CN110762225A - Rectangular piezoelectric vibrator driven micro-fluid valve - Google Patents
Rectangular piezoelectric vibrator driven micro-fluid valve Download PDFInfo
- Publication number
- CN110762225A CN110762225A CN201810830773.0A CN201810830773A CN110762225A CN 110762225 A CN110762225 A CN 110762225A CN 201810830773 A CN201810830773 A CN 201810830773A CN 110762225 A CN110762225 A CN 110762225A
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- China
- Prior art keywords
- flexible
- valve
- piezoelectric vibrator
- fluid inlet
- elastic suspension
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
Abstract
The invention relates to a rectangular piezoelectric vibrator driven microfluid valve, which comprises: rectangle piezoelectric vibrator (1), flexible support (2), disk seat (3), elasticity suspension (4), flexible valve plug (5) and valve gap (6), wherein: a fluid inlet and outlet channel is processed on the valve seat; the lower end face of the flexible support is adhered to the valve seat through epoxy resin glue, and the rectangular piezoelectric vibrator is adhered to the upper end face of the flexible support; the elastic suspension is adhered to the bottoms of the grooves of the two flexible valve plugs; the flexible valve plug is arranged right above the fluid inlet and used for controlling the on-off of fluid; when the rectangle piezoelectric vibrator circular telegram, its reciprocal bending vibration can produce flexible deformation in the horizontal direction, drives the flexible support of rather than being connected and the flexible deformation of horizontal direction of elastic suspension, arouses flexible valve stopper along vertical direction up-and-down motion, reaches the purpose of opening and closing the valve, simultaneously, has carried out the flexible displacement of the level of rectangle piezoelectric vibrator and has enlargied, has promoted the flow control scope of valve.
Description
Technical Field
The invention belongs to a flow valve in the field of fluid driving and control, and particularly relates to a rectangular piezoelectric vibrator driven microfluidic valve.
Background
In the whole liquid and air pressure system and related application equipment, the valve is used as an important element in the system to realize the control of fluid pressure, flow and flow direction, and directly influences the whole working process and working performance of the liquid and air pressure system. The requirements for valves in traditional applications are mainly to be suitable for high pressure, large flow output and accurate control. However, in the last two decades, with the rapid development of micro (nano) electromechanical systems (MEMS/NEMS), a new field called micro (nano) fluids has been created. Micro-miniature instruments and even micro-nano-scale control and output elements, such as micro (nano) fluid valves, micro (nano) fluid pumps, micro (nano) compressors, etc., are often required in microfluidic technology. The piezoelectric actuators are mainly used in micro-fluid systems and are mainly focused on miniature stop valves or on-off valves. The piezoelectric vibrator has high frequency response, high output precision and low power consumption, but the output displacement is small, and the modulation range of the flow of the valve is greatly limited.
Disclosure of Invention
In order to solve the problem that the flow modulation range of a valve is limited due to the fact that the output displacement of a piezoelectric vibrator in an existing rectangular piezoelectric vibrator driven microfluidic valve is small, the rectangular piezoelectric vibrator driven microfluidic valve is provided and comprises a rectangular piezoelectric vibrator (1), a flexible support (2), a valve seat (3), an elastic suspension (4), a flexible valve plug (5) and a valve cover (6).
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention discloses a rectangular piezoelectric vibrator driven microfluidic valve, which comprises a rectangular piezoelectric vibrator (1), a flexible support (2), a valve seat (3), an elastic suspension (4), a flexible valve plug (5) and a valve cover (6), wherein:
a fluid inlet (31) and a fluid outlet (32) are arranged on the valve seat (3), and the fluid inlet (31) is positioned in the central position of the valve seat (3); the two flexible supports (2) are arranged on the upper surface of the valve seat (3) and are symmetrical relative to the fluid inlet (31); the rectangular piezoelectric vibrators (1) are bonded on the upper end surfaces of the two flexible supports (2); grooves (21) are uniformly formed in one sides, close to the fluid inlet (6), of the two flexible supports (2), and the grooves (21) are located on the upper portion of the two flexible supports (2); the elastic suspension (4) is arranged in a groove (21) on the two flexible supports (2), and the length of the elastic suspension (4) is larger than the distance between the bottom surfaces of the grooves of the two flexible supports (2); a flexible valve plug mounting hole (41) is formed in the central part of the elastic suspension (4), and the flexible valve plug (5) is fixed in the flexible valve plug mounting hole (41); the flexible valve plug (5) is sufficiently flexible to be arranged directly above the fluid inlet (31) in order to function better as a closure for the fluid passage.
The piezoelectric vibrator (1) adopts a single-chip piezoelectric vibrator formed by sticking one piece of piezoelectric thin material (11) on an elastic substrate (12) or a double-chip piezoelectric vibrator formed by sticking two pieces of piezoelectric thin material (11) on two sides of the elastic substrate (12).
During the use, let in alternating voltage for the piezoelectric vibrator, can drive rectangle piezoelectric vibrator reciprocal bending vibration, simultaneously, can produce flexible deformation in its horizontal direction, drive the flexible support of rather than being connected and the flexible deformation of the horizontal direction of elastic suspension, arouse flexible valve stopper along vertical direction up-and-down motion, reach the purpose of opening and closing the valve, simultaneously, enlarge the flexible displacement of the level of rectangle piezoelectric vibrator, promoted the flow control scope of valve.
Drawings
Fig. 1 is a cross-sectional view of a rectangular piezoelectric vibrator actuated microfluidic valve of the present invention.
Fig. 2 is a cross-sectional view of a flexible mount of a rectangular piezoelectric vibrator actuated microfluidic valve of the present invention.
Fig. 3 is a cross-sectional view of the elastic suspension of a rectangular piezoelectric vibrator actuated microfluidic valve of the present invention.
Detailed Description
Referring to fig. 1, 2 and 3, the rectangular piezoelectric vibrator driven microfluidic valve of the present invention is composed of a rectangular piezoelectric vibrator (1), a flexible support (2), a valve seat (3), an elastic suspension (4), a flexible valve plug (5) and a valve cover (6), wherein:
the upper end face of the flexible support (2) is adhered with the piezoelectric vibrator (1) through epoxy resin, and the lower end face of the flexible support is adhered and fixed on the valve seat (3); the elastic suspension (4), the flexible valve plug (5) and the flexible support (2) are respectively processed, and the elastic suspension (5) is fixed in a groove (21) of the flexible support (2) after processing; the flexible valve plug (5) is arranged right above the fluid inlet (31), and when the flexible valve plug (5) is arranged, the center line of the fluid inlet (6) is coincided with the center line of the flexible valve plug, so that the valve closing characteristic is good.
The piezoelectric vibrator (1) adopts a single-chip piezoelectric vibrator formed by sticking a piece of piezoelectric sheet material (11) on an elastic substrate (12), and electrodes (not shown in the figure) are arranged on the outer surface of the piezoelectric sheet material (11).
During the use, let in alternating voltage for the piezoelectric vibrator, can drive rectangle piezoelectric vibrator reciprocal bending vibration, simultaneously, can produce flexible deformation in its horizontal direction, drive the flexible support of rather than being connected and the flexible deformation of the horizontal direction of elastic suspension, arouse flexible valve stopper along vertical direction up-and-down motion, reach the purpose of opening and closing the valve, simultaneously, enlarge the flexible displacement of the level of rectangle piezoelectric vibrator, promoted the flow control scope of valve.
Claims (2)
1. A rectangular piezoelectric vibrator actuated microfluidic valve comprising: the piezoelectric vibrator comprises a rectangular piezoelectric vibrator (1), a flexible support (2), a valve seat (3), an elastic suspension (4), a flexible valve plug (5) and a valve cover (6), wherein a fluid inlet (31) and a fluid outlet (32) are arranged on the valve seat (3), and the fluid inlet (31) is located at the center of the valve seat (3); the two flexible supports (2) are arranged on the upper surface of the valve seat (3) and are symmetrical relative to the fluid inlet (31); the rectangular piezoelectric vibrators (1) are bonded on the upper end surfaces of the two flexible supports (2); grooves (21) are uniformly formed in one sides, close to the fluid inlet (6), of the two flexible supports (2), and the grooves (21) are located on the upper portion of the two flexible supports (2); the elastic suspension (4) is arranged in a groove (21) on the two flexible supports (2), and the length of the elastic suspension (4) is larger than the distance between the bottom surfaces of the grooves of the two flexible supports (2); a flexible valve plug mounting hole (41) is formed in the central portion of the elastic suspension (4), and the flexible valve plug (5) is fixed in the flexible valve plug mounting hole (41).
2. The rectangular piezoelectric vibrator actuated microfluidic valve of claim 1, wherein: the piezoelectric vibrator (1) adopts a single-chip piezoelectric vibrator formed by sticking one piece of piezoelectric thin material (11) on an elastic substrate (12) or a double-chip piezoelectric vibrator formed by sticking two pieces of piezoelectric thin material (11) on two sides of the elastic substrate (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810830773.0A CN110762225A (en) | 2018-07-26 | 2018-07-26 | Rectangular piezoelectric vibrator driven micro-fluid valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810830773.0A CN110762225A (en) | 2018-07-26 | 2018-07-26 | Rectangular piezoelectric vibrator driven micro-fluid valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110762225A true CN110762225A (en) | 2020-02-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810830773.0A Pending CN110762225A (en) | 2018-07-26 | 2018-07-26 | Rectangular piezoelectric vibrator driven micro-fluid valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110762225A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112196754A (en) * | 2020-10-04 | 2021-01-08 | 长春工业大学 | Integrative valve piezoelectric pump based on rhombus mechanism of enlargiing |
-
2018
- 2018-07-26 CN CN201810830773.0A patent/CN110762225A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112196754A (en) * | 2020-10-04 | 2021-01-08 | 长春工业大学 | Integrative valve piezoelectric pump based on rhombus mechanism of enlargiing |
| CN112196754B (en) * | 2020-10-04 | 2022-06-17 | 长春工业大学 | Integrative valve piezoelectric pump based on rhombus mechanism of enlargiing |
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