CN217976535U - Resonance excitation piezoelectric pump - Google Patents
Resonance excitation piezoelectric pump Download PDFInfo
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- CN217976535U CN217976535U CN202221458374.4U CN202221458374U CN217976535U CN 217976535 U CN217976535 U CN 217976535U CN 202221458374 U CN202221458374 U CN 202221458374U CN 217976535 U CN217976535 U CN 217976535U
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Abstract
The utility model discloses a resonance excitation piezoelectric pump, it includes: quality piece, piezoelectric vibrator, check valve and the pump body, its characterized in that: the piezoelectric vibrator includes: the piezoelectric ceramic is fixed on the mass block, and the mass block and the piezoelectric pump form a resonance system; adjusting the mass of the mass block to enable the piezoelectric pump to vibrate at an ideal resonant frequency; the output performance of the piezoelectric pump is increased. The liquid inlet flow channel and the liquid outlet flow channel are inclined and arranged in a splayed manner, are bilaterally symmetrical relative to the central axis of the piezoelectric pump, and output of the piezoelectric pump is smoother. Corresponding to the radian of the metal substrate when the metal substrate bends downwards. By adopting the arc-shaped pump cavity and the mass block, one end of the piezoelectric vibrator pump cavity can be completely attached to the pump cavity when being bent and deformed, so that the dead angle volume is reduced, and the output performance of the piezoelectric pump is improved.
Description
Technical Field
The utility model relates to a piezoelectric pump, in particular to resonance excitation piezoelectric pump.
Background
The research on piezoelectric pumps has been continuously researched and focused by research institutions around the world from the 70 s of the 20 th century to the present. With the development of science and technology and the emergence of new materials and new processes, piezoelectric pump technology has gradually matured and permeated in various fields. However, the piezoelectric pump has many problems so far:
1. at present, the piezoelectric pump has poor cut-off performance, so that the pressure is difficult to increase.
2. The existing piezoelectric pump has dead-angle volume, so that the performance output of the piezoelectric pump is unstable.
Disclosure of Invention
The present invention has been made to solve the above problems, and an object of the present invention is to provide a resonance excitation piezoelectric pump;
a resonant excitation piezoelectric pump comprising: quality piece 1, piezoelectric vibrator, check valve and the pump body, piezoelectric vibrator include: the piezoelectric ceramic 21, the metal substrate 22, the mass block 1 are fixed on the piezoelectric ceramic 21 to form a resonance system;
the check valve is an integrated valve sheet body 5; the pump body include: a lower pump body 31, an upper pump body 32; the upper end of the lower pump body 31 is provided with an embedded groove 311; the upper pump body 32 is embedded in the embedded groove 311; the integrated valve sheet body 5 is arranged between the split surfaces of the lower pump body 31 and the upper pump body 32; the upper end surface of the upper pump body 32 is provided with a groove 322; the piezoelectric vibrator is packaged at the groove 322 to form a pump cavity 4;
the lower pump body 31 is provided with a liquid inlet flow channel 313, a liquid outlet valve chamber 314, a liquid inlet and a liquid outlet; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet channel 313 is opposite to the liquid inlet valve chamber 323; the outlet flow passage 324 is opposite to the outlet valve chamber 314;
the integrated valve sheet body 5 is provided with a first valve sheet 521 and a second valve sheet 522; the first valve plate 521 is positioned between the liquid inlet channel 313 and the liquid outlet valve chamber 314; the second valve plate 522 is located between the outlet flow passage 324 and the outlet valve chamber 314.
The liquid inlet flow channel 313 and the liquid outlet flow channel 324 are inclined, arranged in a splayed shape and are symmetrical left and right relative to the central axis of the piezoelectric pump.
The groove 322 is arc-shaped and corresponds to the arc of the metal substrate 22 when it is bent downward.
The first valve plate 521 and the second valve plate 522 are made of flexible film materials.
The first valve plate 521 and the second valve plate 522 are cantilever beam valves.
The utility model provides a resonance excitation piezoelectric pump, it includes: the mass block 1, the piezoelectric vibrator, the pump body and the integrated valve body 5; the pump body includes: a lower pump body 31, an upper pump body 32; the upper pump body 32 is embedded in the lower pump body 31; the integrated valve sheet body 5 is arranged between the split surfaces of the lower pump body 31 and the upper pump body 32; the upper end surface of the upper pump body 32 is provided with a groove 322; the piezoelectric vibrator is packaged at the groove 322 to form a pump cavity 4; the lower pump body 31 is provided with a liquid inlet flow channel 313, a liquid outlet valve chamber 314, a liquid inlet and a liquid outlet; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet channel 313 is opposite to the liquid outlet valve chamber 314; the outlet flow passage 324 is opposite to the outlet valve chamber 314; the integrated valve plate body 5 is provided with a first valve plate 521 and a second valve plate 522; the first valve plate 521 is positioned between the liquid inlet flow passage 313 and the liquid inlet valve chamber 323; the second valve plate 522 is located between the outlet flow passage 324 and the outlet valve chamber 314; the mass block and the piezoelectric pump form a resonance system, so that the piezoelectric pump vibrates at an ideal resonance frequency; the output performance of the piezoelectric pump is increased.
The utility model has the advantages that:
the utility model provides a novel piezoelectric pump that is in excitation under the resonance condition novel structure, especially concave spherical surface arc pump chamber and quality piece. When one end of the pump cavity of the piezoelectric vibrator is bent and deformed, the pump cavity can be completely attached to the pump cavity, dead angle volume is reduced, and output performance of the piezoelectric pump is improved. The mass block and the piezoelectric pump form a resonance system, and the resonance state of the whole resonance system can be changed by changing the mass of the mass block, so that the resonance frequency of the piezoelectric pump is changed, and the piezoelectric pump vibrates under an ideal resonance frequency. The inclined plane of the water inlet and outlet of the piezoelectric pump is symmetrical about the central axis of the piezoelectric pump, and the effect of mirror reflection is formed when fluid enters the pump cavity as shown in fig. 4 alpha = beta, so that the output performance of the piezoelectric pump is improved, and the output of the piezoelectric pump is smoother.
Drawings
Fig. 1 is a schematic structural view of the resonant excitation piezoelectric pump of the present invention, in which the liquid inlet and the liquid outlet are disposed at the bottom;
fig. 2 is a schematic structural view of the resonant excitation piezoelectric pump of the present invention, in which the liquid inlet and the liquid outlet are disposed at two sides;
fig. 3 is a schematic diagram of the resonant system of the resonant excitation piezoelectric pump according to the present invention;
fig. 4 is a schematic view of the working principle of the valve plate of the resonant excitation piezoelectric pump of the present invention;
FIG. 5 is a schematic diagram of the operation of a conventional piezoelectric pump;
in the figure: the pump comprises a mass block 1, a piezoelectric ceramic 21, a metal substrate 22, a lower pump body 31, an upper pump body 32, an embedded groove 311, a positioning flange 312, a liquid inlet flow channel 313, a liquid outlet valve chamber 314, a positioning groove 321, a groove 322, a liquid inlet valve chamber 323, a liquid outlet flow channel 324, a pump chamber 4, an integrated valve body 5, a positioning notch 51, a first valve plate 521 and a second valve plate 522.
Detailed Description
Embodiment 1 a resonance excitation piezoelectric pump
Referring to fig. 1, a resonant excitation piezoelectric pump comprises: the mass block 1, the piezoelectric vibrator, the pump body and the integrated valve body 5;
the piezoelectric vibrator includes: piezoelectric ceramic 21, metal substrate 22; the piezoelectric ceramic 21 is bonded to the metal substrate 22;
the mass block 1 is welded on the piezoelectric ceramic of the piezoelectric vibrator to form a resonance system;
the pump body include: a lower pump body 31, an upper pump body 32; a liquid inlet and a liquid outlet are arranged on the lower pump body 31; the liquid inlet and the liquid outlet are positioned on the lower end surface of the lower pump body 31;
the pump body is provided with a liquid inlet flow channel, a liquid inlet valve chamber, a liquid outlet flow channel and a liquid outlet valve chamber, and the flow channels and the valve chambers are respectively arranged on the split surfaces of the lower pump body 31 and the upper pump body 32;
the upper end of the lower pump body 31 is provided with an embedded groove 311; one side of the embedding groove 311 is provided with a positioning flange 312;
a positioning groove 321 is formed in one side of the lower end face of the upper pump body 32; the upper pump body 32 is embedded in the embedding groove 311, and the positioning flange 312 is butted with the positioning groove 321; the outer vertical surface and the bottom end surface of the upper pump body 32 can be in close contact with the inner vertical surface and the upper end surface of the embedded groove 311, that is, the upper pump body 32 is in interference fit with the embedded groove 321;
one end of the integrated valve sheet body 5 is provided with a positioning notch 51; the integrated valve sheet body 5 is arranged on the inner end face of the embedded groove 321 and is positioned through the positioning notch 51;
a groove 322 is arranged on the upper end surface of the upper pump body 32; the metal substrate 22 is packaged at the groove 322 to form a pump cavity 4;
the groove 322 is arc-shaped and corresponds to the arc of the metal substrate 22 when it bends downward.
The upper end surface of the integrated valve sheet body 5 is tightly contacted with the lower end surface of the upper pump body 32; the lower end face of the integrated valve sheet body 5 is tightly contacted with the upper end face in the embedded groove 311;
the integrated valve sheet body 5 is provided with at least 2 valve sheets; the two valve plates are respectively: the first valve plate 521, the second valve plate 522, the first valve plate 521 and the second valve plate 522 are cantilever beam valves made of flexible thin film materials;
a liquid inlet flow channel 313 and a liquid outlet valve chamber 314 are arranged in the lower pump body 31; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet is communicated with a liquid inlet flow channel 313; the liquid outlet is communicated with the liquid outlet valve chamber 314;
the liquid inlet channel 313 is opposite to the liquid inlet valve chamber 323, and the first valve plate 521 is positioned between the liquid inlet channel 313 and the liquid inlet valve chamber 323; the first valve plate 521 can completely block the liquid inlet flow channel 313;
the liquid inlet flow channel 313 and the liquid outlet flow channel 324 are inclined, arranged in a splayed shape and are bilaterally symmetrical relative to the central axis of the piezoelectric pump.
The outlet flow passage 324 is opposite to the outlet valve chamber 314, and the second valve plate 522 is located between the outlet flow passage 324 and the outlet valve chamber 314; the second valve piece 522 can completely block the liquid outlet channel 324.
Embodiment 2 a resonance excitation piezoelectric pump
Referring to fig. 2, a resonant excitation piezoelectric pump comprises: the mass block 1, the piezoelectric vibrator, the pump body and the integrated valve body 5;
the mass block 1, the piezoelectric vibrator and the integrated valve body 5 are the same as the mass block 1, the piezoelectric vibrator and the integrated valve body 5 in the embodiment 1;
the piezoelectric vibrator includes: piezoelectric ceramic 21, metal substrate 22; the piezoelectric ceramic 21 is bonded to the metal substrate 22; the mass block 1 is welded on the piezoelectric ceramic of the piezoelectric vibrator to form a resonance system;
the pump body include: a lower pump body 31, an upper pump body 32; a liquid inlet and a liquid outlet are arranged on the lower pump body 31; the liquid inlet and the liquid outlet are positioned on the end surfaces of two sides of the lower pump body 31;
a liquid inlet flow channel 313 and a liquid outlet valve chamber 314 are also arranged in the lower pump body 31; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet is communicated with a liquid inlet flow channel 313; the liquid outlet is communicated with the liquid outlet valve chamber 314; the liquid inlet, the liquid inlet flow channel 313, the liquid outlet valve chamber 314 and the liquid outlet are on the same axis;
the liquid inlet flow channel 313 and the liquid outlet flow channel 324 are inclined, arranged in a splayed shape and are bilaterally symmetrical relative to the central axis of the piezoelectric pump.
The groove 322 is arc-shaped and corresponds to the arc of the metal substrate 22 when it is bent downward.
A liquid inlet flow channel 313 and a liquid outlet valve chamber 314 are arranged in the lower pump body 31; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet is communicated with a liquid inlet flow channel 313; the liquid outlet is communicated with the liquid outlet valve chamber 314;
the upper end of the lower pump body 31 is provided with an embedded groove 311; one side of the embedding groove 311 is provided with a positioning flange 312;
a positioning groove 321 is formed in one side of the lower end face of the upper pump body 32; the upper pump body 32 is embedded in the embedding groove 311, and the positioning flange 312 is butted with the positioning groove 321; the outer vertical surface and the bottom end surface of the upper pump body 32 can be tightly contacted with the inner vertical surface and the upper end surface of the embedded groove 311, namely the upper pump body 32 is in interference fit with the embedded groove 321;
one end of the integrated valve sheet body 5 is provided with a positioning notch 51; the integrated valve sheet body 5 is arranged on the inner end surface of the embedding groove 321 and is positioned through the positioning notch 51;
a groove 322 is arranged on the upper end surface of the upper pump body 32; the metal substrate 22 is packaged at the groove 322 to form a pump cavity;
the upper end surface of the integrated valve sheet body 5 is tightly contacted with the lower end surface of the upper pump body 32; the lower end face of the integrated valve sheet body 5 is tightly contacted with the upper end face in the embedded groove 311;
the integrated valve sheet body 5 is provided with at least 2 valve sheets; the two valve plates are respectively: the first valve plate 521, the second valve plate 522, the first valve plate 521 and the second valve plate 522 are cantilever beam valves made of flexible thin film materials;
the liquid inlet flow channel 313 is opposite to the liquid inlet valve chamber 323, the first valve plate 521 is positioned between the liquid inlet flow channel 313 and the liquid inlet valve chamber 323, and the first valve plate 521 can completely block the liquid inlet flow channel 313;
the outlet flow passage 324 is opposite to the outlet valve chamber 314, the second valve plate 522 is located between the outlet flow passage 324 and the outlet valve chamber 314, and the second valve plate 522 can completely block the outlet flow passage 324.
The working principle is as follows:
when a positive voltage of an external electric field acts on a piezoelectric vibrator, the piezoelectric vibrator bends upwards, and the volume of a pump cavity 4 is increased; the first valve plate 521 bends toward the inside of the liquid inlet valve chamber 323, so that a liquid flow passage between the liquid inlet channel 313 and the liquid inlet valve chamber 521 is opened, and liquid flows into the pump chamber 4 from the liquid inlet; meanwhile, the second valve plate 522 closes and blocks the outlet flow passage 324, and the outlet flow passage 324 is cut off from the liquid flow in the outlet valve chamber 314; completing the liquid pumping; when the negative voltage of the external electric field acts on the piezoelectric vibrator, the piezoelectric vibrator bends downwards; the volume of the pump cavity 4 becomes smaller; the first valve plate 521 closes and blocks the liquid inlet flow passage 313, and the liquid inlet flow passage 313 is stopped from flowing with the liquid inlet valve chamber 323; the second valve sheet 522 opens and blocks the liquid outlet channel 324, opens the liquid outlet channel 324 and the liquid outlet valve chamber 314, and the liquid in the pump chamber 4 is pumped out from the liquid outlet;
a piezoelectric pump is characterized in that a piezoelectric vibrator is continuously excited by positive and negative voltages, and liquid is introduced into a pump cavity 4 from a liquid inlet and continuously splashed out from a liquid outlet.
Claims (6)
1. A resonant excitation piezoelectric pump comprising: quality piece (1), piezoelectric vibrator, check valve and the pump body, its characterized in that: the piezoelectric vibrator includes: the device comprises piezoelectric ceramics (21), a metal substrate (22) and a mass block (1), wherein the mass block (1) is fixed on the piezoelectric ceramics (21) to form a resonance system;
the check valve is an integrated valve sheet body (5); the pump body include: a lower pump body (31) and an upper pump body (32); the upper end of the lower pump body (31) is provided with an embedded groove (311); the upper pump body (32) is embedded in the embedded groove (311); the integrated valve body (5) is arranged between the split surfaces of the lower pump body (31) and the upper pump body (32); the upper end surface of the upper pump body (32) is provided with a groove (322); the piezoelectric vibrator is packaged at the groove (322) to form a pump cavity (4);
the lower pump body (31) is provided with a liquid inlet flow channel (313), a liquid outlet valve chamber (314), a liquid inlet and a liquid outlet; the upper pump body (32) is also provided with a liquid inlet valve chamber (323) and a liquid outlet flow passage (324); the liquid inlet channel (313) is opposite to the liquid inlet valve chamber (323); the liquid outlet channel (324) is opposite to the liquid outlet valve chamber (314);
the integrated valve plate body (5) is provided with a first valve plate (521) and a second valve plate (522); the first valve plate (521) is positioned between the liquid inlet flow channel (313) and the liquid inlet valve chamber (323); the second valve sheet (522) is positioned between the liquid outlet flow passage (324) and the liquid outlet valve chamber (314).
2. A resonant excitation piezoelectric pump as claimed in claim 1, wherein: the groove (322) is arc-shaped and corresponds to the radian of the metal substrate (22) when the metal substrate is bent downwards.
3. A resonant excitation piezoelectric pump as claimed in claim 1 or claim 2, wherein: the pump body liquid inlet flow channel (313) and the pump body liquid outlet flow channel (324) are inclined, arranged in a splayed manner and are bilaterally symmetrical relative to the central axis of the piezoelectric pump.
4. A resonant excitation piezoelectric pump as claimed in claim 3, wherein: the liquid inlet is communicated with a liquid inlet flow channel (313); the liquid outlet is communicated with the liquid outlet valve chamber (314); the liquid inlet, the liquid inlet flow channel (313), the liquid outlet valve chamber (314) and the liquid outlet are on the same axis.
5. A resonant excited piezoelectric pump according to claim 4, wherein: the first valve plate (521) and the second valve plate (522) are both made of flexible thin film materials.
6. A resonant excited piezoelectric pump according to claim 5, wherein: the first valve plate (521) and the second valve plate (522) are cantilever beam valves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221458374.4U CN217976535U (en) | 2022-06-13 | 2022-06-13 | Resonance excitation piezoelectric pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221458374.4U CN217976535U (en) | 2022-06-13 | 2022-06-13 | Resonance excitation piezoelectric pump |
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| Publication Number | Publication Date |
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| CN217976535U true CN217976535U (en) | 2022-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221458374.4U Active CN217976535U (en) | 2022-06-13 | 2022-06-13 | Resonance excitation piezoelectric pump |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117627900A (en) * | 2023-11-05 | 2024-03-01 | 吉林大学 | Miniature piezoelectric pump with multiple inlets and Tesla valve flow passage center outflow |
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2022
- 2022-06-13 CN CN202221458374.4U patent/CN217976535U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117627900A (en) * | 2023-11-05 | 2024-03-01 | 吉林大学 | Miniature piezoelectric pump with multiple inlets and Tesla valve flow passage center outflow |
| CN117627900B (en) * | 2023-11-05 | 2024-05-03 | 吉林大学 | Miniature piezoelectric pump with multiple inlets being Tesla valve runners |
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