CN220487811U - Miniature valveless piezoelectric pump - Google Patents
Miniature valveless piezoelectric pump Download PDFInfo
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- CN220487811U CN220487811U CN202420096792.6U CN202420096792U CN220487811U CN 220487811 U CN220487811 U CN 220487811U CN 202420096792 U CN202420096792 U CN 202420096792U CN 220487811 U CN220487811 U CN 220487811U
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- piezoelectric element
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- top plate
- pump
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- 239000000919 ceramic Substances 0.000 description 12
- 239000012530 fluid Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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- Reciprocating Pumps (AREA)
Abstract
The utility model discloses a miniature valveless piezoelectric pump, which relates to the field of piezoelectric pumps and comprises a top plate, a piezoelectric element and a bottom plate which are sequentially arranged from top to bottom, wherein a cavity formed by clamping the top plate, the piezoelectric element and the bottom plate along the thickness direction forms a pump cavity, the piezoelectric element is of an annular structure, and the piezoelectric element vibrates along the thickness direction or along the radial direction. The utility model has simple structure, and the pump cavity can be formed by clamping the top plate, the piezoelectric element and the bottom plate along the thickness direction, thereby reducing the space occupation of additional accessories and improving the utilization of the piezoelectric element; meanwhile, the annular piezoelectric element can drive the top plate and the bottom plate to vibrate simultaneously, so that the amplitude is improved, the volume change of the pump cavity is improved, and the suction and discharge flow of the pump cavity is further improved.
Description
Technical Field
The utility model relates to the field of piezoelectric pumps, in particular to a miniature valveless piezoelectric pump.
Background
The piezoelectric pump is a device for converting electric energy into mechanical energy by using piezoelectric effect, and by applying an alternating current driving signal to piezoelectric ceramics, the piezoelectric ceramics with fixed periphery are driven by alternating voltage to make the piezoelectric ceramics generate mechanical vibration with the same frequency as the driving signal, so that the volume of a pump cavity is changed to generate a certain pressure difference between the inside and the outside of the cavity, and the mechanical vibration is converted into the movement and flowing effect of fluid, thereby achieving the purpose of pumping the fluid.
At present, a practical piezoelectric pump has a driving vibrator which is formed by attaching a solid round or square piezoelectric ceramic plate on one side of a metal vibrating diaphragm or an organic vibrating diaphragm, and meanwhile, a passive opening and closing one-way valve is arranged on an air inlet or an air outlet, or the effect of pumping is achieved by utilizing the flow resistance difference of the air inlet and the air outlet. However, these several methods have some problems: the solid round shape on the driving vibrator or the larger electrode surface of the square piezoelectric ceramic plate, so that the capacitance is relatively larger, which is not beneficial to reducing the power consumption; meanwhile, the vibration amplitude of the vibration film is limited, and the volume change of the pump cavity is small, so that the fluid change amount is small.
Disclosure of Invention
The utility model aims to provide a miniature valveless piezoelectric pump which solves the problems in the background technology.
The aim of the utility model is realized by the following technical scheme:
the miniature valveless piezoelectric pump comprises a top plate, a piezoelectric element and a bottom plate which are sequentially arranged from top to bottom, wherein a cavity formed by clamping the top plate, the piezoelectric element and the bottom plate in the thickness direction forms a pump cavity, the piezoelectric element is of an annular structure, and the piezoelectric element vibrates in the thickness direction or vibrates in the radial direction.
Further, when the piezoelectric element vibrates in the thickness direction, the bottom plate is of a disc-shaped structure with a side wall, the diameter of the outer ring of the bottom plate is smaller than or equal to that of the outer ring of the piezoelectric element, the diameter of the inner ring of the bottom plate is larger than that of the inner ring of the piezoelectric element, and the diameter of the top plate is larger than that of the inner ring of the piezoelectric element and smaller than that of the inner ring of the bottom plate.
Further, when the piezoelectric element vibrates in the radial direction, the bottom plate is of a circular plate-shaped structure, and the diameters of the top plate and the bottom plate are larger than the diameter of the inner ring of the piezoelectric element and smaller than or equal to the diameter of the outer ring of the piezoelectric element.
Further, an outflow port is arranged at the center of the top plate or the bottom plate, the top plate or the bottom plate is provided with an inflow port, and a plurality of inflow ports are circumferentially arrayed around the position corresponding to the outflow port.
The beneficial effects of the utility model are as follows:
1) The pump cavity can be formed by clamping the top plate, the piezoelectric element and the bottom plate in the thickness direction, so that the space occupation of additional accessories is reduced, and the utilization of the piezoelectric element is improved.
2) The annular piezoelectric element can drive the top plate and the bottom plate to vibrate simultaneously, so that the amplitude is improved, the volume change of the pump cavity is improved, and the suction and discharge flow of the pump cavity is further improved.
Drawings
Fig. 1 is an external perspective view of a micro piezoelectric pump according to example 1 of the present utility model.
Fig. 2 is an exploded perspective view of the micro piezoelectric pump shown in fig. 1.
Fig. 3 is a cross-sectional view of the micro piezoelectric pump shown in fig. 1 taken along the S-S line.
Fig. 4 is a schematic view of the micro piezoelectric pump of fig. 1 in a suction state.
Fig. 5 is a schematic view of the micro piezoelectric pump of fig. 1 in a discharged state.
Fig. 6 is an external perspective view of a micro piezoelectric pump according to example 2 of the present utility model.
Fig. 7 is an exploded perspective view of the micro piezoelectric pump shown in fig. 6.
Fig. 8 is a cross-sectional view of the micro piezoelectric pump shown in fig. 6 taken along line K-K.
Fig. 9 is a schematic view of the micro piezoelectric pump of fig. 6 in a suction state.
Fig. 10 is a schematic view of the micro piezoelectric pump of fig. 6 in a discharged state.
Fig. 11 is an external perspective view of a micro piezoelectric pump according to example 3 of the present utility model.
Fig. 12 is an exploded perspective view of the micro piezoelectric pump shown in fig. 11.
Fig. 13 is a cross-sectional view of the micro piezoelectric pump shown in fig. 11 taken along line N-N.
Fig. 14 is a schematic view of the micro piezoelectric pump of fig. 11 in a suction state.
Fig. 15 is a schematic view of the micro piezoelectric pump of fig. 11 in a discharged state.
Fig. 16 is an external perspective view of a micro piezoelectric pump according to example 4 of the present utility model.
Fig. 17 is an exploded perspective view of the micro piezoelectric pump shown in fig. 16.
Fig. 18 is a cross-sectional view of the micro piezoelectric pump shown in fig. 16 taken along line M-M.
Fig. 19 is a schematic view of the micro piezoelectric pump of fig. 16 in a suction state.
Fig. 20 is a schematic view of the micro piezoelectric pump of fig. 16 in a discharged state.
In the figures, 18-bottom plate, 24-outflow opening, 41-top plate, 46-piezoelectric element, 62-inflow opening.
Detailed Description
The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments, and it is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by a person skilled in the art without any inventive effort, are intended to be within the scope of the present utility model, based on the embodiments of the present utility model.
The ring-shaped piezoelectric element generally adopts piezoelectric ceramic materials such as PZT (lead zirconate titanate) and quartz as a ceramic layer, and a metal film such as silver, aluminum and the like is covered on the surface of the ceramic layer as an electrode layer for applying an electric field. The inverse piezoelectric effect is the basis for the operation of the annular piezoelectric element, and when a voltage is applied, the ceramic material undergoes a small deformation.
In the preparation process of the piezoelectric ceramic, the vibration of the annular piezoelectric ceramic along the thickness direction and the radial direction can be effectively realized by carefully designing and controlling parameters in the polarization process. When the direction of the electric field applied during the polarization is identical to the thickness direction of the annular piezoelectric ceramic sheet, polarization along the thickness direction occurs. Similarly, when the polarization direction coincides with the radial direction, vibration in the radial direction is easily induced. Whereas the maximum value of the piezoelectric effect in piezoelectric ceramics is usually in the polarization direction. Therefore, when an alternating voltage is applied to both ends of the electrode of the annular piezoelectric element polarized in the thickness direction, the annular piezoelectric element vibrates in the thickness direction; when an alternating voltage is applied across the electrodes of the radially polarized annular piezoelectric element, the annular piezoelectric element vibrates in the radial direction. The frequency and amplitude of the vibration of the piezoelectric element can be controlled by adjusting the frequency and amplitude of the applied voltage. In the case of a defined amplitude of the applied alternating voltage, a higher amplitude is obtained when the annular piezoelectric element is operated at the resonant frequency, so that the annular piezoelectric ceramic is preferentially operated at the resonant frequency during operation of the micro valveless piezoelectric pump.
Example 1
Referring to fig. 1-5, the micro valveless piezoelectric pump of the present embodiment has three main components, i.e., a top plate 41, a piezoelectric element 46, and a bottom plate 18, from top to bottom, and electrodes (not shown) for applying an alternating voltage to the piezoelectric element.
As shown in fig. 2, the piezoelectric element 46 has a ring-shaped structure, the piezoelectric element 46 is polarized in the thickness direction, the bottom plate 18 has a disk structure with side walls, one surface of the piezoelectric element 46 is connected to the top plate 41 by an adhesive such as epoxy resin, and the other surface of the piezoelectric element 46 is connected to the end surfaces of the side walls of the bottom plate 18 by an adhesive such as epoxy resin. The hollow portion of the piezoelectric element 46 communicates with the inside of the bottom plate 18, and a pump chamber of the present embodiment is formed by the top plate 41, the piezoelectric element 46, and the bottom plate 18.
Further, the diameter of the top plate 41 is larger than the diameter of the inner ring of the piezoelectric element 46 and is smaller than or equal to the diameter of the outer ring of the piezoelectric element 46, and a vibrator is formed by the piezoelectric element 46 and the top plate 41. The piezoelectric element 46 drives the top plate 41 to vibrate in the thickness direction, so that the volume of the pump chamber changes to suck and discharge fluid. The pump chamber volume can be made to vary widely when an appropriate alternating voltage is applied such that the annular piezoelectric element 46 is at odd-order resonance of first order, third order, etc., so an alternating voltage that causes the piezoelectric element 46 to operate at odd-order resonance is preferentially selected as the excitation.
Further, as shown in fig. 3, the inflow port and the outflow port are both provided on the top plate, wherein the outflow port 24 is provided in the center portion of the top plate, a plurality of inflow ports 62 are circumferentially arrayed around the outflow port 24, and the inflow ports 62 are distributed in a range having a radius smaller than the diameter of the inner ring of the piezoelectric element 46 with the pump chamber axis C as the center.
Further, as shown in fig. 3, the inflow port 62 in the present embodiment is a through hole with equal diameter, the outflow port 24 is a through hole with reduced diameter, and the size of the opening of the outflow port 24 from the inside of the pump chamber to the outside of the pump chamber is gradually reduced. When fluid passes through the reducing area, a series of flow phenomena including flow speed change, pressure change, energy conversion and the like can occur, which is beneficial to improving the discharge amount, flow speed and pressure of the piezoelectric pump, removing the check valve structure and simplifying the micro piezoelectric pump structure. In this embodiment, the discharge pressure and the discharge speed can be increased by the reduced diameter outlet 24.
Example 2
On the basis of embodiment 1, referring to fig. 6 to 10, the difference from embodiment 1 is that the inflow port 62 and the outflow port 24 of this embodiment are both provided on the base plate, wherein the outflow port 24 is provided in the central portion of the base plate, a plurality of inflow ports 62 are circumferentially arrayed around the outflow port 24, and the inflow ports 62 are distributed in a range of a radius smaller than the diameter of the inner ring of the piezoelectric element 46 with the pump chamber axis C as the center.
Example 3
Referring to fig. 11-15, the micro valveless piezoelectric pump of the present embodiment has three main components, i.e., a top plate 41, a piezoelectric element 46, and a bottom plate 18, from top to bottom, and electrodes (not shown) for applying an alternating voltage to the piezoelectric element.
As shown in fig. 12, the piezoelectric element 46 has a ring-shaped structure, the bottom plate 18 has a disk-shaped structure, one surface of the piezoelectric element 46 is connected to the top plate 41 by an adhesive such as epoxy resin, and the other surface of the piezoelectric element 46 is connected to the bottom plate 18 by an adhesive such as epoxy resin. The top plate 41, the piezoelectric element 46 and the bottom plate 18 form a pump cavity of the embodiment, and the piezoelectric elements 46 with different thicknesses and different inner circle radiuses can be selected to adjust the volume of the pump cavity according to actual requirements.
Further, the diameters of the top plate 41 and the bottom plate 18 are the same, and the diameters of the inner rings of the top plate 41 and the bottom plate 18 larger than the diameter of the piezoelectric element 46 are smaller than or equal to the diameter of the outer ring of the piezoelectric element 46, and the vibrator is formed by the piezoelectric element 46 and the top plate 41, while the piezoelectric element 46 also forms a vibrator with the bottom plate 18. The piezoelectric element 46 drives the top plate 41 and the bottom plate 18 to extend or retract along the radial direction, so that the volume of the pump cavity changes to suck and discharge fluid. The application of a suitable alternating voltage causes the annular piezoelectric element 46 to be in a resonant mode which causes a large change in pump chamber volume, and therefore preferentially causes the piezoelectric element 46 to operate in a resonant state.
As shown in fig. 13, further, wherein the outflow port 24 is provided at the center portion of the bottom plate, the inflow port 62 is provided on the top plate, the inflow port 62 is arranged at the outer ring of the position corresponding to the outflow port 24, and the inflow port 62 is distributed in a range of a radius smaller than the diameter of the inner ring of the piezoelectric element 46 with the pump chamber axis C as the center.
Example 4
On the basis of embodiment 3, referring to fig. 16 to 20, the difference from embodiment 3 is that the inflow port 62 and the outflow port 24 of the present embodiment are both provided on the ceiling, wherein the outflow port 24 is provided in the center portion of the ceiling, a plurality of inflow ports 62 are circumferentially arrayed around the outflow port 24, and the inflow ports 62 are distributed in a range of a radius smaller than the diameter of the inner ring of the piezoelectric element 46 with the pump chamber axis C as the center.
It will be appreciated that there are other arrangements of the inflow port 62 and the outflow port 24 in this embodiment, for example, the outflow port 24 is disposed on a top plate, the inflow port 62 is disposed on a bottom plate, and the number of the inflow port 62 and the outflow port 24 can be freely selected according to actual conditions, and the opening shapes of the inflow port 62 and the outflow port 24 can be circular, rectangular or other polygons.
The foregoing is merely a preferred embodiment of the utility model, and it is to be understood that the utility model is not limited to the form disclosed herein but is not to be construed as excluding other embodiments, but is capable of numerous other combinations, modifications and environments and is capable of modifications within the scope of the inventive concept, either as taught or as a matter of routine skill or knowledge in the relevant art. And that modifications and variations which do not depart from the spirit and scope of the utility model are intended to be within the scope of the appended claims.
Claims (4)
1. Miniature valveless piezoelectric pump, its characterized in that: the pump comprises a top plate, a piezoelectric element and a bottom plate which are sequentially arranged from top to bottom, wherein a cavity formed by clamping the top plate, the piezoelectric element and the bottom plate in the thickness direction forms a pump cavity, the piezoelectric element is of an annular structure, and the piezoelectric element vibrates in the thickness direction or along the radial direction.
2. The micro valveless piezoelectric pump according to claim 1, wherein: when the piezoelectric element vibrates along the thickness direction, the bottom plate is of a disc-shaped structure with a side wall, the diameter of the outer ring of the bottom plate is smaller than or equal to that of the outer ring of the piezoelectric element, the diameter of the inner ring of the bottom plate is larger than that of the inner ring of the piezoelectric element, and the diameter of the top plate is larger than that of the inner ring of the piezoelectric element and smaller than that of the inner ring of the bottom plate.
3. The micro valveless piezoelectric pump according to claim 1, wherein: when the piezoelectric element vibrates along the radial direction, the bottom plate is of a circular plate structure, and the diameters of the top plate and the bottom plate are larger than the diameter of the inner ring of the piezoelectric element and smaller than or equal to the diameter of the outer ring of the piezoelectric element.
4. The micro valveless piezoelectric pump according to claim 1, wherein: the top plate or the bottom plate is provided with an outflow opening at the center, the top plate or the bottom plate is provided with inflow openings, and a plurality of inflow openings are circumferentially arrayed around the position corresponding to the outflow opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420096792.6U CN220487811U (en) | 2024-01-16 | 2024-01-16 | Miniature valveless piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420096792.6U CN220487811U (en) | 2024-01-16 | 2024-01-16 | Miniature valveless piezoelectric pump |
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| Publication Number | Publication Date |
|---|---|
| CN220487811U true CN220487811U (en) | 2024-02-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202420096792.6U Active CN220487811U (en) | 2024-01-16 | 2024-01-16 | Miniature valveless piezoelectric pump |
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| Country | Link |
|---|---|
| CN (1) | CN220487811U (en) |
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- 2024-01-16 CN CN202420096792.6U patent/CN220487811U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240430 Address after: 528248 Innovation Plaza B1705-5, 2007 Pingshan Avenue, Liulian Community, Pingshan Street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Morin Technology (Shenzhen) Co.,Ltd. Country or region after: China Address before: No. 403, Building 5, No. 87, Jindu Section, Airport Road, Xihanggang Street, Shuangliu District, Chengdu, Sichuan 610000 Patentee before: Dolphin Lezhi Technology (Chengdu) Co.,Ltd. Country or region before: China Patentee before: Morin Technology (Shenzhen) Co.,Ltd. |
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| TR01 | Transfer of patent right |