CN116658400A - Fluid conveying device, liquid cooling heat dissipation module and micro-fluidic chip - Google Patents
Fluid conveying device, liquid cooling heat dissipation module and micro-fluidic chip Download PDFInfo
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- CN116658400A CN116658400A CN202310958216.8A CN202310958216A CN116658400A CN 116658400 A CN116658400 A CN 116658400A CN 202310958216 A CN202310958216 A CN 202310958216A CN 116658400 A CN116658400 A CN 116658400A
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- 239000007788 liquid Substances 0.000 title claims abstract description 171
- 239000012530 fluid Substances 0.000 title claims abstract description 168
- 238000001816 cooling Methods 0.000 title claims abstract description 23
- 230000017525 heat dissipation Effects 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims abstract description 14
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/102—Disc valves
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/16—Constructional details or arrangements
- G06F1/20—Cooling means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20272—Accessories for moving fluid, for expanding fluid, for connecting fluid conduits, for distributing fluid, for removing gas or for preventing leakage, e.g. pumps, tanks or manifolds
Abstract
The invention relates to the technical field of fluid conveying, in particular to a fluid conveying device, a liquid cooling heat radiation module and a micro-fluidic chip, which comprise a flow channel substrate, a one-way valve and an actuating unit, wherein the one-way valve is integrally in a laminated structure and is provided with a flow inlet and a flow outlet, the one-way valve is fixed on the surface of the flow channel substrate, a liquid inlet one-way valve is arranged in the one-way valve opposite to a liquid inlet channel, the flow inlet and the flow outlet of the liquid inlet one-way valve are respectively communicated with two sub-cavities in the liquid inlet channel, a liquid outlet one-way valve is arranged in the one-way valve opposite to a liquid outlet channel, and the flow inlet and the flow outlet of the liquid outlet one-way valve are respectively communicated with the two sub-cavities in the liquid outlet channel; according to the invention, the actuating unit and the one-way valve of the fluid conveying device are separated, so that the overall thickness of the fluid conveying device is further reduced, meanwhile, the separated actuating unit and valve unit can be flexibly arranged according to the space form of an application scene, and the space utilization rate is higher.
Description
Technical Field
The invention relates to the technical field of fluid conveying, in particular to a fluid conveying device, a liquid cooling heat dissipation module and a microfluidic chip.
Background
The fluid control technology is widely applied in production and life, a structural mode that a fluid pump is arranged outside a runner as a power source for fluid delivery is still a main technical means for completing a fluid delivery process in a plurality of application scenes, along with the continuous improvement of portability, miniaturization and lightening requirements of products, terminal products needing to be provided with a fluid flow control system meet great barriers on structural design and layout of the products, the delivery efficiency is higher, the volume is smaller, a more flexible fluid delivery device is utilized in space, a larger degree of freedom is created for the design optimization of the terminal products, the further expansion of the application scenes of the fluid delivery device is facilitated, and in addition, the micro-fluidic technology (such as a micro-fluidic chip, a micro-mixer and the like) which is developed rapidly at present also makes clear requirements on the volume, the flexibility of structural arrangement and the delivery efficiency of the fluid delivery device which is used as a core component.
The flexibility and the conveying efficiency of influencing the volume and structural arrangement of the fluid conveying device mainly depend on the main structure of a runner and the structural style of a fluid pump or a module with the function of the fluid pump, the structural style described in CN111818770A, a liquid cooling heat radiation module, a liquid cooling heat radiation system and electronic equipment, CN212910536U, a liquid cooling heat radiation module and electronic equipment and CN115167646B, a pump driving-closed micro-channel heat radiation technology disclosed by a bendable liquid cooling heat radiation module and a folding screen electronic terminal, a novel break is provided for the heat management in a narrow space of an intelligent terminal by combining a micro-channel forming mode based on a polymer film material, the fluid pump serving as a power source is externally arranged on the runner matrix, the structural style described in CN 109681414A, a micro-piezoelectric pump based on optical transmission welding and an assembling method is adopted, the external outline size of the fluid pump is greatly reduced, but the fluid pump is still protruded out of the runner matrix to a certain height, the arrangement of the fluid pump in the narrow space is limited, in addition, when the liquid cooling heat radiation module is applied to a large heat source, the single-output performance and the heat flow density of the fluid pump can not meet the requirements of the heat radiation pump in parallel connection or the heat radiation structure can not meet the requirements of a plurality of heat radiation.
Disclosure of Invention
The invention aims to solve the technical problems that: in order to solve the defects in the prior art, the invention provides a fluid conveying device which is inconvenient to arrange because of insufficient miniaturization of fluid pumps of the fluid conveying device in the prior art, and in addition, conveying efficiency is difficult to improve in a narrow space by arranging a plurality of pumps in series or in parallel, and a liquid cooling heat dissipation module comprising the fluid conveying device, so as to solve the problem that the heat dissipation efficiency is difficult to improve in the narrow space by arranging a plurality of pumps in series or in parallel in the prior pump driving type micro-channel heat dissipation technology.
In order to solve the technical problems, the invention adopts the following technical scheme: a fluid delivery device comprising:
the liquid inlet channel is provided with a liquid inlet at one end far away from the containing cavity, a liquid outlet is arranged at one end far away from the containing cavity of the liquid inlet channel, a blocking part is arranged in each of the liquid inlet channel and the liquid outlet channel, the blocking part divides the channel into two independent sub-cavities, one of the two sub-cavities in the liquid inlet channel is communicated with the containing cavity, the other sub-cavity is communicated with the liquid inlet, and one of the two sub-cavities in the liquid inlet channel is communicated with the liquid outlet;
the one-way valve is of a laminated structure and is provided with a liquid inlet port and a liquid outlet port, the one-way valve is fixed on the surface of the runner base body, a liquid inlet one-way valve is arranged in the one-way valve and opposite to the liquid inlet runner, the liquid inlet port and the liquid outlet port of the liquid inlet one-way valve are respectively communicated with two sub-cavities in the liquid inlet runner and are used for allowing fluid in the liquid inlet runner to enter the containing cavity and preventing the fluid from reversely flowing, a liquid outlet one-way valve is arranged in the one-way valve and opposite to the liquid outlet runner, the liquid inlet port and the liquid outlet port of the liquid outlet one-way valve are respectively communicated with the two sub-cavities in the liquid outlet runner, and the liquid outlet one-way valve is used for allowing the fluid in the containing cavity to enter the liquid outlet runner and preventing the fluid from reversely flowing;
the actuating unit is arranged on the runner base body and used for driving the volume of the accommodating cavity to change;
when the volume of the containing cavity is increased, the pressure of the liquid inlet and the liquid outlet are both larger than the pressure in the containing cavity, the liquid inlet one-way valve is in an open state, and at the moment, the liquid outlet one-way valve is in a cut-off state, so that fluid can enter the containing cavity from the liquid inlet through the liquid inlet flow channel and the valve cavity; when the volume of the containing cavity is reduced, the pressure of the liquid inlet and the liquid outlet is smaller than the pressure in the containing cavity, the liquid inlet one-way valve is in a cut-off state, and at the moment, the liquid outlet one-way valve is in an open state, so that fluid can flow out from the liquid outlet through the liquid outlet flow passage and the valve cavity from the containing cavity, and the one-way transportation of the fluid is realized.
According to the technical scheme, the actuating unit and the one-way valve of the fluid conveying device are detached, so that the overall thickness of the fluid conveying device is further reduced, meanwhile, the detached actuating unit and valve unit can be flexibly arranged according to the space form of an application scene, and the space utilization rate is higher.
Further, the one-way valve comprises a valve seat layer, a valve core layer, a valve cavity layer and a valve cover layer which are sequentially stacked along the thickness direction of the one-way valve, wherein the fluid inlet is a first fluid inlet, the fluid outlet comprises a first fluid outlet and a second fluid outlet which are mutually communicated, and the valve seat layer is provided with the first fluid inlet and the first fluid outlet; the valve core layer is provided with a valve hole opposite to the first inflow port, a valve plate is connected in the valve hole through at least one cantilever, the valve plate covers the first inflow port and moves and/or deforms under the action of pressure difference on two sides to open or block the first inflow port, and the valve core layer is also provided with a second outflow port; the middle part of the valve cavity layer is provided with a penetrating opening part, and the opening part covers the valve plate and the second fluid outlet; the valve cover layer covers the opening part, and encloses a valve cavity together with the valve cavity layer and the valve core layer, and the one-way valve is fixedly connected with the runner base body through the valve seat layer.
Further, the one-way valve comprises a valve seat layer, a valve core layer, a laminated layer, a valve cavity layer and a valve cover layer which are sequentially laminated along the thickness direction; the valve seat layer is provided with a first inlet port, a second inlet port and a third inlet port which are communicated with each other, the outlet port comprises a first outlet port and a third outlet port which are communicated with each other, and the first inlet port and the first outlet port are formed in the valve seat layer; the valve core layer is provided with a valve hole opposite to the first fluid outlet, a valve plate is connected in the valve hole through at least one cantilever, and the valve core layer is also provided with the second fluid inlet; the pressing plate layer is provided with the third fluid outlet relative to the valve plate, the valve plate covers the third fluid outlet and moves and/or deforms under the action of pressure difference on two sides to open or close the third fluid outlet, and the pressing plate layer is also provided with the third fluid inlet; the middle part of the valve cavity layer is provided with a penetrating opening part, and the opening part covers the third fluid outlet port and the third fluid inlet port; the valve cover layer covers the opening part, encloses a valve cavity together with the valve cavity layer and the pressing plate layer, and is fixedly connected with the runner base body through the valve seat layer.
Further, a first hole unit is arranged on any one side or two sides of the surface of the runner matrix opposite to the liquid inlet runner, the first hole unit comprises a first inlet and a first outlet which are positioned on the same side of the runner matrix, wherein a liquid inlet port of the liquid inlet one-way valve is communicated with a sub-cavity deviating from the cavity through the first outlet, and a liquid outlet port is communicated with the sub-cavity close to the cavity through the first inlet;
a second hole unit is arranged on any one side or two sides of the surface of the runner matrix opposite to the liquid outlet runner, the second hole unit comprises a second inlet and a second outlet which are positioned on the same side of the runner matrix, wherein, go out the inlet of liquid check valve and pass through the second export and be close to the chamber intercommunication that divides of holding the chamber, go out the chamber intercommunication that the liquid mouth passes through the second import and deviates from the chamber.
Further, the thickness of the runner matrix is 0.01mm-2mm.
Furthermore, the upper membrane material, the middle membrane material and the lower membrane material are all made of high polymer materials, and the middle membrane material and the upper membrane material are integrally formed or the middle membrane material and the lower membrane material are integrally formed.
Further, the one-way valve has a thickness of 0.01-2mm.
Further, the one-way valve is made of a high polymer material.
Further, the actuating unit is a piezoelectric vibrator, at least one piezoelectric vibrator is attached to one side, away from the containing cavity, of the upper membrane material and/or the lower membrane material, and the piezoelectric vibrator and the containing cavity are arranged oppositely.
Further, a supporting part is arranged in the area, opposite to the periphery of the piezoelectric vibrator, of the cavity.
Further, an upper membrane material and/or a lower membrane material which enclose a containing cavity are recessed into the containing cavity to form a recessed part;
or a gasket positioned in the containing cavity is arranged on one side of the upper membrane material and/or the lower membrane material which enclose the containing cavity and faces the containing cavity.
The invention also provides a liquid cooling heat radiation module which comprises the fluid conveying device.
Further, at least one runner is a communication cavity, the liquid inlet runner is communicated with the communication cavity through the liquid inlet, the liquid outlet runner is communicated with the communication cavity through the liquid outlet, the containing cavity, the liquid inlet runner, the liquid outlet runner and the communication cavity jointly form a closed containing cavity, liquid cooling working media are filled in the containing cavity, and the actuating unit drives the containing cavity to enable the liquid cooling working media to directionally circulate in the containing cavity.
The invention also provides a microfluidic chip comprising the fluid conveying device.
The beneficial effects of the invention are as follows:
1. the fluid conveying device consists of the runner base body, the actuating unit and the one-way valve, wherein the actuating unit and the one-way valve are arranged on the surface of the runner base body, the functions of the fluid pump in the prior art are realized by matching the runner base body, so that the one-way conveying of fluid is realized, the actuating unit and the one-way valve are separated, the overall thickness of the fluid conveying device can be further reduced, meanwhile, the piezoelectric vibrators and the one-way valve which are discretely arranged on the surface of the runner base body are more flexible in arrangement, the device has unique advantages in a narrow space with local bulges or recesses, and the actuating unit or the one-way valve can be flexibly arranged according to the height of the local bulges.
2. The check valve is of a single-valve-piece structure, namely, the check valve is only provided with a valve piece limiting the unidirectional flow of fluid at the inlet port or the outlet port, compared with the double-valve-piece structure of a valve unit forming a fluid pump in the prior art, namely, the inlet port and the outlet port are both provided with the valve pieces, when the valve pieces are only arranged at the inlet port, the thickness of the check valve can be further reduced, meanwhile, the in-plane size (length multiplied by width) can be synchronously reduced, and the check valve is more beneficial to flexible arrangement in a narrow space.
3. Due to the thickness reduction of the fluid conveying device and the flexible arrangement mode of the actuating unit and the check valve, the fluid conveying device is easier to realize the single-cavity multi-runner parallel connection, multi-cavity multi-runner serial connection, multi-cavity multi-runner parallel connection and other structural forms, namely, the multi-pump serial connection or multi-pump parallel connection structural form is easier to realize, great convenience is provided for the application design of the fluid conveying device, the conveying efficiency of the fluid conveying device is easier to regulate and control according to the requirement, and the application of the fluid conveying device in the technical fields of liquid cooling heat dissipation, micro-flow control and the like in a narrow space is facilitated.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a schematic top view of a flow channel substrate according to example 1 of the present invention;
FIG. 2 is a schematic cross-sectional view of A-A of FIG. 1;
FIG. 3 is a schematic top view of a fluid delivery device according to embodiment 1 of the present invention;
FIG. 4 is a schematic cross-sectional view of B-B of FIG. 3;
FIG. 5 is an enlarged partial schematic view of I in FIG. 4;
FIG. 6 is a schematic structural diagram of a check valve formed by laminating four layers of films in embodiment 1 of the present invention;
FIG. 7 is a schematic structural diagram of a check valve formed by stacking five layers of film materials in embodiment 1 of the present invention;
FIG. 8 is a schematic illustration of the liquid feeding process of the piezoelectric driven fluid delivery apparatus according to embodiment 1 of the present invention;
FIG. 9 is a schematic diagram showing the liquid outlet process of the piezoelectric driving fluid transporting apparatus in embodiment 1 of the present invention;
fig. 10 is a schematic view showing a structure in which a supporting portion is provided in the cavity of embodiment 1 with respect to the outer periphery of the piezoelectric vibrator;
FIG. 11 is a schematic view in section C-C of FIG. 10;
FIG. 12 is a schematic illustration of a multi-chamber multi-channel connection corresponding to a series connection of multiple fluid pumps in accordance with example 1 of the present invention;
FIG. 13 is a schematic illustration of a multi-chamber multi-channel connection corresponding to multiple fluid pumps in parallel in example 1 of the present invention;
FIG. 14 is a schematic view showing a flexible structural arrangement of an actuating unit and a check valve of a small-space fluid-carrying device with a partial depression in embodiment 1 of the present invention;
fig. 15 is a structure pattern of applying piezoelectric vibrators to the upper membrane material and the lower membrane material in embodiment 2 of the present invention, respectively;
FIG. 16 is a schematic view showing the lower membrane material in embodiment 3 of the present invention being concave toward one side of the cavity;
FIG. 17 is a schematic view of the lower membrane in embodiment 4 of the present invention with a gasket facing the side of the cavity;
FIG. 18 is a schematic diagram of a liquid cooling module in embodiment 5 of the present invention;
in the figure:
1. a flow channel substrate; 11. coating a film material; 12. an intermediate film material; 13. a lower membrane material; 14. a cavity; 15. a liquid inlet flow channel; 151. a liquid inlet; 16. a liquid outlet channel; 161. a liquid outlet; 17. a blocking portion; 18. a first hole unit; 181. a first inlet; 182. a first outlet; 19. a second hole unit; 191. a second inlet; 192. a second outlet;
2. a one-way valve; 2a, a liquid inlet one-way valve; 2b, a liquid outlet one-way valve; 21. a valve seat layer; 211. a first inlet port; 212. a first fluid outlet; 22. a valve core layer; 221. a valve hole; 222. a valve plate; 223. a second outlet port; 224. a second inlet port; 225. a cantilever; 23. a lamination layer; 231. a third inlet port; 232. a third outlet port; 24. a valve cavity layer; 241. an opening portion; 25. a valve cover layer;
3. an actuation unit; 31. a piezoelectric vibrator;
4. a support part;
5. a recessed portion;
6. a gasket;
7. locally concave.
Detailed Description
The invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic representations which merely illustrate the basic structure of the invention and therefore show only the structures which are relevant to the invention, and orientation and reference such as up, down, left, right, etc. may be used only to assist in the description of the features in the drawings. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the claimed subject matter is defined only by the appended claims and equivalents thereof.
In the first embodiment, as shown in fig. 1 to 11, a fluid delivery device includes a flow channel substrate 1, a check valve 2, and an actuating unit 3;
the runner base 1 is of a sheet shape, and is provided with an upper membrane material 11, a middle membrane material 12 and a lower membrane material 13 which are sequentially laminated along the thickness direction of the runner base, a gap structure is formed on the middle membrane material 12, the gap structure is a groove part and/or a hole part penetrating through the middle membrane material 12, the gap structure is covered by the upper membrane material 11 and the lower membrane material 13 to form a containing cavity 14 and runners, at least two runners are communicated with the containing cavity 14, at least one runner is a liquid inlet runner 15 in all runners, at least one runner is a liquid outlet runner 16, one end of the liquid inlet runner 15, which is far away from the containing cavity 14, is provided with a liquid inlet 151, one end of the liquid outlet runner 16, which is far away from the containing cavity 14, is provided with a liquid outlet 161, a blocking part 17 is arranged in the liquid inlet runner 15 and the liquid outlet 16, the blocking part 17 divides the runner into two separated cavities which are not communicated with each other, one of the two separated cavities in the liquid inlet runner 15 is communicated with the containing cavity 14, the other separated cavities in the two separated cavities in the liquid inlet runner 15 are communicated with the liquid inlet 151.
The surface of the runner base 1 opposite to the liquid inlet runner 15 is provided with a first hole unit 18 on either one side or both sides, the first hole unit 18 comprises a first inlet 181 and a first outlet 182 which are positioned on the same side of the runner base 1, wherein the first inlet 181 is positioned on one side close to the cavity 14 in the direction of the runner from the liquid inlet 151 to the cavity 14, the first outlet 182 is positioned on one side away from the cavity 14 in the direction of the runner from the liquid inlet 151 to the cavity 14, and the first inlet 181 and the first outlet 182 are respectively communicated with the two sub-cavities of the liquid inlet runner 15.
The second hole unit 19 is arranged on any side or two sides of the surface of the runner base 1 opposite to the liquid outlet runner 16, the second hole unit 19 comprises a second inlet 191 and a second outlet 192 which are positioned on the same side of the runner base 1, wherein the second inlet 191 is positioned on one side away from the cavity 14 in the runner direction from the liquid inlet 151 to the cavity 14, the second outlet 192 is positioned on one side close to the cavity 14 in the runner direction from the liquid inlet 151 to the cavity 14, and the second inlet 191 and the second outlet 192 are respectively communicated with two sub-cavities of the liquid outlet runner 16, as shown in fig. 1-2;
it should be noted that, the flow channel substrate 1 has various configurations according to the number of the cavities 14 formed in the interior and the number and communication forms of the liquid inlet channels 15 and the liquid outlet channels 16 communicating with the single or multiple cavities 14, such as single-cavity multi-channel, multi-cavity multi-channel serial connection, multi-cavity multi-channel parallel connection, and the like;
when the void structure on the intermediate film 12 includes only the groove portion, the intermediate film 12 and the upper film 11 may be integrally formed, or the intermediate film 12 and the lower film 13 may be integrally formed.
The one-way valve 2 is of a laminated structure, and is provided with a fluid inlet port and a fluid outlet port, fluid is limited to flow into the valve cavity from the fluid inlet port and flow out from the fluid outlet port, the one-way valve 2 is fixed on the surface of the runner base body 1, a fluid inlet one-way valve 2a is arranged opposite to the fluid inlet channel 15 in the one-way valve 2, the fluid inlet port of the fluid inlet one-way valve 2a is communicated with a sub-cavity on the side away from the containing cavity 14 through a first outlet 182, and the fluid outlet port is communicated with another sub-cavity on the side close to the containing cavity 14 through a first inlet 181 and is used for allowing the fluid in the fluid inlet channel 15 to enter the containing cavity 14 and preventing the fluid from reversely flowing; the one-way valve 2 is a liquid outlet one-way valve 2b opposite to the liquid outlet channel 16, the liquid inlet port of the liquid outlet one-way valve 2b is communicated with one sub-cavity near one side of the cavity 14 through a second outlet 192, the liquid outlet port is communicated with the other sub-cavity far away from one side of the cavity 14 through a second inlet 191, and the liquid outlet one-way valve 2b is used for allowing the fluid in the cavity 14 to enter the liquid outlet channel 16 and preventing the fluid from flowing reversely; as shown in fig. 3-5.
Specifically, the one-way valve 2 may be formed by stacking four layers of film materials, and sequentially includes a valve seat layer 21, a valve core layer 22, a valve cavity layer 24 and a valve cover layer 25, wherein the inlet port is a first inlet port 211, and the outlet port includes a first outlet port 212 and a second outlet port 223 which are mutually communicated; the valve seat layer 21 is provided with a first fluid inlet 211 and a first fluid outlet 212; the valve core layer 22 is provided with a valve hole 221 opposite to the first inflow port 211, the valve hole 221 is internally connected with a valve plate 222 through at least one cantilever 225, the valve plate 222 covers the first inflow port 211 and moves and/or deforms under the action of pressure difference on two sides to open or close the first inflow port 211, and the valve core layer 22 is also provided with a second outflow port 223; an opening portion 241 penetrating through the valve cavity layer 24 at a position at or near the middle of the valve cavity layer 24, the opening portion 241 covering the valve hole 221 and the second outflow port 223; the valve cover layer 25 covers the opening 241, and encloses a valve cavity together with the valve cavity layer 24 and the valve core layer 22, and the check valve 2 is fixedly connected with the runner base 1 through the valve seat layer 21. At this time, the valve plate 222 is disposed at the position of the inlet of the check valve 2, so as to realize the unidirectional control function of the check valve 2, as shown in fig. 6.
Of course, the one-way valve 2 may be formed by stacking five layers of film materials, and sequentially comprises a valve seat layer 21, a valve core layer 22, a pressing plate layer 23, a valve cavity layer 24 and a valve cover layer 25, wherein the fluid inlet comprises a first fluid inlet 211, a second fluid inlet 224 and a third fluid inlet 231 which are mutually communicated, the fluid outlet comprises a first fluid outlet 212 and a third fluid outlet 232 which are mutually communicated, and the valve seat layer 21 is provided with the first fluid inlet 211 and the first fluid outlet 212; the valve core layer 22 is provided with a valve hole 221 opposite to the fluid outlet, the valve hole 221 is covered by the first fluid outlet 212, a valve plate 222 is connected in the valve hole 221 through at least one cantilever 225, and the valve core layer 22 is also provided with a second fluid inlet 224; the pressing plate layer 23 is provided with a third fluid outlet 232 relative to the valve plate 222, the valve plate 222 covers the third fluid outlet 232 and moves and/or deforms under the action of pressure difference on two sides to open or close the third fluid outlet 232, and the pressing plate layer 23 is also provided with a third fluid inlet 231; an opening 241 is provided in the middle or near the valve cavity layer 24, and the opening 241 covers the third outlet port 232 and the third inlet port 231; the valve cover layer 25 covers the opening 241, and encloses a valve cavity together with the valve cavity layer 24 and the pressure plate layer 23, and the check valve 2 is fixedly connected with the runner base 1 through the valve seat layer 21. At this time, the valve plate 222 is disposed at the outlet of the check valve 2, so as to realize the unidirectional control function of the check valve 2, as shown in fig. 7.
Compared with a valve unit of a fluid pump described in publication number CN 109681414A, a micro piezoelectric pump, a piezoelectric pump unit and an assembling method based on optical transmission welding, which comprises a double-valve plate structure of an inlet valve and an outlet valve, the valve unit is formed by stacking at least five layers of film materials, the one-way valve 2 in the embodiment is formed by stacking at least four layers of film materials, and the valve plate is arranged at the position of a fluid inlet port or a fluid outlet port, both the thickness direction size and the in-plane size (length x width) perpendicular to the thickness direction after the piezoelectric vibrator of the actuating unit is split are obviously reduced, the piezoelectric vibrator of the actuating unit and the one-way valve after the splitting can be flexibly arranged according to the space shape of an application scene, and the space utilization rate is higher.
Preferably, the check valve 2 is formed by stacking four layers of film materials, the valve plate 222 is arranged at the inlet of the check valve 2, the unidirectional control function of the check valve 2 is realized, and compared with a stacked structure of five layers of film materials, the thickness is more beneficial to reducing, and the structure is simpler and more compact.
Of course, the check valve 2 is fixedly connected with the runner base 1 through the valve seat layer 21, and the valve seat layer 21 forming the check valve 2 can be integrally formed with the runner base 1 fixedly connected therewith, so that the thickness can be further reduced.
The materials of the upper membrane material 11, the middle membrane material 12 and the lower membrane material 13 forming the runner matrix 1 can be metal materials, polymer materials or functional materials formed by compounding metal materials and polymer materials, and specific types are not limited in this embodiment, the materials of the upper membrane material 11, the middle membrane material 12 and the lower membrane material 13 forming the runner matrix 1 are polymer materials, such as PC, PP, PET, or functional materials formed by compounding a plurality of polymer materials, and the advantage of selecting the polymer materials is that, on one hand, the lamination and sealing process between the polymer plastic membrane materials is relatively mature, and the interlayer high-strength sealing connection is easy to realize; on the other hand, the material is easy to obtain, the cost is low, the environment is protected, no pollution is caused, and the industrial grade and the food grade and the medical grade can be realized by selecting a proper type of polymer plastic film material, so that the application range of the product is greatly expanded; furthermore, no electromagnetic interference is generated, which is beneficial to developing new application scenes in electronic terminal products. Preferably, each film material of the runner matrix 1 is processed and manufactured by adopting a thermoplastic polymer film material, and the connection and the sealing of each component part are realized by a heat sealing mode.
Similarly, the materials of the layers of the films forming the check valve 2 may be metal materials, polymer materials or functional materials formed by compounding metal materials and polymer materials, and the specific types are not limited herein, in this embodiment, the materials of the layers of the films forming the check valve 2 are all polymer materials, preferably, the layers of the films of the check valve 2 are all made of thermoplastic polymer films, and the connection and sealing of the components are realized by heat sealing. The check valve 2 is heat-sealed and connected with the runner base 1 through the valve seat layer 21.
The actuating unit 3 is arranged on the runner base body 1 and is used for driving the volume of the accommodating cavity 14 to change; the actuation unit 3 may be, but is not limited to, a piezoelectric vibrator 31, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator, or a mechanical actuator; in this embodiment, the actuating unit 3 may specifically adopt a piezoelectric vibrator 31, that is, a piezoelectric driving mode is adopted in this embodiment, and it is obvious that the structure of the flow channel substrate 1 proposed in this embodiment is also suitable for driving modes such as electromagnetic driving, electrostatic driving, etc. that can cause the upper membrane material 11 and/or the lower membrane material 13 surrounding the cavity 14 to generate periodic deformation, for example, when electromagnetic driving is adopted, the electromagnetic actuator generally includes a rotor and a stator that are adjacently arranged, the stator is fixed, the rotor is in a patch shape, is applied to one side of the upper membrane material 11 and/or the lower membrane material 13 facing away from the cavity 14, and is overlapped with the cavity 14, and generates an alternating electromagnetic force between the rotor and the stator under the excitation of an external periodic electrical signal, so as to drive the rotor to generate periodic reciprocating motion, thereby driving the upper membrane material 11 or the lower membrane material 13 to generate periodic deformation, and cause the volume of the cavity 14 to generate periodic change. That is, the use of drive patterns other than piezo drives, which are obvious and not significantly inventive, should not be taken beyond the scope of the present invention.
In this embodiment, at least 1 piezoelectric vibrator 31 is attached to one side of the upper membrane material 11 or the lower membrane material 13 facing away from the cavity 14 and is disposed opposite to the cavity 14, and the piezoelectric vibrator 31 generates bending deformation under the excitation of an external periodic electric signal and acts on the upper membrane material 11 or the lower membrane material 13 to drive the upper membrane material 11 or the lower membrane material 13 to generate periodic deformation, so as to promote the volume of the cavity 14 to generate periodic change, as shown in fig. 3-4.
When the volume of the containing cavity 14 increases, the pressure of the liquid inlet 151 and the liquid outlet 161 is greater than the pressure in the containing cavity 14, so that pressure differences occur in the two sub-cavities of the liquid inlet runner 15 and the two sub-cavities of the liquid outlet runner 16, the valve plate 222 in the liquid inlet check valve 2a deforms to open the liquid inlet port, namely the liquid inlet check valve 2a is in an open state, the valve plate 222 in the liquid outlet check valve 2b seals the liquid outlet port, namely the liquid outlet check valve 2b is in a closed state, and fluid can enter the containing cavity 14 from the liquid inlet 151 through the liquid inlet runner 15 and the valve cavity, as shown in fig. 8; when the volume of the cavity 14 is reduced, the pressure of the liquid inlet 151 and the liquid outlet 161 is smaller than the pressure in the cavity 14, the valve plate 222 in the liquid inlet check valve 2a seals the liquid inlet, that is, the liquid inlet check valve 2a is in a cut-off state, at this time, the valve plate 222 in the liquid outlet check valve 2b is deformed to open the liquid outlet, that is, the liquid outlet check valve 2b is in an open state, so that the fluid can flow out from the cavity 14 through the liquid outlet flow channel 16 and the valve cavity from the liquid outlet 161, as shown in fig. 9, and continuous unidirectional transportation of the fluid is realized under the periodic driving action of the piezoelectric vibrator 31.
The piezoelectric vibrator 31 may be attached above the valve chamber, if the space conditions allow.
In order to ensure that the volume of the cavity 14 can be effectively changed when the piezoelectric vibrator 31 drives the upper membrane material 11 or the lower membrane material 13 to deform periodically, the upper membrane material 11 or the lower membrane material 13 connected to the piezoelectric vibrator 31 should be designed to deform more easily. That is, if the piezoelectric vibrator 31 is applied to the upper membrane material 11, the upper membrane material 11 should be designed to be more easily deformed than the lower membrane material 13; similarly, if the piezoelectric vibrator 31 is applied to the lower film 13, the lower film 13 should be designed to be deformed more easily than the upper film 11. The upper membrane material 11 and the lower membrane material 13 can be realized by adopting membrane materials with different material characteristics, such as the strength, the rigidity, the thickness and the like of the materials.
Preferably, a supporting portion 4 is provided in a region of the cavity 14 opposite to the periphery of the piezoelectric vibrator 31, so as to improve connection rigidity between the periphery of the piezoelectric vibrator 31 and the upper membrane material 11 and/or the lower membrane material 13, which is beneficial to improving the driving force of the piezoelectric vibrator 31 output outwards in the bending deformation process under the excitation of an external electric signal, and further improving the fluid conveying efficiency. It should be noted that, the supporting portion 4 is a supporting structure connected between the upper membrane material 11 and the lower membrane material 13, and its structural style is flexible and changeable, and cannot be exhaustive one by one. The structural form of the support portion 4 is not restricted here, but the principle to be followed is to ensure that the support portion 4 is disposed as much as possible in a region with respect to the outer periphery of the piezoelectric vibrator 31, while the support portion 4 cannot block the flow of fluid into and out of the cavity 14, as shown in fig. 10 to 11.
The flow channel substrate 1 formed by laminating the film materials can facilitate the manufacture of flow channels and cavities 14 with different sizes, different numbers and different shapes according to the realization requirements, and meanwhile, the thicknesses of the three film materials, namely the upper film material 11, the middle film material 12 and the lower film material 13, determine the overall thickness of the flow channel substrate 1. The thickness of the flow channel substrate 1 may be 0.01mm to 2mm, or even 0.01mm to 1mm.
The thickness of the single-layer valve body 2 protruding from the flow channel substrate 1 is determined by the thickness of the single-layer valve 2 and the thickness of the piezoelectric vibrator 31, the single-layer valve 2 is a laminated structure formed by laminating a plurality of layers of film materials, a valve casing which is not independently arranged is not arranged, in addition, the single-layer valve body 222 is simple in structure, the in-plane size can reach the theoretical minimum value, the thickness is determined by the thickness of each layer of film material forming the single-layer valve 2, the thickness of the single-layer valve 2 can be 0.01-2mm, even 0.01-1 mm, the piezoelectric vibrator 31 is very thin, and the piezoelectric vibrator 31 is coplanar with the single-layer valve 2 and is not laminated on the surface of the flow channel substrate 1, so that the whole fluid conveying device can be further reduced in the thickness direction compared with the prior art. The in-plane dimension (length×width) perpendicular to the thickness direction of the flow path base 1 can also be easily controlled to a small dimension as required. Further reduction of the thickness does not lead to an expansion of the in-plane dimensions.
In addition, the module composed of the actuating unit piezoelectric vibrator 31 and the one-way valve 2 which are discretely arranged realizes the function of the fluid pump in the prior art, meanwhile, the actuating unit and the one-way valve 2 which are discretely arranged bring great convenience to the structural arrangement, and the multi-pump serial connection or multi-pump parallel connection structural form is easier to realize in a narrow space, as shown in fig. 12-13, great convenience is provided for the application design of the fluid conveying device, and the conveying efficiency of the fluid conveying device is easier to regulate and control according to the requirement. The method is favorable for the application of the method in the technical fields of liquid cooling heat dissipation, micro-flow control and the like in a narrow space, and particularly has unique advantages in an application scene in the narrow space with local protrusions or local depressions 7, as shown in fig. 14.
As shown in fig. 15, the second embodiment has a principle structure substantially the same as that of the first embodiment, except that: the actuating unit 3 is a piezoelectric vibrator 31, at least one piezoelectric vibrator 31 is attached to one side of the upper membrane material 11 and one side of the lower membrane material 13, which are away from the accommodating cavity 14, and the piezoelectric vibrator 31 and the accommodating cavity 14 are opposite to each other;
at this time, the material characteristics, such as strength, rigidity, thickness, etc., of the upper film 11 and the lower film 13 are the same or similar. The upper membrane material 11 and the lower membrane material 13 must be designed to be relatively easily deformed. At this time, the volume change of the cavity 14 is affected by the piezoelectric vibrators 31 respectively applied to the upper membrane material 11 and the lower membrane material 13, for example, when the piezoelectric vibrators 31 on two sides work under the excitation of the electric signal with the same phase period, the volume change of the cavity 14 is the largest, which is beneficial to improving the output performance of the fluid conveying device.
As shown in fig. 16, the third embodiment is basically the same as the first embodiment or the second embodiment in principle, except that: the upper membrane material 11 and/or the lower membrane material 13 surrounding the containing cavity 14 are recessed into the containing cavity 14 to form a recessed part 5, and the recessed part 5 can be molded in a heating and pressurizing mode by heating and pressurizing the upper membrane material 11 and/or the lower membrane material 13, so that the height of the containing cavity 14 is reduced, the compression ratio of the containing cavity 14 in the working process of the fluid conveying device is increased, and the fluid conveying efficiency is further improved.
The fourth embodiment, as shown in fig. 17, has substantially the same principle structure as the first, second or third embodiments, except that: the upper membrane material 11 and/or the lower membrane material 13 which enclose the containing cavity 14 are/is provided with a gasket 6 positioned in the containing cavity 14 towards one side of the containing cavity 14, and the gasket 6 can be in heat sealing fixed connection with the corresponding membrane material; the thickness of the gasket 6 is smaller than that of the middle membrane 12, so as to reduce the height of the containing cavity 14, thereby increasing the compression ratio of the containing cavity 14 in the working process of the fluid conveying device and further improving the fluid conveying efficiency.
Fifth embodiment, as shown in fig. 18, is a liquid cooling heat dissipation module, including the fluid conveying device in any one of the above embodiments;
at least one flow passage is also arranged in the flow passages and is a communication cavity, the liquid inlet flow passage 15 is communicated with the communication cavity through the liquid inlet 151, the liquid outlet flow passage 16 is communicated with the communication cavity through the liquid outlet 161, the containing cavity 14, the liquid inlet flow passage 15, the liquid outlet flow passage 16 and the communication cavity jointly form a closed containing cavity, the liquid cooling working medium is filled in the containing cavity, and the actuating unit 3 drives the containing cavity 14 to enable the liquid cooling working medium to directionally circulate in the containing cavity.
Embodiment six differs from embodiment five in that: the shape of the runner matrix 1 can be molded in a bending and heating and pressurizing mode, so that the runner matrix 1 and the bonding surface are bonded with good 3D in the application process, the interface thermal resistance is reduced, and the heat exchange efficiency is improved. The embodiment aims at an application scene of heat dissipation under a folding screen electronic terminal screen. The type of the runner base 1 can be the type of the runner base 1 described in a bendable liquid cooling heat dissipation module and a folding screen electronic terminal disclosed in publication number CN 115167646B.
An embodiment seven is a microfluidic chip, including the fluid conveying device of any one of the embodiments one to four, where the microfluidic chip may be, for example, a microfluidic mixing chip, and is mainly used for mixing different fluids together to achieve high-precision and high-efficiency mixing and reaction. The main application fields include chemical analysis, biochemical reaction, biological analysis and the like; can be a microfluidic organ chip, including a blood vessel chip, a tumor chip, a brain chip and the like, and is used for in vitro simulation and simulating the structure and the function of human organs and cardiovascular systems; other microfluidic chip types such as cell sorting chips, microreactors, etc. can also be constructed.
The above-described preferred embodiments according to the present invention are intended to suggest that, from the above description, various changes and modifications can be made by the worker in question without departing from the technical spirit of the present invention. The technical scope of the present invention is not limited to the description, but must be determined according to the scope of claims.
Claims (14)
1. A fluid delivery device, characterized by: comprising the following steps:
the flow channel matrix (1) is provided with an upper membrane material (11), a middle membrane material (12) and a lower membrane material (13) which are sequentially stacked along the thickness direction of the flow channel matrix, wherein a gap structure is formed in the middle membrane material (12), the gap structure is a groove part and/or a hole part penetrating through the middle membrane material (12), the gap structure is sealed by the upper membrane material (11) and the lower membrane material (13) to form a cavity (14) and flow channels, at least two flow channels are communicated with the cavity (14), at least one flow channel is a liquid inlet flow channel (15), at least one flow channel is a liquid outlet flow channel (16), one end of the liquid inlet flow channel (15) far away from the cavity (14) is provided with a liquid inlet (151), one end of the liquid outlet flow channel (16) far away from the cavity (14) is provided with a liquid outlet (161), the inside of the liquid inlet flow channel (15) and the liquid outlet flow channel (16) is provided with a blocking part (17), the flow channels are separated into two independent sub-cavities, and one sub-cavity (15) is communicated with the other sub-cavity (14), and one sub-cavity (14) of the two sub-cavities (15) are communicated with the other sub-cavity (14) of the other cavity (161);
the one-way valve (2) is of a laminated structure and is provided with a fluid inlet and a fluid outlet, the one-way valve (2) is fixed on the surface of the runner base body (1), a fluid inlet one-way valve (2 a) is arranged in the one-way valve (2) opposite to the fluid inlet runner (15), the fluid inlet and the fluid outlet of the fluid inlet one-way valve (2 a) are respectively communicated with two sub-cavities in the fluid inlet runner (15) and are used for allowing fluid in the fluid inlet runner (15) to enter the containing cavity (14) and preventing the fluid from reversely flowing, a fluid outlet one-way valve (2 b) is arranged in the one-way valve (2) opposite to the fluid outlet runner (16), the fluid inlet and the fluid outlet of the fluid outlet one-way valve (2 b) are respectively communicated with the two sub-cavities in the fluid outlet runner (16), and the fluid outlet one-way valve (2 b) is used for allowing the fluid in the containing cavity (14) to enter the fluid outlet runner (16) and preventing the fluid from reversely flowing;
and the actuating unit (3) is arranged on the runner base body (1) and used for driving the volume of the accommodating cavity (14) to change.
2. The fluid delivery device of claim 1, wherein: the one-way valve (2) comprises a valve seat layer (21), a valve core layer (22), a valve cavity layer (24) and a valve cover layer (25) which are sequentially stacked along the thickness direction of the one-way valve, wherein the inflow port is a first inflow port (211), the outflow port comprises a first outflow port (212) and a second outflow port (223) which are mutually communicated, and the valve seat layer (21) is provided with the first inflow port (211) and the first outflow port (212); the valve core layer (22) is provided with a valve hole (221) opposite to the first inflow port (211), the valve hole (221) is internally connected with a valve plate (222) through at least one cantilever (225), the valve plate (222) covers the first inflow port (211) and moves and/or deforms under the action of pressure difference on two sides so as to open or close the first inflow port (211), and the valve core layer (22) is also provided with the second outflow port (223); the middle part of the valve cavity layer (24) is provided with a penetrating opening part (241), and the opening part (241) covers the valve plate (222) and the second fluid outlet (223); the valve cover layer (25) covers the opening part (241), and encloses a valve cavity together with the valve cavity layer (24) and the valve core layer (22), and the one-way valve (2) is fixedly connected with the runner base body (1) through the valve seat layer (21).
3. The fluid delivery device of claim 1, wherein: the one-way valve (2) comprises a valve seat layer (21), a valve core layer (22), a pressing plate layer (23), a valve cavity layer (24) and a valve cover layer (25) which are sequentially stacked along the thickness direction of the one-way valve; the inlet port comprises a first inlet port (211), a second inlet port (224) and a third inlet port (231) which are communicated with each other, the outlet port comprises a first outlet port (212) and a third outlet port (232) which are communicated with each other, and the valve seat layer (21) is provided with the first inlet port (211) and the first outlet port (212); the valve core layer (22) is provided with a valve hole (221) opposite to the first fluid outlet (212), a valve plate (222) is connected in the valve hole (221) through at least one cantilever (225), and the valve core layer (22) is also provided with the second fluid inlet (224); the pressing plate layer (23) is provided with the third fluid outlet (232) relative to the valve plate (222), the valve plate (222) covers the third fluid outlet (232) and moves and/or deforms under the action of pressure difference on two sides so as to open or close the third fluid outlet (232), and the pressing plate layer (23) is also provided with the third fluid inlet (231); the middle part of the valve cavity layer (24) is provided with a penetrating opening part (241), and the opening part (241) covers the third outflow port (232) and the third inflow port (231); the valve cover layer (25) covers the opening part (241), and encloses a valve cavity together with the valve cavity layer (24) and the pressing plate layer (23), and the one-way valve (2) is fixedly connected with the runner base body (1) through the valve seat layer (21).
4. The fluid delivery device of claim 1, wherein: a first hole unit (18) is arranged on any one side or two sides of the surface of the runner base body (1) opposite to the liquid inlet runner (15), the first hole unit (18) comprises a first inlet (181) and a first outlet (182) which are positioned on the same side of the runner base body (1), wherein a liquid inlet port of the liquid inlet one-way valve (2 a) is communicated with a sub-cavity which is away from the containing cavity (14) through the first outlet (182), and a liquid outlet port is communicated with the sub-cavity which is close to the containing cavity (14) through the first inlet (181);
the liquid outlet one-way valve comprises a liquid outlet flow channel (16), wherein any one side or two sides of the surface of the flow channel substrate (1) opposite to the liquid outlet flow channel (16) are provided with second hole units (19), each second hole unit (19) comprises a second inlet (191) and a second outlet (192) which are positioned on the same side of the flow channel substrate (1), a liquid inlet port of the liquid outlet one-way valve (2 b) is communicated with a sub-cavity close to the containing cavity (14) through the second outlet (192), and a liquid outlet port is communicated with the sub-cavity away from the containing cavity (14) through the second inlet (191).
5. The fluid delivery device of any one of claims 1-4, wherein: the thickness of the runner matrix (1) is 0.01mm-2mm.
6. The fluid delivery device of any one of claims 1-4, wherein: the upper membrane material (11), the middle membrane material (12) and the lower membrane material (13) are all made of high polymer materials, and the middle membrane material (12) and the upper membrane material (11) are integrally formed or the middle membrane material (12) and the lower membrane material (13) are integrally formed.
7. The fluid delivery device of any one of claims 1-4, wherein: the thickness of the one-way valve (2) is 0.01-2mm.
8. The fluid delivery device of any one of claims 1-4, wherein: the one-way valve (2) is made of a high polymer material.
9. The fluid delivery device of any one of claims 1-4, wherein: the actuating unit (3) is a piezoelectric vibrator (31), at least one piezoelectric vibrator (31) is attached to one side, away from the containing cavity (14), of the upper membrane material (11) and/or the lower membrane material (13), and the piezoelectric vibrator (31) and the containing cavity (14) are arranged oppositely.
10. The fluid delivery device of claim 9, wherein: a supporting part (4) is arranged in the region, opposite to the periphery of the piezoelectric vibrator (31), of the accommodating cavity (14).
11. The fluid delivery device of any one of claims 1-4, wherein: an upper membrane material (11) and/or a lower membrane material (13) which enclose a containing cavity (14) are recessed into the containing cavity (14) to form a recessed part (5);
or, a gasket (6) positioned in the containing cavity (14) is arranged on one side of the upper membrane material (11) and/or the lower membrane material (13) which enclose the containing cavity (14) towards the containing cavity (14).
12. The utility model provides a liquid cooling heat dissipation module which characterized in that: a fluid delivery device comprising any of claims 1-11.
13. The liquid-cooled heat sink module as set forth in claim 12, wherein: at least one runner is a communication cavity, the liquid inlet runner (15) is communicated with the communication cavity through a liquid inlet (151), the liquid outlet runner (16) is communicated with the communication cavity through a liquid outlet (161), the cavity (14), the liquid inlet runner (15), the liquid outlet runner (16) and the communication cavity jointly form a closed cavity, liquid cooling working medium is filled in the cavity, and the actuating unit (3) drives the cavity (14) to enable the liquid cooling working medium to directionally circulate in the cavity.
14. A microfluidic chip, characterized in that: a fluid delivery device comprising any of claims 1-11.
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| CN202310958216.8A CN116658400B (en) | 2023-08-01 | 2023-08-01 | Fluid conveying device, liquid cooling heat dissipation module and micro-fluidic chip |
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