CN102417157A - Driving and control method of liquid crystal microfluid used for MEMS - Google Patents
Driving and control method of liquid crystal microfluid used for MEMS Download PDFInfo
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- CN102417157A CN102417157A CN2011102819983A CN201110281998A CN102417157A CN 102417157 A CN102417157 A CN 102417157A CN 2011102819983 A CN2011102819983 A CN 2011102819983A CN 201110281998 A CN201110281998 A CN 201110281998A CN 102417157 A CN102417157 A CN 102417157A
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Abstract
The invention discloses a driving and control method of a liquid crystal microfluid used for an MEMS. The method comprises the steps of: 1. manufacturing a liquid crystal cell, comprising a three-layer structure glass plate consisting of a electro-conductive glass plate layer, a transparent electrode layer and an alignment high molecular film; step 2. selecting liquid crystal with good polarized characteristics or liquid crystal with large deformation and strong deflection electrical effect, filling into the liquid crystal cell and sealing; step 3. welding lead on the liquid crystal cell and applying electric / magnetic field as an input; step 4. selecting liquid crystal with good polarized characteristics and adjusting level and direction of the input of the electric / magnetic field to obtain a liquid crystal drainage effect based liquid crystal flow; step 5. selecting liquid crystal with large deformation and strong deflection electrical effect and adjusting the electric / magnetic field input to obtain a liquid crystal deflection electric effect based crystal flow. The invention has a simple structure, is easily controlled, and can rely on heat, pressure and magnetic field to drive the liquid crystal and utilize switching among each field to control a direction of the liquid crystal flow at junctions of a micro channel.
Description
Technical field:
The invention belongs to microfluid and drive and the control technology field, the liquid crystal microfluid that particularly relates to a kind of MEMS of being used for drives and control method.
Background technology:
At present existing microfluid drives with control technology and is divided into two big types, and one type is to drive from macrofluid to transplant the type of drive of coming, like mechanical pressure differential, centrifugal force driving, electric hydro powered etc.; Another kind of is the type of drive that designs according to fluid behaviour under the minute yardstick, like surface tension driving, thermal driving and the driving of electric osmose formula etc.Under the condition of micro-system, owing to reducing of yardstick, the face of microfluidic device/body is than increase greatly, and capillary influence becomes fairly obvious, and variation has taken place the flow behavior of fluid.Therefore, often effect is bad or even infeasible microchannel drive to transplant the driving of coming and control method from macrofluid.Secondly, in recent years, micro-system has related to nanochannel more and more and has received current control, becomes one of important platform that carries out life science, pharmacy, chemistry and Chemical Engineering research on the molecular level.Fluid control begins to trend towards the driving of on low discharge level more (pl/min); The more concern flow is a 100pl/min-50 μ l/min scope; Pressure is the fluid drives that several centimeter water columns do not wait to several standard atmospheric pressures; And requiring flow/pressure controlled under many circumstances, flowing phase is formed and is flowed to controlled.And there is mechanical movable member mostly in the microactrator complex structure of the type of drive of directly transplanting, must receive the restriction of processing technology and precision, is difficult to microminiaturized and accurate, the driving flexibly of realization, and reliability and life-span are not high yet, can't reach application standard.The big limitations of factor to sum up transplant the type of drive come from macroscopic view and drive application and development with the control field at microfluid.
According to the type of drive of fluid behaviour design under the minute yardstick, comparative maturity be that electric osmose drives.Its control principle is that the action drives fluid that utilizes EOF to produce pump and valve flows in microchannel.At microfluid system, especially in biological and electrophoresis chip, obtained using widely.But its shortcoming also clearly: at first, EOF is to pipe wall material and responsive by the physicochemical properties of drive fluid, so it only is applicable to the fluid and the pipe wall material of certain limit.Secondly, produce the needed high voltage source of EOF and can bring safety, power consumption and the big problem that takes up space, this is unfavorable for the microminaturization of system; At last, although EOF is suitable for driving and controlling narrow ducted micro liquid, because the Joule heat problem, it but can not the wideer ducted fluid of high-speed driving, and this ability is very necessary in many microfluid systems are used.
Summary of the invention:
The liquid crystal microfluid that the purpose of this invention is to provide a kind of MEMS of being used for (microelectromechanical systems) drives and control method; Shortcomings such as existing driving method driving voltage height, complex structure, driving force be little have been overcome; Simple in structure; Be easy to control, and can rely on heat, pressure, field drives liquid crystal, utilize the switching of each to control the direction that liquid crystal flows in the crossing of microchannel.Its drive principle is as shown in Figure 1; Because the anisotropy of liquid crystal; Under the effect in electricity/magnetic field, liquid crystal molecule can rotate, again because liquid crystal also has flowability; Therefore the rotation of liquid crystal molecule can cause the variation of velocity gradient, and the variation of the velocity gradient of microcosmic is exactly the generation that liquid crystal flows in the performance of macroscopic view.
The present invention adopts following technical scheme:
A kind of liquid crystal microfluid that is used for MEMS drives and control method, wherein, comprises the steps:
Further, the electro-conductive glass flaggy of said liquid crystal cell box body adopts the ITO conductive glass plate, and transparent electrode layer adopts the ITO film, and the orientation macromolecule layer adopts polyimide film.
Further, distance is the 5-100 micron between the glass plate of said liquid crystal cell box body.
Beneficial effect of the present invention is:
The invention belongs to on-mechanical drives; On-mechanical drives and refers to through transforming or be applied directly to the type of drive that is made it to have kinergety on the drive fluid to other form of energy (electricity, light, magnetic, heat); Because it is generally no movable member structure, therefore is commonly referred to dynamic Continuous Flow and drives.Compare with other type of drive, that this driving has is simple in structure, do not have movable member, size little with can be integrated on a large scale etc. advantage; And do not receive to be limited by the drive fluid medium character, be easy to control circuit and fluid line are become one, be a kind of more satisfactory driving and control mode.The lateral dimension of the velocity magnitude of liquid crystal stream and pipeline or lateral road is irrelevant in this type of drive, is easy to control; And can rely on heat, pressure, field drives liquid crystal, utilize the switching of each to control the direction that liquid crystal flows in the crossing of microchannel.Optimize the geometry of passage, can produce different flow rate at the different parts of microfluidic devices.In addition, liquid crystal stream does not require the physicochemical properties of pipeline or channel wall flooring.These advantages have satisfied the requirement of microfluid driven application basically.The present invention has ground-breaking meaning, and its achievement can promote the development of microfluid components and parts such as Micropump, little valve, widens its application, has broad application prospects at aspects such as Aeronautics and Astronautics, medicine equipments especially chip lab.
Description of drawings:
Fig. 1 is drive principle figure of the present invention;
Fig. 2 is the structural representation of embodiment of the invention 1-3 liquid crystal cell;
Fig. 3 is the structural representation of the embodiment of the invention 4 liquid crystal cell glass plates and stacks sketch map;
Fig. 4 is an alignment film rubbing method sketch map;
Fig. 5 is the liquid crystal cell sketch map of the embodiment of the invention 5.
Fig. 6 is the liquid crystal cell glass plate sketch map of the embodiment of the invention 6.
The specific embodiment:
Below in conjunction with embodiment the present invention is further described:
As shown in Figure 1; Drive principle of the present invention is under the external energy effect of (comprising electricity, magnetic, heat etc.); Long bar-shaped liquid crystal molecule is arranged again, and the rotation of molecule has produced the velocity gradient of microcosmic, and flow of liquid crystal property flows the liquid crystal that the gradient of this microcosmic shows as macroscopic view; Objectively accomplished by the conversion of electric energy, for liquid crystal provides condition as the driven medium that microfluid drives with control method to mechanical energy.The precondition of accomplishing this process is that at first carrier must have directionality simultaneously with mobile, and secondly carrier molecule must possess the character and the shape that can be polarized.
The present invention utilizes liquid crystal deflection electrical effect and liquid crystal drainage effect, carries out microfluid and drives and control, below details respectively.
The liquid crystal microfluid that is used for MEMS drives and control method (based on liquid crystal deflection electrical effect), and its concrete steps are following:
Exhibition song or crooked deformation meeting cause the polarization of liquid crystal in liquid crystal, and electric field also can make liquid crystal generation deformation conversely, and this effect is referred to as the deflection electrical effect of liquid crystal, simply, is similar to the piezo-electric effect of crystal.But because flow of liquid crystal property can show with the mode of macro flow, therefore can reach the purpose that electric energy is converted into mechanical energy after liquid crystal molecule generation deformation, realize the driving and the control of microfluid through this effect.Just through the input of electric field, cause the liquid crystal molecule shape variation, shape variation causes the molecules align mode to change, thus the formation that causes liquid crystal to flow, as output.
It is accurately controlled being flowed by the caused liquid crystal of deflection electrical effect; And the piezo-electric effect of the allomeric is the same, and also there is adverse effect in the deflection electrical effect of liquid crystal, i.e. the deformation of liquid crystal molecule can cause the variation of electric field; Produce faint drive current, this also can be used in microfluid drives.In addition, the deflection electrical effect of liquid crystal is compared with the piezo-electric effect of crystal and need not very high driving voltage, can realize real low voltage drive.And the essence of liquid crystal belongs to fluid, does not have fixed shape, can be poured in the liquid crystal cell of arbitrary shape, and therefore the shape to liquid crystal cell does not require, and greatly reduces the degree of dependence to micro-processing technology, has widened the range of application of this driving method.
Based on the driving method of liquid crystal drainage effect, its concrete steps are following:
The drainage effect of liquid crystal is meant outside under the effect that powers up (magnetic) field, the phenomenon that arrangement interaction mobile by liquid crystal and its interior molecules director (the average sensing of all molecules near the inner a bit zonule of liquid crystal) is caused.Can convert electricity (magnetic) into mechanical energy output through this effect, promptly cause the variation of liquid crystal alignment direction through electricity (magnetic) field of input, the variation of orientation causes the drainage (flowing) of liquid crystal again, with this mobile as output.
Manufacturing process in the face of liquid crystal cell of the present invention elaborates down, and employed glass plate is made up of three-decker in the liquid crystal cell, is respectively glass plies, transparent electrode layer and orientation macromolecule layer.With simple translation box is example, and concrete steps are following:
1, the film forming of transparent electrode layer:
Transparent electrode layer is method sputter transparent indium tin oxide (ITO) conductive film coating and the high-tech product that obtains through The high temperature anneal on transparent organic film material that adopts magnetron sputtering.The thickness of ITO rete is different, and the electric conductivity of film is also different with light transmission.Concrete implementation method is to utilize A r-O
2Plasma in the mixed atmosphere is under the effect of electric field and alternating magnetic field, to In-Sn alloys target or In
2O
3-SnO
2Oxide target or ceramic target are bombarded, the high-energy particle bombardment target material surface that is accelerated, and the atom of target material surface breaks away from former lattice and overflows after the energy exchange, and transfers to matrix surface and film forming.
2, the cleaning of ITO electro-conductive glass:
Electro-conductive glass was dipped in the acetone with ultrasonic oscillation after 60 minutes, again to clean in the distilled water, next was reentered in the acetone concussion 60 minutes, concussion is 30 minutes in distilled water, puts into the deionized water concussion again and is placed on vacuum oven in 60 minutes and dries.
3, the film forming of alignment film:
Polyimide solution is spun on glass pane surface, and spin-coating method is meant polyimide liquid is dripped to glass pane surface, and glass plate is rotated at a high speed, obtains the method for thin film through action of centrifugal force.
4, the sclerosis of alignment film:
Glass plate after the film forming is placed on predry in the heater, makes the evaporation of moisture and solvent, send into again in the baking box, carried out solid film in 90 minutes with 150 ° temperature baking.
5, friction matching:
Glass plate vacuum suction behind the solid film on the brace table of friction matching machine, is set the velocity of rotation of orientation machine brace table translational speed and direction and friction roller bearing and carried out orientation.
6, envelope frame:
The glass plate that two orientations are accomplished is coated the frame glue that contains spacer particle (selecting spacer particle according to the interval needs) on every side respectively, only stay to fill and use breach, be placed on then in the vacuum oven with 150 ° of pre-hardening of carrying out 3-5 minute.Again it is taken out the back and fit, put into the cover pressing, put into vacuum oven at last and harden, about 90 minutes, temperature was 150 °.
More than be the making step of liquid crystal cell.
The process that liquid crystal is filled: the liquid crystal cell that completes is placed on the support with the mode that tilts; An amount of liquid crystal of fine-still is placed on the filling mouth position of reserving in the liquid crystal cell manufacturing process; Put into vacuum oven; Air in the liquid crystal cell is removed fully, slowly returned to normal pressure then, reserving a liquid crystal of filling the mouth place will be full of liquid crystal cell automatically through capillarity.
The process of sealing is following: the liquid crystal cell opening portion that will charge into behind the liquid crystal seals with UV glue, and penetrates with UV illumination with the part that aluminium-foil paper encases liquid crystal again and to make the sclerosis of UV glue, and completion is sealed.
The process of welding lead is following: the liquid crystal cell after will sealing is applied to two glass pane surface with metallic tin equably with the ultrasonic wave welding gun, wire bonds is got on again.
Embodiment 1:
Make liquid crystal cell according to step 1-6, as shown in Figure 2,1 is electrode, and 2 is liquid crystal, and 3 is power line; ELD adopts the ITO film, and alignment film adopts polyimides.Institute's topping up is brilliant in being out of shape the MBBA big, that the deflection electrical effect is stronger in the box body.Liquid crystal cell is selected the square shape for use, and distance is 10 microns (selecting diameter in the manufacturing process is that 10 microns polystyrene particle is as spacer particle) between dull and stereotyped (being glass plate), and applying voltage is 5 volts.Can obtain the liquid crystal flowing velocity of 150 little meter per seconds and the driving stress of about 5 handkerchiefs (liquid crystal cell upper plate place).
Embodiment 2:
Make liquid crystal cell according to step 1-6; With embodiment 1 difference be glass plate complete after with overlapping behind the upper plate Rotate 180 ° with lower glass plate; Seal steps such as frame, welding then; Any variation does not take place in the structure of liquid crystal cell, and is as shown in Figure 2, and the purpose of upper plate Rotate 180 ° is just in order to change the initial orientation of the inner liquid crystal molecule of liquid crystal cell.Institute's topping up is brilliant in being out of shape the MBBA big, that the deflection electrical effect is stronger in the box body.Distance is 10 microns between flat board, and applying voltage is 5 volts.Can obtain the liquid crystal flowing velocity of 130 little meter per seconds and the driving stress of about 4 handkerchiefs (liquid crystal cell upper plate place), and flow and stress direction opposite with embodiment 1.
Embodiment 3:
Make liquid crystal cell according to above step 1-6, structure is identical, as shown in Figure 2 with embodiment 1,2.Liquid crystal cell is selected the square shape for use, and primary condition is: the spacing of two glass plates is 5 microns (selecting diameter in the manufacturing process is that 5 microns polystyrene particle is as spacer particle), and ELD adopts the ITO film, and alignment film adopts polyimides.Institute's topping up crystalline substance be polarizability 5CB preferably in the box, and input voltage is when being 5 volts, and the liquid crystal flowing velocity that can access about 230 little meter per seconds is exported, and the stress of about 22 handkerchiefs is exported.
Embodiment 4:
Make the liquid crystal cell glass plate according to above step 1-5, electrode film has adopted magnetically controlled DC sputtering to become embrane method, when upper plate is carried out the ITO plated film, has adopted all methods of plated film of glass plate all surface shown in Figure 3, power line is received the outer surface of upper plate; Among Fig. 3,4 are the orientation polymeric membrane, and 5 is transparency electrode; 6 is glass plate, and Fig. 3 a is the lower glass plate sketch map, and Fig. 3 b is the upper glass plates sketch map; 7 is lower glass plate, and 8 is upper glass plates, and 9 is power line.Alignment film adopts rubbing manipulation, and is as shown in Figure 4, and 10 are the friction roller bearing, and 11 is brace table, and 12 is glass plate, and 13 is polymeric membrane.The cloth of the usefulness that generally will rub twines on the friction mandrel and lets its rotation, the glass plate that scribbles polymeric membrane is placed under the friction mandrel on the brace table brace table of translation simultaneously.The direction of rotation of friction mandrel and the moving direction of brace table are shown in 4 (a).Glass plate and the orientation state that will form after liquid crystal molecule contacts shown in 4 (b) through above friction treatment.Lower glass plate shown in Fig. 3 (a) is fixed, drip the brilliant 5CB of a dropping liquid above, the upper glass plates shown in Fig. 3 (b) is suspended is put on the liquid crystal drop then, unfixing shown in Fig. 3 (c).At this moment, in order to let dull and stereotyped interbody spacer keep certain, need spread some diameters in liquid crystal inside and be equivalent to required dull and stereotyped polystyrene particle at interval.So just made a lower plate and fixed, the unfixed liquid crystal cell of upper plate.No longer seal steps such as frame, welding.Apply electric field to inner liquid crystal and bring out mobilely, because upper plate suspends, liquid crystal has certain viscosity, can drive the upper plate motion so the liquid crystal that causes being brought out flows.Final result is: distance is 50 microns when between flat board, and during 10 volts of institute's making alives, the liquid crystal that electric field driven produced flows and can drive upper plate and move with the speed of 90 little meter per seconds.
Embodiment 5:
Make two glass plates of liquid crystal cells according to embodiment 4, difference is upper plate is made as circle, and 12 millimeters of diameters, thickness are 0.15 millimeter, about 0.04 gram of quality, and make liquid crystal molecule along the orientation of upper glass plates circumferencial direction during orientation, shown in Fig. 5 (a).Upper and lower plates structure among other steps and the embodiment 4 is identical, and upper and lower plates stacks effect shown in Fig. 5 (c) after making, and among Fig. 5 (c), 14 is upper glass plates, and 15 is lower glass plate, and 16 is power line.Apply 10 volts equally; Because alignment direction is a circumferencial direction; Therefore it also will be the circumferencial direction along glass plate that the liquid crystal that produces flows; Shown in Fig. 5 (b), such liquid crystal flows and will drive upper glass plates and make circular motion, and the liquid crystal that the experimental result proof is produced flows and can drive the speed rotation of upper plate with 0.14rpm.
Embodiment 6:
Make two glass plates of liquid crystal cell according to the step of embodiment 4, difference is to carry out in the zones of different of upper and lower plate that the frictional direction of friction matching is different, and as shown in Figure 6,17 is alignment film, and 18 is electrode film, and 19 is glass plate.Electrode film adopts three Region Segmentation methods, isolates between the zone.Stack among effect and the embodiment 4 consistent, shown in Fig. 3 (c).All the other conditions are: distance between plates is from being 100 microns, 10 volts of institute's making alives, and alive mode and front experiment are different, and the mode that adopts zone one by one to apply in turn is approximately 5 seconds at interval.Can obtain upper plate with as above condition and driven, maximal rate about 31 little meter per seconds during the positive direction motion, about 20 little meter per seconds during the negative direction motion with the zigzag mode.
Explanation is at last; Above embodiment is only unrestricted in order to technical scheme of the present invention to be described; Other modifications that those of ordinary skills make technical scheme of the present invention perhaps are equal to replacement; Only otherwise break away from the spirit and the scope of technical scheme of the present invention, all should be encompassed in the middle of the claim scope of the present invention.
Claims (3)
1. a liquid crystal microfluid that is used for MEMS drives and control method, it is characterized in that: comprise the steps:
Step 1 is made liquid crystal cell, and the glass plate of said liquid crystal cell box body is made up of three-decker, is respectively electro-conductive glass flaggy, transparent electrode layer and orientation macromolecule layer;
Step 2, the liquid crystal that liquid crystal that the selection polarization characteristic is good or deformation are big, the deflection electrical effect is strong charges into liquid crystal cell, seals;
Step 3, welding lead on liquid crystal cell applies electricity/magnetic field as input quantity;
Step 4, if select the good liquid crystal of polarization characteristic in the step 2, size, the direction character amount of then regulating the input quantity in electricity/magnetic field obtain flowing based on the liquid crystal of liquid crystal drainage effect;
Step 5 if select the liquid crystal that deformation is big, the deflection electrical effect is strong in the step 2, is then regulated electricity/magnetic field input quantity and is flowed with the liquid crystal that obtains based on the deflection electrical effect of liquid crystal.
2. a kind of liquid crystal microfluid that is used for MEMS according to claim 1 drives and control method; It is characterized in that: the electro-conductive glass flaggy of said liquid crystal cell box body adopts the ITO conductive glass plate; Transparent electrode layer adopts the ITO film, and the orientation macromolecule layer adopts polyimide film.
3. a kind of liquid crystal microfluid that is used for MEMS according to claim 1 and 2 drives and control method, and it is characterized in that: distance is the 5-100 micron between the glass plate of said liquid crystal cell box body.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105129721A (en) * | 2015-09-10 | 2015-12-09 | 上海理工大学 | Micro actuator based on liquid crystal back flow effect, actuating device and dynamic performance measurement device of micro actuator |
| CN105300656A (en) * | 2015-08-18 | 2016-02-03 | 河南工业大学 | Liquid crystal drainage generation and testing method for microfluid drive |
| JP2016149821A (en) * | 2015-02-10 | 2016-08-18 | 高知県公立大学法人 | High-performance power generation mechanism using liquid crystal flow |
| CN110605147A (en) * | 2019-09-18 | 2019-12-24 | 重庆大学 | Liquid crystal-based temperature control micro valve and single-stage and multi-stage control system thereof |
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Application publication date: 20120418 |