CN205055830U - Electric osmose micropump device - Google Patents
Electric osmose micropump device Download PDFInfo
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- CN205055830U CN205055830U CN201520728194.7U CN201520728194U CN205055830U CN 205055830 U CN205055830 U CN 205055830U CN 201520728194 U CN201520728194 U CN 201520728194U CN 205055830 U CN205055830 U CN 205055830U
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Abstract
The utility model relates to a micro -fluidic technical field especially relates to an electric osmose micropump device. The utility model provides an electric osmose micropump device, including the electric osmose miniflow say with liquid microelectrode runner, set up electrically conductive gel mould respectively at the both ends that the electric osmose miniflow was said, simultaneously electrically conductive gel mould and electric osmose miniflow say that outside liquid electrode miniflow says the contact, liquid microelectrode runner is inside packs the anhydrous conducting solution bodily form and becomes the microelectrode, fluid contact in can avoiding like this that the microelectrode is direct and saying with the electric osmose miniflow has solved the problem that influences the interior fluid flow of electric osmose miniflow way because of electrode surface hydrolysis gassing and hydrolysate, simultaneously, because the liquid electrode miniflow packs in saying the anhydrous conducting solution body, can avoid the hydrolysis reaction on microelectrode surface and the production of electric current joule heat totally, and then improve the microelectrode interference killing feature, simplify electric osmose micropump device's structure, reduce manufacturing cost, stability, reliability and the life of the operation of reinforcing micropump.
Description
Technical field
The utility model relates to microfluidic art, particularly relates to a kind of electric osmose Micropump device.
Background technology
Electric osmose Micropump is a kind of automatically controlled micro-fluidic driving pump based on EOF.When microfluid enters fluid channel in Micropump pump, runner wall solid-liquid interface place will form one deck electric double layer, when loading parallel electric field along fluid channel direction, fluid channel wall electric double layer occurs to shear migration and forms driven by electroosmosis power under electric field force effect, this driving force directly acts on neighbouring microfluid, drive it to flow, form EOF.Owing to having, drive fluid scope is wide, the continuous pulse free that flows, mechanical moving component, the large high-voltage performance of flow is good, reliability is high, long service life, and the feature such as the accurate control of rate of flow of fluid or pump pressure and the bidirectional modulation of the flow direction can be realized by electric operating, electric osmose Micropump gets the attention in micro-fluidic field, at present microfluid (buffer solution, pharmaceutical agent, suspension etc.) sample introduction transports, micro-move device actuator (microring array, microfocus, differential from etc.), there is embody rule in the micro-fluidic field such as microelectronic chip cooling.
Conventional electric osmose Micropump many employings solid metallic makes electrode, and electrode is arranged in pump and directly contacts with microfluid near fluid channel, produces under voltage and drives electric field.Directly contacting with fluid, easily there is hydrolysis and produces bubble, hydrolysising by-product, Joule heat etc. in electrode on surface.Along with the carrying out of hydrolysis, bubble and hydrolysising by-product can be collected at electrode surface gradually and reduce on-load voltage effective rate of utilization, even can flow to fluid channel and block electrokinetic flow.Although adopt inertia platinum or gold electrode can weaken hydrolysis to a certain extent, but still cannot thoroughly eliminate.
Current solution to the problems described above utilizes gel-type polymeric film to drive fluid channel to carry out physics at solid metallic electrode and pump electroendosmosis to separate.Solid metallic electrode is immersed in the lysis buffer of gel film side, keeps electrical contact by lysis buffer and gel film, and driven by electroosmosis fluid channel is then direct carries out electrical contact by microfluid and gel film.This gel-like material requires to have good conduction and water resistance, effectively can avoid the direct electrical contact of metal electrode and fluid channel electroendosmosis fluid, and the flowing of protection fluid channel electroendosmosis makes it not by electrode surface hydrolysis reaction interference.
In electric osmose Micropump running, when surface of metal electrode generation hydrolysis produces bubble, the gel film be arranged between metal electrode and fluid channel can stop bubble completely, hydrolysising by-product flows to interference driven by electroosmosis in fluid channel, thus makes EOF maintain constant flow.
Although said mechanism can reduce metal electrode hydrolysis to the impact of electric osmose fluid channel inner fluid flowing, but because solid metallic electrode still needs to contact with the lysis buffer of gel film side, therefore still can there is hydrolysis in electrode surface, produce bubble and hydrolysate, although the flowing of electric osmose fluid channel inner fluid can not be affected, but can have an impact to driving voltage, therefore, usually need arrange exhaust component at ate electrode drains into outside pump by bubble, pump body structure will be made so more complicated, and manufacturing cost also can increase.Other hydrolysate dissolved in a fluid then cannot be discharged.
In addition, existing electric osmose Micropump device is generally both sides electrode being located at electric osmose fluid channel, because electric osmose fluid channel and electrode fluid channel are as silicon by electrically non-conductive material, glass, PDMS (dimethyl silicone polymer) or quartz etc. are made, silicon between electric osmose fluid channel and electrode fluid channel, glass, the material such as PDMS or quartz physics interlayer resistance is very large, most of on-load voltage can be consumed, and only have small part voltage-drop loading to produce in the electric osmose fluid channel of driven by electroosmosis power, therefore need very large voltage that the fluid in electric osmose fluid channel can be driven to flow, cause a large amount of wastes of electric energy.
Utility model content
(1) technical problem that will solve
The technical problems to be solved in the utility model is: the surface of metal electrode of traditional electric osmose Micropump device hydrolysis can occur, the flowing of electric osmose fluid channel inner fluid can be affected or affect the driving voltage of metal electrode, need arrange exhaust component at ate electrode drains into outside pump by bubble, make the mechanism of electric osmose Micropump more complicated, manufacturing cost is higher; In addition, existing electric osmose Micropump device metal electrode is located at the both sides of electric osmose fluid channel, needs very large voltage drive fluid to flow, causes a large amount of wastes of electric energy.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of electric osmose Micropump device, comprise and be integrated in non-touching electric osmose fluid channel and liquid microelectrode runner on micro-fluidic chip, described electric osmose fluid channel forms EOF for generation of driven by electroosmosis power under voltage, and described liquid microelectrode runner inside is filled anhydrous conducting liquid and formed microelectrode; The two ends of described electric osmose fluid channel are equipped with conducting gel film, one end of described conducting gel film is positioned at electric osmose fluid channel, the other end and the microelectrodes being positioned at electric osmose fluid channel outside, described conducting gel film is for intercepting the fluid contact in microelectrode and electric osmose fluid channel; Described electric osmose fluid channel two ends are respectively equipped with fluid intake and fluid issuing near conducting gel film place.
Preferably, described liquid microelectrode runner has anhydrous conducting liquid injection inlet and anhydrous conducting liquid injection outlet, described anhydrous conducting liquid injection inlet is connected controllable electric power module respectively with anhydrous conducting liquid injection outlet, and described controllable electric power module is used for forming electrical potential difference at the two ends of described electric osmose fluid channel.
Preferably, described anhydrous conducting liquid comprises liquid metal, ionic liquid or fuse salt.
Preferably, described liquid metal is liquid mercury, gallium, gallium alloy or bismuth indium stannum alloy under comprising room temperature condition.
Preferably, be that liquid gallium alloy comprises gallium-indium alloy or gallium-indium-tin alloy under room temperature condition.
Preferably, the making material of described electric osmose fluid channel and liquid microelectrode runner is dimethyl silicone polymer, polymethyl methacrylate, silicon, glass or quartz.
Preferably, described electric osmose fluid channel comprises many parallel connections and the subflow road be arranged in parallel, and the sectional dimension in described subflow road is micron order, submicron order or nanoscale.
Preferably, electric osmose fluid channel comprises runner body and is located at runner body inside dimension is micron order, submicron order or nano level obturator, and the gap between obturator forms the runner of communication of fluid entrance and fluid issuing.
Preferably, described obturator is made up of quartz glass, silicon or aluminium oxide, and the shape of described obturator is spherical or column.
Preferably, described conducting gel film is made up of the gelatin polymer composite with electric conductivity and water proofing property.
(3) beneficial effect
Technique scheme tool of the present utility model has the following advantages: the utility model provides a kind of electric osmose Micropump device, comprise and be integrated in non-touching electric osmose fluid channel and liquid microelectrode runner on micro-fluidic chip, at the two ends of electric osmose fluid channel, conducting gel film is set respectively, contact in the liquid electrode fluid channel of conducting gel film with electric osmose fluid channel outside simultaneously, liquid microelectrode runner inside is filled anhydrous conducting liquid and is formed microelectrode, the fluid contact of microelectrode directly and in electric osmose fluid channel can be avoided like this, solve the problem affecting the flowing of electric osmose fluid channel inner fluid because of electrode surface hydrolysis generation bubble and hydrolysate, simultaneously, anhydrous conducting liquid due to what fill in liquid electrode fluid channel, the hydrolysis on microelectrode surface and the generation of electric current Joule heat can be avoided completely, and then improve microelectrode antijamming capability, simplify the structure of electric osmose Micropump device, reduce manufacturing cost, strengthen the stability of Micropump operation, reliability and service life, and, the two ends that microelectrode is arranged on electric osmose fluid channel contact with conducting gel film, and conducting gel film can conduct electricity, compared with existing mode microelectrode being arranged on both sides, adopt less voltage just can drive fluid to flow, more save the energy, reduce the use cost of electric osmose Micropump, simultaneously because the resistance of conducting gel film is less, decrease the consumption of resistance to electric energy, can energy utilization rate be improved.
Accompanying drawing explanation
The advantage of the above-mentioned and/or additional aspect of the utility model will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the structural representation of the electric osmose Micropump device described in the utility model embodiment.
What wherein in figure, the direction of arrow represented is the flow direction of fluid.
Corresponding relation in Fig. 1 between Reference numeral and component names is:
1, controllable electric power module, 2, electric osmose fluid channel, 3, fluid intake, 4, fluid issuing, 5, conducting gel film, 6, liquid microelectrode runner, 7, anhydrous conducting liquid injection inlet, 8, anhydrous conducting liquid injection outlet, 9, wire wire.
Detailed description of the invention
In description of the present utility model, it should be noted that, term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition the concrete meaning of above-mentioned term in the utility model can be understood.In addition, in description of the present utility model, except as otherwise noted, the implication of " multiple " is two or more.
For making the object of the utility model embodiment, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the utility model embodiment, technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is a part of embodiment of the present utility model, instead of whole embodiments.Based on the embodiment in the utility model, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite not making creative work, all belongs to the scope of the utility model protection.
As shown in Figure 1, the utility model provides a kind of electric osmose Micropump device, comprise and be integrated in non-touching electric osmose fluid channel 2 and liquid microelectrode runner 6 on micro-fluidic chip, described electric osmose fluid channel 2 forms EOF for generation of driven by electroosmosis power under voltage, and described liquid microelectrode runner 6 inside is filled anhydrous conducting liquid and formed microelectrode; The two ends of described electric osmose fluid channel 2 are equipped with conducting gel film 5, one end of described conducting gel film 5 is positioned at electric osmose fluid channel 2, the other end and the microelectrodes being positioned at electric osmose fluid channel 2 outside, described conducting gel film 5 is for intercepting the fluid contact in microelectrode and electric osmose fluid channel 2; Described electric osmose fluid channel 2 two ends are respectively equipped with fluid intake 3 and fluid issuing 4 near conducting gel film 5 place.
The electric osmose Micropump device that the utility model provides, at the two ends of electric osmose fluid channel 2, conducting gel film 5 is set respectively, contact in the liquid electrode fluid channel of conducting gel film 5 with electric osmose fluid channel 2 outside simultaneously, liquid microelectrode runner 6 inside is filled anhydrous conducting liquid and is formed microelectrode, the fluid contact of microelectrode directly and in electric osmose fluid channel 2 can be avoided like this, solve the problem affecting the flowing of electric osmose fluid channel 2 inner fluid because of electrode surface hydrolysis generation bubble and hydrolysate; Simultaneously, anhydrous conducting liquid due to what fill in liquid electrode fluid channel, the hydrolysis on microelectrode surface and the generation of electric current Joule heat can be avoided completely, and then improve microelectrode antijamming capability, simplify the structure of electric osmose Micropump device, reduce manufacturing cost, strengthen the stability of Micropump operation, reliability and service life.
And, the two ends that microelectrode is arranged on electric osmose fluid channel 2 contact with conducting gel film 5, and conducting gel film 5 can conduct electricity, compared with existing mode microelectrode being arranged on electric osmose fluid channel 2 both sides, less voltage is adopted just can drive fluid to flow, as the electric osmose fluid channel 2 driving sectional area identical, electric osmose Micropump microelectrode being located at electric osmose fluid channel 2 both sides need to use a few hectovolt even go up kilovoltage can drive fluid flowing (because the silicon between electric osmose fluid channel and electrode fluid channel, glass, the material such as PDMS or quartz physics interlayer resistance is very large, most of on-load voltage can be consumed, and only have small part voltage-drop loading to produce in the electric osmose fluid channel of driven by electroosmosis power), and the electric osmose Micropump device that the application provides only needs the voltage of a few volt or tens volts, its service condition is more extensive, more save the energy, reduce the use cost of electric osmose Micropump, simultaneously because the resistance of conducting gel film 5 is less, decrease the consumption of resistance to electric energy, energy utilization rate can be improved, and electric osmose Micropump device of the present utility model have compact conformation, with low cost, be easy to integrated, flow large pump pressure high controllability is good, antijamming capability is strong, microelectrode makes quick, particularly can avoid the plurality of advantages such as hydrolysis.
Alternatively, liquid microelectrode runner 6 is arranged on the two ends of electric osmose fluid channel 2, setting vertical with electric osmose fluid channel 2 one-tenth, separated by conducting gel film 5 in the middle of electric osmose fluid channel 2 and microelectrode runner, conducting gel film 5 keeps close contact with microelectrode runner and fluid inlet, fluid issuing 4, and setting vertical with electric osmose fluid channel 2 one-tenth.Conducting gel film 5 is arranged between liquid microelectrode runner 6 and microfluid, and microfluid can be avoided at surface of metal electrode generation hydrolysis; Described liquid microelectrode runner 6 has anhydrous conducting liquid injection inlet 7 and anhydrous conducting liquid injection outlet 8, described anhydrous conducting liquid injection inlet 7 is connected controllable electric power module 1 respectively with anhydrous conducting liquid injection outlet 8, and described controllable electric power module 1 is for forming electrical potential difference at the two ends of described electric osmose fluid channel 2.
The microelectrode runner of the present embodiment and electric osmose fluid channel 2 can adopt MEMS produced by micro processing technique to make.The making material of described electric osmose fluid channel 2 and liquid microelectrode runner 6 is dimethyl silicone polymer, polymethyl methacrylate, silicon, glass or quartz.Wherein, anhydrous conducting liquid comprises anhydrous conducting liquid and comprises liquid metal, ionic liquid or fuse salt, described liquid metal is liquid mercury, gallium, gallium alloy or bismuth indium stannum alloy under comprising room temperature condition, alternatively, be that liquid gallium alloy comprises gallium-indium alloy or gallium-indium-tin alloy under room temperature condition; Original lysis buffer is replaced with the anhydrous conducting liquid of the high conductivity such as liquid metal or fuse salt, the generation of electrode surface hydrolysis current Joule heat can be avoided completely and reduce Micropump driving voltage, and then improve microelectrode antijamming capability, strengthen the stability that Micropump runs.Described electric osmose fluid channel 2 comprises many parallel connections and the subflow road be arranged in parallel, and the sectional dimension in described subflow road is micron order, submicron order or nanoscale, can certainly be only arrange a runner, can realize the object of the application equally.
Described electric osmose fluid channel 2 also can be the runner of filling porous dielectric material, comprising runner body and being located at runner body inside dimension is micron order, submicron order or nano level obturator, and the gap between obturator forms the runner of communication of fluid entrance 3 and fluid issuing 4; Wherein obturator is the micrometer/nanometer ball or column etc. be made up of materials such as quartz glass, silicon, aluminium oxide.
Preferably, in the application, conducting gel film 5 is good conduction, waterproof polymeric material, is made up of MEMS micro-processing method, and material is thermic, the type of gel polymer composites such as electroluminescent, photic.Conducting gel film 5 thickness of thin layer should be enough little, much smaller than conducting gel film 5 length or width.
During the electric osmose Micropump device busy of the present embodiment, liquid conducting medium is poured in microelectrode runner by the anhydrous conducting liquid injection inlet 7 on microelectrode runner, unnecessary liquid conducting medium is injected outlet 8 by anhydrous conducting liquid and is overflowed, and forms liquid microelectrode; The both positive and negative polarity of controllable electric power module 1 makes the microelectrode runner being positioned at electric osmose fluid channel 2 two ends produce high potential and low potential respectively, because electric osmose fluid channel 2 is in electric potential field, the fluid that its inside flows through affects by the height electrical potential difference of electric potential field, through the driving of EOF output pressure, deliver to fluid issuing 4 from fluid import pump.The output voltage changing controllable electric power module 1 can regulate EOF output pressure, thus regulates flow velocity and the flow of institute's pump fluid.
The present embodiment utilizes the mobility of liquid conducting medium, adopts method for filling that liquid conducting medium is injected microelectrode runner from anhydrous conducting liquid injection inlet 7, and in filling process, unnecessary liquid conducting medium overflows from anhydrous conducting liquid injection outlet 8.After solid metallic silk wire 9 is drawn in anhydrous conducting liquid injection inlet 7 and anhydrous conducting liquid injection outlet 8, the junction glue package of microelectrode runner and solid metallic wire.Glue preferably adopts PDMS silicone oil or transparent electrical insulation silica gel.The liquid conducting medium method of this perfusion is simple to operate, reproducible, one-shot forming, the microelectrode Stability Analysis of Structures of formation.Liquid metal injection device preferably adopts common micro syringe.
The inside of microelectrode runner is filled with liquid conducting medium, and liquid conducting medium is be liquid mercury or gallium or gallium alloy or bismuth indium stannum alloy or ionic liquid or molten low melting point salt under room temperature condition.
It should be noted that, in the present embodiment, except anhydrous conducting liquid injection inlet 7 and the anhydrous conducting liquid of microelectrode runner is injected and to be connected with controllable electric power module 1 by wire wire 9 after outlet 8 parallel connection, also can select following two kinds of connected modes: the anhydrous conducting liquid injection inlet 7 of microelectrode runner is connected with controllable electric power module 1 by wire wire 9; Or the anhydrous conducting liquid injection outlet 8 of microelectrode runner is connected with controllable electric power module 1 by wire wire 9.The condition of contact of above-mentioned three kinds of connected modes is identical, all can realize the formation requirement of microelectrode in the present embodiment.
In sum, the electric osmose Micropump device that the utility model provides utilizes low-melting-point metal, ionic liquid or the molten low melting point salt with superior electrical conductivity energy as microelectrode, keeps physical contact closely with conducting gel film.Compare lysis buffer, low-melting-point metal, ionic liquid or molten low melting point salt are high conductivity anhydrous liquid conducting medium, when Micropump runs, the hydrolysis on microelectrode surface and the generation of electric current Joule heat can be avoided completely and reduce Micropump driving voltage, and then improve microelectrode antijamming capability, strengthen the stability of Micropump operation, reliability and service life.Thus, electric osmose Micropump device of the present utility model have compact conformation, with low cost, be easy to integrated, flow large pump pressure high controllability is good, antijamming capability is strong, microelectrode makes quick, particularly can avoid the plurality of advantages such as hydrolysis.
Last it is noted that above embodiment is only in order to illustrate the technical solution of the utility model, be not intended to limit; Although be described in detail the utility model with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of each embodiment technical scheme of the utility model.
Claims (10)
1. an electric osmose Micropump device, it is characterized in that: comprise and be integrated in non-touching electric osmose fluid channel and liquid microelectrode runner on micro-fluidic chip, described electric osmose fluid channel forms EOF for generation of driven by electroosmosis power under voltage, and described liquid microelectrode runner inside is filled anhydrous conducting liquid and formed microelectrode; The two ends of described electric osmose fluid channel are equipped with conducting gel film, one end of described conducting gel film is positioned at electric osmose fluid channel, the other end and the microelectrodes being positioned at electric osmose fluid channel outside, described conducting gel film is for intercepting the fluid contact in microelectrode and electric osmose fluid channel; Described electric osmose fluid channel two ends are respectively equipped with fluid intake and fluid issuing near conducting gel film place.
2. electric osmose Micropump device according to claim 1, it is characterized in that: described liquid microelectrode runner has anhydrous conducting liquid injection inlet and anhydrous conducting liquid injection outlet, described anhydrous conducting liquid injection inlet is connected controllable electric power module respectively with anhydrous conducting liquid injection outlet, and described controllable electric power module is used for forming electrical potential difference at the two ends of described electric osmose fluid channel.
3. electric osmose Micropump device according to claim 1, is characterized in that: described anhydrous conducting liquid comprises liquid metal, ionic liquid or fuse salt.
4. electric osmose Micropump device according to claim 3, is characterized in that: described liquid metal is liquid mercury, gallium, gallium alloy or bismuth indium stannum alloy under comprising room temperature condition.
5. electric osmose Micropump device according to claim 4, is characterized in that: for liquid gallium alloy comprises gallium-indium alloy or gallium-indium-tin alloy under room temperature condition.
6. electric osmose Micropump device according to claim 4, is characterized in that: the making material of described electric osmose fluid channel and liquid microelectrode runner is dimethyl silicone polymer, polymethyl methacrylate, silicon, glass or quartz.
7. electric osmose Micropump device according to claim 1, is characterized in that: described electric osmose fluid channel comprises many parallel connections and the subflow road be arranged in parallel, and the sectional dimension in described subflow road is micron order, submicron order or nanoscale.
8. electric osmose Micropump device according to claim 1, it is characterized in that: electric osmose fluid channel comprises runner body and is located at runner body inside dimension is micron order, submicron order or nano level obturator, the gap between obturator forms the runner of communication of fluid entrance and fluid issuing.
9. electric osmose Micropump device according to claim 8, is characterized in that: described obturator is made up of quartz glass, silicon or aluminium oxide, and the shape of described obturator is spherical or column.
10. electric osmose Micropump device according to claim 1, is characterized in that: described conducting gel film is made up of the gelatin polymer composite with electric conductivity and water proofing property.
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| CN201520728194.7U CN205055830U (en) | 2015-09-18 | 2015-09-18 | Electric osmose micropump device |
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| CN201520728194.7U CN205055830U (en) | 2015-09-18 | 2015-09-18 | Electric osmose micropump device |
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| CN107870055A (en) * | 2016-09-26 | 2018-04-03 | 中国科学院理化技术研究所 | For pressure detecting system in fluid channel and preparation method thereof, detection method |
| CN109529962A (en) * | 2019-01-18 | 2019-03-29 | 江苏医联生物科技有限公司 | The method of film electroosmotic pump and its detection pressure and flow velocity based on microchannel plate |
| CN110354926A (en) * | 2019-08-27 | 2019-10-22 | 中国科学院理化技术研究所 | Electric osmose Micropump device |
| CN110711492A (en) * | 2018-07-12 | 2020-01-21 | 天津微流科技有限公司 | Electroosmosis micropump device |
| CN111986833A (en) * | 2020-06-24 | 2020-11-24 | 厦门大学 | Bionic liquid ion conductor and preparation method and application thereof |
| CN112023131A (en) * | 2020-08-28 | 2020-12-04 | 杭州未名信科科技有限公司 | Electroosmosis driving module, implantable electroosmosis micropump device and electricity leading-out method |
| WO2021047529A1 (en) * | 2019-09-11 | 2021-03-18 | 杭州未名信科科技有限公司 | Electroosmotic micropump apparatus and electroosmotic micropump apparatus group |
| WO2021052226A1 (en) * | 2019-09-18 | 2021-03-25 | 杭州未名信科科技有限公司 | Implantable electroosmotic micropump device |
| CN113441010A (en) * | 2021-05-19 | 2021-09-28 | 杭州未名信科科技有限公司 | Biocompatible microelectrode, electroosmosis micropump device with biocompatible microelectrode and fluid pumping system |
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| CN107870055B (en) * | 2016-09-26 | 2019-09-17 | 中国科学院理化技术研究所 | For pressure detecting system in fluid channel and preparation method thereof, detection method |
| CN107870055A (en) * | 2016-09-26 | 2018-04-03 | 中国科学院理化技术研究所 | For pressure detecting system in fluid channel and preparation method thereof, detection method |
| CN110711492A (en) * | 2018-07-12 | 2020-01-21 | 天津微流科技有限公司 | Electroosmosis micropump device |
| CN109529962A (en) * | 2019-01-18 | 2019-03-29 | 江苏医联生物科技有限公司 | The method of film electroosmotic pump and its detection pressure and flow velocity based on microchannel plate |
| CN110354926A (en) * | 2019-08-27 | 2019-10-22 | 中国科学院理化技术研究所 | Electric osmose Micropump device |
| WO2021047529A1 (en) * | 2019-09-11 | 2021-03-18 | 杭州未名信科科技有限公司 | Electroosmotic micropump apparatus and electroosmotic micropump apparatus group |
| WO2021052226A1 (en) * | 2019-09-18 | 2021-03-25 | 杭州未名信科科技有限公司 | Implantable electroosmotic micropump device |
| CN111986833A (en) * | 2020-06-24 | 2020-11-24 | 厦门大学 | Bionic liquid ion conductor and preparation method and application thereof |
| CN112023131A (en) * | 2020-08-28 | 2020-12-04 | 杭州未名信科科技有限公司 | Electroosmosis driving module, implantable electroosmosis micropump device and electricity leading-out method |
| CN112023131B (en) * | 2020-08-28 | 2023-08-18 | 杭州未名信科科技有限公司 | Electroosmosis driving module, implanted electroosmosis micropump device and electric extraction method |
| CN115192467A (en) * | 2021-04-09 | 2022-10-18 | 中国科学院理化技术研究所 | Intelligent facial mask |
| CN115192467B (en) * | 2021-04-09 | 2024-04-19 | 中国科学院理化技术研究所 | Intelligent mask |
| CN113441010A (en) * | 2021-05-19 | 2021-09-28 | 杭州未名信科科技有限公司 | Biocompatible microelectrode, electroosmosis micropump device with biocompatible microelectrode and fluid pumping system |
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