CN104153978A - Piezoelectric-vibration type micro fluid pumping device - Google Patents
Piezoelectric-vibration type micro fluid pumping device Download PDFInfo
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- CN104153978A CN104153978A CN201410142566.8A CN201410142566A CN104153978A CN 104153978 A CN104153978 A CN 104153978A CN 201410142566 A CN201410142566 A CN 201410142566A CN 104153978 A CN104153978 A CN 104153978A
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Abstract
The invention provides a piezoelectric-vibration type micro fluid pumping device which overcomes the defects of an existing micro fluid pumping device and improves output characteristics. The piezoelectric-vibration type micro fluid pumping device comprises a pressing cover, a water inlet, a control part, a drive part, a water outlet, a blank cap and connection bolts. The control part comprises a water inlet control valve, a water outlet control valve, a control valve seat, a control valve cavity, a supporting body and a separation membrane. The drive part comprises a pumping vibrator, a pumping cavity, a supporting body, a separation membrane and a sealing ring. The pressing cover and the blank cap are fixedly connected with the supporting bodies through the connection bolts. The sealing ring is arranged between the pumping vibrator and the supporting bodies, and the separation membrane is a low-elasticity-modulus silica membrane and pasted to the pumping vibrator. Compared with an existing micro fluid conveying device, when the piezoelectric-vibration type micro fluid pumping device is used, the fluid backflow phenomenon and drive force loss are avoided, output performance of the device is improved, flow of the micro fluid pumping device in high frequency is maintained well, and bidirectional pumping of fluid can be achieved.
Description
technical field:
The present invention relates to a kind of piezoelectricity and cause the fluid pumping apparatus that declines that shakes, belong to microminiature mechanical electrical and hydraulic system field.
background technique:
In recent years, microfluid system and correlation technique because of its without electromagnetic interference, compact structure, response characteristic is good and be convenient to the advantages such as accurately control is more and more subject to people's attention.Domestic microfluid drives with control technique and starts late, only have in early days several research units such as Tsing-Hua University and Jilin University to study it, wherein a large amount of research work is being done by Tsing-Hua University aspect micrometeor system and micropump, first Jilin University's Piezoelectric Driving has reported the research about conical tube type Valveless piezoelectric pump for 1998 at home with control research laboratory, develop again afterwards and minimum differentiate the minitype piezoelectric pump that flow micro updating can be used for biomedicine field, and flow thousands of milliliters per minute, can be used for the seriation minitype piezoelectric pump of computer CPU water-cooled.
Development along with piezoelectric actuator, from piezoelectric material film to disc piezoelectric actuator again to piezoelectric stack, the kind of piezoelectric actuator has obtained continuous development and renewal, and the microfluid pumping device based on different piezoelectric actuators, different mechanical structure and different operating mode all has report widely.But be mainly the research around passive microfluid feedway, the research of active control type is relatively less.
If Fig. 1 is a kind of valve voltage source micro-fluid conveyer device that has, its composition comprises housing 1, active chamber 2, water intake 3, one-way valve 4 and 5, drain opening 6, piezoelectric vibrator 7 and retaining ring 8.The different unidirectional stop valve of direction has been installed respectively in water inlet at fluid with osculum place, piezoelectric vibrator adopts single-chip piezoelectric vibrator.During the normal work of this device, because unidirectional passive check valve exists hysteresis quality, in water inlet and osculum place, all can there is fluid refluence phenomenon, cause the driving force of piezoelectric vibrator to have certain loss, the flow of pumping fluid is relatively little, and then affects its service behaviour and working efficiency.Based on above-mentioned deficiency, the present invention has designed a kind of piezoelectricity and has caused the fluid pumping apparatus that declines that shakes, and the working procedure passing in and out by ACTIVE CONTROL fluid can improve the output characteristics of microfluid pumping device.
summary of the invention:
The invention provides a kind of piezoelectricity and cause the fluid delivery system that declines that shakes, its composition comprises: gland 6, water inlet 2, water inlet control section 1, drive part 4, water outlet control section 8, osculum 5, stifle 7 and connecting bolt 3.Water inlet control section 1 is comprised of water inlet control valve 105, control valve seat 104, control valve pocket 103, support 102 and separation membrane 101; Water outlet control section 8 is comprised of outlet water control valve 804, control valve seat 805, control valve pocket 802, support 801 and separation membrane 803; Drive part 4 is comprised of pumping oscillator 405, seal ring 402, separation membrane 403, support 401 and pumping chamber 404.Between gland 6 and stifle 7 and support 102, by connecting bolt 3, be fixedly connected with, between pumping oscillator 405 and support 401, be lined with seal ring 402, the pellosil that separation membrane 403 is low elastic modulus, sticks on pumping oscillator 405.Compare with existing micro-fluid conveyer device, the present invention loses without fluid refluence phenomenon and driving force when normal work, can improve the output performance of microfluid pumping device and when high frequency flow retentivity of the present invention better, and when the error-polarity connection of two path control signal, can realize the reverse pumping of fluid.When experiment records frequency and is 70Hz, it is 140ml/min that piezoelectricity of the present invention causes the decline maximum output flow of fluid pumping apparatus of shaking.
Working principle of the present invention is as follows: when applying the high level square wave control signal of opening to water inlet control valve 105, outlet water control valve 804 applies the low level square wave control signal of closing, when simultaneous pumping oscillator 405 applies the sinusoidal drive signals of motion laterally, now pumping chamber 404 internal volumes increase, and realize the process that pumps into of fluid; When applying the low level square wave control signal of closing to water inlet control valve 105, outlet water control valve 804 applies the high level square wave control signal of opening, when simultaneous pumping oscillator 405 applies the sinusoidal drive signals of motion to the inside, now pumping chamber 404 internal volumes reduce, and realize the process that pumps of fluid.So repeat appeal action, can realize the uninterrupted pumping of fluid.
accompanying drawing explanation:
Fig. 1 is a kind of structural representation that has valve voltage source micro-fluid conveyer device;
Fig. 2 is that piezoelectricity of the present invention causes the structural representation of fluid pumping apparatus of declining that shakes;
Fig. 3 is the structural representation of control section of intaking in Fig. 2;
Fig. 4 is the structural representation of water outlet control section in Fig. 2;
Fig. 5 is the structural representation of pumping oscillator in Fig. 2.
embodiment:
Embodiment 1, with reference to Fig. 2, a kind of piezoelectricity involved in the present invention causes the fluid pumping apparatus that declines of shaking and is comprised of gland 6, water inlet 2, water inlet control section 1, drive part 4, water outlet control section 8, osculum 5, stifle 7 and connecting bolt 3.Gland 6 is fixedly connected with by connecting bolt 3 with support 102 with stifle 7, and wherein screw bolt and nut is standard piece.During work, liquid, by water inlet 2 inflow devices, flows out osculum 5 through water inlet control section 1, drive part 4 and water outlet control section 8, completes the whole flow process of fluid.Water inlet 2 is fixedly connected with intake pipe, completes liquid and by outside, is flowed into the process of pumping installations; Osculum 5 is fixedly connected with outlet pipe, completes liquid and flows out outside process by pumping installations.
Embodiment 2, with reference to Fig. 3 and Fig. 4, a kind of piezoelectricity involved in the present invention causes the fluid pumping apparatus that declines that shakes, and its control section comprises into water control section 1 and water outlet control section 8.Water inlet control section 1 is the control section of liquid inflow pumping installations, comprises water inlet control valve 105, control valve seat 104, controls valve pocket 103, support 102 and separation membrane 101.Between water inlet control valve 105 and control valve seat 104, be to control valve pocket 103, for the flow channel of liquid inletting device.Water outlet control section 8 is the control section of liquid outflow pumping installations, comprises outlet water control valve 804, control valve seat 805, controls valve pocket 802, support 801 and separation membrane 803.Between outlet water control valve 804 and control valve seat 805, be to control valve pocket 802, for the flow channel of liquid bleeder.Water inlet control valve 105 and outlet water control valve 804 are comprised of piezoelectric vibrator and metal substrate, the material of piezoelectric vibrator is lead titanate piezoelectric ceramics, the material of metal substrate is beryllium bronze, and piezoelectric vibrator sticks on the both sides of metal substrate by the two component metal special adhesive of epoxy.The pellosil that separation membrane 101 is low elastic modulus, sticks on metal substrate by the two component metal special adhesive of epoxy.The control mode of water inlet control valve 105 and outlet water control valve 804 adopts square-wave voltage control signal, and voltage phase difference is 180 degree, and when the error-polarity connection of the square wave control signal of water inlet control valve 105 and outlet water control valve 805, can realize the reverse pumping of fluid.
Embodiment 3, with reference to Fig. 5, a kind of piezoelectricity involved in the present invention causes the fluid pumping apparatus that declines that shakes, and its drive part 4 comprises pumping oscillator 405, seal ring 402, separation membrane 403, support 401 and pumping chamber 404.Pumping oscillator 405 is comprised of piezoelectric vibrator and metal substrate, and the material of piezoelectric vibrator is lead titanate piezoelectric ceramics, and the material of metal substrate is beryllium bronze, and piezoelectric vibrator sticks on the both sides of metal substrate by the two component metal special adhesive of epoxy.Between pumping oscillator 405 and support 401, be pumping chamber 404, when applying sine wave drive signal to pumping oscillator 405, the volume size in pumping chamber 404 alternately changes, and forms the driving force to liquid, makes liquid can do as requested directional flow.Between pumping oscillator 405 and support 401, be lined with seal ring 402, to prevent fluid seepage.The pellosil that separation membrane 101 is low elastic modulus, sticks on metal substrate by the two component metal special adhesive of epoxy.The driving signal of drive part 4 adopts sine voltage to drive signal, and during forward pumping, the voltage phase difference of water inlet control valve 105 and pumping oscillator 405 is 70 degree, and during reverse pumping, the voltage phase difference of water inlet control valve 105 and pumping oscillator 405 is 250 degree.
Claims (3)
1. a piezoelectricity causes to shake and declines fluid pumping apparatus by gland (6), water inlet (2), water inlet control section (1), drive part (4), water outlet control section (8), osculum (5), stifle (7) and connecting bolt (3) form, the support of pumping installations (102) is between gland (6) and stifle (7), surrounding is fixedly connected with by connecting bolt (3), during work, liquid is by water inlet (2) inflow device, through water inlet control section (1), drive part (4) and water outlet control section (8) flow out osculum (5), complete the whole flow process of fluid, water inlet (2) is fixedly connected with intake pipe, complete liquid and by outside, flowed into the process of pumping installations, osculum (5) is fixedly connected with outlet pipe, complete liquid and flow out outside process by pumping installations, water inlet control section (1) and water outlet control section (8) complete the control that liquid flows into and flows out, drive part (4) produces the driving force of fluid pumping, by applying the control signal of low and high level and driving signal, make the opening and closing initiatively of water inlet control valve (105) and outlet water control valve (804), piezoelectricity pumping oscillator (405) periodically inwardly and outwards moves, little cyclically-varying when large while producing of the volume in pumping chamber (404), the pumping capacity of formation to liquid, make liquid do directional flow according to job requirement.
2. a kind of piezoelectricity according to claim 1 causes the fluid pumping apparatus that declines that shakes, it is characterized in that into water control section (1) and water outlet control section (8), water inlet control section (1) is the control section of liquid inflow pumping installations, comprise water inlet control valve (105), control valve seat (104), control valve pocket (103), support (102) and separation membrane (101), it between water inlet control valve (105) and control valve seat (104), is control valve pocket (103), flow channel for liquid inletting device, water outlet control section (8) is the control section of liquid outflow pumping installations, comprise outlet water control valve (804), control valve seat (805), control valve pocket (802), support (801) and separation membrane (803), it between outlet water control valve (804) and control valve seat (805), is control valve pocket (802), flow channel for liquid bleeder, water inlet control valve (105) and outlet water control valve (804) are comprised of piezoelectric vibrator and metal substrate, wherein the material of piezoelectric vibrator is lead titanate piezoelectric ceramics, the material of metal substrate is beryllium bronze, piezoelectric vibrator sticks on the both sides of metal substrate by the two component metal special adhesive of epoxy, the pellosil that separation membrane (101) is low elastic modulus, by the two component metal special adhesive of epoxy, stick on metal substrate, the control mode of water inlet control valve (105) and outlet water control valve (804) adopts square-wave voltage control signal, and voltage phase difference is 180 degree, by apply square wave control signal on water inlet control valve (105) and outlet water control valve (104), can make its initiatively opening and closing, the inflow that has completed liquid initiatively and pump process, effectively containment liquid backflow phenomenon and the loss of reduction driving force, and when the error-polarity connection of the square wave control signal of water inlet control valve (105) and outlet water control valve (805), can realize the two-way pumping of fluid.
3. a kind of piezoelectricity according to claim 1 causes the fluid pumping apparatus that declines that shakes, it is characterized in that drive part (4), comprise pumping oscillator (405), seal ring (402), separation membrane (403), support (401) and pumping chamber (404), pumping oscillator (405) is comprised of piezoelectric vibrator and metal substrate, wherein the material of piezoelectric vibrator is lead titanate piezoelectric ceramics, the material of metal substrate is beryllium bronze, piezoelectric vibrator sticks on the both sides of metal substrate by the two component metal special adhesive of epoxy, it between pumping oscillator (405) and support (401), is pumping chamber (404), when applying sinusoidal drive signals to pumping oscillator (405), the volume size in pumping chamber (404) periodically alternately changes, the driving force of formation to liquid, make liquid do directional flow according to job requirement, between pumping oscillator (405) and support (401), be lined with seal ring (402), to prevent fluid seepage, the pellosil that separation membrane (101) is low elastic modulus, by the two component metal special adhesive of epoxy, stick on metal substrate, the driving signal of drive part (4) adopts sinusoidal voltage to drive signal, the voltage phase difference of water inlet control valve during forward pumping (105) and pumping oscillator (405) is 70 degree, during reverse pumping, the voltage phase difference of water inlet control valve (105) and pumping oscillator (405) is 250 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410142566.8A CN104153978A (en) | 2014-04-10 | 2014-04-10 | Piezoelectric-vibration type micro fluid pumping device |
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| CN201410142566.8A CN104153978A (en) | 2014-04-10 | 2014-04-10 | Piezoelectric-vibration type micro fluid pumping device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104481864A (en) * | 2014-12-12 | 2015-04-01 | 成都思达高科软件有限公司 | Automatic draining pump |
| CN105587615A (en) * | 2015-05-08 | 2016-05-18 | 长春工业大学 | Bending vibration sandwich active water jet propulsion unit and drive method thereof |
| CN105822527A (en) * | 2016-03-24 | 2016-08-03 | 北京理工大学 | Multifunctional fluid distribution system driven by piezoelectric ceramic and driving method thereof |
| CN107443920A (en) * | 2017-09-19 | 2017-12-08 | 吉林大学 | A kind of printer ink supply system with ink supply piezoelectric pump |
| CN108278197A (en) * | 2017-01-05 | 2018-07-13 | 研能科技股份有限公司 | Micro pressure power plant |
| CN109070075A (en) * | 2016-04-14 | 2018-12-21 | 惠普发展公司，有限责任合伙企业 | Microfluidic device with capillary chamber |
| US10619631B2 (en) | 2017-01-05 | 2020-04-14 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
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| CN203399014U (en) * | 2013-06-24 | 2014-01-15 | 重庆中镭科技有限公司 | Piezoelectric drive oscillator applied to piezoelectric pump and piezoelectric valve body |
| CN203770100U (en) * | 2014-04-10 | 2014-08-13 | 长春工业大学 | Piezoelectric vibrating type microfluid pumping device |
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2014
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104481864A (en) * | 2014-12-12 | 2015-04-01 | 成都思达高科软件有限公司 | Automatic draining pump |
| CN105587615A (en) * | 2015-05-08 | 2016-05-18 | 长春工业大学 | Bending vibration sandwich active water jet propulsion unit and drive method thereof |
| CN105822527A (en) * | 2016-03-24 | 2016-08-03 | 北京理工大学 | Multifunctional fluid distribution system driven by piezoelectric ceramic and driving method thereof |
| CN105822527B (en) * | 2016-03-24 | 2017-12-05 | 北京理工大学 | Utilize the multi-functional fluid distribution system and its driving method of Piezoelectric Ceramic |
| CN109070075A (en) * | 2016-04-14 | 2018-12-21 | 惠普发展公司，有限责任合伙企业 | Microfluidic device with capillary chamber |
| CN109070075B (en) * | 2016-04-14 | 2020-12-01 | 惠普发展公司，有限责任合伙企业 | Microfluidic device with capillary chamber |
| US11440008B2 (en) | 2016-04-14 | 2022-09-13 | Hewlett-Packard Development Company, L.P. | Microfluidic device with capillary chamber |
| CN108278197A (en) * | 2017-01-05 | 2018-07-13 | 研能科技股份有限公司 | Micro pressure power plant |
| US10619631B2 (en) | 2017-01-05 | 2020-04-14 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| CN107443920A (en) * | 2017-09-19 | 2017-12-08 | 吉林大学 | A kind of printer ink supply system with ink supply piezoelectric pump |
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Application publication date: 20141119 |