CN114992098A - Resonance excitation piezoelectric pump - Google Patents
Resonance excitation piezoelectric pump Download PDFInfo
- Publication number
- CN114992098A CN114992098A CN202210659810.2A CN202210659810A CN114992098A CN 114992098 A CN114992098 A CN 114992098A CN 202210659810 A CN202210659810 A CN 202210659810A CN 114992098 A CN114992098 A CN 114992098A
- Authority
- CN
- China
- Prior art keywords
- pump
- piezoelectric
- liquid inlet
- pump body
- liquid outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 title claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 131
- 239000002184 metal Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000000919 ceramic Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/102—Disc valves
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a resonance excitation piezoelectric pump, which comprises: quality piece, piezoelectric vibrator, check valve and the pump body, its characterized in that: the piezoelectric vibrator includes: the piezoelectric ceramic is fixed on the mass block, and the mass block and the piezoelectric pump form a resonance system; adjusting the mass of the mass block to enable the piezoelectric pump to vibrate at an ideal resonant frequency; the output performance of the piezoelectric pump is increased. The liquid inlet flow channel and the liquid outlet flow channel are inclined and arranged in a splayed manner, are bilaterally symmetrical relative to the central axis of the piezoelectric pump, and the output of the piezoelectric pump is smoother; corresponding to the radian of the metal substrate when the metal substrate is bent downwards. By adopting the arc-shaped pump cavity and the mass block, one end of the piezoelectric vibrator pump cavity can be completely attached to the pump cavity when being bent and deformed, so that the volume of a dead angle is reduced, and the output performance of the piezoelectric pump is improved.
Description
Technical Field
The present invention relates to piezoelectric pumps, and more particularly to a resonant excitation piezoelectric pump.
Background
The research on piezoelectric pumps has been continuously researched and focused by research institutions around the world from the 70 s of the 20 th century to the present. With the development of science and technology and the emergence of new materials and new processes, piezoelectric pump technology has gradually matured and permeated in various fields. However, the piezoelectric pump has many problems so far:
1. at present, the piezoelectric pump has poor stopping performance, so that the pressure is difficult to increase.
2. The existing piezoelectric pump has dead angle volume, so that the performance output of the piezoelectric pump is unstable.
Disclosure of Invention
The present invention has been made to solve the above problems, and an object of the present invention is to provide a resonance excitation piezoelectric pump;
a resonant excitation piezoelectric pump comprising: quality piece 1, piezoelectric vibrator, check valve and the pump body, piezoelectric vibrator include: the piezoelectric ceramic 21, the metal substrate 22, the mass block 1 are fixed on the piezoelectric ceramic 21 to form a resonance system;
the check valve is an integrated valve sheet body 5; the pump body include: a lower pump body 31, an upper pump body 32; the upper end of the lower pump body 31 is provided with an embedded groove 311; the upper pump body 32 is embedded in the embedding groove 311; the integrated valve sheet body 5 is arranged between the split surfaces of the lower pump body 31 and the upper pump body 32; the upper end surface of the upper pump body 32 is provided with a groove 322; the piezoelectric vibrator is packaged at the groove 322 to form a pump cavity 4;
the lower pump body 31 is provided with a liquid inlet flow channel 313, a liquid outlet valve chamber 314, a liquid inlet and a liquid outlet; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet channel 313 is opposite to the liquid inlet valve chamber 323; the outlet flow passage 324 is opposite to the outlet valve chamber 314;
the integrated valve sheet body 5 is provided with a first valve sheet 521 and a second valve sheet 522; the first valve plate 521 is located between the liquid inlet flow channel 313 and the liquid outlet valve chamber 314; the second valve plate 522 is located between the outlet flow passage 324 and the outlet valve chamber 314.
The liquid inlet flow channel 313 and the liquid outlet flow channel 324 are inclined, arranged in a splayed shape and are bilaterally symmetrical relative to the central axis of the piezoelectric pump.
The groove 322 is arc-shaped and corresponds to the arc of the metal substrate 22 when it is bent downward.
The valve plate is made of flexible thin film materials.
The valve plate is a cantilever beam valve.
The present invention provides a resonant excitation piezoelectric pump, comprising: the mass block 1, the piezoelectric vibrator, the pump body and the integrated valve body 5; the pump body includes: a lower pump body 31, an upper pump body 32; the upper pump body 32 is embedded in the lower pump body 31; the integrated valve body 5 is arranged between the split surfaces of the lower pump body 31 and the upper pump body 32; the upper end surface of the upper pump body 32 is provided with a groove 322; the piezoelectric vibrator is packaged at the groove 322 to form a pump cavity 4; the lower pump body 31 is provided with a liquid inlet flow channel 313, a liquid outlet valve chamber 314, a liquid inlet and a liquid outlet; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet channel 313 is opposite to the liquid outlet valve chamber 314; the outlet flow passage 324 is opposite to the outlet valve chamber 314; the integrated valve sheet body 5 is provided with a first valve sheet 521 and a second valve sheet 522; the first valve plate 521 is positioned between the liquid inlet flow passage 313 and the liquid inlet valve chamber 323; the second valve plate 522 is located between the outlet flow passage 324 and the outlet valve chamber 314; the mass block and the piezoelectric pump form a resonance system, so that the piezoelectric pump vibrates at an ideal resonance frequency; the output performance of the piezoelectric pump is increased.
The invention has the beneficial effects that:
the novel piezoelectric pump excited in the resonance state provided by the invention has a novel structure, and particularly, the concave spherical arc-shaped pump cavity and the mass block. When one end of the piezoelectric vibrator pump cavity is bent and deformed, the piezoelectric vibrator pump cavity can be completely attached to the pump cavity, the dead angle volume is reduced, and the output performance of the piezoelectric pump is improved. The mass block and the piezoelectric pump form a resonance system, and the resonance state of the whole resonance system can be changed by changing the mass of the mass block, so that the resonance frequency of the piezoelectric pump is changed, and the piezoelectric pump vibrates under an ideal resonance frequency. The inclined plane of the water inlet and outlet of the piezoelectric pump is symmetrical about the central axis of the piezoelectric pump, and the effect of specular reflection is formed when fluid enters the pump cavity as shown in a graph of four alpha = beta, so that the output performance of the piezoelectric pump is improved, and the output of the piezoelectric pump is smoother.
Drawings
Fig. 1 is a schematic structural view of a resonant excitation piezoelectric pump according to the present invention, in which a liquid inlet and a liquid outlet are disposed at the bottom;
fig. 2 is a schematic structural view of a resonant excitation piezoelectric pump according to the present invention, in which a liquid inlet and a liquid outlet are disposed at two sides;
fig. 3 is a schematic diagram of a resonant system of a resonant-excited piezoelectric pump according to the present invention.
FIG. 4 is a schematic diagram illustrating the working principle of a valve plate of a resonant excitation piezoelectric pump according to the present invention;
FIG. 5 is a schematic diagram of the operation of a conventional piezoelectric pump;
in the figure: the pump comprises a mass block 1, a piezoelectric ceramic 21, a metal substrate 22, a lower pump body 31, an upper pump body 32, an embedded groove 311, a positioning flange 312, a liquid inlet flow channel 313, a liquid outlet valve chamber 314, a positioning groove 321, a groove 322, a liquid inlet valve chamber 323, a liquid outlet flow channel 324, a pump chamber 4, an integrated valve body 5, a positioning notch 51, a first valve plate 521 and a second valve plate 522.
Detailed Description
Embodiment 1 a resonance excitation piezoelectric pump
Referring to fig. 1, a resonant excitation piezoelectric pump comprises: the mass block 1, the piezoelectric vibrator, the pump body and the integrated valve body 5;
the piezoelectric vibrator includes: piezoelectric ceramic 21, metal substrate 22; the piezoelectric ceramic 21 is bonded to the metal substrate 22;
the mass block 1 is welded on the piezoelectric ceramic of the piezoelectric vibrator to form a resonance system;
the pump body include: a lower pump body 31, an upper pump body 32; a liquid inlet and a liquid outlet are arranged on the lower pump body 31; the liquid inlet and the liquid outlet are positioned on the lower end surface of the lower pump body 31;
the pump body is provided with a liquid inlet flow passage, a liquid inlet valve chamber, a liquid outlet flow passage and a liquid outlet valve chamber, and the flow passages and the valve chambers are respectively arranged on the split surfaces of the lower pump body 31 and the upper pump body 32;
the upper end of the lower pump body 31 is provided with an embedded groove 311; one side of the embedding groove 311 is provided with a positioning flange 312;
a positioning groove 321 is formed in one side of the lower end face of the upper pump body 32; the upper pump body 32 is embedded in the embedding groove 311, and the positioning flange 312 is butted with the positioning groove 321; the outer vertical surface and the bottom end surface of the upper pump body 32 can be tightly contacted with the inner vertical surface and the upper end surface of the embedded groove 311, namely the upper pump body 32 is in interference fit with the embedded groove 321;
one end of the integrated valve sheet body 5 is provided with a positioning notch 51; the integrated valve sheet body 5 is arranged on the inner end surface of the embedding groove 321 and is positioned through the positioning notch 51;
a groove 322 is arranged on the upper end surface of the upper pump body 32; the metal substrate 22 is packaged at the groove 322 to form a pump cavity 4;
the groove 322 is arc-shaped and corresponds to the arc of the metal substrate 22 when it is bent downward.
The upper end surface of the integrated valve sheet body 5 is tightly contacted with the lower end surface of the upper pump body 32; the lower end face of the integrated valve sheet body 5 is tightly contacted with the upper end face in the embedded groove 311;
the integrated valve sheet body 5 is provided with at least 2 valve sheets; the two valve plates are respectively: the first valve plate 521, the second valve plate 522, the first valve plate 521 and the second valve plate 522 are cantilever beam valves made of flexible thin film materials;
a liquid inlet flow channel 313 and a liquid outlet valve chamber 314 are arranged in the lower pump body 31; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet is communicated with a liquid inlet flow channel 313; the liquid outlet is communicated with the liquid outlet valve chamber 314;
the liquid inlet channel 313 is opposite to the liquid inlet valve chamber 323, and the first valve plate 521 is positioned between the liquid inlet channel 313 and the liquid inlet valve chamber 323; the first valve plate 521 can completely block the liquid inlet flow channel 313;
the liquid inlet flow channel 313 and the liquid outlet flow channel 324 are inclined, arranged in a splayed manner and are bilaterally symmetrical relative to the central axis of the piezoelectric pump.
The outlet flow passage 324 is opposite to the outlet valve chamber 314, and the second valve plate 522 is located between the outlet flow passage 324 and the outlet valve chamber 314; the second valve piece 522 can completely block the liquid outlet channel 324.
Embodiment 2A resonance excitation piezoelectric pump
Referring to fig. 2, a resonant excitation piezoelectric pump comprises: the mass block 1, the piezoelectric vibrator, the pump body and the integrated valve body 5 are arranged in the pump body;
the mass block 1, the piezoelectric vibrator and the integrated valve body 5 are the same as the mass block 1, the piezoelectric vibrator and the integrated valve body 5 in the embodiment 1;
the piezoelectric vibrator includes: piezoelectric ceramic 21, metal substrate 22; the piezoelectric ceramic 21 is bonded to the metal substrate 22; the mass block 1 is welded on the piezoelectric ceramic of the piezoelectric vibrator to form a resonance system;
the pump body include: a lower pump body 31, an upper pump body 32; a liquid inlet and a liquid outlet are arranged on the lower pump body 31; the liquid inlet and the liquid outlet are positioned on the end surfaces of two sides of the lower pump body 31;
a liquid inlet flow channel 313 and a liquid outlet valve chamber 314 are also arranged in the lower pump body 31; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet is communicated with a liquid inlet flow channel 313; the liquid outlet is communicated with the liquid outlet valve chamber 314; the liquid inlet, the liquid inlet flow channel 313, the liquid outlet valve chamber 314 and the liquid outlet are on the same axis;
the liquid inlet flow channel 313 and the liquid outlet flow channel 324 are inclined, arranged in a splayed manner and are bilaterally symmetrical relative to the central axis of the piezoelectric pump.
The groove 322 is arc-shaped and corresponds to the arc of the metal substrate 22 when it is bent downward.
A liquid inlet flow channel 313 and a liquid outlet valve chamber 314 are arranged in the lower pump body 31; the upper pump body 32 is also provided with a liquid inlet valve chamber 323 and a liquid outlet flow passage 324; the liquid inlet is communicated with a liquid inlet flow channel 313; the liquid outlet is communicated with the liquid outlet valve chamber 314;
the upper end of the lower pump body 31 is provided with an embedded groove 311; one side of the embedding groove 311 is provided with a positioning flange 312;
a positioning groove 321 is formed in one side of the lower end face of the upper pump body 32; the upper pump body 32 is embedded in the embedding groove 311, and the positioning flange 312 is butted with the positioning groove 321; the outer vertical surface and the bottom end surface of the upper pump body 32 can be tightly contacted with the inner vertical surface and the upper end surface of the embedded groove 311, namely the upper pump body 32 is in interference fit with the embedded groove 321;
one end of the integrated valve sheet body 5 is provided with a positioning notch 51; the integrated valve sheet body 5 is arranged on the inner end surface of the embedding groove 321 and is positioned through the positioning notch 51;
a groove 322 is arranged on the upper end surface of the upper pump body 32; the metal substrate 22 is packaged at the groove 322 to form a pump cavity;
the upper end face of the integrated valve sheet body 5 is in close contact with the lower end face of the upper pump body 32; the lower end face of the integrated valve sheet body 5 is tightly contacted with the upper end face in the embedded groove 311;
the integrated valve sheet body 5 is provided with at least 2 valve sheets; the two valve plates are respectively: the first valve plate 521, the second valve plate 522, the first valve plate 521 and the second valve plate 522 are cantilever beam valves made of flexible thin film materials;
the liquid inlet channel 313 is opposite to the liquid inlet valve chamber 323, the first valve plate 521 is positioned between the liquid inlet channel 313 and the liquid inlet valve chamber 323, and the first valve plate 521 can completely block the liquid inlet channel 313;
the outlet flow passage 324 is opposite to the outlet valve chamber 314, the second valve plate 522 is located between the outlet flow passage 324 and the outlet valve chamber 314, and the second valve plate 522 can completely block the outlet flow passage 324.
The working principle is as follows:
when a positive voltage of an external electric field acts on a piezoelectric vibrator, the piezoelectric vibrator bends upwards, and the volume of a pump cavity 4 is increased; the first valve plate 521 bends toward the inside of the liquid inlet valve chamber 323, so that a liquid flow passage between the liquid inlet channel 313 and the liquid inlet valve chamber 521 is opened, and liquid flows into the pump chamber 4 from the liquid inlet; meanwhile, the second valve plate 522 closes and blocks the outlet flow passage 324, and the outlet flow passage 324 is cut off from the liquid flow in the outlet valve chamber 314; completing the liquid pumping; when the negative voltage of the external electric field acts on the piezoelectric vibrator, the piezoelectric vibrator bends downwards; the volume of the pump chamber 4 becomes smaller; the first valve plate 521 closes and blocks the liquid inlet flow channel 313, and the liquid inlet flow channel 313 and the liquid inlet valve chamber 323 are stopped from liquid flowing; the second valve sheet 522 opens and blocks the liquid outlet channel 324, opens the liquid outlet channel 324 and the liquid outlet valve chamber 314 to allow the liquid in the pump chamber 4 to be pumped out from the liquid outlet;
a piezoelectric pump is characterized in that a piezoelectric vibrator is continuously excited by positive and negative voltages, and liquid is introduced into a pump cavity 4 from a liquid inlet and continuously splashed out from a liquid outlet.
Claims (7)
1. A resonant excitation piezoelectric pump comprising: quality piece (1), piezoelectric vibrator, check valve and the pump body, its characterized in that: the piezoelectric vibrator includes: the piezoelectric resonator comprises piezoelectric ceramics (21), a metal substrate (22) and a mass block (1), wherein the mass block (1) is fixed on the piezoelectric ceramics (21) to form a resonance system.
2. A resonant excitation piezoelectric pump as claimed in claim 1, wherein: the check valve is an integrated valve sheet body (5); the pump body include: a lower pump body (31) and an upper pump body (32); the upper end of the lower pump body (31) is provided with an embedded groove (311); the upper pump body (32) is embedded in the embedded groove (311); the integrated valve sheet body (5) is arranged between the split surfaces of the lower pump body (31) and the upper pump body (32); the upper end surface of the upper pump body (32) is provided with a groove (322); the piezoelectric vibrator is packaged at the groove (322) to form a pump cavity (4);
the lower pump body (31) is provided with a liquid inlet flow channel (313), a liquid outlet valve chamber (314), a liquid inlet and a liquid outlet; the upper pump body (32) is also provided with a liquid inlet valve chamber (323) and a liquid outlet flow passage (324); the liquid inlet flow channel (313) is opposite to the liquid inlet valve chamber (323); the liquid outlet channel (324) is opposite to the liquid outlet valve chamber (314);
the integrated valve sheet body (5) is provided with a first valve sheet (521) and a second valve sheet (522); the first valve plate (521) is positioned between the liquid inlet flow channel (313) and the liquid inlet valve chamber (323); the second valve plate (522) is positioned between the liquid outlet channel (324) and the liquid outlet valve chamber (314).
3. A resonant excitation piezoelectric pump as claimed in claim 2, wherein: the groove (322) is arc-shaped and corresponds to the radian of the metal substrate (22) when the metal substrate bends downwards.
4. A resonant excitation piezoelectric pump as claimed in claim 1, 2 or 3, wherein: the pump body liquid inlet flow channel (313) and the pump body liquid outlet flow channel (324) are inclined, arranged in a splayed manner and are bilaterally symmetrical relative to the central axis of the piezoelectric pump.
5. A resonant excitation piezoelectric pump as claimed in claim 4, wherein: the liquid inlet is communicated with a liquid inlet flow channel (313); the liquid outlet is communicated with the liquid outlet valve chamber (314); the liquid inlet, the liquid inlet flow channel (313), the liquid outlet valve chamber (314) and the liquid outlet are on the same axis.
6. A resonant excitation piezoelectric pump as claimed in claim 5, wherein: the valve plate is made of flexible thin film materials.
7. A resonant excited piezoelectric pump according to claim 6, wherein: the valve plate is a cantilever beam valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210659810.2A CN114992098A (en) | 2022-06-13 | 2022-06-13 | Resonance excitation piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210659810.2A CN114992098A (en) | 2022-06-13 | 2022-06-13 | Resonance excitation piezoelectric pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114992098A true CN114992098A (en) | 2022-09-02 |
Family
ID=83033150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210659810.2A Pending CN114992098A (en) | 2022-06-13 | 2022-06-13 | Resonance excitation piezoelectric pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114992098A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115523123A (en) * | 2022-10-28 | 2022-12-27 | 汉得利（常州）电子股份有限公司 | Diaphragm, mounting method, piezoelectric vibrator driving method and piezoelectric pump |
| CN115822933A (en) * | 2022-12-23 | 2023-03-21 | 吉林大学 | Piezoelectric jet pump |
| CN116658400A (en) * | 2023-08-01 | 2023-08-29 | 常州威图流体科技有限公司 | Fluid conveying device, liquid cooling heat dissipation module and micro-fluidic chip |
-
2022
- 2022-06-13 CN CN202210659810.2A patent/CN114992098A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115523123A (en) * | 2022-10-28 | 2022-12-27 | 汉得利（常州）电子股份有限公司 | Diaphragm, mounting method, piezoelectric vibrator driving method and piezoelectric pump |
| CN115822933A (en) * | 2022-12-23 | 2023-03-21 | 吉林大学 | Piezoelectric jet pump |
| CN116658400A (en) * | 2023-08-01 | 2023-08-29 | 常州威图流体科技有限公司 | Fluid conveying device, liquid cooling heat dissipation module and micro-fluidic chip |
| CN116658400B (en) * | 2023-08-01 | 2023-09-29 | 常州威图流体科技有限公司 | Fluid conveying device, liquid cooling heat dissipation module and micro-fluidic chip |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114992098A (en) | Resonance excitation piezoelectric pump | |
| US10900480B2 (en) | Disc pump with advanced actuator | |
| AU2016200869B2 (en) | Pump with disc-shaped cavity | |
| US10087923B2 (en) | Disc pump with advanced actuator | |
| US7654283B2 (en) | Check valve and pump including check valve | |
| KR101088943B1 (en) | Piezoelectric micro-blower | |
| US9217426B2 (en) | Pump, pump arrangement and pump module | |
| AU2012312898B2 (en) | Dual -cavity pump | |
| JP2008038829A (en) | Piezoelectric pump and piezoelectric vibrator | |
| CN217976535U (en) | Resonance excitation piezoelectric pump | |
| CN204663827U (en) | A kind of resonant iris pump driven based on circular piezoelectric twin lamella | |
| JP3531027B2 (en) | Micro pumps and pump systems | |
| WO2011095795A1 (en) | Disc pump and valve structure | |
| JP2009097393A (en) | Piezoelectric micro blower | |
| JPS61171891A (en) | Piezo-electric pump | |
| US20230287904A1 (en) | Actuator for a resonant acoustic pump | |
| JP2018040351A (en) | Miniature fluid control device | |
| JP2003139064A (en) | Small pump | |
| JP2008303774A (en) | Diaphragm pump | |
| CN110762225A (en) | Rectangular piezoelectric vibrator driven micro-fluid valve | |
| JP2011190733A (en) | Ultrasonic standing wave-driven micropump | |
| CN114382683B (en) | Double-resonance piezoelectric pump | |
| CN114962227A (en) | Piezoelectric driving gas micropump with double vibration layers and preparation method thereof | |
| JPH02245482A (en) | Piezoelectric micropump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |