CN105089993B - Piezoelectric pump based on secondary resonance - Google Patents
Piezoelectric pump based on secondary resonance Download PDFInfo
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- CN105089993B CN105089993B CN201510472318.4A CN201510472318A CN105089993B CN 105089993 B CN105089993 B CN 105089993B CN 201510472318 A CN201510472318 A CN 201510472318A CN 105089993 B CN105089993 B CN 105089993B
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Abstract
The invention discloses a kind of piezoelectric pump based on secondary resonance, it includes the first vibrating body, the second vibrating body, pump chamber and base.The bottom outer wall connection piezoelectric element of vibrating tube constitutes the first vibrating body.Film, pump chamber plate, valve plate, check valve and turnover head piece plate constitute pump chamber.First vibrating body bottom is fixed by base, and the other end is socketed the second vibrating body.Second vibrating body, film and pump chamber plate are sequentially connected.Pump chamber plate, valve plate, turnover head piece plate are fixedly connected on base, and import check valve and Outlet check valves are provided with valve plate.Using technical solution of the present invention, can effectively solve the problems, such as piezoelectric patches in piezoelectric pump high frequency characteristics and check valve low frequency characteristic it is incompatible.And the driving structure with reusable edible and interchangeable pump housing, reduces cost, prevent liquid cross pollution.
Description
Technical field
The invention belongs to fluid pump technical field in precision optical machinery, and in particular to a kind of piezoelectric ceramic pump.
Background technology
Traditional has valve type piezoelectric ceramics displacement pump, (such as Chinese patent CN100392245C, CN102192135B,
CN101589233B) deformed using the Cyclic flexion of piezoelectric metal laminate structures, change pump chamber volume, so as to cause pump chamber pressure
Power changes, and the directed flow of liquid is realized under the cooperation opening and closing for importing and exporting check valve.The resonance of the laminated structure of its piezoelectric ceramics
Frequency typically could preferably play the performance of piezoceramic material more than hundreds of hertz.But traditional check valve dynamically rings
Answer characteristic poor, and in the presence of serious hysteresis quality during piezoelectric laminated structures cooperating, cause have valve type piezoelectricity displacement pump most
Good working frequency is general all in below 200Hz, therefore its efficiency is not not fully exerted.Compared to passive type check valve, although
Using driving type piezoelectric actuator aggressive valve, such as piezo-stack type or piezo crystals chip aggressive valve (such as Chinese patent CN201057136Y),
Working frequency to improving piezoelectric pump is favourable, and the hysteresis quality of valve is reduced to a certain extent, but it has valve port and opens displacement
Smaller or power output is smaller and cause the problem of flow reduction, under high frequency condition pump oscillator be difficult with valve oscillator it is synchronous, and need
Valve control system it is complicated, be not easy to Integration Design.The size for reducing valve is conducive to the raising of its resonant frequency, therefore utilizes
The unidirectional micro-valve that MEMS technology makes has excellent high frequency characteristics (such as United States Patent (USP) US20090214358A1), but MEMS systems
Make complex process, it is relatively costly, it is unfavorable for promoting.
Furthermore, the laminated structure of piezoelectric ceramics cannot be operated under resonant frequency due to the hysteresis quality of valve, and its deformation quantity is smaller,
Single is caused to extract flow quantity smaller.Can more or less there is liquid stream damage and check valve can not possibly be idealized completely, at check valve
Lose, the drawing liquid efficiency for ultimately resulting in pump declines.In the case of containing bubble or impurity in liquid stream, single drawing liquid amount is small to be easier to lead
Check valve is caused to block, it is impossible to normally to extract liquid.
Therefore, contradiction and increase single drawing liquid amount between the low frequency characteristic of check valve and the high frequency characteristics of piezoelectric element
As the problem for thering is valve type piezoelectric ceramics displacement pump to need to solve.
The content of the invention
It is an object of the invention to solve at least the above and/or defect, and provide at least will be described later excellent
Point.
A further object of the invention is to propose a kind of novel piezo-electric ceramic pump based on secondary resonance principle, will be using frequency
Rate conversion mode solve the problems, such as piezoelectric element in valve piezoelectricity displacement pump high frequency characteristics and valve low frequency characteristic it is incompatible,
With high-frequency drive and the characteristics of big single drawing liquid amount.And the driving structure with reusable edible and interchangeable pump housing,
Can reduces cost, prevent liquid cross pollution.
In order to realize these purposes of the invention and further advantage, there is provided a kind of piezoelectricity based on secondary resonance
Pump, it includes：
Base, is spirally connected by two halves cavity and forms the accommodating cavity of a top end opening；
First vibrating body, is contained in the accommodating cavity, and the first vibrating body bottom is held in the base,
First vibrating body is a vibrating tube, and vibrating tube bottom outer wall is sticked and has piezoelectric element；
Second vibrating body, is an oscillation ring for being socketed on the vibrating tube top, second vibrating body and the vibration
Pipe contact surface is shiny surface；And,
Pump chamber, is bolted in the base top, and the pump chamber includes being layed in the Thin Elastic on the second vibrating body top
Film, and be pressed on elastic film top and laminated be successively spirally connected：Center is provided with the pump chamber plate of cavity, is provided with import list
To valve and Outlet check valves valve plate and be provided with the turnover head piece plate of through hole corresponding with the import check valve and Outlet check valves,
The cavity, the import check valve, the Outlet check valves and the equal insertion connection of the through hole；
Wherein, voltage effect driven, the piezoelectric element drives the vibrating tube top to do yaw motion, described second
It is raised that vibrating body moves downward the drive elastic film along the vibrating tube, and negative pressure is formed in the pump chamber, treat drawing liquid body by
Import check valve is flowed into；Driving voltage inverting function, forces the piezoelectric element quickly to stop vibrations, and the vibrating tube recovers former
Position, the elastic film recovers tiling shape, treats that drawing liquid body is extruded by Outlet check valves.
Second vibrating body is socketed on the free end of vibrating tube, and the internal diameter of the second vibrating body is outer slightly larger than vibrating tube
Footpath.The bottom end face of the second vibrating body is slightly less than the top end face of vibrating tube.The contact site code insurance of the second vibrating body and vibrating tube
Card is smooth.
Preferably, wherein, the piezoelectric element that vibrating tube bottom outer wall is sticked is attached at the vibrating tube for one
The piezoelectric element of bottom outer wall, or be two piezoelectric elements for being relatively attached at vibrating tube bottom outer wall, or be four
Mutual position in 90 ° is attached at the piezoelectric element of vibrating tube bottom outer wall.
Preferably, wherein, the piezoelectric element be piezoelectric ceramic piece or for be deposited on it is described vibration pipe outer wall piezoelectricity
Film.
Preferably, wherein, the piezoelectric element and the vibrating tube are bonding using epoxide-resin glue or conductive silver glue,
Or the piezoelectric element is fixedly arranged in vibration pipe outer wall using piezoelectric ceramics sintering process.
Preferably, wherein, the vibrating tube be metal tube or metal bar.
Preferably, wherein, the vibration pipe outer wall is sticked piezoelectric patches, forming frequency tracking drive circuit.
Preferably, wherein, the elastic film use rubber or latex material.
Preferably, wherein, set coupler between the elastic film and second vibrating body, by the coupler will
The film is connected with second vibrating body.Can increase coupler for connect the second vibrating body and film.Coupler can be adopted
With z-axis to rigidity is larger and flexible preferably spring or other connectors in x-y plane.
Preferably, wherein, the pump chamber plate, valve plate and turnover head piece plate use lucite, plastics or metal material
Material.
Preferably, wherein, can the pump chamber plate, valve plate and turnover head piece plate between add sealing gasket or sealing ring
Prevent liquid leakage.
The present invention at least includes following beneficial effect：Piezoelectric element is preferable during the present invention has solved valve piezoelectricity displacement pump
High frequency characteristics and check valve can only operate in the problem of low frequency；Single amount of fluid drawn is big, reduces to check valve and treats drawing liquid
The requirement of body ideality；Pump chamber is plug-in package, and driver is reusable edible part, and liquid can be avoided while reduces cost
The cross pollution of body.Coating resistant material at pump chamber position can extract corrosive liquids.Can be used on medical treatment and pharmacy, aviation boat
The field such as it.
Further advantage of the invention, target and feature embody part by following explanation, and part will also be by this
The research and practice of invention and be understood by the person skilled in the art.
Brief description of the drawings
Fig. 1 is the explosive view of the piezoelectric pump based on secondary resonance of the present invention；
Fig. 2 is the configuration schematic diagram of the piezoelectric pump based on secondary resonance described in one embodiment of the invention；
Fig. 3 is the assembling assumption diagram of the piezoelectric pump based on secondary resonance of the present invention；
Fig. 4 is the piezoelectric pump feed liquor view based on secondary resonance of the present invention；
Fig. 5 is that the piezoelectricity based on secondary resonance of the present invention pumps out liquid status schematic diagram；
Fig. 6 be an embodiment of the present invention described in piezoelectric pump use four piezoelectric patches when piezoelectric element be connected with vibrating tube
The location drawing；
Fig. 7 is the adoptable coupler structure schematic diagram of piezoelectric pump described in an embodiment of the present invention；
Label declaration in figure：The vibrating bodies of 1- first；The vibrating bodies of 2- second；3- pump chambers；4- bases；10- screws；12- is passed in and out
Head piece plate；14- valve plates；15- check valves；16- pump chamber plates；18- films；20- couplers；24- vibrating tubes；26- sensing piezoelectric pieces；
28- piezoelectric patches；30- bases.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings, to make those skilled in the art with reference to specification text
Word can be implemented according to this.
It should be appreciated that it is used herein such as " have ", "comprising" and " including " term do not allot one or many
The presence or addition of individual other elements or its combination.
As shown in figure 1, a kind of piezoelectric ceramic pump based on secondary resonance, including the first vibrating body 1, the second vibrating body 2, pump
Chamber 3 and base 4.
The vibrating tube 24 constitutes the first vibrating body 1 near bottom outer wall connection piezoelectric element 28.The pump chamber 3 includes thin
Film 18, pump chamber plate 16, valve plate 14, check valve 15 and turnover head piece plate 12.First vibrating body bottom is clamped by base 30, the other end
It is socketed the second vibrating body 2.Second vibrating body 2, film 18 and pump chamber plate 16 are sequentially connected.Pump chamber plate 16, valve plate 14, turnover head piece
Plate 12 is fixedly connected on base 30, as shown in Figure 3.Import check valve 15b and Outlet check valves 15a is installed on valve plate.Base
Two part 30a, 30b is fixedly connected by screw 10.
As shown in Fig. 2 can increase coupler 20 for connect the second vibrating body 2 and film 18.Simultaneously can be in vibrating tube 24
On bond piezoelectric patches 26 for sense vibration, be beneficial to composition frequency-tracking drive circuit.Coupler can be using z-axis to rigidity
Larger and flexible preferably spring or other connectors in x-y plane, as shown in Figure 7.Can be in pump chamber plate, valve plate and turnover
Sealing gasket or sealing ring are added between head piece plate prevents liquid leakage.
Second vibrating body 2 is socketed on the free end of vibrating tube 24, and the internal diameter of the second vibrating body 2 is slightly larger than vibrating tube 24
External diameter.The bottom end face of the second vibrating body 2 is slightly less than the top end face of vibrating tube 24.Second vibrating body 2 and vibrating tube 24
Contact portion ensures smooth.
The piezoelectric element 28 can be one and be connected to the outer wall side of the vibrating tube 24；The piezoelectric element 28
Can be two 28a, 28b and be connected to the outer wall relative position of the vibrating tube 24；The piezoelectric element 28 can be four
And the mutual position placement in 90 ° of the outer wall of the vibrating tube 24 is connected to, as shown in Figure 6.
The piezoelectric element 28 can use piezoelectric ceramic piece or be deposited on the piezoelectric membrane knot of the outer wall of the vibrating tube 24
One kind in structure.
The vibrating tube 24 can use metal tube or metal bar；The barrier film 18 uses rubber or latex material.It is described
Pump chamber plate 16, valve plate 14 and turnover head piece plate 12 are using lucite, plastics or metal material.
The vibrating tube 24 polishes flat with the adhesive segment outer wall of piezoelectric ceramic piece 28 and is beneficial to vibration transmission, such as Fig. 2
It is shown.
The piezoelectric element 28 is bonding using epoxide-resin glue or conductive silver glue with the vibrating tube 24, or the piezoelectricity
Element 28 is fixedly arranged in vibration pipe outer wall using piezoelectric ceramics sintering process.
Operation principle of the invention：
The working condition of piezoelectric pump can be divided into two parts of suction and scheduling, as shown in Figures 4 and 5.To two piezoelectric elements
Apply driving voltage, drive vibrating tube to do fan-shaped yaw in face in its single order crooked syntony frequency by piezoelectric element and move, now
Second vibrating body can be moved in the presence of frictional force to the bottom of vibrating tube, while the film for being connected to pump chamber plate produces projection
Deformation, treats that drawing liquid body flows into pump by import check valve in the presence of negative pressure in chamber, and this is suction；Piezoelectric element stops shaking afterwards
Dynamic, vibrating tube sets back, and film restores to the original state, and will treat that drawing liquid body is extruded by going out head piece, and this is scheduling.Circulation is continuous, you can
Continuous conveying treats drawing liquid body.Adjust the frequency of the intermittent drive of the first vibrating body so that the second vibrating body produces resonant vibration, i.e.,
The operating efficiency of pump can be greatly increased.Now, piezoelectric element is operated in frequency (resonant frequency of the first vibrating body) higher, single
Relatively low frequency (resonant frequency of the second vibrating body) is operated in valve.
When being vibrated due to the first vibrating body, the second vibrating body can be produced and moved down, and the resonant frequency of the first vibrating body can be produced
Raw influence.In order to ensure the normal work of pump and improve the operating efficiency of pump, it is necessary to design corresponding frequency tracking circuit to protect
The resonant condition (suction) and fast short stopping for demonstrate,proving the first vibrating body are shaken state (scheduling).
Number of devices described herein and treatment scale are for simplifying explanation of the invention.To application of the invention,
Modifications and variations will be readily apparent to persons skilled in the art.
Although embodiment of the present invention is disclosed as above, it is not restricted to listed in specification and implementation method
With.It can be applied to various suitable the field of the invention completely.For those skilled in the art, can be easily
Realize other modification.Therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited
In specific details and shown here as the legend with description.
Claims (9)
1. a kind of piezoelectric pump based on secondary resonance, it is characterised in that including：
Base, is spirally connected by two halves cavity and forms the accommodating cavity of a top end opening；
First vibrating body, is contained in the accommodating cavity, and the first vibrating body bottom is held in the base, described
First vibrating body is a vibrating tube, and vibrating tube bottom outer wall is sticked and has piezoelectric element；
Second vibrating body, is an oscillation ring for being socketed on the vibrating tube top, and second vibrating body connects with the vibrating tube
Contacting surface is shiny surface；And,
Pump chamber, is bolted in the base top, and the pump chamber includes being layed in the elastic film on the second vibrating body top, with
And be pressed on elastic film top and laminated be successively spirally connected：Center is provided with the pump chamber plate of cavity, is provided with import check valve
And Outlet check valves valve plate and be provided with the turnover head piece plate of through hole corresponding with the import check valve and Outlet check valves, it is described
Cavity, the import check valve, the Outlet check valves and the equal insertion connection of the through hole；
Wherein, coupler is set between the elastic film and second vibrating body, by the coupler by the film and institute
State the connection of the second vibrating body；Voltage effect driven, the piezoelectric element drives the vibrating tube top to do yaw motion, described
Second vibrating body moves downward the drive elastic film projection along the vibrating tube, and negative pressure is formed in the pump chamber, treats drawing liquid
Body is flowed into by import check valve；Driving voltage inverting function, forces the piezoelectric element quickly to stop vibrations, and the vibrating tube is extensive
Position is restored, the elastic film recovers tiling shape, treats that drawing liquid body is extruded by Outlet check valves.
2. the piezoelectric pump of secondary resonance is based on as claimed in claim 1, it is characterised in that vibrating tube bottom outer wall is sticked
Piezoelectric element be a piezoelectric element for being attached at vibrating tube bottom outer wall, or be relatively attached at described shaking for two
The piezoelectric element of dynamic ttom of pipe end outer wall, or the piezoelectric element that vibrating tube bottom outer wall is attached at for four mutual positions in 90 °.
3. the piezoelectric pump of secondary resonance is based on as claimed in claim 1, it is characterised in that the piezoelectric element is piezoelectric ceramics
Piece or the piezoelectric membrane to be deposited on the vibration pipe outer wall.
4. the piezoelectric pump of secondary resonance is based on as claimed in claim 1, it is characterised in that the piezoelectric element and the vibration
Pipe is bonding using epoxide-resin glue or conductive silver glue, or the piezoelectric element is fixedly arranged at vibration using piezoelectric ceramics sintering process
In pipe outer wall.
5. the piezoelectric pump of secondary resonance is based on as claimed in claim 1, it is characterised in that the vibrating tube is metal tube or gold
Category rod.
6. the piezoelectric pump based on secondary resonance as claimed in claim 1, it is characterised in that the vibration pipe outer wall is sticked piezoelectricity
Piece, forming frequency tracking drive circuit.
7. the piezoelectric pump based on secondary resonance as claimed in claim 1, it is characterised in that the elastic film using rubber or
Latex material.
8. the piezoelectric pump of secondary resonance is based on as claimed in claim 1, it is characterised in that the pump chamber plate, valve plate and turnover
Head piece plate uses lucite, plastics or metal material.
9. the piezoelectric pump of secondary resonance is based on as claimed in claim 1, it is characterised in that the pump chamber plate, valve plate and turnover
Sealing gasket or sealing ring is provided between head piece plate to prevent liquid leakage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510472318.4A CN105089993B (en) | 2015-08-05 | 2015-08-05 | Piezoelectric pump based on secondary resonance |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510472318.4A CN105089993B (en) | 2015-08-05 | 2015-08-05 | Piezoelectric pump based on secondary resonance |
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| CN105089993A CN105089993A (en) | 2015-11-25 |
| CN105089993B true CN105089993B (en) | 2017-06-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510472318.4A Active CN105089993B (en) | 2015-08-05 | 2015-08-05 | Piezoelectric pump based on secondary resonance |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016210550B4 (en) * | 2016-06-14 | 2020-08-13 | Robert Bosch Gmbh | Sensor device and method for manufacturing a sensor device |
| CN108105073A (en) * | 2018-01-31 | 2018-06-01 | 吉林大学 | A kind of bistable state inertia-type piezoelectric pump based on piezoelectric fibre composite material driving |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1898087U (en) * | 1963-11-14 | 1964-08-06 | Louis Van Ermengem & Fils V E | COVERING FOR HEATING EQUIPMENT, IN PARTICULAR OVEN. |
| CN203404051U (en) * | 2013-07-08 | 2014-01-22 | 吉林大学 | Cantilever type piezoelectric diaphragm pump |
| CN104373327A (en) * | 2014-11-04 | 2015-02-25 | 吉林大学 | Piezoelectric pump with mixed electromagnetic force spring |
| CN204436756U (en) * | 2014-12-18 | 2015-07-01 | 浙江师范大学 | A kind of mode of resonance piezoelectric pump based on inertial drive |
-
2015
- 2015-08-05 CN CN201510472318.4A patent/CN105089993B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1898087U (en) * | 1963-11-14 | 1964-08-06 | Louis Van Ermengem & Fils V E | COVERING FOR HEATING EQUIPMENT, IN PARTICULAR OVEN. |
| CN203404051U (en) * | 2013-07-08 | 2014-01-22 | 吉林大学 | Cantilever type piezoelectric diaphragm pump |
| CN104373327A (en) * | 2014-11-04 | 2015-02-25 | 吉林大学 | Piezoelectric pump with mixed electromagnetic force spring |
| CN204436756U (en) * | 2014-12-18 | 2015-07-01 | 浙江师范大学 | A kind of mode of resonance piezoelectric pump based on inertial drive |
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| CN105089993A (en) | 2015-11-25 |
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