CN1442612A - Valve less thin film driving micro pump - Google Patents
Valve less thin film driving micro pump Download PDFInfo
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- CN1442612A CN1442612A CN 03118917 CN03118917A CN1442612A CN 1442612 A CN1442612 A CN 1442612A CN 03118917 CN03118917 CN 03118917 CN 03118917 A CN03118917 A CN 03118917A CN 1442612 A CN1442612 A CN 1442612A
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- pump
- water hole
- membrane
- pump chamber
- tube
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Abstract
A non-valve membrane driven miniature pump has a single-membrane dual-cavity structure. A drive membrane consisting of base membrane and function membrane is used to isolate two pump cavities from each other. Each pump cavity has a conic diffusing tube to connect water inlet and a conis shrinking tube to connect water outlet. Its advantages are stable flow, high response speed, small size, low cost and long service life.
Description
Technical field
The present invention relates to the driving Micropump of film, belong to microfluid transmission and control, micromechanics
Technical field.
Background technique
Microfluidic control system can accurately detect and control the flow of per minute microlitre magnitude, at aspects such as the conveying of medicine trace, the injection of fuel trace, cell separation, integrating electronic element cooling and microchemical analyses important application prospects is arranged.Micropump is the important symbol of microfluid system development level as an important microfluid performer.Using at present more is the driving Micropump of film, and its flow control is that the to-and-fro motion by drive membrane causes that the Volume Changes of pump cavity realizes.The driving principle of drive membrane has that piezoelectricity, static, electromagnetism, hot gas are moving, bimetallic effect and shape memory effect driving etc.In using each quasi-driver of above driving mode, piezoelectric actuator is fast because of its response, bearing capacity is high, energy consumption is low and price is low etc., and characteristics receive much concern.The driving Micropump of film has or not movable valve block can be divided into again according to it valve Micropump and valve free pump.The valve Micropump is arranged often based on Mechanical Driven, principle is simple, and the manufacturing process maturation is easy to control, is the main flow of using at present; Valve free pump then utilizes the new features of fluid under micro-dimension, and the principle novelty is more suitable for microminiaturization, has bigger development prospect.No matter be to have or not movable valve block, the driving Micropump of using of film generally adopts monofilm list cavity configuration at present, is controlled the variation of single chamber volume by periodic signal.Suppose that first cycle cavity volume increases, then Micropump is in suction condition; Otherwise, second cycle pump cavity volume reducing, Micropump is in the state of pumping.In an operation cycle, it is interim that microfluid output only is present in lower half, pumps and suck and can not carry out simultaneously.Therefore, have the situation of cyclic fluctuation and flow shakiness, this considerable restraint applying of the driving Micropump of film.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art part, a kind of non-valve membrane driven miniature pump is provided, this Micropump is a kind of monofilm double cavity structure, can solve the problem of cyclic fluctuation and flow shakiness effectively, makes the output flow continous-stable.
For achieving the above object, the technical solution used in the present invention is: having pump chamber on the upper pump casing, conic diffuse, conical converging, water hole, left side and water hole, right side, last pump chamber links to each other with the water hole, left side by diffusing tube, link to each other with the water hole, right side by collapsible tube, lower pump body is arranged below upper pump casing, on lower pump body, have corresponding pump chamber down, conic diffuse, conical converging and water hole, corresponding left side, the water hole, right side, following pump chamber links to each other with the water hole, left side by diffusing tube, link to each other with the water hole, right side by collapsible tube, on, following pump chamber is isolated by the drive membrane that base membrane and function membrane constitute, and two diffusing tubes all equate with the angle of taper of two collapsible tubes.
The invention has the advantages that:
1. because the present invention has adopted the monofilm double cavity structure, utilize the variation of two cavity volume of SC sigmal control, two cavity volume are changed obtain real-time complementation, the output flow continous-stable, and have characteristics such as structure and technology are simple, response is fast, driver frequency is wide, controllability is strong, energy consumption is low, the life-span is long.
2. the present invention can adopt micro machining and micro mechanical technology compatible mutually material and technology manufacturing, has that volume is little, cost is low, easily and characteristics such as other little detection and micro control unit be integrated, is adapted to produce in enormous quantities.
Description of drawings
Fig. 1 is the structure diagram of an embodiment of the present invention.
Fig. 2 is an A-A sectional drawing among Fig. 1.
Fig. 3 is Fig. 1 embodiment's a axonometric drawing.
Fig. 4 is the another kind of embodiment's of the present invention structure diagram.
Fig. 5 is the structural representation of drive membrane among Fig. 4.
Embodiment
As Fig. 1, Fig. 2, shown in Figure 3, having pump chamber 4, conic diffuse 3, conical converging 7, water hole, left side 2 and water hole, right side 8 on the upper pump casing 1, base membrane 5 surfaces at upper pump casing 1 are equipped with one deck function membrane 6, form drive membrane, and this function membrane can be piezoelectric film or magnetoelectricity film etc.Last pump chamber 4 links to each other with water hole 2 by diffusing tube 3, links to each other with water hole 8 by collapsible tube 7.Lower pump body 13 is arranged below upper pump casing 1, on lower pump body 13, have corresponding pump chamber 11, conic diffuse 12, conical converging 10 and corresponding water hole 2, water hole 8 down, following pump chamber 11 links to each other with water hole 2 by diffusing tube 12, links to each other with water hole 8 by collapsible tube 10.Upper and lower pump chamber 4,11 is isolated by above-mentioned drive membrane.The angle of taper of 3,12, two collapsible tubes 7,10 of two diffusing tubes all equates.On upper pump casing 1, be equipped with capping 9, have water hole, corresponding left side 2 and water hole, right side 8 on it.
When conic diffuse 3,12, the angle of taper a of conical converging 7,12 is between 5 °～12 ° the time, and the output capability of this pump is bigger.
During work, nearly parabolic spherical shape distortion will take place in drive membrane under the excitation of alternate electrical signal, thereby make the volume generation increase of pump chamber and the alternate that reduces.Now feed-water end is made in water hole 2, the waterexit end is done in water hole 8, as last pump chamber 4 volume reducing Δ V, establishing pump chamber expanding duct 3 output flows is Q
1, collapsible tube 7 output flows are Q
2, because expanding duct, collapsible tube are tapered on direction of flow, according to the flow characteristic of collapsible tube, expanding duct tube fluid, Q
2＞Q
1, also promptly go up pump chamber 4 and be in the state of pumping; Simultaneously, the corresponding increase Δ of following pump chamber 11 volumes V, setting pump chamber expanding duct 12 input flow rates is Q
3, collapsible tube 10 input flow rates are Q
4, according to the flow characteristic of collapsible tube, expanding duct tube fluid, Q
3＞Q
4, also promptly descend pump chamber 11 to be in suction condition.2 ends in the water inlet, last pump chamber expanding duct 3 is actual to play the fluid contraction effect, and following pump chamber expanding duct 12 plays fluid expansion effect, Q
3＞Q
1, 2 ends are in suction condition to whole pump in the water inlet.At osculum 8 ends, last pump chamber collapsible tube 7 is actual to play the fluid expansion effect, and following pump chamber collapsible tube 10 plays fluid contraction effect, Q
2＞Q
4, whole pump is in the state of pumping at osculum 8 ends.Because upper and lower pump chamber 4,11 corresponding layouts, when last pump chamber 4 volumes increased, according to above analytic process in like manner as can be known, 2 ends still were in suction condition, are in the state of pumping at osculum 8 ends whole pump in the water inlet.Therefore, in an operation cycle, Micropump has been realized the continuous suction of fluid and has been pumped.Micropump flow size is by the amplitude and the FREQUENCY CONTROL of alternate electrical signal.Simultaneously, the present invention uses the good photosensitive polyimide film of stable chemical performance, insulating property as electricity isolated layer, has improved the reliability and the life-span of Micropump.
The key technical indexes of the present invention can reach: boundary dimension is 8mm * 8mm * 1.5mm (length * wide * height), and cavity size is 5mm * 0.3mm (diameter * height), and piezoelectric film is of a size of 3mm * 3mm * 40 μ m; Flow is adjustable continuously at 0.5-100 μ L/min; Maeximum pump pressure is 2.6Kpa.
In conjunction with Fig. 1 certain narration is done in concrete technological process of the present invention.This Micropump can be combined through silicon (glass)-silicon (glass) bonding technology by 3 layers of silicon (glass) structure, is respectively upper pump casing, lower pump body and capping.At first use thick film preparation directly to deposit the piezoelectric film of the about 40 μ m of one deck, use deep reaction ion etching technology to etch pump cavity, water inlet, osculum, collapsible tube, expanding duct at the back side of piezoelectric film at the Si of upper pump casing base lower surface.During pump cavity, be etched to the Si film thickness and be about 100 μ m on the etching.The preparation process of lower pump body is except the preparation of no piezoelectric film, and all the other are identical with upper pump casing.The making of capping is comparatively simple, only need etch accordingly to get final product into and out of the water hole.Three-decker adopts silicon (glass)-silicon (glass) Direct Bonding technology to be bonded together and just to have formed whole pump.Whole course of working is very simple, is suitable for producing in batches.
Structure of the present invention also can be as Fig. 4, shown in Figure 5, and by upper pump casing 16, lower pump body 13 and drive membrane are formed, and drive membrane is made of base membrane 15 and function membrane 14, is fixed between upper pump casing 16 and the lower pump body 13.
Obviously, the present invention is not only applicable to piezoelectric micropump, and can be applicable to other film driving Micropump, drives Micropump, magnetic force film driving Micropump, bimetal heat driving Micropump, hot gas driving Micropump etc. as the SMA film.
Claims (3)
1. non-valve membrane driven miniature pump, it is characterized in that: on upper pump casing (1), have pump chamber (4), conic diffuse (3), conical converging (7), water hole (2), left side and water hole, right side (8), last pump chamber (4) links to each other with water hole, left side (2) by diffusing tube (3), link to each other with water hole, right side (8) by collapsible tube (7), lower pump body (13) is arranged below upper pump casing (1), on lower pump body (13), have corresponding pump chamber (11) down, conic diffuse (12), conical converging (10) and water hole (2), corresponding left side, water hole, right side (8), following pump chamber (11) links to each other with water hole, left side (2) by diffusing tube (12), link to each other with water hole, right side (8) by collapsible tube (10), on, following pump chamber (4), (11) drive membrane that is made of base membrane (5) and function membrane (6) is isolated two diffusing tubes (3), (12) with two collapsible tubes (7), (10) angle of taper all equates.
2. non-valve membrane driven miniature pump according to claim 1 is characterized in that: be equipped with capping (9) on upper pump casing (1), have water hole, corresponding left side (2) and water hole, right side (8) on it.
3. non-valve membrane driven miniature pump according to claim 1 and 2 is characterized in that: conic diffuse (3), (12), the angle of taper a of conical converging (7), (10) is 5 °～12 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03118917 CN1232728C (en) | 2003-04-11 | 2003-04-11 | Valve less thin film driving micro pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03118917 CN1232728C (en) | 2003-04-11 | 2003-04-11 | Valve less thin film driving micro pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1442612A true CN1442612A (en) | 2003-09-17 |
| CN1232728C CN1232728C (en) | 2005-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03118917 Expired - Fee Related CN1232728C (en) | 2003-04-11 | 2003-04-11 | Valve less thin film driving micro pump |
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| CN1329659C (en) * | 2004-07-12 | 2007-08-01 | 哈尔滨工业大学 | Valveless micro-pump and packaging method thereof |
| CN100335784C (en) * | 2003-12-05 | 2007-09-05 | 清华大学 | Mini jockey pump |
| CN100335785C (en) * | 2004-11-12 | 2007-09-05 | 南京航空航天大学 | Piezoelectric pump |
| CN100434728C (en) * | 2005-04-07 | 2008-11-19 | 北京大学 | Minisize diffusion pump and preparation method thereof |
| CN100443397C (en) * | 2004-05-28 | 2008-12-17 | 哈尔滨工业大学 | Microcooling observing and controlling system and machining method thereof |
| CN1583541B (en) * | 2004-05-27 | 2010-09-29 | 哈尔滨工程大学 | Microdriver with multilayer driving membrane structure and manufacturing method thereof |
| CN101975154A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valve-free piezoelectric pump of logarithmic spiral combined tube |
| CN101975153A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valveless piezoelectric pump of elliptical combined pipe |
| CN1759247B (en) * | 2003-12-19 | 2012-06-20 | 巴特尔斯微技术股份有限公司 | Miniture device for transmitting and/or storing medium and possesses channel shape structure |
| CN102562540A (en) * | 2011-12-27 | 2012-07-11 | 太原理工大学 | Diaphragm compressed valve-less micropump |
| CN102691648A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe |
| CN102691647A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with, axially symmetric elliptic tubes |
| CN103644101A (en) * | 2013-11-11 | 2014-03-19 | 江苏大学 | Double-cavity parallel connection tapered tube valveless piezoelectric pump |
| CN104110355A (en) * | 2014-07-02 | 2014-10-22 | 南京理工大学 | Micropump device driven by photostrictive materials |
| CN105465590A (en) * | 2015-12-16 | 2016-04-06 | 太原重工股份有限公司 | Lubricating system and equipment with same |
| CN105526135A (en) * | 2015-12-08 | 2016-04-27 | 北京有色金属研究总院 | Valveless electrostatic micropump with low reverse drive voltage and double-sided pump diaphragms, and preparation method thereof |
| CN107023459A (en) * | 2016-01-29 | 2017-08-08 | 研能科技股份有限公司 | Minisize fluid control device |
| CN107246377A (en) * | 2017-06-20 | 2017-10-13 | 江苏大学 | A kind of unidirectional vortex tube structure Valveless piezoelectric pump and control method |
| CN107605713A (en) * | 2017-10-26 | 2018-01-19 | 电子科技大学 | A kind of valve free pump of big flow |
| CN107731766A (en) * | 2017-09-14 | 2018-02-23 | 电子科技大学 | A kind of self-loopa fluid means for systems-on-a-chip radiating |
| CN110985358A (en) * | 2019-12-17 | 2020-04-10 | 西安电子科技大学 | Micropump driven by magnetic control SMP composite film |
| CN112040723A (en) * | 2020-08-17 | 2020-12-04 | 武汉第二船舶设计研究所(中国船舶重工集团公司第七一九研究所) | Integrated micro radiator and radiating system |
| CN113833634A (en) * | 2021-09-01 | 2021-12-24 | 北京航空航天大学 | Electromagnetic drive type MEMS micropump and integrated processing technology thereof |
| CN115163465A (en) * | 2022-08-02 | 2022-10-11 | 江苏大学 | Pulse type miniature valveless diaphragm pump based on cavitation effect |
| CN115479015A (en) * | 2022-10-14 | 2022-12-16 | 西安石油大学 | Valveless micropump for conveying electrorheological fluid and pumping method thereof |
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| CN100335784C (en) * | 2003-12-05 | 2007-09-05 | 清华大学 | Mini jockey pump |
| CN1759247B (en) * | 2003-12-19 | 2012-06-20 | 巴特尔斯微技术股份有限公司 | Miniture device for transmitting and/or storing medium and possesses channel shape structure |
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| CN100443397C (en) * | 2004-05-28 | 2008-12-17 | 哈尔滨工业大学 | Microcooling observing and controlling system and machining method thereof |
| CN1329659C (en) * | 2004-07-12 | 2007-08-01 | 哈尔滨工业大学 | Valveless micro-pump and packaging method thereof |
| CN100335785C (en) * | 2004-11-12 | 2007-09-05 | 南京航空航天大学 | Piezoelectric pump |
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| CN101975154A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valve-free piezoelectric pump of logarithmic spiral combined tube |
| CN101975153A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valveless piezoelectric pump of elliptical combined pipe |
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| CN102691647A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with, axially symmetric elliptic tubes |
| CN102691647B (en) * | 2012-05-02 | 2015-07-08 | 江苏大学 | Valveless piezoelectric pump with, axially symmetric elliptic tubes |
| CN102691648B (en) * | 2012-05-02 | 2015-10-28 | 江苏大学 | A kind of axisymmetric logarithmic spiral pipe Valveless piezoelectric pump |
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| CN103644101A (en) * | 2013-11-11 | 2014-03-19 | 江苏大学 | Double-cavity parallel connection tapered tube valveless piezoelectric pump |
| CN104110355B (en) * | 2014-07-02 | 2016-04-20 | 南京理工大学 | The Micropump device that a kind of photo-induced telescopic material drives |
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| CN107246377B (en) * | 2017-06-20 | 2019-04-30 | 江苏大学 | A kind of unidirectional vortex tube structure Valveless piezoelectric pump and control method |
| CN107246377A (en) * | 2017-06-20 | 2017-10-13 | 江苏大学 | A kind of unidirectional vortex tube structure Valveless piezoelectric pump and control method |
| CN107731766A (en) * | 2017-09-14 | 2018-02-23 | 电子科技大学 | A kind of self-loopa fluid means for systems-on-a-chip radiating |
| CN107605713A (en) * | 2017-10-26 | 2018-01-19 | 电子科技大学 | A kind of valve free pump of big flow |
| CN110985358A (en) * | 2019-12-17 | 2020-04-10 | 西安电子科技大学 | Micropump driven by magnetic control SMP composite film |
| CN112040723A (en) * | 2020-08-17 | 2020-12-04 | 武汉第二船舶设计研究所(中国船舶重工集团公司第七一九研究所) | Integrated micro radiator and radiating system |
| CN112040723B (en) * | 2020-08-17 | 2022-10-28 | 武汉第二船舶设计研究所(中国船舶重工集团公司第七一九研究所) | Integrated micro radiator and radiating system |
| CN113833634A (en) * | 2021-09-01 | 2021-12-24 | 北京航空航天大学 | Electromagnetic drive type MEMS micropump and integrated processing technology thereof |
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| CN115163465B (en) * | 2022-08-02 | 2024-03-19 | 江苏大学 | Pulse miniature valveless diaphragm pump based on cavitation effect |
| CN115479015A (en) * | 2022-10-14 | 2022-12-16 | 西安石油大学 | Valveless micropump for conveying electrorheological fluid and pumping method thereof |
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