CN106345543A - Micro-mixed chip based on fixed-potential induced charge electro-osmosis - Google Patents
Micro-mixed chip based on fixed-potential induced charge electro-osmosis Download PDFInfo
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- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 35
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
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Abstract
A micro-mixed chip based on fixed-potential induced charge electro-osmosis relates to the field of micro-mixed chips and enables the problem to be solved that the processing of an existing micro-mixed chip based on induced charge electro-osmosis has complex steps and is difficult to perform. Four exciting electrodes and two suspending electrodes are disposed on a glass substrate, and all the electrodes are membrane electrodes; a first flow path, a second flow path, a third flow path and a mixed flow path on the lower surface of a PDMS (polydimethylsiloxane) cover plate form a chip microchannel; the glass substrate is sealed to the PDMS cover plate, two sides of the mixed flow path are attached respectively to one ends of the first and second exciting electrodes and one ends of the third and fourth exciting electrodes, the end of the first exciting electrode faces the end of the third exciting electrode, and one end of the first suspending electrode is disposed in the middle between the above ends; the end of the second exciting electrode faces the end of the third exciting electrode, and one end of the second suspending electrode is disposed in the middle between the above ends. Potential differences between the two facing exciting electrodes are equal. The micro-mixed chip is applicable to mixing of micro-fluids.
Description
Technical Field
The invention relates to the field of micro-hybrid chips, in particular to a micro-hybrid chip for induced charge electroosmosis based on fixed potential.
Background
A Micro fluidic Chip (also called Lab-on-a-Chip) refers to a Chip that integrates basic operation units related to biological and chemical fields, such as sample preparation, reaction, separation, detection, etc., or basically on a Chip of several square centimeters (even smaller), and a network is formed by microchannels to automatically complete an analysis process, and has been developed into a research field with a cross application prospect in multiple disciplines, such as machinery, chemistry, biology, medicine, hydromechanics, etc.
In the field of microfluidic chip technology, how to precisely control microfluid has been a popular topic studied by researchers. Conventional macroscopic fluids can achieve mixing by convection, while the fluids in microchannels rely primarily on diffusion to achieve mixing due to low reynolds numbers. Therefore, in the micro system, in order to achieve effective mixing of the fluid in the micro channel, external energy or components are indispensable.
The existing micro-hybrid chip is divided into an active micro-hybrid chip and a passive micro-hybrid chip. The passive micro-mixing chip mainly depends on complex internal structure design or channel surface treatment to realize the mixing of fluid in the micro-channel. The active micro-mixing chip mainly depends on external energy such as a sound field, a magnetic field or an electric field and the like to realize the mixing of fluid in a micro-channel. Most of these applications are electric field-dependent micro-hybrid chips. The electrically driven micro-hybrid chip has the advantages of simple structure, no need of external components, easy assembly and the like.
The existing electrically-driven micro-hybrid chip is mainly based on the principle of induced charge electroosmosis, and the phenomenon of induced charge electroosmosis is generated by arranging a plurality of three-dimensional complex conductor barriers in a microchannel, so that the mixing of fluid in the microchannel is promoted. Although the micro-hybrid chip has excellent mixing capability, the processing steps of the micro-hybrid chip are complicated and the micro-hybrid chip is difficult to operate because three-dimensional complex conductor barriers need to be arranged in the micro-channel.
Disclosure of Invention
The invention provides a micro-hybrid chip based on induction charge electroosmosis with fixed potential, aiming at solving the problems of complicated processing steps and difficult operation of the existing micro-hybrid chip based on induction charge electroosmosis.
The invention relates to a micro-hybrid chip based on fixed potential induced charge electroosmosis, which comprises a glass substrate 1, a PDMS cover plate 2, a first excitation electrode 3, a second excitation electrode 4, a third excitation electrode 5, a fourth excitation electrode 6, a first suspension electrode 7 and a second suspension electrode 8;
the first excitation electrode 3, the second excitation electrode 4, the third excitation electrode 5, the fourth excitation electrode 6, the first suspension electrode 7 and the second suspension electrode 8 are all thin film electrodes and are all arranged on the upper surface of the glass substrate 1;
a first flow channel 9, a second flow channel 10, a third flow channel 11 and a mixing flow channel 12 are arranged on the lower surface of the PDMS cover plate 2, the inflow end of the mixing flow channel 12 is simultaneously connected with the outflow end of the first flow channel 9 and the outflow end of the second flow channel 10, the outflow end of the mixing flow channel 12 is connected with the inflow end of the third flow channel 11, a first inflow groove 13 is arranged at the inflow end of the first flow channel 9, a second inflow groove 14 is arranged at the inflow end of the second flow channel 10, and an outflow through hole 15 is arranged at the outflow end of the third flow channel 11;
the bottom of the first inflow groove 13 is provided with a first inflow through hole, the bottom of the second inflow groove 14 is provided with a second inflow through hole, and the first inflow through hole, the second inflow through hole and the outflow through hole 15 all penetrate through the PDMS cover plate 2;
the inflow end of the first inflow through hole and the inflow end of the second inflow through hole are respectively connected with a first metal connector 16 and a second metal connector 17;
the upper surface of the glass substrate 1 is opposite to the lower surface of the PDMS cover plate 2 and is hermetically arranged, one end 18 of the first excitation electrode 3 and one end 19 of the second excitation electrode 4 are both attached to one side of the mixing flow channel 12, and one end 20 of the third excitation electrode 5 and one end 21 of the fourth excitation electrode 6 are both attached to the other side of the mixing flow channel 12;
one end 18 of the first excitation electrode 3 is arranged opposite to one end 21 of the fourth excitation electrode 6, one end 22 of the first suspension electrode 7 is arranged between the first excitation electrode and the fourth excitation electrode, and the distance between the one end 22 of the first suspension electrode 7 and the first suspension electrode is equal to that between the first suspension electrode and the second suspension electrode;
one end 19 of the second excitation electrode 4 is arranged opposite to one end 20 of the third excitation electrode 5, one end 23 of the second suspension electrode 8 is arranged between the two excitation electrodes, and the distance between one end 23 of the second suspension electrode 8 and the two suspension electrodes is equal;
the potential difference between one end 18 of the first excitation electrode 3 and one end 21 of the fourth excitation electrode 6 is equal to the potential difference between one end 19 of the second excitation electrode 4 and one end 20 of the third excitation electrode 5.
Preferably, one end 22 of the first floating electrode 7 is the same size as one end 23 of the second floating electrode 8;
the length Lc of one end 22 of the first floating electrode 7 is 1000 micrometers, the width Wc is 80 micrometers, and the distance Gc between the one end 22 of the first floating electrode 7 and one end 23 of the second floating electrode 8 is 100 micrometers;
the length L of the mixing flow channel 12 is 2300 microns, the width W of the mixing flow channel is 180 microns, and the height of the mixing flow channel is 100 microns;
the distance between one end 18 of the first excitation electrode 3 and one end 21 of the fourth excitation electrode 6 is the same as the distance between one end 19 of the second excitation electrode 4 and one end 20 of the third excitation electrode 5;
the distance Gl between one end 22 of the first suspension electrode 7 and one end 20 of the third excitation electrode 5 is 30 micrometers;
the spacing Gd between the end 18 of the first excitation electrode 3 and the end 19 of the second excitation electrode 4 is equal to the spacing Gd between the end 20 of the third excitation electrode 5 and the end 21 of the fourth excitation electrode 6, and the spacing Gd is 140 microns.
Further, the inner diameters of the first metal connector 16 and the second metal connector 17 are both 1 mm, and the diameter of the outflow through hole 15 is 6 mm.
Preferably, the material of the thin film electrode is ITO.
Preferably, the thin film electrode is made of metal.
One end 18 of the first excitation electrode 3 and one end 19 of the second excitation electrode 4 are both at a potential V1. One end 20 of the third excitation electrode 5 and one end 21 of the fourth excitation electrode 6 are both at a potential V2. When no voltage is applied to one end 22 of the first floating electrode 7 and one end 23 of the second floating electrode 8, the potentials of the two electrodes are both (V)1+V2)/2. When mixing the fluid in the mixing channel 12, voltages are applied to one end 22 of the first floating electrode 7 and one end 23 of the second floating electrode 8, respectively, so that the potential of the one end 22 of the first floating electrode 7 is greater than (V)1+V2) The potential of one end 23 of the second floating electrode 8 is less than (V)1+V2) 2; or the potential of one end 22 of the first floating electrode 7 is less than (V)1+V2) The potential of one end 23 of the second floating electrode 8 is larger than (V)1+V2)/2。
According to the micro-mixing chip based on the fixed-potential induced charge electroosmosis, the potential on the surfaces of the two suspension electrodes is changed, so that the capacitance charging of an electric double layer at the junction of the suspension electrodes and fluid is influenced, the electroosmotic flow on the surfaces of the suspension electrodes is changed, two asymmetric electroosmosis vortexes are generated, the fluid in a microchannel is stirred, and the mixing of the fluid is realized. The electrodes in the invention are all thin film electrodes, and compared with three-dimensional complex conductor barriers, the thin film electrodes are easier to prepare. Therefore, the micro-hybrid chip provided by the invention has the advantages of simple and convenient processing steps and easiness in operation, and can solve the problems of complicated processing steps and difficulty in operation of the existing micro-hybrid chip based on induced charge electroosmosis.
Drawings
A fixed potential-based induced charge electroosmosis micro-hybrid chip according to the present invention will be described in more detail hereinafter on the basis of embodiments and with reference to the accompanying drawings, in which:
FIG. 1 is a perspective view of a fixed potential based induced charge electroosmosis micro-hybrid chip according to an embodiment;
FIG. 2 is an enlarged view of the mixing channel in the embodiment;
FIG. 3 is a dimensional view of the mixing channel and electrode tip in an example embodiment;
FIG. 4 is a mixed flow field diagram of the solution B and the solution C in the mixed flow channel when the voltage of 10Vpp is applied to the first excitation electrode and the second excitation electrode, the voltage of the third excitation electrode and the fourth excitation electrode are grounded, the voltage of 8Vpp is applied to the first suspension electrode, the voltage of 2Vpp is applied to the second suspension electrode, and the voltage frequency is 500Hz in the embodiment;
FIG. 5 is a flow chart of PDMS channel processing in the embodiment, where a is a silicon substrate, b is a photoresist, c is a flow channel template, d is a mixture of PDMS and a curing agent, and UV is ultraviolet light;
FIG. 6 is a flow chart of ITO thin film electrode processing in the embodiment, wherein e is an ITO thin film, and f is an electrode template;
FIG. 7 is a bonding diagram of a PDMS cover and an ITO substrate in an example.
In the drawings, like parts are provided with like reference numerals. The drawings are not to scale.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Example (b): the present embodiment is described in detail below with reference to fig. 1 to 7.
The micro-hybrid chip based on fixed potential induced charge electroosmosis comprises a glass substrate 1, a PDMS cover plate 2, a first excitation electrode 3, a second excitation electrode 4, a third excitation electrode 5, a fourth excitation electrode 6, a first suspension electrode 7 and a second suspension electrode 8;
the first excitation electrode 3, the second excitation electrode 4, the third excitation electrode 5, the fourth excitation electrode 6, the first suspension electrode 7 and the second suspension electrode 8 are all thin film electrodes and are all arranged on the upper surface of the glass substrate 1;
a first flow channel 9, a second flow channel 10, a third flow channel 11 and a mixing flow channel 12 are arranged on the lower surface of the PDMS cover plate 2, the inflow end of the mixing flow channel 12 is simultaneously connected with the outflow end of the first flow channel 9 and the outflow end of the second flow channel 10, the outflow end of the mixing flow channel 12 is connected with the inflow end of the third flow channel 11, a first inflow groove 13 is arranged at the inflow end of the first flow channel 9, a second inflow groove 14 is arranged at the inflow end of the second flow channel 10, and an outflow through hole 15 is arranged at the outflow end of the third flow channel 11;
the bottom of the first inflow groove 13 is provided with a first inflow through hole, the bottom of the second inflow groove 14 is provided with a second inflow through hole, and the first inflow through hole, the second inflow through hole and the outflow through hole 15 all penetrate through the PDMS cover plate 2;
the inflow end of the first inflow through hole and the inflow end of the second inflow through hole are respectively connected with a first metal connector 16 and a second metal connector 17;
the upper surface of the glass substrate 1 is opposite to the lower surface of the PDMS cover plate 2 and is hermetically arranged, one end 18 of the first excitation electrode 3 and one end 19 of the second excitation electrode 4 are both attached to one side of the mixing flow channel 12, and one end 20 of the third excitation electrode 5 and one end 21 of the fourth excitation electrode 6 are both attached to the other side of the mixing flow channel 12;
one end 18 of the first excitation electrode 3 is arranged opposite to one end 21 of the fourth excitation electrode 6, one end 22 of the first suspension electrode 7 is arranged between the first excitation electrode and the fourth excitation electrode, and the distance between the one end 22 of the first suspension electrode 7 and the first suspension electrode is equal to that between the first suspension electrode and the second suspension electrode;
one end 19 of the second excitation electrode 4 is arranged opposite to one end 20 of the third excitation electrode 5, one end 23 of the second suspension electrode 8 is arranged between the two excitation electrodes, and the distance between one end 23 of the second suspension electrode 8 and the two suspension electrodes is equal;
the potential difference between one end 18 of the first excitation electrode 3 and one end 21 of the fourth excitation electrode 6 is equal to the potential difference between one end 19 of the second excitation electrode 4 and one end 20 of the third excitation electrode 5;
one end 22 of the first floating electrode 7 and one end 23 of the second floating electrode 8 are the same in size;
the length Lc of one end 22 of the first floating electrode 7 is 1000 micrometers, the width Wc is 80 micrometers, and the distance Gc between the one end 22 of the first floating electrode 7 and one end 23 of the second floating electrode 8 is 100 micrometers;
the length L of the mixing flow channel 12 is 2300 microns, the width W of the mixing flow channel is 180 microns, and the height of the mixing flow channel is 100 microns;
the distance between one end 18 of the first excitation electrode 3 and one end 21 of the fourth excitation electrode 6 is the same as the distance between one end 19 of the second excitation electrode 4 and one end 20 of the third excitation electrode 5;
the distance Gl between one end 22 of the first suspension electrode 7 and one end 20 of the third excitation electrode 5 is 30 micrometers;
the spacing Gd between the end 18 of the first excitation electrode 3 and the end 19 of the second excitation electrode 4 is equal to the spacing Gd between the end 20 of the third excitation electrode 5 and the end 21 of the fourth excitation electrode 6, and the spacing Gd is 140 microns.
The inner diameters of the first metal connector 16 and the second metal connector 17 are both 1 mm, and the diameter of the outflow through hole 15 is 6 mm;
the thin film electrode is made of ITO.
The time-average flow rate of the electroosmotic slip on the suspension electrode can be obtained based on the Helmholtz-Schulego formula:
wherein,<vs>the time-average flow rate of electroosmotic slip, the dielectric constant of the solution, η the viscosity of the solution,in order to induce an electromotive potential, the electric motor,is the potential of the surface of the metal,for the double-layer outside potential,for the complex amplitude of the electric field strength,the complex amplitude of the tangential component of the electric field is the ratio of the capacitances of the diffusion layer and the adsorption layer, and n is a normal vector.
Fig. 3 is a dimensional view of the mixing channel and the electrode tip. The various dimensional parameters in the figure are optimized based on Comsol simulation.
The preparation method of the micro-hybrid chip based on the fixed potential induced charge electroosmosis according to the embodiment comprises the following steps:
firstly, processing a PDMS channel:
(1) and cleaning the silicon substrate: first, the silicon substrate is hand-washed with a cleaning agent. And secondly, sequentially placing the silicon substrate in acetone and isopropanol to respectively ultrasonically clean for 10 minutes. And thirdly, flushing the silicon substrate by using plasma water and drying by using nitrogen. Finally, the dried silicon substrate is placed in a baking oven and heated for 15 minutes at the temperature of 80 ℃.
(2) And flatly paving the photoresist: firstly, a layer of photoresist is coated on the upper surface of a silicon substrate. Secondly, the silicon substrate is placed on a spin coater and rotated at the speed of 1500r/s until the thickness of the photoresist is 100 microns. Finally, the silicon substrate was subjected to pre-baking, placed on a hot plate at 60 ℃, heated to 95 ℃, and heated at that temperature for 1 hour. The photoresist is SU-82050 type negative photoresist.
(3) And exposure: first, a runner template is placed on the photoresist surface. And secondly, pressing the flow channel template and the photoresist surface by using a light-transmitting plate. Finally, the ultraviolet lamp tube is used for exposure.
(4) And developing: first, the exposed silicon substrate was subjected to post-baking, placed on a hot plate at 60 ℃, heated to 95 ℃ and heated at that temperature for 35 minutes. Next, the cooled silicon substrate was placed in an SU-8 developer for development for 10 minutes. And thirdly, carrying out plasma water cleaning and nitrogen blow-drying on the silicon substrate. Finally, the silicon substrate was placed in a baking oven and heated at a temperature of 80 ℃ for 10 to 20 minutes to obtain a PDMS runner mold.
(5) And pouring PDMS: first, PDMS and a curing agent were mixed in a mass ratio of 10:1, and stirred using a clean glass rod for 15 to 20 minutes to be uniformly mixed. Next, the mixture of PDMS and the curing agent was evacuated for 30 minutes using a vacuum pump to eliminate air bubbles in the mixture. And performing silanization treatment on the PDMS flow channel mold to deposit a layer of silane on the surface of the PDMS flow channel mold. Finally, a mixture of PDMS and a curing agent was poured onto the silane side of the PDMS runner mold, and the mixture was evacuated for 20 minutes using a vacuum pump to eliminate air bubbles in the mixture and heated at 80 ℃ for 2 hours to cure the mixture.
The silane layer on the surface of the PDMS flow channel mold serves to prevent the PDMS flow channel mold from sticking to the mixture.
(6) And PDMS channel treatment: first, the cured PDMS was slowly removed from the PDMS runner mold. Next, it was cut into a shape matching the glass substrate with a blade. And finally, setting a first inflow groove, a second inflow groove, a first inflow through hole, a second inflow through hole and an outflow through hole by adopting a groover and a puncher to obtain the PDMS cover plate.
Fig. 5 is a flow chart of PDMS channel processing.
Secondly, processing an ITO thin film electrode:
(1) and cleaning the ITO substrate: the ITO substrate comprises a glass substrate and an ITO thin film, and the cleaning method of the ITO substrate is the same as that of the silicon substrate.
(2) And flatly paving the photoresist: first, a layer of photoresist is coated on the ITO film. Next, the ITO substrate was placed on a spin coater and rotated at 3100r/s for 40 seconds. Finally, the ITO substrate was soft-baked, and placed on a hot plate at 100 ℃ and heated for 6 minutes.
The photoresist is AZ4620 type photoresist.
(3) And exposure: the ITO substrate was placed under an ultraviolet lamp tube for exposure.
(4) And developing: and (3) placing the exposed ITO substrate in an AZ developing solution, and developing for 4 to 5 minutes.
(5) And etching the ITO film: and (3) placing the developed ITO substrate in a hydrochloric acid solution with the mass ratio of 60%, adding ferric chloride serving as a catalyst, soaking for 40 minutes, and corroding the ITO film. In the process, the exposed and cured photoresist layer plays a role in protecting the ITO film, and the ITO film which is not covered by the photoresist is corroded.
(6) And removing the photoresist: and after the ITO film is corroded, soaking the ITO substrate in 5% NaOH solution by mass ratio, and removing the cured photoresist to obtain the ITO film electrode.
FIG. 6 is a flow chart of ITO thin film electrode processing.
Bonding of PDMS cover sheet and ITO substrate
Firstly, a PDMS cover plate is arranged on an ITO substrate and is placed in a cavity of a plasma machine, and plasma treatment is carried out according to the using steps of the plasma machine, so that the PDMS cover plate and the ITO substrate are arranged in a sealing mode, and the micro-mixing chip is formed.
And secondly, taking out the micro-mixing chip, and calibrating the relative position of the mixing flow channel and the thin film electrode under a microscope.
Finally, after the calibration was completed, the micro-hybrid chip was obtained by pressing it vigorously for several minutes, then placing it in a baking oven, and heating it at 80 ℃ for 30 minutes.
FIG. 7 is a bonding diagram of a PDMS cover plate to an ITO substrate.
The application of the micro-hybrid chip based on the fixed potential induced charge electroosmosis according to the embodiment is carried out according to the following steps:
firstly, preparing particles:
(1) and preparing a buffer solution: adding potassium chloride and ammonia water into deionized water to prepare a buffer solution with the pH value of 9.2 and the conductivity of 1 mS/m.
(2) Mixing the buffer solution with the fluorescent powder to obtain the mixture with the concentration of 1.32 × 10-5A solution of fluorescein in mol/L.
(3) Firstly, absolute ethyl alcohol and tween solution are mixed according to the volume ratio of 9:1 to obtain solution A (the main function of the solution is to reduce the adhesion of particles on a flow channel or the surface of an ITO substrate). Next, the solution A was mixed with a buffer solution at a volume ratio of 1:99 to obtain a solution B. And finally, mixing the solution A with a fluorescein solution in a volume ratio of 1:99 to obtain a solution C.
II, experimental operation:
(1) and turning on a computer, a signal generator, a signal amplifier, an oscilloscope, a CCD and a fluorescent lamp switch which are connected with the microscope to observe whether the equipment operates normally, and then turning on Q-Capture Pro image acquisition software to observe the microscope stage in real time.
(2) Firstly, the micro-hybrid chip after plasma treatment is placed on the objective table of a microscope, and the position of the chip and the focal length of the objective lens are adjusted. Then, a small amount of the solution B was injected into the interior of the micro-hybrid chip through the outflow through-hole, and the flow channel inside the micro-hybrid chip was observed with a microscope to ensure complete wetting. Again, two 25 microliter microsyrings were mounted on the syringe pump and the appropriate amounts of solution B and solution C were aspirated, respectively. Finally, the two output ports of the injection pump are respectively arranged in the first inflow through hole and the second inflow through hole through the metal connector.
(3) Firstly, connecting the first excitation electrode, the second excitation electrode, the third excitation electrode, the fourth excitation electrode, the first suspension electrode and the second suspension electrode with a signal amplifier. Next, a signal amplifier is connected to the signal generator. And finally, adjusting the amplitude, the phase and the frequency of the output voltage signal of the signal generator and the flow control parameter of the injection pump.
The optimal values of the amplitude, the phase and the frequency of the output voltage signal are obtained by Comsol simulation optimization.
(4) And starting the injection pump to make the solution B and the solution C flow into the first flow channel and the second flow channel respectively at given flow rates, and starting the signal generator when the flow rate of the fluid in the mixing flow channel is stable.
(5) And observing the mixed flow channel through a microscope, and adjusting the position of the micro-mixing chip and the focal length of the objective lens again until the observed fluorescein particles are clear and the stability is high, and detecting and recording the video.
(6) And (5) repeating the steps (3) to (5), continuously adjusting the voltage, the frequency and the flow rate, observing the experimental phenomenon and recording.
(7) Processing and analyzing experimental data.
FIG. 4 is a mixed flow field diagram of the solution B and the solution C in the mixed flow channel when a voltage of 10Vpp is applied to the first excitation electrode and the second excitation electrode, the third excitation electrode and the fourth excitation electrode are grounded, a voltage of 8Vpp is applied to the first floating electrode, a voltage of 2Vpp is applied to the second floating electrode, and the voltage frequency is 500 Hz. It can be observed from fig. 4 that at the outflow end of the mixing channel, the solution B and the solution C are well mixed.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that features described in different dependent claims and herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.
Claims (5)
1. The micro-hybrid chip based on the fixed potential induced charge electroosmosis is characterized by comprising a glass substrate (1), a PDMS cover plate (2), a first excitation electrode (3), a second excitation electrode (4), a third excitation electrode (5), a fourth excitation electrode (6), a first suspension electrode (7) and a second suspension electrode (8);
the first excitation electrode (3), the second excitation electrode (4), the third excitation electrode (5), the fourth excitation electrode (6), the first suspension electrode (7) and the second suspension electrode (8) are all thin film electrodes and are all arranged on the upper surface of the glass substrate (1);
a first flow channel (9), a second flow channel (10), a third flow channel (11) and a mixing flow channel (12) are arranged on the lower surface of the PDMS cover plate (2), the inflow end of the mixing flow channel (12) is simultaneously connected with the outflow end of the first flow channel (9) and the outflow end of the second flow channel (10), the outflow end of the mixing flow channel (12) is connected with the inflow end of the third flow channel (11), a first inflow groove (13) is formed in the inflow end of the first flow channel (9), a second inflow groove (14) is formed in the inflow end of the second flow channel (10), and an outflow through hole (15) is formed in the outflow end of the third flow channel (11);
the bottom of the first inflow groove (13) is provided with a first inflow through hole, the bottom of the second inflow groove (14) is provided with a second inflow through hole, and the first inflow through hole, the second inflow through hole and the outflow through hole (15) all penetrate through the PDMS cover plate (2);
the inflow end of the first inflow through hole and the inflow end of the second inflow through hole are respectively connected with a first metal connector (16) and a second metal connector (17);
the upper surface of the glass substrate (1) is opposite to the lower surface of the PDMS cover plate (2) and is hermetically arranged, one end (18) of the first excitation electrode (3) and one end (19) of the second excitation electrode (4) are both attached to one side of the mixing flow channel (12), and one end (20) of the third excitation electrode (5) and one end (21) of the fourth excitation electrode (6) are both attached to the other side of the mixing flow channel (12);
one end (18) of the first excitation electrode (3) is opposite to one end (21) of the fourth excitation electrode (6), one end (22) of the first suspension electrode (7) is arranged between the first excitation electrode and the fourth excitation electrode, and the distance between one end (22) of the first suspension electrode (7) and the first suspension electrode is equal to that between the first excitation electrode and the fourth excitation electrode;
one end (19) of the second excitation electrode (4) is opposite to one end (20) of the third excitation electrode (5), one end (23) of the second suspension electrode (8) is arranged between the second excitation electrode and the third excitation electrode, and the distance between one end (23) of the second suspension electrode (8) and the second suspension electrode is equal;
the potential difference between one end (18) of the first excitation electrode (3) and one end (21) of the fourth excitation electrode (6) is equal to the potential difference between one end (19) of the second excitation electrode (4) and one end (20) of the third excitation electrode (5).
2. The micro-hybrid chip of claim 1, wherein one end (22) of the first floating electrode (7) is the same size as one end (23) of the second floating electrode (8);
the length Lc of one end (22) of the first suspension electrode (7) is 1000 micrometers, the width Wc is 80 micrometers, and the distance Gc between one end (22) of the first suspension electrode (7) and one end (23) of the second suspension electrode (8) is 100 micrometers;
the length L of the mixing flow channel (12) is 2300 micrometers, the width W of the mixing flow channel is 180 micrometers, and the height of the mixing flow channel is 100 micrometers;
the distance between one end (18) of the first excitation electrode (3) and one end (21) of the fourth excitation electrode (6) is the same as the distance between one end (19) of the second excitation electrode (4) and one end (20) of the third excitation electrode (5);
the distance Gl between one end (22) of the first suspension electrode (7) and one end (20) of the third excitation electrode (5) is 30 micrometers;
the distance Gd between one end (18) of the first excitation electrode (3) and one end (19) of the second excitation electrode (4) is equal to the distance between one end (20) of the third excitation electrode (5) and one end (21) of the fourth excitation electrode (6), and the distance Gd is 140 micrometers.
3. The micro-hybrid chip of claim 2, wherein the first metal connector (16) and the second metal connector (17) each have an inner diameter of 1 mm, and the outflow through-hole (15) has a diameter of 6 mm.
4. The micro-hybrid chip of claim 1, wherein the thin film electrode is made of ITO.
5. The micro-hybrid chip of claim 1, wherein the thin film electrode is made of metal.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106824318A (en) * | 2017-03-29 | 2017-06-13 | 哈尔滨工业大学 | A kind of minute yardstick particle separating chips based on induced charge electric osmose and dielectrophoresis and preparation method and application |
| CN109289953A (en) * | 2018-11-14 | 2019-02-01 | 哈尔滨工业大学 | Minute yardstick particle separating chips and the method for separating minute yardstick particle using the chip |
| CN110330393A (en) * | 2019-07-17 | 2019-10-15 | 南京理工大学 | A kind of nanometer grade explosive preparation system and method based on passive type micro-mixer |
| CN113522381A (en) * | 2021-05-26 | 2021-10-22 | 西北工业大学太仓长三角研究院 | Different concentration liquid drop produces chip based on induction charge electroosmosis |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996004547A1 (en) * | 1994-08-01 | 1996-02-15 | Lockheed Martin Energy Systems, Inc. | Apparatus and method for performing microfluidic manipulations for chemical analysis and synthesis |
| JP2006320877A (en) * | 2005-05-20 | 2006-11-30 | Univ Of Tokyo | Micro-mixer, stirring method for fluid and mixing method for fluid |
| JP2007061672A (en) * | 2005-08-29 | 2007-03-15 | Furuido:Kk | Micro fluid device, and protein crystallization device using the same |
| CN101923097A (en) * | 2010-07-05 | 2010-12-22 | 中国计量学院 | Wall potential optimization method for reducing sample bandwidth in electric microfluidic chip |
| CN103816805A (en) * | 2012-11-16 | 2014-05-28 | 中国科学院理化技术研究所 | Electroosmosis micropump device |
| CN104511258A (en) * | 2014-12-22 | 2015-04-15 | 华中科技大学 | Temperature bias field-applied AC electrothermal microfluidic mixer and AC electrothermal microfluidic mixing method |
| CN204746344U (en) * | 2015-05-13 | 2015-11-11 | 中国科学院理化技术研究所 | Electroosmosis micropump device |
| CN105536894A (en) * | 2015-12-02 | 2016-05-04 | 哈尔滨工业大学 | High flux micro mixed chip based on alternating current heat, preparation method and applications thereof |
-
2016
- 2016-09-13 CN CN201610821540.5A patent/CN106345543B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996004547A1 (en) * | 1994-08-01 | 1996-02-15 | Lockheed Martin Energy Systems, Inc. | Apparatus and method for performing microfluidic manipulations for chemical analysis and synthesis |
| JP2006320877A (en) * | 2005-05-20 | 2006-11-30 | Univ Of Tokyo | Micro-mixer, stirring method for fluid and mixing method for fluid |
| JP2007061672A (en) * | 2005-08-29 | 2007-03-15 | Furuido:Kk | Micro fluid device, and protein crystallization device using the same |
| CN101923097A (en) * | 2010-07-05 | 2010-12-22 | 中国计量学院 | Wall potential optimization method for reducing sample bandwidth in electric microfluidic chip |
| CN103816805A (en) * | 2012-11-16 | 2014-05-28 | 中国科学院理化技术研究所 | Electroosmosis micropump device |
| CN104511258A (en) * | 2014-12-22 | 2015-04-15 | 华中科技大学 | Temperature bias field-applied AC electrothermal microfluidic mixer and AC electrothermal microfluidic mixing method |
| CN204746344U (en) * | 2015-05-13 | 2015-11-11 | 中国科学院理化技术研究所 | Electroosmosis micropump device |
| CN105536894A (en) * | 2015-12-02 | 2016-05-04 | 哈尔滨工业大学 | High flux micro mixed chip based on alternating current heat, preparation method and applications thereof |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106824318A (en) * | 2017-03-29 | 2017-06-13 | 哈尔滨工业大学 | A kind of minute yardstick particle separating chips based on induced charge electric osmose and dielectrophoresis and preparation method and application |
| CN106824318B (en) * | 2017-03-29 | 2019-03-08 | 哈尔滨工业大学 | A kind of minute yardstick particle separating chips and the preparation method and application thereof based on induced charge electric osmose and dielectrophoresis |
| CN109289953A (en) * | 2018-11-14 | 2019-02-01 | 哈尔滨工业大学 | Minute yardstick particle separating chips and the method for separating minute yardstick particle using the chip |
| CN109289953B (en) * | 2018-11-14 | 2020-11-27 | 哈尔滨工业大学 | Micro-scale particle separation chip and method for separating micro-scale particles by using same |
| CN110330393A (en) * | 2019-07-17 | 2019-10-15 | 南京理工大学 | A kind of nanometer grade explosive preparation system and method based on passive type micro-mixer |
| CN110330393B (en) * | 2019-07-17 | 2021-11-30 | 南京理工大学 | Nano explosive preparation system and method based on passive micro mixer |
| CN113522381A (en) * | 2021-05-26 | 2021-10-22 | 西北工业大学太仓长三角研究院 | Different concentration liquid drop produces chip based on induction charge electroosmosis |
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