CN103362786A - Minitype piezoelectric diaphragm pump - Google Patents
Minitype piezoelectric diaphragm pump Download PDFInfo
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Abstract
A minitype piezoelectric diaphragm pump comprises a bottom plate, piezoelectric oscillators, a frame body, a diaphragm, a cover plate, a discharge valve and an inlet valve, wherein the diaphragm is separated from a pump cavity and the piezoelectric oscillator, and is driven through the bending deformation of the piezoelectric oscillator to complete the liquid conveying. The minitype piezoelectric diaphragm pump is characterized in that the piezoelectric oscillator is rectangular and adopts a cantilever fixing structure, a bottom plane of a cantilever vibration part of the piezoelectric oscillator is in contact with a mounting supporting plane on the bottom plate in a propping manner to form a supporting structure. The minitype piezoelectric diaphragm pump further comprises the structure that the bottom plane of the cantilever vibration part of the piezoelectric oscillator in non-drive state is in complete contact with the mounting supporting plane of the bottom plate, an embedded cantilever is fixed between the bottom plate and the frame body, the displacement size of the diaphragm is larger than the size of the cantilever vibration part of the piezoelectric oscillator, and the gap size between the diaphragm and the mounting supporting plane is smaller than or equal to the thickness size of the cantilever vibration part of the piezoelectric oscillator. The diaphragm pump has the characteristics of high reliability and flow design controllability.
Description
Technical field
The invention belongs to the technical fields such as flow control, final controlling element, particularly a kind of piezoelectric micro diaphragm pump.
Background technique
Along with the development of electronic technology, adopt the piezoelectric pump of the inverse piezoelectric effect formation of piezo technology to realize gas or liquid conveying function.Generally speaking, form the chamber volume cavity between the flat-plate compressed electric tachometer indicator of piezoelectric pump and the housing, by curved Zhang Zhen's dynamic deformation change pump chamber volume of piezoelectric vibrator, realize that continuous negative pressure sucks and pressurization is discharged.
Most circle flat-plate compressed electric tachometer indicators or the square flat-plate compressed electric tachometer indicators of adopting of existing piezoelectric pump technology, this pump housing need to form the alms bowl type distressed structure that curved Zhang Zhen moves at plectane or square panel area fixed support, thereby causes the variation of cavity and suck or discharge fluid.The distortion maximum point of this structure causes the middle cardiac stress of piezoelectric vibrator to concentrate greatly and cause piezoelectric vibrator destruction in the central position of disk or square sheet; The toughness of piezoelectric ceramic wafer itself is also relatively relatively poor simultaneously, also easily causes the inefficacy of piezoelectric vibrator.The in addition electrical connection of piezoelectric vibrator or the on every side fixing integrity problem that all exists are very easy to the problem (Figure 24, Figure 25) that inequality or fault are installed in appearance.
Patent documentation 1 is mentioned a kind of piezoelectric micropump that drives based on the galleyproof type piezoelectric bimorph, drives diaphragm deflection by piezoelectric bimorph, thereby causes Wall deformation and carry fluid (Figure 26).Patent documentation 1 adopts the overhang supporting structure, and the stress of piezoelectric bimorph is concentrated will be significantly less than disk or square sheet type twin lamella, and the electrode connection reliability also obviously is better than the Disks structure; But there is the separation problem that is adhesively fixed of barrier film and piezoelectric bimorph in patent documentation 1, is very easy to cause the inefficacy that separates of piezoelectric bimorph and barrier film.
If the diaphragm pump that piezoelectric bimorph drives can be in conjunction with the advantage of above-mentioned piezoelectric vibrator and pump body structure, accomplish that convenient installation is fixing, the wire connection is safe and reliable, twin lamella bending deflection stress is concentrated little, the life-span of piezoelectric pump and reliability will significantly improve like this.
Patent documentation 1:
Chinese patent application numbers 99815775.9
Summary of the invention
Purpose of the present invention is exactly for overcoming the deficiency of above-mentioned background technology, for the electrode connection reliability problem that solves piezoelectric micropump and the vibration stress concentration problem of piezoelectric bimorph, and the design method of a kind of piezoelectric micro diaphragm pump that provides.
Technological scheme of the present invention is: a kind of piezoelectric micro diaphragm pump, comprise base plate, piezoelectric vibrator, framework, barrier film, cover plate, expulsion valve, enter the valve composition, barrier film separate pump cavity and piezoelectric vibrator, bending deflection by piezoelectric vibrator drives the distortion of barrier film and finishes the conveying fluid, it is characterized in that: piezoelectric vibrator is rectangle structure and adopts the overhang fixed structure, the base plane of the cantilever vibration part of piezoelectric vibrator contacts with the installation supporting plane conflict mode on the base plate, forms supporting structure.
According to a kind of piezoelectric micro diaphragm pump of the present invention, the base plane of the cantilever vibration of described piezoelectric vibrator part when its non-driving contacts fully with the installation supporting plane of base plate, forms plane supporting structure.
According to a kind of piezoelectric micro diaphragm pump of the present invention, described piezoelectric vibrator is that embedded cantilever is fixed between base plate and the framework.
According to a kind of piezoelectric micro diaphragm pump of the present invention, the movable size of described barrier film is greater than the cantilever vibration part of piezoelectric vibrator, and all there is blank section cantilever vibration part left part, right part, the front portion of the corresponding piezoelectric vibrator of barrier film.
According to a kind of piezoelectric micro diaphragm pump of the present invention, the gap size between the installation supporting plane of described barrier film and base plate is less than or equal to the thickness size of piezoelectric vibrator cantilever vibration part, makes the cantilever vibration part of barrier film contact or compression piezoelectric vibrator.
According to a kind of piezoelectric micro diaphragm pump of the present invention, use above-mentioned piezoelectric vibrator array and the multiple pressure electric tachometer indicator list barrier film or the two barrier film piezoelectric micropump that form.
Above-mentioned base plate is installed supporting surface can adopt the harder material identical with the base plate housing, also can adopt rubber elastomeric material bed course.Barrier film can adopt silicone rubber, urethane rubber elastomeric material; Also available metal material, but its Young's modulus less than 20MPa, thickness less than 0.1mm.Contact preferably between piezoelectric vibrator and the barrier film, can adopt the elastic adhesive combination identical with barrier film, also the resiliently deformable of reliable barrier film is adjacent to piezoelectric vibrator.
Adopt piezoelectric micro pumping method of the present invention, the installation that can simplify piezoelectric vibrator be electrically connected, the vibration stress that has solved simultaneously piezoelectric bimorph is concentrated, can obtain by assembled arrangement simultaneously the pump housing of different flow, have the characteristics reliable, that piezoelectric vibrator is installed simply, reliability is high, the life-span is long, flow design is controlled that are electrically connected.
Description of drawings
Fig. 1 list piezoelectric vibrator pump body structure schematic diagram
Fig. 2 is along the sectional view of the A-A direction line of Fig. 1
The structure schematic top plan view of Fig. 3 base plate
Fig. 4 is along the sectional view of the B-B direction line of Fig. 3
The structure left view of Fig. 5 base plate
Fig. 6 is along the sectional view of the C-C direction line of Fig. 3
The plan view of Fig. 7 piezoelectric vibrator, partial sectional view and plan view
The structural representation of Fig. 8 piezoelectric driving plate
The structure plan view of Fig. 9 framework
Figure 10 is along the sectional view of the D-D direction line of Fig. 9
The structure worm's eye view of Figure 11 framework
The structure left view of Figure 12 framework
The action deformation pattern of the single-row piezoelectric pump of Figure 13 individual layer
The driving principle of Figure 14 piezoelectric driving plate and distortion schematic diagram
The driving voltage curve of Figure 15 piezoelectric pump and flow schematic diagram
The piezoelectric vibrator arrange diagram of Figure 16 3 * 1 * 1 array
The piezoelectric vibrator arrange diagram of Figure 17 1 * 2 * 1 array
The action deformation pattern of Figure 18 single-layer double-row piezoelectric pump
The piezoelectric vibrator arrange diagram of Figure 19 3 * 2 * 1 array
The action deformation pattern of Figure 20 Double-layer single-row piezoelectric pump (the upper and lower layers drive voltage signal is identical)
The action deformation pattern of Figure 21 Double-layer single-row piezoelectric pump (the upper and lower layers drive voltage signal is opposite)
The action deformation pattern of Figure 22 Double-layer double-row piezoelectric pump (the upper and lower layers drive voltage signal is identical)
The action deformation pattern of Figure 23 Double-layer double-row piezoelectric pump (the upper and lower layers drive voltage signal is opposite)
Figure 24 piezoelectric vibrator is the piezoelectric pump structural representation of disk
Figure 25 is along the sectional view of the E-E direction line of Figure 24
The piezoelectric pump structural representation of Figure 26 patent documentation 1
Among the above-mentioned figure: 1. base plate; 2. piezoelectric vibrator; 3. framework; 4. barrier film; 5. cover plate; 6. expulsion valve; 7. enter valve; 8. cavity; 101. the first locating slot; 102. the second locating slot; 103. rectangular recess; 104. positioning chamber; 105. installation supporting plane; 106. pressure coupling hole; 201. piezoelectric driving plate; 202. piezoelectric driving plate fixed connecting piece; 203. connection jack; 2011. bonding glue-line; 2012. conductive electrode layer; 2013. upper piezoelectrics; 2014. lower piezoelectric body; 2015. glass fiber reinforced epoxy resin pad; 2016. copper-foil conducting electricity; 301. compression boss; 302. rectangular cavity; 303. enter tap hole; 401. barrier film left margin section; 402. the right blank section of barrier film; 403. blank section before the barrier film.
Embodiment
Below by embodiment, and by reference to the accompanying drawings, technological scheme of the present invention is described in further detail.
Embodiment 1
Embodiment 1 is single chamber piezoelectric micro diaphragm pump that single piezoelectric vibrator consists of, shown in Fig. 1～15.The piezoelectric micro diaphragm pump by base plate 1, piezoelectric vibrator 2, framework 3, barrier film 4, cover plate 5, expulsion valve 6, enter valve 7 and form (Fig. 1, Fig. 2).Piezoelectric vibrator 2 is installed in the installation cavity of base plate 1 and framework 3 formation, and barrier film 4 is placed on the top of piezoelectric vibrator cantilever vibration part, forms cavitys 8 with framework 3, cover plate 5.Arch bending or warpage bending deflection by piezoelectric vibrator 2 drive the distortion of barrier film 3, and then cause the variation of pump cavity 8 volume sizes, finish entering and discharge process of fluid.
Base plate 1 is formed by resin material, part forms the rectangular recess 103 of piezoelectric vibrator cantilever vibration part in the central, rectangular recess 103 depth dimensions be equal to or slightly less than the thickness size of the cantilever vibration part of piezoelectric vibrator 2, be convenient to piezoelectric vibrator 2 and contact with barrier film 4; Below rectangular recess 103, open vibration pressure coupling hole 106, prevent that the cantilever vibration of piezoelectric vibrator from partly forming vibration negative-pressure; The installation supporting plane 105 of rectangular recess 103 is whole plane, and the base plane of the piezoelectric vibrator cantilever vibration part during with non-the driving is adjacent to and contacts; There is the positioning chamber 104 that piezoelectric vibrator is installed the end, and both sides have and prevent the first locating slot 101 that piezoelectric vibrator 2 slides and second locating slot 102(Fig. 3～Fig. 6).
The cantilever vibration of piezoelectric vibrator 2 partly is rectangular, mainly is comprised of piezoelectric driving plate 201, piezoelectric driving plate fixed connecting piece 202, connection jack 203; Wherein piezoelectric driving plate 201 consists of (Fig. 7, Fig. 8) by bonding glue-line 2011, conductive electrode layer 2012, upper piezoelectrics 2013, lower piezoelectric body 2014, glass fiber reinforced epoxy resin pad 2015, copper-foil conducting electricity 2016.Connection jack 203 is welded to each other with piezoelectric driving plate 201 and is communicated with rear location, the embed wholly injection moulding is fixed on and forms piezoelectric vibrator 2 in the piezoelectric driving plate fixed connecting piece 202, and the connecting contact pin row mother that the electrical connection of piezoelectric vibrator 2 then is with connecting contact pin matches directly is inserted into to be connected to form in the jack 203 and is electrically connected.The left part of the cantilever vibration part of piezoelectric vibrator 2, right part, inside edge anterior and rectangular recess 103 form the interval, blank section 403 before the corresponding barrier film left margin in this interval section 401, the right blank section 402 of barrier film, the barrier film.
Framework 3 is also formed by resin material, by compression boss 301, the rectangular cavity 302 of fixing piezoelectric vibrator 2, enter the funtion parts such as tap hole 303 and form (Fig. 9～Figure 12).The part of the lower surface of framework 3 and base plate 1 complement each other to form piezoelectric vibrator 2 and install with fixing, and the upper surface of other parts and barrier film 4 is mutually bonding.
Barrier film 4 adopts the soft resin materials such as rubber, and boundary dimension cooperates measure-alike outside the installation piezoelectric vibrator 2 with base plate 1, framework 3.
Cover plate 5 adopts resin material to form, and is identical with the apparent size of framework 3, and mutually bonding with the upper surface of framework 3.Form pump cavity 8 by bonding cover plate 5, framework 3, barrier film 4.
Figure 13 is the action deformation pattern of the present embodiment piezoelectric micro diaphragm pump.The present embodiment piezoelectric bimorph polarizes in " negative positive and negative " mode, adopts positive biasing periodic voltage to drive respectively piezoelectrics 2013 or lower piezoelectric body 2014(Figure 14).The polarization mode of upper piezoelectrics 2013, lower piezoelectric body 2014 polarizes according to " negative positive and negative " mode among Figure 14 a, and P is the piezoelectrics polarised direction among the figure.Upper piezoelectrics 2013, lower piezoelectric body 2014 respectively independent positive voltages drive, E is for to apply direction of an electric field to piezoelectrics among the figure, and the lower surface electrode of the upper surface electrode of upper piezoelectrics 2013 and lower piezoelectric body 2014 adopts wire to interconnect and draw wire and forms the ground wire zero potential.The driving voltage U1 that wherein goes up piezoelectrics 2013 is added between the lower surface electrode and zero potential of piezoelectrics 2013; The driving voltage U2 of lower piezoelectric body 2014 is added between the upper surface electrode and zero potential of lower piezoelectric body 2014, and the waveform of driving voltage U1, U2 can adopt cycle positive bias voltage after the rectification.
Figure 14 a is that upper piezoelectrics 2013, lower piezoelectric 2014 are not all executed alive nature, piezoelectric vibrator does not deform, be in off working state, this moment, the installation supporting plane of top and the bottom and barrier film 3 and base plate of cantilever vibration part of piezoelectric vibrator fitted tightly that (Figure 13 a) together.When instantly applying positive voltage U2=Vdc on the piezoelectrics 2014, the driving voltage U1=0V of upper piezoelectrics 2013 namely is in the short circuit dischange state, and lower piezoelectric body 2014 does not produce inverse piezoelectric effect deformation because inverse piezoelectric effect shrinks and go up piezoelectrics 2013 at this moment; Because it is former thereby stop that the cantilever vibration part of piezoelectric vibrator is out of shape downwards that the installation supporting plane of the lower plane of the cantilever vibration of piezoelectric vibrator part and base plate is adjacent to mutually, but form the simply supported beam bending deflection structure (shown in Figure 14 b dotted line) of an end fixed support, an end free support, this moment, lower piezoelectric body 2014 drove the arch bending deflection that makes progress of whole piezoelectric vibrator, cavity 8 pressed volume this moment diminish (Figure 13 b), expulsion valve is opened, enter valve and close, fluid expulsion.When applying positive voltage U1=Vdc on the upper piezoelectrics 2013, this moment lower piezoelectric body 2014 driving voltage U2=0V, namely be in the short circuit dischange state, upper piezoelectrics 2013 shrink because of inverse piezoelectric effect, and lower piezoelectric body 2014 does not produce inverse piezoelectric effect deformation, shown in Figure 14 c dotted line, the cantilever vibration that upper piezoelectrics 2013 the drive whole piezoelectric vibrator heating bending distortion of partly tilting upward, cavity 8 pressed volume this moment this moment diminish (Figure 13 c), expulsion valve is opened, enter valve and close, fluid is also discharged.As the driving voltage U1 of piezoelectrics up and down, when U2 is 0V, cavity 8 returns to original state, and (Figure 13 a), expulsion valve cuts out, and enters valve and opens, and fluid flows into.Fluid delivery operation is finished in the in the manner described above alternate type work under cycling voltage separately of upper piezoelectrics 2013 and lower piezoelectric body 2014.
Because the distortion of any direction of piezoelectric vibrator all causes barrier film to the distortion of cavity one side, causes the cavity compression, fluid expulsion, therefore whole fluid expulsion is substantially uninterrupted.But because arch amount of deformation and the support force of the simply supported beam of an end fixed support, an end free support are greater than the only overhang buckling deformation amount of an end fixed support, therefore the flow of arch deformation ratio buckling deformation is large, causes the pump housing to drive the large flow discharge of working procedure and (seeing Figure 15) alternately occur with the small flow discharge.
It is long that the up and down piezoelectrics of the piezoelectric driving plate of the present embodiment are of a size of 45mm() * 16mm(is wide) * 0.25mm(is thick), glass fiber reinforced epoxy resin spacer thickness 0.25mm; Driving voltage U1=+120V, U2=+120V rectangular wave.Good according to the piezoelectric micropump performance characteristic that adopts the above-mentioned parameter preparation.
Embodiment 2
The present embodiment is multiple pressure electric tachometer indicator single chamber piezoelectricity diaphragm pump side by side, with three piezoelectric vibrators side by side (be called for short 3 * 1 * 1 and arrange, lower with) describe for example.Piezoelectric vibrator in the embodiment 1 is as the basic driver unit, adopts side by side mode to arrange a plurality of piezoelectric vibrators, can the enlarged cavities volume, and increase the Wall deformation amount, thereby increase the quantity delivered of fluid.Compare with embodiment 1, base plate, framework, barrier film, cover plate are along the size constancy of piezoelectric vibrator length direction, and the size of width direction increases according to arranging; The installation of three piezoelectric vibrators causes base plate slightly different with single piezoelectric vibrator from the installation and positioning structure of framework (seeing Figure 16).
One side that is connected electrically in the pump housing of piezoelectric vibrator connects and can realize, the up and down piezoelectrics drive voltage signal of three piezoelectric vibrators is synchronous, except size difference, flow are different, all with embodiment 1.There is large flow and the small flow of periodic process equally in certain this structure.
It is long that the up and down piezoelectrics of the piezoelectric driving plate of the present embodiment are of a size of 45mm() * 16mm(is wide) * 0.25mm(is thick), glass fiber reinforced epoxy resin spacer thickness 0.25mm; Driving voltage U1=+120V, U2=+120V rectangular wave.Through test, the pump housing flow of the present embodiment is 3 times of embodiment 1 substantially.
Embodiment 3
The present embodiment be two to row structure (1 * 2 * 1 array) two piezoelectric vibrator lists chamber piezoelectricity diaphragm pump.Piezoelectric vibrator in the embodiment 1 adopts row's mode is arranged two electric tachometer indicators as the basic driver unit.Compare with embodiment 1, base plate, framework, barrier film, cover plate are along the size constancy of piezoelectric vibrator width direction, and the size of length direction increases according to arranging; The installation of two piezoelectric vibrators causes base plate different with single piezoelectric vibrator from the installation and positioning structure of framework (seeing Figure 17).
The both sides that are connected electrically in the pump housing of piezoelectric vibrator connect and can realize, the up and down piezoelectrics drive voltage signal of two piezoelectric vibrators is synchronous, and the situation of change of piezoelectric vibrator, barrier film, cavity as shown in Figure 18.There is dividing of small-large flow equally in this structure.
It is long that the up and down piezoelectrics of the piezoelectric driving plate of the present embodiment are of a size of 45mm() * 16mm(is wide) * 0.25mm(is thick), glass fiber reinforced epoxy resin spacer thickness 0.25mm; Driving voltage U1=+120V, U2=+120V rectangular wave.Through test, the pump housing flow of the present embodiment is 2 times of embodiment 1 substantially.
Embodiment 4
The present embodiment is single chamber pump of individual layer three rows, two row (3 * 2 * 1 arranges).Piezoelectric vibrator in the embodiment 1 adopts 3 * 2 * 1 to arrange six piezoelectric vibrators as the basic driver unit.Compare with embodiment 1, base plate, framework, barrier film, cover plate all increase according to arranging along piezoelectric vibrator length direction, width direction; The installation and positioning structure that installation causes base plate and framework is also according to the arrayed mounting point, position (Figure 19) of piezoelectric vibrator.
The both sides that are connected electrically in the pump housing of piezoelectric vibrator connect and can realize, the up and down piezoelectrics drive voltage signal of six piezoelectric vibrators is synchronous, and the situation of change of piezoelectric vibrator, barrier film, cavity is with embodiment 3, and there be dividing of small-large flow equally in this structure.
It is long that the up and down piezoelectrics of the piezoelectric driving plate of the present embodiment are of a size of 45mm() * 16mm(is wide) * 0.25mm(is thick), glass fiber reinforced epoxy resin spacer thickness 0.25mm; Driving voltage U1=+120V, U2=+120V rectangular wave.Through test, the pump housing flow of the present embodiment is 6 times of embodiment 1 substantially.
Embodiment 5
The present embodiment is two barrier film list cavity piezoelectric pumps that double-deck six piezoelectric vibrators (3 * 1 * 2 arrange) form.3 * 1 * 1 arrange piezoelectric pump as elementary cell in the embodiment 2, carry out the piezoelectric pump design of two barrier films.The whole pump housing is by upper and lower bottom plate, framework, upper lower diaphragm plate, the row pressure electric tachometer indicator forms up and down; Upper and lower bottom plate, barrier film full symmetric, measure-alike (Figure 20).The fluid chamber of pump is comprised of upper lower diaphragm plate, framework, and piezoelectric vibrator is installed fixing by base plate and framework.
One side that is connected electrically in the pump housing of two-layer piezoelectric vibrator connects up and down.When the up and down piezoelectrics drive voltage signal of two-layer piezoelectric vibrator up and down was synchronous, the situation of change of piezoelectric vibrator, barrier film, cavity was seen Figure 20.Upper row pressure electric tachometer indicator and the lower row pressure electric tachometer indicator that can find out this situation apply in the voltage course any, the distortion that overarches of one deck piezoelectric vibrator, another layer is then done buckling deformation, and the amount of deformation of whole fluid chamber in drive cycle is identical, does not have dividing of small-large flow.
When the up and down piezoelectrics drive voltage signal of two-layer piezoelectric vibrator up and down was opposite, the situation of change of piezoelectric vibrator, barrier film, cavity was seen Figure 21.Upper row pressure electric tachometer indicator and the lower row pressure electric tachometer indicator that can find out this situation apply in the voltage course any, bilevel piezoelectric vibrator overarches simultaneously and is out of shape or buckling deformation, the amount of deformation of whole fluid chamber in drive cycle is different, has dividing of small-large flow.
It is long that the up and down piezoelectrics of the piezoelectric driving plate of the present embodiment are of a size of 45mm() * 16mm(is wide) * 0.25mm(is thick), glass fiber reinforced epoxy resin spacer thickness 0.25mm; Driving voltage U1=+120V, U2=+120V rectangular wave.Through test, the pump housing flow of the present embodiment is 6 times of embodiment 1 substantially.
Embodiment 6
The present embodiment is two barrier film list cavity piezoelectric pumps that double-deck 12 piezoelectric vibrators (3 * 2 * 2 arrange) form.
3 * 2 * 1 arrange piezoelectric pump as elementary cell in the embodiment 4, carry out the piezoelectric pump design of two barrier films.The whole pump housing is by upper and lower bottom plate, framework, upper lower diaphragm plate, the row pressure electric tachometer indicator forms up and down, and upper and lower bottom plate, barrier film full symmetric are measure-alike.The fluid chamber of pump is comprised of upper lower diaphragm plate, framework, and piezoelectric vibrator is fixed by symmetrical installation of base plate and framework both sides.
The both sides that are connected electrically in the pump housing of two-layer piezoelectric vibrator connect up and down.When the up and down piezoelectrics drive voltage signal of two-layer piezoelectric vibrator up and down was synchronous, the situation of change of piezoelectric vibrator, barrier film, cavity was seen Figure 22.Upper row pressure electric tachometer indicator and the lower row pressure electric tachometer indicator that can find out this situation apply in the voltage course any, the distortion that overarches of one deck piezoelectric vibrator, another layer is then done buckling deformation, and the amount of deformation of whole fluid chamber in drive cycle is identical, does not have dividing of small-large flow.
When the up and down piezoelectrics drive voltage signal of two-layer piezoelectric vibrator up and down was opposite, the situation of change of piezoelectric vibrator, barrier film, cavity was seen Figure 23.Upper row pressure electric tachometer indicator and the lower row pressure electric tachometer indicator that can find out this situation apply in the voltage course any, bilevel piezoelectric vibrator overarches simultaneously and is out of shape or buckling deformation, the amount of deformation of whole fluid chamber in drive cycle is different, has dividing of small-large flow.
It is long that the up and down piezoelectrics of the piezoelectric driving plate of the present embodiment are of a size of 45mm() * 16mm(is wide) * 0.25mm(is thick), glass fiber reinforced epoxy resin spacer thickness 0.25mm; Driving voltage U1=+120V, U2=+120V rectangular wave.Through test, the pump housing flow of the present embodiment is 12 times of embodiment 1 substantially.
Adopt piezoelectric micropump of the present invention, the installation that can simplify piezoelectric vibrator be electrically connected, solved simultaneously the vibration stress concentration problem of piezoelectric vibrator, and the different array combination of piezoelectric vibrator can obtain the pump housing of different flow, so the present invention has the characteristics reliable, that installation is simple, reliability is high, the life-span is long, flow design is controlled that are electrically connected.
Claims (6)
1. piezoelectric micro diaphragm pump, comprise base plate (1), piezoelectric vibrator (2), framework (3), barrier film (4), cover plate (5), expulsion valve (6), entering valve (7) forms, barrier film (4) separate pump cavity (8) and piezoelectric vibrator (2), bending deflection by piezoelectric vibrator (2) drives the distortion of barrier film (3) and finishes the conveying fluid, it is characterized in that: piezoelectric vibrator (2) is rectangle structure and adopts the overhang fixed structure, the base plane of the cantilever vibration part of piezoelectric vibrator contacts with installation supporting plane (105) the conflict mode on the base plate, forms supporting structure.
2. a kind of piezoelectric micro diaphragm pump according to claim 1 is characterized in that: the base plane of the cantilever vibration part of piezoelectric vibrator (2) when its non-driving contacts the formation plane supporting structure fully with the installation supporting plane (105) of base plate.
3. a kind of piezoelectric micro diaphragm pump according to claim 1, it is characterized in that: piezoelectric vibrator (2) is that embedded cantilever is fixed between base plate (1) and the framework (3).
4. a kind of piezoelectric micro diaphragm pump as claimed in claim 1, it is characterized in that: the movable size of barrier film (4) is greater than the size of the cantilever vibration part of piezoelectric vibrator (2), and all there is blank section cantilever vibration part left part, right part, the front portion of the corresponding piezoelectric vibrator of barrier film.
5. such as claim 1,5 described a kind of piezoelectric micro diaphragm pumps, it is characterized in that: the gap size between the installation supporting plane (105) of barrier film (4) and base plate (1) is less than or equal to the thickness size of piezoelectric vibrator (2) cantilever vibration part, makes the cantilever vibration part of barrier film (4) contact or compression piezoelectric vibrator (2).
6. piezoelectric micro diaphragm pump is characterized in that: comprise the piezoelectric vibrator array of claim 1, claim 4, claim 5 and the multiple pressure electric tachometer indicator list barrier film or the two barrier film piezoelectric micropump that form.
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| CN106062439A (en) * | 2014-03-20 | 2016-10-26 | 住友橡胶工业株式会社 | Structure for securing diaphragm, diaphragm pump and valve device provided with said structure, and method for securing diaphragm |
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| CN107328730A (en) * | 2017-07-05 | 2017-11-07 | 中电科技集团重庆声光电有限公司 | Complete or collected works' accepted way of doing sth infrared gas sensor and its method of work |
| CN107575365A (en) * | 2017-09-30 | 2018-01-12 | 苏州攀特电陶科技股份有限公司 | Piezoelectric pump and electronic product |
| CN107795466A (en) * | 2016-09-05 | 2018-03-13 | 研能科技股份有限公司 | The manufacture method of fluid control device |
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