CN105370548A - Piezoelectric pump - Google Patents
Piezoelectric pump Download PDFInfo
- Publication number
- CN105370548A CN105370548A CN201510870470.8A CN201510870470A CN105370548A CN 105370548 A CN105370548 A CN 105370548A CN 201510870470 A CN201510870470 A CN 201510870470A CN 105370548 A CN105370548 A CN 105370548A
- Authority
- CN
- China
- Prior art keywords
- cavity
- outlet
- piezoelectric vibrator
- pump
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 6
- 230000008602 contraction Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000012530 fluid Substances 0.000 abstract description 7
- 238000005452 bending Methods 0.000 abstract description 5
- 238000005086 pumping Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 239000005060 rubber Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Abstract
The invention relates to a piezoelectric pump. A piezoelectric vibrator is used as a driving element; the piezoelectric pump comprises an integrated cavity valve part; the piezoelectric vibrator is arranged at one side of the integrated cavity valve part; a cavity sunken groove is formed in a position, corresponding to the piezoelectric vibrator, on the integrated cavity valve part; after being mounted, the piezoelectric vibrator forms a sealing cavity, namely a pump cavity together with the cavity sunken groove; a diversion trench is arranged at the bottom of the cavity sunken groove; a cavity inlet and a cavity outlet are formed in the bottom of the diversion trench; the piezoelectric vibrator generates forward and backward bending deformation under the action of an alternating voltage to enable the volume of a cavity to be changed; when the volume of the pump cavity is increased, the pressure is reduced, an opening of an inlet valve is opened, an opening of an outlet valve is closed, and a fluid flows from the inlet to the cavity; and when the volume of the pump cavity is reduced, the pressure is increased, the opening of the inlet valve is closed, and the opening of the outlet valve is opened, and the fluid flows out from the outlet to form pumping capacity. The piezoelectric pump has the advantage of simplicity in assembly.
Description
Technical field
The invention belongs to field of fluid, be specifically related to a kind of piezoelectric pump device.
Background technique
Piezoelectric pump is a kind of microminiature displacement pump driven by piezoelectric vibrator, have that structure is simply convenient to produce in enormous quantities, volume is littlely convenient to microminiaturization, be convenient to Digital Control and the advantage such as the life-span is long, have wide practical use in instrument and apparatus, detection facility and mechano-electronic field.Existing piezoelectric pump comprises wafer warpage Direct driver, stacks the driving of promotion barrier film and several canonical form of resonance amplification driving, above type of pump includes again valve pump and valveless pump according to the kind difference of valve, and in Liquid transfer, have the output performance of valve pump to be obviously better than valveless pump.Because piezoelectric pump cavity volume variable quantity is less, to one-way valve cut-off property require than conventional electromagnetic or piston type high, along with the reduction of valve size, the assembly precision between each parts of valve and between valve and the pump housing or cavity becomes the bottleneck problem restricting the further miniaturization of valve piezoelectric pump.
Summary of the invention
In order to solve, the assembling of valve in current piezoelectric pump microminaturization process is complicated, assembly precision requirement high cause be not easy to mass production problem; propose a kind of piezoelectric pump; this piezoelectric pump comprises two parts; i.e. piezoelectric vibrator and integral type chamber valve member; wherein valve and cavity are same parts; without assembly process, there is in miniaturization process the features such as assembling is simple, assembly precision requirement is low, be suitable for large-scale industrial and produce.
To achieve these goals, the present invention is by the following technical solutions:
A kind of piezoelectric pump of the present invention, comprises piezoelectric vibrator and integral type chamber valve member, is characterised in that valve and cavity are same parts, wherein:
Piezoelectric vibrator is arranged on the side of integral type chamber valve member, forms seal chamber with integral type chamber valve member, and under the effect of alternating voltage, reciprocal bending deflection occurs piezoelectric vibrator, forms increase and the reduction of seal chamber volume;
Described integral type chamber valve member is made up of rubber material or rubber and plastic materials compound, be that piezoelectric vibrator corresponding position arranges a cavity slot, piezoelectric vibrator is installed afterwards and cavity slot forms seal chamber and pump chamber, cavity bottom arranges a guiding gutter, the entrance and exit of cavity is arranged in bottom guiding gutter, and described guiding gutter is for reducing flow resistance from the inlet to the outlet, described entrance is the column structure of an inside with entrance counterbore, be arranged in guiding gutter one end, described inlet leg body structure bottom surface is between cavity bottom surface and guiding gutter bottom surface, an inlet valve opening is furnished with between entrance deep gouge bottom surface and guiding gutter bottom surface, described inlet valve opening place plane and entrance cylinder bottom surface form an entrance cantilever beam structure, and when inside cavity pressure reduces, entrance overhang occurs bending and deformation, inlet valve opening is opened, and fluid can flow into pump chamber from inlet valve opening, described outlet is the column structure of an inside with outlet counterbore, the opening end of described column structure is arranged on guiding gutter bottom surface, the not opening side of described outlet round column structure is positioned at outside the pump housing, described outlet counterbore bottom surface is between pump housing outer surface and outlet cylinder bottom surface, a described not opening side end has radial contraction region, constriction zone starts cross section between outlet counterbore bottom surface and pump housing outer surface, start to be furnished with outlet valve opening between cross section and outlet deep gouge bottom surface at constriction zone, formed between outlet valve opening and outlet bottom cylindrical face and export cantilever beam structure, when inside cavity pressure increases, outlet overhang occurs bending and deformation, outlet valve opening is opened, fluid can flow out pump chamber from outlet valve opening.
During work, there is reciprocal bending deflection in piezoelectric vibrator under the effect of alternating voltage, and the volume of cavity increases along with the motion of piezoelectric vibrator and reduces.When cavity volume increases, inside cavity pressure reduces, and inlet valve opening is opened, and outlet valve opening is closed, and fluid flows into cavity from entrance through inlet valve opening; When cavity volume reduces, inside cavity pressure increases, and inlet valve opening is closed, and outlet valve opening is opened, and fluid flows out from outlet through outlet valve opening, forms pumping capacity.
Accompanying drawing explanation
Fig. 1 is a kind of piezoelectric pump schematic diagram of the present invention.
Fig. 2 is a kind of piezoelectric pump structural representation of the present invention.
Fig. 3 be in embodiment of the present invention use integral type capsule components structural representation.
Embodiment
With reference to Fig. 1, piezoelectric pump of the present invention is made up of piezoelectric vibrator 1 and integral type chamber valve member 2, wherein:
Piezoelectric vibrator 1 is arranged on the side of integral type chamber valve member 2, described integral type chamber valve member 2 is that a rubber material or rubber and plastic materials compound are made, described integral type chamber valve member is furnished with oscillator mounting groove 21, piezoelectric vibrator 1 is arranged in described oscillator mounting groove 21, at oscillator mounting groove 21 center arrangement one cavity deep gouge 22, piezoelectric vibrator 1 is installed afterwards and cavity deep gouge 22 forms seal chamber and pump chamber, arrange a guiding gutter 23 bottom cavity deep gouge 22, entrance 24 and the outlet 25 of cavity are arranged in bottom guiding gutter 23, described entrance 24 is the column structure of an inside with entrance counterbore 241, be arranged in guiding gutter 23 one end, described inlet leg body structure bottom surface 242, between cavity deep gouge 22 bottom surface and guiding gutter 23 bottom surface, is furnished with an inlet valve opening 243 between entrance counterbore 241 bottom surface and guiding gutter 23 bottom surface, described outlet 25 is the column structure of an inside with outlet counterbore 251, the opening end of described column structure is arranged on the bottom surface of guiding gutter 23, the not opening side of described outlet round column structure is positioned at outside the pump housing, described outlet counterbore 251 bottom surface is between pump housing outer surface 26 and outlet cylinder bottom surface 252, a described not opening side end has radial contraction region 253, constriction zone starts cross section 254 between outlet counterbore 251 bottom surface and pump housing outside bottom surface 26, start to be furnished with outlet valve opening 255 between cross section 254 and outlet deep gouge 251 bottom surface at constriction zone.
Claims (2)
1. a piezoelectric pump, by piezoelectric vibrator (1) as driving original paper, characterized by further comprising integral type chamber valve member (2), wherein: described piezoelectric vibrator (1) is arranged on the side in integral type chamber valve member (2), described integral type chamber valve member (2), upper and piezoelectric vibrator (1) corresponding position arranges a cavity deep gouge (22), piezoelectric vibrator 1 is installed afterwards and cavity deep gouge (22) forms seal chamber and pump chamber, a guiding gutter (23) is arranged in cavity deep gouge (22) bottom, entrance (24) and the outlet (25) of cavity is furnished with in the bottom of described guiding gutter (23), described entrance (24) is the column structure of an inside with entrance counterbore (241), be arranged in one end of guiding gutter (23), described entrance (24) column structure bottom surface (242) is positioned between cavity deep gouge (22) bottom surface and guiding gutter (23) bottom surface, is furnished with an inlet valve opening (243) between entrance counterbore (241) bottom surface and guiding gutter (23) bottom surface, described outlet (25) is the column structure of an inside with outlet counterbore (251), opening end is arranged on the bottom surface of guiding gutter (23), described outlet counterbore (251) bottom surface is positioned between pump housing outer surface (26) and outlet cylinder bottom surface (252), the not opening side end of outlet (25) column structure has radial contraction region (253), constriction zone starts cross section (254) and is positioned between outlet counterbore (251) bottom surface and pump housing outside bottom surface (26), start to be furnished with outlet valve opening (255) between cross section (254) and outlet counterbore (251) bottom surface at constriction zone.
2. piezoelectric pump according to claim 1, it is characterized in that: described piezoelectric vibrator can be the single-chip piezoelectric vibrator of a slice Thin Piezoelectric sheet material formation bonding with elastic base plate, also can be the bi-morph piezo-electric oscillator of two panels Thin Piezoelectric sheet material formation bonding with elastic base plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510870470.8A CN105370548A (en) | 2015-11-26 | 2015-11-26 | Piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510870470.8A CN105370548A (en) | 2015-11-26 | 2015-11-26 | Piezoelectric pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105370548A true CN105370548A (en) | 2016-03-02 |
Family
ID=55373067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510870470.8A Pending CN105370548A (en) | 2015-11-26 | 2015-11-26 | Piezoelectric pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105370548A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109162902A (en) * | 2018-09-20 | 2019-01-08 | 长春工业大学 | A kind of floating type I-shaped valve piezoelectric pump |
| CN113944615A (en) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | Integrated micro-piezoelectric liquid pumping device and manufacturing and driving method thereof |
-
2015
- 2015-11-26 CN CN201510870470.8A patent/CN105370548A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109162902A (en) * | 2018-09-20 | 2019-01-08 | 长春工业大学 | A kind of floating type I-shaped valve piezoelectric pump |
| CN109162902B (en) * | 2018-09-20 | 2023-12-15 | 长春工业大学 | Floating type I-shaped valve piezoelectric pump |
| CN113944615A (en) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | Integrated micro-piezoelectric liquid pumping device and manufacturing and driving method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160302 |