CN105201796A - Piezoelectric peristaltic micropump - Google Patents
Piezoelectric peristaltic micropump Download PDFInfo
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- CN105201796A CN105201796A CN201510716308.0A CN201510716308A CN105201796A CN 105201796 A CN105201796 A CN 105201796A CN 201510716308 A CN201510716308 A CN 201510716308A CN 105201796 A CN105201796 A CN 105201796A
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- separate mesh
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- fluid passage
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Abstract
A piezoelectric peristaltic micropump comprises a matrix and a piezoelectric executor; the matrix is provided with two fluid channels, one of which serves as a start point of a conveying route and the other of which serves as an end point of the conveying route; the piezoelectric executor mainly consists of a piezoelectric layer, an upper electrode, a lower electrode and an elastic layer; the lower electrode fully covers the piezoelectric layer, the upper electrode, the piezoelectric layer, the lower electrode and the elastic layer are arranged from top to bottom in sequence, an outer frame part of the elastic layer and the base are sealed and fixed, the region in the outer frame part of the elastic layer is a pump cavity part, and the upper electrode, the lower electrode and piezoelectric layer are positioned in the region of the pump cavity part. The upper electrode consists of multiple separation electrode modules equidistantly arrayed along the conveying route. The piezoelectric peristaltic micropump has the advantages that the structure is simple and fluid can bidirectionally flow.
Description
Technical field
The invention belongs to microelectromechanical systems field, relate to Micro Fluid Transfer and control technique, especially relate to the miniature peristaltic pump that a kind of piezo-electric sheet drives liquid stream.
Technical background
In recent years, MEMS(Micro-Electro-MechanicalSystem) be inherit micromechanism, microsensor, micro actuator and signal transacting and control circuit even interface, communicate and power supply and microdevice integrally or system, be based on microelectronic, micromechanics and materials science, study, design, manufacture the micro device with specific function.Micromachining technology is utilized to make microfluidic device, for carrying, the device of detection control microlitre magnitude flow, fluid, it is the basis of microfluid system, and wherein, micro-valve, micropump, micro passage and microflow sensor are the representational microfluidic devices of most.
As the Micropump of fluid drive part in micrometeor system, because it can accurately drive and control fluid, have important in the conveying of medicine trace, fuel trace injection, cell separation, the cooling of integrated electronic original paper, gene engineering, microchemical analysis etc. and apply widely.
Chinese patent CN200610111204.8 discloses a kind of self-priming micropump, by pump housing bottom sheet, the pump housing upper slice and driver three part form, wherein: between driver and pump housing bottom sheet, have the pump housing upper slice; Pump housing bottom sheet body has pump chamber, valve seat, the first conic diffuse, conical converging, the second conic diffuse; There is valve seat between the first conic diffuse in pump housing bottom sheet and the second conic diffuse, valve seat is inlaid with conical converging.During this self-priming micropump work, first add square wave ac signal on the piezo actuator, piezoelectric actuator periodic vibration, driver makes pumping diaphragm vibrate, the contraction mouth of conical converging periodically can be plugged and opens, the diffusing opening of conic diffuse is in open mode always, and the contraction mouth of conical converging is as injection port, and the diffusing opening of conic diffuse is as outlet.Because pumping diaphragm makes periodic vibration under the driving force in cycle, make pump chamber volume do cyclically-varying, thus realize suction and the discharge of operation material.The shortcoming of this self-priming micropump is: 1, pump housing bottom sheet needs to offer conic diffuse and conical converging, the structure of pump housing bottom sheet and complex manufacturing technology.2, fluid can only flow to conic diffuse from conical converging, cannot realize the two-way flow of fluid.3, be communicated with by pump chamber between conical converging and conic diffuse, when the distance of injection port and outlet is larger, the required region covered of pump chamber must be greater than the distance of injection port and outlet, then easily adhere to away from the fluid in the pump chamber region of injection port or be trapped in pump chamber, causing liquid measure to be lost.
Summary of the invention
Offer conical pipeline, structure and complex manufacturing technology to overcome needing that prior art exists, fluid cannot realize the shortcoming of two-way flow, the invention provides a kind of structure simple, and fluid can the piezoelectricity wriggling Micropump of two-way flow.
A kind of piezoelectricity wriggling Micropump, comprises matrix and piezo actuator, matrix offers fluid passage, it is characterized in that: the quantity of fluid passage is two, and fluid passage is as the starting point of transport path, and another fluid passage is as the terminal of transport path;
Piezo actuator forms primarily of piezoelectric layer, upper electrode, bottom electrode and elasitic layer, bottom electrode covers piezoelectric layer completely, upper electrode, piezoelectric layer, bottom electrode and elasitic layer are arranged successively from the top down, the outer frame of elasitic layer and matrix seal fixing, and the region within the outer frame of elasitic layer is pump chamber portion; Upper electrode is made up of multiple separate mesh electrode module, and separate mesh electrode module is along the equidistant arrangement of transport path, and first separate mesh electrode module and last separate mesh electrode module be a corresponding fluid passage respectively; When separate mesh electrode module obtains electric, form cavity volume between the separate mesh electrode module of being somebody's turn to do electric and matrix, during separate mesh electrode module dead electricity, the separate mesh electrode module of this dead electricity and matrix are fitted; Before and after the cavity volume head and the tail of adjacent separate mesh electrode module generation have overlap, separate mesh electrode module from the starting point of transport path to terminal successively electric.
First separate mesh electrode module and last separate mesh electrode module respectively a corresponding fluid passage refer to a fluid passage below first separate mesh electrode module, and another fluid passage is in the end below a separate mesh electrode module.The cavity volume head and the tail of the separate mesh electrode module generation that front and back are adjacent have overlap, thus enable fluid be delivered to the cavity volume of next separate mesh electrode module from the cavity volume of a separate mesh electrode module, thus realize fluid from starting point to the conveying of terminal.
Upper electrode and bottom electrode adhere to over the piezoelectric layer respectively, and upper electrode and bottom electrode electrode are attached directly on piezoelectric layer, do not need binder.Upper electrode, bottom electrode and piezoelectric layer are positioned at the region in pump chamber portion.Obtain in upper electrode and form current loop between electric separate mesh electrode module and bottom electrode, the piezoelectric layer region that this separate mesh electrode module covers obtains voltage, the piezoelectric layer regional deformation that this separate mesh electrode module covers.Bottom electrode and elasitic layer are adhesively fixed, therefore the deformation of piezoelectric layer deformation band dynamic elasticity layer, and elasitic layer, away from matrix, forms the cavity volume of containing fluid between elasitic layer and matrix.
The shape size of bottom electrode and piezoelectric layer is equal, and bottom electrode is full slice system electrode.Each separate mesh electrode module of upper electrode is in the region of piezoelectric layer, and the area of elasitic layer is greater than bottom electrode.
The upper surface that matrix contacts with elasitic layer is plane, and the frame of matrix and the outer frame of elasitic layer are bonding or seal fixing by modes such as MEMS bonding technologies by epoxy glue.The part that elasitic layer is not fixed with matrix can be fitted with the upper surface of matrix.Elasitic layer and the loose part of matrix form pump chamber portion.
Not the piezoelectric layer region that covers of electric, the separate mesh electrode module that is in power failure state keeps nature, keep the elasitic layer under the piezoelectric layer region of nature to keep fitting with matrix.
Outer frame and the matrix of elasitic layer are tightly connected, therefore first separate mesh electrode module and last separate mesh electrode module obtain electric and form cavity volume time, the outer frame of elasitic layer and matrix play seal action, prevention fluid leakage.
The starting point of transport path and terminal are determined by the flow direction of fluid, according to flow to arrange separate mesh electrode module electric order.During original state, first separate mesh electrode module corresponding to starting point obtains electric, obtains the piezoelectric layer regional deformation that electric separate mesh electrode module covers, after piezoelectric layer regional deformation, corresponding elasitic layer region and Matrix separation form cavity volume, and fluid enters in cavity volume from fluid passage; Not electric separate mesh electrode the module region, the elasitic layer that cover keep fitting into cut-off state with matrix.Then, second separate mesh electrode module obtains electric, the piezoelectric layer region of second separate mesh electrode module covering and elasitic layer regional deformation cavity volume, the cavity volume of first separate mesh electrode module has overlapping, in the cavity volume of direction of flow second separate mesh electrode module with the cavity volume head and the tail of second separate mesh electrode module.Then, first separate mesh electrode module dead electricity, arrival cut-off state, fluid leaves the cavity volume of first separate mesh electrode module completely, simultaneously, 3rd separate mesh electrode module obtains electric, the piezoelectric layer region of the 3rd separate mesh electrode module covering and elasitic layer regional deformation cavity volume, fluid is positioned at the cavity volume of second separate mesh electrode module and the cavity volume of the 3rd separate mesh electrode module.Then second separate mesh electrode module dead electricity, the 4th separate mesh electrode module obtains electric, and the rest may be inferred, until penultimate separate mesh electrode module and last separate mesh electrode module obtain electric, all the other separate mesh electrode module dead electricity, fluid enters the fluid passage of terminal.Then, penultimate separate mesh electrode module and last separate mesh electrode module dead electricity successively, the fluid once carried enters the fluid passage of terminal completely.Then first, starting point place separate mesh electrode module obtains electric, starts fluid conveying next time, so circulates, until fluid has been carried.
Further, the axis of fluid passage aims at the center of the separate mesh electrode module of its correspondence.
Further, the quantity of separate mesh electrode module is at least 3, the variable amounts of separate mesh electrode module.The quantity of separate mesh electrode module can be determined according to the distance between two fluid passages.As long as the distance between adjacent separate mesh electrode module enables the cavity volume of adjacent separate mesh electrode module overlapping.
The invention has the advantages that:
1. not there is not deformation in the piezoelectric layer region that covers of electric separate mesh electrode module, then not the elasitic layer region that covers of electric separate mesh electrode module and matrix are fitted, these regions are in cut-off state, fluid can only flow from the cavity volume obtaining electric separate mesh electrode module, effectively can prevent reverse flow of fluids.
2. because elasitic layer is set to fit with matrix, the pump housing that separate mesh electrode module, piezoelectric layer, bottom electrode and elasitic layer are formed is when separate mesh electrode module dead electricity, elasitic layer and matrix are fitted, the dead band of cavity volume is almost 0, the fluid entered in cavity almost 100% is transmitted away, and transfer efficiency is high.
3. upper electrode is made up of multiple separate mesh electrode module, the region that each separate mesh electrode module covers forms one can the unit of independent deformation, multiple separate mesh electrode module, a piezoelectric layer and a bottom electrode are equivalent to multiple piezo actuator to be integrated into a piezo actuator, and structure is simpler; Install more convenient, cost is cheaper.
4, the cavity volume of containing fluid just relies on piezo actuator deformation to form completely, and without the need to pre-groove on matrix with containing fluid, the face that matrix contacts with elasitic layer is plane, and the preparation process of matrix is simple; And the plane of matrix and elasitic layer seal the cavity volume of deformation region when fitting just, without the need to carrying out other seal approach to cavity volume.
5. two fluid passages are without the need to setting up valve body, and therefore two fluid passages all as the beginning or end of the flow path of fluid, can obtain by controlling separate mesh electrode module the transmitted in both directions that namely electric tandem can realize fluid.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the plan view of Fig. 1.
Fig. 3 is the calmodulin binding domain CaM schematic diagram of final controlling element of the present invention and matrix, and net region is calmodulin binding domain CaM.
Fig. 4 is the fundamental diagram of piezoelectricity wriggling Micropump of the present invention.
Fig. 5 is the voltage flow chart of separate mesh electrode of the present invention.
Fig. 6 is the workflow diagram of piezoelectricity wriggling Micropump of the present invention.
Embodiment
As depicted in figs. 1 and 2, a kind of piezoelectricity wriggling Micropump, comprises matrix 2 and piezo actuator, matrix 2 is offered fluid passage 41,42, the quantity of fluid passage is two, and fluid passage is as the starting point of transport path, and another fluid passage is as the terminal of transport path;
Piezo actuator forms primarily of piezoelectric layer 11, upper electrode 13, bottom electrode 14 and elasitic layer 12, bottom electrode 14 covers piezoelectric layer 11 completely, upper electrode 13, piezoelectric layer 11, bottom electrode 14 and elasitic layer 12 are arranged successively from the top down, outer frame 32 and the matrix 2 of elasitic layer 12 seal fixing, region within the outer frame 32 of elasitic layer 12 is pump chamber portion 31, and upper electrode 13, bottom electrode 14 and piezoelectric layer 11 are positioned at the region in pump chamber portion 31; Upper electrode 13 is made up of multiple separate mesh electrode module, and separate mesh electrode module is along the equidistant arrangement of transport path, and first separate mesh electrode module and last separate mesh electrode module be a corresponding fluid passage 41,42 respectively; When separate mesh electrode module obtains electric, form cavity volume between the separate mesh electrode module of being somebody's turn to do electric and matrix 2, during separate mesh electrode module dead electricity, separate mesh electrode module and the matrix 2 of this dead electricity are fitted; Before and after the cavity volume head and the tail of adjacent separate mesh electrode module generation have overlap, separate mesh electrode module from the starting point of transport path to terminal successively electric.
In the present embodiment, piezoelectric layer 11 adopts long 25 millimeters, wide 5 millimeters, thickness to be the square piezoelectric ceramic of 50 microns.The length and width size of piezoelectric layer 11 is advisable with the pump chamber portion 31 that can cover matrix completely, and the thickness of piezoelectric layer 11, for elasitic layer 12 deformation can be driven to be advisable, is not limited to the concrete size of the present embodiment.
Bottom electrode 14 is the full slice system electrode with piezoelectric layer 11 shape congruence.The upper surface of piezoelectric layer 11 covers a row separate mesh electrode module 13, and upper electrode 13 and bottom electrode 14 are the silver electrode that thickness is 1 micron.The present embodiment separate mesh electrode module has 4, is respectively 131,132,133,134, makes piezo actuator be divided into 4 performance elements.Separate mesh electrode module is the square of the length of side 4 millimeters.Elasitic layer 12 is long 25 millimeters, wide 8 millimeters, thick 50 microns stainless steel sheets.Undertaken bonding by epoxy glue between piezoelectric layer 11 with elasitic layer 12, glue-line about 1 micron, although not shown glue-line, how bonding glue-line be conventional means.
Matrix is long 25 millimeters, wide 8 millimeters, thick 2 millimeters plexiglass sheets, and matrix runs through and has two fluid passages 41 and 42, diameter is 1 millimeter.Two fluid passages 41 and 42 lay respectively at the below of the separate mesh electrode module 131 and 134 at two ends place.The elasitic layer 12 of piezo actuator is combined with matrix 2 edge region.As shown in Figure 3, border mesh region is the outer frame 32 of elasitic layer, can adopt epoxy glue that elasitic layer 12 is bonding with matrix 2.Zone line is pump chamber portion 31, not electric and be in the separate mesh electrode module of off working state and matrix is fitted, effectively can prevent reverse flow of fluids.
Fig. 4 is the fundamental diagram of piezoelectricity wriggling Micropump.Instantly electrode grounding, when separate mesh electrode module 131 applies voltage, separate mesh electrode module 131 place produces partial loop variation, a cavity volume 311 is produced between the region that separate mesh electrode module 131 is covered and matrix 2, due to suction function, extraneous fluid will be filled into cavity volume 311, as shown by arrows.When voltage reduces to 0, the region that separate mesh electrode module 131 covers recovers deformation, 311 to be extruded in cavity in fluid, flow in cavity volume that next separate mesh electrode module 132 formed.As long as apply voltage to separate mesh electrode module in a certain order, the cavity that separate mesh electrode module produces can be realized and move to another fluid passage from a fluid passage, realize convection cell and carry.This micro-pump structure is symmetrical, can be realized the control of direction of flow by the applying order of control voltage.
Fig. 5 and Fig. 6 is respectively the voltage flow chart of separate mesh electrode module of the present invention and the workflow diagram of Micropump.Whole workflow is divided into 4 steps.Step 1: separate mesh electrode module 131 and 134 applies voltage, and separate mesh electrode module 132 and 133 voltage is 0, as shown in Figure 5.The piezoelectric layer 11 that now separate mesh electrode module 131 and 134 place covers produces local deformation, and as shown in Figure 6, represented by dotted arrows body upper surface position, solid line represents the skew that final controlling element produces, and arrow represents direction of flow.Fluid flows into the cavity volume 311 of separate mesh electrode module 131 from fluid passage 41.Step 2: separate mesh electrode module 131 and 132 applies voltage, and separate mesh electrode module 133 and 134 voltage is 0, and separate mesh electrode module 132 place also produces cavity volume, direction of flow 132.Now separate mesh electrode module 134 voltage becomes 0, and this place's cavity volume volume becomes 0, and due to the cut-off of separate mesh electrode module 133 place, fluid flows out from fluid passage 42.Step 3: separate mesh electrode module 131 voltage becomes 0, and separate mesh electrode module 133 applies voltage, and separate mesh electrode module 134 keeps 0 voltage, therefore the fluid at separate mesh electrode module 131 and 132 place flows to separate mesh electrode module 132 and 133 place originally.Step 4: separate mesh electrode module 131 voltage keeps 0, and separate mesh electrode module 132 voltage reduces to 0, separate mesh electrode module 133 and 134 applies voltage, and therefore the fluid at separate mesh electrode module 132 and 133 place flows to separate mesh electrode module 133 and 134 place originally.Repeat step 1 to 4, fluid flows out constantly inputting from fluid passage 41 from fluid passage 42.Because two fluid passages all can according to the flow path of fluid as beginning or end, if the voltage applying order exchange of separate mesh electrode module 131 and 134, the voltage applying order exchange of separate mesh electrode module 132 and 133, then fluid will flow to fluid passage 41 from fluid passage 42.The flow velocity of fluid can be determined by the speed executing alive size and step 1 to 4, and the larger flow velocity of voltage is faster, and step 1 is larger to the faster flow velocity of step 4 speed.
Content described in this specification embodiment is only enumerating the way of realization of inventive concept; protection scope of the present invention should not be regarded as being only limitted to the concrete form that embodiment states, protection scope of the present invention also and conceive the equivalent technologies means that can expect according to the present invention in those skilled in the art.
Claims (4)
1. a piezoelectricity wriggling Micropump, comprises matrix and piezo actuator, matrix offers fluid passage, it is characterized in that: the quantity of fluid passage is two, and fluid passage is as the starting point of transport path, and another fluid passage is as the terminal of transport path; Piezo actuator forms primarily of piezoelectric layer, upper electrode, bottom electrode and elasitic layer, bottom electrode covers piezoelectric layer completely, upper electrode, piezoelectric layer, bottom electrode and elasitic layer are arranged successively from the top down, the outer frame of elasitic layer and matrix seal fixing, and the region within the outer frame of elasitic layer is pump chamber portion; Upper electrode is made up of multiple separate mesh electrode module, and first separate mesh electrode module and last separate mesh electrode module be a corresponding fluid passage respectively; When separate mesh electrode module obtains electric, between the separate mesh electrode module of being somebody's turn to do electric and matrix, form cavity volume; During separate mesh electrode module dead electricity, the separate mesh electrode module of this dead electricity and matrix are fitted; Before and after the cavity volume head and the tail of adjacent separate mesh electrode module generation have overlap, separate mesh electrode module from the starting point of transport path to terminal successively electric.
2. piezoelectricity wriggling Micropump as claimed in claim 1, is characterized in that: separate mesh electrode module is along the equidistant arrangement of transport path.
3. piezoelectricity wriggling Micropump as claimed in claim 2, is characterized in that: the axis of fluid passage aims at the center of the separate mesh electrode module of its correspondence.
4. the piezoelectricity wriggling Micropump as described in one of claim 1-3, is characterized in that: the quantity of separate mesh electrode module is at least 3.
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| CN201510716308.0A CN105201796A (en) | 2015-10-29 | 2015-10-29 | Piezoelectric peristaltic micropump |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107178488A (en) * | 2017-06-26 | 2017-09-19 | 西安交通大学 | A kind of two-way valve free miniflow pump based on PVDF piezoelectric membranes and preparation method thereof |
| JP2020503474A (en) * | 2016-12-30 | 2020-01-30 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | Electrostatic peristaltic pump and method of operation |
| CN111472964A (en) * | 2019-01-24 | 2020-07-31 | 研能科技股份有限公司 | Micro-electromechanical pump module |
| CN111472965A (en) * | 2019-01-24 | 2020-07-31 | 研能科技股份有限公司 | Micro-electromechanical pump module |
| CN111502968A (en) * | 2019-01-31 | 2020-08-07 | 研能科技股份有限公司 | Micro-electromechanical pump module |
| DE102022111381A1 (en) | 2022-03-09 | 2023-09-14 | Hnp Mikrosysteme Gmbh | Fluidic element, fluidic system and method for operating a fluidic system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE102022111381A1 (en) | 2022-03-09 | 2023-09-14 | Hnp Mikrosysteme Gmbh | Fluidic element, fluidic system and method for operating a fluidic system |
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Application publication date: 20151230 |