JP2008304377A - Sample introducing microdevice - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample introducing microdevice capable of introducing only a necessary amount of a sample in necessary timing. <P>SOLUTION: A fine channel 12a is formed to the inlet side of the pressurizing chamber 1 formed to a substrate 17a, a nozzle-shaped channel 14a having a capillary effect is formed to the outlet side of a pressurizing chamber 1a through a fine channel 13a and the fine channel 18a branched through a branch point 19a is connected to the fine channel 13a. The discharge port 20a connected to the leading end of the fine channel 18a is formed to a lid plate 16a and a piezoelectric element 10a for driving the lid plate 16a as a vibration plate is arranged on the lid plate 16a so as to be positioned above the pressurizing chamber 1a. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sample introduction microdevice, and in particular, a micropump, a micromixer, a microreactor, and the like that perform mixing, reaction, separation, purification, extraction, analysis, and the like of a small volume of liquid using a microchannel formed on a substrate. It is suitable for application to μTAS (micro total analysis system) and the like.

In recent years, microchannels have been formed on substrates such as silicon, glass, and plastic using micromachining technology, and the microspace has been mixed, reacted, separated, purified, extracted, analyzed, etc. Attempts to use it in the field are drawing attention. Devices used in these fields are called micropumps, micromixers, microreactors, μTAS (micro total analysis system), etc., depending on the purpose of use.
In such a field, one having an equivalent diameter of the reaction channel (diameter when the cross section of the channel is converted into a circle) is smaller than 500 μm is a microchannel. And like such a microchannel, when the scale of the channel is miniaturized, the surface area per unit volume becomes very large.

And because of these features, the gradient of temperature, pressure, concentration, etc. of the liquid flowing through the microchannel increases, improving the efficiency of heat conduction and mass transfer diffusion, and shortening the reaction time in the reaction system. Or the reaction rate can be improved. Furthermore, it is possible to synthesize an appropriate amount with a very small amount of reaction, obtain high reproducibility, and greatly reduce the amount of chemicals and catalyst reagents used. Is also effective.
As shown below, the sample introduction microdevice having the form of a diffuser type micropump using a piezoelectric element and the ink jet technology are applied as conventional techniques related to the structure of the sample introduction microdevice used in such a field. Sample introduction microdevices having a dispenser type have been proposed.

FIG. 5A is a plan view showing a schematic configuration of a sample introduction microdevice having the form of a conventional diffuser type micropump, and FIG. 5B shows the sample introduction microdevice of FIG. It is sectional drawing cut | disconnected and shown by the A 'line.
In FIG. 5, the sample introduction microdevice is provided with a cover plate 16e and a substrate 17e, and the cover plate 16e is fixed on the substrate 17e.
Here, a pressurizing chamber 1e is formed on the substrate 17e, a micro flow path 4e having a diffuser 2e is formed on the inlet side of the pressurizing chamber 1e, and on the outlet side of the pressurizing chamber 1e, A microchannel 5e having a diffuser 3e is formed.

The lid plate 16e has a supply port 7e connected to one end of the microchannel 4e and an outlet 9e connected to one end of the microchannel 5e. The lid plate 16e is provided with a lid plate 16e on the lid plate 16e. A piezoelectric element 10e for driving as the diaphragm 11e is disposed on the pressurizing chamber 1e. The supply port 7e is connected to a liquid supply source 6e, and the outflow port 9e is connected to a liquid introduction destination 8e.
When the piezoelectric element 10e is operated to vibrate the diaphragm 11e, the volume of the pressurizing chamber 1e changes, and the pressurizing chamber 1e expands to suck in fluid, and the pressurizing chamber 1e contracts. The liquid can be sent by repeating the operation of discharging the fluid. Further, the flow from the narrower side to the wider side can be created by utilizing the fact that the flow generated by the diaphragm 11e changes due to the resistance difference of the flow path shape.

6A is a plan view showing a schematic configuration of a conventional sample introduction microdevice having a dispenser type configuration, and FIG. 6B is a cross-sectional view of the sample introduction microdevice of FIG. It is sectional drawing cut | disconnected and shown by.
In FIG. 6, the sample introduction microdevice is provided with a cover plate 16f and a substrate 17f, and the cover plate 16f is fixed on the substrate 17f.
Here, a pressurizing chamber 1f is formed on the substrate 17f, and a micro flow channel 12f is formed on the inlet side of the pressurizing chamber 1f. Further, a nozzle-shaped channel 14f having a capillary effect is formed on the outlet side of the pressurizing chamber 1f via a microchannel 13f, and a nozzle hole 15f is provided at the tip of the nozzle-shaped channel 14f. The interface between the liquid and the gas is formed at 15f.

In addition, a supply port 7f connected to one end of the microchannel 12f is formed in the lid plate 16f, and a piezoelectric element 10f for driving the lid plate 16f as the vibration plate 11f is pressurized on the lid plate 16f. It arrange | positions so that it may be located on the chamber 1f. The supply port 7f is connected to a liquid supply source 6f.
When the piezoelectric element 10f is operated to vibrate the diaphragm 11f, the volume of the pressurizing chamber 1f changes, and the pressurizing chamber 1f expands to draw in fluid, and the pressurizing chamber 1f contracts. The liquid can be sent by repeating the operation of discharging the fluid. Then, the liquid sent by the displacement of the diaphragm 11f can be pushed out from the nozzle hole 15f into a fine droplet while being supplied to the nozzle hole 15f using the capillary force of the nozzle-shaped channel 14f.

Further, for example, in Patent Document 1, in order to ensure a small amount of dispensing and a discharge flow rate, a nozzle plate, a passage plate, a cavity plate, and a vibration plate are stacked and joined to form a liquid transport channel. A method of forming is disclosed.
JP 2004-116327 A

However, in the conventional sample introduction microdevice, there is no discharge destination of the surplus sample introduced into the sample introduction microdevice. Therefore, when the conventional sample introduction microdevice is applied to the introduction of the sample of the analyzer, if the sample is intermittently supplied from the upstream of the sample introduction microdevice, the sample introduction microdevice by the required amount at the necessary timing There was a problem that the sample could not be introduced into the downstream detector.
Therefore, an object of the present invention is to provide a sample introduction microdevice capable of introducing a sample in a necessary amount at a necessary timing.

In order to solve the above-described problem, according to the sample introduction microdevice according to claim 1, the first supply port for supplying the liquid and the substrate formed to transport the liquid supplied from the first supply port are formed. A first microchannel having a branched point, an outlet connected to one of the branch destinations of the first microchannel, and capable of discharging a required amount of liquid at a necessary timing; And a discharge port for discharging an excessive amount of liquid connected to the other branch destination of the one microchannel.
As a result, the excess sample introduced into the sample introduction microdevice can be discharged from the discharge port, and even when the sample is intermittently supplied from upstream of the sample introduction microdevice, it is necessary at the necessary timing. The sample can be introduced downstream of the sample introduction microdevice by an appropriate amount.

According to the sample introduction microdevice of claim 2, the flow path resistance of the first microchannel of the branch destination connected to the discharge port is the first resistance of the branch destination connected to the outlet. It is characterized by being smaller than the channel resistance of the micro channel.
As a result, even when the sample is intermittently supplied from the upstream side of the sample introduction microdevice, the sample can be sent to the discharge port side so that the sample is not sent to the outflow side. The excess sample introduced into the microdevice can be discharged from the discharge port.

According to the sample introduction microdevice according to claim 3, the first additive formed on the substrate so as to be disposed in a part of the first microchannel upstream of the branch point. A pressure chamber, a first diaphragm disposed on the first pressure chamber, and a first piezoelectric element that vibrates the first diaphragm are provided.
Thus, by stopping the driving of the first piezoelectric element, it is possible to send the sample to the discharge port side, and to drive the sample to the outlet side by driving the first piezoelectric element. It is possible to introduce a sample in a necessary amount at a necessary timing.

According to the sample introduction microdevice of claim 4, when the first piezoelectric element is not driven, the liquid fed from the upstream of the first microchannel is discharged from the discharge port, When driving the first piezoelectric element, the liquid fed from the upstream side of the first microchannel is discharged from the outlet.
Thereby, even when the sample is intermittently supplied from the upstream of the sample introduction microdevice, the excess sample introduced into the sample introduction microdevice can be discharged from the discharge port. It is possible to introduce the sample in the necessary amount at the necessary timing to the downstream introduction destination.

Further, according to the sample introduction microdevice according to claim 5, the outlet is a nozzle hole configured to form an interface between a liquid and a gas, and the branch destination connected to the outlet The first microchannel is a nozzle-shaped channel having a capillary effect connected to the nozzle holes.
Thus, by driving the first piezoelectric element, the sample can be fed to the outlet side, and the sample can be pushed out from the nozzle hole in the form of minute droplets at the required amount.

The sample introduction microdevice according to claim 6 further includes a valve connected to the discharge port, and the liquid sent from the upstream of the first microchannel is discharged from the outlet. It is characterized by closing the valve.
Thereby, even when the sample introduction microdevice is provided with a discharge port for discharging the excess liquid, it is possible to prevent the sample from being discharged from the discharge port when the sample is discharged from the outflow port. For this reason, the entire amount of the sample sent from the upstream of the first microchannel is discharged from the outlet while preventing the sample sent from the upstream of the first microchannel from leaking from the discharge port. Thus, it is possible to introduce a sample in a necessary amount at a necessary timing while preventing the sample from being wasted.

  In addition, according to the sample introduction microdevice of claim 7, the sample introduction microdevice is formed on the substrate so as to be disposed in a part of the first microchannel between the branch point and the discharge port. A second pressurizing chamber; a second diaphragm disposed on the second pressurizing chamber; and a second piezoelectric element that vibrates the second diaphragm, and is sent from upstream of the first microchannel. The second piezoelectric element is driven when the liquid to be discharged is discharged from the outlet, and the second piezoelectric element is driven when the liquid sent from the upstream of the first microchannel is discharged from the outlet. It is characterized by not.

  Thus, by driving the second piezoelectric element, it is possible to forcibly guide the sample fed from the upstream side of the first microchannel to the outlet, and by driving the first piezoelectric element. The sample sent from the upstream of the first microchannel can be forcibly guided to the outlet. For this reason, it is possible to discharge the excess sample from the discharge port while preventing the sample fed from the upstream of the first microchannel from leaking out from the outlet, and from the upstream of the sample introduction microdevice. Even when the sample is intermittently supplied, the sample can be introduced downstream of the sample introduction microdevice by a necessary amount at a necessary timing.

  The sample introduction microdevice according to claim 8 is formed on the substrate so as to transport the liquid supplied from the second supply port for supplying the liquid and the second supply port, and the first micro A second micro-channel having a junction between the branch point of the channel and the discharge port, and a portion of the second micro-channel between the second supply port and the junction. A third pressurizing chamber formed on the substrate as described above, a third diaphragm disposed on the third pressurizing chamber, and a third piezoelectric element that vibrates the third diaphragm, When the liquid sent from the upstream of the first microchannel is discharged from the outlet, the third piezoelectric element is driven, and the liquid sent from the upstream of the first microchannel is discharged from the outlet. The third piezoelectric element is not driven when discharging.

  Thus, by driving the third piezoelectric element, it is possible to forcibly guide the sample fed from the upstream side of the first microchannel to the discharge port, and to arrange the position of the third pressurizing chamber. The restriction of being downstream of the branch point of the first microchannel can be eliminated. For this reason, it is possible to discharge the excess sample from the discharge port while preventing the sample fed from the upstream of the first microchannel from leaking out from the outlet, and from the upstream of the sample introduction microdevice. Even when the sample is intermittently supplied, it is possible to introduce the sample by the required amount at the required timing downstream of the sample introduction microdevice, and the selection range of the arrangement position of the third pressurizing chamber can be increased. It can be expanded and can be used for device designs of various shapes.

  As described above, according to the present invention, the surplus sample introduced into the sample introduction microdevice can be discharged from the discharge port, and the sample is intermittently supplied from the upstream of the sample introduction microdevice. Even in the case, the sample can be introduced downstream of the sample introduction microdevice by a necessary amount at a necessary timing.

Hereinafter, a sample introduction microdevice according to an embodiment of the present invention will be described with reference to the drawings.
1 (a) and 1 (b) are plan views showing the sample introduction microdevice according to the first embodiment of the present invention exploded in the layer direction, and FIG. 1 (c) is the first embodiment of the present invention. It is a top view which shows schematic structure of the sample introduction | transduction microdevice which concerns on a form.
In FIG. 1, the sample introduction microdevice is provided with a cover plate 16a and a substrate 17a, and the cover plate 16a is fixed on the substrate 17a. In addition, as a material of the cover plate 16a and the substrate 17a, for example, silicon, glass, plastic, stainless steel, or the like can be used.

  Here, a pressurizing chamber 1a is formed on the substrate 17a, and a micro channel 12a is formed on the inlet side of the pressurizing chamber 1a. Further, a nozzle-shaped channel 14a having a capillary effect is formed on the outlet side of the pressurizing chamber 1a via a micro-channel 13a, and a nozzle hole 15a is provided at the tip of the nozzle-shaped channel 14a. The interface between the liquid and the gas is formed at 15a. In addition, a micro channel 18a branched via a branch point 19a is connected to the micro channel 13a.

In addition, as a method of forming the pressurizing chamber 1a, the micro flow paths 12a and 18a, and the nozzle-shaped flow path 14a on the substrate 17a, for example, a photolithography technique and an etching technique can be used.
The lid plate 16a has a supply port 7a connected to one end of the microchannel 12a and a discharge port 20a connected to the tip of the microchannel 18a. The lid plate 16a is provided with a lid plate 16a on the lid plate 16a. A piezoelectric element 10a for driving as a vibration plate is disposed on the pressurizing chamber 1a.

Here, the discharge port 20a can discharge an excessive amount of sample introduced into the sample introduction microdevice, and the nozzle hole 15a can discharge a necessary amount of sample at a necessary timing.
Then, in order to prevent the sample from leaking from the nozzle hole 15a when the excess sample introduced into the sample introduction microdevice is discharged from the discharge port 20a, the microchannel 18a connected to the discharge port 20a. The channel resistance is preferably smaller than the channel resistance of the nozzle-shaped channel 14a connected to the nozzle hole 15a. Alternatively, the surface of the nozzle-shaped channel 14a may be provided with water repellency by performing fluorine processing or the like on the surface of the nozzle-shaped channel 14a.

Then, when the sample is supplied from the supply port 7a in a state where the operation of the piezoelectric element 10a is stopped, the sample is fed through the path of the microchannel 12a → the pressurizing chamber 1a → the microchannel 13a → the microchannel 18a, The excess sample introduced into the sample introduction microdevice is discharged from the discharge port 20a.
When the excess sample introduced into the sample introduction microdevice is discharged from the discharge port 20a, the piezoelectric element 10a is operated while supplying the sample from the supply port 7a. Then, a part or all of the sample is fed through the path of the microchannel 12a → the pressurizing chamber 1a → the microchannel 13a → the nozzle-shaped channel 14a, and the nozzle hole is utilized by utilizing the capillary force of the nozzle-shaped channel 14a. While supplying the sample to 15a, the sample can be pushed out from the nozzle hole 15a into a fine droplet.

Thereby, the surplus sample introduced into the sample introduction microdevice can be discharged from the discharge port 20a, and is necessary even when the sample is intermittently supplied from the supply port 7a of the sample introduction microdevice. It is possible to introduce a sample through the nozzle hole 15a by a necessary amount at the timing.
Note that a valve may be provided at the discharge port 20a in order to prevent the sample from being discharged from the discharge port 20a when the sample is discharged from the nozzle hole 15a. Here, as a method of providing a valve at the discharge port 20a, a valve may be connected to the discharge port 20a via a pipe, or a cover plate may be used without using a pipe that relays the discharge port 20a and the valve. A valve may be mounted on 16a, and the valve may be directly connected to the discharge port 20a.

  The valve can be opened when the sample is discharged from the discharge port 20a, and the valve can be closed when the sample is discharged from the nozzle hole 15a. This prevents the sample from being discharged from the discharge port 20a when the sample is discharged from the nozzle hole 15a even when the sample introduction microdevice is provided with the discharge port 20a for discharging excess liquid. The entire amount of the sample supplied from the supply port 7a can be discharged from the nozzle hole 15a. Moreover, dead volume can be reduced by connecting a valve | bulb directly to the discharge port 20a.

FIG. 2 is a plan view showing a schematic configuration of the sample introduction microdevice according to the second embodiment of the present invention.
In FIG. 2, the sample introduction microdevice is provided with a cover plate 16b and a substrate 17b, and the cover plate 16b is fixed on the substrate 17b.
Here, a pressurizing chamber 1b is formed on the substrate 17b, and a micro channel 12b is formed on the inlet side of the pressurizing chamber 1b. Further, a nozzle-shaped channel 14b having a capillary effect is formed on the outlet side of the pressurizing chamber 1b via a micro-channel 13b, and a nozzle hole 15b is provided at the tip of the nozzle-shaped channel 14b. In 15b, an interface between the liquid and the gas is formed. In addition, an S-shaped microchannel 18b branched via a branch point 19b is connected to the microchannel 13b, and a pressurizing chamber 21b is formed in a part of the microchannel 18b. Here, in the microchannel 18b, a diffuser 22b is formed on the inlet side of the pressurizing chamber 21b, and a diffuser 23b is formed on the outlet side of the pressurizing chamber 21b.

  The lid plate 16b is provided with a supply port 7b connected to one end of the microchannel 12b and a discharge port 20b connected to the tip of the microchannel 18b. The lid plate 16b is provided with a lid plate 16b on the lid plate 16b. The piezoelectric element 10b for driving as a vibration plate is disposed so as to be positioned on the pressurizing chamber 1b, and the piezoelectric element 24b for driving the cover plate 16b as a vibrating plate is positioned on the pressurizing chamber 21b. Is arranged.

Here, the discharge port 20b can discharge an excessive amount of sample introduced into the sample introduction microdevice, and the nozzle hole 15b can discharge a necessary amount of sample at a necessary timing.
When the sample is supplied from the supply port 7b while the operation of the piezoelectric element 10b is stopped and the piezoelectric element 24b is operated, the microchannel 12b → the pressurizing chamber 1b → the microchannel 13b → the microchannel 18b → the diffuser. The sample is fed through the path 22b → pressurizing chamber 21b → diffuser 23b → microchannel 18b → excess sample introduced into the sample introduction microdevice is discharged from the discharge port 20b.

  When the excess sample introduced into the sample introduction microdevice is discharged from the discharge port 20b, the piezoelectric element 10b is operated while supplying the sample from the supply port 7b, and the operation of the piezoelectric element 24b is stopped. Let Then, a part or all of the sample is fed through the path of the micro flow path 12b → the pressurizing chamber 1b → the micro flow path 13b → the nozzle-shaped flow path 14b, and the nozzle hole is utilized using the capillary force of the nozzle-shaped flow path 14b. While supplying the sample to 15b, the sample can be pushed out into a fine droplet form from the nozzle hole 15b.

  Thus, by driving the piezoelectric element 24b, it is possible to forcibly guide the sample fed from the upstream side of the microchannel 12b to the discharge port 20b, and by driving the piezoelectric element 10b, It is possible to forcibly guide the sample fed from the upstream of the flow path 12b to the nozzle hole 15b. For this reason, it is possible to discharge the excess sample from the discharge port 20b while preventing the sample fed from the upstream side of the microchannel 12b from leaking out of the nozzle hole 15b, and upstream of the sample introduction microdevice. Even when the sample is intermittently supplied from, the sample can be introduced downstream of the sample introduction microdevice at a necessary timing.

FIG. 3 is a plan view showing a schematic configuration of a sample introduction microdevice according to a third embodiment of the present invention.
In FIG. 3, the sample introduction microdevice is provided with a cover plate 16c and a substrate 17c, and the cover plate 16c is fixed on the substrate 17c.
Here, a pressurizing chamber 1c is formed on the substrate 17c, and a microchannel 12c is formed on the inlet side of the pressurizing chamber 1c. Further, a nozzle-shaped channel 14c having a capillary effect is formed on the outlet side of the pressurizing chamber 1c via a microchannel 13c, and a nozzle hole 15c is provided at the tip of the nozzle-shaped channel 14c. In 15c, an interface between the liquid and the gas is formed. In addition, an S-shaped microchannel 18c branched via a branch point 19c is connected to the microchannel 13c, and a pressurizing chamber 21c is formed in a part of the microchannel 18c. A nozzle-shaped channel 27c having a capillary effect is connected to the minute channel 18c. And the nozzle hole 25c is provided in the front-end | tip of the nozzle-shaped flow path 27c, and it is comprised so that the interface of a liquid and gas may be formed in the nozzle hole 25c.

In addition, a supply port 7c connected to one end of the microchannel 12c is formed in the cover plate 16c, and a piezoelectric element 10c for driving the cover plate 16c as a vibration plate is provided on the cover plate 16c as a pressurizing chamber. The piezoelectric element 24c for driving the lid plate 16c as a vibration plate is disposed so as to be positioned on the pressurizing chamber 21c.
Here, the nozzle hole 25c can discharge an excessive amount of sample introduced into the sample introduction microdevice, and the nozzle hole 15c can discharge a necessary amount of sample at a necessary timing.

  When the sample is supplied from the supply port 7c while the operation of the piezoelectric element 10c is stopped and the piezoelectric element 24c is operated, the microchannel 12c → the pressurizing chamber 1c → the microchannel 13c → the microchannel 18c → the additional channel. The sample is fed through the path of the pressure chamber 21c → nozzle-shaped channel 27c, and the excess sample introduced into the sample introduction microdevice is supplied to the nozzle hole 25c using the capillary force of the nozzle-shaped channel 27c. While being discharged from the nozzle hole 25c.

  When the excess sample introduced into the sample introduction microdevice is discharged from the nozzle hole 25c, the piezoelectric element 10c is operated while supplying the sample from the supply port 7c, and the operation of the piezoelectric element 24c is stopped. Let Then, a part or all of the sample is fed through the path of the microchannel 12c → the pressurizing chamber 1c → the microchannel 13c → the nozzle-shaped channel 14c, and the nozzle hole is utilized by utilizing the capillary force of the nozzle-shaped channel 14c. While supplying the sample to 15c, the sample can be pushed out from the nozzle hole 15c into a fine droplet.

  Thus, by driving the piezoelectric element 24c, it is possible to forcibly guide the sample fed from the upstream side of the micro flow path 12c to the nozzle hole 15c, and by driving the piezoelectric element 10c, It is possible to forcibly guide the sample fed from the upstream of the flow path 12c to the nozzle hole 15c. For this reason, it is possible to discharge the excess sample from the nozzle hole 25c while preventing the sample fed from the upstream of the microchannel 12c from leaking out from the nozzle hole 15c, and upstream of the sample introduction microdevice. Even when the sample is intermittently supplied from, the sample can be introduced downstream of the sample introduction microdevice at a necessary timing.

FIG. 4 is a plan view showing a schematic configuration of a sample introduction microdevice according to a fourth embodiment of the present invention.
In FIG. 4, the sample introduction microdevice is provided with a cover plate 16d and a substrate 17d, and the cover plate 16d is fixed on the substrate 17d.
Here, a pressurizing chamber 1d is formed on the substrate 17d, and a micro channel 12d is formed on the inlet side of the pressurizing chamber 1d. Further, a nozzle-shaped channel 14d having a capillary effect is formed on the outlet side of the pressurizing chamber 1d via a microchannel 13d, and a nozzle hole 15d is provided at the tip of the nozzle-shaped channel 14d. In 15d, an interface between the liquid and the gas is formed.

In addition, a pressurizing chamber 30d is formed on the substrate 17d, and a minute channel 29d is formed on the inlet side of the pressurizing chamber 30d. Further, a nozzle-shaped channel 32d having a capillary effect is formed on the outlet side of the pressurizing chamber 30d via a microchannel 31d, and a nozzle hole 33d is provided at the tip of the nozzle-shaped channel 32d. In 33d, it is comprised so that the interface of a liquid and gas may be formed.
Further, the minute flow path 18d branched via the branch point 19d is connected to the minute flow path 13d, and the minute flow path 18d is connected to the middle of the nozzle-shaped flow path 32d via the branch point 34d.

The lid plate 16d has a supply port 7d connected to one end of the microchannel 12d and a supply port 28d connected to one end of the microchannel 29d. The lid plate 16d is placed on the lid plate 16d. The piezoelectric element 10d for driving as a vibration plate is disposed on the pressurizing chamber 1d, and the piezoelectric element 35d for driving the lid plate 16d as a vibration plate is positioned on the pressurizing chamber 30d. Is arranged.
Here, the nozzle hole 33d can discharge an excessive amount of sample introduced into the sample introduction microdevice, and the nozzle hole 15d can discharge a necessary amount of sample at a necessary timing. The supply port 7d can be used to introduce a sample into the sample introduction microdevice, and the supply port 28d serves as a priming water for discharging the excess sample introduced into the sample introduction microdevice. Can be used to introduce liquid.

  Then, when the operation of the piezoelectric element 10d is stopped and the sample is supplied from the supply port 7d while the piezoelectric element 35d is operated, and the liquid serving as the priming water is supplied from the supply port 28d, the microchannel 12d → the pressurizing chamber The sample is fed through the path 1d → microchannel 13d → microchannel 18d → pressurization chamber 30d → nozzle-shaped channel 32d, and microchannel 29d → pressurization chamber 30d → microchannel 31d → nozzle shape. While a liquid serving as priming water is sent through the channel 32d, the excess sample introduced into the sample introduction microdevice is supplied to the nozzle hole 33d using the capillary force of the nozzle-shaped channel 32d. It is discharged from the hole 33d.

  When the excess sample introduced into the sample introduction microdevice is discharged from the nozzle hole 33d, the piezoelectric element 10d is operated while supplying the sample from the supply port 7d, and the operation of the piezoelectric element 35d is stopped. Let Then, a part or all of the sample is fed through the path of the microchannel 12d → the pressurizing chamber 1d → the microchannel 13d → the nozzle-shaped channel 14d, and the nozzle hole is utilized by utilizing the capillary force of the nozzle-shaped channel 14d. While supplying the sample to 15d, the sample can be pushed out from the nozzle hole 15d into a fine droplet.

  Thus, by driving the piezoelectric element 35d, it is possible to forcibly guide the sample fed from the upstream side of the micro flow channel 12d to the discharge port, and the position of the pressurizing chamber 30d is set to the micro flow channel. The restriction of being downstream of the branch point 19d of 13d can be eliminated. For this reason, it is possible to discharge the excess sample from the nozzle hole 33d while preventing the sample fed from the upstream of the microchannel 12d from leaking out from the nozzle hole 15d, and upstream of the sample introduction microdevice. Even when the sample is intermittently supplied from the sample, it is possible to introduce the sample by the required amount at the required timing downstream of the sample introduction microdevice, and the selection range of the arrangement position of the pressurizing chamber 30d can be set. It can be expanded and can be used for device designs of various shapes.

1 (a) and 1 (b) are plan views showing the sample introduction microdevice according to the first embodiment of the present invention exploded in the layer direction, and FIG. 1 (c) is the first embodiment of the present invention. It is a top view which shows schematic structure of the sample introduction | transduction microdevice which concerns on a form. It is a top view which shows schematic structure of the sample introduction microdevice which concerns on 2nd Embodiment of this invention. It is a top view which shows schematic structure of the sample introduction microdevice which concerns on 3rd Embodiment of this invention. It is a top view which shows schematic structure of the sample introduction microdevice which concerns on 4th Embodiment of this invention. FIG. 5A is a plan view showing a schematic configuration of a sample introduction microdevice having the form of a conventional diffuser type micropump, and FIG. 5B shows the sample introduction microdevice of FIG. It is sectional drawing cut | disconnected and shown by the A 'line. 6A is a plan view showing a schematic configuration of a conventional sample introduction microdevice having a dispenser type configuration, and FIG. 6B is a cross-sectional view of the sample introduction microdevice of FIG. It is sectional drawing cut | disconnected and shown by.

Explanation of symbols

1a, 1b, 21b, 1c, 21c, 1d, 30d Pressurizing chamber 7a, 7b, 7c, 7d, 28d Supply port 10a, 10b, 24b, 10c, 24c, 10d, 35d Piezoelectric elements 12a, 13a, 18a, 12b, 13b, 18b, 22b, 23b, 12c, 13c, 18c, 26c, 12d, 13d, 18d, 29d, 31d Microchannel 14a, 14b, 14c, 14d, 27c, 32d Nozzle-shaped channel 15a, 15b, 15c, 15d , 25c, 33d Nozzle hole 16a, 16b, 16c, 16d Cover plate 17a, 17b, 17c, 17d Substrate 19a, 19b, 19c, 19d Branch point 20a, 20b Outlet port 22b, 23b Diffuser 34d Junction point

Claims (8)

A first supply port for supplying a liquid;
A first microchannel having a branch point formed on the substrate so as to transport the liquid supplied from the first supply port;
An outlet port connected to one of the branch destinations of the first microchannel and capable of discharging a required amount of liquid at a required timing;
A sample introduction microdevice comprising: a discharge port for discharging an excessive amount of liquid connected to the other branch destination of the first microchannel.   A flow path resistance of the branching first microchannel connected to the outlet is smaller than a channel resistance of the branching first microchannel connected to the outlet. The sample introduction microdevice according to claim 1. A first pressurizing chamber formed in the substrate so as to be disposed in a part of the first microchannel upstream of the branch point;
A first diaphragm disposed on the first pressurizing chamber;
The sample introduction microdevice according to claim 1, further comprising a first piezoelectric element that vibrates the first diaphragm. When not driving the first piezoelectric element, the liquid sent from the upstream of the first microchannel is discharged from the discharge port,
4. The sample introduction microdevice according to claim 3, wherein when the first piezoelectric element is driven, a liquid fed from an upstream side of the first microchannel is discharged from the outflow port. The outlet is a nozzle hole configured to form an interface between liquid and gas,
5. The branching first microchannel connected to the outlet is a nozzle-shaped channel having a capillary effect connected to the nozzle hole. The sample introduction microdevice as described.   6. The valve according to claim 1, further comprising a valve connected to the discharge port, wherein the valve is closed when the liquid fed from the upstream of the first microchannel is discharged from the outlet. 2. The sample introduction microdevice according to claim 1. A second pressurizing chamber formed in the substrate so as to be disposed in a part of the first microchannel between the branch point and the discharge port;
A second diaphragm disposed on the second pressurizing chamber;
A second piezoelectric element that vibrates the second diaphragm,
When the liquid sent from the upstream of the first microchannel is discharged from the discharge port, the second piezoelectric element is driven,
The sample introduction micro of any one of claims 1 to 6, wherein the second piezoelectric element is not driven when the liquid sent from the upstream of the first microchannel is discharged from the outlet. device. A second supply port for supplying a liquid;
A second microchannel formed on the substrate to transport the liquid supplied from the second supply port and having a junction between the branch point and the discharge port of the first microchannel;
A third pressurizing chamber formed in the substrate so as to be disposed in a part of the second microchannel between the second supply port and the junction;
A third diaphragm disposed on the third pressurizing chamber;
A third piezoelectric element that vibrates the third diaphragm,
When the liquid sent from the upstream of the first microchannel is discharged from the discharge port, the third piezoelectric element is driven,
The sample introduction micro of any one of claims 1 to 7, wherein the third piezoelectric element is not driven when the liquid sent from the upstream of the first microchannel is discharged from the outlet. device.

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