CN212867851U - Precise micro-fluidic pump driven by piezoelectric ceramic vibrator - Google Patents
Precise micro-fluidic pump driven by piezoelectric ceramic vibrator Download PDFInfo
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- CN212867851U CN212867851U CN202021335714.5U CN202021335714U CN212867851U CN 212867851 U CN212867851 U CN 212867851U CN 202021335714 U CN202021335714 U CN 202021335714U CN 212867851 U CN212867851 U CN 212867851U
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- piezoelectric ceramic
- ceramic vibrator
- metal substrate
- joint
- fluidic pump
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- 239000000919 ceramic Substances 0.000 title claims description 35
- 239000002184 metal Substances 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 239000007787 solid Substances 0.000 claims description 21
- 239000002313 adhesive film Substances 0.000 claims description 20
- 238000003825 pressing Methods 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 11
- 238000009434 installation Methods 0.000 abstract description 7
- 239000003292 glue Substances 0.000 abstract description 6
- 239000012528 membrane Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 239000000741 silica gel Substances 0.000 abstract 1
- 229910002027 silica gel Inorganic materials 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000010923 batch production Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 239000007767 bonding agent Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
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- 238000011031 large-scale manufacturing process Methods 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model relates to a micro-fluidic technical field just discloses a piezoceramics oscillator driven accurate micro-fluidic pump, which comprises a housin, the left surface intercommunication of casing has the access joint, the right-hand member intercommunication of access joint has inlet valve, the right flank intercommunication of casing has outlet joint, outlet joint's left end intercommunication has outlet valve, the lower surface of casing is provided with metal substrate, metal substrate's lower surface is provided with the piezoceramics oscillator, makes this device installation simplify through the setting of a series of structure, through the fixed method who improves piezoceramics oscillator actuator, adopts waterproof solid-state glued membrane to replace traditional U-shaped silica gel circle or glue, also obtains good waterproof sealing function when connecting fixed piezoceramics oscillator actuator.
Description
Technical Field
The utility model relates to a micro-fluidic technical field specifically is a piezoceramics oscillator driven accurate micro-fluidic pump.
Background
Piezoceramic micropumps are used in the field of microfluidics for delivering extremely minute quantities of fluids or gases and for precise, intelligent control.
The prior piezoelectric ceramic micropump has the following disadvantages; 1. the structure is complex. The shell of the pump is usually composed of 4-5 parts, which causes trouble in installation, high defective rate of assembly and difficult batch production; 2. the volume is too large. The requirement of miniaturization and precision of internal parts of related products as much as possible is not met; 3. the piezoelectric vibrator actuator assembly is not properly fixed. In the traditional method, a U-shaped sealing ring or glue is generally adopted to be fixed in a pump cavity, the thickness of the U-shaped sealing ring is often more than 0.5mm due to the limit of a production process and is far greater than the ideal micron-sized pump cavity depth of a micro pump, so that the volume of a dead zone (namely, a region outside the moving range of a piezoelectric ceramic vibrator actuator in the pump cavity) of the micro pump is overlarge, and the self-absorption performance and the output pressure of the micro pump are greatly reduced; when glue is used for fixing, the thickness and the fluidity of the glue layer can not be accurately controlled, so that the size of the cavity of the pump is different, the performance is neglected, and the large-scale production can not be realized. 4. The pump cavity is complicated to machine. Conventional methods typically employ micron-sized cavities machined into the housing in order to create a pump chamber dead zone (i.e., a zone outside the range of motion of the piezoelectric ceramic vibrator actuator within the pump chamber) that is sufficiently small to achieve the desired self-priming performance and output pressure. The structure has very high requirement on the machining precision of the pump cavity, an imported high-precision machine tool is needed, so that the cost is high, the performance of the pump is greatly different due to machining precision errors, the reject ratio is high, and the pump is not suitable for batch production; 5. the pump valve has a complex structure and high installation requirements. Generally, a sealing ring and a screw fixing and locking structure are adopted, so that the size cannot be further reduced. The fixed clamping part of the valve is very narrow, and meanwhile, the sealing rings of the inlet and outlet valves are positioned on the upper surface and the lower surface of the valve, so that the valve is slightly misaligned in the installation process to cause eccentricity and failure of the micropump. 6. The micro pump has insufficient performance. Due to the aforementioned complicated structure, improper method for fixing the piezoelectric vibrator, and too large volume, the "dead zone" (i.e., the region outside the movable range of the piezoelectric ceramic vibrator actuator in the pump chamber) cannot be obtained as small as possible, and thus excellent self-priming performance and output pressure cannot be obtained.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a piezoceramics oscillator driven accurate micro-fluidic pump to solve the problem that proposes in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a precision micro-fluidic pump of piezoelectric vibrator driven, includes the casing, the left surface intercommunication of casing has the access connection, the right-hand member intercommunication of access connection has the import valve, the right flank intercommunication of casing has the exit connection, the left end intercommunication of exit connection has the exit valve, the lower surface of casing is provided with metal substrate, metal substrate's lower surface is provided with the piezoceramics oscillator, and the assembly of metal substrate and piezoceramics oscillator is called piezoceramics oscillator actuator.
Preferably, the lower surface of the shell is provided with a first waterproof solid adhesive film, and the pressing sheet is bonded with the shell through the first waterproof solid adhesive film.
Preferably, the inlet joint and the outlet joint are both detachable structures, and sealing gaskets are arranged at the joint of the inlet joint and the shell and at the joint of the outlet joint and the shell. The joints are bonded by an adhesive.
Preferably, a second waterproof solid adhesive film is arranged between the shell and the metal substrate, and the shell is bonded with the metal substrate through the second waterproof solid adhesive film.
Preferably, a pressing sheet is arranged between the first waterproof solid adhesive film and the second waterproof solid adhesive film.
Preferably, the piezoelectric ceramic vibrator actuator is fixedly mounted on the lower surface of the metal substrate through a circular waterproof solid-state adhesive film.
Preferably, the inlet valve and the outlet valve are both fixed through the pressing sheet.
Preferably, the inlet joint is parallel to the direction of the inlet valve, and the outlet joint is parallel to the direction of the outlet valve.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the precise micro-fluidic pump driven by the piezoelectric ceramic vibrator has the advantages of simple structure, simple and convenient installation, high efficiency and low cost, and only has one main part of a shell.
(2) The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator improves the fixing method of a piezoelectric vibrator actuator, adopts waterproof solid-state adhesive film connection, obtains a sealing and waterproof function while fixing and locking, and obtains an ideal micron-sized pump cavity space. Simple operation, stability and reliability.
(3) The precise micro-fluidic pump driven by the piezoelectric ceramic oscillator improves the structure of a pump valve into an integral combined cantilever beam structure, the upper surface of the pump valve is compressed by an ultrathin compressing sheet, and other complex installation modes such as a sealing ring, a screw and glue are not needed, so that the installation procedure is simplified, and the reject ratio is greatly reduced. Meanwhile, the volume of a dead zone (namely, a zone outside the moving range of the piezoelectric ceramic vibrator actuator in the pump cavity) of the pump is reduced, and the self-priming performance of the pump is improved.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic top view of the present invention;
fig. 3 is a schematic bottom view of the present invention;
fig. 4 is a schematic perspective view of the present invention;
fig. 5 is a schematic diagram of the explosion structure of the present invention;
fig. 6 is a schematic view of the three-dimensional structure of the housing of the present invention.
In the figure: 1. an inlet fitting; 2. a housing; 3. a first waterproof solid adhesive film; 4. an outlet fitting; 5. a metal substrate; 6. a second waterproof solid adhesive film; 7. an inlet valve; 8. a piezoelectric ceramic vibrator; 9. an outlet valve; 10. and a pressing sheet.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1, a precise micro-fluidic pump driven by a piezoelectric ceramic vibrator includes a housing 2, an inlet connector 1 is communicated with a left side surface of the housing 2, an inlet valve 7 is communicated with a right end of the inlet connector 1, an outlet connector 4 is communicated with a right side surface of the housing 2, an outlet valve 9 is communicated with a left end of the outlet connector 4, a metal substrate 5 is arranged on a lower surface of the housing 2, and a piezoelectric ceramic vibrator 8 is arranged on a lower surface of the metal substrate 5.
Further, the lower surface of the shell 2 is provided with a first waterproof solid adhesive film 3, and the first waterproof solid adhesive film 3 is bonded with the shell 2 through an adhesive, so that the fixing effect is achieved.
Further, inlet joint 1 and outlet joint 4 are detachable construction, and inlet joint 1 and 2 junctions of casing and outlet joint 4 and 2 junctions of casing all are provided with seal ring, play sealed effect.
Furthermore, a second waterproof solid adhesive film 6 is arranged between the shell 2 and the metal substrate 5, and the shell 2 is bonded with the second waterproof solid adhesive film 6 through a bonding agent to play a role in fixing and sealing.
Further, be provided with compressing tightly piece 7 between first waterproof solid glued membrane 3 and the waterproof solid glued membrane 6 of second, be convenient for install the pump valve through compressing tightly piece 7.
Furthermore, the metal substrate 5 is fixedly installed in the inner cavity of the shell 2 through a second waterproof solid glue film, a tiny pump cavity is obtained while the metal substrate is sealed and waterproof, and the manufacturing difficulty and high cost of machining the micron-sized counter bore pump cavity on the shell are avoided. The 'dead zone' (namely the area outside the moving range of the piezoelectric ceramic vibrator actuator in the pump cavity) of the pump is effectively reduced, the self-priming performance and the output pressure of the pump are greatly improved, the processing difficulty and the manufacturing cost are reduced, and the large-scale batch production is facilitated.
Furthermore, the inlet valve 7 and the outlet valve 9 are of an integrated structure and are fixed through the pressing sheet 10, so that the structure is simple, efficient, stable and reliable, and the installation is simpler and more convenient.
Furthermore, the direction of the inlet connector 1 is parallel to that of the inlet valve 7, and the direction of the outlet connector 4 is parallel to that of the outlet valve 9, so that damage or functional failure caused by the frontal impact of high-speed high-pressure fluid or gas on the pump valve is avoided.
The working principle is as follows: when the precise micro-fluidic pump driven by the piezoelectric vibrator works, when an alternating current power supply U is applied to two ends of the piezoelectric ceramic vibrator 8, the piezoelectric ceramic vibrator is radially compressed under the action of an electric field, and tensile stress is generated inside the piezoelectric ceramic vibrator, so that the piezoelectric ceramic vibrator is bent and deformed. When the piezoelectric ceramic vibrator is bent in the positive direction, the piezoelectric ceramic vibrator extends downwards to drive the bonded metal substrate 5 to be bent and extended downwards synchronously, the volume of a pump cavity is increased, the pressure in the cavity is reduced, an inlet valve 7 of a pump valve is opened downwards, an outlet valve 9 is closed under the blocking of a compression plate 10, and external fluid or gas enters the pump cavity from an inlet 1; when the piezoelectric ceramic vibrator bends upwards and reversely, the piezoelectric ceramic vibrator contracts to drive the bonded metal substrate 5 to bend upwards and contract synchronously, the volume of the pump cavity is reduced, the pressure in the cavity is increased, the inlet valve 7 of the pump valve is blocked by the end face of the cavity of the shell 2 to be closed, the outlet valve 9 is opened upwards, and fluid or gas in the pump cavity is discharged outwards. The fluid or gas forms a smooth continuous directional flow in the process of reciprocating circulation.
It is to be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a precision micro-fluidic pump of piezoceramics oscillator driven, includes casing (2), its characterized in that: the left side of casing (2) communicates there is access connection (1), the right-hand member intercommunication of access connection (1) has inlet valve (7), the right side intercommunication of casing (2) has exit linkage (4), the left end intercommunication of exit linkage (4) has outlet valve (9), the lower surface of casing (2) is provided with metal substrate (5), the lower surface of metal substrate (5) is provided with piezoceramics oscillator (8).
2. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the lower surface of the shell (2) is provided with a first waterproof solid adhesive film (3), and the pressing sheet (10) is adhered to the shell (2) through the first waterproof solid adhesive film (3).
3. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the inlet joint (1) and the outlet joint (4) are of detachable structures, and sealing gaskets are arranged at the joint of the inlet joint (1) and the shell (2) and the joint of the outlet joint (4) and the shell (2).
4. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 2, wherein: a second waterproof solid adhesive film (6) is arranged between the shell (2) and the metal substrate (5), and the shell (2) is bonded with the metal substrate (5) through the second waterproof solid adhesive film (6).
5. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 4, wherein: a pressing sheet (10) is arranged between the first waterproof solid adhesive film (3) and the second waterproof solid adhesive film (6).
6. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the piezoelectric ceramic vibrator (8) is fixedly mounted on the lower surface of the metal substrate (5) through an adhesive, the metal substrate (5) mainly plays a role in fixing and protecting the piezoelectric ceramic vibrator (8), the piezoelectric ceramic vibrator (8) is conveniently mounted in a pump cavity, and a combination of the metal substrate (5) and the piezoelectric ceramic vibrator (8) is called as a piezoelectric ceramic vibrator actuator.
7. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 2, wherein: the inlet valve (7) and the outlet valve (9) are fixed through the pressing sheet (10).
8. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the inlet connector (1) is parallel to the direction of the inlet valve (7), and the outlet connector (4) is parallel to the direction of the outlet valve (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021335714.5U CN212867851U (en) | 2020-07-09 | 2020-07-09 | Precise micro-fluidic pump driven by piezoelectric ceramic vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021335714.5U CN212867851U (en) | 2020-07-09 | 2020-07-09 | Precise micro-fluidic pump driven by piezoelectric ceramic vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212867851U true CN212867851U (en) | 2021-04-02 |
Family
ID=75213919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021335714.5U Expired - Fee Related CN212867851U (en) | 2020-07-09 | 2020-07-09 | Precise micro-fluidic pump driven by piezoelectric ceramic vibrator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212867851U (en) |
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2020
- 2020-07-09 CN CN202021335714.5U patent/CN212867851U/en not_active Expired - Fee Related
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210402 |