CN204746344U - Electric osmose micropump device - Google Patents
Electric osmose micropump device Download PDFInfo
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- CN204746344U CN204746344U CN201520307786.1U CN201520307786U CN204746344U CN 204746344 U CN204746344 U CN 204746344U CN 201520307786 U CN201520307786 U CN 201520307786U CN 204746344 U CN204746344 U CN 204746344U
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Abstract
The utility model relates to a micro -fluidic technical field especially relates to an electric osmose micropump device, including integrated on micro -fluidic chip each other discontiguous fluid miniflow say with electrode miniflow way, the fluid miniflow says including being used for pump sending fluidic pump district miniflow to say the drive section, electrode miniflow way is located pump district miniflow and is said the both ends of drive section, and says the crisscross setting of drive section angularity with pump district miniflow, the inside packing that the electrode miniflow was said has liquid metal, is equipped with the injection entry that is used for the liquid metal business turn over on the electrode miniflow way and exports with the injection, and injection entry or injection exit linkage have controllable power module, and controllable power module is used for forming the electrical potential difference at the both ends of pump district's miniflow way drive section. The utility model discloses an electric osmose micropump device has a great deal of advantages such as electrode structure is simple, convenience, low cost are makeed in processing, the controllability is good, stability is high, easily integration, strong, the low voltage driving of interference killing feature.
Description
Technical field
The utility model relates to microfluidic art, particularly relates to a kind of electric osmose Micropump device.
Background technology
Microflow control technique refer to have at least one dimension be in the system of micron even the low-dimensional channel design of nanoscale by control volume be skin rise to receive rise fluid flow, to reach the technology of mass transfer, heat transfer object, the various fields such as biochemical analysis, immunoassay, micro-wound surgical operation, environmental monitoring can be widely used in.
Wherein, Micropump realizes microfluid in microfluidic system accurately to drive indispensable core component, is the specific implementation form of micro-even more small size micro fluid dynamcis technology.The fields such as Micropump transports at biochemical analysis, microfluid (buffer solution, medicine etc.), microelectronic chip cooling have a wide range of applications, and its development has become the important symbol weighing microfluidic system development level.
Micropump can be divided into mechanical type Micropump and non-mechanical Micropump according to its operation principle, and both main distinctions are there is movement-less part in pump.Mechanical type Micropump almost can drive any type microfluid under external force, but owing to there is moving component, this type of Micropump exists the shortcomings such as service life is shorter, operational reliability is poor, it is discontinuous to flow, complex structure; And non-mechanical Micropump power way of realization is mainly by means of physics, the chemical property of driven microfluid itself, often movement-less part in pump, this type of Micropump drives microfluid to be limited in scope, but it can realize the uninterrupted pumping of microfluid, reliability is high, controllability good, processing and fabricating is comparatively simple and be easy to integrated.
Owing to having, drive fluid scope is wide, high-voltage performance good, flow that continuous pulse free reliability is high, movement-less part, long service life, can realize the feature such as the accurate control of rate of flow of fluid and the bidirectional modulation of the flow direction, electric osmose Micropump obtains more concerns, is a kind of Micropump be most widely used at present.The power source of electric osmose Micropump is EOF, one deck electric double layer will be formed at solid-liquid interface when microfluid contacts with fluid channel solid wall surface, when loading parallel electric field along fluid channel direction, driven by electroosmosis power is produced in fluid channel wall electric double layer, this driving force directly acts on microfluid, drive it to flow, form EOF.
Electric osmose Micropump common form can be classified as two classes, and a class is porous dielectric filled type electric osmose Micropump, and a class is open fluid channel electric osmose Micropump.The former mainly fills a large amount of particulate dielectric material in runner, and under applied voltage effect, the microfluid of particle surface forms EOF under the effect of driven by electroosmosis power; This type of Micropump can realize high output pressure, but its complex manufacturing technology, not easy of integration, flow velocity is uneven, and filler particles and fluid channel are difficult to mate.Latter directly utilizes fluid channel to produce EOF; There is not filler particles in this type of Micropump, flow stability, uniformity are better, and processing and fabricating is simple, be easy to integrated, but its output pressure is lower.
Due to common electroosmotic pump often electrode directly contact with solution, easily there is hydrolysis under voltage and produce bubble, therefore in electric osmose Micropump microelectrode materials generally adopt metal platinum, platinum physicochemical properties are stablized, be suitable for doing microelectrode materials, but the produced by micro processing technique of platinum electrode is comparatively complicated, cost is higher.Platinum electrode often adopts membrane structure, and film is by deposit or on the base material of method integration bottom fluid channel such as sputtering; In addition the direct fluid channel reservoir that inserted by platinum filament is also the comparatively simple platinum electrode form of one.The platinum electrode of these two kinds of forms is all be immersed in microfluid, directly contacts with microfluid.And the type of drive that this driving voltage directly loads on this type of microfluid or electrolyte solution through contact microelectrode easily makes microfluid generation current Joule heat, change the temperature environment of microfluid.
In sum, how effectively to avoid electrode and solution directly to contact the hydrolysis of generation, strengthen the stability of Micropump operation, reliability and service life, become one of problem demanding prompt solution in current microflow control technique.
Utility model content
(1) technical problem that will solve
The technical problems to be solved in the utility model there is provided a kind of electric osmose Micropump device, simplify electrode micro-channel structure, this device is had features such as processing and fabricating is simple, flow velocity is uniform and stable, controllability is good, be easy to integrated, antijamming capability strong, low voltage drive.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of electric osmose Micropump device, comprise and be integrated in non-touching fluid fluid channel and electrode fluid channel on micro-fluidic chip, the pump district fluid channel that described fluid fluid channel comprises for pumping fluid drives section, described electrode fluid channel is located at the two ends that described pump district fluid channel drives section, and drives with described pump district fluid channel that section is angled to be crisscross arranged; The inside of described electrode fluid channel is filled with liquid metal, described electrode fluid channel is provided with the injection inlet and injection outlet that pass in and out for described liquid metal, described injection inlet or injection outlet are connected with controllable electric power module, and described controllable electric power module is used for driving the two ends of section to form electrical potential difference in described pump district fluid channel.
Wherein, described liquid metal is be in liquid mercury or gallium or gallium-indium alloy or gallium-indium-tin alloy under room temperature condition.
Wherein, described electrode fluid channel is two, and respectively has at least one section of rectilinear direct current section, and described pump district fluid channel that what described direct current section was parallel be laid in drives the two ends of section, and drives with described pump district fluid channel that section is angled to be crisscross arranged; The length of described direct current section is greater than the length that pump district fluid channel drives section vertical direction.
Wherein, described direct current section and described pump district fluid channel drive that section is in 90 ° to be crisscross arranged.
Wherein, the two ends of described electrode fluid channel are located in described injection inlet and injection outlet respectively, article one, the injection inlet of described electrode fluid channel or injection outlet are connected with the positive pole of described controllable electric power module, the injection inlet of another described electrode fluid channel or inject to export and be connected with the negative pole of described controllable electric power module.
Wherein, described pump district fluid channel drives section to be straight line single channel, and described electrode fluid channel is located at the bottom that described pump district fluid channel drives section two ends, or symmetry is laid in bottom and top that described pump district fluid channel drives section two ends.
Wherein, described pump district fluid channel drives section to comprise many runners be arranged in parallel, described many runners are parallel with described fluid fluid channel direction, and two ends are communicated with described fluid fluid channel respectively, and described electrode fluid channel is located at the bottom that described pump district fluid channel drives section two ends.
Wherein, described pump district fluid channel drives section to comprise many runners be arranged in parallel, described many runners are parallel with described fluid fluid channel direction, and two ends are communicated with described fluid fluid channel respectively, described electrode fluid channel symmetry is laid in bottom and the top that described pump district fluid channel drives section two ends.
Wherein, separated between described electrode fluid channel and described fluid fluid channel by thin layer, described thickness of thin layer is less than the length that described pump district fluid channel drives section, and described layer material is dimethyl silicone polymer or polymethyl methacrylate.
Wherein, the material of described micro-fluidic chip is dimethyl silicone polymer or glass or quartz.
(3) beneficial effect
Technique scheme of the present utility model has following beneficial effect: electric osmose Micropump device of the present utility model utilizes the room temperature liquid metal with superior electrical conductivity energy as microelectrode, fluid fluid channel and electrode fluid channel keep noncontact, when Micropump runs, without directly contacting between microelectrode with microfluid, the hydrolysis of microfluid on microelectrode surface and the generation of electric current Joule heat can be avoided, and then improve microelectrode antijamming capability, strengthen the stability of Micropump operation, reliability and service life; And only need one end of electrode fluid channel to connect the negative or positive electrode of controllable electric power, effectively simplify electrode micro-channel structure, reduce costs.Thus, electric osmose Micropump device of the present utility model have that electrode structure is simple, processing and fabricating convenient, with low cost, controllability good, rate of flow of fluid is uniform and stable, be easy to integrated, the plurality of advantages such as antijamming capability is strong, low voltage drive.
Accompanying drawing explanation
Fig. 1 is the single channel single-stage drive form principle schematic of the electric osmose Micropump device of the utility model embodiment one;
Fig. 2 is the sectional view of the A-A in Fig. 1;
Fig. 3 is the parallel drive form principle schematic diagram of the electric osmose Micropump device of the utility model embodiment two;
Fig. 4 is the sectional view of the B-B in Fig. 3;
Fig. 5 is the parallel drive form principle schematic diagram of the electric osmose Micropump device of the utility model embodiment three;
Fig. 6 is the sectional view of the C-C in Fig. 5.
Wherein, 1, electrode fluid channel; 2, injection inlet; 3, injection outlet; 4, controllable electric power module; 5, pump district fluid channel drives section; 6, fluid fluid channel; 7, wire.
Detailed description of the invention
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples for illustration of the utility model, but can not be used for limiting scope of the present utility model.
In description of the present utility model, except as otherwise noted, the implication of " multiple " is two or more; Except as otherwise noted, the implication of " nick shaped " is the shape except cross section is concordant.Term " on ", D score, "left", "right", " interior ", " outward ", " front end ", " rear end ", " head ", the orientation of the instruction such as " afterbody " or position relationship be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of the device of instruction or hint indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " is connected ", " connection " should be interpreted broadly, such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary.For the ordinary skill in the art, concrete condition the concrete meaning of above-mentioned term in the utility model can be understood.
Embodiment one
As shown in Figure 1 and Figure 2, electric osmose Micropump device described in the present embodiment one, comprise and be integrated in non-touching fluid fluid channel 6 and electrode fluid channel 1 on micro-fluidic chip, the pump district fluid channel that fluid fluid channel 6 is provided with for pumping fluid drives section 5, institute's pump fluid is flowed through after pump district fluid channel drives section 5 to carry out pumping by fluid fluid channel 6 and flows out, to ensure the pumping efficiency of fluid in fluid fluid channel 6.
The inside of electrode fluid channel 1 is filled with liquid metal, and liquid metal is under room temperature condition be liquid mercury or gallium or gallium alloy, preferably adopts under room temperature condition as liquid gallium alloy is gallium-indium alloy or gallium-indium-tin alloy.
Electrode fluid channel 1 is provided with the injection inlet 2 and injection outlet 3 that pass in and out for liquid metal, and electrode fluid channel 1 connects controllable electric power module 4 by injection inlet 2 or injection outlet 3, makes electrode fluid channel 1 form microelectrode; Electrode fluid channel 1 is located at the two ends that pump district fluid channel drives section 5, Qie Yubeng district fluid channel drives that section 5 is angled to be crisscross arranged, but be not in contact with each other, the microelectrode formed by electrode fluid channel 1 can drive section 5 region to produce electric potential field in pump district fluid channel, this electric potential field drives the axis of section 5 to produce fluid driving pressure along pump district fluid channel, pump district fluid channel drives the institute's pump fluid in section 5 to be subject to fluid driving pressure impact change flow velocity or flow, and fluid can not directly contact generation hydrolysis with microelectrode, avoid affecting fluid pumping efficiency.
The electrode fluid channel 1 of the present embodiment one is divided into two, and wherein the injection outlet 3 of a strip electrode fluid channel 1 is connected with the positive pole of controllable electric power module 4 by wire 7, forms high potential; The injection outlet 3 of another strip electrode fluid channel 1 is connected with the negative pole of controllable electric power module 4 by wire 7, form low potential, make two strip electrode fluid channel 1 drive the two ends of section 5 to form height electrical potential difference in pump district fluid channel, regulate controllable electric power module 4 can make to flow through pump district fluid channel and drive the fluid of section 5 to change flow velocity or flow by electrical potential difference variable effect.
It should be noted that, electrode fluid channel 1 can be set to 2N (N be greater than 0 integer) bar, as long as ensure that every two strip electrode fluid channel 1 are one group, two strip electrode fluid channel 1 often in group are located at the two ends that pump district fluid channel drives section 5 respectively, Qie Yubeng district fluid channel drives that section 5 is angled to be crisscross arranged, simultaneously this two strip electrodes fluid channel 1 is connected with the positive pole of controllable electric power module 4 and negative pole respectively, to ensure that electrode fluid channel 1 can produce the fluid driving pressure of the axis (i.e. fluid pumping direction) driving section 5 along pump district fluid channel, the electric potential field that Shi Beng district fluid channel drives section 5 can be subject to electrode fluid channel 1 generation affects.
In the present embodiment one, every strip electrode fluid channel 1 is preferably provided with at least one section of rectilinear direct current section, what the direct current section of two strip electrode fluid channel 1 was parallel is laid in the two ends that pump district fluid channel drives section 5, Qie Yubeng district fluid channel drives that section 5 is angled to be crisscross arranged, make two microelectrodes formed the institute's pump fluid in section 5 can be driven to provide stable pumping pressure, to guarantee the stability of fluid pumping for pump district fluid channel.In order to ensure that pump district fluid channel drives section 5 to be in the coverage of microelectrode electric potential field, and good pumping efficiency can be obtained, the direct current Duan Yubeng district fluid channel of electrode fluid channel 1 drives the angle of section 5 to be greater than 0 °, preferably this angle is 90 °, and the length of direct current section is not less than the length that pump district fluid channel drives section 5 vertical direction.The microelectrode that liquid metal in electrode fluid channel 1 is formed preferably adopts linear structure in horizontal and vertical direction (comprising above-mentioned direct current section), when on-load voltage, produce unidirectional parallel electric potential field between parallel pole, the potential gradient direction of electric potential field is parallel with Beng Neibeng district fluid fluid channel 5 to reach best driven by electroosmosis effect.The length of vertical direction electrode fluid channel 1 is not less than the length that pump district fluid channel drives section 5 vertical direction, thus drives section 5 to obtain evenly and the electric potential field of more high electrical potential gradient in pump district fluid channel.
The pump district fluid channel of the present embodiment one drives section 5 to be straight line single channel structure, electrode fluid channel 1 drives the axis of section 5 to be laid in the bottom at fluid channel driving section 5 two ends, pump district along pump district fluid channel, preferably the two ends of section 5 are driven to lay, to provide parallel electric potential field perpendicular to pump district fluid channel the direct current section of electrode fluid channel 1.In order to strengthen the influence power of microelectrode to institute's pump fluid, two arrays of electrodes fluid channel 1 symmetry can be laid in bottom and top that pump district fluid channel drives section 5 two ends, ensure that the direct current section of each strip electrode fluid channel 1 is parallel to each other simultaneously.
The electrode fluid channel 1 of the present embodiment one and fluid fluid channel 6 can adopt produced by micro processing technique to make.Micro-fluidic can select dimethyl silicone polymer (PDMS), glass, quartz etc.
The Soft lithograph technology of produced by micro processing process choice routine, etching produces electrode fluid channel 1 and fluid fluid channel 6 respectively.Electrode fluid channel 1 and the technological operation of fluid fluid channel 6 produced by micro processing simple, with low cost.The micro-fluidic chip prioritizing selection PDMS chip that Soft lithograph fabrication techniques goes out.
For guaranteeing that microelectrode does not contact with between institute pump fluid, separated by thin layer between electrode fluid channel 1 and fluid fluid channel 6.Thin layer between the electrode fluid channel 1 of the present embodiment one and fluid fluid channel 6 can adopt produced by micro processing technique to make.Layer material can select dimethyl silicone polymer (PDMS), polymethyl methacrylate (PMMA) etc.
Thin layer selects conventional spin coating technique to make.Spin coating technique has the features such as simple to operate, with low cost.Layer material prioritizing selection PDMS.
In the present embodiment one, electrode fluid channel 1, fluid fluid channel 6 and thin layer can adopt MEMS technology to encapsulate.
Electrode fluid channel 1, fluid fluid channel 6 and thin layer carry out permanent encapsulation by the mode of plasma bonding.
In the present embodiment one, the thickness of thin layer between electrode fluid channel 1 and fluid fluid channel 6 should be enough little, much smaller than the length of pump district fluid fluid channel 5 between electrode.
The present embodiment one utilizes the mobility of liquid metal, adopts injecting method by liquid metal from injection inlet 2 injecting electrode fluid channel 1, and in injection process, unnecessary liquid metal overflows from injection outlet 3.After plain conductor 7 is drawn in injection outlet 3, junction and the injection inlet 2 of electrode fluid channel 1 and plain conductor 7 use glue package.Glue preferably adopts PDMS silicone oil or transparent electrical insulation silica gel.This injection liquid metal process is simple to operate, reproducible, one-shot forming, the microelectrode Stability Analysis of Structures of formation.Liquid metal injection device preferably adopts common micro syringe.
It should be noted that, in the present embodiment one, except the injection outlet 3 of electrode fluid channel 1 to be connected with controllable electric power module 4 by wire 7, also can select following two kinds of connected modes: the injection inlet 2 of electrode fluid channel 1 is connected with controllable electric power module 4 by wire 7; Or by the positive pole of controllable electric power module 4 by wire 7 be positioned at pump district fluid channel and drive the injection inlet 2 of the electrode fluid channel 1 of section 5 one end and inject outlet 3 and be connected respectively, the negative pole of controllable electric power module 4 be positioned at pump district fluid channel and drive the injection inlet 2 of the electrode fluid channel 1 of section 5 other end and inject outlet 3 and be connected respectively.The condition of contact of above-mentioned three kinds of connected modes is identical, all can realize the formation requirement of microelectrode in the present embodiment.
During the electric osmose Micropump device busy of the present embodiment one, be injected in electrode fluid channel 1 by liquid metal by the injection inlet 2 in electrode fluid channel 1, unnecessary liquid metal overflows by injecting outlet 3, forms microelectrode; The both positive and negative polarity of controllable electric power module 4 makes to be positioned at pump district fluid channel and drives the electrode fluid channel 1 at section 5 two ends to produce high potential and low potential respectively, because pump district fluid channel drives section 5 to be in electric potential field, the fluid that its inside flows through affects by the height electrical potential difference of electric potential field, through the driving of fluid driver output pressure, be pumped to the other end from one end of fluid fluid channel 6.The output voltage changing controllable electric power module 4 can regulate fluid driver output pressure, thus regulates flow velocity and the flow of institute's pump fluid.
Embodiment two
As shown in Figure 3, Figure 4, the architectural feature of the electric osmose Micropump device of the present embodiment two is roughly the same with embodiment one with operation principle, same section repeats no more, difference is: the pump district fluid channel of the present embodiment two drives many runners of section 5 for being arranged in parallel, runner is parallel with fluid fluid channel 6 direction, and two ends are communicated with fluid fluid channel 6 respectively.
In order to realize high flow capacity Micropump, embodiment adds the quantity that pump district fluid channel drives runner in section 5, first many runners in section 5 pump district fluid channel are driven to be set to linear pattern in the horizontal direction, and vertically parallel distribution, vertically be respectively arranged with linear pattern runner at the two ends of runner parallel to each other simultaneously, for being communicated with the runner of parallel distribution, thus the pump district fluid channel forming parallel form drives section 5, and pump district fluid channel drives the two ends of section 5 to be connected with the fluid fluid channel 6 in Fei Beng district respectively, as fluid channel input or the output of pumping fluid.
The electric potential field produced to make microelectrode can cover pump district fluid channel driving section 5 by stability and high efficiency, in the present embodiment two, electrode fluid channel 1 drives section 5 to be axially laid in the bottom that pump district fluid channel drives section 5 two ends along pump district fluid channel, Qie Yubeng district fluid channel drives that section 5 is angled to be crisscross arranged, but be not in contact with each other, drive section 5 to be positioned at electric potential field with Shi Beng district fluid channel.Preferably parallel for the direct current section of electrode fluid channel 1 is laid in the bottom that pump district fluid channel drives section 5 two ends, and drives the axis of section 5 perpendicular to pump district fluid channel, in order to provide optimum parallel electric potential field.
The electric osmose Micropump device that the present embodiment two provides, except change driving voltage, the quantity of the runner in section 5 is driven by changing pump district fluid channel, also the flow of institute's pump fluid can be changed, the fluid flow realizing Micropump is adjustable, for pump district fluid channel drives the runner increasing some in section 5, high flow capacity Micropump can be realized.
Embodiment three
As shown in Figure 5, Figure 6, the structure of the electric osmose Micropump device of the present embodiment three is roughly the same with embodiment two, same section repeats no more, difference is: electrode fluid channel 1 symmetry of the present embodiment three is laid in bottom and top that pump district fluid channel drives section 5 two ends, the fluid of pumping in section 5 can be driven to provide more stable electric potential field for pump district fluid channel, effectively strengthen the fluid driver output pressure that pump district fluid channel drives section 5 simultaneously.
In the present embodiment three, preferred employing two groups is totally four strip electrode fluid channel 1, every two strip electrode fluid channel 1 are one group, the direct current section symmetry of two arrays of electrodes fluid channel 1 is laid in bottom and top that pump district fluid channel drives section 5 two ends, often in group, the direct current section of two strip electrode fluid channel 1 drives section 5 to be axially laid in the two ends that pump district fluid channel drives section 5 along pump district fluid channel respectively, and ensure that direct current section is parallel to each other, drive the axis of section 5 perpendicular with pump district fluid channel; Being positioned at pump district fluid channel drives the two strip electrode fluid channel 1 of section 5 one end to be connected the positive pole of controllable electric power module 4 by the wire 7 that injection outlet 3 is drawn, two strip electrode fluid channel 1 of the other end connect the negative pole of controllable electric power module 4 by the wire 7 that injection outlet 3 is drawn, being positioned at pump district fluid channel by the both positive and negative polarity electromotive force official post of controllable electric power module 4 drives the electrode fluid channel 1 at section 5 two ends to form high potential and low potential respectively, thus provides one to stablize adjustable electric potential field for pump district fluid channel driving section 5.
It should be noted that, the electrode fluid channel 1 of the present embodiment three can be set to 4N (N be greater than 0 integer) bar, as long as ensure that every two strip electrode fluid channel 1 are one group, every two arrays of electrodes fluid channel 1 symmetry is laid in bottom and the top that pump district fluid channel drives section 5 two ends; Two strip electrode fluid channel 1 often in group are located at the two ends that pump district fluid channel drives section 5 respectively, Qie Yubeng district fluid channel drives that section 5 is angled to be crisscross arranged, simultaneously this two strip electrodes fluid channel 1 is connected with the positive pole of controllable electric power module 4 and negative pole respectively, to ensure that electrode fluid channel 1 can produce the fluid driving pressure of the axis (i.e. fluid pumping direction) driving section 5 along pump district fluid channel, the electric potential field that Shi Beng district fluid channel drives section 5 can be subject to electrode fluid channel 1 generation affects.
In sum, the electric osmose Micropump device of embodiment one, two, three all can utilize the room temperature liquid metal with superior electrical conductivity energy as microelectrode, fluid fluid channel 6 and electrode fluid channel 1 keep noncontact, when Micropump runs, without directly contacting between microelectrode with microfluid, the hydrolysis of microfluid on microelectrode surface and the generation of electric current Joule heat can be avoided, and then improve microelectrode antijamming capability, strengthen the stability of Micropump operation, reliability and service life; And only need one end of electrode fluid channel 1 to connect the negative or positive electrode of controllable electric power module 4, effectively simplify electrode fluid channel 1 structure, reduce costs.Thus, electric osmose Micropump device of the present utility model have that electrode structure is simple, processing and fabricating convenient, with low cost, controllability good, rate of flow of fluid is uniform and stable, be easy to integrated, the plurality of advantages such as antijamming capability is strong, low voltage drive.
Embodiment of the present utility model provides for the purpose of example and description, and is not exhaustively or by the utility model be limited to disclosed form.Many modifications and variations are apparent for the ordinary skill in the art.Selecting and describing embodiment is in order to principle of the present utility model and practical application are better described, and enables those of ordinary skill in the art understand the utility model thus design the various embodiments with various amendment being suitable for special-purpose.
Claims (10)
1. an electric osmose Micropump device, it is characterized in that, comprise and be integrated in non-touching fluid fluid channel (6) and electrode fluid channel (1) on micro-fluidic chip, the pump district fluid channel that described fluid fluid channel (6) comprises for pumping fluid drives section (5), described electrode fluid channel (1) is located at the two ends that described pump district fluid channel drives section (5), and drives with described pump district fluid channel that section (5) is angled to be crisscross arranged; The inside of described electrode fluid channel (1) is filled with liquid metal, described electrode fluid channel (1) is provided with the injection inlet (2) and injection outlet (3) that pass in and out for described liquid metal, described injection inlet (2) or injection outlet (3) are connected with controllable electric power module (4), and described controllable electric power module (4) forms electrical potential difference for driving the two ends of section (5) in described pump district fluid channel.
2. electric osmose Micropump device according to claim 1, is characterized in that, described liquid metal is be in liquid mercury or gallium or gallium-indium alloy or gallium-indium-tin alloy under room temperature condition.
3. electric osmose Micropump device according to claim 1, it is characterized in that, described electrode fluid channel (1) is two, and respectively have at least one section of rectilinear direct current section, what described direct current section was parallel be laid in, and described pump district fluid channel drives the two ends of section (5), and drives with described pump district fluid channel that section (5) is angled to be crisscross arranged; The length of described direct current section is greater than the length that pump district fluid channel drives section (5) vertical direction.
4. electric osmose Micropump device according to claim 3, is characterized in that, described direct current section and described pump district fluid channel drive that section (5) is in 90 ° to be crisscross arranged.
5. electric osmose Micropump device according to claim 3, it is characterized in that, the two ends of described electrode fluid channel (1) are located in described injection inlet (2) and injection outlet (3) respectively, article one, the injection inlet (2) of described electrode fluid channel (1) or injection outlet (3) are connected with the positive pole of described controllable electric power module (4), the injection inlet (2) of another described electrode fluid channel (1) or inject and export (3) and be connected with the negative pole of described controllable electric power module (4).
6. the electric osmose Micropump device according to any one of claim 1-5, it is characterized in that, described pump district fluid channel drives section (5) to be straight line single channel, described electrode fluid channel (1) is located at the bottom that described pump district fluid channel drives section (5) two ends, or symmetry is laid in bottom and top that described pump district fluid channel drives section (5) two ends.
7. the electric osmose Micropump device according to any one of claim 1-5, it is characterized in that, described pump district fluid channel drives section (5) to comprise many runners be arranged in parallel, described many runners are parallel with described fluid fluid channel (6) direction, and two ends are communicated with described fluid fluid channel (6) respectively, described electrode fluid channel (1) is located at the bottom that described pump district fluid channel drives section (5) two ends.
8. the electric osmose Micropump device according to any one of claim 1-5, it is characterized in that, described pump district fluid channel drives section (5) to comprise many runners be arranged in parallel, described many runners are parallel with described fluid fluid channel (6) direction, and two ends are communicated with described fluid fluid channel (6) respectively, described electrode fluid channel (1) symmetry is laid in bottom and the top that described pump district fluid channel drives section (5) two ends.
9. electric osmose Micropump device according to claim 1, it is characterized in that, separated by thin layer between described electrode fluid channel (1) and described fluid fluid channel (6), described thickness of thin layer is less than the length that described pump district fluid channel drives section (5), and described layer material is dimethyl silicone polymer or polymethyl methacrylate.
10. electric osmose Micropump device as claimed in claim 1, is characterized in that, the material of described micro-fluidic chip is dimethyl silicone polymer or glass or quartz.
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| CN106345543A (en) * | 2016-09-13 | 2017-01-25 | 哈尔滨工业大学 | Micro-mixed chip based on fixed-potential induced charge electro-osmosis |
| CN109185107A (en) * | 2018-11-02 | 2019-01-11 | 北京机械设备研究所 | A kind of the liquid metal driving control system and control method of integrated Micropump micro-valve |
| CN109331891A (en) * | 2018-09-21 | 2019-02-15 | 西北工业大学 | One kind, which is received, flows the high pressure resistant electrochemistry Micropump of grade |
| CN109529962A (en) * | 2019-01-18 | 2019-03-29 | 江苏医联生物科技有限公司 | The method of film electroosmotic pump and its detection pressure and flow velocity based on microchannel plate |
| CN110681419A (en) * | 2019-09-11 | 2020-01-14 | 浙江省北大信息技术高等研究院 | Electroosmosis micropump device and electroosmosis micropump device set |
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| CN109331891A (en) * | 2018-09-21 | 2019-02-15 | 西北工业大学 | One kind, which is received, flows the high pressure resistant electrochemistry Micropump of grade |
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| CN109529962A (en) * | 2019-01-18 | 2019-03-29 | 江苏医联生物科技有限公司 | The method of film electroosmotic pump and its detection pressure and flow velocity based on microchannel plate |
| CN110681419A (en) * | 2019-09-11 | 2020-01-14 | 浙江省北大信息技术高等研究院 | Electroosmosis micropump device and electroosmosis micropump device set |
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