CN2623906Y - Valveless film driven micropump - Google Patents
Valveless film driven micropump Download PDFInfo
- Publication number
- CN2623906Y CN2623906Y CN 03241229 CN03241229U CN2623906Y CN 2623906 Y CN2623906 Y CN 2623906Y CN 03241229 CN03241229 CN 03241229 CN 03241229 U CN03241229 U CN 03241229U CN 2623906 Y CN2623906 Y CN 2623906Y
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- pump
- water hole
- diaphragm
- utility
- pump chamber
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Abstract
The utility model discloses a valveless diaphragm driving micro pump, which is a single diaphragm dual cavity structure, the dual cavity middle is completely insulated by a driving diaphragm composed of a base diaphragm and a function diaphragm, each pump cavity realizes connection with the water intake hole through the respective taper diffusion tube, and with the water outtake hole through the respective taper constricted tube. The utility model adopts the single diaphragm dual cavity structure, which controls the changing of the two cavity volumes by use of the signal, making the volume change of the two cavities get timely complementation, ensuring stable flow rate, and moreover has characteristics of simple structure and preparing process, quick response, wide driving frequency, high controllability, low energy consumption and long service life and so on. Besides, the utility model can adopt the material and technology using the compatible micro machining and microcomputer mechanism art, possessing characteristics of small volume, low cost and easy integration with other micro detection and micro control components, applying to mass production and promising appreciable application prospect.
Description
Technical field
The utility model relates to the driving Micropump of film, belongs to microfluid transmission and control, micro mechanical technology field.
Background technique
Microfluidic control system can accurately detect and control the flow of per minute microlitre magnitude, at aspects such as the conveying of medicine trace, the injection of fuel trace, cell separation, integrating electronic element cooling and microchemical analyses important application prospects is arranged.Micropump is the important symbol of microfluid system development level as an important microfluid performer.Using at present more is the driving Micropump of film, and its flow control is that the to-and-fro motion by drive membrane causes that the Volume Changes of pump cavity realizes.The driving principle of drive membrane has that piezoelectricity, static, electromagnetism, hot gas are moving, bimetallic effect and shape memory effect driving etc.In using each quasi-driver of above driving mode, piezoelectric actuator is fast because of its response, bearing capacity is high, energy consumption is low and price is low etc., and characteristics receive much concern.The driving Micropump of film has or not movable valve block can be divided into again according to it valve Micropump and valve free pump.The valve Micropump is arranged often based on Mechanical Driven, principle is simple, and the manufacturing process maturation is easy to control, is the main flow of using at present; Valve free pump then utilizes the new features of fluid under micro-dimension, and the principle novelty is more suitable for microminiaturization, has bigger development prospect.No matter be to have or not movable valve block, the driving Micropump of using of film generally adopts monofilm list cavity configuration at present, is controlled the variation of single chamber volume by periodic signal.Suppose that first cycle cavity volume increases, then Micropump is in suction condition; Otherwise, second cycle pump cavity volume reducing, Micropump is in the state of pumping.In an operation cycle, it is interim that microfluid output only is present in lower half, pumps and suck and can not carry out simultaneously.Therefore, have the situation of cyclic fluctuation and flow shakiness, this considerable restraint applying of the driving Micropump of film.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art part, and a kind of non-valve membrane driven miniature pump is provided, and this Micropump is a kind of monofilm double cavity structure, can solve the problem of cyclic fluctuation and flow shakiness effectively, makes the output flow continous-stable.
For achieving the above object, the technical solution adopted in the utility model is: having pump chamber on the upper pump casing, conic diffuse, conical converging, water hole, left side and water hole, right side, last pump chamber links to each other with the water hole, left side by diffusing tube, link to each other with the water hole, right side by collapsible tube, lower pump body is arranged below upper pump casing, on lower pump body, have corresponding pump chamber down, conic diffuse, conical converging and water hole, corresponding left side, the water hole, right side, following pump chamber links to each other with the water hole, left side by diffusing tube, link to each other with the water hole, right side by collapsible tube, on, following pump chamber is isolated by the drive membrane that base membrane and function membrane constitute, and two diffusing tubes all equate with the angle of taper of two collapsible tubes.
Advantage of the present utility model is:
1. because the utility model has adopted the monofilm double cavity structure, utilize the variation of two cavity volume of SC sigmal control, two cavity volume are changed obtain real-time complementation, the output flow continous-stable, and have characteristics such as structure and technology are simple, response is fast, driver frequency is wide, controllability is strong, energy consumption is low, the life-span is long.
2. the utility model can adopt micro machining and micro mechanical technology compatible mutually material and technology manufacturing, has that volume is little, cost is low, easily and characteristics such as other little detection and micro control unit be integrated, is adapted to produce in enormous quantities.
Description of drawings
Fig. 1 is a kind of embodiment's of the utility model a structure diagram.
Fig. 2 is an A-A sectional drawing among Fig. 1.
Fig. 3 is Fig. 1 embodiment's a axonometric drawing.
Fig. 4 is the another kind of embodiment's of the utility model a structure diagram.
Fig. 5 is the structural representation of drive membrane among Fig. 4.
Embodiment
As Fig. 1, Fig. 2, shown in Figure 3, having pump chamber 4, conic diffuse 3, conical converging 7, water hole, left side 2 and water hole, right side 8 on the upper pump casing 1, base membrane 5 surfaces at upper pump casing 1 are equipped with one deck function membrane 6, form drive membrane, and this function membrane can be piezoelectric film or magnetoelectricity film etc.Last pump chamber 4 links to each other with water hole 2 by diffusing tube 3, links to each other with water hole 8 by collapsible tube 7.Lower pump body 13 is arranged below upper pump casing 1, on lower pump body 13, have corresponding pump chamber 11, conic diffuse 12, conical converging 10 and corresponding water hole 2, water hole 8 down, following pump chamber 11 links to each other with water hole 2 by diffusing tube 12, links to each other with water hole 8 by collapsible tube 10.Upper and lower pump chamber 4,11 is isolated by above-mentioned drive membrane.The angle of taper of 3,12, two collapsible tubes 7,10 of two diffusing tubes all equates.On upper pump casing 1, be equipped with capping 9, have water hole, corresponding left side 2 and water hole, right side 8 on it.
When conic diffuse 3,12, the angle of taper a of conical converging 7,12 is between 5 °～12 ° the time, and the output capability of this pump is bigger.
During work, nearly parabolic spherical shape distortion will take place in drive membrane under the excitation of alternate electrical signal, thereby make the volume generation increase of pump chamber and the alternate that reduces.Now feed-water end is made in water hole 2, the waterexit end is done in water hole 8, as last pump chamber 4 volume reducing Δ V, establishing pump chamber expanding duct 3 output flows is Q
1, collapsible tube 7 output flows are Q
2, because expanding duct, collapsible tube are tapered on direction of flow, according to the flow characteristic of collapsible tube, expanding duct tube fluid, Q
2＞Q
1, also promptly go up pump chamber 4 and be in the state of pumping; Simultaneously, the corresponding increase Δ of following pump chamber 11 volumes V, setting pump chamber expanding duct 12 input flow rates is Q
3, collapsible tube 10 input flow rates are Q
4, according to the flow characteristic of collapsible tube, expanding duct tube fluid, Q
3＞Q
4, also promptly descend pump chamber 11 to be in suction condition.2 ends in the water inlet, last pump chamber expanding duct 3 is actual to play the fluid contraction effect, and following pump chamber expanding duct 12 plays fluid expansion effect, Q
3＞Q
1, 2 ends are in suction condition to whole pump in the water inlet.At osculum 8 ends, last pump chamber collapsible tube 7 is actual to play the fluid expansion effect, and following pump chamber collapsible tube 10 plays fluid contraction effect, Q
2＞Q
4, whole pump is in the state of pumping at osculum 8 ends.Because upper and lower pump chamber 4,11 corresponding layouts, when last pump chamber 4 volumes increased, according to above analytic process in like manner as can be known, 2 ends still were in suction condition, are in the state of pumping at osculum 8 ends whole pump in the water inlet.Therefore, in an operation cycle, Micropump has been realized the continuous suction of fluid and has been pumped.Micropump flow size is by the amplitude and the FREQUENCY CONTROL of alternate electrical signal.Simultaneously, the utility model uses the good photosensitive polyimide film of stable chemical performance, insulating property as electricity isolated layer, has improved the reliability and the life-span of Micropump.
The key technical indexes of the present utility model can reach: boundary dimension is 8mm * 8mm * 1.5mm (length * wide * height), and cavity size is 5mm * 0.3mm (diameter * height), and piezoelectric film is of a size of 3mm * 3mm * 40 μ m; Flow is adjustable continuously at 0.5-100 μ L, min; Maeximum pump pressure is 2.6Kpa.
In conjunction with Fig. 1 certain narration is done in concrete technological process of the present utility model.This Micropump can be combined through silicon (glass)-silicon (glass) bonding technology by 3 layers of silicon (glass) structure, is respectively upper pump casing, lower pump body and capping.At first use thick film preparation directly to deposit the piezoelectric film of the about 40 μ m of one deck, use deep reaction ion etching technology to etch pump cavity, water inlet, osculum, collapsible tube, expanding duct at the back side of piezoelectric film at the Si of upper pump casing base lower surface.During pump cavity, be etched to the Si film thickness and be about 100 μ m on the etching.The preparation process of lower pump body is except the preparation of no piezoelectric film, and all the other are identical with upper pump casing.The making of capping is comparatively simple, only need etch accordingly to get final product into and out of the water hole.Three-decker adopts silicon (glass)-silicon (glass) Direct Bonding technology to be bonded together and just to have formed whole pump.Whole course of working is very simple, is suitable for producing in batches.
Structure of the present utility model also can be as Fig. 4, shown in Figure 5, and by upper pump casing 16, lower pump body 13 and drive membrane are formed, and drive membrane is made of base membrane 15 and function membrane 14, is fixed between upper pump casing 16 and the lower pump body 13.
Obviously, the utility model is not only applicable to piezoelectric micropump, and can be applicable to other film driving Micropump, drives Micropump, magnetic force film driving Micropump, bimetal heat driving Micropump, hot gas driving Micropump etc. as the SMA film.
Claims (3)
1. non-valve membrane driven miniature pump, it is characterized in that: on upper pump casing (1), have pump chamber (4), conic diffuse (3), conical converging (7), water hole (2), left side and water hole, right side (8), last pump chamber (4) links to each other with water hole, left side (2) by diffusing tube (3), link to each other with water hole, right side (8) by collapsible tube (7), lower pump body (13) is arranged below upper pump casing (1), on lower pump body (13), have corresponding pump chamber (11) down, conic diffuse (12), conical converging (10) and water hole (2), corresponding left side, water hole, right side (8), following pump chamber (11) links to each other with water hole, left side (2) by diffusing tube (12), link to each other with water hole, right side (8) by collapsible tube (10), on, following pump chamber (4), (11) drive membrane that is made of base membrane (5) and function membrane (6) is isolated two diffusing tubes (3), (12) with two collapsible tubes (7), (10) angle of taper all equates.
2. non-valve membrane driven miniature pump according to claim 1 is characterized in that: be equipped with capping (9) on upper pump casing (1), have water hole, corresponding left side (2) and water hole, right side (8) on it.
3. non-valve membrane driven miniature pump according to claim 1 and 2 is characterized in that: conic diffuse (3), (12), the angle of taper a of conical converging (7), (10) is 5 °～12 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03241229 CN2623906Y (en) | 2003-04-11 | 2003-04-11 | Valveless film driven micropump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03241229 CN2623906Y (en) | 2003-04-11 | 2003-04-11 | Valveless film driven micropump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2623906Y true CN2623906Y (en) | 2004-07-07 |
Family
ID=34250224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03241229 Expired - Lifetime CN2623906Y (en) | 2003-04-11 | 2003-04-11 | Valveless film driven micropump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2623906Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105864004A (en) * | 2016-02-03 | 2016-08-17 | 河南工业大学 | Micro-injection series micropump |
| CN108397373A (en) * | 2018-02-23 | 2018-08-14 | 清华大学深圳研究生院 | A kind of valveless electromagnetism Micropump and preparation method thereof |
| WO2019061946A1 (en) * | 2017-09-30 | 2019-04-04 | 南方科技大学 | Microfluidic pump |
-
2003
- 2003-04-11 CN CN 03241229 patent/CN2623906Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105864004A (en) * | 2016-02-03 | 2016-08-17 | 河南工业大学 | Micro-injection series micropump |
| WO2019061946A1 (en) * | 2017-09-30 | 2019-04-04 | 南方科技大学 | Microfluidic pump |
| CN108397373A (en) * | 2018-02-23 | 2018-08-14 | 清华大学深圳研究生院 | A kind of valveless electromagnetism Micropump and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20051221 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |