CN100540896C - A kind of mini self-priming pump - Google Patents
A kind of mini self-priming pump Download PDFInfo
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- CN100540896C CN100540896C CNB2006101112048A CN200610111204A CN100540896C CN 100540896 C CN100540896 C CN 100540896C CN B2006101112048 A CNB2006101112048 A CN B2006101112048A CN 200610111204 A CN200610111204 A CN 200610111204A CN 100540896 C CN100540896 C CN 100540896C
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Abstract
The invention discloses a kind of new micro pump that can self-priming, solve effectively cyclic fluctuation, flow shakiness, can not self-priming and can not be used for problems such as gas operation material, make stable, adjustable, the complete self-priming continuously of output flow, and do not need to annotate sample, both can be used for the liquid working material, also can be used for the gas operation material, enlarge the using scope of Micropump, improve the working life and the working stability of Micropump.New micro pump structure is simple, comprising: sheet, the pump housing last slice, driver, pump chamber, valve seat, first conic diffuse, conical converging, second conic diffuse under the pump housing; Have that response is fast, driver frequency is wide, controllability is strong, low in energy consumption, the life-span is long, volume is little, preparation process is simple, low cost and other advantages; In addition, the present invention can adopt micro machining and micro mechanical technology compatible mutually material and technology manufacturing, easily and other little detection and micro control unit integrated etc., be fit to production in enormous quantities, very application prospects is arranged.
Description
Technical field
The invention belongs to the microelectromechanical systems field, relate to microfluid transmission and control technique, especially relate to the micropump structure.
Background technique
In the last few years, MEMS (Micro-Electro-Mechanical System) be integrated micro mechanism, microsensor, miniature final controlling element and signal processing with control circuit even interface, communicate by letter and power supply etc. in the microdevice or the system of one, be based on microelectronic, micromechanics and materials science, the micro device that research, design, manufacturing have specific function.Utilize micromachining technology to make microfluidic device, be used to carry, detect the device of control microlitre magnitude flow, fluid, it is the basis of microfluid system, and wherein little valve, micropump, micro passage and microflow sensor are the most representative microfluidic devices.
Microfluid system is very suitable for research applications such as life science, biochemistry, analytical chemistry and medical science owing to have superiority such as volume is little, simple to operate, easy for installation, computer interface control.Utilize the MEMS process engineering to produce complete function, Biological Chip cheap, easy to carry, it often collects Sample handling, detection, analysis and output of one as a result, become biology laboratory on the miniature sheet, can finish as body fluid component analyzing, DNA component analysis etc. all multi-functional.
Micropump as fluid drives part in the micrometeor system, because it can accurately drive and control fluid, carry at the medicine trace, the aspects such as propelling of the injection of fuel trace, cell separation, integrating electronic element cooling, gene engineering, microchemical analysis and microminiature satellite have important and use widely.
At present, micropump structure, the processing technology developed are various informative, driving mode has electrostatically driven, Piezoelectric Driving, Electromagnetic Drive, heat driving, pneumatic, electric liquid driving, optical drive, ultrasound-driven respectively, bubble drives and the marmem film drives or the like, but the Micropump of practicability does not also have at home, compare with other driving mode that is applied to microelectromechanical systems, has superior mechanical characteristic based on Piezoelectric Driving, static and electromagnetic drive mode, enough big driving force and displacement can be provided, speed of response is fast, good reliability.Therefore obtain common concern.
Valve free pump utilizes the new features of fluid under micro-dimension, the principle novelty, but there is backflow phenomenon to exist, the scope of its use is diminished.The Micropump of passive check valve formula, though the performance of damming has improved, the open and close of safety check mainly are to utilize inside and outside differential pressure, if pressure reduction is too little, unlatching is just very difficult, and valve block is blocked easily simultaneously, small particulate is particularly arranged in the liquid, so maintenance is just very difficult, can shorten working life.Also have heat to drive the report of two-chamber Micropump, the major defect of this structure Micropump is: 1) the pump chamber dead volume is excessive, does not allow to realize self-priming, need annotate sample in the time of work, will waste medicine or reagent like this.2) speed of response of heat driving is low.3) not high to the liquid pump speed, 4) can not pump gas.Because above-mentioned these deficiencys are arranged, the Micropump commercialization of these types is very difficult.
Summary of the invention
The objective of the invention is to overcome prior art processing technology difficulty, working life is short and work is unstable problem, the self-priming micropump that provides a kind of aggressive valve to combine with change gap elastic buffer mechanism.
To achieve these goals, the technological scheme of self-priming micropump of the present invention is as follows: comprise mainly and being made up of sheet, the pump housing last slice and driver three parts under the pump housing, wherein: between the sheet pump housing last slice is being arranged under the driver and the pump housing; Pump chamber, valve seat, first conic diffuse, conical converging, second conic diffuse are arranged on the sheet body under the pump housing; Between first conic diffuse on the pump chamber and second conic diffuse, valve seat is arranged, on valve seat, be inlaid with conical converging.
The working principle of miniature self-priming pump is: when being added with square wave ac signal on piezoelectric actuator, piezoelectric actuator meeting periodic vibration, driver can make the pumping diaphragm vibration, the contraction mouth of conical converging can periodically be plugged and open, the diffusing opening of conic diffuse is in open mode always, because pumping diaphragm is made periodic vibration under the driving force in cycle, make the pump chamber volume do cyclically-varying, thereby realize the suction and the discharge of operation material.
The invention has the advantages that:
1. pumping diaphragm of the present invention (pump housing last slice) can adopt PDMS (dimethyl silicone polymer), silicon, glass or macromolecule polymer material, and the pumping diaphragm material selection has diversity.
2. the present invention is incorporated into one with the pump housing last slice, active valve block and elastic buffer unit, makes self-priming micropump dead volume little.
3. what drive part of the present invention adopted can be multifarious driving mode such as piezoelectricity, static, electromagnetism.
4. aggressive valve provided by the present invention and the Micropump that diffusing tube, collapsible tube combine have avoided using passive valve block.Because the easy fatigue damage of passive valve block, the reverse shortcomings such as performance is bad of damming, the application of aggressive valve has prolonged the working life of micropump, has improved the reliability of micropump.
5. the present invention can adopt micro machining, micro mechanical technology compatible mutually material and technology manufacturing, have simple in structure, be easy to produce in batches, cost is low.
6. volume is little, in light weight, low in energy consumption, advantages such as easy of integrationization.
This Micropump is a kind of single aggressive valve, single pumping diaphragm, single pump chamber structure, can solve effectively cyclic fluctuation, flow shakiness, can not self-priming and can not be used for the problem of gas operation material etc., make that output flow is stable, adjustable, complete self-priming does not need to annotate sample continuously.Both can be used for the liquid working material, also can be used for the gas operation material, improve the working life and the working stability of Micropump.
Description of drawings
Fig. 1 is a kind of mini self-priming pump plan view of the present invention
Fig. 2 is a kind of mini self-priming pump structural representation of the present invention
To be that a kind of single sample introduction of the present invention is two go out sample Piezoelectric Driving micropump structural representation to Fig. 3
Fig. 4 is that a kind of single sample introduction list of the present invention goes out sample micropump structural representation
Fig. 5 is the photo of embodiment of the invention mini self-priming pump
Fig. 6 is the relation of flow velocity and the driving voltage of embodiment of the invention Fig. 4.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in detail, be to be noted that described embodiment only is intended to be convenient to the understanding of the present invention, and it is not played any qualification effect.
According to Fig. 1 of the present invention and Fig. 2, it is a kind of mini self-priming pump plan view, be shown in a kind of mini self-priming pump structural representation: form by sheet under the pump housing 5, the pump housing last slice 1 and driver 4 three parts, wherein: the pump housing last slice 1 is being arranged between the sheet 5 under the driver 4 and the pump housing; Pump chamber 2, valve seat 3, first conic diffuse 6, conical converging 7, second conic diffuse 8 are arranged on sheet 5 bodies under the pump housing; Between first conic diffuse 6 on the pump chamber 2 and second conic diffuse 8, valve seat 3 is arranged, on valve seat 3, be inlaid with conical converging 7.
Embodiment 1:
Described first conic diffuse 6, conical converging 7 and second conic diffuse 8 all are communicated with pump chamber 2.The osculum end of described conical converging 7 contacts with the pump housing last slice 1, and conical converging 7 is normally closed.The big opening end of described first conic diffuse 6 and second conic diffuse 8 is positioned at pump chamber 2, is in normally open.Described valve seat 3 is positioned at the centre of pump chamber 2, and pump chamber 2 shapes are squares or circular.The osculum end of described conical converging 7 is positioned at the central position of the valve seat 3 of pump chamber 2 central protrusion, and the osculum end size of conical converging 7 is less than the size of valve seat 3.The upper level of described valve seat 3 be higher than or etc. be higher than upper surface around the sheet under the pump housing 5.Sheet 5 materials can adopt silicon, polymer or plastics under the pump housing.Described first conic diffuse 6, second conic diffuse 8 and conical converging 7 all adopt taper.The end of described first conic diffuse 6, second conic diffuse 8 is an outlet, and the end of conical converging 7 is an injection port.The described pump housing last slice 1 is integrated in one pumping diaphragm, active valve block and the three kinds of functions in elastic buffer unit.
Embodiment 2:
Being that a kind of single sample introduction of Piezoelectric Driving is two as Fig. 3 goes out the sample micropump, and its structure comprises sheet 5 under the pump housing last slice 1, pump chamber 2, valve seat 3, piezoelectric cantilever driver 4, the pump housing, first conical converging 6, conic diffuse 7, second conical converging 8, driver fixed block 9; Pump chamber 2 adopts circular or square single chamber, forms single injection port by conical converging 7; Form two outlets by first conic diffuse 6, second conic diffuse 8.Sheet 5 adopts silicon chip under the pump housing; The pump housing last slice 1 is PDMS (dimethyl silicone polymer) pumping diaphragm.Pump chamber 2, valve seat 3, first conic diffuse 6 and second conic diffuse 8 are arranged on the sheet 5 under its middle pump body.
When to this device loads alternating voltage, present embodiment can be worked as micropump and be used, can self-priming; Can work as miniature valve when to this device loads VDC uses.Process the pump housing last slice 1, pump chamber 2, valve seat 3, first conic diffuse 6, second conic diffuse 8 and conical converging 7 with the MEMS technology, and first conic diffuse 6, second conic diffuse 8 are symmetrical in conical converging 7 and distribute.With sealer sheet 5 under the pump housing last slice 1 and the pump housing is bonded into one, again piezoelectric cantilever driver 4 usefulness fixed blocks is fixed on the pump housing last slice edge, and draw two electrodes 10 and 11.Driver 4 is piezoelectric bimorphs, with the use in parallel of two piezo-electric sheets, applies opposite electric field respectively, makes wherein a slice elongation and another sheet shortening, and its end can produce significant length travel thereby so at one end fixing situation lower piezoelectric twin lamella bends.According to simulation and calculating, when applied voltage was V, the length travel Δ S of the end of piezoelectric bimorph can pass through
In the technology of present embodiment, the pump housing last slice 1 usefulness PDMS (dimethyl silicone polymer) processes, and PDMS is spin-coated on long to be had on the silicon chip of silicon nitride, and its thickness and solidifies under certain temperature about 0.2mm, peels off then.Pump chamber 2, first diffusing opening 6, contraction mouth 7, second diffusing opening 8 and valve seat 3 are to form with third photo etching and wet etching on silicon chip.At last sheet 5 under the pump housing last slice 1, the pump housing and driver 4 are encapsulated structure as Fig. 3 by Fig. 2 mode.
Important technological parameters of the present invention: boundary dimension is 9mm * 9mm * 1.5mm (length * wide * height), pump chamber 2 is of a size of 6mm * 6mm * 0.03mm (length * wide * height), the big opening end of first conic diffuse 6 and second conic diffuse 8 is of a size of 0.8mm * 0.8mm, and the osculum end is of a size of 0.3mm * 0.3mm.With the deionized water is operation material, and Peak Flow Rate reaches 5ml/min, and maximum back pressure reaches 15KPa.Maximum pump speed reaches 30ml/min when being operation material with the air.
Embodiment 3:
As Fig. 4 also is that a kind of single sample introduction list goes out the sample micropump, comprises sheet 5, first conic diffuse 6, conical converging 7 under the pump housing last slice 1, pump chamber 2, valve seat 3, driver 4, the pump housing.Described have a conic diffuse 6 and a conical converging 7 on the sheet 5 under the pump housing, pump chamber 2 adopts single cavity configuration.Its working principle, physical dimension are identical with example case shown in Figure 3, just lack a diffusing tube.
Fig. 5 is the photo of embodiment's micropump.
Fig. 6 is the flow velocity of embodiment Fig. 4 and the relation curve of driving voltage, and as can be seen from the figure: under the condition of zero back pressure, driving voltage is when 100V, and Peak Flow Rate reaches 5000 μ L/min, and flow velocity almost is linear increasing with voltage.
Top description is to be used to realize the present invention and embodiment, it should be appreciated by those skilled in the art, in any modification or partial replacement that does not depart from the scope of the present invention, all belongs to claim of the present invention and comes restricted portion.
Claims (8)
1. a mini self-priming pump is characterized in that: be made up of sheet under the pump housing (5), the pump housing last slice (1) and driver (4) three parts, wherein: the pump housing last slice (1) is being arranged between the sheet (5) under the driver (4) and the pump housing; Pump chamber (2), valve seat (3), first conic diffuse (6), conical converging (7), second conic diffuse (8) are arranged on sheet under the pump housing (5) body; Between first conic diffuse (6) on the sheet under the pump housing (5) and second conic diffuse (8) valve seat (3) is arranged, on valve seat (3), be inlaid with conical converging (7), the osculum end of described conical converging (7) contacts with the pump housing last slice (1), and conical converging (7) is normally closed; The big opening end of described first conic diffuse (6) and second conic diffuse (8) is positioned at pump chamber (2), is in normally open.
2. self-priming micropump as claimed in claim 1 is characterized in that: described first conic diffuse (6), conical converging (7) and second conic diffuse (8) all are communicated with pump chamber (2); The end of first conic diffuse (6), second conic diffuse (8) is an outlet, and the end of conical converging (7) is an injection port.
3. self-priming micropump as claimed in claim 1 is characterized in that: described valve seat (3) is positioned at the centre of pump chamber (2), and pump chamber (2) shape is a square or circular.
4. self-priming micropump as claimed in claim 1 is characterized in that: the osculum end of described conical converging (7) is positioned at the central position of the valve seat (3) of pump chamber (2) central protrusion, and the osculum end size of conical converging (7) is less than the size of valve seat (3).
5. self-priming micropump as claimed in claim 1 is characterized in that: a described conic diffuse and conical converging of adopting on the sheet (5) under the pump housing; Or adopt a conical converging and two conic diffuses, and two conic diffuses are symmetrical in the conical converging distribution.
6. self-priming micropump as claimed in claim 1 is characterized in that: the upper level of described valve seat (3) be higher than or etc. be higher than sheet under the pump housing (5) upper surface all around.
7. as claim 1 or 6 described self-priming micropumps, it is characterized in that: sheet under the pump housing (5) material adopts silicon, polymer or plastics.
8. self-priming micropump as claimed in claim 1 is characterized in that: the described pump housing last slice (1) is that the pump housing last slice (1), active valve block and elastic buffer unit are incorporated into one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101112048A CN100540896C (en) | 2006-08-11 | 2006-08-11 | A kind of mini self-priming pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101112048A CN100540896C (en) | 2006-08-11 | 2006-08-11 | A kind of mini self-priming pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101122286A CN101122286A (en) | 2008-02-13 |
| CN100540896C true CN100540896C (en) | 2009-09-16 |
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| CNB2006101112048A Expired - Fee Related CN100540896C (en) | 2006-08-11 | 2006-08-11 | A kind of mini self-priming pump |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5654827B2 (en) * | 2010-10-06 | 2015-01-14 | 学校法人慶應義塾 | Pump device and endoscope device using the same |
| CN101975153B (en) * | 2010-10-12 | 2012-07-04 | 江苏大学 | Valveless piezoelectric pump of elliptical combined pipe |
| CN101975154B (en) * | 2010-10-12 | 2012-07-04 | 江苏大学 | Valve-free piezoelectric pump of logarithmic spiral combined tube |
| CN107731766A (en) * | 2017-09-14 | 2018-02-23 | 电子科技大学 | A kind of self-loopa fluid means for systems-on-a-chip radiating |
| CN113944615A (en) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | Integrated micro-piezoelectric liquid pumping device and manufacturing and driving method thereof |
| DE102022111381A1 (en) | 2022-03-09 | 2023-09-14 | Hnp Mikrosysteme Gmbh | Fluidic element, fluidic system and method for operating a fluidic system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994019609A1 (en) * | 1993-02-23 | 1994-09-01 | Erik Stemme | Displacement pump of diaphragm type |
| DE19637928C2 (en) * | 1996-02-10 | 1999-01-14 | Fraunhofer Ges Forschung | Bistable membrane activation device and membrane |
| CN1047432C (en) * | 1995-12-08 | 1999-12-15 | 清华大学 | Silicon microheating actuating pump and its mfg. tech |
| CN1254608C (en) * | 2000-12-22 | 2006-05-03 | Bsh博施及西门子家用器具有限公司 | Dosing device for conveying small amounts of substances |
-
2006
- 2006-08-11 CN CNB2006101112048A patent/CN100540896C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994019609A1 (en) * | 1993-02-23 | 1994-09-01 | Erik Stemme | Displacement pump of diaphragm type |
| CN1047432C (en) * | 1995-12-08 | 1999-12-15 | 清华大学 | Silicon microheating actuating pump and its mfg. tech |
| DE19637928C2 (en) * | 1996-02-10 | 1999-01-14 | Fraunhofer Ges Forschung | Bistable membrane activation device and membrane |
| CN1254608C (en) * | 2000-12-22 | 2006-05-03 | Bsh博施及西门子家用器具有限公司 | Dosing device for conveying small amounts of substances |
Non-Patent Citations (1)
| Title |
|---|
| Pneumatic silicon microvalves with piezoelectric actuation. S. Kluge et al.Technical Digest of Transducers '01, EUROSENSORS XV. 2001 * |
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| CN101122286A (en) | 2008-02-13 |
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