CN111878366A - Precise micro-fluidic pump driven by piezoelectric ceramic vibrator and application method thereof - Google Patents
Precise micro-fluidic pump driven by piezoelectric ceramic vibrator and application method thereof Download PDFInfo
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- CN111878366A CN111878366A CN202010655919.XA CN202010655919A CN111878366A CN 111878366 A CN111878366 A CN 111878366A CN 202010655919 A CN202010655919 A CN 202010655919A CN 111878366 A CN111878366 A CN 111878366A
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- piezoelectric ceramic
- ceramic vibrator
- shell
- pump
- metal substrate
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- 239000000919 ceramic Substances 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000007787 solid Substances 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 239000002313 adhesive film Substances 0.000 claims description 20
- 239000012530 fluid Substances 0.000 claims description 11
- 238000003825 pressing Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 6
- 230000009471 action Effects 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 3
- 239000003292 glue Substances 0.000 abstract description 7
- 238000009434 installation Methods 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 8
- 238000010923 batch production Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/22—Arrangements for enabling ready assembly or disassembly
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention relates to the technical field of micro-fluidic, and discloses a precise micro-fluidic pump driven by a piezoelectric ceramic vibrator, which comprises a shell, wherein the left side surface of the shell is communicated with an inlet joint, the right end of the inlet joint is communicated with an inlet valve, the right side surface of the shell is communicated with an outlet joint, the left end of the outlet joint is communicated with an outlet valve, the lower surface of the shell is provided with a metal substrate, the lower surface of the metal substrate is provided with the piezoelectric ceramic vibrator, the installation of the device is simplified through the arrangement of a series of structures, a fixing method of the piezoelectric vibrator actuator is improved, a waterproof solid glue film is adopted to replace a traditional U-shaped silica gel ring or glue, and a good sealing and waterproof function is obtained while the piezoelectric ceramic vibrator actuator is connected and fixed.
Description
Technical Field
The invention relates to the technical field of microfluidics, in particular to a precise microfluidic pump driven by a piezoelectric ceramic vibrator.
Background
Piezoceramic micropumps are used in the field of microfluidics for delivering extremely minute quantities of fluids or gases and for precise, intelligent control.
The prior piezoelectric ceramic micropump has the following disadvantages; 1. the structure is complex. The shell of the pump is usually composed of 4-5 parts, which causes trouble in installation, high defective rate of assembly and difficult batch production; 2. the volume is too large. The requirement of miniaturization and precision of internal parts of related products as much as possible is not met; 3. the piezoelectric vibrator actuator assembly is not properly fixed. In the traditional method, a U-shaped sealing ring or glue is generally adopted to be fixed in a pump cavity, the thickness of the U-shaped sealing ring is often more than 0.5mm due to the limit of a production process and is far greater than the ideal micron-sized pump cavity depth of a micro pump, so that the volume of a dead zone (namely, a region outside the moving range of a piezoelectric ceramic vibrator actuator in the pump cavity) of the micro pump is overlarge, and the self-absorption performance and the output pressure of the micro pump are greatly reduced; when glue is used for fixing, the thickness and the fluidity of the glue layer can not be accurately controlled, so that the size of the cavity of the pump is different, the performance is neglected, and the large-scale production can not be realized. 4. The pump cavity is complicated to machine. Conventional methods typically employ micron-sized cavities machined into the housing in order to create a pump chamber dead zone (i.e., a zone outside the range of motion of the piezoelectric ceramic vibrator actuator within the pump chamber) that is sufficiently small to achieve the desired self-priming performance and output pressure. The structure has very high requirement on the machining precision of the pump cavity, an imported high-precision machine tool is needed, so that the cost is high, the performance of the pump is greatly different due to machining precision errors, the reject ratio is high, and the pump is not suitable for batch production; 5. the pump valve has a complex structure and high installation requirements. Generally, a sealing ring and a screw fixing and locking structure are adopted, so that the size cannot be further reduced. The fixed clamping part of the valve is very narrow, and meanwhile, the sealing rings of the inlet and outlet valves are positioned on the upper surface and the lower surface of the valve, so that the valve is slightly misaligned in the installation process to cause eccentricity and failure of the micropump. 6. The micro pump has insufficient performance. Due to the aforementioned complicated structure, improper method for fixing the piezoelectric vibrator, and too large volume, the "dead zone" (i.e., the region outside the movable range of the piezoelectric ceramic vibrator actuator in the pump chamber) cannot be obtained as small as possible, and thus excellent self-priming performance and output pressure cannot be obtained.
Disclosure of Invention
The invention aims to provide a precise micro-fluidic pump driven by a piezoelectric ceramic vibrator to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a precision micro-fluidic pump of piezoelectric vibrator driven, includes the casing, the left surface intercommunication of casing has the access connection, the right-hand member intercommunication of access connection has the import valve, the right flank intercommunication of casing has the exit connection, the left end intercommunication of exit connection has the exit valve, the lower surface of casing is provided with metal substrate, metal substrate's lower surface is provided with the piezoceramics oscillator, and the assembly of metal substrate and piezoceramics oscillator is called piezoceramics oscillator actuator.
Preferably, the lower surface of the shell is provided with a first waterproof solid adhesive film, and the pressing sheet is bonded with the shell through the first waterproof solid adhesive film.
Preferably, the inlet joint and the outlet joint are both detachable structures, and sealing gaskets are arranged at the joint of the inlet joint and the shell and at the joint of the outlet joint and the shell. The joints are bonded by an adhesive.
Preferably, a second waterproof solid adhesive film is arranged between the shell and the metal substrate, and the shell is bonded with the metal substrate through the second waterproof solid adhesive film.
Preferably, a pressing sheet is arranged between the first waterproof solid adhesive film and the second waterproof solid adhesive film.
Preferably, the piezoelectric ceramic vibrator actuator is fixedly mounted on the lower surface of the metal substrate through a circular waterproof solid-state adhesive film.
Preferably, the inlet valve and the outlet valve are both fixed through the pressing sheet.
Preferably, the inlet joint is parallel to the direction of the inlet valve, and the outlet joint is parallel to the direction of the outlet valve.
A use method of a precise micro-fluidic pump driven by a piezoelectric ceramic vibrator comprises the following steps: when an alternating current power supply U is applied to two ends of the piezoelectric ceramic vibrator, the piezoelectric ceramic vibrator is radially compressed under the action of an electric field, and tensile stress is generated inside the piezoelectric ceramic vibrator, so that the piezoelectric ceramic vibrator is bent and deformed; when the piezoelectric ceramic vibrator is bent in the positive direction, the piezoelectric ceramic vibrator extends downwards to drive the bonded metal substrate to bend and extend downwards synchronously, the volume of the pump cavity is increased, the pressure in the cavity is reduced, the inlet valve of the pump valve is opened downwards, the outlet valve is closed by the blockage of the compression plate, and external fluid or gas enters the pump cavity from the inlet; when the piezoelectric ceramic vibrator bends upwards and reversely, the piezoelectric ceramic vibrator contracts to drive the bonded metal substrate to bend upwards and contract synchronously, the volume of the pump cavity is reduced, the pressure in the cavity is increased, the inlet valve of the pump valve is closed by the blocking of the end face of the cavity of the shell, the outlet valve is opened upwards, and fluid or gas in the pump cavity is discharged outwards; the fluid or gas forms a smooth continuous directional flow in the process of reciprocating circulation.
Compared with the prior art, the invention has the beneficial effects that:
(1) the precise micro-fluidic pump driven by the piezoelectric ceramic vibrator has the advantages of simple structure, simple and convenient installation, high efficiency and low cost, and only has one main part of a shell.
(2) The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator improves the fixing method of a piezoelectric vibrator actuator, adopts waterproof solid-state adhesive film connection, obtains a sealing and waterproof function while fixing and locking, and obtains an ideal micron-sized pump cavity space. Simple operation, stability and reliability.
(3) The precise micro-fluidic pump driven by the piezoelectric ceramic oscillator improves the structure of a pump valve into an integral combined cantilever beam structure, the upper surface of the pump valve is compressed by an ultrathin compressing sheet, and other complex installation modes such as a sealing ring, a screw and glue are not needed, so that the installation procedure is simplified, and the reject ratio is greatly reduced. Meanwhile, the volume of a dead zone (namely, a zone outside the moving range of the piezoelectric ceramic vibrator actuator in the pump cavity) of the pump is reduced, and the self-priming performance of the pump is improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic top view of the present invention;
FIG. 3 is a schematic bottom view of the present invention;
FIG. 4 is a schematic perspective view of the present invention;
FIG. 5 is a schematic illustration of an explosive structure according to the present invention;
fig. 6 is a schematic perspective view of the housing of the present invention.
In the figure: 1. an inlet fitting; 2. a housing; 3. a first waterproof solid adhesive film; 4. an outlet fitting; 5. a metal substrate; 6. a second waterproof solid adhesive film; 7. an inlet valve; 8. a piezoelectric ceramic vibrator; 9. an outlet valve; 10. and a pressing sheet.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, a precise micro-fluidic pump driven by a piezoelectric ceramic vibrator includes a housing 2, an inlet connector 1 is communicated with a left side surface of the housing 2, an inlet valve 7 is communicated with a right end of the inlet connector 1, an outlet connector 4 is communicated with a right side surface of the housing 2, an outlet valve 9 is communicated with a left end of the outlet connector 4, a metal substrate 5 is arranged on a lower surface of the housing 2, and a piezoelectric ceramic vibrator 8 is arranged on a lower surface of the metal substrate 5.
Further, the lower surface of the shell 2 is provided with a first waterproof solid adhesive film 3, and the first waterproof solid adhesive film 3 is bonded with the shell 2 through an adhesive, so that the fixing effect is achieved.
Further, inlet joint 1 and outlet joint 4 are detachable construction, and inlet joint 1 and 2 junctions of casing and outlet joint 4 and 2 junctions of casing all are provided with seal ring, play sealed effect.
Furthermore, a second waterproof solid adhesive film 6 is arranged between the shell 2 and the metal substrate 5, and the shell 2 is bonded with the second waterproof solid adhesive film 6 through a bonding agent to play a role in fixing and sealing.
Further, be provided with compressing tightly piece 7 between first waterproof solid glued membrane 3 and the waterproof solid glued membrane 6 of second, be convenient for install the pump valve through compressing tightly piece 7.
Furthermore, the metal substrate 5 is fixedly installed in the inner cavity of the shell 2 through a second waterproof solid glue film, a tiny pump cavity is obtained while the metal substrate is sealed and waterproof, and the manufacturing difficulty and high cost of machining the micron-sized counter bore pump cavity on the shell are avoided. The 'dead zone' (namely the area outside the moving range of the piezoelectric ceramic vibrator actuator in the pump cavity) of the pump is effectively reduced, the self-priming performance and the output pressure of the pump are greatly improved, the processing difficulty and the manufacturing cost are reduced, and the large-scale batch production is facilitated.
Furthermore, the inlet valve 7 and the outlet valve 9 are of an integrated structure and are fixed through the pressing sheet 10, so that the structure is simple, efficient, stable and reliable, and the installation is simpler and more convenient.
Furthermore, the direction of the inlet connector 1 is parallel to that of the inlet valve 7, and the direction of the outlet connector 4 is parallel to that of the outlet valve 9, so that damage or functional failure caused by the frontal impact of high-speed high-pressure fluid or gas on the pump valve is avoided.
The working principle is as follows: when the precise micro-fluidic pump driven by the piezoelectric vibrator works, when an alternating current power supply U is applied to two ends of the piezoelectric ceramic vibrator 8, the piezoelectric ceramic vibrator is radially compressed under the action of an electric field, and tensile stress is generated inside the piezoelectric ceramic vibrator, so that the piezoelectric ceramic vibrator is bent and deformed. When the piezoelectric ceramic vibrator is bent in the positive direction, the piezoelectric ceramic vibrator extends downwards to drive the bonded metal substrate 5 to be bent and extended downwards synchronously, the volume of a pump cavity is increased, the pressure in the cavity is reduced, an inlet valve 7 of a pump valve is opened downwards, an outlet valve 9 is closed under the blocking of a compression plate 10, and external fluid or gas enters the pump cavity from an inlet 1; when the piezoelectric ceramic vibrator bends upwards and reversely, the piezoelectric ceramic vibrator contracts to drive the bonded metal substrate 5 to bend upwards and contract synchronously, the volume of the pump cavity is reduced, the pressure in the cavity is increased, the inlet valve 7 of the pump valve is blocked by the end face of the cavity of the shell 2 to be closed, the outlet valve 9 is opened upwards, and fluid or gas in the pump cavity is discharged outwards. The fluid or gas forms a smooth continuous directional flow in the process of reciprocating circulation.
It is to be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a precision micro-fluidic pump of piezoceramics oscillator driven, includes casing (2), its characterized in that: the left side of casing (2) communicates there is access connection (1), the right-hand member intercommunication of access connection (1) has inlet valve (7), the right side intercommunication of casing (2) has exit linkage (4), the left end intercommunication of exit linkage (4) has outlet valve (9), the lower surface of casing (2) is provided with metal substrate (5), the lower surface of metal substrate (5) is provided with piezoceramics oscillator (8).
2. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the lower surface of the shell (2) is provided with a first waterproof solid adhesive film (3), and the pressing sheet (10) is bonded with the shell (2) through the first waterproof solid adhesive film (3).
3. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the inlet joint (1) and the outlet joint (4) are of detachable structures, and sealing gaskets are arranged at the joint of the inlet joint (1) and the shell (2) and the joint of the outlet joint (4) and the shell (2).
4. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: a second waterproof solid adhesive film (6) is arranged between the shell (2) and the metal substrate (5), and the shell (2) is bonded with the metal substrate (5) through the second waterproof solid adhesive film (6).
5. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: a pressing sheet (10) is arranged between the first waterproof solid adhesive film (3) and the second waterproof solid adhesive film (6).
6. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the piezoelectric ceramic vibrator (8) is fixedly arranged on the lower surface of the metal substrate (5) through an adhesive. The metal substrate (5) mainly plays a role in fixing and protecting the piezoelectric ceramic vibrator (8), and meanwhile, the piezoelectric ceramic vibrator (8) is conveniently installed in the pump cavity, so that the piezoelectric ceramic vibrator and the pump cavity are generally used simultaneously.
7. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the inlet valve (7) and the outlet valve (9) are fixed through the pressing sheet (10).
8. The precise micro-fluidic pump driven by the piezoelectric ceramic vibrator as claimed in claim 1, wherein: the inlet connector (1) is parallel to the direction of the inlet valve (7), and the outlet connector (4) is parallel to the direction of the outlet valve (9).
9. The use method of the precise micro-fluidic pump driven by the piezoelectric ceramic vibrator is characterized by comprising the following steps of: when an alternating current power supply U is applied to two ends of the piezoelectric ceramic vibrator, the piezoelectric ceramic vibrator is radially compressed under the action of an electric field, and tensile stress is generated inside the piezoelectric ceramic vibrator, so that the piezoelectric ceramic vibrator is bent and deformed; when the piezoelectric ceramic vibrator is bent in the positive direction, the piezoelectric ceramic vibrator extends downwards to drive the bonded metal substrate to bend and extend downwards synchronously, the volume of the pump cavity is increased, the pressure in the cavity is reduced, the inlet valve of the pump valve is opened downwards, the outlet valve is closed by the blockage of the compression plate, and external fluid or gas enters the pump cavity from the inlet; when the piezoelectric ceramic vibrator bends upwards and reversely, the piezoelectric ceramic vibrator contracts to drive the bonded metal substrate to bend upwards and contract synchronously, the volume of the pump cavity is reduced, the pressure in the cavity is increased, the inlet valve of the pump valve is closed by the blocking of the end face of the cavity of the shell, the outlet valve is opened upwards, and fluid or gas in the pump cavity is discharged outwards; the fluid or gas forms a smooth continuous directional flow in the process of reciprocating circulation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010655919.XA CN111878366A (en) | 2020-07-09 | 2020-07-09 | Precise micro-fluidic pump driven by piezoelectric ceramic vibrator and application method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010655919.XA CN111878366A (en) | 2020-07-09 | 2020-07-09 | Precise micro-fluidic pump driven by piezoelectric ceramic vibrator and application method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN111878366A true CN111878366A (en) | 2020-11-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010655919.XA Pending CN111878366A (en) | 2020-07-09 | 2020-07-09 | Precise micro-fluidic pump driven by piezoelectric ceramic vibrator and application method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112843381A (en) * | 2021-02-28 | 2021-05-28 | 吉林大学 | Wheel type piezoelectric precision infusion pump with alarm function |
| CN113944615A (en) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | Integrated micro-piezoelectric liquid pumping device and manufacturing and driving method thereof |
-
2020
- 2020-07-09 CN CN202010655919.XA patent/CN111878366A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112843381A (en) * | 2021-02-28 | 2021-05-28 | 吉林大学 | Wheel type piezoelectric precision infusion pump with alarm function |
| CN113944615A (en) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | Integrated micro-piezoelectric liquid pumping device and manufacturing and driving method thereof |
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