CN208967170U - A kind of circular piezoelectric vibrator driving microfluidic valve - Google Patents
A kind of circular piezoelectric vibrator driving microfluidic valve Download PDFInfo
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- CN208967170U CN208967170U CN201821188368.5U CN201821188368U CN208967170U CN 208967170 U CN208967170 U CN 208967170U CN 201821188368 U CN201821188368 U CN 201821188368U CN 208967170 U CN208967170 U CN 208967170U
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- piezoelectric vibrator
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- valve
- circular piezoelectric
- flexible support
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Abstract
The utility model relates to a kind of circular piezoelectric vibrators to drive microfluidic valve.It include: valve seat (1), flexible support (2), resilient suspension (3), circular piezoelectric vibrator (4) and flexible valve plug (5), in which: the flexible support is hollow circuit cylinder, and inner sidewall is machined with annular groove；The circular piezoelectric vibrator is bonded in flexible valve end face beyond the Great Wall；The resilient suspension is arranged in the annular groove；The central part of the resilient suspension is disposed with flexible valve plug mounting hole, and the flexible valve plug is fixed in the flexible valve plug mounting hole；When circular piezoelectric vibrator is powered, while its cyclic bending vibrates, dilatation can be generated in the horizontal direction, drive the horizontal direction dilatation of flexible support and resilient suspension connected to it, cause flexible valve plug to move up and down along the vertical direction, achievees the purpose that open and close valve, simultaneously, the horizontal extension displacement of circular piezoelectric vibrator is exaggerated, the flow adjustment range of valve is improved.
Description
Technical field
The utility model belongs to the flow valve of fluid driving and control field, and in particular to a kind of circular piezoelectric vibrator driving
Microfluidic valve.
Background technique
In entire liquid, baric systerm and related application equipment, valve is realized as the critical elements in the system to fluid
The control of pressure, flow and flow direction directly affects the whole work process and working performance of liquid, baric systerm.Tradition application
Mainly it is suitble to the requirement of valve high pressure, big flow output and accurate control in field.However in the past twenty years, adjoint
The rapid development of micro- (receiving) Mechatronic Systems (MEMS/NEMS), produce referred to as micro- (receiving) fluid in a new field.Miniflow
In body technique, control and the output element of the instrument even micro/nano level of microminiature are generally required, such as micro- (receiving) fluid valve, micro-
(receiving) fluid pump, micro- (receiving) compressor etc..Piezoelectric actuator applies the cut-off that microminiature is concentrated mainly in microfluid at present
On valve or switch valve.The frequency response of piezoelectric vibrator is high, output accuracy is high, small power consumption, but its output displacement is small, to the tune of the flow of valve
Range processed has very big limitation.
Summary of the invention
In order to solve the flow modulation of the small caused valve of piezoelectric vibrator output displacement in current driving type piezoelectric actuator microfluidic valve
The problem of being limited in scope proposes a kind of circular piezoelectric vibrator driving microfluidic valve, and the driving type piezoelectric actuator microfluidic valve is by valve seat
(1), flexible support (2), resilient suspension (3), circular piezoelectric vibrator (4) and flexible valve plug (5) are constituted, when circular piezoelectric vibrator is logical
When electric, cyclic bending vibrate while, dilatation can be generated in the horizontal direction, drive flexible support connected to it and
The horizontal direction dilatation of resilient suspension, causes flexible valve plug to move up and down along the vertical direction, achievees the purpose that open and close valve, together
When, the horizontal extension displacement of circular piezoelectric vibrator is exaggerated, improves the flow adjustment range of valve, and circular piezoelectric shakes
For the opposite rectangle piezoelectric vibrator of son, High power output, the power for being transmitted to flexible valve plug also be will increase, and improve the leakproofness of valve
Energy.
To achieve the goals above, the utility model uses following technical scheme:
A kind of circular piezoelectric vibrator of the utility model drives microfluidic valve, including valve seat (1), flexible support (2), elastic suspended
Frame (3), circular piezoelectric vibrator (4) and flexible valve plug (5), in which:
Fluid inlet (11) and fluid outlet (12) are disposed on the valve seat (1), the fluid inlet (11) is located at institute
State the center of valve seat (1)；The flexible support (2) is hollow circuit cylinder, and the middle section of outboard sidewalls is machined with interior respectively
Side wa ll circle arc groove (21) and lateral wall arc groove (22), and on its inner sidewall arc groove (21) and be machined with annular recessed
Slot (23), and the annular groove (23) is located at the top half arc position of inner sidewall arc groove (21)；The flexible branch
Frame (2) is identical as the valve seat (1) outer diameter, is connected to the upper surface of the valve seat (1)；Circular piezoelectric vibrator (4) bonding
In the flexible support (2) upper surface, seal cavity is formed together with the flexible support (2)；The resilient suspension (3) is arranged in
In annular groove (23) on the flexible support (2)；The central part of the resilient suspension (3) is disposed with flexible valve plug installation
The flexible valve plug (5) is fixed in the flexible valve plug mounting hole (31) by hole (31).
The circular piezoelectric vibrator (4) uses to be pasted on elastic base plate (42) by a piece of piezoelectric sheet material (41) and be formed
Single-chip piezoelectric vibrator, or the twin lamella pressure that elastic base plate (42) two sides are formed is pasted by two panels piezoelectric sheet material (41)
Electric tachometer indicator.
When work/in use, while cyclic bending vibrates, meeting exists when being passed through alternating voltage to circular piezoelectric vibrator
Horizontal direction generates dilatation, drives the horizontal direction dilatation of flexible support and resilient suspension connected to it, draws
It plays flexible valve plug to move up and down along the vertical direction, achievees the purpose that open and close valve, meanwhile, by the horizontal extension position of circular piezoelectric vibrator
For shifting is exaggerated, and improves the flow adjustment range of valve, and circular piezoelectric vibrator is with respect to rectangle piezoelectric vibrator, power output
Greatly, the power for being transmitted to flexible valve plug also will increase, and improve the sealing performance of valve.
Detailed description of the invention
Fig. 1 is a kind of cross-sectional view of circular piezoelectric vibrator driving microfluidic valve of the utility model.
Fig. 2 is that a kind of circular piezoelectric vibrator of the utility model drives isometric test chart of the microfluidic valve from mid-sectional when.
Fig. 3 is a kind of cross-sectional view of the flexible support of circular piezoelectric vibrator driving microfluidic valve of the utility model.
Fig. 4 be a kind of flexible support of the utility model circular piezoelectric vibrator driving microfluidic valve from mid-sectional when etc.
Axis side view.
Fig. 5 is a kind of isometric test chart of the resilient suspension of circular piezoelectric vibrator driving microfluidic valve of the utility model.
Fig. 6 is a kind of isometric test chart of the flexible valve plug of circular piezoelectric vibrator driving microfluidic valve of the utility model.
Specific embodiment
According to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6, a kind of the utility model circular piezoelectric vibrator driving microfluidic valve be by
Valve seat (1), flexible support (2), resilient suspension (3), circular piezoelectric vibrator (4) and flexible valve plug (5) are constituted, in which:
Fluid inlet (11) and fluid outlet (12) are disposed on the valve seat (1), the fluid inlet (11) is located at institute
State the center of valve seat (1)；The flexible support (2) is hollow circuit cylinder, and the middle section of outboard sidewalls is machined with interior respectively
Side wa ll circle arc groove (21) and lateral wall arc groove (22), and on its inner sidewall arc groove (21) and be machined with annular recessed
Slot (23), and the annular groove (23) is located at the top half arc position of inner sidewall arc groove (21)；The flexible branch
Frame (2) is identical as the valve seat (1) outer diameter, is connected to the upper surface of the valve seat (1)；Circular piezoelectric vibrator (4) bonding
In the flexible support (2) upper surface, seal cavity is formed together with the flexible support (2)；The resilient suspension (3) is arranged in
In annular groove (23) on the flexible support (2)；The central part of the resilient suspension (3) is disposed with flexible valve plug installation
The flexible valve plug (5) is fixed in the flexible valve plug mounting hole (31) by hole (31).
The circular piezoelectric vibrator (4) uses to be pasted on elastic base plate (42) by a piece of piezoelectric sheet material (41) and be formed
Single-chip piezoelectric vibrator, or the twin lamella pressure that elastic base plate (42) two sides are formed is pasted by two panels piezoelectric sheet material (41)
Electric tachometer indicator.
When work/in use, while cyclic bending vibrates, meeting exists when being passed through alternating voltage to circular piezoelectric vibrator
Horizontal direction generates dilatation, drives the horizontal direction dilatation of flexible support and resilient suspension connected to it, draws
It plays flexible valve plug to move up and down along the vertical direction, achievees the purpose that open and close valve, meanwhile, by the horizontal extension position of circular piezoelectric vibrator
For shifting is exaggerated, and improves the flow adjustment range of valve, and circular piezoelectric vibrator is with respect to rectangle piezoelectric vibrator, power output
Greatly, the power for being transmitted to flexible valve plug also will increase, and improve the sealing performance of valve.
Claims (2)
1. a kind of circular piezoelectric vibrator drives microfluidic valve, comprising: valve seat (1), flexible support (2), resilient suspension (3), circle
Piezoelectric vibrator (4) and flexible valve plug (5), in which: it is disposed with fluid inlet (11) and fluid outlet (12) on the valve seat (1),
The fluid inlet (11) is located at the center of the valve seat (1)；The flexible support (2) is hollow circuit cylinder, outboard sidewalls
Middle section be machined with inner sidewall arc groove (21) and lateral wall arc groove (22) respectively, and it is recessed in its inner sidewall circular arc
It is machined with annular groove (23) again on slot (21), and the annular groove (23) is located at the upper half of inner sidewall arc groove (21)
Divide arc position；The flexible support (2) is identical as the valve seat (1) outer diameter, is connected to the upper surface of the valve seat (1)；Institute
It states circular piezoelectric vibrator (4) and is bonded in the flexible support (2) upper surface, form seal cavity together with the flexible support (2)；
The resilient suspension (3) is arranged in the annular groove (23) on the flexible support (2) Nei；The center of the resilient suspension (3)
Part is disposed with flexible valve plug mounting hole (31), and the flexible valve plug (5) is fixed in the flexible valve plug mounting hole (31).
2. circular piezoelectric vibrator according to claim 1 drives microfluidic valve, it is characterised in that: the circular piezoelectric vibrator
(4) it uses and the single-chip piezoelectric vibrator formed on elastic base plate (42) is pasted by a piece of piezoelectric sheet material (41), or by two
Piece piezoelectric sheet material (41) is pasted onto the bi-morph piezo-electric oscillator of elastic base plate (42) two sides formation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821188368.5U CN208967170U (en) | 2018-07-26 | 2018-07-26 | A kind of circular piezoelectric vibrator driving microfluidic valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821188368.5U CN208967170U (en) | 2018-07-26 | 2018-07-26 | A kind of circular piezoelectric vibrator driving microfluidic valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208967170U true CN208967170U (en) | 2019-06-11 |
Family
ID=66749032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821188368.5U Active CN208967170U (en) | 2018-07-26 | 2018-07-26 | A kind of circular piezoelectric vibrator driving microfluidic valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208967170U (en) |
-
2018
- 2018-07-26 CN CN201821188368.5U patent/CN208967170U/en active Active
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