CN103334907A - Cantilever-type piezoelectric diaphragm pump - Google Patents
Cantilever-type piezoelectric diaphragm pump Download PDFInfo
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- CN103334907A CN103334907A CN2013102870404A CN201310287040A CN103334907A CN 103334907 A CN103334907 A CN 103334907A CN 2013102870404 A CN2013102870404 A CN 2013102870404A CN 201310287040 A CN201310287040 A CN 201310287040A CN 103334907 A CN103334907 A CN 103334907A
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Abstract
The invention discloses a cantilever-type piezoelectric diaphragm pump. The cantilever-type piezoelectric diaphragm pump is composed of a vibration excitation unit, a pump cavity body and a flow channel structure. The vibration excitation unit is composed of a pump body, an adjustable pressing mechanism, a piezoelectric vibrator, a vibration transmission piston and a PET diaphragm. The piezoelectric vibrator is composed of a copper substrate and a piezoelectric ceramic piece. Compared with the traditional method of periphery fixing or wave joint supporting of a circular oscillator, the method of cantilever supporting of the rectangular piezoelectric vibrator has the advantages that deflection is large, tail end output amplitude is large, and simple harmonic frequency is low. Meanwhile, the length of a cantilever of the rectangular piezoelectric vibrator is adjustable, and therefore a vibration system has different vibration characteristics so as to meet different requirements for output performance. The adopted PET diaphragm material has the advantages of being good in abrasive resistance, dimensional stability and electrical insulation, nontoxic, impermeable, light in weight and the like, and further has the advantages of being safe and reliable, free of pollution and the like as a pump cavity vibrating diaphragm for conveying chemical and medical liquid. The piezoelectric vibrator is not contacted with the conveyed liquid directly, and therefore the piezoelectric pump can work at high working voltage and is good in output performance.
Description
Technical field
The present invention relates to a kind of piezoelectric pump, particularly a kind of cantilever type piezoelectric diaphragm pump.
Background technique
To deepening continuously that piezoelectric pump is studied, the piezoelectricity pump performance also significantly improves along with both at home and abroad.Piezoelectric pump has simple in structure, and energy consumption is low, the little advantage such as in light weight of volume, and more traditional mechanical pump is compared, and its fluid in fields such as biomedicine, fine chemistry industry, medical research carries occasion to have clear superiority.
At present, single chamber of domestic development or multi-cavity piezoelectric pump directly utilize the vibration deformation of piezoelectric vibrator to change pump chamber mostly, thereby reach the purpose that fluid is carried.The advantage of this kind structure is simple in structure, and compactness is easy to the miniaturization microminiaturization.But the preparation of piezoelectric vibrator is normally arrived piezoelectric crystal tablet with substrate bonding, when flowing through pump chamber, fluid directly contacts with piezoelectric vibrator, so in actual applications, issuable harmful matter can pollute medical medicine company when making piezoelectric pump, and piezoelectric pump metal substrate in fluid delivery process also may cause chemical depletion to some responsive reagent.
Except the pollution of piezoelectric material convection cell, in order to guarantee the Security of medical treatment, the operating voltage of piezoelectric pump can not be too high, and this also often makes the output performance of pump not reach the expection requirement.In addition, the conventional piezoelectric pump adopts the periphery of circular oscillator to fix or ripple knot supporting way mostly, exists the oscillator amount of deflection little, and output amplitude is less, simple harmonic quantity frequency problem of higher.
Summary of the invention
The objective of the invention is to remedy the deficiencies in the prior art, provide a kind of and provide excitation with the rectangle piezoelectric vibrator, and with the cantilever type piezoelectric diaphragm pump of PET film as barrier film.
The present invention is made up of exciting unit, pump chamber cavity and flow passage structure,
Described exciting unit is to be made of shake piston and PET barrier film of the pump housing, adjustable hold-down mechanism, piezoelectric vibrator, biography, the pump housing is provided with rectangular recess and strip hole, adjustable hold-down mechanism is made up of last compact heap and following compact heap, in the rectangular recess on the boss embedding pump housing of following compact heap bottom, adjustable hold-down mechanism can horizontally slip in rectangular recess, and can by four run through strip hole on the pump housing be bolted to a certain position of the pump housing; Piezoelectric vibrator is to be made of copper base and piezoelectric ceramic, and piezoelectric ceramic is by solidifying the gluing upper and lower surface that is connected on copper base, and copper base is connected power supply with piezoelectric constant difference extraction electrode; Copper base one end is clamped on the adjustable hold-down mechanism between the compact heap and following compact heap, and an end of copper base has through hole, and the through hole suit passes the screw rod that shakes, and with about two nuts screw connection; The biography screw rod lower end that shakes is connected by screw thread and the biography piston that shakes, and screws with first nut; Biography is shaken piston lower surface and PET barrier film upper surface with solidifying gluing connecing.After piezoelectric vibrator is connected with the mains, under the excitation pulse effect of alternation, piezoelectric ceramic produce to shrink and elongation, makes the copper base that is bonded on the piezoelectric ceramic produce bending deflection alternately, and vibration is passed to the PET barrier film by the biography of piezoelectric vibrator end screw rod and the biography piston that shakes that shakes.
Described pump chamber cavity is to be made of last pump cover, following pump cover and O-ring seal, has circular groove on last pump cover and the following pump cover, and O-ring seal is sleeved in the circular groove, in the middle of two O-ring seals are clamped in the PET barrier film up and down, realizes flexible support; Form pump chamber between PET barrier film and the following pump cover, hold the fluid of conveying in the pump chamber; Last pump cover and following pump cover all are sleeved in the circular groove of the pump housing, and are installed on the pump housing by four uniform bolt.
Described flow passage structure is to be made of inlet one-way valve, inlet pipe, outlet conduit and outlet one-way valve, inlet one-way valve is by solidifying gluing being connected on down on the valve seat of a pump cover left side, the outlet one-way valve is by solidifying gluing being connected on down on the right valve seat of pump cover, and inlet pipe and outlet conduit stick with glue the valve opening place, the left and right sides that is connected on down pump cover respectively.When PET barrier film epirelief was out of shape, it is big that pump chamber becomes, and pressure reduces, and under the effect of inside and outside differential pressure, fluid enters pump chamber from the inlet pipe inflow and by inlet one-way valve; When the PET barrier film was recessed, pump chamber diminished, and pressure increases, and under the effect of inside and outside differential pressure, fluid is discharged pump chamber by the outlet one-way valve, flows out from outlet conduit.Enter next work cycle then.
The valve block of inlet one-way valve and outlet one-way valve is wheeled construction, inlet one-way valve and outlet one-way valve all are made up of valve block, elastic beam and retaining ring, three elastic beams are distributed between valve block and the retaining ring, and retaining ring is with solidifying on the gluing valve seat that is connected on down on the pump cover.When there were pressure reduction in inlet one-way valve or outlet one-way valve both sides, pressure action deformed elastic beam, realizes opening of valves.
The invention has the beneficial effects as follows:
1, the present invention adopts rectangle piezoelectric vibrator cantilever support mode, fixes or ripple knot supports and has amount of deflection big compared to the periphery of the circular oscillator of tradition, and terminal output amplitude is big, the advantage that the simple harmonic quantity frequency is lower.Simultaneously, realize that rectangle piezoelectric vibrator jib-length is adjustable, make vibration system have different vibration characteristics, satisfied the requirement of different output performances.
2, the PET diaphragm material that adopts of the present invention has good wear resistance, dimensional stability and electrical insulating property, and nontoxic, impermeable, advantage such as quality is light, and the pump chamber vibrating diaphragm as carrying chemistry and medical fluid has advantages such as safe and reliable, pollution-free.
3, piezoelectric vibrator of the present invention does not directly contact with the conveying fluid and makes piezoelectric pump to work under bigger operating voltage, has good output characteristics.
Description of drawings
Fig. 1 is schematic perspective view of the present invention.
Fig. 2 is sectional view of the present invention.
Fig. 3 is right elevation of the present invention.
Fig. 4 is plan view of the present invention.
Fig. 5 is bottom view of the present invention.
Fig. 6 is the plan view of inlet one-way valve of the present invention and outlet one-way valve valve block.
Fig. 7 is that schematic representation is closed and opened to inlet one-way valve of the present invention or outlet one-way valve valve block.
Among the figure: the 1-pump housing, the adjustable hold-down mechanism of 2-, the last compact heap of 21-, compact heap under the 22-, the 3-copper base, the 4-piezoelectric ceramic, 5-passes the screw rod that shakes, and 6-passes the piston that shakes, the 7-PET barrier film, the last pump cover of 8-, pump cover under the 9-, the 10-O-ring seal, 11-inlet one-way valve, 12-inlet pipe, the 13-outlet conduit, 14-exports one-way valve, 15-bolt, the 51-nut, 52-first nut, A-pump chamber.
Embodiment
Consult Fig. 1 to shown in Figure 5, present embodiment is made up of exciting unit, pump chamber cavity and flow passage structure,
Described exciting unit is to be made of shake piston 6 and PET barrier film 7 of the pump housing 1, adjustable hold-down mechanism 2, piezoelectric vibrator, biography, the pump housing 1 is provided with rectangular recess and strip hole, adjustable hold-down mechanism 2 is made up of last compact heap 21 and following compact heap 22, in the rectangular recess on the boss embedding pump housing 1 of following compact heap 22 bottoms, adjustable hold-down mechanism 2 can horizontally slip in rectangular recess, and can by four run through strip hole on the pump housing 1 be bolted to the pump housing 1 a certain position; Piezoelectric vibrator is to be made of copper base 3 and piezoelectric ceramic 4, and piezoelectric ceramic 4 is by solidifying the gluing upper and lower surface that is connected on copper base 3, and copper base 3 is connected power supply with piezoelectric constant 4 difference extraction electrodes; Copper base 3 one ends are clamped on the adjustable hold-down mechanism 2 between the compact heap 21 and following compact heap 22, and an end of copper base 3 has through hole, and the through hole suit passes the screw rod 5 that shakes, and with about two nuts 51 screw connection; Biography screw rod 5 lower ends that shake are connected by screw thread and the biography piston 6 that shakes, and screw with first nut 52; Biography is shaken piston 6 lower surfaces and PET barrier film 7 upper surfaces with solidifying gluing connecing.After piezoelectric vibrator is connected with the mains, under the excitation pulse effect of alternation, piezoelectric ceramic 4 produces and shrinks and elongation, makes the copper base 3 that is bonded on the piezoelectric ceramic 4 produce bending deflections alternately, and vibration is passed to PET barrier film 7 by the biography of piezoelectric vibrator end screw rod 5 and the biography piston 6 that shakes that shakes.
Described pump chamber cavity is to be made of last pump cover 8, following pump cover 9 and O-ring seal 10, have circular groove on last pump cover 8 and the following pump cover 9, O-ring seal 10 is sleeved in the circular groove, in the middle of two O-ring seals 10 are clamped in PET barrier film 7 up and down, realizes flexible support; Form pump chamber A between PET barrier film 7 and the following pump cover 9, hold the fluid of conveying in the pump chamber A; Last pump cover 8 and following pump cover 9 all are sleeved in the circular groove of the pump housing 1, and are fixedly mounted on the pump housing 1 by four uniform bolts 15.
Described flow passage structure is to be made of inlet one-way valve 11, inlet pipe 12, outlet conduit 13 and outlet one-way valve 14, inlet one-way valve 11 is by solidifying gluing being connected on down on the pump cover 9 left valve seats, outlet one-way valve 14 is by solidifying gluing being connected on down on the pump cover 9 right valve seats, and inlet pipe 12 and outlet conduit 13 stick with glue the valve opening place, the left and right sides that is connected on down pump cover 9 respectively.When PET barrier film 7 epireliefs were out of shape, it is big that pump chamber A volume becomes, and pressure reduces, and under the effect of inside and outside differential pressure, fluid enters pump chamber A from inlet pipe 12 inflows and by inlet one-way valve 11; When PET barrier film 7 was recessed, pump chamber A volume diminished, and pressure increases, and under the effect of inside and outside differential pressure, fluid is discharged pump chamber A by outlet one-way valve 14, flows out from outlet conduit 13.Enter next work cycle then.
Consult shown in Figure 6, the valve block of inlet one-way valve 11 and outlet one-way valve 14 is wheeled construction, inlet one-way valve 11 and outlet one-way valve 14 all are made up of valve block, elastic beam and retaining ring, three elastic beams are distributed between valve block and the retaining ring, and retaining ring is with solidifying on the gluing valve seat that is connected on down on the pump cover 9.When there were pressure reduction in inlet one-way valve 11 or outlet one-way valve 14 both sides, pressure action deformed elastic beam, realizes opening of valves.
Consult shown in Figure 7ly, schematic representation is closed and opened to inlet one-way valve 11 and outlet one-way valve 14 valve blocks, and fluid can only flow into by a direction, and can not oppositely flow into, and realizes the unidirectional function of ending.
Claims (2)
1. cantilever type piezoelectric diaphragm pump is characterized in that: formed by exciting unit, pump chamber cavity and flow passage structure,
Described exciting unit is to be made of shake piston (6) and PET barrier film (7) of the pump housing (1), adjustable hold-down mechanism (2), piezoelectric vibrator, biography, the pump housing (1) is provided with rectangular recess and strip hole, adjustable hold-down mechanism (2) is made up of last compact heap (21) and following compact heap (22), in the rectangular recess on the boss embedding pump housing (1) of following compact heap (22) bottom, adjustable hold-down mechanism (2) can horizontally slip in rectangular recess, and can by four run through that the pump housing (1) goes up strip hole be bolted to a certain position of the pump housing (1); Piezoelectric vibrator is to be made of copper base (3) and piezoelectric ceramic (4), and piezoelectric ceramic (4) is by solidifying the gluing upper and lower surface that is connected on copper base (3), and copper base (3) is connected power supply with piezoelectric constant (4) difference extraction electrode; Copper base (3) one ends are clamped at adjustable hold-down mechanism (2) and go up between compact heap (21) and the following compact heap (22), and an end of copper base (3) has through hole, the through hole suit biography screw rod (5) that shakes, and with about two nuts (51) screw connection; Biography screw rod (5) lower end that shakes is connected by screw thread and the biography piston (6) that shakes, and screws with first nut (52); Biography is shaken piston (6) lower surface and PET barrier film (7) upper surface with solidifying gluing connecing;
Described pump chamber cavity is to be made of last pump cover (8), following pump cover (9) and O-ring seal (10), have circular groove on last pump cover (8) and the following pump cover (9), O-ring seal (10) is sleeved in the circular groove, in the middle of two O-ring seals (10) are clamped in PET barrier film (7) up and down, realize flexible support; Form pump chamber (A) between PET barrier film (7) and the following pump cover (9), hold the fluid of conveying in the pump chamber (A); Last pump cover (8) and following pump cover (9) all are sleeved in the circular groove of the pump housing (1), and are fixedly mounted on the pump housing 1 by four uniform bolts (15);
Described flow passage structure is to be made of inlet one-way valve (11), inlet pipe (12), outlet conduit (13) and outlet one-way valve (14), inlet one-way valve (11) is by solidifying gluing being connected on down on the left valve seat of pump cover (9), outlet one-way valve (14) is by solidifying gluing being connected on down on the right valve seat of pump cover (9), and inlet pipe (12) and outlet conduit (13) stick with glue the valve opening place, the left and right sides that is connected on down pump cover (9) respectively; When PET barrier film (7) epirelief was out of shape, it is big that pump chamber (A) volume becomes, and pressure reduces, and under the effect of inside and outside differential pressure, fluid enters pump chamber (A) from inlet pipe (12) inflow and by inlet one-way valve (11); When PET barrier film (7) was recessed, pump chamber (A) volume diminished, and pressure increases, and under the effect of inside and outside differential pressure, fluid is discharged pump chamber (A) by outlet one-way valve (14), flows out from outlet conduit (13).
2. a kind of cantilever type piezoelectric diaphragm pump according to claim 1, it is characterized in that: the valve block of described inlet one-way valve (11) and outlet one-way valve (14) is wheeled construction, inlet one-way valve (11) and outlet one-way valve (14) all are made up of valve block, elastic beam and retaining ring, three elastic beams are distributed between valve block and the retaining ring, and retaining ring is with solidifying on the gluing valve seat that is connected on down on the pump cover (9).
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| Application Number | Priority Date | Filing Date | Title |
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| CN2013102870404A CN103334907A (en) | 2013-07-08 | 2013-07-08 | Cantilever-type piezoelectric diaphragm pump |
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| CN2013102870404A CN103334907A (en) | 2013-07-08 | 2013-07-08 | Cantilever-type piezoelectric diaphragm pump |
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Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103573593A (en) * | 2013-11-01 | 2014-02-12 | 刘勇 | Piezoelectric flexible diaphragm pump |
| CN103899519A (en) * | 2014-04-22 | 2014-07-02 | 吉林大学 | Piezoelectric cantilever beam driving type piezoelectric diaphragm pump |
| CN103925199A (en) * | 2014-05-06 | 2014-07-16 | 吉林大学 | Novel laminated piezoelectric diaphragm pump |
| CN105089994A (en) * | 2015-09-21 | 2015-11-25 | 吉林大学 | Valveless piezoelectric pump for double-cantilever oscillator |
| CN105587599A (en) * | 2015-05-08 | 2016-05-18 | 长春工业大学 | Longitudinal vibration patch type passive jet propulsion device and driving method thereof |
| CN105587604A (en) * | 2015-05-08 | 2016-05-18 | 长春工业大学 | Patch sandwich bending vibration compound excitation passive jet propulsion device and driving method thereof |
| CN105587626A (en) * | 2015-05-08 | 2016-05-18 | 长春工业大学 | Sandwich type longitudinal bending complex excitation active water spraying propulsion device and driving method thereof |
| CN106089685A (en) * | 2016-08-23 | 2016-11-09 | 清华大学苏州汽车研究院（吴江） | A kind of diaphragm pump one-way valve |
| CN106602107A (en) * | 2016-12-21 | 2017-04-26 | 武汉理工大学 | Active water-draining type fuel cell |
| CN108105073A (en) * | 2018-01-31 | 2018-06-01 | 吉林大学 | A kind of bistable state inertia-type piezoelectric pump based on piezoelectric fibre composite material driving |
| CN108204355A (en) * | 2018-01-12 | 2018-06-26 | 长春工业大学 | A kind of 3 points of clamped membrane valve piezoelectric pumps |
| CN108278197A (en) * | 2017-01-05 | 2018-07-13 | 研能科技股份有限公司 | Micro pressure power plant |
| CN109139439A (en) * | 2018-10-24 | 2019-01-04 | 任修勇 | A kind of fluid diaphragm pump |
| US10619631B2 (en) | 2017-01-05 | 2020-04-14 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| CN111692069A (en) * | 2020-06-19 | 2020-09-22 | 燕山大学 | Drive and valve control integrated fluid drive device |
| CN112177903A (en) * | 2020-09-29 | 2021-01-05 | 长春工业大学 | Rectangular cavity flexible membrane double-vibrator valveless piezoelectric pump |
| CN112267985A (en) * | 2020-10-28 | 2021-01-26 | 燕山大学 | Multi-source driving controllable synthetic jet pump system and control method thereof |
| CN112283080A (en) * | 2019-07-24 | 2021-01-29 | 上海新微技术研发中心有限公司 | Piezoelectric micropump |
| CN113464410A (en) * | 2021-08-19 | 2021-10-01 | 浙江大学 | Pressure stepless adjustable large-flow piezoelectric pump |
| CN113944615A (en) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | Integrated micro-piezoelectric liquid pumping device and manufacturing and driving method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103573593B (en) * | 2013-11-01 | 2015-11-11 | 刘勇 | Piezoelectric flexible diaphragm pump |
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| CN103925199B (en) * | 2014-05-06 | 2016-06-15 | 吉林大学 | A kind of Novel stack laminar piezoelectricity membrane pump |
| CN103925199A (en) * | 2014-05-06 | 2014-07-16 | 吉林大学 | Novel laminated piezoelectric diaphragm pump |
| CN105587604A (en) * | 2015-05-08 | 2016-05-18 | 长春工业大学 | Patch sandwich bending vibration compound excitation passive jet propulsion device and driving method thereof |
| CN105587626A (en) * | 2015-05-08 | 2016-05-18 | 长春工业大学 | Sandwich type longitudinal bending complex excitation active water spraying propulsion device and driving method thereof |
| CN105587599A (en) * | 2015-05-08 | 2016-05-18 | 长春工业大学 | Longitudinal vibration patch type passive jet propulsion device and driving method thereof |
| CN105089994B (en) * | 2015-09-21 | 2017-05-10 | 吉林大学 | Valveless piezoelectric pump for double-cantilever oscillator |
| CN105089994A (en) * | 2015-09-21 | 2015-11-25 | 吉林大学 | Valveless piezoelectric pump for double-cantilever oscillator |
| CN106089685A (en) * | 2016-08-23 | 2016-11-09 | 清华大学苏州汽车研究院（吴江） | A kind of diaphragm pump one-way valve |
| CN106602107A (en) * | 2016-12-21 | 2017-04-26 | 武汉理工大学 | Active water-draining type fuel cell |
| US10619631B2 (en) | 2017-01-05 | 2020-04-14 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| CN108278197A (en) * | 2017-01-05 | 2018-07-13 | 研能科技股份有限公司 | Micro pressure power plant |
| CN108204355A (en) * | 2018-01-12 | 2018-06-26 | 长春工业大学 | A kind of 3 points of clamped membrane valve piezoelectric pumps |
| CN108105073A (en) * | 2018-01-31 | 2018-06-01 | 吉林大学 | A kind of bistable state inertia-type piezoelectric pump based on piezoelectric fibre composite material driving |
| CN109139439A (en) * | 2018-10-24 | 2019-01-04 | 任修勇 | A kind of fluid diaphragm pump |
| CN112283080A (en) * | 2019-07-24 | 2021-01-29 | 上海新微技术研发中心有限公司 | Piezoelectric micropump |
| CN111692069A (en) * | 2020-06-19 | 2020-09-22 | 燕山大学 | Drive and valve control integrated fluid drive device |
| CN111692069B (en) * | 2020-06-19 | 2021-04-09 | 燕山大学 | Drive and valve control integrated fluid drive device |
| CN112177903A (en) * | 2020-09-29 | 2021-01-05 | 长春工业大学 | Rectangular cavity flexible membrane double-vibrator valveless piezoelectric pump |
| CN112267985A (en) * | 2020-10-28 | 2021-01-26 | 燕山大学 | Multi-source driving controllable synthetic jet pump system and control method thereof |
| CN112267985B (en) * | 2020-10-28 | 2021-07-30 | 燕山大学 | Multi-source driving controllable synthetic jet pump system and control method thereof |
| CN113464410A (en) * | 2021-08-19 | 2021-10-01 | 浙江大学 | Pressure stepless adjustable large-flow piezoelectric pump |
| CN113464410B (en) * | 2021-08-19 | 2022-03-22 | 浙江大学 | Pressure stepless adjustable large-flow piezoelectric pump |
| CN113944615A (en) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | Integrated micro-piezoelectric liquid pumping device and manufacturing and driving method thereof |
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Application publication date: 20131002 |