CN103899519B - A kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump - Google Patents

A kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump Download PDF

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Publication number
CN103899519B
CN103899519B CN201410161539.5A CN201410161539A CN103899519B CN 103899519 B CN103899519 B CN 103899519B CN 201410161539 A CN201410161539 A CN 201410161539A CN 103899519 B CN103899519 B CN 103899519B
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China
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piezoelectric cantilever
side cavity
piezoelectric
pedestal
support arm
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CN201410161539.5A
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CN103899519A (en
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吴越
杨志刚
刘国君
李新波
刘超
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Harbin Zhiye Technology Co.,Ltd.
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Jilin University
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Abstract

The present invention relates to a kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump, comprising: the fluid end (3) that the power end be made up of pedestal (1), piezoelectric cantilever (2) and the one-way valve managed by cavity, gateway and arrange between two structures form; Wherein piezoelectric cantilever (2) one end is connected with pedestal (1), and the other end is connected with the first side cavity (31) of fluid end (3), and the support arm on pedestal (1) is connected with the second side cavity (32) of fluid end (3); Feature is: each support arm on described pedestal (1) and piezoelectric cantilever (2) center line are parallel to each other, described power end can with fluid end (3) assembly and disassembly; Described piezoelectric cantilever (2) and support arm interlaced arrangement, namely on the first side cavity (31) and the second side cavity (32) junction plane, projection is without coincidence district, and formation fluid end (3) is replaceable, compression ratio large and the piezoelectricity diaphragm pump device that in working procedure, piezoelectric cantilever (2) is hit little.

Description

A kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump
Technical field
The invention belongs to field of fluid, be specifically related to a kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump device.
Background technique
Piezoelectric pump diaphragm pump is a kind of displacement pump driven by piezoelectric vibrator, has that structure is simply convenient to produce in enormous quantities, volume is littlely convenient to microminiaturization, is convenient to Digital Control and the advantage such as the life-span is long.The most basic piezoelectric pump causes cavity volume to change by the bending deflection of plate piezoelectric oscillator, one-way valve in conjunction with two opposed forms the directed ability going out to flow of fluid, this piezoelectric pump due to piezoelectric vibrator amount of deformation little, when carrying gas-liquid polyphase flow body, performance is very unstable, and the method promoting this performance increases the compression ratio of pump, i.e. the ratio of amount of deformation and initial pump chamber.There are two kinds of modes at present: a kind of is increase piezoelectric material and institute forms the output displacement of driving mechanism, increases Wall deformation amount, improves compression ratio, occurred the driving mode that displacement equations and utilization are resonated and new structure in this; Another kind is the cavity size reducing pump chamber, but along with the reduction of cavity volume, when the size of cavity in driving mechanism moving direction is less than the motion amplitude of driving mechanism, there will be impact shock, reduce the output performance of pump, and significantly reduce the working life of piezoelectric vibrator.
Simultaneously, because piezoelectric pump also has the advantage that structure is simple, cost is low and be easy to the aspects such as miniaturization, be suitable for very much occasion that is disposable or conveying special fluid, but the piezoelectric material of most of type can cause adverse effect to environment after abandoning, and be unfavorable for the feature playing piezoelectric constant long service life, namely there is environmental protection and waste of material problem.
Summary of the invention
In order to solve conventional piezoelectric transport pump gas and heterogeneous fluid ability, after cavity volume reduces percussion obviously and piezoelectric pump act as disposable products abandon after the waste to material and the pollution pollution problem to environment, propose the piezoelectricity diaphragm pump that a kind of piezoelectric cantilever drives, its power end and fluid end can split fast, power end is reusable and fluid end is replaceable, can improve the utilization ratio of its material.Simultaneously, it has the specific pump cavity configuration that rubber material is formed, effectively can suppress the impact shock that the piezoelectric material that causes and driving mechanism thereof produce because housing depth reduces, while improving conveying out-phase fluid property, avoid hydraulic performance decline and service life reduction problem that the little limitation of movement of its cavity causes.
For achieving the above object, the present invention is by the following technical solutions:
The piezoelectricity diaphragm pump that a kind of piezoelectric cantilever of the present invention drives, comprises the power end and fluid end that are made up of pedestal, piezoelectric cantilever.
Pedestal there is whole machine installation hole by pump and other anatomical connectivity, the cantilever mounting hole and pad that connect piezoelectric cantilever can be furnished with, and be furnished with the support arm be connected with pump chamber.Piezoelectric cantilever one end is fixed on pedestal, and the other end is connected with pump chamber.Described pedestal and piezoelectric cantilever form power end jointly.
The first side cavity that pump chamber is made up of rubber material and second side cavity two-part form enclosed space by bonding or edge press seal, wherein: be furnished with the upside support block disperseed by piezoelectric cantilever Input Forces outside the first side cavity, support block be furnished with the cantilever mounting hole be connected with piezoelectric cantilever; Two downside support blocks are furnished with outside second side cavity, downside support block is furnished with the support mounting hole be connected with base supports arm and the mounting hole being provided with one-way valve and gateway pipe, flowing hole UNICOM is passed through with inside cavities bottom the mounting hole of described entry and exit, fluid is flowed into by flowing hole or flows out pump chamber, is furnished with for reducing the guiding gutter of fluid in inside cavity flow resistance between the second side cavity pump chamber inner two, side flowing hole.Described cavity and be arranged on one-way valve on cavity and go out, enter the mouth of pipe and constitute fluid end in the piezoelectricity diaphragm pump that this piezoelectric cantilever drives.
Described cantilever mounting hole, support mounting hole center line are parallel to each other, piezoelectric cantilever is connected with cavity by cantilever mounting hole, support arm is connected with cavity by supporting mounting hole, and power end can be separated with fluid end or assemble by the power applied along above-mentioned mounting hole centerline direction.
Setting first, second side cavity junction plane is substantially horizontal, then cavity diaphragm movement direction is vertical direction, piezoelectric cantilever and support arm project in the horizontal plane and do not overlap, this alternating expression is arranged can ensure that support arm is not on piezoelectric cantilever ouput force action direction in piezoelectric cantilever deforms process, after the first side cavity contacts with the second side cavity, the power of piezoelectric cantilever amount will make whole cavity generation elastic bending deflection, the resiliently deformable of cavity will store unnecessary power and discharge in the next operation cycle, can reduce to increase its working life to the impact of piezoelectric cantilever.
Described support arm can be replaced with supporting piezoelectric cantilever, is now connected to piezoelectric cantilever on the first side cavity contrary with being connected to the support piezoelectric cantilever moving direction that the second side cavity connects.
Described piezoelectric cantilever can be a single-chip piezoelectric cantilever, also can be a bi-morph piezo-electric overhang; Described single-chip piezoelectric cantilever is that thin sheets of piezoelectric material is laminated on elastic base plate and forms; Described bi-morph piezo-electric overhang is laminated in by elastic base plate between the identical thin sheets of piezoelectric material of two polarised directions to form.
Accompanying drawing explanation
Fig. 1 is the structural representation of this patent.
Fig. 2 is each modular construction of this patent and assembling relationship figure.
Fig. 3 is the second side cavity and its accessory structure and assembling relationship figure.
Embodiment
The embodiment provided below in conjunction with accompanying drawing is described in further detail structure of the present invention and principle.
See figures.1.and.2, the power end that piezoelectric cantilever drive-type piezoelectricity diaphragm pump of the present invention is made up of pedestal 1 and piezoelectric cantilever 2 and fluid end 3 form.Pedestal 1 is made up of body part 11, first support arm 12, second support arm 13, pad 14, screw 15 and nut 16, wherein has the first support arm 12 of threaded ends and the second support arm 13 and utilizes screw thread to be arranged on respectively to be arranged in first on body part 11 to support tapped hole 113 and second to support on screw thread 114.Piezoelectric cantilever 2 is made up of thin sheets of piezoelectric material 21 and elastic base plate 22, fastening with nut 16 on the cantilever fixed hole 112 utilizing bolt 15 to be installed on body part 11 through the endoporus 141 on pad 14 by the mounting hole 221 of elastic base plate one end.Pedestal 1 after assembling by described mode constitutes piezoelectric cantilever drive-type piezoelectricity barrier film pump power end with piezoelectric cantilever 2.By being arranged in whole machine installation hole 111 on base member 11 by piezoelectric pump and other anatomical connectivity.
Fluid end 3 is made up of the first side cavity 31, second side cavity 32, inlet one-way valve 34, Outlet check valves 35, inlet duct 36 and outer pipe 37, wherein: the first side cavity 31 and the second side cavity 32 are combined by the binder in adhesion zone 33 and form closed housing; With reference to Fig. 3, inlet one-way valve 34 and Outlet check valves 35 are arranged on the bottom of the entrance mounting hole 325 on the first lower support block 321 of the second side cavity 32 outer surface and the outlet mounting hole 326 on the second lower support block 322 respectively; Inlet duct 36 is arranged on the outside of inlet one-way valve 34 in entrance mounting hole 325, and outer pipe 37 is arranged on the outside of outlet mounting hole 326 middle outlet one-way valve 35; First side cavity 31 and the second side cavity 32 bonding after internal cavity sucked and displacement fluids by the second flowing hole 329 bottom the first flowing hole 327 bottom entrance mounting hole 325 and outlet mounting hole 326; Guiding gutter 328 is arranged in inside the second side cavity 32 between first flowing hole 327 and the second flowing hole 328, for reducing resistance when fluid flows through, increases the output performance of pump;
When described power end and fluid end 3 are installed, one end of piezoelectric cantilever 2 is inserted in the cantilever mounting hole 312 on upper support block 311 that the first side cavity 31 outer surface arranges; Described second side cavity 32 supports mounting hole 323 by first on the first lower support block 321 and is connected with the first support arm 12, supports mounting hole 324 be simultaneously connected with the second support arm 13 by second on the second support block 322.
The center line of described cantilever mounting hole 312, first lower support mounting hole 323 and the second lower support mounting hole 324 is parallel to each other, and its center line direction is exactly the assembly direction of power end and fluid end.In setting, the second side cavity junction plane is substantially horizontal, then cavity diaphragm movement direction is vertical direction, and piezoelectric cantilever 2, first support arm 12 and the second support arm 13 project in the horizontal plane and do not overlap, and namely adopts alternating expression to arrange.
When piezoelectric pump works, piezoelectric cantilever 2 occurs bending and deformation along perpendicular to cavity place in-plane under the effect of outside alternating voltage, drive the first side cavity 31 that reciprocal transformation occurs by upper support block 311: the first stage is when 31 the distortion away from cavity occurs, cavity volume increases, inlet valve 34 is opened, Outlet check valves 35 is closed, and fluid sucks cavity from 36; Second stage is when 31 there is the distortion close to cavity direction, and cavity volume reduces, and inlet valve 34 cuts out, and Outlet check valves 35 is opened, and fluid flows out from outlet 37, completes a work cycle.Particularly in second stage, piezoelectric cantilever 2 drives the first side cavity 31 motion to reduce cavity volume, after the first side cavity 31 contacts with the second side cavity 32, volume in cavity reaches minimum, can resiliently deformable be there is in the pump housing now formed due to the first side cavity 31 and the second side cavity 32 between the first support arm 12 and the second support arm 13, cavity volume reaches distortion and stored energy that minimum rear piezoelectric cantilever 2 exports in the resiliently deformable of pump housing rubber material, achieves the object reducing impact force.

Claims (3)

1. a piezoelectric cantilever drive-type piezoelectricity diaphragm pump, comprise: the power end be made up of pedestal (1), piezoelectric cantilever (2) and fluid end (3), wherein piezoelectric cantilever (2) one end is connected with pedestal (1), the other end is connected with the first side cavity (31) of fluid end (3), and the support arm on pedestal (1) is connected with the second side cavity (32) of fluid end (3); Sheet first side cavity (31) that fluid end (3) is made up of rubber material and the second side cavity (32) inner surface positioned opposite, edge seal forms pump chamber, the bending volume realizing described pump chamber of the first side cavity (31) is driven to change by piezoelectric cantilever (2), in conjunction with import one-way valve (34) and the Outlet check valves (35) of the upper installation of the second side cavity (32), realize the motion that fluid flows out from inlet duct (36) stream inlet or outlet duct (37);
It is characterized in that: each support arm on described pedestal (1) and piezoelectric cantilever (2) center line are parallel to each other, described power end can with fluid end (3) assembly and disassembly; Described piezoelectric cantilever (2) and described support arm interlaced arrangement, the projection namely on the first side cavity (31) and the second side cavity (32) junction plane is without overlapping region.
2. piezoelectric cantilever drive-type piezoelectricity diaphragm pump according to claim 1, it is characterized in that: described support arm can be replaced with supporting piezoelectric cantilever, being now connected to piezoelectric cantilever (2) on the first side cavity (31) contrary with being connected to the support piezoelectric cantilever moving direction that the second side cavity connects.
3. piezoelectric cantilever drive-type piezoelectricity diaphragm pump according to claim 1, is characterized in that: described piezoelectric cantilever (2) is a single-chip piezoelectric cantilever or bi-morph piezo-electric overhang; Described single-chip piezoelectric cantilever is that thin sheets of piezoelectric material (21) is laminated to the upper formation of elastic base plate (22); Described bi-morph piezo-electric overhang is laminated in by elastic base plate (22) between the identical thin sheets of piezoelectric material (21) of two polarised directions to form.
CN201410161539.5A 2014-04-22 2014-04-22 A kind of piezoelectric cantilever drive-type piezoelectricity diaphragm pump Active CN103899519B (en)

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CN103899519B true CN103899519B (en) 2015-09-09

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CN105655475B (en) * 2016-03-18 2017-12-08 河南师范大学 A kind of piezoelectric monocrystal sheet

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CN203867831U (en) * 2014-04-22 2014-10-08 吉林大学 Piezoelectric cantilever beam drive type piezoelectric diaphragm pump

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US20060232166A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
JP4793442B2 (en) * 2006-03-29 2011-10-12 株式会社村田製作所 Micro pump
JP2008180179A (en) * 2007-01-25 2008-08-07 Star Micronics Co Ltd Diaphragm pump
CN203404051U (en) * 2013-07-08 2014-01-22 吉林大学 Cantilever type piezoelectric diaphragm pump
CN103334907A (en) * 2013-07-08 2013-10-02 吉林大学 Cantilever-type piezoelectric diaphragm pump

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Publication number Priority date Publication date Assignee Title
CN203867831U (en) * 2014-04-22 2014-10-08 吉林大学 Piezoelectric cantilever beam drive type piezoelectric diaphragm pump

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