CN1378041A - High frequency valve piezoelectric pump and its pump chamber design method - Google Patents

High frequency valve piezoelectric pump and its pump chamber design method Download PDF

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Publication number
CN1378041A
CN1378041A CN 02117352 CN02117352A CN1378041A CN 1378041 A CN1378041 A CN 1378041A CN 02117352 CN02117352 CN 02117352 CN 02117352 A CN02117352 A CN 02117352A CN 1378041 A CN1378041 A CN 1378041A
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valve
pump
pump chamber
value
piezoelectric vibrator
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张建辉
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Abstract

The present invention relates to HF valve piezoelectric pump and its pump chamber design method. The pump includes pump body, piezoelectric vibrator fixer, vibrator fixed inside the pump chamber, suction valve and spitting valve. It features curved pump chamber inner wall, the E-shaped suction valve and the E-shaped spitting valve. The pump of the present invention has less fluid transferring time inside the pump chamber, reduced compressible volume, less start and close lagging and thus excellent HF following.

Description

High frequency valve piezoelectric pump and pump chamber design method thereof
Technical field
The invention belongs to the fluid machinery technical field, relate to the pump chamber of a kind of piezoelectric pump in the convection cell machinery subject and the improvement of pump valve.
Background technique
It is to utilize the piezoelectric vibrator electric energy to change the mechanically deformation energy that valve piezoelectric pump is arranged, and then produces the transducer of volume-variation.Because consuming time during fluid transmitting vibrations mechanical energy, the fluid in the pump chamber is not incompressible yet in addition, has the mass inertia of pump valve simultaneously.So the pump valve of passive open and close is along with the raising of vibration frequency, open and close will lag behind the motion of piezoelectric vibrator.This phenomenon not only is present in valve piezoelectric pump, and is present in whole reciprocating pumps, and performance is not obvious when being low frequency.
At present traditional has valve piezoelectric pump and pump chamber as shown in Figure 1, and wherein 1 is the pump housing, and 2 is piezoelectric vibrator, and 3 is the piezoelectric vibrator fixture, and 4,5 for sucking and discharge valve.Its working principle is: form sealed cavity by the pump housing 1, piezoelectric vibrator 2, suction valve 4 and discharge valve 5, piezoelectric vibrator 2 is applied alternating voltage, piezoelectric vibrator 2 will produce reciprocal distortion vertically, so just the cavity inner fluid be applied with reciprocating force.In suction process, fluid is delivered to suction valve 4,4 to the power that produces and will opens, and being delivered to discharge valve 5,5 will close under this pressure effect.In the process of spuing, fluid is delivered to discharge valve 5,5 to the power that produces and will opens, and being delivered to suction valve 4,4 will close under this pressure effect.Suction valve 4 and discharge valve 5 will produce periodically open and close under the cyclically-varying of piezoelectric vibrator 2 like this, make the pump inner fluid form one-way flow.When the vibration frequency of piezoelectric vibrator 2 increases, the suction valve 4 and the discharge valve 5 of traditional form can't be realized well following under the high frequency.Traditional valve piezoelectric pump that has is to use the piezoelectric pump of fly valve, plate valve, ball valve and cone valve, frequency increases the back pump duty and has not occurred the minimizing phenomenon on the contrary by such increasing of anticipation, valve lags behind the motion of piezoelectric vibrator, zero delivery will appear in pump when this hysteresis is serious on macroscopic view, and visible traditional pump valve can not adapt to the characteristics of piezoelectric pump high-frequency work.
Summary of the invention
The objective of the invention is to overcome above deficiency, design a kind of high frequency valve piezoelectric pump, and provide a kind of design method of pump chamber, promptly improve traditional pump chamber and pump valve from pump chamber and pump valve two aspects, to reduce fluid passing time in the pump chamber, to reduce compressible volume, improve the sensitivity that pump valve opens and closes, directly reduce the hysteresis quality that pump valve opens and closes.
Technological scheme of the present invention as shown in Figure 2, high frequency valve piezoelectric pump includes the pump housing, piezoelectric vibrator fixture 3, be fixed on the endoceliac piezoelectric vibrator 2 of pump, and suction valve and discharge valve, it is characterized in that, on the pump chamber inwall, adopted to reducing fluid passing time in the pump chamber, reduce the pump housing 7 of the non-linear curve shape of compressible volume, adopt " mountain " font valve block 10 in suction valve and the discharge valve, adopted current techique to be separately fixed on the valve body 11 of suction valve and discharge valve position the suction valve disc and the valve block that spues, form " mountain " font (as shown in Figure 3) suction valve 8 and discharge valve 9.
Feature of the present invention also comprises, be the pump chamber inner wall position of suction valve and discharge valve one side, the pump chamber of employing curve shape to be installed at the pump housing, suction valve 8 is installed in the below of the valve body 11 of suction valve position, and discharge valve 9 is installed in the top of the valve body 11 of discharge valve position.And adopted " mountain " font valve block 10 made from elastic sheet, on the valve block 10 about the summit place of two " erecting " B-1, B-2 be immovable point, the circular plate A of middle one " erecting " is the partition panel of suction port and discharge opening.
High frequency valve piezoelectric pump pump chamber design method of the present invention, it is characterized in that, as shown in Figure 3, the upper surface of piezoelectric vibrator 2 and the center of circle as true origin O, axle direction is the Y direction, the footpath direction is a directions X, with experimental measurement method and theoretical calculation method, obtain the displacement amount of the maximum vibration amount of piezoelectric vibrator 2 when the maximum value of requirement operating voltage, and provide gap value between the piezoelectric vibrator 2 and the pump housing 7, make the coordinate of curvilinerar figure on Y direction of pump chamber inwall, satisfy the displacement amount of the piezoelectric vibrator the highest oscillator point of arrival everywhere and gap value and, the curved design of pump chamber inwall will meet following formula:
h max,n=w(r n,t)+Δh n,n=0,1,2,...n<10
That is to say: the curvilinerar figure of pump chamber inwall satisfies the displacement amount w (r of the piezoelectric vibrator the highest oscillator point of arrival everywhere on Y direction n, t) with gap value Δ h n, and.Experimental measurement method step wherein is: experimental measurement method step wherein is: (1) on the basis of aforementioned coordinate setting, the fixing cylindrical of piezoelectric vibrator 2, the confinement power when adding external force and being the piezoelectric vibrator real work; (2) the displacement amount h of the maximum vibration amount of measurement piezoelectric vibrator 2 when the maximum value of requirement operating voltage Max, 0Mm, and be r at directions X successively 0=0mm, r 1=4mm..., the displacement amount w (r on the piezoelectric vibrator is measured at the place of grade 0, t) ... w (r n, t) mm, n<10, r represents the set point value of X-axis direction, w (r n, t) mm represents the measured value of Y direction; (3) [r 0, w (r 0, t)] ... [r n, w (r n, t)] and as (X, value Y) return out the equation of curve Y=f (X) with general formula, and X represents the X-axis direction coordinate figure, and X=r, Y represent Y direction coordinate figure Y=w (r n, t); (4) order: y=f (x)=f (X)+Δ X, the value of Δ X is: 0.01Y<Δ X<0.1Y; (5) equation y=f (x) is exactly the pump chamber inwall curve of O-XY face;
Theoretical calculation method step wherein is: (1) calculates by parabola calculation formula commonly used, at r on the basis of aforementioned coordinate setting 0=0mm, r 1=5mm...r 1=25mm, n<10, the w (r of point 0, t), w (r 1, t) ... w (r n, value t), r represents the set point value of X-axis direction, w (r n, t) mm represents the calculated value of Y direction, t express time, n are represented the set point value number; (2) order: h Max, n=w (r n, t)+Δ h n,, Δ h n, value be: 0.01w<Δ h n,<0.1w has: h Max, n=f (r), Δ h n, expression gap value, h Max, nThe coordinate of curvilinerar figure on Y direction of expression pump chamber inwall; (3), calculate the equation of curve y=f (x) [r, f (r)] value as [X, Y]; (4) equation y=f (x) is exactly the pump chamber inwall curve of O-XY face.
The working principle of high frequency valve piezoelectric pump of the present invention: form by piezoelectric vibrator 2, the pump housing 7, suction valve 8 and discharge valve 9 and to close cavity, piezoelectric vibrator 2 is applied alternating voltage, piezoelectric vibrator 2 will produce the reciprocal distortion along Y direction, so just the cavity inner fluid is applied with reciprocating force, in suction process, fluid is delivered to suction valve to the power that produces, and the valve block in the suction valve will be opened, be delivered to discharge valve, the valve block in the discharge valve will be closed under this pressure effect.In the process of spuing, fluid is delivered to the discharge valve valve to the power that produces, and the valve block in the discharge valve will be opened, and be delivered to suction valve, and the valve block in the suction valve will be closed under this pressure effect.Suction valve and discharge valve will produce periodically open and close under the cyclically-varying of piezoelectric vibrator 2 like this, make the pump inner fluid form one-way flow.When the vibration frequency of piezoelectric vibrator 2 increased, the novel high-frequency valve can be realized well following under the high frequency (100Hz is accomplished in experiment at present).That is to say that novel high-frequency valve and new pump chamber have overcome the valve retardation phenomenon.The present invention can reduce the hysteresis of the pump valve open and close of fluid reason owing to changed the shape of pump chamber inwall.The amplitude of piezoelectric vibrator is very little, and it is also very little once to vibrate reciprocal volume-variation, so, once vibrate the reciprocal pump duty that produces also seldom.Want to improve pump duty, can adopt the method for the vibration frequency that improves piezoelectric vibrator.Because we have adopted suction valve and the discharge valve that constitutes as Fig. 4, " mountain " font valve block 10 shown in Figure 5." mountain " font valve has the structure all different with traditional fly valve, plate valve, ball valve and cone valve, utilize " mountain " font elastic sheet, when fluid generation pressure acts on partition panel, the warpage resiliently deformable takes place in partition panel and other two " erecting " thin plate simultaneously, opening of valves is quick, as shown in Figure 5 (it is the discharge valve working principle).Also do not economize energy because of having to hinder the object that flows around the partition panel, it is also fast to flow during opening of valves.Otherwise, when pressure reduced, equal each self-healing of three " erecting " deformable body in " mountain " word of resiliently deformable took place, its reaction is higher than fly valve, the plate valve of single partition panel form, so that valve cuts out is also quick.
Description of drawings
Fig. 1 is traditional valve piezoelectric pump structure master sectional view that has;
Fig. 2 is structure master's sectional view of high frequency valve piezoelectric pump of the present invention, and 12 is set screw;
Fig. 3 is new pump chamber of the present invention, pump valve and system of coordinates schematic representation;
Fig. 4 is the high frequency valve---" mountain " font valve arrangement schematic representation;
Fig. 5 is valve fundamental diagram of the present invention (it is discharge valve)
(a) be resting state, (b) for opening attitude;
Fig. 6 is a pump chamber inwall curve design exemplary plot.
Embodiment
The present invention adopts current techique to press assembling shown in Figure 2.The material of its middle pump body 7 is a non-ferrous metal, as: copper etc.Fixing bolt and piezoelectric ceramic are standardized product, and it is 50mm that piezoelectric vibrator 2 adopts diameter, and thickness is that round copper sheet and the diameter of 0.1mm is that the 40mm piezoelectric ceramic forms through bonding, and piezoelectric vibrator fixture 3 is a rubber.
" mountain " font valve block is a monolithic construction, i.e. suction can be adopted macromolecule and metal with the material of discharge valve valve block 10, as the stainless steel of 0.1mm.Valve body 11 adopts metal.
Pump chamber design method can be referring to Fig. 6 among the present invention, and pump chamber inwall at first of the present invention is a curvilinerar figure, and its curve will meet formula (1).
h Max, n=w (r n, t)+Δ h n, n=0,1,2 ... n<10 (1) wherein: w (r n, t) be the Y direction displacement amount of piezoelectric vibrator 2 maximum vibrations, Δ h nY direction gap value during for piezoelectric vibrator 2 maximum vibration displacements between the piezoelectric vibrator 2 and the pump housing 7.h Max, nFor in O-XY system of coordinates as shown in Figure 2, the Y direction coordinate of the pump chamber inwall curve on the XY plane.
That is to say: the curvilinerar figure of pump chamber inwall satisfies the displacement amount w (r of the piezoelectric vibrator the highest oscillator point of arrival everywhere on Y direction n, t) with gap value Δ h n, and.Wherein: w (r n, t) can calculate parabolically, that is:
W (r n, t)=-ar 2+ br+c, r=X, Y=w (r n, the t) a in (2) formula, b, the piezoelectric vibrator 2 actual vibration amounts when c can equal certain concrete numerical value by three groups of r of measurement form system of equations of ternary and calculate.Gap value Δ h nCan provide by formula (3):
Δh n=[w(r n,t)×(A n%)] (3)
N=6 when the maximum radius of piezoelectric vibrator 2 is 25mm, r 1=0mm, A 1=10mm; r 2=5mm, A 2=8mm; r 3=10mm, A 3=6mm; r 4=15mm, A 4=4mm; r 5=20mm, A 5=2mm; r 6=25mm, A 6=0mm.According to above-mentioned design method pump chamber inwall is that curve can be expressed as Fig. 6.
Certainly, pump chamber inwall curvilinerar figure also can be approximated to be other curve, as circular arc, triangle etc., in a word so long as reduce fluid passing time in the pump chamber, the non-linear that reduces compressible volume can reduce the hysteresis quality that pump valve opens and closes.But it is parabola shaped near the maximum vibration amount of movement curve of piezoelectric vibrator 2 that the present invention selects.

Claims (4)

1, a kind of high frequency valve piezoelectric pump includes the pump housing, piezoelectric vibrator fixture (3), be fixed on the endoceliac piezoelectric vibrator of pump (2), and suction valve and discharge valve, the invention is characterized in, on the pump chamber inwall, adopted to reducing fluid passing time in the pump chamber, reduce the pump housing (7) of the non-linear curve shape of compressible volume, adopt " mountain " font valve block (10) in suction valve and the discharge valve, adopted current techique to be separately fixed on the valve body (11) of suction valve and discharge valve position the suction valve disc and the valve block that spues, form " mountain " font suction valve (8) and discharge valve (9).
2, high frequency valve piezoelectric pump according to claim 1, it is characterized in that, be the pump chamber inner wall position of suction valve and discharge valve one side, the pump chamber of employing curve shape to be installed at the pump housing, suction valve (8) is installed in the below of the valve body (11) of suction valve position, and discharge valve (9) is installed in the top of the valve body (11) of discharge valve position.
3, high frequency valve piezoelectric pump according to claim 1, it is characterized in that, adopted " mountain " font valve block (10) made from elastic sheet, place, the summit of two " erecting " B-1, B-2 was immovable point about valve block (10) was gone up, and the circular plate A of middle one " erecting " is the partition panel of suction port and discharge opening.
4, a kind of high frequency valve piezoelectric pump pump chamber design method, it is characterized in that, the upper surface of piezoelectric vibrator (2) and the center of circle as true origin 0, axle direction is the Y direction, the footpath direction is a directions X, with experimental measurement method and theoretical calculation method, obtain the displacement amount of the maximum vibration amount of piezoelectric vibrator (2) when the maximum value of requirement operating voltage, and provide gap value between the piezoelectric vibrator (2) and the pump housing (7), make the coordinate of curvilinerar figure on Y direction of pump chamber inwall, satisfy the displacement amount of the piezoelectric vibrator the highest oscillator point of arrival everywhere and gap value and, the curved design of pump chamber inwall will meet following formula:
h max,n=w(r n,t)+Δh n,n=0,1,2,...n<10
Experimental measurement method step wherein is: (1) on the basis of aforementioned coordinate setting, the fixing cylindrical of piezoelectric vibrator (2), the confinement power when adding external force and being the piezoelectric vibrator real work; (2) the displacement amount h of the maximum vibration amount of measurement piezoelectric vibrator (2) when the maximum value of requirement operating voltage Max, 0Mm, and be r at directions X successively 0=0mm, r 1=4mm..., the displacement amount w (r on the piezoelectric vibrator is measured at the place of grade 0, t) ... w (r n, t) mm, n<10, r represents the set point value of X-axis direction, w (r n, t) mm represents the measured value of Y direction; (3) [r 0, w (r 0, t)] ... [r n, w (r n, t)] and as (X, value Y) return out the equation of curve Y=f (X) with general formula, and X represents the X-axis direction coordinate figure, and X=r, Y represent Y direction coordinate figure Y=w (r n, t); (4) order: y=f (x)=f (X)+Δ X, the value of Δ X is: 0.01Y<Δ X<0.1Y; (5) equation y=f (x) is exactly the pump chamber inwall curve of O-XY face;
Theoretical calculation method step wherein is: (1) calculates by parabola calculation formula commonly used, at r on the basis of aforementioned coordinate setting 0=0mm, r 1=5mm...r 1=25mm, n<10, the w (r of point 0, t), w (r 1, t) ... w (r n, value t), r represents the set point value of X-axis direction, w (r n, t) mm represents the calculated value of Y direction, t express time, n are represented the set point value number; (2) order: h Max, n=w (r n, t)+Δ h n,, Δ h n, value be: 0.01w<Δ h n,<0.1w has: h Max, n=f (r), Δ h n, expression gap value, h Max, nThe coordinate of curvilinerar figure on Y direction of expression pump chamber inwall; (3), calculate the equation of curve y=f (x) [r, f (r)] value as [X, Y]; (4) equation y=f (x) is exactly the pump chamber inwall curve of O-XY face.
CN 02117352 2002-05-20 2002-05-20 High frequency valve piezoelectric pump and its pump chamber design method Pending CN1378041A (en)

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Cited By (15)

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CN100338362C (en) * 2005-10-14 2007-09-19 北京工业大学 Built-in corrugated channel valveless piezoelectric pump
CN100338361C (en) * 2005-08-12 2007-09-19 北京工业大学 Valveless piezoelectric pump
CN100510400C (en) * 2003-08-04 2009-07-08 日本电气株式会社 Diaphragm pump and cooling system with the diaphragm pump
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CN101328879B (en) * 2008-05-23 2010-06-23 北京联合大学 Valve and vibrator integrated piezoelectric pump with valve
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CN110439789A (en) * 2019-07-19 2019-11-12 常州工学院 Single-chamber axial-flow type has valve piezoelectric pump and driving method
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CN100510400C (en) * 2003-08-04 2009-07-08 日本电气株式会社 Diaphragm pump and cooling system with the diaphragm pump
CN100338361C (en) * 2005-08-12 2007-09-19 北京工业大学 Valveless piezoelectric pump
CN100338362C (en) * 2005-10-14 2007-09-19 北京工业大学 Built-in corrugated channel valveless piezoelectric pump
CN101255858B (en) * 2007-03-01 2010-05-26 讯凯国际股份有限公司 Film pump and apparatus having the same
CN101324227B (en) * 2007-06-12 2011-08-10 北京航空航天大学 High-frequency tetrad composite hydraulic pumps and control method thereof
CN101328879B (en) * 2008-05-23 2010-06-23 北京联合大学 Valve and vibrator integrated piezoelectric pump with valve
WO2011017862A1 (en) * 2009-08-10 2011-02-17 杨竹君 Piezoceramics pump for electronic product and cpu radiating and cooling system
CN101666307B (en) * 2009-09-15 2012-11-28 南京航空航天大学 Funnel-shaped valve piezoelectric pump and working method thereof
CN102734140B (en) * 2011-04-12 2016-03-09 深圳市华简泵业科技有限公司 Piezoelectric pump and its pipe arrangement
CN102734140A (en) * 2011-04-12 2012-10-17 林淑媛 Piezoelectric pump and matched pipe thereof
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CN103104442A (en) * 2011-11-15 2013-05-15 林淑媛 Installation method for piezoelectric pump and piezoelectric ceramic piece
CN102966520A (en) * 2012-11-07 2013-03-13 广州市番禺奥迪威电子有限公司 Piezoelectric pump
CN102966520B (en) * 2012-11-07 2016-04-06 广州市番禺奥迪威电子有限公司 A kind of piezoelectric pump
CN103573593B (en) * 2013-11-01 2015-11-11 刘勇 Piezoelectric flexible diaphragm pump
CN103573593A (en) * 2013-11-01 2014-02-12 刘勇 Piezoelectric flexible diaphragm pump
CN110741161A (en) * 2017-03-13 2020-01-31 斯蒂芬.A.马什 Micropump system and process technology
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CN110439789A (en) * 2019-07-19 2019-11-12 常州工学院 Single-chamber axial-flow type has valve piezoelectric pump and driving method

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