CN202900597U - Ultrasonic current micro-pump capable of achieving bidirectional-flow - Google Patents
Ultrasonic current micro-pump capable of achieving bidirectional-flow Download PDFInfo
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- CN202900597U CN202900597U CN 201220633490 CN201220633490U CN202900597U CN 202900597 U CN202900597 U CN 202900597U CN 201220633490 CN201220633490 CN 201220633490 CN 201220633490 U CN201220633490 U CN 201220633490U CN 202900597 U CN202900597 U CN 202900597U
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Abstract
The utility model relates to an ultrasonic current micro-pump capable of achieving bidirectional-flow. The ultrasonic current micro-pump capable of achieving the bidirectional-flow is composed by connecting a plurality of acoustic streaming micro-pump units in series. The fluid cavity of each acoustic streaming micro-pump unit comprises an inlet cavity, an outlet cavity, an acoustic streaming cavity and a backflow cavity to form an H-shaped cavity structure, wherein the inlet cavity is connected with the backflow cavity in a horizontal direction; the connection position of the inlet cavity and the backflow cavity is vertically connected with the acoustic streaming cavity; the top end of the acoustic streaming cavity is vertically connected with the outlet cavity; the acoustic streaming cavity of each acoustic streaming micro-pump unit right faces a piezoelectric patch which is placed at the pipeline bottom side position right facing the acoustic streaming cavity and is connected with a piezoelectric driver; and the fluid cavities of a plurality of acoustic streaming micro-pump units are communicated. The ultrasonic current micro-pump capable of achieving the bidirectional-flow does not need a pressure cavity and movable parts, is high in reliability, easy to manufacture, small in damage for suspended particles and low in working voltage and heating, does not have limits for liquid/gas to be transferred and can be used for transferring liquid including deoxyribonucleic acid (DNA) and other biological samples and the like.
Description
Technical field
The utility model relates to a kind of Micropump, particularly a kind of ultrasonic current Micropump that can realize two-way flow.
Background technique
Micropump is the crucial power unit of microfluid system, uses very extensive.Test and medical aspect, Micropump can be used for DNA and detects analysis and the transmission of medicine in human body; Aerospace field, Micropump can be used for the fuel of miniature aerospace vehicle and micro detector and supply with; At microelectronic, Micropump can be used the conveying with microelectronic liquid-cooling system cooling liquid; At chemical field, Micropump can be used for the conveying of chemical products and the accurate configuration of valuable drug.
Have the valve Micropump usually to adopt mechanical part to realize rectification, rectification effect is better, but has movable member wearing and tearing and fatigue ruption, and miniaturization and working life are restricted.
The research of valve free pump starts from 1993, and the people such as Sweden E.Stemme design expansion/contraction cast Micropump, utilizes the difference of the resistance that the nonsymmetry convection cell of port structure produces to realize rectification.After this, numerous scholars to the Micropump of this type from processing method, driving mode, pump housing material and packaging method etc. not ipsilateral carried out comprehensive research, be the most active field of present valve free pump research.The performance of this class Micropump depends critically upon the structural design of gateway, and flow loss is larger usually, and efficient is on the low side.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned deficiency and a kind of ultrasonic current Micropump that can realize two-way flow is provided, and this Micropump can be realized the two-way flow of fluid.
The technological scheme that the utility model is taked is:
A kind of ultrasonic current Micropump that can realize two-way flow, it is formed by a plurality of acoustic streaming Micropumps unit serial connection, the fluid chamber of each acoustic streaming Micropump unit includes the oral cavity, outlet plenum, acoustic streaming chamber and refluxing chamber four parts form the H-shaped cavity body structure, entrance cavity wherein, refluxing chamber joins in the horizontal direction, the connecting part vertically connects the acoustic streaming chamber, vertical connection outlet chamber, top, acoustic streaming chamber, the acoustic streaming chamber of each acoustic streaming Micropump unit is over against a piezo-electric sheet, piezo-electric sheet places the position, pipeline bottom side over against the acoustic streaming chamber, piezo-electric sheet connects piezoelectric actuator, and the fluid chamber of a plurality of acoustic streaming Micropumps unit is connected.
Described entrance cavity, outlet plenum, acoustic streaming chamber and refluxing chamber cross section are preferably square, size 10um * 10um～100um * 100um.
When piezoelectric actuator applies high frequency (1-50MHz) sinusoidal voltage, the bottom piezo-electric sheet produces vibration, the high strength supersonic field has appearred in the acoustic streaming chamber of nearly piezo-electric sheet, because there is viscosity in fluid, can produce decay along the acoustic streaming cavity direction, thereby the generation pressure gradient, it impels the liquid in the Ultrasonic field to flow along hyperacoustic direct of travel, forms net flow.
Adopt such structure, can not only improve driving force, increase flow velocity and flow, and apply driving voltage in different positions, can realize the two-way flow of fluid.When the high-amplitude sound wave was propagated in the dissipativeness flowing medium, owing to exist acoustic loss, the portion of energy of loss was learned coupling by Nonlinear hydrodynamic, was applied on the fluid as stablizing momentum, flowed thereby make fluid produce stable acoustic streaming.Acoustic streaming is a kind of preferably driving mode for microfluid, and reason one is can overcome preferably because significant viscous force impact (the viscosity generation acoustic streaming that microsize is brought; The acoustic streaming driving force is volumetric force); The 2nd, size is less, and the acoustic streaming driving force is more obvious.This is because the impact of the less boundary layer of line size acoustic streaming is more obvious.
The utility model Micropump does not need pressure chamber, no-movable part, and reliability is high; Be easy to make; Little to the suspended particle damage; Operating voltage is low; It is low to generate heat; To the liquid/gas type transmitted without limits, can be used for transmitting liquid that comprises DNA and other Biosample etc.
Description of drawings
Fig. 1 is the structural drawing of acoustic streaming Micropump unit;
Fig. 2 is the ultrasonic current micro-pump structure figure that the utility model can be realized two-way flow;
Wherein, 1. entrance cavity, 2. outlet plenum, 3. acoustic streaming chamber, 4. refluxing chamber, 5. piezo-electric sheet.
Embodiment
Further specify below in conjunction with accompanying drawing.
A kind of ultrasonic current Micropump that can realize two-way flow, it is formed by a plurality of acoustic streaming Micropumps unit serial connection, the fluid chamber of each acoustic streaming Micropump unit includes oral cavity 1, outlet plenum 2, acoustic streaming chamber 3 and refluxing chamber 4 four parts form H shape cavity body structure, wherein entrance cavity 1, refluxing chamber 4 joins in the horizontal direction, the connecting part vertically connects acoustic streaming chamber 3, vertical connection outlet chamber, 3 tops, acoustic streaming chamber 2, the acoustic streaming chamber 3 of each acoustic streaming Micropump unit is over against a piezo-electric sheet 5, piezo-electric sheet 5 places the position, pipeline bottom side over against the acoustic streaming chamber, piezo-electric sheet 5 connects piezoelectric actuator, and the fluid chamber of a plurality of acoustic streaming Micropumps unit is connected.
Acoustic streaming Micropump modular construction plan view such as Fig. 1 of design.Including oral cavity 1, outlet plenum 2, acoustic streaming chamber 3 and refluxing chamber 4 four parts forms.Each cavity is of a size of 10um * 10um to the square microchannel of 100um * 100um.
The modular construction of Fig. 1 can be made by micro-processing technology.The matrix adopting silicon materials are coated optical resist at pipeline location, and pipeline depth as required determines etching period.After the pipeline etching is finished, pass through the anode linkage stacked coated glass sheets at upper surface.At last piezo-electric sheet is adhered to over against the position in acoustic streaming chamber.
When piezoelectric actuator applies high frequency (1-50MHz) sinusoidal voltage, bottom thin film produces vibration, the high strength supersonic field has appearred in the acoustic streaming chamber of nearly film, because there is viscosity in fluid, can produce decay along the acoustic streaming cavity direction, thereby the generation pressure gradient, it impels the liquid in the Ultrasonic field to flow along hyperacoustic direct of travel, forms net flow.
Fig. 2 is the multiple-unit acoustic streaming micro-pump structure plan view by some cell formations.Adopt such structure, can not only improve driving force, increase flow velocity and flow, and apply driving voltage in different positions, can realize the two-way flow of fluid.
Claims (2)
1. the ultrasonic current Micropump that can realize two-way flow, it is characterized in that, it is formed by a plurality of acoustic streaming Micropumps unit serial connection, the fluid chamber of each acoustic streaming Micropump unit includes the oral cavity, outlet plenum, acoustic streaming chamber and refluxing chamber four parts form H shape cavity body structure, entrance cavity wherein, refluxing chamber joins in the horizontal direction, the connecting part vertically connects the acoustic streaming chamber, vertical connection outlet chamber, top, acoustic streaming chamber, the acoustic streaming chamber of each acoustic streaming Micropump unit is over against a piezo-electric sheet, piezo-electric sheet places the position, pipeline bottom side over against the acoustic streaming chamber, piezo-electric sheet connects piezoelectric actuator, and the fluid chamber of a plurality of acoustic streaming Micropumps unit is connected.
2. a kind of ultrasonic current Micropump that can realize two-way flow according to claim 1 is characterized in that described entrance cavity, outlet plenum, acoustic streaming chamber and refluxing chamber cross section are square.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220633490 CN202900597U (en) | 2012-11-26 | 2012-11-26 | Ultrasonic current micro-pump capable of achieving bidirectional-flow |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220633490 CN202900597U (en) | 2012-11-26 | 2012-11-26 | Ultrasonic current micro-pump capable of achieving bidirectional-flow |
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| CN202900597U true CN202900597U (en) | 2013-04-24 |
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| CN 201220633490 Expired - Fee Related CN202900597U (en) | 2012-11-26 | 2012-11-26 | Ultrasonic current micro-pump capable of achieving bidirectional-flow |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102996418A (en) * | 2012-11-26 | 2013-03-27 | 山东大学 | Ultra-acoustic streaming micro-pump capable of realizing bidirectional flow |
| CN103967759A (en) * | 2014-05-18 | 2014-08-06 | 辽宁工程技术大学 | Ultrasonic water pump with built-in piezoelectric plate |
| CN107185607A (en) * | 2016-03-15 | 2017-09-22 | 李榕生 | The micro flow control chip device containing hydrophobic substrate of two kinds of type of drive coupling runnings |
| CN107185608A (en) * | 2016-03-15 | 2017-09-22 | 李榕生 | A kind of substrate material is PDMS cholera diagnosis micro flow control chip device |
-
2012
- 2012-11-26 CN CN 201220633490 patent/CN202900597U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102996418A (en) * | 2012-11-26 | 2013-03-27 | 山东大学 | Ultra-acoustic streaming micro-pump capable of realizing bidirectional flow |
| CN102996418B (en) * | 2012-11-26 | 2015-04-08 | 山东大学 | Ultra-acoustic streaming micro-pump capable of realizing bidirectional flow |
| CN103967759A (en) * | 2014-05-18 | 2014-08-06 | 辽宁工程技术大学 | Ultrasonic water pump with built-in piezoelectric plate |
| CN107185607A (en) * | 2016-03-15 | 2017-09-22 | 李榕生 | The micro flow control chip device containing hydrophobic substrate of two kinds of type of drive coupling runnings |
| CN107185608A (en) * | 2016-03-15 | 2017-09-22 | 李榕生 | A kind of substrate material is PDMS cholera diagnosis micro flow control chip device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130424 Termination date: 20131126 |