JP2004116327A - Microdispenser - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microdispenser ensuring a minute amount of dispensation and a stable discharge flow while being compact and low-cost, and thus easy to form a multi-structure. <P>SOLUTION: A nozzle plate 10, a channel plate 20, a cavity plate 30, and a diaphragm plate 40, each having a nozzle 11, a channel 21 connected to the nozzle 11, a through portion as a pressurizing chamber 31 to send fluid to the channel 21 and a groove as a supply channel 32 to supply fluid to the pressurizing chamber 31, and a supply port 41 to supply fluid to the supply channel 32, respectively, are laminated and joined together to form a fluid delivery channel. A projection 50 for pressurization is bonded on an outer surface of the diaphragm plate 40 at the position corresponding to the middle of the pressurizing chamber 31. The movable end of a piezoelectric actuator 70, which is a drive source for fluid delivery, is contacted to the projection 50 for pressurization, and the other end of the piezoelectric actuator 70 is bonded on the diaphragm plate 40 with a supporting plate 60 to adjust the height. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a microdispenser used for microdispensing of a target substance, a reagent, or the like when synthesizing, separating, extracting, or analyzing a chemical substance in the fields of medicine, food, agrochemicals, and the like.
[0002]
[Prior art]
In the development of chemicals used in medicines and foods, and chemicals used in fields such as agriculture, the base chemicals are modified with various other chemicals to synthesize new chemicals, Evaluate the properties, safety, side effects, etc. to judge the feasibility of commercialization. There are hundreds of thousands of combinations of chemical substances in this synthesis, and synthesis, evaluation, inspection, and the like require enormous personnel and time.
[0003]
For this reason, an attempt has been made to reduce the required personnel and time by selecting an object using conventional know-how or the like or constructing an automatic synthesis / evaluation system. In this automatic composition / evaluation system, a combination of devices and the like as shown in FIG. 5 is being studied as a place for performing composition and evaluation. This combination includes a multi-well plate 1 in which a large number of wells 2 serving as reaction vessels are formed in a matrix on a substrate made of silicon, stainless steel, or the like, a storage vessel 3 for dispensing a predetermined chemical or the like into the wells 2, It comprises a syringe pump 4 and a dispenser nozzle 5. The syringe pump 4 and the dispenser nozzle 5 constitute a dispenser, and the storage container 3 and the dispenser are used as a set. FIG. 5 shows only one of these sets, but in an actual system, this set is not one, and in the case of synthesis, for example, a set for dispensing a base chemical substance, Multiple sets are needed to dispense other chemicals used for modification. The same applies to the evaluation of new chemical substances, etc., which requires a set for dispensing chemical substances to be evaluated and a plurality of sets for dispensing reagents necessary for evaluation. is there.
[0004]
For reference, an example of the size and number of the multi-well plate 1 and the well 2 is shown. The multi-well plate 1 has a size of about 90 mm × 130 mm, the volume of the well is about 60 to 250 μL, and the number of wells is 100. About 400.
For example, when various reagents separately stored in the plurality of storage containers 3 are dispensed into the new medicine dispensed into the well 2 via the dispenser including the syringe pump 4 and the dispenser nozzle 5, each reagent is dispensed. The new drug reacts with the reagent in each well 2, and various evaluation items such as the effectiveness and safety of the new drug are evaluated based on the reaction result.
[0005]
[Problems to be solved by the invention]
The well 2 of the multi-well plate 1 has recently tended to have a higher density and a lower capacity for the purpose of improving throughput and reducing the consumption of chemical substances. Correspondingly, it is necessary to reduce the minimum dispensing amount of the dispenser for dispensing reagents and the like to the well 2 and to increase the dispensing amount with high precision. For example, in the development of pharmaceuticals, the minimum dispensing volume of the dispenser is desired to be 0.2 μL or less, which is smaller than the current minimum dispensing volume of around 0.5 μL. Further, in order to dispense the liquid into a large number of wells 2, it is necessary to provide a multiplicity of dispensers. However, if a current commercially available dispenser is multiplied, the cost is increased and the system is increased in size.
[0006]
In order to solve this difficulty, in the development of chemicals used in medicines and foods, and chemicals used in fields such as agriculture, small and low-cost wells with reduced volume and increased processing capacity were developed. It is hoped that an automatic synthesis / evaluation system will be developed, and various issues related to this will be studied. One of the issues to be studied is the development of a microdispenser that is small and lightweight, can inject a liquid at a high speed, and can be easily multiplied.
[0007]
An object of the present invention is to reduce the dispensed volume (discharge resolution is 0.2 μL or less), secure a stable discharge flow rate (50 to 100 μL / s), and reduce the size to meet the above demand. It is an object of the present invention to provide a microdispenser which can be easily multiplied at a low cost.
[0008]
[Means for Solving the Problems]
The invention according to claim 1 is a microdispenser provided for use such as dispensing a small amount of liquid, the nozzle plate having a nozzle for discharging liquid, which is sequentially laminated and joined, and corresponding to the center position of the nozzle. A passage plate having a through hole as a passage centered at a position, a through portion which is located immediately above the passage and serves as a pressurizing chamber which is a space for pressurizing the liquid, and supplies liquid to the pressurizing chamber; A cavity plate having a through portion or groove serving as a supply path, and a cavity plate side having a through hole serving as a liquid supply port to the supply path and corresponding to the center of the through portion serving as the pressurizing chamber; A vibrating plate having a pressurizing protrusion attached to a non-surface, and a piezoelectric actuator joined to the vibrating plate at a position distant from the pressurizing protrusion and pressing and displacing the pressurizing protrusion. .
[0009]
In the present invention, plates having different functions, such as a nozzle plate and a cavity plate, are laminated and joined to form a fluid moving portion from a liquid supply port to a supply path, a pressurizing chamber, a passage, and a nozzle. Each time the piezoelectric actuator is driven, the volume of the pressurizing chamber is reduced to discharge a fixed amount of liquid from the nozzle.
Since the nozzle plate, the cavity plate and the like are laminated and joined to form a moving portion of the fluid, each material is a thin plate, and can be processed with high processing accuracy, so that miniaturization is easy. For this reason, in the method of combining the pressurizing chamber and the piezoelectric actuator, the amount of liquid (equivalent to the ejection resolution) discharged by one drive of the piezoelectric actuator is easily reduced, and the number of operations (the driving frequency of the piezoelectric actuator) is reduced. ) Can increase the discharge flow rate. In addition, since a large number of nozzle plates and the like can be simultaneously manufactured in the same process by using a material having a large area, mass productivity is excellent.
[0010]
According to a second aspect of the present invention, in the first aspect of the present invention, the nozzle plate, the passage plate, the cavity plate, and the vibration plate each have a plurality of nozzles and the passage in a positional relationship corresponding to each other. A pressurizing projection and a portion that connects to the pressurizing chamber of the through hole and the pressurizing chamber and the penetrating portion or the groove that serves as the supply path. A penetrating part or a groove serving as a common supply path for branching a part connected to the pressurizing chamber of the penetrating part or the groove serving as a supply path, and a through hole serving as a liquid supply port common to the diaphragm is provided. The piezoelectric actuator includes a plurality of piezoelectric actuators corresponding to the plurality of pressing protrusions.
[0011]
In the present invention, in the fluid moving section, the liquid supply port and the front stage of the supply path are formed as a common flow path, and the portion from the rear stage of the supply path to the nozzle through the pressurizing chamber is independent of each other. And the respective pressure chambers are independently volume-changed by the corresponding piezoelectric actuators.
Forming a plurality of nozzles and penetrating portions serving as pressurizing chambers in a nozzle plate or a cavity plate, etc., by changing the area of the nozzle plate or the like according to the number of nozzles or the like, is substantially the same processing as the invention of claim 1 This can be performed with high accuracy, and the conditions for the lamination bonding may be adjusted according to the area.
[0012]
According to a third aspect of the present invention, in the second aspect of the present invention, the plurality of piezoelectric actuators have a size capable of displacing all the pressing projections of the diaphragm having a plurality of pressing projections. A piezoelectric actuator, the displacement end side of which is formed as an independent displacement portion corresponding to each pressurizing protrusion, and the piezoelectric element is electrically separated corresponding to each pressurizing protrusion, and is placed on the diaphragm. The piezoelectric actuator has an integral structure in which the joined sides are integrated.
[0013]
The displacement end side is formed as an independent displacement portion corresponding to each pressurizing projection, and the piezoelectric elements are electrically separated corresponding to the individual pressurizing protrusions. Operates as a piezoelectric actuator. For this reason, the structure is the same as a plurality of piezoelectric actuators that are functionally independent even if they are integrated, and the plurality of piezoelectric actuators can be handled as one component.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
The feature of the microdispenser according to the present invention is that a plurality of liquid passages are formed, each of which is processed to form a different part of the liquid flow path, joined and laminated to form a liquid flow path from a liquid supply unit to a nozzle via a pressurizing chamber. And a piezoelectric actuator that changes the volume of the pressurizing chamber to discharge liquid from the nozzle. Since the plates are stacked to form the liquid flow path, the thickness of each plate can be reduced, thereby facilitating processing and increasing processing accuracy.
[0015]
Hereinafter, embodiments of the present invention will be described in more detail using examples.
The parts having the same functions as those of the prior art are denoted by the same reference numerals.
[First embodiment]
FIG. 1 is a cross-sectional view showing the configuration of a first embodiment of a microdispenser according to the present invention, and FIG. 2 is a perspective view showing this embodiment disassembled for each member.
[0016]
The microdispenser 6 according to this embodiment includes four laminated and joined plates forming a liquid flow path, that is, a nozzle plate 10, a passage plate 20, a cavity plate 30, a vibration plate 40, a driving piezoelectric actuator 70, The support plate 60 is used.
A stainless steel (SUS316) plate was used for the nozzle plate 10, the passage plate 20, the cavity plate 30, and the vibration plate 40, and the selective etching by photolithography using aqua regia was used for the processing. The size of the nozzle plate 10 and the like is 6 mm × 50 mm.
[0017]
The nozzle plate 10 is provided with a nozzle 11 serving as a liquid discharge port. The thickness of the nozzle plate 10 is 0.2 mm, and the diameter of the nozzle 11 is φ0.12 mm. The passage plate 20 is formed with a through hole as a passage 21 for sending the liquid to the nozzle 11. The thickness of the passage plate 20 is 0.5 mm, the center position of the passage 21 is positioned at the center of the nozzle 11, and the diameter of the passage 21 is φ1 mm which is intermediate between the size of the nozzle 11 and the size of the pressurizing chamber 31 described later. It is about. The cavity plate 30 has a penetrating portion (indicated as a pressure chamber 31 in FIG. 2) serving as a pressure chamber 31 and a groove (indicated as a supply path 32 in FIG. ) And a groove (in FIG. 2, indicated as a throttle channel 33) which is formed at the end of the supply channel 32 at the entrance to the pressurizing chamber 31 and is formed. The thickness of the cavity plate 30 is 0.2 mm, the size of the pressurizing chamber 31 is 3 mm × 3 mm, the width of the throttle channel 33 is 0.15 mm, and the depth of the groove is half of the thickness. 1 mm. The diaphragm 40 has a through hole as a liquid supply port 41 communicating with the supply path 33. The thickness of the diaphragm 40 is 0.02 mm.
[0018]
These four plates 10, 20, 30, and 40 are laminated by joining these plates in the order shown in FIGS. 1 and 2, and applying 0.1 kg in a vacuum of 1.33 × 10 ⁻² Pa or less. / Mm ^{2 under} a load of 300 ° C. for 3 hours.
After bonding, the surface of the nozzle plate 10 was coated with a water-repellent material containing fluorine (not shown). The purpose of this is to prevent the liquid from adhering or accumulating on the surface of the nozzle plate 10.
[0019]
After the lamination, the pressing projection 50 was bonded to the outer surface of the vibration plate 40 corresponding to the center position of the pressing chamber 31. The pressing projection 50 is a member for effectively changing the displacement of the piezoelectric actuator 70 to change the volume of the pressing chamber 31.
Finally, the piezoelectric actuator 70 is positioned such that one end of the piezoelectric actuator 70 is slightly inside the projection 50 for pressing, the other end is aligned with the end of the diaphragm 40, and the supply port 41 of the diaphragm 40 is not closed. And adhered to the supporting plate 60 on the end side of the vibration plate 40 and adhered to the vibration plate 40. The support plate 60 has the same thickness as the pressing protrusion 50, and has a height at which the piezoelectric actuator 70 slightly contacts the pressing protrusion 50 when no voltage is applied to the piezoelectric actuator 70. This is a support member for the piezoelectric actuator 70 for adjusting the height.
[0020]
The piezoelectric actuator 70 has a bimorph structure in which a lower piezoelectric element 72 and an upper piezoelectric element 73 are attached to both surfaces of a metal plate 71, and a pulse voltage is applied to the lower piezoelectric element 72 and the upper piezoelectric element 73. Accordingly, the diaphragm 40 is bent downward, and the diaphragm 40 on the upper surface of the pressurizing chamber 31 is displaced via the pressurizing projection 50 to change the volume of the pressurizing chamber 31, and the liquid inside the pressurizing chamber 31 is discharged. It is extruded toward the passage 21 and discharged from the nozzle 11. At this time, the above-described throttle channel 33 is formed to move the liquid preferentially to the nozzle 11 side. The size of the piezoelectric actuator 70 is 5 mm in width and 35 mm in length, the thickness of the metal plate 71 is 0.10 mm, and the thickness of the lower piezoelectric element 72 and the upper piezoelectric element 73 is 0.15 mm.
[0021]
The displacement amount and the generated force of the piezoelectric actuator 70 are determined by the length and width of the piezoelectric actuator 70, respectively, when the thickness and characteristics of the piezoelectric element and the metal and the driving conditions are constant.
The piezoelectric actuator includes a unimorph type in addition to the bimorph type shown in FIG. 1, but the bimorph type is advantageous when driven at a low voltage.
[0022]
In the configuration described above, the liquid is filled up to the supply path 32, the throttle flow path 33, the pressurizing chamber 31, the passage 21, and the nozzle 11 from a liquid supply source 41 (not shown) through an external liquid supply source. . In this state, when a predetermined voltage is applied to the piezoelectric actuator 70, the piezoelectric actuator 70 bends downward and displaces the diaphragm 40 on the upper surface of the pressurizing chamber 31 via the pressurizing protrusion 50 downward. Then, the volume of the pressurizing chamber 31 is reduced, and a liquid having a volume corresponding to the reduced volume is extruded toward the passage 21 and discharged from the nozzle 11 to the outside.
[0023]
In the above embodiment, when water is used as the liquid and a voltage pulse of 60 V is applied to the piezoelectric actuator 70, the discharge amount per discharge (discharge resolution) is 0.13 μL, and the frequency of the voltage pulse is up to 900 Hz. The piezoelectric actuator 70 can follow and discharge the same amount of water from the nozzle. Therefore, it was confirmed that a discharge flow rate of 100 μL / s could be secured.
[0024]
In the above embodiment, a stainless steel plate is used as the nozzle plate 10 or the like, but the plate such as the nozzle plate 10 forming the liquid flow path should be selected according to the intended purpose of the microdispenser. Yes, it should be determined from the viewpoints of chemical resistance, solvent resistance, heat resistance, and fine workability, and it is determined that a silicon plate and a glass plate can also be used. In the case of a silicon plate and a glass plate, electrostatic bonding can be applied to lamination bonding.
[0025]
Although the above embodiment shows an example of a relatively large micro-dispenser 6, for example, the pressurizing chamber 31 can be sufficiently processed into a size of about 1 mm × 1 mm. The width of the dispenser 6 can be reduced to 2 mm or less.
FIG. 3 is a perspective view showing an application example of the micro dispenser 6 as in this embodiment. A plurality of wells 2 are arranged in a plurality of micro wells corresponding to a row of wells 2 of a multi-well plate 1 formed at equal intervals. The micro-dispensers 6 are multiplexed by disposing the dispensers 6 in a line, and the storage containers 3 are provided for each of the micro-dispensers 6. Arranging a plurality of micro-dispensers 6 in parallel in this way is effective not only for increasing the processing capacity of an automatic synthesis / evaluation system, but also for reducing the size and cost. Although the micro dispenser 6 shown in FIG. 3 is not explicitly shown, the positional relationship between the supply port and the piezoelectric actuator is different from that shown in FIGS. 1 and 2. However, the configuration in which the piezoelectric actuators and the supply ports are arranged in the length direction can reduce the width of the micro-dispenser 6, and is therefore advantageous when a plurality of micro-dispensers 6 are arranged in parallel to be multiplied.
[0026]
[Second embodiment]
This embodiment is a multi-type micro dispenser in which a plurality of micro dispensers are integrated.
FIG. 4 is an exploded perspective view showing the second embodiment, which is a multi-type microdispenser 6a, for each member.
[0027]
The basic configuration of this embodiment is the same as that of the first embodiment, and four laminated and joined stainless steel plates forming a plurality of flow paths, that is, a nozzle plate 10a, a passage plate 20a, a cavity plate 30a, and It comprises a vibration plate 40a, a piezoelectric actuator 70a in which a plurality of driving piezoelectric actuators are integrated, and a support plate 60a thereof.
On the nozzle plate 10a, four nozzles 11, which are liquid discharge ports, are formed at equal intervals. The passage plate 20 is formed with four passages 21 for sending the liquid to the nozzle 11 similarly to the nozzle 11. In the cavity plate 30, a penetrating portion (shown as a pressurizing chamber 31 in FIG. 4) and a penetrating portion (shown as a throttle channel 33 in FIG. 4) serving as a throttle channel are formed in the same manner as the nozzle 11. Four through-holes (indicated as supply paths 32 a in FIG. 4) are formed as common supply paths for guiding the liquid to the pressurizing chamber 31 through the throttle channel 33. The diaphragm 40 is provided with two liquid supply ports 41 near both ends, which communicate with the supply path 32a.
[0028]
The lamination joining of these four plates is performed by laminating these plates in the order shown in FIG. 3 and, similarly to the first embodiment, 0.1 kg / mm in a vacuum of 1.33 × 10 ² Pa or less. Diffusion bonding was performed by applying a load of ² and heating at 900 ° C. for 3 hours.
After bonding, the surface of the nozzle plate 10a was coated with a water-repellent material containing fluorine (not shown). The purpose of this is to prevent the liquid from adhering or accumulating on the surface of the nozzle plate 10.
[0029]
After the lamination and joining, the pressing projection 50 was bonded to the outer surface of the vibration plate 40a corresponding to the center position of the pressing chamber 31. The pressurizing projection 50 is a member for efficiently changing the displacement of the piezoelectric actuator 70a to change the volume of the pressurizing chamber 31.
The piezoelectric actuator 70a is obtained by processing a bimorph-type piezoelectric actuator having the same length as the nozzle plate 10a and the like and having a slightly smaller width into four piezoelectric actuator branches that can be independently driven corresponding to the four pressing projections 50, respectively. It is. That is, a notch for separation is formed in a portion which bends when a voltage is applied, and slits are formed in the lower piezoelectric element 72a and the upper piezoelectric element 73a to electrically separate each of the four areas. Are separated. Each piezoelectric actuator branch has its one end positioned slightly inside the pressurizing projection 50 and the other end positioned so as not to block the two supply ports 41a of the diaphragm 40a. The end is adhered and supported by the support plate 60a and adhered to the vibration plate 40a. The support plate 60a has the same thickness as the pressing protrusion 50, and when no voltage is applied to the piezoelectric actuator 70a, the piezoelectric actuator 70a is brought into a state in which the piezoelectric actuator 70a slightly contacts the pressing protrusion 50. It is a support member for adjusting the height of the actuator 70a.
[0030]
Although the piezoelectric actuator 70a of this embodiment is of a bimorph type, it is needless to say that a unimorph type piezoelectric actuator can also be employed.
When the distance between the nozzles 11 of the multi-type microdispenser 6a and the distance between the wells of the multi-well plate are made to correspond to each other and combined, the throughput of various reactions, synthesis, analysis, etc. can be greatly improved. In addition, a small and low-cost automatic synthesis / evaluation system can be realized.
[0031]
In this embodiment, as in the first embodiment, a silicon plate or a glass plate can be used as a material for the nozzle plate 10a or the like.
Further, although an integrated piezoelectric actuator having a plurality of piezoelectric actuator branches is used as the piezoelectric actuator 70a, a piezoelectric actuator as in the first embodiment may be arranged on each of the plurality of pressurizing protrusions 50. . However, an integrated piezoelectric actuator having a plurality of actuator branches can reduce the number of assembly steps.
[0032]
【The invention's effect】
According to the first aspect of the present invention, plates having different functions, such as a nozzle plate and a cavity plate, are laminated and joined to each other, and a fluid moving section from a liquid supply port to a supply path, a pressure chamber, a passage, and a nozzle is provided. Is formed, and each time the piezoelectric actuator is driven, the volume of the pressurizing chamber is reduced to discharge a fixed amount of liquid from the nozzle.
[0033]
Since the nozzle plate, the cavity plate and the like are laminated and joined to form a moving portion of the fluid, each material is a thin plate, and can be processed with high processing accuracy, so that miniaturization is easy. For this reason, in the method of combining the pressurizing chamber and the piezoelectric actuator, the amount of liquid (equivalent to the ejection resolution) discharged by one drive of the piezoelectric actuator is easily reduced, and the number of operations (the driving frequency of the piezoelectric actuator) is reduced. ) Can increase the discharge flow rate. In addition, since a large number of nozzle plates and the like can be simultaneously manufactured in the same process by using a material having a large area, mass productivity is excellent.
[0034]
Therefore, according to the present invention, the dispensed amount can be reduced to a small amount (discharge resolution is 0.2 μL or less), a stable discharge flow rate (50 to 100 μL / s) can be ensured, and the size can be easily reduced to multi-size and low. A low cost microdispenser can be provided.
According to the second aspect of the present invention, the liquid supply port and the front stage of the supply path are formed as a common flow path in the fluid moving section, and the parts from the rear stage of the supply path to the nozzle via the pressurizing chamber are mutually connected. The pressure chambers are formed as a plurality of independent channels, and the respective pressure chambers are independently volume-changed by the corresponding piezoelectric actuators.
[0035]
Forming a plurality of nozzles and penetrating portions serving as pressurizing chambers in a nozzle plate or a cavity plate, etc., by changing the area of the nozzle plate or the like according to the number of nozzles or the like, is substantially the same processing as the invention of claim 1 This can be performed with high accuracy, and the conditions for the lamination bonding may be adjusted according to the area.
Therefore, according to the present invention, it is possible to provide a multi-type micro dispenser in which a plurality of micro dispensers are integrated. This multi-type micro dispenser is suitable for disposing the dispensers with high density, and is most suitable for miniaturization and cost reduction of an automatic synthesis / evaluation system and the like.
[0036]
According to the third aspect of the present invention, as the piezoelectric actuator, the displacement end side is formed as an independent displacement portion corresponding to each pressing protrusion, and the piezoelectric element is electrically separated corresponding to each pressing protrusion. And a piezoelectric actuator having an integral structure. Since the integrated piezoelectric actuator is structurally the same as a plurality of functionally independent piezoelectric actuators even though it is an integral type, according to the present invention, a plurality of piezoelectric actuators are treated as one component. And the number of manufacturing steps can be reduced.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing the configuration of a first embodiment of a microdispenser according to the present invention. FIG. 2 is a perspective view showing the first embodiment disassembled for each member. FIG. FIG. 4 is an exploded perspective view showing the second embodiment for each member. FIG. 5 is a perspective view showing a main part of an automatic chemical substance synthesizing system using a conventional dispenser. Description]
Reference Signs List 1 Multi-well plate 2 Well 3 Storage container 4 Cylinder pump 5 Dispenser nozzle 6 Micro dispenser 6a Multi-type micro dispenser 10, 10a Nozzle plate 11 Nozzle 20, 20a Passage plate 21 Passage 30, 30a Cavity plate 31 Supply of pressure chambers 32, 32a Path 33 Restricted flow path 40, 40a Vibrating plate 41, 41a Supply port 50 Pressing projection 60, 60a Support plate 70, 70a Piezoelectric actuator 71, 71a Metal plate 72, 72a Lower piezoelectric element 73, 73a Upper piezoelectric element

Claims (3)

A microdispenser for use in applications such as microdispensing of liquid,
Laminated in order,
A nozzle plate having a nozzle for discharging liquid,
A passage plate having a through hole as a passage centered at a position corresponding to the center position of the nozzle,
A cavity plate having a through portion serving as a pressurizing chamber that is located immediately above the passage and being a space for pressurizing the liquid, and a through portion or a groove serving as a supply path for supplying the liquid to the pressurizing chamber;
A diaphragm having a through hole serving as a liquid supply port to the supply path and having a pressing projection attached to a surface corresponding to the center of the through portion serving as the pressurizing chamber and not on the cavity plate side. When,
A piezoelectric actuator that is joined to the diaphragm at a position away from the pressing protrusion and presses and displaces the pressing protrusion;
Consisting of
A microdispenser characterized in that: The nozzle plate, the passage plate, the cavity plate, and the vibration plate, respectively, a plurality of nozzles in a positional relationship corresponding to each other, a through hole as the passage, and a through portion serving as the pressurizing chamber, and A portion connected to the pressurizing chamber of the penetrating portion or groove serving as the supply path and the pressurizing protrusion,
The cavity plate includes a through portion or a groove serving as a common supply path that branches a portion connected to the pressurizing chamber of the through portion or the groove serving as the plurality of supply paths,
A through hole serving as a supply port for the liquid common to the diaphragm,
The piezoelectric actuator includes a plurality of piezoelectric actuators corresponding to the plurality of pressing protrusions,
The microdispenser according to claim 1, wherein: The plurality of piezoelectric actuators are piezoelectric actuators having a size capable of displacing all of the pressing projections of the diaphragm having a plurality of pressing projections, and the displacement end side of each of the piezoelectric actuators is an individual piezoelectric actuator. The piezoelectric element is formed as an independent displacement portion corresponding to the pressing protrusion, and the piezoelectric element is electrically separated corresponding to each pressing protrusion, and the side joined to the vibration plate has an integrated structure. Equipped with a piezoelectric actuator,
The microdispenser according to claim 2, wherein:

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