CN102996418A - Ultra-acoustic streaming micro-pump capable of realizing bidirectional flow - Google Patents

Ultra-acoustic streaming micro-pump capable of realizing bidirectional flow Download PDF

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CN102996418A
CN102996418A CN201210488815XA CN201210488815A CN102996418A CN 102996418 A CN102996418 A CN 102996418A CN 201210488815X A CN201210488815X A CN 201210488815XA CN 201210488815 A CN201210488815 A CN 201210488815A CN 102996418 A CN102996418 A CN 102996418A
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cavity
micro
acoustic streaming
flow
acoustic
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CN201210488815XA
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CN102996418B (en
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魏守水
魏长智
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山东大学
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Abstract

The invention relates to an ultra-acoustic streaming micro-pump capable of realizing bidirectional flow. The ultra-acoustic streaming micro-pump consists of a plurality of acoustic streaming micro-pump units which are connected in series; a fluid cavity of each acoustic streaming micro-pump unit comprises four parts, namely an inlet cavity, an outlet cavity, an acoustic streaming cavity and a backflow cavity, so as to form an H-shaped cavity structure; the inlet cavity and the backflow cavity are connected in a horizontal direction; the acoustic streaming cavity is vertically connected at the connection part between the inlet cavity and the backflow cavity; the outlet cavity is vertically connected with the top end of the acoustic streaming cavity; the acoustic streaming cavity of each acoustic streaming micro-pump unit is over against one piezoelectric sheet; the piezoelectric sheet is arranged at the position over against the bottom side of a pipeline of the acoustic streaming cavity; the piezoelectric sheet is connected with a piezoelectric driver; and the fluid cavities of the multiple acoustic streaming micro-pump units are communicated. The micro-pump provided by the invention has the advantages of no need of a pressure cavity, no movable components, high reliability, easiness in manufacturing, small damages on suspension particles, low working voltage, low heat, and no limitation to the type of transmitted liquid/gas. The micro-pump provided by the invention can be used for transmitting the liquid containing DNA (Deoxyribose Nucleic Acid) and other biological test samples and the like.

Description

一种能实现双向流动的超声流微泵 One kind enables two-way flow of supersonic flow minipump

技术领域 FIELD

[0001] 本发明涉及一种微泵,特别涉及一种能实现双向流动的超声流微泵。 [0001] The present invention relates to a micro pump, in particular, to a bidirectional flow can be achieved in supersonic flow micropump.

背景技术 Background technique

[0002] 微泵是微流体系统的关键执行部件,应用十分广泛。 [0002] The micro-pump is a critical execution unit microfluidic system, is widely used. 在试验和医疗方面,微泵可用于DNA检测分析以及药物在人体内的传输;航空航天领域,微泵可用于微型航空航天器及微型探测器的燃料供给;在微电子领域,微泵可用与微电子液体冷却系统冷却液的输送;在化工领域,微泵可用于化工用品的输送以及贵重药物的精确配置。 And medical test, the micro-pump can be used in DNA detection analysis and transmission of drug in the human body; aerospace, micropumps may be used to supply fuel aerospace and micro-miniature probe; in the field of microelectronics, and available micropump transporting microelectronic coolant liquid cooling system; in the chemical industry, the micro-pump can be used and the precise configuration of valuable pharmaceutical chemical delivery article.

[0003] 有阀微泵通常采用机械部件实现整流,整流效果较好,但是存在可动部件磨损和疲劳破坏,小型化和使用寿命受到限制。 [0003] A valve member micropump generally achieved by mechanical rectification, rectifying effect is better, but the presence of the movable member wear and fatigue failure life, and limited miniaturization.

[0004] 无阀微泵的研究始于1993年,瑞典E. Stemme等人设计出扩张/收缩管型微泵,利用出入口结构的不对称性对流体产生的阻力的不同实现整流。 [0004] Research valveless micropump began in 1993, Sweden E. Stemme et al devised expansion / contraction of the tubular micropump, the fluid resistance generated using asymmetry of the entrance structure to achieve different rectified. 此后,众多学者对此种类型的微泵从加工方法、驱动方式、泵体材料及封装方法等不同侧面进行了全面的研究,是目前无阀微泵研究最为活跃的领域。 Since then, many scholars of this type of micropump to conduct a comprehensive study of the different aspects of processing methods, drive, pump materials and packaging methods, it is valveless micropump most active research areas. 这类微泵的性能严重依赖于出入口的结构设计,通常流量损失较大,效率偏低。 Such performance is heavily dependent on the micro-pump design doorway, flow loss is generally large, the efficiency is low.

发明内容 SUMMARY

[0005] 本发明的目的是克服上述不足而提供一种能实现双向流动的超声流微泵,这种微泵可以实现流体的双向流动。 [0005] The object of the present invention is to provide a bi-directional flow of supersonic flow micropump overcome the above deficiencies, such a micro pump may be bi-directional flow of fluid.

[0006] 本发明采取的技术方案为: [0006] The present invention takes technical solutions:

[0007] 一种能实现双向流动的超声流微泵,它由多个声流微泵单元串接而成,每个声流微泵单元的流体腔包括入口腔、出口腔、声流腔和回流腔四部分形成H形腔体结构,其中入口腔、回流腔在水平方向相接,相接处垂直连接声流腔,声流腔顶端垂直连接出口腔,每个声流微泵单元的声流腔正对一个压电片,压电片置于正对声流腔的管道底侧位置,压电片连接压电驱动器,多个声流微泵单元的流体腔相连通。 [0007] A bidirectional flow can be achieved in supersonic flow micropump, it is connected in series by a plurality of acoustic unit streams from the micropump, the fluid chamber of each audio stream includes a micro pump unit inlet, an outlet chamber, and acoustic streaming chamber four parts forming the flashback chamber cavity H shaped structure, wherein the inlet, reflux cavity contact in the horizontal direction, the vertical connection contact sound manifold, a sound outlet manifold connected to the top of the vertical chamber, the sound of each audio stream micropump unit manifold facing a piezoelectric sheet, a piezoelectric sheet disposed facing the pipe bottom-side position of the sound manifold, connecting the piezoelectric sheet of the piezoelectric actuator, the fluid chamber is connected to a plurality of acoustic flow through the micro pump unit.

[0008] 所述的入口腔、出口腔、声流腔和回流腔横截面优选方形,尺寸IOumX IOum〜IOOumX IOOum0 [0008] the inlet, the outlet cavity, the acoustic chamber and the return flow chamber is preferably square cross section, size IOumX IOum~IOOumX IOOum0

[0009] 压电驱动器施加高频(1-50MHZ,优选30_50MHz)正弦电压时,底部压电片产生振动,近压电片的声流腔内出现了高强度超声场,由于流体存在粘滞性,沿声流腔方向会产生衰减,从而产生压力梯度,它促使超声场内的液体沿着超声波的行进方向流动,形成净流动。 When [0009] the piezoelectric actuator applying a high frequency (50 MHz, preferably 30_50MHz) sinusoidal voltage, the bottom sheet of the piezoelectric vibration, acoustic flow cavity near the piezoelectric sheet appeared high intensity ultrasonic field, due to the presence of viscous fluid , along the cavity direction of the audio stream will produce decay, thereby generating a pressure gradient, which causes the liquid within the field of ultrasound traveling along the flow direction of the ultrasound, the net flow is formed.

[0010] 采用这样的结构,不仅能提高驱动力,增加流速和流量,而且在不同的位置施加驱动电压,可以实现流体的双向流动。 [0010] With this configuration, not only can increase the driving force, and to increase flow velocity, and the driving voltage is applied in different positions, two-way flow of fluid can be achieved. 当高幅声波在耗散性流体介质中传播时,由于存在着声的损耗,损失的部分能量通过非线性流体动力学耦合,作为稳定动量施加到流体上,从而使流体产生稳定的声流流动。 When the high amplitude acoustic wave propagation in the fluid medium dissipative, losses due to the presence of sound, coupled nonlinear kinetic energy loss by the fluid fraction, is applied to the fluid as a stable momentum, so that the fluid flow stream to produce stable sound . 声流对微流体而言是一种较好的驱动方式,原因一是能较好的克服由于微小尺寸带来的显著的粘性力影响(粘性产生声流;声流驱动力是体积力);二是尺寸越小,声流驱动力越明显。 For the audio stream microfluidic drive is a better way, because one can better overcome the viscous forces a significant impact caused by minute size (viscous flow generating sound; acoustic streaming driver is the volume force); Second, the smaller the size, the more obvious the driving force of acoustic streaming. 这是因为管道尺寸越小边界层声流的影响越明显。 This is because the smaller pipe sizes influence the boundary layer flow sound more obvious.

[0011] 本发明微泵不需要压力腔,无活动部件,可靠性高;易于制造;对悬浮粒子损伤小;工作电压低;发热低;对所传输的液体/气体类型没有限制,可用于传输包含DNA及其它生物试样的液体等。 [0011] The present invention does not require a micropump chamber pressure, without moving parts, high reliability; easy to manufacture; little damage to particulates; low voltage; low heat; no limitation on the transmission liquid / gas type, can be used for transmission comprising DNA and other biological sample liquids.

附图说明 BRIEF DESCRIPTION

[0012] 图1为声流微泵单元的结构图; [0012] FIG. 1 is a configuration diagram of the acoustic stream of the micro-pump unit;

[0013] 图2为本发明能实现双向流动的超声流微泵结构图; [0013] FIG. 2 of the present invention enables the ultrasonic micro pump of FIG way flow stream;

[0014] 其中,1.入口腔,2.出口腔,3.声流腔,4.回流腔,5.压电片。 [0014] wherein 1 inlet 2 outlet chamber 3. Acoustic streaming chamber 4. Flashback chamber, 5. piezoelectric sheet.

具体实施方式 Detailed ways

[0015] 下面结合附图进一步说明。 [0015] further described below in conjunction with the accompanying drawings.

[0016] 一种能实现双向流动的超声流微泵,它由多个声流微泵单元串接而成,每个声流微泵单元的流体腔包括入口腔1、出口腔2、声流腔3和回流腔4四部分形成H形腔体结构,其中入口腔1、回流腔4在水平方向相接,相接处垂直连接声流腔3,声流腔3顶端垂直连接出口腔2,每个声流微泵单元的声流腔3正对一个压电片5,压电片5置于正对声流腔的管道底侧位置,压电片5连接压电驱动器,多个声流微泵单元的流体腔相连通。 [0016] A bidirectional flow can be achieved in supersonic flow micropump, which flows in series by a plurality of acoustic units from the micropump, each acoustic micro flow chamber comprises a fluid pump unit inlet 1, outlet chamber 2, acoustic streaming 3 and a cavity 4 formed in four parts at reflux for an H-shaped chamber cavity structure, wherein an inlet, reflux chamber 4 in contact with the horizontal direction, phase of the vertical connecting chamber 3 audio stream, audio stream outlet chamber 3 to the top chamber 2 is vertically connected, each acoustic cavity audio stream stream 3 micropump unit 5 is on a piezoelectric sheet, a piezoelectric sheet 5 placed on the bottom side of the position of the positive duct acoustic streaming chamber, piezoelectric sheet of the piezoelectric actuator 5 is connected, a plurality of acoustic streaming a fluid chamber communicating micropump unit.

[0017] 设计的声流微泵单元结构俯视图如图1。 [0017] audio stream micropump unit design a plan view of FIG. 包括入口腔1、出口腔2、声流腔3和回流腔4四部分组成。 1 includes inlet chamber, an outlet chamber 2, the acoustic cavity manifold 3 and 4 was refluxed four parts. 各腔体的尺寸为IOumX IOum到IOOumX IOOum的方形微管道。 The size of each cavity is IOumX IOum to IOOumX IOOum square microchannel.

[0018] 图1的单元结构可以通过微加工技术来制作。 Cell structure [0018] FIG. 1 may be produced by micro-machining techniques. 基体采用硅材料,在管道位置上涂上光刻胶,根据需要的管道深度确定好蚀刻时间。 Silicon base material, coated with a photoresist at a position on the pipeline, the etching time is determined according to the well pipe to the required depth. 管道蚀刻完成后,在上表面通过阳极键合覆盖玻璃板。 After etching is completed pipeline, the upper surface of the cover glass bonded by anodic bonding. 最后将压电片粘到正对声流腔的位置处。 Finally, the piezoelectric sheet adhered to the audio stream at a position facing the cavity.

[0019] 压电驱动器施加高频(1-50MHZ )正弦电压时,底部压电片产生振动,近压电片的声流腔内出现了高强度超声场,由于流体存在粘滞性,沿声流腔方向会产生衰减,从而产生压力梯度,它促使超声场内的液体沿着超声波的行进方向流动,形成净流动。 When applying high frequency (50 MHz) sinusoidal voltage [0019] a piezoelectric actuator, the piezoelectric plate bottom vibration, acoustic flow cavity near the piezoelectric sheet appeared high intensity ultrasonic field, the presence of the fluid viscosity, acoustic along an attenuation chamber will flow direction, thereby generating a pressure gradient, which causes the liquid within the field of ultrasound traveling along the flow direction of the ultrasound, the net flow is formed.

[0020] 图2是由若干单元构成的多单元声流微泵结构俯视图。 [0020] FIG. 2 is a multi-unit micro pump audio stream composed of a top view of several units. 采用这样的结构,不仅能提高驱动力,增加流速和流量,而且在不同的位置施加驱动电压,可以实现流体的双向流动。 With this configuration, not only can increase the driving force, and to increase flow velocity, and the driving voltage is applied in different positions, two-way flow of fluid can be achieved.

Claims (3)

1. 一种能实现双向流动的超声流微泵,其特征是,它由多个声流微泵单元串接而成,每个声流微泵单元的流体腔包括入口腔、出口腔、声流腔和回流腔四部分形成H形腔体结构,其中入口腔、回流腔在水平方向相接,相接处垂直连接声流腔,声流腔顶端垂直连接出口腔,每个声流微泵单元的声流腔正对一个压电片,压电片置于正对声流腔的管道底侧位置,压电片连接压电驱动器,多个声流微泵单元的流体腔相连通。 An ultrasonic flow minipump to achieve two-way flow, characterized in that it is connected in series by a plurality of audio streams from the micro-pump unit, the acoustic fluid chamber of each pump unit includes a micro-flow inlet, an outlet chamber, sound and the manifold chamber was refluxed four H-shaped portion formed cavity structure, wherein the inlet, reflux cavity contact in the horizontal direction, the vertical connection contact sound manifold, a sound outlet manifold connected to the top of the vertical chamber, each acoustic flow minipump acoustic streaming cavity unit of a positive piezoelectric sheet, a piezoelectric sheet disposed facing the pipe bottom-side position of the sound manifold, connecting the piezoelectric sheet of the piezoelectric actuator, a plurality of acoustic fluid chamber flows through the micro-pump unit is connected.
2.根据权利要求1所述的一种能实现双向流动的超声流微泵,其特征是,所述的入口腔、出口腔、声流腔和回流腔横截面为方形。 2. A method according to claim 1 to achieve supersonic flow micropump two-way flow, characterized in that said inlet chamber, an outlet chamber, the acoustic cavity manifold and the return square in cross section.
3.根据权利要求1所述的一种能实现双向流动的超声流微泵,其特征是,压电驱动器施加高频1-50MHz。 The one of the supersonic flow can be achieved in a two-way flow of the micro-pump, characterized in that, a high frequency piezoelectric actuator as claimed in claim 1-50MHz.
CN 201210488815 2012-11-26 2012-11-26 Ultra-acoustic streaming micro-pump capable of realizing bidirectional flow CN102996418B (en)

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN103967758A (en) * 2014-05-18 2014-08-06 辽宁工程技术大学 Ultrasonic water pump with external piezoelectric plate
CN106849747A (en) * 2017-02-28 2017-06-13 厦门大学 A kind of MEMS piezoelectric ultrasonic pumps

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