CN114962227A - Piezoelectric driving gas micropump with double vibration layers and preparation method thereof - Google Patents
Piezoelectric driving gas micropump with double vibration layers and preparation method thereof Download PDFInfo
- Publication number
- CN114962227A CN114962227A CN202210773597.8A CN202210773597A CN114962227A CN 114962227 A CN114962227 A CN 114962227A CN 202210773597 A CN202210773597 A CN 202210773597A CN 114962227 A CN114962227 A CN 114962227A
- Authority
- CN
- China
- Prior art keywords
- layer
- vibration
- cavity
- diameter
- micropump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 239000000463 material Substances 0.000 claims abstract description 19
- 239000003292 glue Substances 0.000 claims abstract description 14
- 239000003822 epoxy resin Substances 0.000 claims abstract description 11
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 11
- 238000000227 grinding Methods 0.000 claims abstract description 5
- 239000012530 fluid Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 7
- 238000005553 drilling Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 6
- 238000007650 screen-printing Methods 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 238000007731 hot pressing Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 2
- 229910052744 lithium Inorganic materials 0.000 claims description 2
- 238000004080 punching Methods 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 230000009977 dual effect Effects 0.000 claims 6
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract description 4
- 238000009713 electroplating Methods 0.000 abstract 1
- 238000003698 laser cutting Methods 0.000 abstract 1
- 238000007514 turning Methods 0.000 abstract 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 210000005069 ears Anatomy 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229920006335 epoxy glue Polymers 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000006213 oxygenation reaction Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/001—Noise damping
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a piezoelectric driving gas micropump with double vibration layers and a preparation method thereof. The gas micropump comprises a flow inlet layer, a vibration substrate layer, a shell layer, a first vibration layer, a cavity layer and a second vibration layer, wherein the flow inlet layer, the vibration substrate layer and the shell layer are sequentially stacked, the first vibration layer is fixed on the side, facing the flow inlet layer, of the vibration substrate layer, the cavity layer is fixed on the side, facing the shell layer, of the vibration substrate layer, and the second vibration layer is fixed on the side, facing the shell layer, of the cavity layer. The preparation method comprises the steps of carrying out operations such as laser cutting, grinding, turning, electroplating and the like on a material to obtain the structure of each layer, and then assembling the structure by using a conductive glue and an epoxy resin adhesive to obtain the gas micropump. This application constitutes two piezoelectric vibrator respectively through first vibration layer and vibration base plate layer, cavity layer and second vibration layer, makes the both sides on cavity layer all receive the influence on vibration layer, and the at utmost must change the volume on cavity layer, under the circumstances of guaranteeing the whole volume of gaseous micropump not obviously changing, increases gaseous micropump flow.
Description
Technical Field
The invention belongs to the technical field of gas micropumps, relates to a high-flow gas micropump with a double-layer piezoelectric material, and particularly relates to a piezoelectric driving gas micropump with a double vibration layer and a preparation method thereof.
Background
In recent years, with the continuous development of piezoelectric materials and Computer Numerical Control (CNC) precision machining, the structure and principle of the micropump are diversified more and more. The gas micropump using the piezoelectric material as the driving source is widely applied to a plurality of fields such as medicine transmission, fish culture and oxygenation, a beauty instrument, CPU heat dissipation and the like due to small volume, quick response and large flow, and shows wide development prospect.
The piezoelectric pumps studied at present are mainly divided into two major categories, a valved piezoelectric pump and a valveless piezoelectric pump. The valveless piezoelectric pump cannot work in an ultrasonic frequency band exceeding 20KHz due to the fact that the valveless piezoelectric pump is provided with a valve structure, noise is caused, macroscopic outflow is achieved by means of height difference of an upper cavity and a lower cavity or flow resistance difference of pipe walls of an inlet and an outlet, but the problems of complex instantaneous flow change, discontinuity and the like exist, and the flow is low.
In the comparison document 1(CN105240252B), the piezoelectric micropump device employs an elastic connecting piece bent at ninety degrees, and through simulation and theoretical stress analysis, although there is a flow increase compared with a common piezoelectric micropump, the elastic connecting piece and the periphery of the piezoelectric micropump still need to be bonded through silica gel, and an integrated structure is not achieved.
In the comparison document 2(CN114151317A), the piezoelectric micropump works with a single vibration layer, and the flow rate is low, and the structure is complex, so that the preparation process and the manufacturing cost are complex, and the application scenarios are greatly limited.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a piezoelectric driving gas micropump with double vibration layers and a preparation method thereof, wherein the volume of an internal cavity is increased under the condition that the volume of the gas micropump is not changed through the cooperation of the double vibration layers, so that the output flow is increased, the working frequency of the micropump is increased to be more than 20kHz through the design of a vibration elastic connecting piece, the frequency range which can be heard by human ears is avoided, and the noise is removed.
The utility model provides a piezoelectricity drive gas micropump with double-vibration layer, includes intake layer, vibration base plate layer and the shell layer that stacks gradually to and fix at the vibration base plate layer towards the first vibration layer of intake layer side, fix at the cavity layer of vibration base plate layer towards shell layer side, and fix at the second vibration layer of cavity layer towards shell layer side.
The vibration substrate layer comprises an edge fixing part, an elastic connecting piece and a central vibration part, and the vibration substrate layer is fixed with the inflow layer and the shell body layer through the edge fixing part and is fixed with the first vibration layer and the cavity body layer through the central vibration part. The elastic connecting piece is used for connecting the edge fixing part and the central vibrating part. The circulating channel between the edge fixing part and the central vibrating part is communicated with the through hole formed on the flow inlet layer to form an input flow channel of the pump body.
A cavity is arranged between the first vibration layer and the inflow layer, and a cavity is arranged between the second vibration layer and the outer shell layer. The edge of the cavity layer is fixed with the edge of the central vibration part, and a cavity is formed between the inner part and the central vibration part. And the circulation passages which are arranged on the cavity layer, the second vibration layer and the shell layer and are communicated with each other form an output flow passage of the pump body. The cavity layer is externally connected with a lead wire, so that the first vibration layer and the second vibration layer realize anisotropic vibration.
Preferably, the thickness of the elastic connecting piece and the central vibrating part is smaller than that of the edge fixing part on the side of the vibrating substrate layer facing the inflow layer, so that a cavity is formed between the first vibrating layer and the inflow layer.
Preferably, the edge portion is higher than the central portion on the side of the inflow layer facing the vibration substrate layer, so that a cavity is formed between the first vibration layer and the inflow layer.
Preferably, the device further comprises an O-shaped sealing ring fixed on the side surface of the outer shell layer facing the cavity layer.
Preferably, the O-ring has an inner diameter equal to an outer diameter of the second vibration layer.
Preferably, a plurality of elastic connecting pieces which are uniformly arranged and do not overlap with each other are arranged between the edge fixing part and the central vibrating part, and the elastic connecting pieces are not in a straight line shape.
Preferably, the elastic connecting piece comprises a first connecting part, a second connecting part and an elastic section. Wherein, the elastic section is arc-shaped. One end of the first connecting portion is connected with the central vibrating portion, and the other end of the first connecting portion is connected with one end of the elastic section. One end of the second connecting part is connected with the edge fixing part connected with the other end of the elastic section, and the other end of the second connecting part is connected with the edge fixing part.
Preferably, the edge of the case body layer is fixed to an edge fixing portion of the vibration substrate layer, and the thickness of the center portion is lower than that of the edge portion, so that a cavity is formed between the second vibration layer and the case body layer.
A manufacturing method of a piezoelectric driving gas micropump with double vibration layers specifically comprises the following steps:
(1) selecting a metal plate with the side length of 10-20 mm and the thickness of 0.5-2 mm, and laser-punching a plurality of through holes with the diameter of 0.5-2 mm on the surface to obtain the inflow layer.
(2) Selecting a metal plate with the side length of 10-20 mm and the thickness of 0.2-1 mm, grinding a circle with the diameter of 9-13 mm and the thickness of 0.2mm at the center of the surface of the metal plate, and then laser drilling a plurality of uniformly arranged flow passages at the edge of the circle to obtain the vibrating substrate layer.
(3) And (3) selecting a piezoelectric material with the diameter of 8-12 mm and the thickness of 0.1-0.3 mm as a first vibration layer, wherein single-component epoxy resin glue is utilized at the top of the first vibration layer to pass through a screen printing process and bond in concentric circles ground in the step (2), and the thickness of a glue layer is less than 20 micrometers.
(4) And printing a single-component high-viscosity epoxy resin adhesive at the edge of one surface of the vibration substrate layer, which is fixed with the first vibration layer, by using a high-mesh screen printing process, aligning the epoxy resin adhesive with the edge of the inflow layer, and then bonding the epoxy resin adhesive by using a high-temperature hot-pressing technology.
(5) Selecting a metal plate with the diameter of 8-12 mm and the thickness of 0.1-0.3 mm, grinding the center of the metal plate downwards, and then laser drilling a through hole with the diameter of 0.1-0.5 mm at the center of a circle to obtain a cavity layer. And the non-ground part of the cavity layer is bonded with the other surface of the vibration substrate layer by using single-component conductive glue through a precision dispenser, and the cavity layer is externally connected with a lead.
(6) The piezoelectric material with the diameter of 8 mm-12 mm, the thickness of 0.1 mm-0.3 mm and the diameter of a small hole in the middle of 0.2 mm-1 mm is selected as the second vibration layer. And after aligning the second vibration layer with the through hole on the surface of the cavity layer, bonding the second vibration layer with the cavity layer by using single-component epoxy resin glue, and connecting the upper part of the second vibration layer with the lower part of the first vibration layer by using a lead.
(7) Selecting an insulating material with the side length of 10 mm-20 mm, and performing laser drilling on a through hole with the diameter of 0.5 mm-2 mm at the center position to obtain the shell layer. The edges of the housing layer and the vibrating substrate layer are aligned and bonded.
The invention has the following beneficial effects:
1. when the double vibrating layers in the gas micropump positively displace, the volume of the cavity layer is increased, so that the pressure in the cavity layer is reduced, fluid flows into the cavity layer from the through hole in the surface of the second vibrating layer, the second vibrating layer is in contact with the O-shaped sealing ring, the output flow channel and the input flow channel are blocked, the fluid is sucked from the through hole in the surface of the outer shell layer and cannot escape to the input flow channel, and the fluid convection when the double vibrating layers work in a reciprocating mode is avoided, so that the stability of the one-way motion of the fluid can be improved. When the double vibration layers are in negative displacement, the volume of the cavity layer is reduced, so that the pressure in the cavity layer is increased, and the fluid is pumped out from the cavity layer. The high-frequency vibration is repeated, so that the pulse injection and the one-way high-quality flow delivery of the fluid are realized.
2. Through using double-deck piezoelectric material, make the both sides on cavity layer all receive the influence of vibration layer, the volume on furthest must changing cavity layer is guaranteeing that the whole volume of gas micropump is under the condition that does not obviously change, for the micropump based on single-deck piezoelectric material, increase flow.
3. The elastic connecting piece is used for connecting the central vibrating part and the edge fixing part, so that the fluid can move in a single direction, the stress of the vibrating substrate layer is reduced, the displacement output capacity of the vibrating substrate layer is improved, the working frequency of the device is improved to be more than 20kHz, the noise range beyond which the human ears can hear is exceeded, and the noise is removed. In addition, the thinning of the central vibrating portion and the elastic connecting member provides a space for bonding of the lower vibrating portion.
Drawings
FIG. 1 is a schematic cross-sectional view of a piezoelectric gas micropump having two vibration layers according to an embodiment;
FIG. 2 is a schematic view of an embodiment of an inflow layer;
FIG. 3 is a schematic illustration of an embodiment of a vibrating substrate layer;
FIG. 4 is a schematic view of a first vibration layer in the embodiment;
FIG. 5 is a schematic view of a cavity layer in an embodiment;
FIG. 6 is a schematic view of a second vibration layer in the embodiment;
FIG. 7 is a schematic diagram of an outer shell layer in an example;
FIG. 8 is a graph comparing flow output of a single vibration layer with that of a double vibration layer in the example;
fig. 9 is a graph comparing the performance of the vibrating substrate layer of the present invention with that of a conventional substrate layer in the examples.
Detailed Description
The invention is further explained below with reference to the drawings;
as shown in fig. 1, a piezoelectric-driven gas micropump having two vibration layers includes an inflow layer 100, a vibration substrate layer 103, and a casing layer 112 stacked in this order, and a first vibration layer 102 fixed to a side of the vibration substrate layer 103 facing the inflow layer 100, a cavity layer 106 fixed to a side of the vibration substrate layer 103 facing the casing layer 112, and a second vibration layer 108 fixed to a side of the cavity layer 106 facing the casing layer 112.
As shown in fig. 2, the length of the inflow layer 100 is 15mm, the thickness thereof is 1mm, and the material is one or a combination of more of stainless steel, copper, silver, aluminum alloy, and the like. The surface of the inflow layer 100 is provided with a plurality of uniformly distributed air inlets 101. The aperture of the air inlet hole 101 is 1 mm.
As shown in fig. 3, the length of the vibrating substrate layer 103 is 15mm, the thickness thereof is 0.5mm, and the material is one or a combination of more of stainless steel, copper, silver, aluminum alloy, and the like. The vibration base plate layer includes edge fixed part, central vibration portion and a plurality of evenly distributed and mutual non-overlapping elastic connection 104, and wherein the thickness of elastic connection 104 and central vibration portion is 0.3 mm. The elastic connection member 104 includes a first connection portion, a second connection portion, and an elastic section. Wherein, the elastic section is arc-shaped. One end of the first connecting portion is connected with the central vibrating portion, and the other end of the first connecting portion is connected with one end of the elastic section. One end of the second connecting part is connected with the edge fixing part connected with the other end of the elastic section, and the other end of the second connecting part is connected with the edge fixing part. The non-linear elastic connecting member 104 has elasticity, allowing the central vibrating portion of the vibrating substrate layer 103 to vibrate up and down with respect to the edge fixing portion. Furthermore, a flow path 105 may be formed between the central vibrating portion and the edge fixing portion, so that a difference in fluid flow velocity is generated while gas is circulated, thereby reducing the amplitude of the vibration significantly by applying a large pressure to the center of the first vibrating layer 102.
As shown in fig. 4, the first vibration layer 102 has a diameter of 10mm and a thickness of 0.2mm, and is made of a common piezoelectric material such as aluminum nitride, doped aluminum nitride, zinc oxide, lithium nickelate, or lead zirconate titanate. The edge of the first vibration layer 102 is bonded to the central vibration portion of the vibration substrate layer 103 after printing a single-component epoxy glue by a screen printing process. The thickness of the printed glue layer is less than 20 um. The edge fixing part of the vibration substrate layer 103 is bonded with the edge of the inflow layer 100 through epoxy resin glue, and the flow passage 105 is communicated with an air inlet 101 formed on the inflow layer 100 to form an input flow passage of the pump body. And a cavity is formed between the first vibration layer 102 and the inflow layer 100, so that the driving load of the piezoelectric material is reduced, and the flow rate, the pressure and the efficiency are further enhanced.
As shown in fig. 5, the diameter of the cavity layer 106 is 10mm, the thickness is 0.1mm, and a first air outlet 107 with a diameter of 0.2mm is opened at the center of the circle. One side of the cavity layer is flat, and the edge of the other side is convex upwards. The edge-protruding part is bonded to the central vibrating part on the other side of the vibrating substrate layer 103 by a conductive glue, which may be a conductive gel or a two-component copper-containing epoxy resin glue, so that a cavity is formed between the cavity layer 106 and the vibrating substrate layer 103.
As shown in fig. 6, the second vibration layer 108 is a piezoelectric material having a diameter of 10mm and a thickness of 0.2 mm. The circle center of the second vibration layer 108 is provided with a second air outlet with the diameter of 0.5 mm. The second vibration layer 108 is adhered to the surface of the cavity layer 106 by a single-component epoxy glue, and the second air outlet 109 and the first air outlet 107 are communicated with each other.
The first vibration layer 102 and the second vibration layer 108 are respectively located on two sides of the cavity layer 106, the cavity layer 106 is externally connected with a lead wire, so that the two layers are excited by the same size and the same frequency to realize anisotropic vibration, the vibration amplitude of the vibration layers can be amplified, and the driving performance is enhanced.
As shown in fig. 7, the side length of the outer casing layer 112 is 15mm, and a third air outlet 111 with a diameter of 1mm is opened at the center position. The inner side edge of the housing layer 112 is bonded to the edge fixing portion of the vibration substrate layer. An O-ring 110 having an inner diameter of 10mm for preventing gas leakage is fixed to the inner surface of the outer shell layer. The O-ring 110 and the second vibration layer 108 form a cavity. The outer shell layer 112 is selected from a material having a high coefficient of hardness, such as one or more of glass, silicon carbide, silicon nitride, or ceramic.
As shown in fig. 8, when only the second vibration layer 108 is adopted, the output flow rate of the micro pump is only 130ml/min, and when the double vibration layers, i.e., the first vibration layer 102 and the second vibration layer 108, are adopted, the flow rate output performance of the micro pump is greatly improved, and can reach 300 ml/min.
As shown in fig. 9, the operating frequency of the micropump with the hollowed-out vibration substrate layer 103 is much higher than that of a common substrate layer, which is mainly represented by using a periodic formula of a spring vibrator, and the resonant frequency of the micropump is improved by reducing the mass of the vibrator, and in addition, the design also reduces the stress of the vibrator during vibration to the maximum extent, so that the vibration amplitude is reduced by only 20% when the operating frequency of the vibrator is improved by 120%.
Wherein T represents a vibrator period; m represents the mass of the vibrator; k represents the stiffness coefficient of the vibrator.
The first vibration layer 102, the vibration substrate layer 103, the cavity layer 106 and the second vibration layer 108 respectively form two piezoelectric vibrators, and the piezoelectric effect of the piezoelectric material is utilized, that is, when an electric field is applied in the polarization direction of the dielectric medium, the dielectric medium can generate mechanical deformation or mechanical pressure in a certain direction, and when the external electric field is removed, the deformation or stress disappears, so that the piezoelectric vibrators can do periodic reciprocating motion, the pressure in the cavity of the cavity layer 106 is changed, and pressure difference is formed between the pressure and the input flow channel and the output flow channel to push the directional flow of fluid.
A rectangular wave signal having a peak-to-peak value of 20V and a first-order resonance frequency of the piezoelectric resonator is applied to the lower surface of the first vibration layer 102 and the upper surface of the second vibration layer 108 via a lead wire externally connected to the cavity layer 106.
When the first vibration layer 102 and the second vibration layer 108 receive the first half of the excitation signal, the second vibration layer 108 stretches in the radial direction to drive the upper surface of the cavity layer 106 to move upwards, and meanwhile, the first vibration layer 102 stretches in the radial direction to drive the lower surface of the cavity layer 106 to move downwards, and the first vibration layer and the second vibration layer move together to increase the volume in the cavity layer 106, so that gas enters the cavity layer 106 through the gas inlet hole 101, and a small amount of gas enters the cavity layer through the third gas outlet hole 111, and most of the gas flowing from the third gas outlet hole 111 flows into the cavity layer 106 due to the O-shaped sealing ring 110 arranged on the inner side surface of the shell layer 112, and cannot form convection with the gas flowing into the gas inlet hole 101.
When the first vibration layer 102 and the second vibration layer 108 receive the second half excitation signal, the second vibration layer 108 contracts in the radial direction to drive the upper surface of the cavity layer 106 to move downward, and meanwhile, the first vibration layer 102 also contracts in the radial direction to drive the lower surface of the cavity layer 106 to move upward, and the first vibration layer and the second vibration layer move together to reduce the volume in the cavity layer 106, so that the gas is pumped out from the cavity layer 106 in a large quantity.
During such reciprocating operation of air suction/air discharge, the air near the third air outlet hole 111 has a shearing action with higher intensity, due to the synthetic jet principle, a large number of reverse vortex pairs are formed at the position of the third air outlet hole 111, and during air suction in the next period, due to inertia, the vortex pair generated in the previous period is far away from the third air outlet hole 111, so that the air is not sucked back again. Continuous fluid drive of a valveless drive can be achieved using synthetic jet principles.
Claims (10)
1. A piezoelectric driven gas micropump with double vibration layers is characterized in that: the vibration isolation structure comprises an inflow layer (100), a vibration substrate layer (103) and a shell body layer (112) which are sequentially stacked, a first vibration layer (102) fixed on the vibration substrate layer (103) and facing to the side of the inflow layer (100), a cavity body layer (106) fixed on the vibration substrate layer (103) and facing to the side of the shell body layer (112), and a second vibration layer (108) fixed on the cavity body layer (106) and facing to the side of the shell body layer (112);
the vibration substrate layer (103) comprises an edge fixing part, an elastic connecting piece (104) and a central vibration part, and the vibration substrate layer (103) is fixed with the inflow layer (100) and the outer shell layer (112) through the edge fixing part and is fixed with the first vibration layer (102) and the cavity layer (106) through the central vibration part; the elastic connecting piece (104) is used for connecting the edge fixing part and the central vibrating part; a flow passage between the edge fixing part and the central vibrating part is communicated with a through hole formed on the flow inlet layer (100) to form an input flow passage of the pump body;
a cavity is arranged between the first vibration layer (102) and the inflow layer (100), and a cavity is arranged between the second vibration layer (108) and the outer shell layer (112); the edge of the cavity layer (106) is fixed with the edge of the central vibration part, and a cavity is formed between the inner part and the central vibration part; the circulation passages which are arranged on the cavity layer (106), the second vibration layer (108) and the shell layer (112) and are communicated with each other form an output flow passage of the pump body; during operation, the first vibration layer (102) and the second vibration layer (108) vibrate in different directions, so that the volume of the cavity inside the cavity layer (106) changes periodically.
2. A piezoelectric driven gas micropump having dual vibration layers as claimed in claim 1, wherein: the distance between the central vibration part and the elastic connecting piece (104) and the inflow layer (100) is larger than the distance between the edge fixing part and the inflow layer (100).
3. A piezoelectric driven gas micropump having dual vibration layers as claimed in claim 1, wherein: the edge fixing part and the central vibrating part comprise a plurality of elastic connecting pieces (104) which are uniformly arranged and do not overlap with each other.
4. A piezoelectric driven gas micropump having dual vibration layers according to claim 3, wherein: the elastic connecting piece (104) comprises a first connecting part, a second connecting part and an elastic section; wherein, the elastic section is in the shape of circular arc; one end of the first connecting part is connected with the central vibrating part, and the other end of the first connecting part is connected with one end of the elastic section; one end of the second connecting part is connected with the edge fixing part connected with the other end of the elastic section, and the other end of the second connecting part is connected with the edge fixing part.
5. A piezoelectric driven gas micropump having dual vibration layers as claimed in claim 1, wherein: the device also comprises an O-shaped sealing ring (110) which is fixed on the side surface of the outer shell layer (112) facing the cavity layer (106).
6. A piezoelectric driven gas micropump having dual vibration layers according to claim 5, wherein: the inner diameter of the O-shaped sealing ring (110) is the same as the outer diameter of the second vibration layer (108).
7. A piezoelectric driven gas micropump having dual vibration layers as claimed in claim 1, wherein: one surface of the shell body layer (112) is flat, the edge of the other surface of the shell body layer is convex, and the convex part is fixed with the edge fixing part of the vibration substrate layer (103).
8. A piezoelectric driven gas micropump having a double vibrating layer according to any one of claims 1 to 7, wherein: the working method comprises the following steps: through a lead externally connected to the cavity layer (106), a rectangular wave signal with a peak-to-peak value of 20V and under the first-order resonant frequency of the piezoelectric vibrator is synchronously applied to the surfaces of the first vibration layer (102) and the second vibration layer (108) which are far away from each other;
when the first vibration layer (102) and the second vibration layer (108) are subjected to the first half excitation signal, the second vibration layer (108) stretches along the radial direction to drive the cavity layer (106) to move upwards, meanwhile, the first vibration layer (102) stretches along the radial direction to drive the central vibration part to move downwards, the first vibration layer and the second vibration layer move together to increase the volume in the cavity layer (106), so that gas enters the cavity layer (106) from the through holes in the surface of the inflow layer (100), and a small amount of gas enters the cavity layer (106) from the through holes in the surface of the outer shell layer (112);
when the first vibration layer (102) and the second vibration layer (108) are subjected to a latter half excitation signal, the second vibration layer (108) contracts along the radial direction to drive the cavity layer (106) to move downwards, meanwhile, the first vibration layer (102) also contracts along the radial direction to drive the central vibration part to move upwards, and the first vibration layer and the second vibration layer move together to reduce the volume in the cavity layer (106) so that gas is pumped out from the cavity layer (106) in a large quantity;
the volume of the cavity layer (106) is continuously increased and reduced through the reciprocating opposite-direction movement of the first vibration layer (102) and the second vibration layer (108), and continuous fluid driving of the valveless driver is realized.
9. A preparation method of a piezoelectric driving gas micropump with double vibration layers is characterized in that: the method comprises the following steps of:
(1) selecting a metal plate with the side length of 10-20 mm and the thickness of 0.5-2 mm, and laser-punching a plurality of through holes with the diameter of 0.5-2 mm on the surface to obtain a flow inlet layer (100);
(2) selecting a metal plate with the side length of 10-20 mm and the thickness of 0.2-1 mm, grinding a circle with the diameter of 9-13 mm and the thickness of 0.2mm at the center of the surface of the metal plate, and then laser drilling a plurality of uniformly arranged flow passages at the edge of the circle to obtain a vibrating substrate layer (103);
(3) selecting a piezoelectric material with the diameter of 8-12 mm and the thickness of 0.1-0.3 mm as a first vibration layer (102), wherein single-component epoxy resin glue is utilized at the top of the first vibration layer to be in a concentric circle ground in the bonding step (2) through a screen printing process, and the thickness of a glue layer is less than 20 micrometers;
(4) printing single-component high-viscosity epoxy resin glue at the edge of one surface of a vibration substrate layer (103) on which a first vibration layer (102) is fixed by using a high-mesh screen printing process, aligning with the edge of an inflow layer (100), and then bonding by using a high-temperature hot-pressing technology;
(5) selecting a metal plate with the diameter of 8-12 mm and the thickness of 0.1-0.3 mm, downwards grinding the center of the metal plate, and then laser drilling a through hole with the diameter of 0.1-0.5 mm at the position of the center of a circle to obtain a cavity layer (106); the non-ground part of the cavity layer (106) is bonded with the other surface of the vibration substrate layer (103) by a precise dispenser by using single-component conductive glue; and externally connecting a lead on the cavity layer (106);
(6) selecting a piezoelectric material with the diameter of 8 mm-12 mm, the thickness of 0.1 mm-0.3 mm and the diameter of a small hole in the middle of 0.2 mm-1 mm as a second vibration layer (108); after the second vibration layer (108) is communicated with the through holes on the surface of the cavity layer (106), the second vibration layer (108) is bonded with the cavity layer (106) by using single-component epoxy resin glue;
(7) selecting an insulating material with the side length of 10 mm-20 mm, and performing laser drilling on a through hole with the diameter of 0.5 mm-2 mm at the center position to obtain a shell body layer (112); the edge of the housing layer (112) is aligned with the edge of the vibrating substrate layer (103) and then bonded thereto.
10. A method of manufacturing a piezoelectric-driven gas micropump having a double vibrating layer according to claim 9, wherein: the length of the inflow layer (100) is 15mm, and the thickness of the inflow layer is 1 mm; the length of the vibration substrate layer (103) is 15mm, and the thickness is 0.5 mm; the diameter of the first vibration layer (102) is 10mm, and the thickness is 0.2 mm; the diameter of the cavity layer (106) is 10mm, the thickness is 0.1mm, and the diameter of the surface through hole is 0.2 mm; the diameter of the second vibration layer (108) is 10mm, the thickness is 0.2mm, and the diameter of the surface through hole is 0.5 mm; the side length of the shell body layer (112) is 15mm, and the diameter of the surface through hole is 1 mm; the inner diameter of the O-shaped sealing ring (110) is 10 mm; the metal plate is one or a combination of more of stainless steel, copper, silver, aluminum and aluminum alloy; the piezoelectric material is one or a combination of more of aluminum nitride, doped aluminum nitride, zinc oxide, lithium nickelate and lead zirconate titanate; the material of the outer shell layer (112) is one or more of glass, silicon carbide, silicon nitride or ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210773597.8A CN114962227A (en) | 2022-07-01 | 2022-07-01 | Piezoelectric driving gas micropump with double vibration layers and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210773597.8A CN114962227A (en) | 2022-07-01 | 2022-07-01 | Piezoelectric driving gas micropump with double vibration layers and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114962227A true CN114962227A (en) | 2022-08-30 |
Family
ID=82972402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210773597.8A Pending CN114962227A (en) | 2022-07-01 | 2022-07-01 | Piezoelectric driving gas micropump with double vibration layers and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114962227A (en) |
-
2022
- 2022-07-01 CN CN202210773597.8A patent/CN114962227A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2090781B1 (en) | Piezoelectric micro-blower | |
| JP5012889B2 (en) | Piezoelectric micro blower | |
| JP5287854B2 (en) | Piezoelectric micro blower | |
| US10087923B2 (en) | Disc pump with advanced actuator | |
| CN100427759C (en) | Dual piezoelectric beam driven diaphram air pump | |
| US6071087A (en) | Ferroelectric pump | |
| WO2008069264A1 (en) | Piezoelectric pump | |
| JP4957480B2 (en) | Piezoelectric micro pump | |
| US20110280755A1 (en) | Pump, pump arrangement and pump module | |
| JP5776767B2 (en) | Fluid control device and pump connection method | |
| JP5429317B2 (en) | Piezoelectric micro pump | |
| CN114992098A (en) | Resonance excitation piezoelectric pump | |
| CN114962227A (en) | Piezoelectric driving gas micropump with double vibration layers and preparation method thereof | |
| CN217976535U (en) | Resonance excitation piezoelectric pump | |
| US20230287904A1 (en) | Actuator for a resonant acoustic pump | |
| CA2354076A1 (en) | Ferroelectric pump | |
| CN109931250B (en) | Series cavity array type micro piezoelectric gas compressor | |
| AU2021104830A4 (en) | A micro piezoelectric axial flow fan | |
| CN109695562A (en) | A kind of fluid pump and exciting element | |
| CN220487811U (en) | Miniature valveless piezoelectric pump | |
| CN102141031B (en) | In-plane modal circumferential traveling wave thin piezoelectric peristaltic pump | |
| CN116677591A (en) | Piezoelectric micropump capable of inhibiting internal vortex | |
| CN117189553A (en) | Piezoelectric micropump for increasing flow by utilizing synthetic jet principle | |
| JP2004332706A (en) | Micro pump | |
| Jalink Jr et al. | Ferroelectric Pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |