorph 403 are set to be parallel piezoelectric bimorphs or series piezoelectric bimorphs as shown in fig. 6, all the piezoelectric bimorphs can be excited by one ac driving power source U1 to generate bending deformation, and the bending deformation modes of the respective piezoelectric bimorphs are consistent with the deformation mode of the first-order inverse bending resonance mode of the tuning fork type piezoelectric driver 1.
Referring to fig. 9 and 10, the flexural vibration deformation of the left and right driving arms 81 and 82 can be transmitted to the pump chamber diaphragm 14 through the connector 13, so that the pump chamber diaphragm 14 is elastically deformed by vibration, and the sealed volume of the pump chamber 15 is periodically changed; when the left driving arm 81 and the right driving arm 82 pull the connector 13 to deform the pump chamber diaphragm 14 to the outside of the pump chamber 15, the sealing volume of the pump chamber 15 becomes large and the pressure intensity becomes small, the inlet check valve array 16 is opened and the outlet check valve array 17 is closed under the action of the internal and external pressure difference, and fluid flows into the pump chamber 15 from the inlet flow passage 18 through the inlet check valve array 16, namely the fluid suction process; when the left driving arm 81 and the right driving arm 82 push the connector 13 to deform the pump chamber diaphragm 14 toward the inside of the pump chamber 15, the sealing volume of the pump chamber 15 becomes smaller and the pressure becomes larger, the inlet check valve array 16 is closed and the outlet check valve array 17 is opened under the action of the difference between the internal pressure and the external pressure, and the fluid flows out of the outlet flow passage 19 from the pump chamber 15 through the outlet check valve array 17, that is, the fluid is discharged.
When the excitation voltage of the driving power supply U1 is positive, the direction of the generated electric field intensity is along the thickness direction of the piezoelectric sheet 4, and the direction of the electric field intensity is the same as the polarization direction of the first piezoelectric sheet 41, the third piezoelectric sheet 43, and the sixth piezoelectric sheet 46, and is opposite to the polarization direction of the second piezoelectric sheet 42, the fourth piezoelectric sheet 44, and the fifth piezoelectric sheet 45; therefore, the middle portion of the cross member 5 is bent downward, and the left and right driving arms 81 and 82 are bent outward, and the pair of diaphragm pumps 2 are in a process of sucking fluid, as shown in fig. 9.
When the excitation voltage of the driving power supply U1 is negative, the direction of the generated electric field intensity is along the thickness direction of the piezoelectric sheet 4, and the direction of the electric field intensity is opposite to the polarization direction of the first piezoelectric sheet 41, the third piezoelectric sheet 43, and the sixth piezoelectric sheet 46, and is the same as the polarization direction of the second piezoelectric sheet 42, the fourth piezoelectric sheet 44, and the fifth piezoelectric sheet 45; therefore, the middle portion of the cross member 5 is bent upward, and the left and right driving arms 81 and 82 are bent inward, and the pair of diaphragm pumps 2 are in a process of discharging fluid, as shown in fig. 10.
When the excitation frequency of the alternating-current driving power supply U1 is close to the first-order inverse bending resonance frequency of the tuning-fork piezoelectric driver 1, the tuning-fork piezoelectric driver 1 generates a large amplitude periodic vibration in the first-order inverse bending resonance mode, so as to drive the pair of diaphragm pumps 2 connected with the pair of driving arms 8 to continuously pump fluid at the same resonance frequency.
The driving waveform of the driving power supply U1 is an alternating sine wave, a triangular wave or a square wave, and the driving frequency is the first-order inverse bending resonance frequency of the tuning fork type piezoelectric driver 1, or is adjusted within a certain range around the resonance frequency. The first order anti-phase bending resonant frequency of the tuning fork type piezoelectric actuator 1 is changed under the influence of the driven load (including the connector 13, the pump chamber diaphragm 14, the pumped fluid and the like), and an oscillating circuit capable of automatically tracking the resonant frequency can be added for closed-loop control.
Referring to fig. 9 and 10, a pair of diaphragm pumps 2 respectively perform a fluid suction process and a fluid discharge process in one vibration cycle of the tuning fork piezoelectric driver 1; when the tuning fork type piezoelectric actuator 1 vibrates in the first-order anti-phase bending resonance mode, the fluid suction process and the fluid discharge process of the two diaphragm pumps in the pair of diaphragm pumps 2 are performed synchronously, and the inlet flow channels and the outlet flow channels of the two diaphragm pumps can be connected in parallel by using the pipeline 22, so as to increase the flow rate of the fluid pumped by the pair of diaphragm pumps 2, as shown in fig. 11.
When the vibration filter structure composed of the vibration filter film 21 and the vibration filter plate 20 is not employed in the pair of diaphragm pumps 2, the inlet flow passage 18 and the outlet flow passage 19 may be shared by both of the diaphragm pumps in the pair of diaphragm pumps 2, as shown in fig. 12.
When the tuning fork type piezoelectric driver 1 vibrates in a first-order anti-phase bending resonance mode to drive the pair of diaphragm pumps 2 to pump fluid, because the two diaphragm pumps in the pair of diaphragm pumps 2 are simultaneously subjected to driving forces with equal magnitude and opposite directions applied by the pair of driving arms 8, the two diaphragm pumps can be mutually supported, the reaction forces of the two diaphragm pumps are mutually offset, theoretically, an external clamping force is not required to be provided, and in practice, the two diaphragm pumps can be fixed only by the clamping device maintaining a small clamping force on the outer walls of the pump bodies of the two diaphragm pumps, as shown in fig. 7, 8, 9, 10, 11 and 12.
Referring to fig. 13, in order to facilitate the fixed installation of the tuning fork driver-driven piezoelectric pump of the present invention with an adjustable resonant frequency, a long metal sheet 23 may be bonded between two diaphragm pumps in a pair of diaphragm pumps 2, and the piezoelectric pump may be fixed by fixing the end of the long metal sheet 23, as shown in fig. 13; the long metal sheet 23 is connected and fixed with the external base in a flexible fixing mode, so that on one hand, the influence of external constraint force on the working state of the piezoelectric pump can be reduced as much as possible, and the piezoelectric pump can resonate as a whole; on the other hand, the flexible long metal sheet 23 has a function of isolating high-frequency vibration, and can isolate the high-frequency vibration from being transmitted to the outside when the piezoelectric pump works, so that the diffusion of system vibration energy is reduced.
Referring to fig. 14, the first order anti-phase bending resonant frequency of the tuning fork piezoelectric actuator 1 can be adjusted in a wide range by adjusting the mass of the additional mass 10, so that the resonant frequency of the tuning fork actuator 1 is consistent with the resonant frequency of the check valve used in the pair of diaphragm pumps 2, and when the piezoelectric pump operates at the resonant frequency, the tuning fork piezoelectric actuator and the check valve both reach the optimal operating state, thereby optimizing the operating performance of the piezoelectric pump; because the tuning fork type piezoelectric actuator is large in resonant frequency adjusting range, the piezoelectric actuator can be matched with the working frequencies of different types of one-way valves, and adaptability is high.
Claims (4)
1. A tuning fork actuator driven piezoelectric pump with tunable resonance frequency, comprising a tuning fork piezoelectric actuator (1) and a pair of diaphragm pumps (2), characterized in that:
the driver is a tuning fork type piezoelectric driver and comprises an inverted U-shaped tuning fork type body (3) and a piezoelectric sheet (4) which is fixedly adhered to the surface of the tuning fork type body;
the tuning fork type body (3) is made of metal, and the surfaces except the surface adhered with the piezoelectric sheet are coated with insulating paint;
the top of the tuning fork type body is provided with a beam (5), and two ends of the beam (5) are respectively connected with the upper ends of a pair of driving arms (8) which vertically face downwards; the pair of driving arms (8) comprises a left driving arm (81) and a right driving arm (82), and the pair of driving arms (8) have the same structure; the lower ends of the driving arms (8) are respectively connected with a mass block (9), and the bottom of the mass block (9) parallel to the cross beam (5) is fixedly connected with an additional mass block (10) through a bolt (11);
piezoelectric patches are respectively arranged on the inner surface and the outer surface of the beam (5), the inner side surface and the outer side surface of the left driving arm (81) and the inner side surface and the outer side surface of the right driving arm (82) to respectively form three pairs of piezoelectric bimorphs, and all the piezoelectric patches are connected in series or in parallel through a lead (12);
a first piezoelectric sheet (41) and a second piezoelectric sheet (42) are respectively arranged on the inner surface and the outer surface of the beam (5) to form a first piezoelectric bimorph (401); the inner side surface and the outer side surface of the left driving arm (81) are respectively provided with a third piezoelectric sheet (43) and a fourth piezoelectric sheet (44) to form a second piezoelectric bimorph (402); the inner side surface and the outer side surface of the right driving arm (82) are respectively provided with a fifth piezoelectric sheet (45) and a sixth piezoelectric sheet (46) to form a third piezoelectric bimorph (403);
waist-shaped holes (7) are respectively formed in the middle parts of the driving arms (8); the pair of diaphragm pumps (2) are stacked diaphragm pumps and are fixedly connected together back to back, and are fixedly arranged between a pair of driving arms (8) of the tuning fork type body (3) through waist-shaped holes (7) and bolts (6); the mechanical impedance matching characteristic is adjusted, and the output characteristic of the piezoelectric pump is adjusted;
the two diaphragm pumps in the pair of diaphragm pumps (2) synchronously suck in and discharge fluid, and inlet runners and outlet runners of the two diaphragm pumps are connected in parallel by pipelines so as to increase the flow of pumped fluid;
when the excitation frequency of the alternating current power supply is the first-order inverse bending resonance frequency of the tuning-fork piezoelectric driver (1), the tuning-fork piezoelectric driver (1) drives a pair of diaphragm pumps (2) to continuously pump fluid at the same resonance frequency.
2. A tuning fork driver driven piezoelectric pump as claimed in claim 1, wherein: the first piezoelectric sheet (41), the second piezoelectric sheet (42), the third piezoelectric sheet (43), the fourth piezoelectric sheet (44), the fifth piezoelectric sheet (45) and the sixth piezoelectric sheet (46) are all made of piezoelectric ceramics or piezoelectric single crystals, the thickness of the piezoelectric single crystals is 0.01-1 mm, and the width of the piezoelectric single crystals is the same as the width of the beam or the width of the driving arm.
3. A tuning fork driver driven piezoelectric pump as claimed in claim 1, wherein: the width of the cross beam (5) is 5-200 mm, the thickness is 0.5-5 mm, and the length is 10-50 mm; the width of the driving arms (8) is 5-200 mm, the thickness is 0.5-5 mm, and the length is 10-100 mm; the mass block (9) has a length of 1-25 mm, a width of 5-200 mm and a height of 0.5-5 mm.
4. A tuning fork driver driven piezoelectric pump as claimed in claim 1, wherein: the width of the additional mass block (10) is the same as that of the mass block (9), the length of the additional mass block (10) is 1-25 mm, and the height of the additional mass block (10) is 1-20 mm; the resonance frequency of the tuning fork type piezoelectric actuator (1) is adjusted by changing the mass of the additional mass block (10) to be matched with the optimal working frequency of the one-way valve, so that the output performance and the working efficiency of the piezoelectric pump are improved.
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| CN113123945A (en) * | 2021-04-26 | 2021-07-16 | 长春工业大学 | Tuning fork type resonant pump based on flexible support for agricultural sprinkling irrigation |
| CN114109786B (en) * | 2021-12-01 | 2023-07-21 | 合肥工业大学 | Piezoelectric stack pump based on symmetrical in-phase amplifying mechanism |
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| DE102006043219B3 (en) * | 2006-09-11 | 2008-02-28 | Richter, Siegfried, Dipl.-Ing. (FH) | Piezo electric pump drive system, particularly for air pumps, has membrane as pumping organ with resonance oscillating system, which has resonance mass, supported elastically by resonance spring |
| CN110094329B (en) * | 2019-04-16 | 2021-04-09 | 合肥工业大学 | Resonant piezoelectric pump working at power frequency |
| CN113007077B (en) * | 2020-04-22 | 2022-06-07 | 合肥工业大学 | Array type piezoelectric diaphragm pump |
| CN111878371B (en) * | 2020-06-17 | 2023-02-03 | 长春大学 | Spring type piezoelectric air pump |
| CN113123945A (en) * | 2021-04-26 | 2021-07-16 | 长春工业大学 | Tuning fork type resonant pump based on flexible support for agricultural sprinkling irrigation |
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