JP2006283965A - Fluid control structure of micro flow passage, blocking member, microchip, manufacturing method for microchip, device applying fluid control structure, and blocking member operation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid control structure of a micro flow passage having no restriction on a substrate material of a microchip and capable of blocking the flow passage securely to ensure pressure proof property and to provide a blocking member, the microchip, various application devices, and a blocking member operation device. <P>SOLUTION: This structure is constituted by pushing a valve 30 into a hole 20 of the microchip 1 to block the flow passage FA, a movable part for blocking the flow passage FA is the valve 30 itself, and there is no necessity for blocking the flow passage FA by deforming substrates 11, 12. For this reason, even a hard material can be used in the substrates 11, 12 of the microchip 1 to improve reliability and general-purpose property greatly. Since an elastic member 32 comes into close contact with a peripheral fringe 21 of the hole 20 and an end part 142 of a channel 14 due to elastic deformation, the flow passage FA is securely blocked to ensure pressure proof property. The operation device provided with a pressing means of the valve 30 arranged in the microchip 1 is also provided. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a fluid control structure of a microchannel, a closing member, a microchip, a manufacturing method of a microchip, a device to which the fluid control structure is applied, and a closing member operating device.

In recent years, research on high-efficiency reactions in microspaces using microchips has been underway, and many applied researches and developments such as chemical analysis and environmental analysis have been conducted based on this research.
In research using these microchips, it is necessary to appropriately control the flow velocity and fluid pressure of the fluid in the microchip.
Here, the flow path of the microchip is formed by, for example, forming a groove on one substrate and overlaying the plate surface of the other substrate on this groove. In order to control the fluid in this flow path There is a method in which a substrate formed of a soft material is pressed from the outside to close the flow path (see Patent Document 1 and Patent Document 2). Specifically, in Patent Document 1, a channel groove is formed in a substrate made of a soft material such as silicone rubber or nitrile rubber, and a void formed in a circular shape larger than the groove width is formed in the middle of the groove. The valve function is realized by pressing the part through another substrate superimposed on the substrate and changing the cross-sectional area of the gap. In Patent Document 2, a flow path is formed between two thin plates (pouches) made of a flexible malleable polymer material such as polyimide and polyethylene, and a blade protruding toward the flow path is formed on the thin plate. A holding valve housing is provided, and the flow path is closed by pressing the thin plate by advancing and retracting the blade with an actuator.

Further, as another method for closing the flow path, a diaphragm sheet is interposed between one substrate on which a groove is formed and the other substrate overlapped with this substrate, and from a hole formed on the other substrate. In some cases, the flow path is closed by introducing air pressure into the diaphragm sheet to deform the diaphragm sheet (see Patent Document 3 and Patent Document 4).
In Patent Document 4, the structure in which the diaphragm is interposed between the substrates is used not only as a valve for adjusting the fluid pressure and the flow velocity but also as a pump for sending out the fluid.

In application research such as chemical analysis and environmental analysis, it is desired to reduce the size and increase the accuracy of the analyzer by using a microchip with integrated devices. The microchip used in each study has different channel shapes and fluid control methods depending on the application. Currently, research on devices for integration on a microchip is underway, but there are few useful devices for integration. Therefore, the technology for manipulating microchips with integrated devices is a subject for future research.
As an apparatus for operating the microchip, there is proposed an apparatus that has a fluid device divided into two or more in the operation device, and makes them a single fluid device to control the fluid flowing through the microchip. (Patent Document 5).

JP 2002-219697 A ([0035], [0042] to [0044], FIGS. 1 and 2) Japanese translation of PCT publication No. 2000-508058 (FIGS. 1 and 2) JP 2003-275999 A ([0050] to [0053], FIG. 1) JP 2003-136500 A ([0108], [0134] to [0146], FIG. 12) Japanese translation of PCT publication No. 2003-502655 (FIG. 4)

However, in the valve structures in Patent Document 1 and Patent Document 2, the substrate material is limited to a soft material that is usually low in corrosion resistance. That is, since a hard material having high corrosion resistance such as glass and ceramic cannot be used for the substrate, there is a problem that a sample to be analyzed is limited and there is no versatility.
On the other hand, in the valves and pump structures of Patent Document 3 and Patent Document 4, a hard material can be used for the substrate, but the load when the pressure in the flow path becomes high is concentrated on the diaphragm, so there is a problem with pressure resistance. In addition, since the diaphragm sheet absorbs the projection light from the analyzer or the like, the sensitivity of the analysis may be reduced.
Thus, conventionally, there is no useful valve or pump for closing the flow path inside the microchip formed of a substrate material such as glass, and its realization has been strongly desired.
Moreover, although the structure of patent document 5 controls the fluid which flows into a microchip by making the fluid device divided | segmented into two or more into the operating device into a pair, the components embedded in the microchip and the components in the operating device are divided. It is not intended to operate as a pair.

In view of the above, the object of the present invention is to provide a microfluidic fluid control structure, a clogging member, a microchip, and a microchip that have no restrictions on the substrate material of the microchip and that can reliably block the flow path to ensure pressure resistance. Manufacturing method, and various apparatuses applying such a fluid control structure,
Is to provide.

  It is a second object of the present invention to provide an operating device for a closing member that can easily control various types of integrated microchips with a single device.

The fluid control structure for a micro flow path of the present invention includes a micro chip having a flow path formed therein and a hole communicating with the flow path, and a closing member that is inserted into the hole and closes the flow path. The closing member includes an elastic member at least partially.
The microchannel formed in the microchip is formed between the inner peripheral surface of the groove and the plate surface of the other substrate, for example, by superimposing the other substrate on one substrate on which the groove is formed. be able to. In this case, the hole is formed so as to penetrate the other substrate.

In this invention, the closing member is structured to close the flow path through the hole of the microchip, and the movable part for closing the flow path is the closing member itself, and the substrate is deformed to close the flow path. There is no need to do. For this reason, not only soft materials but also hard materials can be used for the substrate of the microchip, and any substrate material can be selected according to the fluid components, etc., greatly improving the reliability and versatility of the microchip. Can do. Regarding the manufacture of the closing member, it may be manufactured in the shape of a hexahedron or a cylinder according to the shape of the hole of the microchip, and the structure can be extremely simplified.
In addition, the microchip only needs to have a hole communicating with the flow path, and except for the case where a pump chamber or the like is formed, the flow path is closed as in the case where the flow path is closed by deforming the substrate. Since it is not necessary to provide a gap (fluid reservoir) or the like just for the purpose, the structure of the microchip can be simplified and the dead volume can be reduced.
Furthermore, unlike a structure in which the flow path is blocked by a thin film member sandwiched between substrates, the microchip has no elastic member other than the portion where the blocking member is disposed, so the light absorption rate can be reduced and optical analysis can be performed. It is possible to prevent a decrease in sensitivity.

Here, the elastic member is provided in a portion on the flow channel side of the closing member or a portion facing the inner peripheral surface of the hole, and is in close contact with the peripheral edge of the hole and the wall portion of the flow channel by elastic deformation, so that the flow channel is surely secured. It is blocked and pressure resistance can be secured. Even when the elastic member is not shaped to protrude toward the flow path, if the elastic member is pushed toward the back of the hole, the elastic member deforms following the shape of the flow path, so the entire depth of the flow path is reduced. The flow path can be narrowed (partially closed) and the flow of the fluid can be narrowed by adjusting either the pushing amount or the pushing force.
As the thickness of the elastic member (the dimension in the axial direction of the hole) is increased, the amount of blockage due to elastic deformation can be increased, and the block can be closed even if the cross-sectional area (depth / width) of the flow path is large.
As the material of the elastic member, fluorine rubber, silicone rubber, nitrile rubber, chloroprene rubber, urethane, or the like can be used.

In the microchannel fluid control structure of the present invention, the microchip is preferably formed of a hard material.
Here, as the hard material, glass (including quartz glass; the same shall apply hereinafter), sapphire, plastic, silicon (silicon), ceramics such as aluminum oxide and aluminum nitride, or metals such as stainless steel can be used. Because it is hard, it has good handling properties, and since many hard materials have high corrosion resistance such as glass, sapphire, and ceramic, reliability and versatility can be improved by selecting high corrosion resistance materials. it can.
Further, according to the present invention, the microchip does not bend even when the pressure in the flow path becomes high, and the blocking member is reliably held on the inner peripheral surface of the hole, so that the pressure resistance can be improved.

In the micro-channel fluid control structure of the present invention, it is preferable that a member main body provided with the elastic member is provided, and the member main body is formed of a hard material.
Here, as the hard material of the member main body, glass, sapphire, plastic, silicon, ceramics such as aluminum oxide and aluminum nitride, or metal such as stainless steel can be used in the same manner as the hard material used for the microchip. .
An elastic member is provided by a method such as coating or pasting on at least one of the surface of the member main body on the flow path side and the inner peripheral surface of the hole.

According to the present invention, when the blocking member is pushed into the hole to close the flow path, the displacement when the blocking member is pushed into the hole is accurately transmitted to the elastic member via the member body that is a hard member. It becomes easy to control the amount of elastic deformation of the elastic member. In addition, regardless of whether or not the closing member is pushed into the hole, the member body that is a hard member is hardly deformed by the fluid pressure in the flow path, and the closing member is pushed into the hole and protrudes into the flow path. The flow path can be reliably closed with a corresponding opening / closing amount. Therefore, when the channel is partially blocked, the opening / closing amount can be easily adjusted.
Furthermore, reliability and versatility can be improved by using a hard material with high corrosion resistance for the member body.

In the microfluidic fluid control structure of the present invention, the elastic member is provided on a surface of the member main body on the flow path side, and the elastic member and the member main body have uniform thicknesses in the axial direction of the holes. Is preferably provided.
According to the present invention, since the elastic member and the member main body are provided with uniform thicknesses, a stable closing amount can be realized when adjusting the flow rate or the like. In addition, when the blocking member is disposed in a state that does not block the flow path, the flow of the elastic member on the flow path side can be prevented from being deformed so as to wave, so that the fluid flow is not hindered.

In the microfluidic fluid control structure of the present invention, it is preferable that the elastic member is provided on a flow path side surface of the member body, and the elastic member has a flat surface on the flow path side.
According to the present invention, the flat elastic member is in close contact with the peripheral edge of the hole and the wall of the flow path without any gap, and the dead volume can be reduced. As a result, bubbles are not generated in the portion where the closing member is disposed, and the flow of fluid is not affected, and the amount of liquid does not come. Further, since no bubbles are generated, the liquid feeding pressure is stabilized and the flow of the fluid is not affected.
Further, it is possible to avoid the problem that the sample remains in the portion where the closing member is disposed and the cleanliness of the microchip cannot be ensured.

In the microfluidic fluid control structure of the present invention, it is preferable that the elastic member has a weir portion protruding from the surface into the channel.
According to this invention, since the dam portion is disposed in the flow path and can be surely closed, the configuration can be suitably used as a safety valve. The magnitude of the predetermined pressure at which the safety valve functions is determined by the size of the weir and the fit between the closing member and the flow path. In addition, by forming the dam portion corresponding to the shape of the flow path in a part of the elastic member in this way, it is possible to easily make the closure member as compared with the case where the entire blocking member is made to be as small as the width dimension of the flow path.
In addition, as a method for forming the weir portion, fine processing in a semiconductor manufacturing process can be used.

In the microchannel fluid control structure of the present invention, it is preferable that the diameter of the hole is larger than the width of the channel.
According to this invention, the blocking member inserted in the hole is supported by the widthwise end of the flow channel inside the hole, and the flow channel wall surface and the surface of the blocking member are substantially the same without applying an external force to the blocking member. Can be aligned on the surface. Thereby, it is possible to prevent the blocking member from affecting the flow of the fluid in a state where the flow path is not blocked.

In the microfluidic fluid control structure of the present invention, it is preferable that a filler having ductility and elasticity is interposed between the inner peripheral surface of the hole and the closing member.
Here, examples of the filler having ductility and elasticity include silicone-based fillers, adhesives and sealants made of fluorine rubber, nitrile rubber, chloroprene rubber, urethane, and the like. It is possible to fix the closing member in the hole of the microchip by interposing the filler.
According to the present invention, the moderate viscosity of the filler can prevent the filler from flowing into the flow path at the time of insertion, and after the filler is cured, the filler is elastic due to its ductility and elasticity. Since it follows the member, the elastic deformation of the elastic member is not hindered.
In addition, the viscosity of the filler at the time of insertion has the favorable range of 1000-100000 cp.

In the microchannel fluid control structure of the present invention, the closing member is pushed toward the channel from the hole, and the flow rate of fluid in the channel is adjusted by adjusting either the pushing amount or the pushing force. Preferably either the fluid pressure and the fluid flow rate are adjusted.
According to the present invention, the fluid flow can be controlled by the force and the amount of pushing the closing member into the hole, so that the fluid operation at an appropriate position can be performed. As control of the fluid, in addition to controlling the fluctuation of the state quantity of the fluid, there is a case of controlling to an arbitrary state quantity according to a predetermined pressure and a predetermined flow rate. Note that a plurality of closing members can be arranged on the microchip.

In the microchannel fluid control structure of the present invention, it is preferable that the elastic member is formed of a highly corrosion-resistant material.
According to the present invention, there is no problem even when the elastic member is exposed to a corrosive fluid, and the reliability and versatility can be improved.
An example of the highly corrosion-resistant material used for the elastic member is fluororubber.

In the microchannel fluid control structure of the present invention, it is preferable that the elastic member is subjected to a hydrophilic treatment.
According to the present invention, the surface of the elastic member affects the flow of the liquid fluid by subjecting the elastic member to a hydrophilic treatment according to the hydrophilic microchip substrate material such as glass. Can be prevented, and fluid control can be performed appropriately.
As the hydrophilic treatment, chemical treatment such as sodium hydroxide immersion treatment, immersion treatment with sodium and naphthalene complex, and physical treatment such as ultraviolet treatment and plasma treatment are effective.

In the microchannel fluid control structure of the present invention, it is preferable that the elastic member is subjected to water repellent treatment.
According to this invention, since it is possible to prevent the liquid fluid from entering the portion where the flow path is blocked by the elastic member, the flow path can be reliably closed.
Note that oil repellency can also be realized by the water repellency treatment. Examples of the water / oil repellency treatment include a coating treatment using a compound having an Rf (perfluoroalkyl) group.

In the microfluidic fluid control structure of the present invention, it is preferable that the member main body is configured as a sensor that detects a load when the closing member is pushed.
According to the present invention, since the load when the closing member is pushed in is detected by sensing the force or displacement applied to the member main body due to the elastic deformation of the elastic member, based on the detected value. Thus, the pushing force and pushing amount of the closing member can be adjusted, and the closing amount of the flow path can be accurately controlled.
In addition, as a structure of a pressure sensor, you may provide the diaphragm contact | abutted to an elastic member, and the holding body holding this diaphragm, for example.

In the microfluidic fluid control structure of the present invention, it is preferable that at least one of the elastic member and the filler is formed of a gas permeable material.
According to the present invention, it is possible to realize an air vent structure in which the gas contained in the liquid fluid or the bubbles accumulated in the disposing portion of the closing member are discharged to the outside through the elastic member and the filler due to the increase of the fluid pressure. Thereby, the fluid pressure is constant and turbulent flow is prevented, so that stable liquid feeding is possible.
Examples of the gas permeable material include silicone.

In the microfluidic fluid control structure of the present invention, it is preferable that the closing member is provided so as to be able to advance and retreat with respect to the flow path so as to close the flow path to constitute a valve.
Here, regardless of the type of valve (valve), a fully closed state in which the flow path is blocked over the entire depth, and a fully open state in which the surface of the elastic member is held at a position where it does not protrude from the inner wall surface of the flow path. It is also possible to use an ON / OFF valve that can be switched between these two states, or an adjustment valve whose opening / closing amount changes by adjusting either the amount of pushing into the hole or the pushing force.
In addition, the valve may be a safety valve that opens when the fluid pressure in the flow path exceeds a predetermined amount, which can cope with an unexpected excessive pressure in the flow path and improve reliability. be able to.

In the microfluidic fluid control structure of the present invention, it is preferable that a plurality of the valves are arranged, and that the closing members constituting these valves are sequentially advanced and retracted to constitute a pump.
According to the present invention, when each closing member is pushed into the hole sequentially from the end and is repeatedly advanced and retracted with respect to the flow path, the fluid is pumped according to the pushing amount of each closing member, thereby realizing a pump function. it can.
The number of blocking members is preferably 3 or more, more preferably 4 or more, and the size of each blocking member may be different from each other.
Further, in the flow path, a portion where the pump is provided may be expanded in diameter to constitute a pump chamber.

  The closing member for a micro flow path of the present invention is a closing part that closes the flow path by being inserted into a hole communicating with the flow path of the microchip in which the flow path is formed. A member is provided.

  According to this invention, as described above, the flow path is reliably closed by the elastic deformation of the elastic member, and the pressure resistance can be ensured. In addition, since the substrate material can be arbitrarily selected according to the fluid component and the like, the reliability and versatility of the microchip can be greatly improved. Further, the structure of the microchip can be simplified and the dead volume can be reduced.

The microchip of the present invention is used for the above-described fluid control structure.
According to the present invention, it is possible to enjoy the same operations and effects as those of the fluid control structure described above.
Here, the structure of the microchip is necessary because the microfluidic device such as the aforementioned valve, pump, sensor, ID tag for microchip recognition, etc. can be incorporated into the hole formed in the microchip. A simple structure in which a necessary number of holes are formed at various locations, and a structure that is not influenced by a high-temperature process in microchip fabrication can be obtained. Therefore, a microchip on which a multifunctional microfluidic device is mounted can be provided at low cost.
In addition, the formation of the microchip holes and the arrangement of the blocking members in the holes are easy, and more blocking members can be integrated and incorporated in a predetermined range of the microchip. It can also cope with the trend of computerization.
In addition, the microchip of the present invention can be used in the field of analysis and synthesis for high-efficiency reaction of a minute volume of fluid, and the practical use of an apparatus using the microchip can be promoted.

  The fluid controllable microchip manufacturing method of the present invention includes a plurality of resin substrates that are stacked on each other, and is formed to be recessed from the plate surface of one of the substrates and the plate surface of the other substrate. A microchip formed with a hole formed through the other substrate toward the groove, and an elastic member at least partially, and inserted into the hole to form the flow path. A fluid-controllable microchip integrated with a closing member that closes the substrate, wherein a filler having ductility and elasticity is placed in the hole while the plate surface of the other substrate is disposed on a plane. After interposing between the inner peripheral surface of the substrate and the closing member inserted into the hole, the substrates are overlapped and joined to each other.

Here, as the filler, the adhesive or sealant as described above can be adopted, and by this filler, the closing member is fixed to the hole of the substrate, and the elasticity of the elastic member is obtained by the ductility and elasticity of the filler. Deformation is supported. In interposing such a filler, it is necessary to prevent the filler from adhering to the substrate plate surface, to keep the substrate plate surface constituting the wall surface of the flow path smooth, and to prevent adverse effects on the fluid. .
According to the present invention, since the bonding temperature can be lowered in the resin substrate than in the case where the glass substrate is used, the closing member can be disposed on the substrate before the substrates are bonded to each other. When filling the space between the inner peripheral surface of the hole and the closing member, one of the substrates can be arranged on a plane. In the substrate with the plate surface arranged on a flat surface, the filler filled between the inner peripheral surface of the hole and the closing member wraps around the plate surface of the substrate when the peripheral edge of the hole contacts the flat surface. Can prevent adhesion.
As described above, the blocking member is disposed on the substrate before the substrates are joined, and the filler can be easily prevented from adhering to the plate surface side of the substrate simply by arranging the substrate on a plane. In addition, since a resin substrate having a low bonding temperature is employed, the reliability does not decrease due to deterioration of the elastic member at the time of substrate bonding. From these things, manufacturing efficiency can also be improved.
In addition, as a simple method of setting the plate surface of the substrate in a flat state, for example, there is a method of attaching a peelable sheet member to the plate surface of the substrate, and the sheet member is brought into close contact with the periphery of the hole. Can be preferably used. The plane on which the substrate is arranged may be a plate-like member or a support base.

  A switching device according to the present invention includes the above-described fluid control structure of a micro flow path, and the flow path includes a plurality of introduction paths that extend respectively, and predetermined paths to which these introduction paths are respectively connected. The valve is provided at each connection portion of the introduction path to the predetermined path, and the route of the fluid from the introduction path can be switched by opening and closing these valves.

  According to this invention, the flow of the fluid from the introduction path to the predetermined path is regulated by opening and closing each valve, and it is possible to select which introduction path the fluid is guided to the predetermined path. Accordingly, a switching device that can switch the flow of the fluid can be realized.

  The switching device of the present invention includes the above-described microchannel fluid control structure, and the channel includes a predetermined path and a plurality of branch paths that extend so that the predetermined path branches. The valves are respectively provided at portions of the branch path branched from the predetermined path, and the path of the fluid to the branch path can be switched by opening and closing these valves.

  According to the present invention, it is possible to select which branch path the fluid in a predetermined path is discharged by opening and closing each valve, and it is possible to realize a switching device that can switch the flow of the fluid as necessary.

  The mixer according to the present invention includes the above-described fluid control structure of the micro-channel, and at least three of the valves are arranged side by side and are blocked by the valves respectively arranged on both ends of these valves. A path is partitioned, and the components in the fluid are mixed by the closing member constituting the remaining valve moving forward and backward with respect to the partitioned flow path.

  According to this invention, the mixer which mixes the component of the fluid by accumulating the fluid between the closing members on both ends among the plurality of closing members and moving the closing member disposed between these closing members forward and backward is provided. realizable. In such a mixer, different types of fluids can be introduced, respectively, and can be provided at the junction of the introduction path.

  The injector of the present invention includes the above-described fluid control structure, and the flow path includes a first path and a second path that extends along a direction intersecting the first path and is connected to the first path. The second path has an inlet for fluid injected into a connection part with the first path on one end side, and the valve is connected to the first path in the vicinity of the connection part. Provided on the upstream side and the downstream side of the part and the second path.

  According to this invention, after flowing the fluid through the first path, the valves provided at the front stage and the rear stage of the connecting portion are closed, and the valves provided at the second path are opened at a predetermined timing, thereby It becomes possible to inject the reagent or the like introduced through the second path locally and in a timely manner into the fluid in the path. Then, the valve provided in the second path is closed again, and each valve provided in the first path is opened, so that the fluid flowing through the first path can be analyzed. It is also possible to perform chromatography by trying different fluid flow rates, fluid pressures, and fluid flow rates.

The closing member operating device of the present invention includes the above-described fluid control structure, and the microchip has a plurality of the holes, and each of the closing members inserted into the holes is operated. A plurality of units that operate integrally with each of the closing members, a board that holds the units detachably,
And a board placement section on which the board is detachably placed.

According to the present invention, the closing member can be integrated and arranged on the microchip, and each closing member operates integrally with the unit, so that a high degree of fluid control is possible. The operation device enables complicated analysis using a microchip equipped with more reaction systems, and simultaneous analysis of multiple items.
In addition, even if the unit is detachable from the board and the closing parts arranged on the microchip have the same structure, the operation of the closing part provided on the microchip can be performed by replacing the unit with a different structure. Can change.

  In the closing member operating device according to the present invention, it is preferable that the board placement portion has a guide portion that guides the board to a predetermined position where the unit faces the closing member.

  According to the present invention, since the board is held and guided by the board placement unit and can be detached from the operation device, various microchips, that is, the outer shape, the flow path pattern, the type of analysis, and the blocking member to be arranged. Depending on the type, position, etc., it can be quickly replaced with an appropriate one.

  In the closing member operating device according to the present invention, it is preferable that the board is provided with an advancing / retreating means capable of advancing / retreating the board with respect to the microchip.

  According to the present invention, when the microchip is inserted into the slot of the operating device by the advance / retreat operation of the board in the operating device, the blocking member mounted on the microchip does not interfere with the board side unit. As a result, a used microchip can be quickly replaced with a new one, and it is possible to prevent obstruction parts and units from being damaged when the microchip is set in the operating device.

In the closing member operating device of the present invention, it is preferable that the unit includes a pressing unit that presses the closing member from the hole toward the flow path.
Here, it is preferable that the pressing unit includes a drive source, and the drive source is any one of a piezoelectric actuator and a stepping motor.

  According to the present invention, the closing member can be pushed toward the microchip flow path by the piezoelectric actuator or the stepping motor, and an on / off valve, a safety valve, a flow control valve, and the like can be realized.

  In the closing member operating device of the present invention, it is preferable that the pressing means is provided with a sensor for measuring either the pressing force or the pressing amount to the closing member.

According to the present invention, the pressing force and the pressing amount can be appropriately adjusted based on the detection value by the sensor, so that a valve capable of adjusting the flow rate, the fluid pressure, the flow velocity, etc. can be easily realized.
In addition, such sensing can prevent the blocking member from being damaged by an excessive pressing force or pressing amount against the blocking member.

  In the closing member operating device according to the present invention, the pressing means urges the pressing member toward the closing member along the axial direction of the rod-shaped member, and a pressing member that penetrates the board and contacts the closing member. It is preferable to have a spring.

  According to the present invention, when the closing member is pressed by the pressing portion, the pressing portion is urged by the spring and moves backward with respect to the closing member. Therefore, when the board advances, the pressing portion collides with the closing member and closes. It is possible to prevent the member from being damaged.

  Moreover, since the pressing portion is pressed against the closing member by the spring, the closing member can be used as a safety valve. Here, in the case of a safety valve, control such as turning on / off or arbitrarily adjusting the pressing force is unnecessary, and thus the structure can be simplified by using the spring in this way. By replacing this spring with another spring having a different spring coefficient, the pressing force of the closing member can be changed.

  In the closing member operating device of the present invention, the pressing means is an eccentric rotating body in which the distance from the shaft portion to the outer peripheral portion is not constant, and is provided so that the outer peripheral portion is along the direction from the hole toward the flow path. It is preferred that

According to this invention, since the closing member can be intermittently pressed at a predetermined cycle with a simple configuration using an eccentric rotating body such as a cam, intermittent plug flow is realized in the flow of fluid in the flow path. it can. By such a plug flow, the fluids are easily mixed with each other, and the fluids can be easily synthesized.
In addition, the period which presses a closure member is controllable by adjusting the shape of a cam, a rotational speed, etc.
On the other hand, it is also possible to stop the rotation of the eccentric rotator and maintain the pressure of the closing member to maintain the fluid flow at a predetermined fluid pressure, flow velocity and flow rate, that is, only change the operation of the eccentric rotator. Thus, it can easily cope with various uses of the closing member.
Here, the gear (gear) is also adopted as an eccentric rotating body because the distance from the shaft portion to the tooth tip which is the outer peripheral portion is different from the distance from the shaft portion to the outer peripheral portion where no teeth are provided. obtain.

  In the closing member operating device of the present invention, a plurality of the closing members are arranged, and the eccentric rotating body is provided so that a circumferential direction is along a direction in which the closing members are arranged. It is preferable that the members are pressed so as to advance and retreat in order and function as a pump.

  According to the present invention, it is possible to sequentially press the respective closing members constituting the pump at a predetermined cycle with a simple configuration using the eccentric rotating body as described above. Further, by adjusting the gap and shape of the eccentric rotating body, the rotation speed, etc., the cycle of pressing the closing member can be controlled, and the discharge amount of the pump can also be adjusted.

  In the closing member operating device according to the present invention, it is preferable that the closing member has a device portion that detects or operates the state of the fluid, and the unit has a probe that is electrically connected to the device portion.

  According to the present invention, the probe can electrically connect the unit with the sensor, the electroosmotic pump, the MEMS device that operates alone, and the like, thereby realizing fluid state detection and operation.

  In the closing member operating device of the present invention, it is preferable that the board is provided with a sheet member that partitions the closing member and the unit.

According to the present invention, since the sheet member is provided, the fluid does not adhere to the board or the unit even when the fluid leaks from the flow path. Thereby, the cleanliness of the board and the unit can be ensured.
Here, since the sheet member is corrosion resistant, corrosion of the board and the unit can be prevented.

  In the closing member operating device of the present invention, the unit has pressing means for pressing the closing member from the hole toward the flow path, and is movable in a direction crossing the pressing direction. Preferably, a low friction material that suppresses frictional resistance between the unit and the closing member is used.

  According to the present invention, in the sheet member, the eccentric rotator smoothly rotates with small friction, and the load acting in the in-plane direction of the sheet member due to the rotation of the eccentric rotator is small. Thereby, tearing of the sheet member can be prevented.

  In the closing member operating device according to the present invention, the sheet is made of the first friction film using the low friction material and disposed on the unit side, and the high friction material having higher frictional resistance than the first layer film. It is preferable to have a second layer film disposed on the closing member side.

  According to this invention, the sheet member is configured to have the first layer film and the second layer film having different frictional resistance with the board, and when the blocking member is pressed by the eccentric rotating body, the frictional resistance is small. The first layer film can prevent the sheet member from being broken due to sliding of the eccentric rotating body, and the second layer film having a large frictional resistance can prevent the sheet member from being stretched by being pulled by the friction of the eccentric rotating body. .

  In the closing member operating device of the present invention, the pressing means is an eccentric rotating body in which the distance from the shaft portion to the outer peripheral portion is not constant, and is provided so that the outer peripheral portion is along the direction from the hole toward the flow path. The sheet is preferably formed with a convex portion in accordance with a position where the distance from the outer peripheral portion to the shaft portion is in contact with a larger diameter portion than that of the other portion.

  According to the present invention, when the large-diameter portion on the outer peripheral portion of the eccentric rotating body slides on the surface of the sheet member, the position of the large-diameter portion substantially coincides with the position of the convex portion, and the closing member is the protruding dimension of the convex portion. Therefore, the eccentric rotating body can be reduced in diameter, and the eccentric rotating body can be driven smoothly.

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
In the following description, the same reference numerals are given to the same configurations as those in the embodiment described above, and the description is omitted or simplified.
FIG. 1 is an exploded perspective view of the microchip 1 of the present embodiment. 2 is a plan view of the microchip 1, and FIG. 3 is a cross-sectional view of the microchip 1. As shown in FIG.
The microchip 1 is used for analyzing the sample RG (FIG. 3) in the flow path FA formed therein, and has a laminated structure of two substrates 11 and 12. The microchip 1 incorporates a valve 30 as a closing member, and the valve 30 has a structure in which the fluid pressure or flow rate and flow rate of the sample RG are adjusted and controlled.

The substrates 11 and 12 of the microchip 1 have a flat rectangular shape with a short side of about 30 mm, a long side of about 70 mm, and a thickness of about 0.7 mm, and are made of transparent glass. Specifically, Pyrex (registered trademark) or the like can be used for the substrates 11 and 12. In addition to glass (including quartz glass), hard materials such as sapphire, plastic, silicon (silicon), ceramics such as aluminum oxide and aluminum nitride, and metals such as stainless steel are used as materials for these substrates 11 and 12. You can consider using it. In selecting the materials for the substrates 11 and 12, the pressure resistance and the corrosion resistance to the components of the sample RG are taken into consideration. When performing optical analysis, it is preferable to consider the transmittance of light used for optical analysis. When selecting a relatively soft plastic material such as styrene, polyimide, polyethylene terephthalate (PET), etc., a certain degree of corrosion resistance and light transmittance are considered, but it is an inexpensive general-purpose material that can be used disposablely, And processability is also an important point.
The substrates 11 and 12 are not limited to the same material, and may be different materials.

  The substrates 11 and 12 are overlapped with each other, and a flow path FA of the sample RG is formed on the surface where the substrates 11 and 12 are overlapped. As shown in FIG. 2, the flow path FA has a Y-shape in plan view extending substantially along the longitudinal direction of the substrates 11 and 12, and a bifurcated portion in the Y-shape is a junction portion JCT. That is, in the flow path FA, upstream of the junction JCT, there are paths FA1 and FA2 that flow in a plurality of directions from the inlets 121 and 122 of the sample RG (RG1, RG2) to the junction JCT, and from the junction JCT. Also on the downstream side, there is one path FA3. The path FA3 is a reaction field where the reaction of the samples RG1 and RG2 is performed.

As shown in FIG. 1 and FIG. 3, such a flow path FA includes an inner peripheral surface of a groove 14 having a semicircular cross section formed so as to be recessed in the plate plane of one substrate 11, and a substrate facing the groove 14. It is formed inside 12 plate surfaces.
In this embodiment, the groove 14 has the same diameter in the paths FA1, FA2, and FA3. For example, the diameter of the groove 14 in the path FA3 is larger than the diameter of the groove 14 in the paths FA1 and FA2. For example, the diameter of the groove 14 can be set as appropriate.

  As shown in FIG. 1, the other substrate 12 is perforated so as to communicate with the groove 14 at the positions of the three end portions in the Y shape of the flow path FA when being overlapped with the substrate 11. The holes formed at both ends of the Y-shaped expansion side are the inlets 121 and 122 of the sample RG, respectively, and are formed at the end opposite to the Y-shaped expansion side. Is the outlet 125 of the sample RG.

  The sample RG may have any form such as gas, liquid, colloidal solution, and the like. Here, as the RG of the present embodiment, for example, a sample RG1 and a sample RG2 in which components such as water and water and oil and oil are mixed are used. Then, the sample RG1 is introduced into one introduction port 121, and the sample RG2 is introduced into the other introduction port 122.

  Further, in the substrate 12, a hole 20 having a square shape in a plan view that penetrates the substrate 12 toward the groove 14 when being overlapped with the substrate 11 is a position corresponding to the middle of the path FA3 on the downstream side of the junction portion JCT. Is formed. A valve 30 is disposed inside the hole 20.

  As shown in FIG. 2, the hole 20 is provided at a position overlapping the groove 14 of the substrate 11 when viewed in plan. Here, since the dimension of the hole 20 when viewed in plan is larger than the width of the groove 14, both ends in the width direction of the groove 14 are located inside the hole 20 as shown in FIGS. 2 and 3A. Each is exposed. This exposed portion serves as a mounting surface 141 on which the valve 30 is disposed when the valve 30 is disposed.

3A and 3B show a state in which the valve 30 is disposed inside the hole 20, and FIG. 3A is a sectional view in the width direction of the flow path FA. 3 (B) is a cross-sectional view in a direction along the flow path FA by rotating FIG. 3 (A) by 90 ° in the planar direction of the microchip 1.
The valve 30 is inserted into the hole 20 and disposed on the placement surface 141. The surface 321 on the flow path FA side of the valve 30 is flat, and the valve surface 321 and the wall surface FAW (plate surface of the substrate 12) of the flow path FA are substantially flush with each other.

FIG. 4 shows the valve 30 taken out from the hole 20.
The valve 30 has a cubic shape of approximately 1 mm square, and includes a rectangular parallelepiped transparent glass main body 31 and a plate-like elastic member 32 superimposed on the main body 31, and a flow path FA (FIG. 3). The flow path FA is closed by the elastic deformation of the elastic member 32 arranged on the side.
As the material of the main body 31, in addition to the glass material, a hard material such as sapphire, silicon, plastic, ceramics such as aluminum oxide and aluminum nitride, or metal such as stainless steel is used in the same manner as the substrates 11 and 12. Can be considered.
On the other hand, in the present embodiment, the elastic member 32 is made of fluorine rubber having high corrosion resistance. However, other elastic deformation materials such as silicone rubber, nitrile rubber, chloroprene rubber, and urethane are used. be able to.
The thickness of the elastic member 32 is preferably about 0.2 to 5 times the depth of the flow path FA. If the elastic member 32 is thicker than this, when the fluid pressure of the sample RG becomes high, the amount of deformation due to the fluid pressure becomes excessive. In addition, since the degree of elastic deformation is too large, the amount of pushing becomes difficult to be transmitted to the surface 321 of the elastic member (the liquid contact surface with the sample RG), which may make adjustment difficult. On the other hand, if it is thinner than about 0.2 times, the deformation amount of the elastic member 32 is too small, and it may be difficult to block the flow path FA.

The microchip 1 and the valve 30 described above are manufactured as follows.
First, as a manufacturing procedure of the microchip 1, when the material of the substrate 11 is other than plastic, sandblasting, etching, machining, or the like is performed. When the material of the substrate 11 is plastic, machining, pressing, injection molding, or the like. To form the groove 14.
Further, the introduction ports 121 and 122, the discharge port 125, and the hole 20 are also formed by appropriate means corresponding to the material of the substrate 11, respectively. Specifically, when the material of the substrate 11 is other than plastic, it is performed by sandblasting, electric discharge machining, ultrasonic machining, drilling, laser processing, etching, etc., and when the material of the substrate 11 is plastic, drilling is performed. It is formed by laser processing, pressing, injection molding and the like.

Then, these substrates 11 and 12 are superposed so that the Y-shape of the groove 14 is aligned with the positions of the inlets 121 and 122 and the outlet 125, and heat fusion is performed.
In addition to this heat fusion, the substrates 11 and 12 may be bonded by anodic bonding, laser bonding, brazing, and surface activation bonding, or the substrates 11 and 12 may be sandwiched between each other without bonding. May be attached.
Thereby, the microchip 1 for disposing the valve 30 is completed.

  On the other hand, as a manufacturing procedure of the valve 30, the main body 31 is cut out by dicing, slicing, or the like from a metal or ceramic or plastic wafer or plate material, and the elastic member 32 is bonded to the cut out main body 31. Regardless of this method, the body 31 in the state of a wafer or a plate is coated with a rubber material of the elastic member 32 by spin coating, dip coating, spray coating or the like, or a rubber sheet having a predetermined thickness is pasted. The valve 30 can be manufactured by appropriately cutting out the attached one.

The valve 30 manufactured in this way is inserted into the hole 20 of the microchip 1. At the time of this insertion, the inner peripheral surface of the hole 20 is formed by applying an adhesive 35 as a filler having ductility and elasticity such as silicone, fluorine rubber, nitrile rubber, chloroprene rubber, urethane, etc. to the four side surfaces of the valve 30. An adhesive 35 is interposed between the valve 30 and the valve 30. Although the adhesive 35 has fluidity, the adhesive 35 does not flow into the flow path FA due to an appropriate viscosity, and the valve 30 is fixed to the inner peripheral surface of the hole 20 after the adhesive 35 is cured. .
Further, when the valve 30 is disposed on the microchip 1, it is preferable to adhere the mounting surface 141 and the surface 321 of the elastic member 32, whereby the sample RG accumulates in the portion where the valve 30 is disposed, and the flow is reduced. It is possible to prevent the sample RG from being hindered or the amount of the sample RG from flowing.
As an adhesion procedure in this case, the surface 321 of the elastic member 32 is surface-activated by plasma treatment or the like before the bulb 30 is inserted into the hole 20, or a thin adhesive 35 is applied to the surface 321 of the elastic member 32 for adhesion. After the fluidity of the agent 35 is lowered, the valve 30 is inserted into the hole 20. In addition, since the adhesive 35 and the elastic member 32 are integrated by using the same material for the elastic member 32 and the adhesive 35, the application of the adhesive 35 affects the elastic deformation of the elastic member 32. Can be prevented.
Thus, the incorporation of the valve 30 into the microchip 1 is completed.

In addition, when the material of the board | substrates 11 and 12 is a plastic, the following manufacturing procedures are employable.
In this case, first, the introduction ports 121 and 122, the discharge port 125, and the hole 20 are respectively formed in the substrate 12 by the above-described method, and before the substrate 12 and the substrate 11 in which the grooves 14 are separately formed are bonded. In addition, the valve 30 manufactured by the above-described method is disposed in the hole 20 of the substrate 12.
When the valve 30 is disposed, a peelable sheet member (not shown) such as a Teflon (registered trademark) sheet is pasted on one side of the substrate 12, and one end side of the hole 20 is covered with this sheet member. State. In this state, the valve 30 is inserted into the hole 20 from the other end side of the hole 20, and the adhesive 35 is filled between the inner peripheral surface of the hole 20 and the valve 30. Here, since the sheet member is in close contact with the peripheral edge 21 of the hole 20, the adhesive 35 does not enter the plate surface of the substrate 12 from the inner peripheral surface of the hole 20, and the adhesive 35 does not adhere to the plate surface of the substrate 12. The plate surface of the substrate 12 and the surface 321 of the elastic member are coplanar. Then, after the adhesive 35 is cured, the sheet member is peeled off and the substrates 11 and 12 are overlapped and bonded. However, since the materials of the substrates 11 and 12 are plastic, the bonding means for the substrates 11 and 12 is relatively low temperature. Thus, it is possible to prevent the elastic member 32 from being deteriorated when the substrates 11 and 12 are joined.

Next, fluid control when analyzing the sample RG in the microchip 1 will be described.
When analyzing the samples RG1 and RG2, the sample RG1 is introduced from the introduction port 121, and the sample RG2 is introduced from the introduction port 122 at a predetermined pressure, flow rate, or flow rate by a device (not shown). Then, the samples RG1 and RG2 flow through the paths FA1 and FA2, respectively, and travel toward the junction JCT. These samples RG1 and RG2 form a mixed flow when reaching the junction JCT, flow through the path FA3, and are discharged from the discharge port 125.

  Here, the samples RG1 and RG2 are introduced into the microchip 1 at a predetermined pressure, flow rate, and flow velocity. However, the pressure resistance at the inlets 121 and 122, the groove 14 serving as the inner peripheral surface of the flow path FA, and the substrate 11 are used. Due to the pressure resistance of the plate surface and the like, pressure fluctuations occur in the sample RG. Valve 30 can be used to compensate for such pressure fluctuations. Alternatively, it is possible to control the sample RG to a predetermined fluid pressure, flow rate, or flow rate using the valve 30, thereby allowing the samples RG 1, RG 2 to react under conditions of a predetermined pressure, flow rate, and flow rate. .

  As shown in FIG. 5A, the valve 30 incorporated in the microchip 1 is supported by the mounting surface 141 inside the hole 20, and in this state, the valve 30 is in a fully open state that does not block the flow path FA. Yes. When the valve 30 is appropriately pushed from the side opposite to the flow path FA by any pressing means, the elastic member 32 is in close contact with the peripheral edge 21 of the hole 20 and the end 142 of the groove 14 without any gap. The elastic deformation follows the peripheral surface, and the flow path FA is closed as shown in FIG. That is, the cross-sectional area of the flow path FA is narrowed in accordance with the amount of protrusion of the elastic member 32 from the placement surface 141, thereby restricting the flow of the sample RG. Here, since the board | substrates 11 and 12 by a hard material do not bend even when the high pressure in the flow path FA is received, the valve | bulb 30 is reliably hold | maintained at the internal peripheral surface of the hole 20. FIG. When the valve 30 is pushed in, the adhesive 35 is stretched by its ductility, and follows the elastic deformation of the elastic member 32 by its elasticity.

It is also possible to push the elastic member 32 of the valve 30 to the bottom of the groove 14 so that the flow path FA is fully closed as shown in FIG. In other words, the system is constructed by connecting the inlets 121 and 122 and the outlet 125 of the microchip 1 to the outlets and inlets of other microchips, or by connecting a number of the channels FA of the microchip 1. Therefore, there may be a case where the flow of the sample RG is stopped by setting the valve 30 to the fully closed state for reasons such as the reaction rate of the sample RG. Also in this case, the pressure resistance performance is exhibited by the hard material of the substrates 11 and 12.
That is, the valve 30 can be used as an open / close switching valve (ON / OFF valve) or an open / close amount adjusting valve. In addition, the valve 30 may be always closed to serve as a closing plug, and the opening / closing amount in this case is arbitrary. Further, the channel FA may be always fully open without closing the channel FA.

The opening / closing amount of the valve 30 may be determined to a predetermined amount, or may be adjusted to an arbitrary amount based on the pressure of the sample RG, etc., with the pressing force and the pressing amount. Here, since the main body 31 which is a hard member is not deformed by the fluid pressure in the flow path FA, the flow path FA can be reliably closed with an opening / closing amount corresponding to the pushing amount of the valve 30.
In addition, since the elastic member 32 and the main body 31 are formed to have a uniform thickness and are laminated, the surface of the elastic member 32 when the valve 30 is pushed in or when fluid pressure is received from the flow path FA side. 321 does not deform so as to wave, and the flow of the sample RG is not hindered.
Thus, by pushing the valve 30, the fluid pressure, flow velocity, and flow rate of the sample RG can be controlled, the samples RG1 and RG2 are reacted under desired conditions and synthesized, and the state of the sample RG at this time is analyzed. can do.

According to this embodiment, there are the following effects.
(1) Since the valve 30 is inserted into the hole 20 of the microchip 1 and the flow path FA is closed, the movable part for closing the flow path FA is the valve 30 itself. , 12 is not required to block the flow path FA. For this reason, since hard materials, such as glass with high pressure | voltage resistance and corrosion resistance, can be used as a material of the board | substrates 11 and 12 of the microchip 1, the reliability and versatility of the microchip 1 can be improved significantly. Further, since the substrates 11 and 12 are hard, the handling property at the time of handling is good.
Further, since the elastic member 32 is in close contact with the peripheral edge 21 of the hole 20 and the end portion 142 of the groove 14, the flow path FA is reliably closed and pressure resistance can be ensured.

(2) Since the valve 30 is constituted by the two members of the main body 31 and the elastic member 32, the displacement when being pushed into the hole 20 is accurately transmitted to the elastic member 32 via the main body 31 which is a hard member. The Thereby, control of the elastic deformation amount of the elastic member 32 becomes easy, and the opening / closing amount of the flow path FA can be easily adjusted.

(3) Since the elastic member 32 and the main body 31 are each provided with a uniform thickness, when the elastic member 32 and the main body 31 are pressed into the hole 20 or when fluid pressure in the flow path FA is received, the flow path of the elastic member 32 It is prevented that the FA side surface is deformed so as to wave irregularly. Thereby, operation of sample RG can be performed appropriately, without inhibiting the flow of sample RG.

(4) Since the surface 321 on the flow path FA side of the elastic member 32 is formed flat, the elastic member 32 is in close contact with the peripheral edge 21 of the hole 20 without any gap, and no accumulation portion of the sample RG is generated. The volume can be reduced. As a result, the sample RG does not accumulate or bubbles are generated in the portion where the valve 30 is disposed, and the flow of the sample RG is not affected, and the amount of liquid does not increase. Further, it is possible to avoid the problem that the sample RG remains in the portion where the valve 30 is disposed and the cleanliness of the microchip 1 cannot be ensured.

(5) Since the diameter dimension of the hole 20 is larger than the width of the flow path FA, the placement surface 141 which is the end portion in the width direction of the flow path FA inside the hole 20 serves as a stopper (stopper) of the valve 30. The flow path FA wall surface and the surface of the valve 30 are substantially flush with each other, so that the valve 30 can be disposed on the microchip 1 without affecting the flow of the sample RG.

(6) Since the adhesive 35 interposed between the valve 30 and the inner peripheral surface of the hole 20 follows the elastic member 32 due to its ductility and elasticity, the elastic deformation of the elastic member 32 is inhibited. The valve 30 can be pushed in smoothly.

(7) Any of the flow rate, fluid pressure, and fluid flow rate of the sample RG in the flow path FA is adjusted by adjusting any of the push amount and push force of the valve 30 into the flow path FA, and the flow of the sample RG Therefore, it is possible to operate the fluid in the right place.

(8) Since the elastic member 32 is made of highly corrosion-resistant fluororubber, there is no problem even if the sample RG is corrosive, and the reliability and versatility can be further improved.

(9) The configuration of the microchip 1 can be a simple structure in which a necessary number of holes 20 are formed at necessary positions, and not only the valve 30 described above but also a pump or a sensor in the hole 20. Since a microfluidic device such as an ID tag for recognition of the microchip 1 can be incorporated, the microchip 1 on which a multifunctional fluid device is mounted can be provided at a low cost.
Further, the formation of the holes 20 of the microchip 1 and the arrangement of the valves 30 in the holes 20 are easy, and more valves 30 can be integrated and incorporated in a predetermined range of the microchip 1. The standardization trend of the microchip 1 can also be dealt with.
The microchip 1 of the present invention can be used in the field of analysis and synthesis for high-efficiency reaction of a small-capacity sample RG, and an apparatus using the microchip 1 can be put into practical use.

(10) By simply overlapping the substrate 11 having the groove 14 and the other substrate 12 having the hole 20, the flow path is formed inside the inner peripheral surface of the groove 14 and the plate surface of the substrate 12 facing the groove 14. While the FA is formed, the hole 20 for disposing the valve 30 can be easily formed.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.
In this embodiment, several valves that can be employed in the microchip 1 of the first embodiment are illustrated.
FIG. 6 shows the valve 40 of the present embodiment.
As shown in FIG. 6A, the valve 40 includes a main body 41 made of a hard material such as glass, and an elastic member 42 stacked on the main body 41.
The main body 41 is formed in a substantially V-shaped cross section when viewed from the side, and the V-shaped section is a protruding portion 411. The protrusion 411 is formed in a bowl shape when viewed from the surface of the main body 41 on the flow path FA side, and the elastic member 42 has a V-shaped shape so as to correspond to the protrusion 411. .

As shown in FIG. 6B, the valve 40 is disposed in the hole 20 of the microchip 1 with the protruding portion 411 extending along the flow path FA, and is pushed into the hole 20.
At this time, the pressing force applied to the end portion of the main body 41 acts intensively on the elastic member 42 via the protruding portion 411, so that the pressing force and the pressing force are smaller than those of the valve of the embodiment (see FIG. 4). The elastic member 42 can be deformed by the amount and the groove 14 can be closed.
Note that the shape of the protruding portion 411 is not limited to the V shape, and may be a U shape, a trapezoidal shape, or a rectangular shape, and the elastic member 42 is formed according to the shape of the protruding portion 411.

Next, FIG. 7 is a diagram showing another valve 50 in the present embodiment.
As shown in FIG. 7A, the valve 50 includes a main body 31 and an elastic member 52 that overlaps the main body 31.
A weir portion 521 that protrudes in a prismatic shape is formed on the surface and the central portion of the elastic member 52 opposite to the main body 31 side. The dam portion 521 is formed by fine processing or the like in the semiconductor manufacturing process, and the width dimension at the tip thereof is equal to or larger than the width of the groove 14 formed in the microchip 1.

When the valve 50 is arranged in the hole 20 of the microchip 1, the dam portion 521 is inserted into the groove 14, and when the valve 50 is inserted into the hole 20, the dam portion 521 is inserted into the groove 14 as shown in FIG. Will fit. At this time, the groove 14 can be reliably closed to the bottom by fitting the weir 521 and the groove 14. Such a valve 50 can be suitably used as a safety valve.
The predetermined pressure when the valve 50 is opened can be increased as the size of the valve 50 is increased and the thickness dimension of the elastic member 52 is increased.

A valve similar to the valve 50 is shown as a valve 55 of this embodiment in FIG.
As shown in FIG. 8 (A), the valve 55 includes a main body 31 and an elastic member 56. The elastic member has an H shape in plan view. The vertical bar portion is a bank portion 562. The dam portion 561 and the bank portion 562 are formed by fine processing or the like in the semiconductor manufacturing process.

  When such a valve 55 is arranged in the hole 20 of the microchip 1, the position of the dam portion 561 and the position of the groove 14 are matched, and the flow path FA is not blocked unless the valve 55 is pushed in this state. When the valve 55 is pushed into the hole 20, as shown in FIG. 8B, the dam portion 561 and the bank portion 562 are elastically deformed, and the dam portion 561 is fitted into the groove 14 so that the groove 14 reaches the bottom. It can be reliably plugged. That is, the valve 55 is suitable as an ON / OFF valve and a safety valve.

FIG. 9 is a view showing another valve 60 in the present embodiment.
As shown in FIG. 9A, the valve 60 is composed only of a cubic elastic member 62 and does not have a hard member corresponding to the main body 31 of each of the valves 30 to 55 described above.

Also in such a valve 60, when the elastic member 62 is deformed following the shape of the groove 14 when pushed into the hole 20 of the microchip 1, the groove 14 can be closed.
However, since the hard member that holds the elastic member is not provided, when the flow path FA is partially blocked, it may be difficult to adjust the opening / closing amount. The valves 30 and 40 and the valve 70 (FIG. 10) described in the embodiment are suitable.

Moreover, FIG. 10 is a figure which shows the other valve | bulb 70 in this embodiment.
The main body 71 of the valve 70 has two members, and is different from the above-described valves 30 to 60 in this point.
The main body 71 includes a rectangular tube-shaped pipe 711 and a prismatic rod-shaped member 712 inserted into the pipe 711. An adhesive 35 is filled between the pipe 711 and the rod-like member 712, and the rod-like member 712 can be moved forward and backward with respect to the pipe 711 by the ductility and elasticity of the adhesive 35. In this embodiment, the length of the rod-shaped member 712 is larger than the axial dimension of the pipe 711, and the tip of the rod-shaped member 712 protrudes from the pipe 711. Further, the width dimension of the rod-shaped member 712 is equal to or smaller than the width of the groove 14 formed in the microchip 1. The elastic member 32 is provided so as to overlap the end portions of the rod-shaped member 712 and the pipe 711.

When the valve 70 is pushed into the hole 20 of the microchip 1, one end of the rod-like member 712 is pushed. Then, the elastic member 32 is deformed so as to be pushed into the groove 14 by the other end of the rod-shaped member 712, and the groove 14 is closed. That is, the bar-like member 712 can intensively press the portion of the elastic member 32 facing the groove 14, so that the elastic member 32 can be efficiently deformed with a small pressing force.
Further, when there is a gap between the rod-shaped member 712 and the inner peripheral surface of the pipe 711, even when the position of the hole 20 is shifted with respect to the groove 14, a gap (backlash) for bonding the valve 70 is used. It becomes possible to match the positions of the rod-shaped member 712 and the flow path FA. Thereby, there is no problem even if the valve 70 is displaced from the center of the hole 20, and formation and joining of the substrates 11 and 12 can be facilitated.

Furthermore, FIG. 11 is a view showing a valve 80 having an air vent structure in the present embodiment.
As shown in FIG. 11A, the valve 80 includes a main body 31 and an elastic member 82 formed of a gas permeable material such as silicone rubber.
When the valve 80 is disposed in the hole 20 of the microchip 1, an adhesive 85 as a gas-permeable filler such as silicone is applied to the four side surfaces of the valve 80, and the inner periphery of the valve 80 and the hole 20 is applied. Adhesive 85 is filled between the surfaces. As described above, it is preferable to bond the surface 821 of the elastic member 82 and the placement surface 141.
When the liquid phase sample RG is introduced into the flow path FA (FIG. 2) in this state, the gas contained in the sample RG passes through the adhesive 85 due to the fluid pressure in the flow path FA and is discharged to the outside. Due to the gas permeability of the member 82, the gas contained in the sample RG flows downstream of the flow path FA from the position where the valve 80 is disposed. With such an air vent structure, the fluid pressure is constant and turbulent flow is prevented, so that stable liquid feeding is possible.
If either the adhesive 85 or the elastic member 82 is gas permeable, an air bleeding structure of the sample RG can be realized.

FIG. 12 is a perspective view of the load detection type valve 90 in the present embodiment, and FIG. 13 is a cross-sectional view of the valve 90.
The valve 90 includes a pressure sensor 91 as a member main body, and the elastic member 32 is laminated on the pressure sensor 91.
The pressure sensor 91 includes a conductive silicon diaphragm 911 that is displaced by elastic deformation of the elastic member 32 when the valve 90 is pushed in, and a glass that holds the diaphragm 911 with a gap 934 (FIG. 13) interposed therebetween. The holding body 912 is provided.
The diaphragm 911 is formed in a plate shape, and a pattern 9111 for joining to the holding body 912 is formed on the surface on the holding body 912 side.

The holding body 912 is formed by integrally stacking two quadrilateral substrates 931 and 932, a bonding pattern 9222 is provided along the outer periphery of the end surface on the diaphragm 911 side, and a fixed electrode 9221 is provided on the inner side thereof. Three extraction electrodes 9123 are provided on the end surface opposite to these patterns. The bonding pattern 9222 is used for bonding to the diaphragm 911, and the fixed electrode 9221 constitutes the diaphragm 911 and a capacitor.
In addition, three conductive patterns 9321, 9322, and 9323 extending at substantially equal intervals are formed on the substrate 932, respectively. These conductive patterns 9321, 9322, and 9323 are connected to the extraction electrodes 9123, respectively, and ends opposite to the extraction electrodes 9123 are connected to the fixed electrode 9221 or the bonding pattern 9222, respectively.
Between the substrates 931 and 932, gap portions 9325 and 9326 that are open to the atmosphere are formed between the adjacent conductive patterns 9321 to 9323, respectively.

In such a configuration, when the diaphragm 911 is displaced due to elastic deformation of the elastic member 32 when the valve 90 is pushed in, the potential at the diaphragm 911 and the fixed electrode 9221 is applied to the extraction electrode 9123 via the conductive patterns 9321 to 9323. It is taken out. Based on the extracted potential, the displacement of the diaphragm 911 is detected as a change in capacitance between the diaphragm 911 and the fixed electrode 9221. Since the weight when the valve 90 is pushed in is detected through the value detected here, the pushing force or pushing amount of the valve 90 is adjusted based on this weighted detection value, and the blockage amount of the flow path FA. Can be accurately controlled.
The pressure sensor 91 is a capacitance type gauge pressure type, but the member body of the valve 90 can also be configured as a strain gauge detection type or absolute pressure type pressure sensor.
Although an example of a pressure sensor is shown here, a weight sensor or a displacement detection sensor may be used.

[Third Embodiment]
Next, a third embodiment of the present invention will be described.
The microchip 2 of the present embodiment is different in the shape of the flow path formed inside from the flow path in the first embodiment, and therefore the position where the valve is incorporated is also different from that in the first embodiment. .

FIG. 14 is a plan view of the microchip 2 in the present embodiment.
The microchip 2 has a structure in which the substrates 11 and 12 are stacked, and the substrate 11 has a groove 24 corresponding to the shape of the flow path FAM.
The flow path FAM meanders so as to make one reciprocal half along the longitudinal direction of the substrate 11, and the bifurcated portion provided at the start end serves as a confluence portion JCT of the sample RG. That is, the flow path FAM is configured to include paths FA1 and FA2 that respectively flow to the merging portion JCT and a meandering portion FA3.

A total of five holes 20 for valve arrangement are formed in the substrate 11 along the path FA3, one for each of the paths FA1 and FA2. Valves 30 to 90 are disposed in these holes 20, respectively.
Specifically, valves 90 are respectively disposed in the holes 20 formed in the paths FA1 and FA2, and each valve 90 closes the flow path FA with an arbitrary opening / closing amount based on a predetermined fluid pressure or the like. .
In addition, a safety valve 50 is disposed in the hole 20 formed at the subsequent stage of the junction portion JCT of the path FA3. Since the weir 521 of the safety valve 50 is pushed to the bottom of the groove 24 and the small flow path FA4 extending from the path FA3 is fully closed, the sample RG does not normally flow from the path FA3 to the small flow path FA4. . The air vent valve 80 and the valve 30 are disposed in the two holes 20 formed in order in the course of the path FA3 after meandering so that the path FA3 turns twice. The air bleeding valve 80 is pressed so as to be in close contact with the peripheral edge 21 of the hole 20 and the end 142 of the groove 24, and the valve 30 partially closes the flow path FA.

  The substrate 11 is formed with inlets 121 and 122 for introducing the sample RG into the paths FA1 and FA2, and a discharge port 125 for discharging the sample RG from the path FA3, respectively. In the path FA3, the safety valve 50 is provided. In addition, a discharge port 128 and an air discharge port 129 are formed at the ends of the small flow paths FA4 and FA5 respectively extending from the position where the air vent valve 80 is provided.

The fluid control in the microchip 2 of this embodiment will be described.
When the samples RG1 and RG2 introduced from the inlets 121 and 122 flow through the paths FA1 and FA2, respectively, they are adjusted to their respective predetermined flow rates, pressures, and the like by the weight detection type valve 90 and mixed at the junction JCT. A flow is formed and flows through the path FA3. Here, when the fluid pressure in the flow path FA exceeds a predetermined amount after the junction JCT, the safety valve 50 is opened, and the sample RG is discharged from the discharge port 128 from the path FA3 through the small flow path FA4. . Thereby, it is possible to cope with an unexpected excessive pressure in the flow path FA, and to improve the reliability. After the pressure check by the safety valve 50, the samples RG1 and RG2 are reacted and synthesized while meandering along the path FA3 and discharged from the discharge port 125. Before this discharge, gas is removed from the samples RG1 and RG2 by the air vent valve 80, and the gas is discharged from the air discharge port 129, so that the rectified sample RG can be taken out. This air bleeding is performed by closing the flow path FA by the valve 30 near the air bleeding valve 80 and applying a predetermined pressure to the sample RG, and this valve 30 stabilizes the liquid feeding of the sample RG after the air bleeding. it can. Note that the air discharged from the air discharge port 129 may be introduced into another microchip connected by a tube or the like.

According to the present embodiment, the same operational effects as described above are exhibited, and the following operational effects are combined.
(11) Since the pressure of the samples RG1 and RG2 and the like is adjusted to a predetermined amount by the valve 90 before the junction JCT, the samples RG1 and RG2 can be merged under desired conditions.
In the valve 90, since the load when the valve 90 is pushed through the elastic deformation of the elastic member 32 (FIG. 13) is detected, based on the difference between the detected value and a predetermined specified value, It is also conceivable to feedback control the pushing force or the pushing amount.

(12) By arranging the five valves 30 to 90 at the right place in the right material, the state of the sample RG in the flow path FA where pressure fluctuation is likely to occur can be controlled appropriately, and analysis with improved accuracy and stable chemical synthesis are possible. It becomes.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described.
In the present embodiment, a pump is configured by arranging a plurality of closing members that are valves in each of the above embodiments.
FIG. 15 shows the microchip 3 in the present embodiment, and on the microchip 3, four blocking members 100 are arranged in a line along the flow path FAM.
Each of the closing members 100 includes a hard material main body 31 and an elastic member 32 that is overlapped with the main body 31 with a uniform thickness, similar to the above-described valve 30 (see FIG. 4). The surface is formed flat.
Each closing member 100 is disposed adjacent to each other in a rectangular hole 110 formed in the microchip 3, and is bonded to each other by an adhesive 35 having ductility and elasticity inside the hole 110.

FIG. 16 is a diagram illustrating a state in which the side-by-side closing members 100 are sequentially pushed to function as a pump.
That is, since the closing member 100 is repeatedly advanced and retracted with respect to the flow path FA at different timings, it is possible to pump the sample RG according to the pushing amount of each closing member 100.
(13) According to the present embodiment, the pump can be configured with a simple structure like the above-described valve 30, so that it is extremely useful for fluid control of the microchip 3.

[Fifth Embodiment]
Next, a switching device 130 according to the fifth embodiment of the present invention will be described.
FIG. 17 is a plan view of the switching device 130. The switching device 130 is an application device (application) including the microchannel fluid control structure in each of the embodiments.
The switching device 130 includes a microchip 3 on which substrates 11 and 12 are stacked, and a flow path FAA in the microchip 3 is connected to a linear path FAA1 as a predetermined path and the path FAA1. There are routes FAA2 to FAA4 and a plurality of discharge routes FAA5 and FAA6 branched from the route FAA1. The introduction route FAA3, the route FAA1, and the discharge route FAA5 are arranged on the same straight line.
In addition, introduction ports 121 to 123 are provided at one end side of each of the introduction routes FAA2 to FAA4, and discharge ports 125 and 126 are provided at one end side of each of the discharge routes FAA5 and FAA6. Such a switching device 130 is used for switching the path of the flow path FAA from the inlets 121 to 123 to the outlets 125 and 126.

  Here, as a configuration for switching the flow of the sample RG, valves 40A to 40C are respectively provided in the holes 20 formed in the substrate 12 near the connection portion of the introduction paths FAA2 to FAA4 to the path FAA1, and the discharge path. Valves 40 </ b> D and 40 </ b> E are provided in holes 20 formed in the substrate 12 also at the branch portions of the FAA <b> 5 and FAA <b> 6 from the path FAA <b> 1. These valves 40A to 40E have the same structure as the valve 40 described above.

In such a configuration, the samples RG1 to RG3 are introduced as necessary from the inlets 121 to 123, and the flow of the samples RG1 to RG3 is appropriately regulated by opening and closing the valves 40A to 40C. Specifically, the flow from the introduction path FAA2 to the path FAA1 by opening / closing the valve 40A, the flow from the introduction path FAA3 to the path FAA1 by opening / closing the valve 40B, and from the introduction path FAA4 by opening / closing the valve 40C. The flow to the route FAA1 is restricted. That is, in some cases, it is possible to introduce only the sample RG1 into the path FAA1, and in other cases, it is possible to introduce only the sample RG2 into the path FAA1.
The discharge paths of the samples RG1 to RG3 thus introduced into the path FAA1 are switched as necessary by opening one of the valves 40D and 40E and closing the other, and are discharged from the discharge ports 125 and 126. The sample RG is introduced into a flow path of another microchip through a tube (not shown) connected to the discharge ports 125 and 126.

(14) According to the switching device 130 as in the present embodiment, the inlets 121 to 123 and the outlets 125 and 126 of the samples RG1 to RG3 can be appropriately selected, and a plurality of microchip channels are connected. The design of the built system becomes free.
In this embodiment, the inlets 121 to 123 and the outlets 125 and 126 are formed in one microchip 3, but these inlets 121 to 123 and the outlets 125 and 126 are connected to each other. May be provided separately on a plurality of connected microchips.

[Sixth Embodiment]
Next, the mixer 150 which is an apparatus to which the microchannel fluid control structure of the present invention is applied will be described.
FIG. 18 is a plan view of the mixer 150 in the present embodiment.
The mixer 150 has a structure in which the four valves 80A, 30A, 30B, and 80B are sequentially arranged along the flow path FAB formed in the microchip as described above, and the rear stage side of the junction portion JCT of the paths FAB1 and FAB2. Is provided. The mixer 150 is used to mix the samples RG1 and RG2 introduced into the paths FAB1 and FAB2, respectively.

Each of the valves 80A, 30A, 30B, and 80B is disposed in a hole 20 formed in the microchip substrate. The valves 30A and 30B have the same structure as the valve 70 described above, and both are formed with dimensions that are larger on each side than the valves 80A and 80B.
Further, the flow path FAB bulges in a circular shape in plan view at the positions where the valves 30A and 30B are arranged, and these portions are enlarged diameter portions FAB3 and FAB4.

When mixing the samples RG1 and RG2 by the mixer 150, first, the samples RG1 and RG2 are respectively introduced through the paths FAB1 and FAB2 while the flow path FAB is closed by the valve 80B disposed on the downstream side, and the valve 80B is introduced. When the samples RG1 and RG2 blocked in step S3 are collected in the enlarged diameter portions FAB3 and FAB4, the upstream valve 80A is also closed in the same manner as the valve 80B. The flow path FAB is now partitioned by the valves 80A and 80B. In this state, the rod-like members 712 of the valves 30A and 30B are alternately advanced and retracted toward the flow path FA, so that the sample accumulated between the valves 80A and 80B. RG1 and RG2 are mixed.
(15) By realizing such a mixer 150 on a microchip, it is possible to mix samples RG1 and RG2 having high viscosity that are difficult to mix.

[Seventh Embodiment]
Further, an injector 160, which is an apparatus to which the microchannel fluid control structure of the present invention is applied, will be described.
FIG. 19 is a plan view of the injector 160 in the present embodiment.
The injector 160 includes the microchip 4 on which the substrates 11 and 12 are stacked. The flow path FAC in the microchip 4 includes two paths FAC1 and FAC2 as first paths extending substantially parallel to each other, and these paths. An injection path FAC3 is provided as a second path extending so as to intersect with FAC1 and FAC2.
One end of the path FAC3 is an inlet 123 for the sample RG3, intersects the paths FAC1 and FAC2 substantially at right angles, and the other end is connected to the path FAC2.
Further, an inlet 121 and an outlet 125 for the sample RG1 are respectively provided at both ends of the path FAC1, and similarly, an inlet 122 and an outlet 126 for the sample RG2 are respectively provided at both ends of the path FAC2. .
The injector 160 is used to inject a predetermined amount of the sample RG3 into the samples RG1 and RG2 through the injection path FAC3 with respect to the samples RG1 and RG2 flowing through the paths FAC1 and FAC2, respectively.

  Here, as a configuration in which the sample RG3 is injected into the paths FAC1 and FAC2, the substrate 12 is formed in the vicinity of the intersection CRS of the injection path FAC3 with the path FAC1 and in the vicinity of the connection CNC of the injection path FAC3 with the path FAC2. Valves 40 </ b> A to 40 </ b> G are provided in the respective holes 20. Specifically, in the vicinity of the intersection CRS, four valves 40A to 40D are arranged on the upstream side and downstream side of the route FAC1, and on the upstream side and downstream side of the injection route FAC3, respectively, and in the vicinity of the connection portion CNC, the route FAC2 Three valves 40E to 40G are arranged on the upstream side, the downstream side, and the upstream side of the injection path FAC3, respectively. These valves 40A to 40G have the same structure as the valve 40 described above.

The injection of the sample RG3 in the injector 160 is performed by the following procedure, for example.
First, the valves 40A, 40B, and 40E are closed, the sample RG3 is introduced into the injection path FAC3 from the introduction port 123, and then the valves 40C, 40D, and 40G are closed, whereby an arbitrary amount of the sample RG3 is cut off in the path FAC.
In this state, sample RG1 is introduced from introduction port 121 and sample RG2 is introduced from introduction port 122 to paths FAC1 and FAC2, and valves 40A, 40B, and 40E are opened. By this operation, the sample RG3 is excluded in addition to the injection paths FAC3 and FAC4.
When the valves 40B and 40E are closed and the valves 40D and 40G are opened at the same time, the fluid in which a predetermined amount of the sample RG3 is injected into the sample RG1 flows to the discharge port 126 in the paths FAC1, FAC4, and FAC6. Although not shown in the figure, the path FAC6 may be filled with beads to form a column or the like, or may have an analysis unit by optical analysis. As the optical analysis, quantification, qualitative analysis, and the like can be performed using an apparatus such as a spectrophotometer, an absorptiometer, or a thermal lens microscope. By providing an analysis part after the column is formed, it can be used for chromatography.
(16) Realizing such an injector 160 on a microchip can contribute to the progress of chemical analysis and environmental analysis.

[Eighth Embodiment]
Next, a description will be given of an operating device for operating the closing member mounted on the microchips of various aspects described in detail in the above embodiment. That is, the operation device is used when performing a chemical analysis device, a bio / DNA analysis device, a chemical synthesis, or the like using the microchip in which the blocking members are integrated as described above.
FIG. 20 is a schematic perspective view of the operating device a1 in the present embodiment.
The operating device a1 includes a housing a10 in which a slot a11 into which a microchip a0 is inserted is formed, and is connected to an external device such as a personal computer (not shown). The operation device a1 operates the valve a100 as a closing member mounted on the microchip a0, and various kinds of information can be obtained by an external device based on information obtained by detecting the state of the sample in the microchip a0. Analysis is performed.

FIG. 21 shows the inside of the operating device a1, which is a closing member operating device.
A pair of rails a12 extending in the horizontal direction and having an L-shaped cross section are provided inside the casing a10 of the operating device a1, and the rails a12 are used as board placement portions, and a rectangular plate-like board a20 is provided on the rails a12. Is detachably disposed. That is, both side surfaces of the board a20 are held by the rail a12, and the inner peripheral upper surface part a121 of the rail a12 functions as a guide part that guides the board a20 to a predetermined position. The board a20 held by the rail a12 is positioned against the wall inside the housing a10.
Note that a container (not shown) for collecting the fluid discharged from the microchip a0 is provided inside the operating device a1. The configuration of this container may be a normal tank or may be filled with a water-absorbing polymer, and this container may be attached to the board a20.

A plurality of holes a21 are formed in the board a20. A unit a30 is disposed in each hole a21, and the unit a30 passes through the board a20 and is exposed to the back side of the board a20. These units a30 are also detachable from the board a20.
On the other hand, the microchip a0 inserted from the slot a11 is disposed on the housing bottom surface portion a13 as the microchip placement portion in the housing a10, and faces the board a20. The microchip a0 is pressed against the housing bottom surface portion a13 by a spring or the like (not shown) so that the position does not shift when the valve a100 is operated.
Here, each unit a30 on the board a20 and each valve a100 on the microchip a0 face each other and come into contact with each other, and those facing each other (one set, a pair) constitute one device.
FIG. 22 is a plan view of the inside of the operating device a1.
When the microchip a0 is arranged on the bottom surface portion a13 (FIG. 20), the valves a100 provided on the microchip a0 and the units a30 provided on the board a20 correspond to each other. It overlaps in a plane.

In this embodiment, a microchip a0 provided with a valve a100 (hereinafter also simply referred to as microchip a0), a unit a30, and a board a20 provided with unit a30 (hereinafter also simply referred to as board a20). A specific configuration of (A) will be described.
Although the illustration of the microchip a0 is simplified, the microchip a0 has two rectangular flat plate-like transparent glass substrates that are substantially the same as the microchip 1 described in the first embodiment with reference to FIG. Are stacked, and a groove serving as a flow path FA is formed on one substrate, and the other substrate is formed with a hole 20 through which each valve a100 is disposed at a position corresponding to the flow path FA. is there.
The valve a100 has substantially the same configuration as the valve 30 described in the first embodiment with reference to FIG. As the valve a100, any of the closing members described in the above embodiments can be employed.

In the microchip a0 of the present embodiment, as shown in FIG. 22, two inlets 121 and 122 for introducing the sample RG into the flow path FA and one discharge for discharging the sample RG to the outside of the flow path FA. Each outlet 125 is formed.
The flow path FA is reciprocated twice in the longitudinal direction of the microchip a0 via a substantially Y-shaped joining portion JCT through which the samples RG (two types of samples RG1 and RG2) introduced from the introduction ports 121 and 122 join. It is formed to meander.
And valve a100 is each arrange | positioned between the inlet 121 and the junction part JCT, and between the inlet 122 and the junction part JCT, and two valves a100 are arrange | positioned also at the meandering part of the flow path FA, respectively. Has been.

The board a20 is made of a material that is strong and relatively resistant to corrosion, and has a plurality of screw holes a21 formed therethrough. Specific examples of the material of the board a20 include stainless steel, titanium, and ceramics.
The board a20 may be provided with a sample tank to be fed to the flow path. However, it is desirable that such a tank be provided separately from the board a20 because it is desirable that the tank can be used disposable for reasons such as hygiene. When the tank is separated from the board a20, it is conceivable to form a reservoir for storing a sample on the microchip a0 side in order to increase the liquid feeding amount.

  In this embodiment, the unit a30 is a male screw that functions as a pressing unit, and is screwed into each screw hole a21 of the board a20. That is, the screwing of the unit a30 makes it possible to push the valve a100 toward the flow path FA as described with reference to FIG.

When the operating device a1 having such a configuration is used, the pressing force to each valve a100 is adjusted by screwing the unit a30.
Then, the samples RG1 and RG2 are respectively introduced into the flow path FA from the inlets 121 and 122 (FIG. 22), and the samples RG1 and RG2 are merged at the merging portion JCT to form a phase flow or after the merging portion JCT. Operations such as mixing the samples RG1 and RG2 with each other using the channel FA as a reaction field and synthesizing are performed. At this time, the flow rate and flow rate of the sample RG (RG1 and RG2), fluid, and the like are controlled by the unit a30 and the valve a100. Each pressure is adjusted. That is, the unit a30 and the valve a100 constitute a set to form one device and operate integrally.

Here, the board a20 is detachably attached to the rail a12, and can be replaced according to the microchip a0 set in the operating device a1. That is, the various microchips shown in the first to seventh embodiments can also be set in the operating device a1, the shape of the flow path of these microchips, the valve a100 inserted into the hole formed in the microchip, etc. Corresponding to this arrangement, the board a having a hole a21 for arranging the unit a30 may be appropriately replaced.
Even when the same microchip a0 is used, for example, not only the valve a100 but also a sensor is provided, and it is necessary to sense the fluid pressure or the like of the sample RG in the flow path FA. A probe may be added to the board a20, or may be replaced with the board a20.

According to this embodiment, in addition to the effects described in the first embodiment, the following effects can be obtained.
(17) Since a plurality of valves a100 are integrated in the microchip a0 and can be operated by pressing each valve a100 with the unit a30, advanced fluid control becomes possible. The operation device a1 makes it possible to perform complex analysis using a microchip equipped with more reaction systems, and to simultaneously analyze other items.

(18) Since the board a20 is held and guided by the rail a12 and can be attached to and detached from the operation device a1, various microchips, that is, the outer shape, the flow path pattern, the type of analysis, and the valve a100 provided. It can be quickly replaced with an appropriate one according to the required drive specifications such as type and position.

(19) Further, since the unit a30 can be attached to and detached from the board a20, even if the closing part (the valve a100 in this embodiment) disposed on the microchip a0 has the same structure, the structure and push It can be exchanged for a different pressure (for example, a spring coefficient is included when a spring is provided). Thereby, operation | movement of the obstruction | occlusion component provided in microchip a0 can be changed.

[Ninth Embodiment]
Next, a ninth embodiment of the present invention will be described.
In the eighth embodiment, the board in the operating device can be moved up and down in the eighth embodiment.
FIG. 23 shows a side sectional view of the operating device a4 of the present embodiment.
A flat rectangular plate a111 fixed to a post (not shown) of the casing a10 is attached to the upper surface of the casing a10 of the operating device a4. Two screw holes a111A are formed in the plate a111, and ascending / descending adjustment screws a10B are screwed into the screw holes a111A through the upper surface of the housing a10.

On the other hand, a concave portion a411 in which the microchip a0 is disposed is formed in the bottom surface portion a41 of the operating device a4, and the board a20 is disposed above the concave portion a411.
Here, a compression coil spring a412 is interposed between the support plate a44 and the bottom surface part a41, which are substantially parallel to the bottom surface part a41 and to which the rail a12 is attached.
Columnar members a42 having bases a42A are arranged to stand upright at the four corners on the board a20 disposed above the bottom surface portion a41. The two plates a43 are installed along the opposite sides of the board a20. The raising / lowering adjustment screw a10B faces substantially the center of the plate a43, and advances and retreats with respect to the plate a43. That is, when the lifting adjustment screw a10B is screwed forward, the plate a43 is pushed down, the spring a412 is compressed through the columnar member a42, and the board a20 is lowered. Further, when the elevating adjustment screw a10B moves backward with respect to the plate a43, the spring a412 is restored and the board a20 is raised. That is, the elevation adjustment screw a10B, the columnar member a42, the plate a43, and the spring a412 constitute an advance / retreat means for the board a20.

In such an operation device a4, the knob a102A of the elevation adjustment screw a10B is turned to raise the board a20, and the unit a30 is sufficiently separated from the recess a411 of the bottom surface part a41, and then the microchip a0 is inserted into the slot a11. And set in the recess a411.
Here, the distance A between the back surface of the board a20 and the surface of the microchip a0 is the protruding dimension of the valve a100 from the hole 20 of the microchip a0, or when the above-described reservoir or the like is attached to the surface of the microchip a0. It adjusts suitably so that it may not contact this reservoir.
After setting the microchip a0, the knob a102A of the lifting adjustment screw a10B is turned in the opposite direction to lower the board a20, and the unit a30 provided on the board a20 and the valve a100 provided on the microchip a0 are mutually connected. Make contact.
A convex portion a45 is provided on the back side of the board a20. When the board a20 is lowered, the convex portion a45 comes into contact with the microchip a0, and the lowering of the board a20 is stopped. That is, there is a gap at a predetermined distance between the microchip a0 and the board a20.

According to this embodiment, in addition to the above-described effects, the following effects can be obtained.
(20) That is, when the microchip a0 is inserted into the slot a11 by the raising / lowering operation of the board a20 in the operation device a4, the valve a100 mounted on the microchip a0 and the unit a30 on the board a20 side do not interfere with each other. . As a result, the used microchip a0 can be quickly replaced with a new one, and the valve a100 and the unit a30 can be prevented from being damaged when the microchip a0 is inserted into and removed from the slot a11.

[Tenth embodiment]
Next, a tenth embodiment of the present invention will be described.
In the present embodiment, the mode of the unit provided on the board is different from the above-described embodiments. Further, in this embodiment, the board a20 can be moved up and down and the height position of the board a20 can be adjusted in the operating device a4 of the ninth embodiment (FIG. 23), and the unit a30 is also adjusted in position. It is possible.

FIG. 24 is a side sectional view showing the board a20 and the piezoelectric actuator a35 as a unit. The unit in the present embodiment is configured to include a piezoelectric actuator a35, and the piezoelectric actuator a35 functions as a drive source that constitutes a pressing unit of the valve.
The piezoelectric actuator a35 includes lead zirconate titanate (PZT (registered trademark)), crystal, lithium niobate, barium titanate, lead titanate, lead metaniobate, polyvinylidene fluoride, lead zinc niobate, lead scandium niobate, etc. Of the piezoelectric element (not shown) of the piezoelectric element (not shown) is output as a driving force, a casing a351 storing the piezoelectric element and attached to the board a20, and a valve a100 by the driving force of the piezoelectric element being extended. A movable shaft a352 (pressing member) that moves forward toward the front and a sensor a353 that detects the amount of displacement of the movable shaft a352 are provided. Examples of the sensor a353 include a contact sensor, a weight sensor, and a position sensor.

  The movable shaft a352 is inserted into the hole a21 of the board a20 together with the cylindrical member a355 while being inserted into the cylindrical member a355, and there is no tension around the portion of the cylindrical member a355 protruding from the board a20 toward the casing a351. A coil spring a354 is disposed. The spring a354 is fixed to the board a20 and the casing a351.

In such a configuration, as described with reference to FIG. 23, the height position of the board a20 is adjusted by the elevation adjustment screw a10B, and the microchip a0 is disposed in the recess a411.
Then, the elevation adjustment screw a10B is turned again to lower the board a20 and bring the movable shaft a352 into contact with the valve a100 disposed on the microchip a0 as shown in FIG. At this time, as shown in FIG. 24B, the casing a351 is pushed up with respect to the board a20 in a state where the end of the cylindrical member a355 is in contact with the surface of the microchip a0 and is pulled by the spring a354. . Here, the magnitude of the spring force of the spring a354 is stronger than the force with which the movable shaft a352 presses the valve a100. That is, the cylindrical member a355 fulfills the function of adjusting the height of the movable shaft a352, and the height position of the movable shaft a352 is appropriately adjusted. Thereby, when the raising / lowering adjustment screw a10B is screwed in to the back, the load when the movable shaft a352 hits the valve a100 is relieved. With such a structure, the distance between the casing a351 and the valve a100 can be made substantially constant even when a driving source with a small displacement such as a laminated piezoelectric element is used. Becomes easier.

When the valve a100 of the microchip a0 and the movable shaft a352 of the board a20 are brought into contact with each other in this way, the piezoelectric actuator a35 is driven through a voltage application device (not shown), and the valve a100 is pressed by the movable shaft a352, thereby causing the flow. The road FA is closed (see FIG. 24B). At this time, in an external device such as a personal computer, the voltage can be adjusted based on the amount of displacement of the movable shaft a352 of the piezoelectric actuator a35 detected by the sensor a353.
When this valve a100 is used as a valve for adjusting flow rate, flow velocity, fluid pressure, etc., the flow path FA is partially blocked to restrict the flow of the sample RG, and when it is used as an on / off valve, the flow path FA is completely It closes (see valve 50 in FIG. 7, valve 55 in FIG. 8, and safety valve 50 in microchip 2 in FIG. 14).

When the valve a100 is used as a valve for adjusting the flow rate, flow velocity, fluid pressure, etc., by controlling the pressing force against the valve a100 or the distance (movement amount) by which the valve a100 is pushed toward the flow path FA. The amount of blockage of the flow path FA is adjusted.
Here, when controlling by the pressing force with respect to valve | bulb a100, the required amount of force applied to valve | bulb a100 by the difference of the magnitude | size of valve | bulb a100, the elastic coefficient of the elastic member 32 (FIG. 4), the pressure concerning flow path FA, etc. Therefore, it is necessary to change the force for pressing the valve a100 according to the required amount. Therefore, the method of controlling the pushed distance is more desirable than the method of controlling by the pushing force, and the piezoelectric actuator a35 in this embodiment is suitable as a pushing means of the valve a100 in that the distance (movement amount) can be controlled. It is.

  Further, since the piezoelectric actuator a35 has a large driving force, the flow path FA is completely closed by the valve a100, thereby realizing an on / off (open / close) valve. Here, in order to close the valve a100, it is necessary to apply a force for completely closing the flow path FA against the fluid pressure of the sample RG.

According to this embodiment, in addition to the above-described effects, the following effects can be obtained.
(21) Since the piezoelectric actuator a35 is employed as the pressing means for pressing the valve a100, the displacement amount of the movable shaft a352 can be easily adjusted by controlling the voltage, and the pressing amount of the valve a100 can be easily adjusted. Further, the advantages of the piezoelectric actuator, that is, high output and good response can be enjoyed.

(22) Further, when the valve a100 is pressed by the movable shaft a352, the movable shaft a352 is urged by the spring a354 and is lifted with respect to the valve a100. Therefore, when the board a20 is lowered, the movable shaft a352 is moved to the valve a100. It is possible to prevent the valve a100 from being damaged due to a collision.

[Eleventh embodiment]
Next, an eleventh embodiment of the present invention will be described.
This embodiment shows a pressing means different from the above embodiments.
FIG. 25 is a side sectional view of the operating device a5 in the present embodiment.
The four screw members a51 and the movable shaft a52 with a built-in spring are provided in the same number as the unit a30 provided on the board a20. However, in FIG. It overlaps what is located, and these are shown three by three.

The operating device a5 includes a flat rectangular base part a53 and support columns a54 provided upright on both sides of the base part a53. A pair of rails (not shown) are provided on both sides of the base part a53, and the board a20 is set on these rails.
A rail (not shown) is provided on the upper part of the column part a54, and a second board a25 is detachably provided on the rail.
The second board a25 is formed in a flat rectangular shape, substantially the same as the board a20, and is formed with screw holes a251 into which the screw members a51 are inserted. The screw member a51 penetrates the second board a25.

The movable shaft a52 includes a cylindrical member a521 provided on the same axis as the screw member a51, a rod-shaped member a522 (pressing member), and a constant load compression coil spring a523. The spring a523 is held inside the holder a524.
The rod-shaped member a522 has a tip portion penetrating through the hole a21 of the board a20. Further, a large diameter portion a522A is formed on the base end side of the rod-shaped member a522, and a spring a523 is locked between the large diameter portion a522A and the end portion of the cylindrical member a521. The large-diameter portion a522A is provided with a sensor a522B that detects the weight of the rod-shaped member a522.
The holder a524 is attached to a recess a20A formed in the board a20, and the cylindrical member a521 moves forward in the axial direction to compress the spring a523 with respect to the holder a524, and in the axial direction by restoring the spring a523. fall back.

In such an operation device a5, when the screw member a51 provided on the second board a25 is screwed, the cylindrical member a521 is pushed down, and the rod-like member a522 presses the valve a100 via the spring a523. When the screw member a51 is screwed in, when the valve a100 is pressed by the elastic member at the tip of the rod-shaped member a522, the spring a523 is compressed and the rod-shaped member a522 rises with respect to the board a20. Thereby, the force applied to the valve a100 is adjusted by the spring a523, and the load when screwing the screw member a51 is reduced so as not to destroy the microchip a0.
Further, the screw member a51 can be screwed in according to the weight of the rod-shaped member a522 detected by the sensor a522B, and thereby, the breakage of the valve a100 due to excessive screwing of the screw member a51 can be prevented more reliably.

  Here, when the screw member a51 is screwed, the rod-like member a522 is pressed against the valve a100 by the spring a523, but the fluid pressure of the sample RG in the flow path FA (see FIG. 24, etc.) exceeds a predetermined pressure. The valve a100 is pushed up by the fluid pressure of the sample RG. That is, the valve a100 is normally closed by the valve a100 so that the sample RG does not flow, and the valve a100 and the screw member that is a unit are also used as a safety valve that is opened when a predetermined pressure is applied to the flow path FA. a51 and movable axis a52 can be used.

According to this embodiment, in addition to the above-described effects, the following effects can be obtained.
(23) When the valve a100 is pressed by the rod-shaped member a522, the rod-shaped member a522 is urged by the spring a523 and rises with respect to the valve a100. Therefore, the rod-shaped member a522 collides with the valve a100 when the board a20 is lowered. Thus, the valve a100 can be prevented from being damaged.

(24) Further, in the screw member a51 and the movable shaft a52, the rod-like member a522 is pressed against the valve a100 by the constant load spring a523, so that the valve a100 can be used as a safety valve. Here, in the case of a safety valve, control such as turning on / off or arbitrarily adjusting the pressing force is not necessary, and therefore, the structure can be such that the force of the spring a523 is always applied. It can be simplified. By replacing this spring a523 with another spring having a different spring coefficient, the pressing force of the valve a100 can be changed.
In addition, by using a probe with a built-in spring instead of the movable shaft a52, it is possible to easily change the weight and further save space.

[Twelfth embodiment]
Next, a twelfth embodiment of the present invention will be described.
In the present embodiment, a pressing means for a valve different from the above-described embodiments is shown.
FIG. 26 shows a microchip a0 and a board a29 that face each other inside the operating device according to the present embodiment.

  A unit a55 configured as a pneumatic pressurizing device is attached to the board a29. An air outlet a291 that communicates with the inside of the unit a55 is provided at a position facing the valve a100 of the board a29. An O-ring a551 is interposed between the air outlet a291 and the microchip a0 around the valve a100, and the air outlet a291 and the valve a100 are airtight.

  With this configuration, when air pressure is started, the valve a100 is pressed toward the flow path FA by the pressure of the air ejected from the air outlet a291 of the board a29, and the flow of the sample RG in the flow path FA can be adjusted. It becomes.

(25) According to the present embodiment, since air pressure is used as the pressing means of the valve a100, a large pressure is obtained, and the flow path FA can be easily closed by deformation of the elastic member 32 included in the valve a100.

[Thirteenth embodiment]
Next, a thirteenth embodiment of the present invention is described.
The present embodiment is common to the twelfth embodiment in that air pressure is used.
FIG. 27 shows a microchip a0 and a board a29 that face each other inside the operating device according to the present embodiment.

  A unit a57 configured as a pneumatic pressurizing device is attached to the board a29. This unit a57 includes a cylinder a571 connected to a pressure generator a570 controlled by an external device PC inside the housing a57A, one end side inserted into the cylinder a571, and the other end side penetrating through the hole a21 of the board a29. And a movable shaft a572 facing the valve a100. A flange a572A is formed at the end of the movable shaft a572 inserted into the cylinder a571.

With this configuration, when the pressure generator a570 is operated, the flange a572A is pressed by the air pressure introduced into the cylinder a571 from the pressure generator a570 through the pipe a57B, and the movable shaft a572 is pushed down along the axial direction. The valve a100 is pressed.
According to the present embodiment, the same effects as those described in the twelfth embodiment can be obtained.
In the present embodiment, a hydraulic pressure capable of obtaining a larger pressure may be used instead of the air pressure.

[Fourteenth embodiment]
Next, a fourteenth embodiment of the present invention is described.
In the present embodiment, a pressing means for a valve different from the above-described embodiments is shown.
FIG. 28 shows a microchip a0 and a board a29 that face each other inside the operating device according to the present embodiment.

The board a29 is provided with a unit a58 that includes a stepping motor a581 as a driving source and a screw a582 and is configured as a pressing means.
The stepping motor a581 is disposed inside the housing a580 of the unit a58, and is driven by a pulse signal oscillated by a voltage controlled oscillator a59 controlled through the external device PC. Although not shown, the stepping motor a581 includes a coil, a stator excited by the coil, and a rotor rotated by a magnetic field excited inside the stator.
A hole a582A to which the output shaft a581A of the stepping motor a581 is attached is formed at one end portion of the screw a582, and the other end side is screwed into a screw hole a292 formed in the board a29 to the valve a100. opposite.

  When the voltage controlled oscillator a59 is operated in such a configuration, the screw a582 is screwed forward toward the valve a100 by the rotation of the stepping motor a581, that is, the rotational movement of the stepping motor a581 is the movement of the screw a582 in the axial direction. Is converted to And valve | bulb a100 is pressed by the front-end | tip of screw | thread a582, and the flow path FA is obstruct | occluded.

(26) According to the present embodiment, since the stepping motor a581 that is digitally controlled and has good controllability in adjusting the rotation angle, etc., is adopted as the pressing means of the valve a100, it is easy to control the pressing amount of the valve a100. Can be.
Compared to the case where the piezoelectric actuator a35 is employed as the pressing means of the valve a100 as in the tenth embodiment described above, heat generation is suppressed, no voltage application device is required, and the amount of displacement is more preferable. .
Further, since the stepping motor can be driven at a low current and a low voltage, an advantageous configuration can be realized in terms of downsizing and portability of the entire operation device.

[Fifteenth embodiment]
Next, a fifteenth embodiment of the present invention is described.
This embodiment shows a pressing means of a valve different from the above embodiments.
FIG. 29A shows the microchip a0 facing each other and the unit a60 provided on the board a27 inside the operating device in the present embodiment.

The unit a60 includes a cam a61 as an eccentric rotating body formed of an elastic member, and a casing (not shown) that pivotally supports the cam a61 and is attached to the board a27.
The cam a61 is arranged such that the shaft portion a611 is substantially parallel to the surface of the board a27 and the outer peripheral portion a612 is opposed to the surface of the valve a100. An output shaft of a stepping motor (not shown) is attached to the shaft portion a611 of the cam a61.

On the other hand, the board a27 is formed with a hole a271 in which the cam a61 is disposed.
The hole a271 is provided with a sheet member a63 that divides the outer periphery a612 of the cam a61 and the valve a100 in accordance with the position of the cam a61. It is fixed with screws a272. The sheet member a63 is in close contact with a portion of the board a27 that is fixed with the screw a272. In the present embodiment, the seat member a63 is slightly hung from the hole a271 toward the valve a100.

  The sheet member a63 shown in FIG. 29A is formed of a fluororesin-based material that is excellent in corrosion resistance and water repellency. When the sheet member a63 is deteriorated, the sheet member a63 can be replaced by removing the screw a272. Therefore, the sheet member a63 is inferior in corrosion resistance and water repellency to the fluororesin material, but polyethylene, polypropylene, vinyl chloride, urethane, PET, PMMA, etc. A sheet member made of an inexpensive material can also be used. Note that PET is suitable for transmitting force from the cam a61 to the valve a100 because it has little elongation and little elasticity.

In such a configuration, when the stepping motor connected to the cam a61 is operated, the eccentric rotation of the cam a61 changes the distance from the outer peripheral portion of the cam a61 that contacts the valve a100 to the shaft portion a611, and the valve a100 It can be repeatedly pressed at a predetermined cycle. Alternatively, in addition to pressing at a predetermined cycle as described above, it is also possible to stop the rotation of the cam a61 at the position where the valve a100 is pushed by the cam a61 and maintain the pressure of the valve a100.
When the valve a100 is pushed into the flow path FA by the cam a61, the flow path FA may be completely closed or the flow path FA may be partially closed.

(27) In this embodiment, since the valve a100 can be intermittently pressed at a predetermined cycle with a simple configuration using a cam, an intermittent plug flow can be realized in the flow of the sample RG in the flow path FA. . By such a plug flow, the samples RG can be easily mixed with each other, and the sample RG can be easily synthesized. In addition, the period which presses valve | bulb a100 is controllable by adjusting the shape of cam a61, rotational speed, etc. FIG.
On the other hand, it is possible to stop the rotation of the cam a61 and maintain the pressure of the valve a100 to maintain the flow of the sample RG in the flow path FA at a predetermined fluid pressure, flow velocity, and flow rate, that is, the operation of the cam a61. It is possible to easily cope with various uses of the valve a100 simply by changing.

(28) Since the sheet member a63 is provided, the sample RG does not adhere to the board a27 or the unit a60 even when the sample RG leaks from the flow path FA. Thereby, the cleanliness of the board a27 and the unit a60 can be ensured, and corrosion of the board a27 and the unit a60 can be prevented.

In this embodiment, an example in which the sheet member a63 is replaced with a sheet member a64 in which a plurality of layers are stacked is shown in FIG.
The sheet member a64 has a two-layer film structure, and the first layer film a641 on which the cam a61 slides is a low friction material having a low frictional resistance with the cam a61 such as fluororesin, polyethylene, polypropylene, PET, PMMA, etc. It is formed with.
On the other hand, the second layer film a642 in contact with the valve a100 is formed of a high friction material having a high frictional resistance with the board a27 and the valve a100, such as polypropylene, vinyl chloride, and silicone.
The first layer film a641 and the second layer film a642 are bonded to each other in the present embodiment. For example, the first layer film a641 may be coated on the second layer film a642. Alternatively, the first layer film a641 and the second layer film a642 may be simply superimposed.

In such a configuration, in the first layer film a641 of the sheet member a64, the cam a61 rotates smoothly with a small friction, and the load acting on the in-plane direction of the sheet member a64 by the rotation of the cam a61 is small. In particular, when the first layer film a641 is made of PET, since the PET has low elasticity, the cam a61 rotates more smoothly.
On the other hand, since the second layer film a642 of the seat member a64 has a large frictional resistance with the board a27, the seat member a64 does not shift at the valve a100 portion pressed by the cam a61, and the seat member a64 follows the rotation of the cam a61. Can be suppressed from being pulled and stretched.

With such a configuration, the following effects can be obtained.
(29) The sheet member a64 is composed of a first layer film a641 and a second layer film a642 having different frictional resistance with the board a27, and a sheet formed by sliding of the cam a61 by the first layer film a641 having a small frictional resistance. The member a64 can be prevented from being broken and the second layer film a642 having a high frictional resistance can reduce the elongation when the sheet member a64 is pulled by the cam a61.

[Sixteenth Embodiment]
Next, a sixteenth embodiment of the present invention will be described.
In each operation device in each of the embodiments described above, the flow of the sample RG in the flow path FA is reduced by pressing a valve disposed on the microchip. However, in this embodiment, in addition to the valve, a pump is provided on the microchip. If a sensor is provided, an operating device for operating these pumps and sensors is shown.

30 is a perspective view showing the inside of the operating device in the present embodiment, and FIG. 31 is a plan view of the inside of the operating device.
This embodiment includes a rail a12 that guides and holds the board a28, and the board a28 is detachably held on the rail a12, similarly to the operation device a5 described above. A microchip a00 is disposed below the board a28.

With reference to FIG. 31, a description will be given of the microchip a00 and the parts that block the flow path FAZ formed in the microchip a00.
Although the illustration of the microchip a00 is simplified, the microchip a00 has a flow path FAZ formed between two plate-like members laminated as in the above-described microchip a0. A plurality of holes 20 (FIG. 24) for inserting the closing parts to be closed are formed. In addition, the microchip a00 is formed with introduction ports 121 and 122 into which the samples RG1 and RG2 are introduced, respectively, and a discharge port 125 through which the sample RG is discharged.

  The flow path FAZ is formed on the side surface of the microchip a00 by reciprocating halfway in the longitudinal direction of the microchip a00 from the paths FA1 and FA2 extending from the introduction ports 121 and 122 and the junction JCT of the paths FA1 and FA2. A path FA3 extending to the discharge port 125 and a path FA4 branching in the middle of the path FA3 and extending to the discharge port 126 formed on the side surface of the microchip 00 are configured.

In the middle of the paths FA1 and FA2, one pump a101 composed of a plurality of closing members 100 (FIGS. 15 and 16) shown in the fourth embodiment is arranged one by one. In the vicinity of JCT, a pressure sensor a102 as a device portion for measuring fluid pressure of the sample RG is arranged. In addition, one valve a100 is arranged in front of the branch part BFR of the path FA3 and the path FA4, and three valves a100 are arranged one by one in the path FA3 and the path FA4 on the downstream side of the branch part BFR. Yes.
As the pressure sensor a102, the pressure sensor 91 in the weight detection type valve 90 shown in FIG. 12 in the second embodiment can be used. Alternatively, a load detection type valve 90 may be arranged instead of the pressure sensor a102. The diaphragm 911 (FIG. 12) of the pressure sensor a102 faces the flow path FAZ, and the diaphragm 911 constitutes a wall portion of the flow path FAZ. That is, by disposing the pressure sensor a102 in the hole 20 of the microchip 00, the wall surface side of the flow path FAZ is closed, and the sample RG can flow through the flow path FAZ. It functions as a closing member in the fluid control structure. The surface of the diaphragm 911 of the pressure sensor a102 and the wall surface of the flow path FAZ are substantially flush with each other so that the flow of the sample RG in the flow path FAZ is not hindered.

  In the microchip a00, a wiring pattern a102A made of an electrode made of Au or the like extends along the width direction of the microchip a00 beside each pressure sensor a102, and wiring pads a102A1 are provided at both ends of the wiring pattern a102A. , 102A2 are provided. The pad a102A1 is bonded to the pressure sensor a102 with a wire (not shown).

Next, with reference to FIG. 30 and FIG. 31, the configuration on the board a28 side corresponding to the valve a100, the pump a101, and the pressure sensor a102 as the closed parts provided in the microchip a00 will be described.
The board a28 is provided with a plurality of screw holes a21 corresponding to the valves a100, a long hole a281 corresponding to the pumps a101, and three holes a282 corresponding to the electrodes of the pressure sensors a102, respectively. Yes.

The screw type unit a30 is screwed into each screw hole a21.
Each hole a282 is formed at the position of each pad a102A2 of the wiring pattern a102A of the microchip a00, and a probe a72 is inserted into the hole a282 one by one and comes into contact with the pad a102A2. Here, since the probe a72 is provided, the board a28 of this embodiment is formed of an insulating material (for example, ceramics).
And each long hole a281 is provided along the direction where the closure member 100 in the pump a101 is arranged, and the pump unit a71 which drives the pump a101 is each arrange | positioned along this long hole a281.

The probe a72 is provided so that the height from the contact position can be adjusted by a built-in spring, and measures the fluid pressure of the sample RG in the flow path FAZ through the wiring pattern a102A. The probe a72 and the wiring pattern a102A are also units associated with the pressure sensor a102.
Although it is conceivable that the probe a72 is in direct contact with the pressure sensor a102, the wiring pattern a102A is formed as in this embodiment, and the pressure sensor a102 and the probe a72 are electrically connected at a position away from the pressure sensor a102. Thus, it is possible to prevent the pressure detection of the pressure sensor a102 from interfering with the probe a72 contact.
Here, a sensor unit (not shown) in which a circuit for processing an electrical signal detected by the pressure sensor a102 is unitized is connected to the probe a72, and the pressure sensor a102 includes the sensor unit and the probe a72. It functions as a unit corresponding to. The sensor unit has a structure for processing a signal and transmitting it to a personal computer or transmitting a specific signal like a transmitter.

FIG. 32 is a side view showing the pump unit a71.
The pump unit a71 includes a gear a711 as an eccentric rotating body formed of an elastic member, a holder a712 supporting the gear a711, a casing a713 fixed to the board a28, and a holder a712 inside the casing a713. The motor a715 which is a stepping motor is attached to the rotating shaft part a711A of the gear a711.
The outer peripheral part a711B of the gear a711 protrudes from the lower opening of the casing a713 and contacts the closing member 100 constituting the pump a101 through the long hole a281 of the board a28.
A sheet member a64 that partitions the gear a711 and the closing member 100 is provided, and the sheet member a64 is simplified in illustration, but as described above, the first layer film a641 and the first layer film a641. Are stacked (FIG. 29B). The sheet member a64 covers the entire board a28 in the present embodiment except for a specific portion where wiring or probe contact is necessary. In other words, the sheet member a64 is not provided in the portion of the hole a282 through which the probe a72 is inserted because of conduction between the pressure sensor a102 and the probe a72.
Here, for a portion where the sheet member a64 is easily worn by rotation of the gear a711, such as a portion where the pump unit a71 is provided, a sheet member a64 different from the sheet member a64 covering the entire board a28 is provided only at that portion. Alternatively, it may be configured to be replaceable when worn.

In such a pump unit a71, the rotation of the motor a715 is transmitted to the gear a711, and each tooth a711C as a large diameter portion provided in the gear a711 sequentially presses each closing member 100 of the pump a101 at a predetermined cycle. Accordingly, as described in the fourth embodiment (FIG. 16), the closing member 100 is repeatedly advanced and retracted with respect to the flow path FAZ, and the sample RG is pumped.
Further, since the sheet member a64 is interposed between the gear a711 and the closing member 100, the teeth a711C of the gear a711 are caught on the corners of the closing member 100 that are sequentially pushed in, and the closing member 100 is damaged. It can be prevented.

Returning to FIG. 31, the operation of the microchip a00 by the operation device of the present embodiment will be described.
Samples RG1 and RG2 are introduced into paths FA1 and FA2 from introduction ports 121 and 122 of microchip a00, respectively. Then, the pump a101 provided in each of the paths FA1 and FA2 is operated by the pump unit a71, and the samples RG1 and RG2 are pumped toward the joining portion JCT. At this time, the fluid pressure of the samples RG1 and RG2 is measured by the pressure sensor a102, and the potential indicating the measured value is transmitted to the probe a72 through the wiring pattern a102A.

  Then, the samples RG1 and RG2 merge at the junction JCT and flow through the path FA3 while reacting with each other. At this time, the valve a100 arranged in the path FA3 on the downstream side of the branch part BFR has a switching function between the paths FA3 and FA4. When the valve a100 is closed by pressing the unit a30, the sample RG is separated from the branch part BFR. It flows to the path FA4 side and is discharged from the discharge port 126. On the other hand, when the valve a100 is opened, the sample RG flows from the branch portion BFR to the path FA3 and is discharged from the discharge port 125. Note that the flow rate, flow velocity, fluid pressure, and the like of the sample RG in the flow path FAZ are appropriately adjusted by the other valve a100. About the sample RG discharged | emitted from the discharge ports 125 and 126, it introduce | transduces into the flow path of another microchip as needed. Or it collect | recovers in the tank etc. which are not illustrated.

  In such a flow path FAZ, the fluid pressure of the samples RG1 and RG2 measured by the pressure sensor a102 is taken into an external device such as a personal computer by the probe a72, and various analyzes and the like can be performed in such an external device. . It is also possible to perform control to feed back the driving of the pump a101 and the valve a100 based on the measured fluid pressure of the samples RG1 and RG2.

According to this embodiment, in addition to the above-described effects, the following effects can be obtained.
(30) The microchip a00 is integrated with a valve a100, a pump a101, a sensor a102, etc., which are operated by a unit a30, a pump unit a71, a probe a72, and a signal processing circuit (these are referred to as sensor units), respectively. As a result, more advanced fluid control is possible.

(31) Further, since the board a28 is held and guided by the rail a12 and can be detached from the operation device a1, various microchips, that is, the outer shape, the flow path pattern, the type of analysis, and the valve a100 to be arranged are arranged. It can be quickly replaced with an appropriate one according to the required drive specifications such as type and position.

(32) Further, since the unit a30 can be attached to and detached from the board a28, even if the closing part (the valve a100 in the above example) disposed on the microchip a0 has the same structure, (For example, when a spring is provided, the spring coefficient is also included) and the like can be exchanged. Thereby, operation | movement of the obstruction | occlusion component provided in microchip a00 can be changed.

(33) It should be noted that by adjusting the pitch and shape of the gear a711 in the pump unit a71, the rotation speed, etc., the cycle of pressing the closing member 100 can be controlled, and the discharge amount of the pump a101 can also be adjusted.

[Seventeenth embodiment]
Next, a seventeenth embodiment of the present invention is described.
This embodiment is characterized by the shape of the sheet member used in the sixteenth embodiment.
FIG. 33 shows a pump unit a71 that drives a pump a101 disposed in the microchip a00.
A sheet member a84 is provided between the pump a101 and the outer peripheral part a711B of the gear a711, and the sheet member a84 has an uneven shape on the back surface side.
Specifically, the sheet member a84 has convex portions a841 provided at substantially the same pitch as the pitch of the teeth a711C of the gear a711, and a concave portion a842 is formed between the convex portions a841.
Note that the sheet member a84 also has a multi-layer structure having a first layer and a second layer, similar to the sheet member a64 described above.

In the present embodiment, two protrusions a841 are formed so as to face the closing members 100 arranged at both ends of the four closing members 100 constituting the pump a101, and the two closing members 100 in the center are formed as a sheet. It arrange | positions in the recessed part a842 of the member a84.
Here, as for the shape of the convex part a841, the protrusion dimension becomes large gradually toward the outer side from the center side in the direction where the closure member 100 is located in a line.
In addition, the convex part a841 may protrude only in the sheet | seat member a84 and the part which opposes the closure member 100, or the direction (The front surface and back surface in FIG. 33) cross | intersect the direction where the closure member 100 was located in a line. May be formed as convex ribs extending in the direction connecting the two.

According to this embodiment, in addition to the above-described effects, the following effects can be obtained.
(34) When the tooth a711C of the gear a711 slides on the surface of the sheet member a84, the position of the tooth a711C substantially coincides with the position of the convex part a841, and the closing members 100 arranged at both ends are projected dimensions of the convex part a841. Therefore, the diameter of the gear a 711 can be reduced to reduce the size of the device, and the pressing amount of the closing member 100 can be increased.
On the other hand, since the two closing members 100 arranged near the center are arranged between the convex portions a841 and are hardly pressed, the pushing amounts of the two closing members 100 near the center and the closing members 100 at both ends are pushed. The capacity of the pump a101 can be increased.
In addition, since the convex portion a841 is formed, the height positions are substantially aligned between the closing member 100 at both ends pressed by the teeth a711C and the closing member 100 near the center that is not pressed, so the sheet member a84. The level difference is difficult to occur. As a result, the holder a712 and the gear a711 can slide on the sheet member a84 without moving up and down.

(35) Further, since the projecting dimension of the convex portion a841 is large at the end where the closing member 100 is arranged, and the cross-sectional shape of the convex portion a841 corresponds to the contact angle of the tooth a711C with the horizontal plane, the convex portion of the tooth a711C It is possible to push down the closing member 100 in a uniform direction when sliding a841. Accordingly, the pumping amount of the pump a101 can be set to a desired value based on the indentation dimension of the closing member 100.

[Eighteenth Embodiment]
Next, an eighteenth embodiment of the present invention will be described.
In the present embodiment, as in the sixteenth and seventeenth embodiments, in the configuration in which the pump a101 is provided in the microchip a00, the pressing means provided in the pump a101 is changed to another configuration.
FIG. 34 shows a microchip a00 and a cam a61 as a unit facing each other inside the operating device in the present embodiment.
As described above, the cam a61 is pivotally supported by a holder (not shown), and the outer peripheral portion a612 is disposed along the direction in which the closing members 100 are arranged.
In such a configuration, the blocking member 100 is sequentially pressed by the eccentric rotation of the cam a61, and the sample RG in the flow path FAZ is pumped.
According to the present embodiment, substantially the same effects as those described in the previous embodiments can be obtained.
In the present embodiment, a sheet member for partitioning the cam a61 and the closing member 100 is not provided. However, from the viewpoint of preventing the upper end portion of the closing member 100 from being caught or damaged during the rotation of the cam a61, the sheet member described above is used. Sheet members a64 and a84 are preferably provided.

[Modification of the present invention]
Although the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, the present invention is not limited to this. That is, the invention has been illustrated and described primarily with respect to particular embodiments, but may be configured for the above-described embodiments without departing from the scope and spirit of the invention. Various modifications can be made by those skilled in the art in terms of materials, quantity, and other detailed configurations.
Therefore, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  Here, in the valve 30 or the like in each of the above embodiments, the elastic member 32 is overlapped on the main body 31. However, the present invention is not limited to this, and the closing member of the present invention is provided by providing elastic members on the four side surfaces of the rectangular parallelepiped main body. May be configured. Even in such a configuration, when pressed into the hole of the microchip, the elastic member is in close contact with the peripheral edge of the hole and the wall of the flow path, so that the flow path can be closed as necessary to control the fluid A simple structure can be realized.

  Further, in each of the above embodiments, the valve 30 or the like is disposed in the microchip hole 20 and the end of the valve 30 or the like protrudes from the substrate 12 when no external force is applied to the valve 30 or the like. Instead, the thickness of the substrate may be thicker than the height of the closing member, and the closing member may be accommodated in the hole. With such a configuration, since the closing member does not protrude from the substrate surface, it is easy to use the microchip by inserting it into an insertion slot (slot) of the apparatus.

  In addition to being used for fluid control of the micro-channel, the blocking member may be used as a closing plug for blocking a spare hole formed in the microchip in a state where the hole is sealed without blocking the channel. Good.

In the third embodiment, the two valves 90 are arranged in the paths FA1 and FA2, respectively. However, as shown in FIG. 35, one valve 170 is arranged so as to straddle the two paths FA1 and FA2. It may be. The valve 170 is disposed in a hole 25 having a rectangular shape in plan view formed in the microchip 5. By pushing the valve 170 into the back of the hole 25, the paths FA1 and FA2 can be simultaneously closed with the same opening / closing amount, so that the fluid control of the samples RG1 and RG2 introduced into the paths FA1 and FA2 is easy. It becomes.
The valves 170 are similarly arranged in the paths FA3 and FA4 on the discharge side of the microchip 5, and the paths FA3 and FA4 can be simultaneously closed with the same opening / closing amount by the valve 170.

Furthermore, the modification of the pump in the said 4th Embodiment was shown to FIG. 36 and FIG.
In the pump 180 in FIG. 36, three closing members 181 to 183 are arranged side by side, and the central closing member 182 is formed larger than the closing members 181 and 183 on both sides. Further, the flow path FA bulges in a circular shape in plan view at a position where the central closing member 182 is disposed, and this is the pump chamber FAP. In such a pump 180, the volume of the pump chamber FAP and the liquid supply amount and the liquid supply pressure due to the advance and retreat of the closing members 181 to 183 to the flow path FA can be increased.
The closing members 181 to 183 that advance and retreat with respect to the pump chamber FAP may all be formed in the same size as the pump 190 in FIG.

  In addition, although the microchannel mentioned above was formed in the cross-sectional U shape, the cross-sectional shape of a microchannel may be V shape, trapezoid shape, square shape, etc.

  And when a mixer is implement | achieved by three valves, what is necessary is just to advance / retreat the closure member which comprises the valve arrange | positioned in the center among three toward a flow path. At this time, it is considered as an example that weights are alternately applied to both ends of the closing member in the direction along the flow path, and the both ends are alternately advanced and retracted toward the flow path.

  In the eighth embodiment and the like, the board a20 is held by the rail a12 and is abutted against the wall of the housing a11. However, the manner in which the board is incorporated in the operating device is not limited to this, for example, the side surface of the board A hole may be formed in the board, and a positioning pin may be inserted into the hole through a hole formed in the rail or the like to set and position the board on the operating device. The positioning pin may be provided on the board, and the hole may be provided on the housing or rail side of the operating device. Furthermore, if a positioning hole (recess) or the like is formed on the microchip, A positioning pin (convex portion) may be provided on the board side so as to match the position.

  Further, in the configuration in which the board a20 can be moved up and down as in the ninth embodiment, a sensor for detecting that the microchip is arranged in the microchip arrangement portion is provided, and after detecting the arrangement of the microchip by this sensor, It is good also as a structure which raises / lowers a board.

In each of the embodiments except for the eleventh embodiment, only one board is provided in the operating device, but two or more boards may be provided for one microchip. In other words, it is a board that collects products and wastes, etc., which is likely to be removed frequently, and a board that is not so, and by providing multiple boards, such as microchip analysis / synthesis Work can be speeded up.
Moreover, in one operating device, a plurality of sets of microchips and boards may be provided.
Further, in the fifteenth embodiment and the like, the seat member a64 provided on the board a20 and partitioning the cam a61 and the valve a100 has a two-layer structure, but is not limited thereto, and may be formed of one layer. A multilayer structure of three or more layers may be used. In addition, when forming a sheet | seat member by one layer, PP (polypropylene) or PET (polyethylene terephthalate) etc. are suitable.

  In the sixteenth embodiment, the probe a72 conducted to the pressure sensor a102 is shown as a unit. However, such a probe includes various sensors including a pressure sensor, an electroosmotic pump, a MEMS device, and the like. It may be used in conduction. That is, these sensors, electroosmotic pumps, MEMS devices, and the like may function as a single device by combining these blocking members and probes as blocking members that block the microchip channel.

Furthermore, although the pressure sensor a102 is illustrated in the sixteenth embodiment, sensors that can be used as the closing member are not limited to this, and temperature, pressure, flow rate, position, weight, concentration, bio, pH, position, load, and the like are detected. It is also possible to employ a detector for analyzing using light such as thermal lens analysis, fluorescence analysis, and absorbance analysis.
Here, when performing electrical sensing, as shown in the sixteenth embodiment, the sensor element portion (pressure sensor a102) is disposed in the hole of the microchip, and the circuit portion and the like are unitized, and these sensors are arranged. It is preferable to connect the element portion and the circuit portion with a probe or the like.

  In the sixteenth embodiment, the pump unit a71 for driving the pump a101 is shown. However, the unit for driving the pump a101 is not limited thereto, and for example, a piezoelectric element or the like can be used. In this case, a piezoelectric element is arranged for each of the plurality of closing members a100 constituting the pump a101, and a voltage is applied to these piezoelectric elements at an arbitrary frequency, whereby the closing member is pressed at an arbitrary period. Then, by changing the frequency of the applied voltage, the pressing cycle and the pump discharge amount can be adjusted.

In each of the above embodiments, a plurality of modes of the closing member and the corresponding unit are shown. In short, the closing member and the unit are combined with each other to form one device. It is not limited. For example, when chemical synthesis or cell culture is performed, a blocking member is provided at a spot where heating / cooling is required in a spot in the microchip channel, and a heater or a Peltier device is installed as a unit at a position corresponding to the blocking member. It is also possible to provide it.
The unit can be attached to and removed from the board by inserting the unit into the board hole and fixing it, screwing the unit into the board and fixing it, or sliding the unit into the slit formed on the surface or side of the board. There are methods such as wearing. That is, the holding of the unit by the board is not limited to the unit inserted through the hole formed in the board as in the above embodiments.

  In the seventeenth embodiment, the convex portion a841 is formed only on one side of the sheet member a84, but such a convex portion a841 may be formed at the same position on both sides of the sheet member.

  INDUSTRIAL APPLICABILITY The present invention can be used in the field of analysis and synthesis related to high-efficiency reaction of fluid in a micro space inside a microchip.

The disassembled perspective view of the microchip in 1st Embodiment of this invention. The top view of the microchip in the said embodiment. Sectional drawing of the microchip in the said embodiment. The perspective view of the valve | bulb in the said embodiment. The figure shown about adjustment of the opening-and-closing amount of the valve in the embodiment. The figure which shows the valve | bulb in 2nd Embodiment of this invention. The figure which shows the other valve | bulb in the said embodiment. The figure which shows the other valve | bulb in the said embodiment. The figure which shows the other valve | bulb in the said embodiment. The figure which shows the other valve | bulb in the said embodiment. The figure which shows the other valve | bulb in the said embodiment. The perspective view of the other valve | bulb in the said embodiment. Sectional drawing of the other valve | bulb in the said embodiment. The top view of the microchip in 3rd Embodiment of this invention. The top view of the microchip in 4th Embodiment of this invention. Sectional drawing of the pump in the said embodiment. The top view of the switching apparatus in 5th Embodiment of this invention. The top view of the mixer in 6th Embodiment of this invention. The top view of the injector in 7th Embodiment of this invention. The schematic perspective view of the operating device in 8th Embodiment of this invention. The side view which shows the inside of the operating device in the said embodiment. The top view which shows the inside of the operating device in the said embodiment. The side view which shows the inside of the operating device in 9th Embodiment of this invention. The sectional side view which shows operation | movement of the unit in 10th Embodiment of this invention. The sectional side view of the operating device in 11th Embodiment of this invention. The sectional side view which shows the unit of 12th Embodiment of this invention. The sectional side view which shows the unit of 13th Embodiment of this invention. A side sectional view showing a unit of a 14th embodiment of the present invention. A side sectional view showing a unit of a 15th embodiment of the present invention. The perspective view which shows the inside of the operating device of 16th Embodiment of this invention. The top view which shows the inside of the operating device in the said embodiment. The side view which shows the unit in the said embodiment. The side view which shows the unit in 17th Embodiment of this invention. The side view which shows the unit in 18th Embodiment of this invention. The top view of the microchip in the modification of this invention. The top view of the pump in the modification of this invention. The top view of the other pump in the modification of this invention.

Explanation of symbols

1-5, a0, a00 Microchip 11, 12 Substrate 14, 24 Groove 20, 25, 110 Hole 30, 40, 50, 55, 60, 70, 80, 90, 170, a100 Valve (a closing member constituting the valve )
31, 41, 71 Main body (member main body)
91 Pressure sensor (sensor)
32, 42, 52, 56, 62, 82 Elastic members 35, 85 Adhesive (filler)
100, 181 to 183 Blocking member 130 Switching device 150 Mixer 160 Injector 180, 190, a101 Pump 321 Surface 521, 561 Weir 911 Diaphragm 912 Holding body CNC Connection part CRS Intersection (connection part)
FA, FAA, FAB, FAC, FAM, FAZ Flow path FAA1 path (predetermined path)
FAA2 to FAA4 introduction route FAA5, FAA6 discharge route FAC1, FAC2 route (first route)
FAC3 injection route (second route)
RG, RG1-RG3 Sample (fluid)
a1, a4, a5 Operating device a10B Lifting adjustment screw a102 Pressure sensor (device part)
a121 Upper surface part (guide part)
a13 Case bottom (microchip placement part)
a20, a25 to a29 Board a30, a55, a57, 58, 60, 71, 72 Unit a35 Piezoelectric actuator a43 Plate a52 Spring built-in movable shaft (pressing member)
a61 Cam (Eccentric rotating body)
a63, a64, a84 Sheet member a352 Movable shaft (pressing member)
a353, a522B sensor (measures pressing force and pressing amount)
a354 Spring a411 Recessed part a412 Spring (constitutes advancing and retracting means)
a522 Bar-shaped member (pressing member)
a523 Spring a581 Stepping motor a582 Screw (pressing member)
a611 Shaft part a612 Outer peripheral part a641 First layer film a642 Second layer film a711 Gear (eccentric rotating body)
a711A Rotating shaft (shaft)
a711C tooth (large diameter part)
a714 Constant load spring a841 Convex part

Claims (39)

A microchip having a channel formed therein and a hole communicating with the channel;
A closing member inserted into the hole and closing the flow path;
The fluid control structure of a microchannel, wherein the closing member includes an elastic member at least in part. The fluid control structure for a microchannel according to claim 1,
The microchip fluid control structure, wherein the microchip is made of a hard material. In the fluid control structure of the microchannel according to claim 1 or 2,
A member main body provided with the elastic member;
The fluid flow control structure of a micro flow path, wherein the member main body is formed of a hard material. In the fluid control structure of the microchannel according to claim 3,
The elastic member is provided on the surface of the member body on the flow path side,
The microfluidic fluid control structure according to claim 1, wherein the elastic member and the member main body are provided with uniform thicknesses in the axial direction of the holes. In the fluid control structure of the microchannel according to claim 3 or 4,
The elastic member is provided on the surface of the member body on the flow path side,
The fluid control structure of a micro flow path, wherein the elastic member has a flat surface on the flow path side. In the microchannel fluid control structure according to any one of claims 1 to 3,
The fluid control structure for a micro flow path, wherein the elastic member has a dam portion protruding from the surface into the flow path. The fluid control structure for a microchannel according to any one of claims 1 to 6,
A microfluidic fluid control structure, wherein a diameter of the hole is larger than a width of the channel. In the fluid control structure of the microchannel according to any one of claims 1 to 7,
A microfluidic fluid control structure, wherein a filler having ductility and elasticity is interposed between an inner peripheral surface of the hole and the closing member. The fluid control structure for a microchannel according to any one of claims 1 to 8,
The closing member is pushed toward the flow path from the hole, and any one of the fluid flow rate, the fluid pressure, and the fluid flow rate in the flow path is adjusted by adjusting any one of the pushing amount and the pushing force. A fluid control structure of a microchannel characterized by the above. The microchannel fluid control structure according to any one of claims 1 to 9,
The fluid control structure of a microchannel, wherein the elastic member is formed of a highly corrosion-resistant material. In the fluid control structure of a microchannel according to any one of claims 1 to 10,
The fluid control structure of a microchannel, wherein the elastic member is hydrophilized. In the fluid control structure of a microchannel according to any one of claims 1 to 10,
The fluid control structure of a micro flow path, wherein the elastic member is water-repellent. The fluid control structure for a microchannel according to any one of claims 3 to 12,
The microfluidic fluid control structure according to claim 1, wherein the member main body is configured as a sensor that detects a load when the blocking member is pushed. The fluid control structure for a microchannel according to any one of claims 1 to 13,
At least one of the elastic member and the filler is formed of a gas permeable material. The fluid control structure for a microchannel according to any one of claims 1 to 14,
The micro-fluidic fluid control structure according to claim 1, wherein the closing member is provided so as to be capable of advancing and retreating with respect to the flow path so as to close the flow path. The fluid control structure of a microchannel according to claim 15,
The micro-channel fluid control structure according to claim 1, wherein the valve is a safety valve that opens when a fluid pressure in the channel exceeds a predetermined amount. The fluid control structure of a microchannel according to claim 15,
A plurality of the valves are arranged, and the fluid flow control structure of the micro flow path is characterized in that the closing members constituting these valves advance and retreat in order to form a pump. A blocking member that is inserted into a hole communicating with the flow path of the microchip formed inside, and closes the flow path,
A blocking member for a micro-channel, comprising an elastic member at least partially. A microchip used in the fluid control structure according to claim 1. A plurality of resin substrates are stacked on each other, and a flow path is configured by a plate surface of one of the substrates stacked on top of each other and a groove formed by depression from the plate surface of the other substrate, and the other substrate A microchip in which a hole penetrating through the groove is formed and an occlusion member that has an elastic member at least partially and is inserted into the hole to block the flow path are integrated and can be controlled by fluid. A method of manufacturing a microchip,
After inserting the filler having ductility and elasticity between the inner peripheral surface of the hole and the blocking member inserted in the hole, with the plate surface of the other substrate placed on a plane,
A method of manufacturing a fluid-controllable microchip, wherein the substrates are bonded to each other. A fluid control structure for a microchannel according to claim 15,
The flow path has a plurality of introduction paths extending respectively, and predetermined paths to which these introduction paths are connected,
The switching device is characterized in that the valve is provided at a portion where the introduction path is connected to the predetermined path, and the path of the fluid from the introduction path can be switched by opening and closing these valves. A fluid control structure according to claim 15,
The flow path has a predetermined path and a plurality of branch paths that extend so that the predetermined path branches,
The switching device is characterized in that the valves are respectively provided in portions of the branch path branched from the predetermined path, and the path of the fluid to the branch path can be switched by opening and closing these valves. A fluid control structure according to claim 15,
At least three of the valves are arranged side by side, and the flow path is partitioned by being closed by valves respectively disposed on both ends of these valves, and the blocking members constituting the remaining valves are partitioned. The component in the fluid is mixed by moving forward and backward with respect to the flow path. A fluid control structure according to claim 15,
The flow path includes a first path and a second path that extends along a direction intersecting the first path and is connected to the first path.
The second path has, on one end side, an inlet for fluid to be injected into the connection part with the first path,
The injector is provided in the vicinity of the connection portion, on the upstream side and the downstream side of the connection portion of the first path, and on the second path, respectively. The fluid control structure according to any one of claims 1 to 17, wherein the microchip has a plurality of the holes, and operates each of the blocking members inserted into the holes, respectively.
A microchip placement portion on which the microchip is placed;
A plurality of units each integrally operating with the respective closure members;
A board for holding each unit detachably;
A closing member operation device comprising: a board placement portion on which the board is detachably placed. In the closure member operation device according to claim 25,
The said board arrangement | positioning part has a guide part which guides the said board to the predetermined position where the said unit opposes the said closure member. The closure member operating device characterized by the above-mentioned. In the closure member operation device according to claim 25 or claim 26,
The closing member operating device is characterized in that the board is provided with an advancing / retreating means capable of advancing and retracting the board with respect to the microchip. The closure member operating device according to any one of claims 25 to 27,
The said unit has a press means to press the said closure member toward the said flow path from the said hole. The closure member operating device characterized by the above-mentioned. The closure member operating device according to claim 28,
The pressing means includes a drive source,
The driving source is any one of a piezoelectric actuator and a stepping motor. The closure member operating device according to claim 28 or claim 29,
A sensor for measuring either a pressing force or a pressing amount to the blocking member is provided in the pressing means. The closure member operating device according to any one of claims 28 to 30,
The pressing means includes a pressing member that penetrates the board and contacts the closing member, and a spring that biases the pressing member toward the closing member along the axial direction of the rod-shaped member. A closing member operating device. The closure member operating device according to any one of claims 28 to 31,
The pressing means is an eccentric rotating body whose distance from the shaft portion to the outer peripheral portion is not constant, and is provided so that the outer peripheral portion extends along the direction from the hole toward the flow path. apparatus. The closure member operating device according to claim 32,
A plurality of the blocking members are arranged,
The eccentric rotator is provided so that a circumferential direction thereof is along a direction in which the closing members are arranged, and by the rotation of the eccentric rotating body, the closing member is pressed so as to advance and retreat in order to function as a pump. A closing member operating device. The closure member operating device according to any one of claims 25 to 33,
The closing member has a device unit for detecting or operating the state of the fluid,
The said unit has a probe connected with the said device part. The obstruction | occlusion member operating device characterized by the above-mentioned. The closure member operating device according to any one of claims 25 to 34,
The board is provided with a sheet member that partitions the closing member and the unit. The closure member operating device according to claim 35,
The said sheet | seat member is corrosion resistance. The closure member operating device characterized by the above-mentioned. The closure member operating device according to claim 35 or claim 36,
The unit has a pressing means for pressing the blocking member from the hole toward the flow path, and is movable in a direction intersecting the pressing direction.
The closing member operating device characterized in that a low friction material that suppresses frictional resistance between the unit and the closing member is used for the sheet member. The closure member operating device according to claim 37,
The sheet includes a first layer film disposed on the unit side using the low friction material, and a first layer film disposed on the closing member side using a high friction material having a higher frictional resistance than the first layer film. A closing member operating device comprising a two-layer film. The closure member operating device according to claim 37 or claim 38,
The pressing means is an eccentric rotating body in which the distance from the shaft portion to the outer peripheral portion is not constant, and is provided so that the outer peripheral portion extends along the direction from the hole toward the flow path.
The closing member operating device according to claim 1, wherein a convex portion is formed on the seat according to a position where the distance to the shaft portion of the outer peripheral portion is in contact with a large diameter portion larger than the others.

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