CN100335785C - Piezoelectric pump - Google Patents
Piezoelectric pump Download PDFInfo
- Publication number
- CN100335785C CN100335785C CNB2004100657058A CN200410065705A CN100335785C CN 100335785 C CN100335785 C CN 100335785C CN B2004100657058 A CNB2004100657058 A CN B2004100657058A CN 200410065705 A CN200410065705 A CN 200410065705A CN 100335785 C CN100335785 C CN 100335785C
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- Prior art keywords
- pump
- way valve
- piezoelectric vibrators
- circular double
- piezoelectric
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Abstract
The present invention relates to a piezoelectric pump with a novel structure, which belongs to the field of microelectronic machinery and is composed of a pump body (1), circular double piezoelectric vibrators (2), a valve body (3) of a one-way valve of a water inlet, a spring (4) of the one-way valve, a mass block (5) of the one-way valve, and a conical converging pipe / a conical diverging pipe (6) of a water outlet, wherein the two circular double piezoelectric vibrators alternately arranged in the pump body from top and bottom so as to form pump cavities. When alternating voltage in a certain frequency range is applied to the two circular double piezoelectric vibrators, the two circular double piezoelectric vibrators generate radial telescopic and stretched vibration so that the whole membrane upward and downwards vibrates so as to cause the volume changes of the pump cavities, and liquid is continuously pumped out under the action of the one-way valve of the water inlet and the converging pipe / the diverging pipe of the water outlet. The present invention has the advantages of simple structure, no influence by electromagnetic interference, control of tiny flow quantity, etc.
Description
Technical field:
Piezoelectric pump of the present invention belongs to the micropump in the microelectron-mechanical field.
Background technique:
Piezoelectric pump is a kind of novel fluid driver, it does not need the additional drives motor, but the inverse piezoelectric effect of utilizing piezoelectric material makes piezoelectric vibrator produce distortion, is changed by distortion generation pump chamber, thereby realizes fluid output or utilize piezoelectric vibrator to produce fluctuating fluid transfer.Because piezoelectric pump has the not available characteristics of conventional pump, driving source part, drive part and the pump housing three of conventional pump if can be integrated, thereby have simple in structure, volume is little, in light weight, low, the noiseless of power consumption, no electromagnetic interference, can be according to applying voltage or FREQUENCY CONTROL output tiny flow quantity or the like, invention that let it be to the greatest extent and development be the history in more than 20 year only, but the application of in fields such as aerospace vehicle, robot, automobile, medical apparatus, biological gene engineering, micromechanics, succeeding.
Summary of the invention:
The objective of the invention is to develop a kind of simple in structure, volume is little, flow is big, the new structure piezoelectric pump that technology is simple, performance is more stable.
For achieving the above object, piezoelectric pump comprises the pump housing, the water intake one-way valve valve body that check valve spring and one-way valve mass block are housed in it is contained in the top of the pump housing one end, water outlet collapsible tube/expanding duct is equipped with in pump housing the other end below, its characteristics comprise that also the two piezoelectric vibrators of two circles paste pump housing upper and lower surface respectively alternately, constitute closed pump chamber.This spline structure is more reasonable, and two two piezoelectric vibrators of circle are excited at the same time, and pump chamber changes and increases, and flow is improved thereupon.
Description of drawings:
Fig. 1 is that the master of piezoelectric pump structure looks sectional view.
Fig. 2 is the plan view of piezoelectric pump structure.
Label title among Fig. 1: 1, the pump housing, 2, circular two piezoelectric vibrators, 3, water intake one-way valve valve body, 4, check valve spring, 5, the one-way valve mass block, 6, the conical converging/expanding duct of water outlet.
Embodiment:
The present invention is based on circular two piezoelectric vibrator can swash the new structure piezoelectric pump that the radial expansion vibration and develop.It is mainly by the pump housing, circular two piezoelectric vibrators, and water intake one-way valve valve body, check valve spring, the one-way valve mass block, the conical converging of water outlet/expanding duct is formed.Fig. 1 is a concrete structure schematic representation of the present invention, and as seen from the figure, two two piezoelectric vibrators are staggered in the pump housing and install respectively up and down, and its outstanding part promptly is ceramic plate and silver-plated utmost point layer, and the polarised direction of two two piezoelectric vibrators is identical.Two two piezoelectric vibrators of circle stick on the pump housing with epoxy glue in a circumferential direction, and one-way valve and conical converging/expanding duct also use epoxy glue directly to stick on the pump housing, and technological process is simple like this, and cost reduces.
During driving, positive source is connected on respectively on the outstanding silver-plated electrode layer of the circular two piezoelectric vibrators of Fig. 1, and ground wire directly is connected on the pump housing and gets final product.When add certain frequency (general＜during 100Hz) alternating voltage, under the fixing situation of circumferential boundary, two two piezoelectric vibrators of circle will be simultaneously in opposite directions or vibration dorsad, during opposite vibration, pump chamber reduces, and vibrates pump chamber dorsad and increases.When pump chamber increased, liquid entered pump chamber from one-way valve and conical converging/expanding duct simultaneously, but because the characteristic of expanding duct, the fluid flow that enters pump chamber from expanding duct is less; When pump chamber reduced, closed check valve, liquid suffered oppression the back from the collapsible tube ejection, because the characteristic of collapsible tube, this moment, water outlet pressure reduced, and flow increases.
Claims (1)
1, a kind of piezoelectric pump, comprise the pump housing, the water inlet one-way valve valve body (3) that check valve spring (4) and one-way valve mass block (5) are housed in it is contained in the top of the pump housing one end, water outlet collapsible tube/expanding duct (6) is equipped with in pump housing the other end below, it is characterized in that, two two piezoelectric vibrators (2) of circle are pasted pump housing upper and lower surface respectively alternately, constitute closed pump chamber (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100657058A CN100335785C (en) | 2004-11-12 | 2004-11-12 | Piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100657058A CN100335785C (en) | 2004-11-12 | 2004-11-12 | Piezoelectric pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1605755A CN1605755A (en) | 2005-04-13 |
| CN100335785C true CN100335785C (en) | 2007-09-05 |
Family
ID=34764769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100657058A Expired - Fee Related CN100335785C (en) | 2004-11-12 | 2004-11-12 | Piezoelectric pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100335785C (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100338361C (en) * | 2005-08-12 | 2007-09-19 | 北京工业大学 | Valveless piezoelectric pump |
| CN100338363C (en) * | 2005-10-21 | 2007-09-19 | 北京工业大学 | Rotary abaculus valveless piezoelectric pump |
| JP4730437B2 (en) * | 2006-12-09 | 2011-07-20 | 株式会社村田製作所 | Piezoelectric pump |
| WO2010035862A1 (en) | 2008-09-29 | 2010-04-01 | 株式会社村田製作所 | Piezoelectric pump |
| CN101922442A (en) * | 2010-03-05 | 2010-12-22 | 吉林大学 | Dual-cavity dual-drive piezoelectric stack pump |
| CN102155389A (en) * | 2011-05-30 | 2011-08-17 | 浙江师范大学 | Valveless piezoelectric pump with asymmetrical runners |
| CN102261324B (en) * | 2011-06-21 | 2013-11-06 | 南京航空航天大学 | Valveless piezoelectric pump of conical spiral flow tube |
| CN103925199B (en) * | 2014-05-06 | 2016-06-15 | 吉林大学 | A kind of Novel stack laminar piezoelectricity membrane pump |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0435653A1 (en) * | 1989-12-27 | 1991-07-03 | Seiko Epson Corporation | Micropump |
| US6262519B1 (en) * | 1998-06-19 | 2001-07-17 | Eastman Kodak Company | Method of controlling fluid flow in a microfluidic process |
| CN1333861A (en) * | 1998-12-23 | 2002-01-30 | 巴特勒纪念研究院 | Piezoelectric micropump |
| CN1369638A (en) * | 2002-03-14 | 2002-09-18 | 胡军 | Miniatrized hydraulic electronic pump and its manufacture |
| WO2002084754A2 (en) * | 2000-10-25 | 2002-10-24 | Washington State University Research Foundation | Piezoelectric micro-transducers, methods of use and manufacturing methods for same |
| JP2003028068A (en) * | 2001-07-17 | 2003-01-29 | Matsushita Electric Ind Co Ltd | Piezoelectric pump |
| CN1442612A (en) * | 2003-04-11 | 2003-09-17 | 华中科技大学 | Valve less thin film driving micro pump |
-
2004
- 2004-11-12 CN CNB2004100657058A patent/CN100335785C/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0435653A1 (en) * | 1989-12-27 | 1991-07-03 | Seiko Epson Corporation | Micropump |
| US6262519B1 (en) * | 1998-06-19 | 2001-07-17 | Eastman Kodak Company | Method of controlling fluid flow in a microfluidic process |
| CN1333861A (en) * | 1998-12-23 | 2002-01-30 | 巴特勒纪念研究院 | Piezoelectric micropump |
| WO2002084754A2 (en) * | 2000-10-25 | 2002-10-24 | Washington State University Research Foundation | Piezoelectric micro-transducers, methods of use and manufacturing methods for same |
| JP2003028068A (en) * | 2001-07-17 | 2003-01-29 | Matsushita Electric Ind Co Ltd | Piezoelectric pump |
| CN1369638A (en) * | 2002-03-14 | 2002-09-18 | 胡军 | Miniatrized hydraulic electronic pump and its manufacture |
| CN1442612A (en) * | 2003-04-11 | 2003-09-17 | 华中科技大学 | Valve less thin film driving micro pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1605755A (en) | 2005-04-13 |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070905 Termination date: 20141112 |
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| EXPY | Termination of patent right or utility model |