CN103362786B - A kind of Minitype piezoelectric diaphragm pump - Google Patents
A kind of Minitype piezoelectric diaphragm pump Download PDFInfo
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- CN103362786B CN103362786B CN201310292377.4A CN201310292377A CN103362786B CN 103362786 B CN103362786 B CN 103362786B CN 201310292377 A CN201310292377 A CN 201310292377A CN 103362786 B CN103362786 B CN 103362786B
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Abstract
A kind of Minitype piezoelectric diaphragm pump, including bottom plate, piezoelectric vibrator, framework, diaphragm, cover board, dump valve, into valve group at, pump housing and piezoelectric vibrator is isolated in diaphragm, drives the deformation of diaphragm by the flexural deformation of piezoelectric vibrator by completes trandfer fluid, it is characterized in that：Piezoelectric vibrator is rectangle structure and cantilever beam fixed structure, the bottom plane of the cantilever vibration part of piezoelectric vibrator is used to contradict mode with the installation supporting plane on bottom plate and contact, and forms support construction.Originally further include the installation supporting plane full contact of bottom plane and bottom plate of the cantilever vibration part of the piezoelectric vibrator of invention when its is non-driven, and embedded cantilever is fixed between bottom plate and framework；And the movable size of diaphragm be more than piezoelectric vibrator cantilever vibration part and diaphragm and installation supporting plane between gap size be less than or equal to piezoelectric vibrator cantilever vibration part thickness.The present invention has the characteristics that reliability is high, flow design is controllable.
Description
Technical field
The invention belongs to technical fields such as flow control, actuators, more particularly to a kind of Minitype piezoelectric diaphragm pump.
Background technology
With the development of electronic technology, the piezoelectric pump formed using the inverse piezoelectric effect of piezo technology realizes gas or liquid
Conveying function.Under normal circumstances, chamber volume cavity is formed between the tablet piezoelectric vibrator and shell of piezoelectric pump, passes through piezoelectric vibrator
Flextensional vibration deformation change pump chamber volume, realize continuous negative pressure sucking and pressurization discharge.
Existing piezoelectric pump technology majority is needed using circle tablet piezoelectric vibrator or square tablet piezoelectric vibrator, this pump housing
Fixed support, forms the alms bowl type distressed structure of flextensional vibration around plectane or square plate, sucked so as to cause the variation of cavity or
Fluid is discharged.The deformation maximum point of this structure leads to the middle cardiac stress collection of piezoelectric vibrator in disk or the center of square piece
In it is big and piezoelectric vibrator is caused to destroy；The toughness of piezoelectric ceramic wafer itself is also relatively poor simultaneously, also easily causes piezoelectricity and shakes
The failure of son.In addition there is integrity problem in the electrical connection of piezoelectric vibrator or surrounding fixation, be very easy to occur installing uneven
Or the problem of failure（Figure 24, Figure 25）.
Patent document 1 mentions a kind of piezoelectric micropump driven based on long strip type piezoelectric bimorph, by piezoelectric bimorph band
Dynamic diaphragm deflection, the trandfer fluid so as to cause Wall deformation（Figure 26）.Patent document 1 uses cantilever beam support construction, piezoelectricity
The stress concentration of twin lamella will be significantly less than disk or square piece type twin lamella, electrode connection reliability are also significantly better than Disks
Structure；But patent document 1 is very easy to lead to piezoelectric bimorph there are the separation problem that is adhesively fixed of diaphragm and piezoelectric bimorph
The separation of piece and diaphragm is failed.
If the diaphragm pump of piezoelectric bimorph driving can be accomplished conveniently in conjunction with the advantages of above-mentioned piezoelectric vibrator and pump body structure
Installation is fixed, conducting wire connection is safe and reliable, twin lamella flexural deformation stress concentration is small, and the service life of such piezoelectric pump and reliability are just
It can be greatly improved.
Patent document 1：Chinese Patent Application No. 99815775.9.
Invention content
The purpose of the present invention is exactly to overcome the shortcomings of above-mentioned background technology, in order to solve the electrode connection of piezoelectric micropump
The vibration stress concentration problem of integrity problem and piezoelectric bimorph, and a kind of design side of the Minitype piezoelectric diaphragm pump provided
Method.
The technical scheme is that：A kind of Minitype piezoelectric diaphragm pump, including bottom plate, piezoelectric vibrator, framework, diaphragm, lid
Pump housing and piezoelectric vibrator is isolated at, diaphragm into valve group in plate, dump valve, and the flexural deformation for passing through piezoelectric vibrator drives diaphragm
Deformation and complete trandfer fluid, it is characterized in that：Piezoelectric vibrator is rectangle structure and cantilever beam fixed structure, piezoelectricity is used to shake
The bottom plane of the cantilever vibration part of son contradicts mode with the installation supporting plane on bottom plate and contacts, and forms support construction.
The cantilever vibration part of a kind of Minitype piezoelectric diaphragm pump according to the present invention, the piezoelectric vibrator is non-driven at its
When bottom plane and bottom plate installation supporting plane completely attach to, formed plane supporting structure.
A kind of Minitype piezoelectric diaphragm pump according to the present invention, the piezoelectric vibrator be embedded cantilever be fixed on bottom plate with
Between framework.
The movable size of a kind of Minitype piezoelectric diaphragm pump according to the present invention, the diaphragm is more than the outstanding of piezoelectric vibrator
Arm oscillating component, and cantilever vibration part left part, right part, front that diaphragm corresponds to piezoelectric vibrator have gutter.
Gap between the installation supporting plane of a kind of Minitype piezoelectric diaphragm pump according to the present invention, the diaphragm and bottom plate
Size is less than or equal to the thickness of piezoelectric vibrator cantilever vibration part, and membrane contacts or the cantilever of compression piezoelectric vibrator is made to shake
Dynamic part.
A kind of Minitype piezoelectric diaphragm pump according to the present invention, the multiple pressure electric tachometer indicator formed using above-mentioned piezoelectric vibrator array
Single diaphragm or double diaphragm piezoelectric micropumps.
Harder material identical with bottom plate shell may be used in above-mentioned bottom plate installation supporting surface, and the elasticity such as rubber can also be used
Mat of material.Silicon rubber, polyurethane rubber elastomeric material may be used in diaphragm；Also metal material, but its Young's modulus can be used
It is less than 0.1mm less than 20MPa, thickness.It contacts best between piezoelectric vibrator and diaphragm, elastic adhesive identical with diaphragm can be used
Agent combines, and also the flexible deformation of reliable diaphragm is adjacent to piezoelectric vibrator.
Piezoelectric micro pumping method using the present invention, can simplify the installation of piezoelectric vibrator and be electrically connected, and solve simultaneously
The vibration stress of piezoelectric bimorph is concentrated, while the pump housing of different flow can be obtained by assembled arrangement, has electrical connection can
It leans on, piezoelectric vibrator installs the controllable feature of simple, reliability height, long lifespan, flow design.
Description of the drawings
The mono- piezoelectric vibrator pump body structure schematic diagrames of Fig. 1
Sectional views of the Fig. 2 along the A-A direction lines of Fig. 1
The structure schematic top plan view of Fig. 3 bottom plates
Sectional views of the Fig. 4 along the B-B direction lines of Fig. 3
The structure left view of Fig. 5 bottom plates
Sectional views of the Fig. 6 along the C-C direction lines of Fig. 3
Front view, partial sectional view and the vertical view of Fig. 7 piezoelectric vibrators
The structural schematic diagram of Fig. 8 piezoelectric driving plates
The structure top view of Fig. 9 frameworks
Sectional views of the Figure 10 along the D-D direction lines of Fig. 9
The structure upward view of Figure 11 frameworks
The structure left view of Figure 12 frameworks
The action deformation pattern of the single-row piezoelectric pump of Figure 13 single layers
The driving principle and deformation schematic diagram of Figure 14 piezoelectric driving plates
The driving voltage curve and flow schematic diagram of Figure 15 piezoelectric pumps
The piezoelectric vibrator arrangement figure of 3 × 1 × 1 arrays of Figure 16
The piezoelectric vibrator arrangement figure of 1 × 2 × 1 arrays of Figure 17
The action deformation pattern of Figure 18 single-layer double-row piezoelectric pumps
The piezoelectric vibrator arrangement figure of 3 × 2 × 1 arrays of Figure 19
The action deformation pattern of Figure 20 Double-layer single-row piezoelectric pumps（Levels drive voltage signal is identical）
The action deformation pattern of Figure 21 Double-layer single-row piezoelectric pumps（Levels drive voltage signal is opposite）
The action deformation pattern of Figure 22 Double-layer double-row piezoelectric pumps（Levels drive voltage signal is identical）
The action deformation pattern of Figure 23 Double-layer double-row piezoelectric pumps（Levels drive voltage signal is opposite）
Figure 24 piezoelectric vibrators are the piezoelectric pump structural schematic diagram of disk
Sectional views of the Figure 25 along the E-E direction lines of Figure 24
The piezoelectric pump structural schematic diagram of Figure 26 patent documents 1
In above-mentioned figure：1. bottom plate；2. piezoelectric vibrator；3. framework；4. diaphragm；5. cover board；6. dump valve；7. entering valve；8.
Cavity；101. the first locating slot；102. the second locating slot；103. oblong depressions；104. positioning chamber；105. installation support is flat
Face；106. pressure match hole；201. piezoelectric driving plate；202. piezoelectric driving plate fixedly connected parts；203. connection jacks；2011.
It is bonded glue-line；2012. conductive electrode layer；2013. upper piezoelectrics；2014. lower piezoelectric body；2015. glass fiber reinforced epoxy
Fat pad piece；2016. copper-foil conducting electricity；301. compression boss；302. rectangle cavitys；303. enter tap；The left sky of 401. diaphragms
White portion；The right gutter of 402. diaphragms；Gutter before 403. diaphragms.
Specific implementation mode
Below with reference to the embodiments and with reference to the accompanying drawing the technical solutions of the present invention will be further described.
Embodiment 1
Embodiment 1 is the single-chamber Minitype piezoelectric diaphragm pump that single piezoelectric vibrator is constituted, as shown in Fig. 1~15.Piezoelectric micro every
Membrane pump by bottom plate 1, piezoelectric vibrator 2, framework 3, diaphragm 4, cover board 5, dump valve 6, form into valve 7（Fig. 1, Fig. 2）.Piezoelectric vibrator
2 are mounted in the installation cavity that bottom plate 1 is formed with framework 3, and diaphragm 4 is placed on the top of piezoelectric vibrator cantilever vibration part,
Cavity 8 is formed with frame 3, cover board 5.The deformation of diaphragm 3 is driven by the arch bending or wrap bend deformation of piezoelectric vibrator 2,
And then cause the variation of 8 volume size of pump housing, complete entrance and the discharge process of fluid.
Bottom plate 1 is formed by resin material, and part forms the oblong depressions of piezoelectric vibrator cantilever vibration part at its center
103, the depth dimensions of oblong depressions 103 are equal to or slightly less than the thickness of the cantilever vibration part of piezoelectric vibrator 2, just
It is contacted with diaphragm 4 in piezoelectric vibrator 2；Vibration pressure mating hole 106 is opened in the lower section of oblong depressions 103, prevents piezoelectric vibrator
Cantilever vibration part formed vibration negative-pressure；The installation supporting plane 105 of rectangular recess 103 is entire plane, and non-driven
When the bottom plane of piezoelectric vibrator cantilever vibration part be adjacent to contact；There are the positioning chamber 104 of installation piezoelectric vibrator, both sides in end
There are the first locating slot 101 and the second locating slot 102 for preventing piezoelectric vibrator 2 from sliding（Fig. 3~Fig. 6）.
The cantilever vibration part of piezoelectric vibrator 2 is rectangle, is mainly fixed and is connected by piezoelectric driving plate 201, piezoelectric driving plate
Fitting 202, connection jack 203 form；Wherein piezoelectric driving plate 201 is by bonding glue-line 2011, conductive electrode layer 2012, upper piezoelectricity
Body 2013, lower piezoelectric body 2014, glass fiber reinforced epoxy resin gasket 2015, copper-foil conducting electricity 2016 are constituted（Fig. 7, Fig. 8）.Even
Jointing holes 203 are welded to each other with piezoelectric driving plate 201 be connected to after position, whole embedded injection molding, which is fixed on piezoelectric driving plate and fixes, to be connected
Piezoelectric vibrator 2 is formed in fitting 202, and the electrical connection of piezoelectric vibrator 2 is then female with the matched connecting contact pin row of connecting contact pin
It is directly inserted into connection jack 203 and forms electrical connection.Left part, right part, front and the length of the cantilever vibration part of piezoelectric vibrator 2
The inside edge of square-shaped recess 103 forms interval, which corresponds to diaphragm left margin portion 401, the right gutter 402 of diaphragm, diaphragm
Preceding gutter 403.
Framework 3 is also is formed by resin material, by the compression boss 301 of fixation piezoelectric vibrator 2, rectangle cavity 302,
It is formed into funtion parts such as taps 303（Fig. 9~Figure 12）.A part for the lower surface of framework 3 and 1 mutual cooperation shape of bottom plate
It is installed at piezoelectric vibrator 2 and fixed, other parts and the upper surface of diaphragm 4 are mutually bonded.
Diaphragm 4 using the soft resins material such as rubber, appearance and size and bottom plate 1, the cooperation installation of framework 3 piezoelectric vibrator 2 it
Outer size is identical.
Cover board 5 is formed using resin material, identical as the apparent size of framework 3, and mutually viscous with the upper surface of framework 3
It connects.Pump housing 8 is formed by being bonded cover board 5, framework 3, diaphragm 4.
Figure 13 is the action deformation pattern of the present embodiment Minitype piezoelectric diaphragm pump.The present embodiment piezoelectric bimorph is with " negative and positive is just
It is negative " mode polarizes, upper piezoelectrics 2013 or lower piezoelectric body 2014 are respectively driven using positive biasing period voltage（Figure 14）.On
Piezoelectrics 2013, lower piezoelectric body 2014 polarization mode polarize according to " negative and positive is positive and negative " mode in Figure 14 a, in figure P be piezoelectricity
Body polarization direction.Individually positive voltage drives for upper piezoelectrics 2013, lower piezoelectric body 2014, and E is to apply electricity to piezoelectrics in figure
Field direction, the upper surface electrode of upper piezoelectrics 2013 are connected with each other and are drawn using conducting wire with the lower surface electrode of lower piezoelectric body 2014
Go out conducting wire and forms ground wire zero potential.The wherein above driving voltage U1 of piezoelectrics 2013 is added in the lower surface electrode of piezoelectrics 2013
Between zero potential；The driving voltage U2 of lower piezoelectric body 2014 be added in lower piezoelectric body 2014 upper surface electrode and zero potential it
Between, period positive bias voltage after rectification may be used in the waveform of driving voltage U1, U2.
Figure 14 a are upper piezoelectrics 2013, lower piezoelectric 2014 does not all apply alive nature, and piezoelectric vibrator is not sent out
Change shape, is in off working state, the at this time installation of the top and the bottom and diaphragm 3 and bottom plate of the cantilever vibration part of piezoelectric vibrator
Supporting plane fits closely together（Figure 13 a）.When applying positive voltage U2=Vdc on piezoelectrics 2014 instantly, upper piezoelectrics
2013 driving voltage U1=0V is in short circuit dischange state, lower piezoelectric body 2014 is shunk because of inverse piezoelectric effect at this time,
And upper piezoelectrics 2013 do not generate inverse piezoelectric effect deformation；Because the lower plane of the cantilever vibration part of piezoelectric vibrator and bottom plate
The reason of supporting plane is mutually adjacent to is installed and stops that the cantilever vibration part of piezoelectric vibrator deforms downwards, but it is solid to form one end
It supports calmly, the freely-supported beam deformed structure of one end free support（As shown in Figure 14 b dotted lines）, the drive of lower piezoelectric body 2014 at this time
The entire upward arch flexural deformation of piezoelectric vibrator, at this time 8 pressed volume of cavity become smaller（Figure 13 b）, dump valve is opened, into valve pass
It closes, fluid discharge.When applying positive voltage U1=Vdc on upper piezoelectrics 2013, the driving voltage U2 of lower piezoelectric body 2014 at this time
=0V is in short circuit dischange state, upper piezoelectrics 2013 are because inverse piezoelectric effect is shunk, and lower piezoelectric body 2014 does not generate
Inverse piezoelectric effect deformation, as shown in Figure 14 c dotted lines, upper piezoelectrics 2013 drive the cantilever vibration part of entire piezoelectric vibrator upward
Wrap bend deforms, and 8 pressed volume of cavity becomes smaller at this time（Figure 13 c）, dump valve opening, into valve closing, fluid is also arranged
Go out.When driving voltage U1, U2 of upper and lower piezoelectrics are 0V, cavity 8 returns to original state（Figure 13 a）, dump valve closing,
It is opened into valve, fluid flows into.Upper piezoelectrics 2013 and lower piezoelectric body 2014 can be according to upper under respective cycling voltage
The work of mode alternative expression is stated, fluid delivery operation is completed.
It is deformed to cavity side since the deformation of piezoelectric vibrator any direction results in diaphragm, causes cavity to compress, fluid
Discharge, therefore entire fluid discharge is substantially uninterrupted.But it is fixed and is supported due to one end, the arch of the simply supported beam of one end free support
Deformation amount and support force are greater than the cantilever beam buckling deformation amount that support is fixed in only one end, therefore arch deformation ratio warpage becomes
The flow of shape is big, and pump housing driving course of work big flow discharge is caused to be alternately present with the discharge of small flow（See Figure 15）.
The size of piezoelectrics up and down of the piezoelectric driving plate of the present embodiment is 45mm（It is long）×16mm（It is wide）×0.25mm（It is thick）,
Glass fiber reinforced epoxy resin spacer thickness 0.25mm；Driving voltage U1=+120V, U2=+120V rectangular wave.According to adopting
The piezoelectric micropump working characteristics prepared with above-mentioned parameter is good.
Embodiment 2
The present embodiment is the single-chamber piezoelectricity membrane pump of multiple pressure electric tachometer indicator side by side, side by side with three piezoelectric vibrators（Referred to as 3 × 1
× 1 arrangement, similarly hereinafter）For illustrate.Using the piezoelectric vibrator in embodiment 1 as basic driver unit, arranged using side-by-side configuration
Multiple piezoelectric vibrators are arranged, Wall deformation amount can be increased, with enlarged cavities volume to increase the conveying capacity of fluid.With embodiment 1
It compares, bottom plate, frame, diaphragm, cover board are along the size constancy of piezoelectric vibrator length direction, and the size of width direction is according to arrangement
Increase；The installation of three piezoelectric vibrators causes the installation and positioning structure of bottom plate and frame to be slightly different with single piezoelectric vibrator（See
Figure 16）.
The connection on one side for being connected electrically in the pump housing of piezoelectric vibrator can be realized, the driving of piezoelectrics up and down of three piezoelectric vibrators
Voltage signal synchronizes, in addition to size difference, flow difference, with embodiment 1.Certain this structure equally exists periodic process
Big flow and small flow.
The size of piezoelectrics up and down of the piezoelectric driving plate of the present embodiment is 45mm（It is long）×16mm（It is wide）×0.25mm（It is thick）,
Glass fiber reinforced epoxy resin spacer thickness 0.25mm；Driving voltage U1=+120V, U2=+120V rectangular wave.By surveying
Examination, the pump housing flow of the present embodiment is substantially 3 times of embodiment 1.
Embodiment 3
The present embodiment is two panels to arranging structure（1 × 2 × 1 array）Double piezoelectric vibrator single-chamber piezoelectricity membrane pumps.To implement
Piezoelectric vibrator in example 1 is basic driver unit, and two electric tachometer indicators are arranged using to row's mode.Compared with Example 1, bottom plate,
Frame, diaphragm, cover board along piezoelectric vibrator width direction size constancy, and the size of length direction according to arrangement increase；Two
The installation of piezoelectric vibrator causes bottom plate different with single piezoelectric vibrator from the installation and positioning structure of frame（See Figure 17）.
The both sides connection for being connected electrically in the pump housing of piezoelectric vibrator can be realized, the driving of piezoelectrics up and down of two piezoelectric vibrators
Voltage signal synchronize, piezoelectric vibrator, diaphragm, cavity situation of change as shown in Figure 18.This structure equally exists small-large flow
Point.
The size of piezoelectrics up and down of the piezoelectric driving plate of the present embodiment is 45mm（It is long）×16mm（It is wide）×0.25mm（It is thick）,
Glass fiber reinforced epoxy resin spacer thickness 0.25mm；Driving voltage U1=+120V, U2=+120V rectangular wave.By surveying
Examination, the pump housing flow of the present embodiment is substantially 2 times of embodiment 1.
Embodiment 4
The present embodiment arranges for three row two of single layer（3 × 2 × 1 arrangement）Single-chamber pump.Using the piezoelectric vibrator in embodiment 1 as base
This driving unit, using 3 × 2 × 1 six piezoelectric vibrators of arrangement.Compared with Example 1, bottom plate, frame, diaphragm, cover board are along pressure
Electric tachometer indicator length direction, width direction increase all in accordance with arrangement；Installation cause the installation and positioning structure of bottom plate and frame also according to
The position array of piezoelectric vibrator arranges installation site（Figure 19）.
The both sides connection for being connected electrically in the pump housing of piezoelectric vibrator can be realized, the driving of piezoelectrics up and down of six piezoelectric vibrators
Voltage signal synchronize, piezoelectric vibrator, diaphragm, cavity situation of change with embodiment 3, this structure equally exist small-large flow it
Point.
The size of piezoelectrics up and down of the piezoelectric driving plate of the present embodiment is 45mm（It is long）×16mm（It is wide）×0.25mm（It is thick）,
Glass fiber reinforced epoxy resin spacer thickness 0.25mm；Driving voltage U1=+120V, U2=+120V rectangular wave.By surveying
Examination, the pump housing flow of the present embodiment is substantially 6 times of embodiment 1.
Embodiment 5
The present embodiment is double-deck six piezoelectric vibrators（3 × 1 × 2 arrangements）The double diaphragm single-chamber body piezoelectric pumps formed.To implement
3 × 1 × 1 arrangement piezoelectric pump in example 2 is basic unit, carries out the piezoelectric pump design of double diaphragms.The entire pump housing by upper and lower bottom plate,
Framework, upper lower diaphragm plate, upper and lower row pressure electric tachometer indicator composition；Upper and lower bottom plate, diaphragm are full symmetric, and size is identical（Figure 20）.The stream of pump
Body cavity body is made of upper lower diaphragm plate, framework, and piezoelectric vibrator is fixed by bottom plate and framework installation.
The connection on one side for being connected electrically in the pump housing of upper layer and lower layer piezoelectric vibrator.When the upper lower piezoelectric of upper layer and lower layer piezoelectric vibrator
Body drive voltage signal synchronize when, piezoelectric vibrator, diaphragm, cavity situation of change see Figure 20.It can be seen that such case is upper
Row pressure electric tachometer indicator and lower row pressure electric tachometer indicator are in any applications voltage course, and one, which is laminated electric tachometer indicator, overarches deformation, and another layer is then
Buckling deformation is done, deflection of the entire fluid chamber in drive cycle is identical, and there is no points of small-large flow.
When the drive voltage signal of piezoelectrics up and down of upper layer and lower layer piezoelectric vibrator is opposite, piezoelectric vibrator, diaphragm, cavity
Situation of change is shown in Figure 21.It can be seen that the upper row pressure electric tachometer indicator of such case with lower row pressure electric tachometer indicator in any application voltage course
In, bilevel piezoelectric vibrator overarches deformation or buckling deformation simultaneously, deformation of the entire fluid chamber in drive cycle
Amount is different, and there are points of small-large flow.
The size of piezoelectrics up and down of the piezoelectric driving plate of the present embodiment is 45mm（It is long）×16mm（It is wide）×0.25mm（It is thick）,
Glass fiber reinforced epoxy resin spacer thickness 0.25mm；Driving voltage U1=+120V, U2=+120V rectangular wave.By surveying
Examination, the pump housing flow of the present embodiment is substantially 6 times of embodiment 1.
Embodiment 6
The present embodiment is double-deck 12 piezoelectric vibrators（3 × 2 × 2 arrangements）The double diaphragm single-chamber body piezoelectric pumps formed.
Using 3 × 2 × 1 arrangement piezoelectric pump in embodiment 4 as basic unit, the piezoelectric pump design of double diaphragms is carried out.Entirely
The pump housing is made of upper and lower bottom plate, framework, upper lower diaphragm plate, upper and lower row pressure electric tachometer indicator, and upper and lower bottom plate, diaphragm are full symmetric, size phase
Together.The fluid chamber of pump is made of upper lower diaphragm plate, framework, and piezoelectric vibrator is symmetrically installed fixation by bottom plate and framework both sides.
The both sides connection for being connected electrically in the pump housing of upper layer and lower layer piezoelectric vibrator.When the upper lower piezoelectric of upper layer and lower layer piezoelectric vibrator
Body drive voltage signal synchronize when, piezoelectric vibrator, diaphragm, cavity situation of change see Figure 22.It can be seen that such case is upper
Row pressure electric tachometer indicator and lower row pressure electric tachometer indicator are in any applications voltage course, and one, which is laminated electric tachometer indicator, overarches deformation, and another layer is then
Buckling deformation is done, deflection of the entire fluid chamber in drive cycle is identical, and there is no points of small-large flow.
When the drive voltage signal of piezoelectrics up and down of upper layer and lower layer piezoelectric vibrator is opposite, piezoelectric vibrator, diaphragm, cavity
Situation of change is shown in Figure 23.It can be seen that the upper row pressure electric tachometer indicator and lower row pressure electric tachometer indicator of such case are in any application voltage course
In, bilevel piezoelectric vibrator overarches deformation or buckling deformation simultaneously, deformation of the entire fluid chamber in drive cycle
Amount is different, and there are points of small-large flow.
The size of piezoelectrics up and down of the piezoelectric driving plate of the present embodiment is 45mm（It is long）×16mm（It is wide）×0.25mm（It is thick）,
Glass fiber reinforced epoxy resin spacer thickness 0.25mm；Driving voltage U1=+120V, U2=+120V rectangular wave.By surveying
Examination, the pump housing flow of the present embodiment is substantially 12 times of embodiment 1.
Piezoelectric micropump using the present invention, can simplify the installation of piezoelectric vibrator and be electrically connected, while solve piezoelectricity
The vibration stress concentration problem of oscillator, and the different array combinations of piezoelectric vibrator can obtain the pump housing of different flow, therefore this
Invention has the characteristics that electrical connection is reliable, it is controllable to install simple, reliability height, long lifespan, flow design.
Claims (5)
1. a kind of Minitype piezoelectric diaphragm pump, including bottom plate (1), piezoelectric vibrator (2), framework (3), diaphragm (4), cover board (5), discharge
Valve (6) is formed into valve (7), and pump housing (8) and piezoelectric vibrator (2) is isolated in diaphragm (4), is become by the bending of piezoelectric vibrator (2)
Shape drives the deformation of diaphragm (4) and completes trandfer fluid, it is characterized in that：Piezoelectric vibrator (2) is rectangle structure and uses cantilever
Beam fixed structure, installation supporting plane (105) conflict side in the bottom plane and bottom plate of the cantilever vibration part of piezoelectric vibrator
Formula contacts, and forms support construction；Piezoelectric vibrator (2) is that embedded cantilever is fixed between bottom plate (1) and framework (3)；
The cantilever vibration part of piezoelectric vibrator (2) is rectangle, including：Piezoelectric driving plate (201), piezoelectric driving plate are fixedly connected
Part (202), connection jack (203)；Wherein, piezoelectric driving plate (201) includes：It is bonded glue-line (2011), conductive electrode layer
(2012), upper piezoelectrics (2013), lower piezoelectric body (2014), glass fiber reinforced epoxy resin gasket (2015), copper-foil conducting electricity
(2016)；Connection jack (203) is welded to each other with piezoelectric driving plate (201) be connected to after position, it is whole to be embedded in injection molding and is fixed on pressure
Form piezoelectric vibrator (2) in electric drive piece fixedly connected part (202), and the electrical connection of piezoelectric vibrator (2) is then and connecting contact pin
Matched connecting contact pin row mother, which is directly inserted into connection jack (203), forms electrical connection.
2. a kind of Minitype piezoelectric diaphragm pump according to claim 1, it is characterized in that：The cantilever vibration portion of piezoelectric vibrator (2)
Divide the installation supporting plane (105) of the bottom plane and bottom plate when its is non-driven to completely attach to, forms plane supporting structure.
3. a kind of Minitype piezoelectric diaphragm pump as described in claim 1, it is characterized in that：The movable size of diaphragm (4) is more than pressure
The size of the cantilever vibration part of electric tachometer indicator (2), and diaphragm corresponds to the cantilever vibration part left part, right part, front of piezoelectric vibrator
There is gutter.
4. a kind of Minitype piezoelectric diaphragm pump as described in claim 1, it is characterized in that：Diaphragm (4) and the installation of bottom plate (1) support
Gap size between plane (105) is less than or equal to the thickness of piezoelectric vibrator (2) cantilever vibration part, makes diaphragm (4)
Contact or the cantilever vibration part for compressing piezoelectric vibrator (2).
5. a kind of Minitype piezoelectric diaphragm pump, it is characterized in that：It shakes including claim 1 or the piezoelectricity of claim 3 or claim 4
Subarray and the multiple pressure electric tachometer indicator list diaphragm or double diaphragm piezoelectric micropumps formed.
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| JP5952848B2 (en) * | 2014-03-20 | 2016-07-13 | 住友ゴム工業株式会社 | Diaphragm fixing structure, diaphragm pump and valve device including the same, and diaphragm fixing method |
| CN107795466B (en) * | 2016-09-05 | 2020-03-10 | 研能科技股份有限公司 | Method for manufacturing fluid control device |
| CN108506197A (en) * | 2017-02-24 | 2018-09-07 | 研能科技股份有限公司 | Fluid delivery system |
| CN107328739B (en) * | 2017-07-05 | 2019-11-26 | 中电科技集团重庆声光电有限公司 | Complete or collected works' accepted way of doing sth infrared gas sensor and its working method |
| CN107328730B (en) * | 2017-07-05 | 2019-11-26 | 中电科技集团重庆声光电有限公司 | Complete or collected works' accepted way of doing sth infrared gas sensor and its working method |
| CN107575365B (en) * | 2017-09-30 | 2023-05-26 | 苏州攀特电陶科技股份有限公司 | Piezoelectric pump and electronic product |
| CN109695562A (en) * | 2018-05-25 | 2019-04-30 | 常州威图流体科技有限公司 | A kind of fluid pump and exciting element |
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| JP2004116327A (en) * | 2002-09-25 | 2004-04-15 | Fuji Electric Holdings Co Ltd | Microdispenser |
| JP2005256683A (en) * | 2004-03-10 | 2005-09-22 | Alps Electric Co Ltd | Flat pump |
| JP5974493B2 (en) * | 2012-01-18 | 2016-08-23 | 株式会社村田製作所 | Piezoelectric pump, method for manufacturing piezoelectric pump |
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| CN1333861A (en) * | 1998-12-23 | 2002-01-30 | 巴特勒纪念研究院 | Piezoelectric micropump |
| CN101427026A (en) * | 2006-03-22 | 2009-05-06 | 株式会社村田制作所 | Piezoelectric micropump |
| CN201190661Y (en) * | 2008-03-13 | 2009-02-04 | 南京航空航天大学 | Valveless piezoelectric pump |
| CN102667158A (en) * | 2009-12-07 | 2012-09-12 | 生物技术公司 | Flexible element for micropump |
| CN103321891A (en) * | 2013-06-19 | 2013-09-25 | 重庆中镭科技有限公司 | Vibrator of piezoelectric pump and control method |
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