CN103899519A - Piezoelectric cantilever beam driving type piezoelectric diaphragm pump - Google Patents

Piezoelectric cantilever beam driving type piezoelectric diaphragm pump Download PDF

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Publication number
CN103899519A
CN103899519A CN201410161539.5A CN201410161539A CN103899519A CN 103899519 A CN103899519 A CN 103899519A CN 201410161539 A CN201410161539 A CN 201410161539A CN 103899519 A CN103899519 A CN 103899519A
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China
Prior art keywords
piezoelectric cantilever
piezoelectric
side cavity
cantilever beam
diaphragm pump
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CN201410161539.5A
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Chinese (zh)
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CN103899519B (en
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吴越
杨志刚
刘国君
李新波
刘超
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Harbin Zhiye Technology Co.,Ltd.
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Jilin University
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Abstract

The invention relates to a piezoelectric cantilever beam driving type piezoelectric diaphragm pump. The piezoelectric cantilever beam driving type piezoelectric diaphragm pump comprises a power end and a hydraulic end (3), wherein the power end is composed of a base (1) and a piezoelectric cantilever beam (2), and the hydraulic end (3) is composed of cavities, an outlet pipe, an inlet pipe and one-way valves arranged between the cavities, and the outlet pipe and the inlet pipe; one end of the piezoelectric cantilever beam (2) is connected with the base (1), the other end of the piezoelectric cantilever beam (2) is connected with the first side cavity (31) of the hydraulic end (3), and supporting arms on the base (1) are connected with the second side cavity (32) of the hydraulic end (3). The piezoelectric cantilever beam driving type piezoelectric diaphragm pump is characterized in that the supporting arms on the base (1) are parallel to the centerline of the piezoelectric cantilever beam (2), and the power end and the hydraulic end (3) can be assembled and disassembled; the piezoelectric cantilever beam (2) and the supporting arms are distributed in a staggered mode and namely have no overlap region when being projected on a combination surface of the first side cavity (31) and the second side cavity (32); according to the piezoelectric diaphragm pump, the hydraulic end (3) is replaceable, the compression ratio is large, and the piezoelectric cantilever beam (2) bears small impact in a working process.

Description

A kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump
Technical field
The invention belongs to fluid transportation art, be specifically related to a kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump device.
Background technique
Piezoelectric pump diaphragm pump is a kind of displacement pump being driven by piezoelectric vibrator, have be simple in structurely convenient to produce in enormous quantities, volume urine in microminiaturized, be convenient to Digital Control and the advantage such as the life-span is long.The most basic piezoelectric pump causes that by the bending deflection of plate piezoelectric oscillator cavity volume changes, form in conjunction with the one-way valve of two opposed the ability that fluid orientation goes out to flow, this piezoelectric pump is because piezoelectric vibrator amount of deformation is little, in the time carrying gas-liquid heterogeneous fluid, performance is very unstable, and the method that promotes this performance is to increase the compression ratio of pump, i.e. the ratio of amount of deformation and initial pump chamber.There are at present two kinds of modes: a kind of is to increase piezoelectric material and institute forms the output displacement of driving mechanism, increases Wall deformation amount, improves compression ratio, is occurring displacement is amplified and utilization is resonated driving mode and new structure aspect this; Another kind is the cavity size that reduces pump chamber, but along with reducing of cavity volume, in the time that the size of cavity in driving mechanism moving direction is less than the motion amplitude of driving mechanism, there will be impact shock, reduce the output performance of pump, and the working life of significantly reducing piezoelectric vibrator.
Simultaneously, due to piezoelectric pump also have advantages of simple in structure, cost is low and be easy to the aspects such as miniaturization, be suitable for very much occasion disposable or that carry special fluid, but the piezoelectric material of most of type can cause adverse effect to environment after abandoning, and be unfavorable for bringing into play the feature of piezoelectric constant long service life, have environmental protection and waste of material problem.
Summary of the invention
Carry gas and heterogeneous fluid ability in order to solve conventional piezoelectric pump, cavity volume reduces rear percussion obviously and piezoelectric pump act as disposable products and abandon after the waste to material and the pollution pollution problem to environment, the piezoelectricity diaphragm pump that a kind of piezoelectric cantilever drives has been proposed, its power end and fluid end can split fast, power end is reusable and fluid end is replaceable, can improve the utilization ratio of its material.Simultaneously, it has the specific pump cavity configuration that rubber material forms, can effectively suppress the impact shock that the piezoelectric material that reduces to cause due to housing depth and driving mechanism thereof produce, improving the hydraulic performance decline and life-span reduction problem of having avoided the little limitation of movement of its cavity to cause in carrying out-phase fluid property.
For achieving the above object, the present invention is by the following technical solutions:
The piezoelectricity diaphragm pump that a kind of piezoelectric cantilever of the present invention drives, comprises the power end of pedestal and piezoelectric cantilever formation and the fluid end that cavity, one-way valve, gateway pipe form.
On pedestal, there is whole machine installation hole pump can be connected with other structure, be furnished with the cantilever mounting hole and the pad that connect piezoelectric cantilever, and be furnished with the support arm being connected with pump chamber.Piezoelectric cantilever one end is fixed on pedestal, and the other end is connected with pump chamber.Described pedestal and piezoelectric cantilever form power end jointly.
The first side cavity that pump chamber is made up of rubber material and second side cavity two-part form enclosed space by bonding or edge press seal, wherein: the first side cavity outside is furnished with the upside support block that piezoelectric cantilever Input Forces is disperseed, and is furnished with the cantilever mounting hole that is connected use with piezoelectric cantilever on support block; The second side cavity outside is furnished with two downside support blocks, on downside support block, be furnished with the support mounting hole being connected with base supports arm and the mounting hole that one-way valve and gateway pipe are installed, flowing hole UNICOM is passed through with cavity inner side in mounting hole bottom, described entry and exit, fluid flows into by flowing hole or flows out pump chamber, between two flowing holes of the inner side of the second side cavity pump chamber, is furnished with for reducing the guiding gutter of fluid in inside cavity flow resistance.Described cavity and be arranged on one-way valve on cavity and go out, enter the mouth of pipe and formed the fluid end in the piezoelectricity diaphragm pump that this piezoelectric cantilever drives.
Described cantilever mounting hole, support mounting hole center line are parallel to each other, piezoelectric cantilever is connected with cavity by cantilever mounting hole, support arm is connected with cavity by supporting mounting hole, applies along the power of above-mentioned mounting hole centerline direction and power end can be separated or assembles with fluid end.
In setting, the second side cavity junction plane is substantially horizontal, cavity diaphragm movement direction is vertical direction, piezoelectric cantilever does not overlap with support arm projection on horizontal plane, this alternating expression is arranged can guarantee that support arm is not on piezoelectric cantilever ouput force action direction in piezoelectric cantilever deforms process, after the first side cavity contacts with the second side cavity, the power of piezoelectric cantilever amount will make whole cavity generation elastic bending deflection, the resiliently deformable of cavity will be stored unnecessary power and discharge in the next operation cycle, can reduce increases its working life to the impact of piezoelectric cantilever.
Accompanying drawing explanation
Fig. 1 is the structural representation of this patent.
Fig. 2 is the each modular construction of this patent and assembling relationship figure.
Fig. 3 is the second side cavity and its accessory structure and assembling relationship figure.
Embodiment
The embodiment providing below in conjunction with accompanying drawing is described in further detail structure of the present invention and principle.
See figures.1.and.2, power end and fluid end 3 that piezoelectric cantilever drive-type piezoelectricity diaphragm pump of the present invention is made up of pedestal 1 and piezoelectric cantilever 2 form.Pedestal 1 is made up of body part 11, the first support arm 12, the second support arm 13, pad 14, screw 15 and nut 16, wherein has the first support arm 12 of threaded ends and the second support arm 13 and utilizes screw thread to be arranged on to be respectively arranged in first on body part 11 to support tapped hole 113 and second to support on screw thread 114.Piezoelectric cantilever 2 is made up of piezoelectric material thin slice 21 and elastic base plate 22, utilizes bolt 15 be installed on the cantilever fixed hole 112 on body part 11 through the endoporus 141 on pad 14 and use nut 16 fastening by the mounting hole 221 of elastic base plate one end.Pedestal 1 after assembling by described mode has formed piezoelectric cantilever drive-type piezoelectricity barrier film pump power end with piezoelectric cantilever 2.By the whole machine installation hole 111 being arranged on base member 11, piezoelectric pump is connected with other structure.
Fluid end 3 is made up of the first side cavity 31, the second side cavity 32, inlet one-way valve 34, outlet one-way valve 35, inlet duct 36 and outer pipe 37, wherein: the first side cavity 31 and the second side cavity 32 by the binder in adhesion zone 33 in conjunction with forming closed housing; With reference to Fig. 3, inlet one-way valve 34 and outlet one-way valve 35 are arranged on respectively the bottom of the entrance mounting hole 325 on the first lower support piece 321 of the second side cavity 32 outer surfaces and the outlet mounting hole 326 on the second lower support piece 322; Inlet duct 36 is arranged on the outside of inlet one-way valve 34 in entrance mounting hole 325, and outer pipe 37 is arranged on the outside of outlet mounting hole 326 middle outlet one-way valves 35; Internal cavity after the first side cavity 31 and the second side cavity 32 are bonding sucks and discharges fluid by the first flowing hole 327 of entrance mounting hole 325 bottoms and the second flowing hole 329 of outlet mounting hole 326 bottoms; Guiding gutter 328 is arranged between second side cavity 32 inner side the first flowing holes 327 and the second flowing hole 328, the resistance while flowing through for reducing fluid, the output performance of increase pump;
When described power end and fluid end 3 are installed, insert in the cantilever mounting hole 312 on the upper support block 311 that the first side cavity 31 outer surfaces arrange one end of piezoelectric cantilever 2; Described the second side cavity 32 supports mounting hole 323 by first on the first lower support piece 321 and is connected with the first support arm 12, supports mounting hole 324 be simultaneously connected with the second support arm 13 by second on the second support block 322.
The center line of described cantilever mounting hole 312, the first lower support mounting hole 323 and the second lower support mounting hole 324 is parallel to each other, and its center line direction is exactly the assembly direction of power end and fluid end.In setting, the second side cavity junction plane is substantially horizontal, cavity diaphragm movement direction is vertical direction, piezoelectric cantilever 2, the first support arm 12 and second support arm 13 projection on horizontal plane do not overlap, and adopt alternating expression to arrange.
In the time that piezoelectric pump is worked, piezoelectric cantilever 2 under the effect of outside alternating voltage along occuring bending and deformation perpendicular to cavity place in-plane, drive the first side cavity 31 that back and forth distortion occurs by upper support block 311: the first stage is when 31 generations are during away from the distortion of cavity, cavity volume increases, inlet valve 34 is opened, outlet one-way valve 35 is closed, and fluid is from 36 suction cavitys; Second stage is in the time that 31 approach the distortion of cavity direction, and cavity volume reduces, and inlet valve 34 cuts out, and outlet one-way valve 35 is opened, and fluid, from exporting 37 outflows, has completed a work cycle.Particularly in second stage, piezoelectric cantilever 2 drives the first side cavity 31 motions to reduce cavity volume, after the first side cavity 31 contacts with the second side cavity 32, it is minimum that volume in cavity reaches, can there is resiliently deformable in the pump housing now forming due to the first side cavity 31 and the second side cavity 32 between the first support arm 12 and the second support arm 13, cavity volume reach minimum after piezoelectric cantilever 2 distortion of exporting and stored energy in the resiliently deformable of pump housing rubber material, realized the object that reduces impact force.

Claims (3)

1. a piezoelectric cantilever drive-type piezoelectricity diaphragm pump, comprise: pedestal (1), piezoelectric cantilever (2) and fluid end (3), wherein piezoelectric cantilever (2) one end is connected with pedestal (1), the other end is connected with the first side cavity (31) of fluid end (3), and the support arm on pedestal (1) is connected with the second side cavity (32) of fluid end (3); Sheet the first side cavity (31) that fluid end (3) is made up of rubber material and the second side cavity (32) inner surface positioned opposite, edge seal forms pump chamber, the volume that drives the first side cavity (31) bending to realize described pump chamber by piezoelectric cantilever (2) changes, in conjunction with the upper import one-way valve (34) of installing of the second side cavity (32) and outlet one-way valve (35), realize the motion that fluid flows out from inlet duct (36) stream inlet or outlet duct (37);
It is characterized in that: the each support arm on described pedestal (1) and piezoelectric cantilever (2) center line are parallel to each other, described power end can with fluid end (3) assembly and disassembly; Described piezoelectric cantilever (2) and described support arm interlaced arrangement, the projection on the first side cavity (31) and the second side cavity (32) junction plane is without overlapping region.
2. piezoelectric cantilever drive-type piezoelectricity diaphragm pump according to claim 1, it is characterized in that: described support arm position can be replaced with newly-increased piezoelectric cantilever, be now connected to piezoelectric cantilever (2) on the first side cavity (31) contrary with the newly-increased piezoelectric cantilever moving direction that is connected to the second side cavity connection.
3. piezoelectric cantilever drive-type piezoelectricity diaphragm pump according to claim 1, is characterized in that: described piezoelectric cantilever (2) can be a single-chip piezoelectric cantilever, can be also a twin lamella piezoelectric cantilever; Described single-chip piezoelectric cantilever is that piezoelectric material thin slice (21) is laminated to the upper formation of elastic base plate (22); Described twin lamella piezoelectric cantilever is that elastic base plate (22) is laminated between the piezoelectric material thin slice (21) that two polarised directions are identical and is formed.
CN201410161539.5A 2014-04-22 2014-04-22 A kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump Active CN103899519B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105655475A (en) * 2016-03-18 2016-06-08 河南师范大学 Piezoelectric single crystal wafer

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070243084A1 (en) * 2005-04-13 2007-10-18 Par Technologies Llc Stacked piezoelectric diaphragm members
JP2008180179A (en) * 2007-01-25 2008-08-07 Star Micronics Co Ltd Diaphragm pump
CN101415945A (en) * 2006-03-29 2009-04-22 株式会社村田制作所 Micropump
CN103334907A (en) * 2013-07-08 2013-10-02 吉林大学 Cantilever-type piezoelectric diaphragm pump
CN203404051U (en) * 2013-07-08 2014-01-22 吉林大学 Cantilever type piezoelectric diaphragm pump
CN203867831U (en) * 2014-04-22 2014-10-08 吉林大学 Piezoelectric cantilever beam drive type piezoelectric diaphragm pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070243084A1 (en) * 2005-04-13 2007-10-18 Par Technologies Llc Stacked piezoelectric diaphragm members
CN101415945A (en) * 2006-03-29 2009-04-22 株式会社村田制作所 Micropump
JP2008180179A (en) * 2007-01-25 2008-08-07 Star Micronics Co Ltd Diaphragm pump
CN103334907A (en) * 2013-07-08 2013-10-02 吉林大学 Cantilever-type piezoelectric diaphragm pump
CN203404051U (en) * 2013-07-08 2014-01-22 吉林大学 Cantilever type piezoelectric diaphragm pump
CN203867831U (en) * 2014-04-22 2014-10-08 吉林大学 Piezoelectric cantilever beam drive type piezoelectric diaphragm pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105655475A (en) * 2016-03-18 2016-06-08 河南师范大学 Piezoelectric single crystal wafer
CN105655475B (en) * 2016-03-18 2017-12-08 河南师范大学 A kind of piezoelectric monocrystal sheet

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