CN109899328A - A kind of driving type piezoelectric actuator hydraulic motor - Google Patents
A kind of driving type piezoelectric actuator hydraulic motor Download PDFInfo
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- CN109899328A CN109899328A CN201910191134.9A CN201910191134A CN109899328A CN 109899328 A CN109899328 A CN 109899328A CN 201910191134 A CN201910191134 A CN 201910191134A CN 109899328 A CN109899328 A CN 109899328A
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Abstract
Hydraulic-driven and control technology field of the present invention, and in particular to a kind of driving type piezoelectric actuator hydraulic motor is made of piezoelectric pump, accumulator, reversal valve hydraulic cylinder and pipeline, and piezoelectric pump is made of upper lower body, disc valve, energy converter group etc.；Upper body is on lower body and energy converter group is crimped in each body cavity of upper pump casing by sealed circle, and energy converter group is made of two energy converters that sealed ring separates；Upper lower body and energy converter and sealing ring respectively constitute pump chamber, the pump chamber up and down after series connection up and down and connect again；One energy converter includes driver and sensor, and power supply exports d. c. voltage signal to each energy converter and driver, and the deformation direction of driving voltage and each energy converter commutates when sensing voltage reaches extreme value, and then forms the vibration of energy converter cyclic bending and one-directional fluid flow；Piezoelectric pump inlet and outlet are connect through reversal valve with hydraulic cylinder, and accumulator is connected to piezoelectric pump import or export, and piezoelectric pump has the motion state for changing hydraulic cylinder piston when fluid output by adjusting reversal valve.
Description
Technical field
The invention belongs to hydraulic-drivens and control technology field, and in particular to a kind of driving type piezoelectric actuator hydraulic motor.
Background technique
Hydraulic drive and control system is also referred to as hydraulic motor, have high-energy density, low noise, without impact etc. advantages,
National economy and the various industries of national defense industry have been applied successfully for many years.Traditional hydraulic power system be usually all by size compared with
What big motor and mechanical type hydraulic pump were driven, and pass through reversal valve, overflow valve, pressure reducing valve, throttle valve and speed governing valve
Etc. the integration of operation of polymorphic types valve realize effective control of hydraulic cylinder power output, speed and position etc., therefore bulky, structure connects
It connects and control is more complicated, there is significant limitation using upper: being not used to the microsystems such as aerospace, walking robot
And tele-control system；Simultaneously as existing hydraulic power system is jointly controlled using miscellaneous hydraulic valve, it is also difficult
To realize the accurate control and adjusting of driving force, speed and position, it is also not used to precision machinery processing and assembly, accurate survey
The requirements drivings such as amount, precision optics driving position and control field with high accuracy.Therefore people propose a plurality of types of in succession
Microminiature piezoelectric hydraulic driver, i.e., by piezoelectric pump drive cylinder device, as Chinese patent 200810051156.7,
201210175495.2,201210175464.7 etc., because the piezoelectric pump in existing piezoelectric hydraulic driver is fixed frequency driving
, piezoelectricity pump output flow and pressure, the i.e. driving force of hydraulic cylinder and speed are larger by operating infulence in real work, stream
Body viscosity, temperature and load resistance etc. influence the resonance frequency of system by influencing system damping, when piezoelectric vibrator is specific
When resonance frequency and larger set driving frequency deviation under operating condition, the output flow and pressure of pump are all by sharp fall
And it is relatively low according to the accuracy that setting driving voltage and frequency calculate resulting output flow and pressure.
Summary of the invention
The present invention proposes a kind of driving type piezoelectric actuator hydraulic motor, and embodiment of the present invention is: a kind of driving type piezoelectric actuator liquid
Pressure motor is made of piezoelectric pump, accumulator, reversal valve hydraulic cylinder and pipeline, piezoelectric pump by upper lower body, disc valve, energy converter group,
Sealing ring conducting wire group one, conducting wire group two and electric power generating composition；Upper body is equipped with import, vestibule and at least two body cavitys, the top of body cavity
Wall is equipped with uuper valve chamber and upper outlet, and the side wall of body cavity is equipped with upward wiring slot；The uuper valve chamber of the leftmost side and the rightmost side it is upper go out
Mouth is connected to import and vestibule respectively, and the uuper valve chamber in two adjacent body cavitys is connected to upper outlet；Lower body is equipped with outlet, leukorrhagia
The vestibule platform of entrance and the body cavity platform equal with body cavity quantity, leftmost side body cavity platform are equipped with outlet valve chamber and lower valve chamber, remaining
Body cavity platform is equipped with lower valve chamber and lower outlet；Outlet valve chamber and outlet, the lower valve chamber of the rightmost side are connected to lower inlet, and two
Lower valve chamber and lower outlet on adjacent body cavity platform；Upper body is mounted on lower body through screw, and it is intracavitary and pass through that vestibule platform is placed in hole
Gasket sealing, the upper outlet of the rightmost side are connected to through vestibule with lower inlet；Body cavity platform is placed in body cavity and sealed circle is by transducing
Device group is crimped in each body cavity of upper body, and energy converter group is made of two energy converters that sealed ring separates；Energy converter is by substrate
It is formed with piezoelectric piece bonding, transducer face is coated with insulated paint or is bonded with insulation film；Two piezoelectric patches in each energy converter group
Polarization direction is opposite and installation direction, that is, piezoelectric patches polarization side of the opposite energy converter group i.e. in installation, two adjacent body cavitys
To on the contrary, the polarization direction of piezoelectric patches refers to that a polarization direction is to be directed toward piezoelectric patches, another polarization direction from substrate on the contrary
It is to be directed toward substrate from piezoelectric patches；Export valve chamber and be bonded disc valve in it and constitute outlet valve, upper lower valve chamber and its interior glue
The disc valve connect respectively constitutes inlet valve up and down；Disc valve is successively bonded by the valve seat of pressure ring, valve block and center band valve opening,
Valve block is made of cover plate, ring plate and at least three connection cover plates and the flight of ring plate, ring plate two sides respectively with pressure ring and valve
Seat bonding；On the valve opening that flight gets lodged in valve seat to the pre-bending of ring plate side, bonding back cover plate before valve block is bonded；Upper body, energy converter
And sealing ring constitutes the upper pump chamber that is serially connected, lower body, energy converter and sealing ring constitute the lower pump chamber being serially connected, upper pump chamber with
Lower pump chamber series connection；At least one energy converter includes driver and sensor two parts, i.e. piezoelectric patches at least one energy converter
Surface electrode be divided into driving unit and sensing unit, the area of driving unit is far longer than the area of sensing unit；Base
The composite layer that driving unit and sensing unit are formed in plate and piezoelectric patches is respectively driver and sensor；Driver and energy converter
All it is connected through conducting wire group one with power supply, sensor is connected through conducting wire group two with power supply.
In the present invention, it is self-excitation when exporting DC voltage that the driving voltage of power supply output, which is direct current or ac voltage signal,
Driving: power supply exports identical d. c. voltage signal, and the voltage signal generated using sensor to each energy converter and driver
Judge the deformation i.e. of energy converter or more pump chamber fluid pressure variable condition；When the sensing voltage of sensor output reaches extreme value
When, i.e., when the deflection of driver and energy converter and upper and lower pump chamber fluid pressure reach extreme value, driving voltage and each energy converter
Deformation direction commutation；The alternating commutation of driving voltage forms the one-way flow of the vibration of energy converter cyclic bending and fluid,
Therefore belong to self-excited driving.
By have there are three energy converter group pumps in series for, from left to right: energy converter group be successively defined as energy converter group one,
Two, three, upper pump chamber is successively defined as pump chamber one, two, three, and upper inlet valve is successively defined as upper inlet valve one, two, three；From the right side
To a left side: lower pump chamber is successively defined as lower pump chamber one, two, three, and lower inlet valve is successively defined as lower inlet valve one, two, three.Energy converter
The energy converter of one top of group contains driver and sensor, the process of self-excited driving are as follows: power supply exports positive direct-current voltages, energy converter
Group one and three is bent upwards, energy converter group two is bent downwardly, and the volume of upper pump chamber one and three and lower pump chamber two reduces, upper pump chamber two
And the volume of lower pump chamber one and three increases, upper inlet valve one and three, lower inlet valve two and outlet valve are closed, upper inlet valve two and under
Inlet valve one and three is opened, fluid flow direction are as follows: above pump chamber one → upper pump chamber two, upper pump chamber three → lower pump chamber one, lower pump chamber
Two → lower pump chamber three, this is replacement process；In replacement process, sensor is bent upwards with driver, output voltage is by minimum value
It is stepped up maximum value；When driver deflection maximum, that is, when going up minimum one volume of pump chamber, Fluid pressure maximum, sensing electricity
Pressure reaches maximum value, and driving voltage commutation is become negative dc voltage by positive direct-current voltages, energy converter group one and three is bent downwardly,
Energy converter group two is bent upwards, and upper pump chamber one and three and two volume of lower pump chamber increase, upper pump chamber two and the volume of lower pump chamber one and three
Reduce, upper inlet valve one and three, lower inlet valve two and outlet valve are opened, and upper inlet valve two and lower inlet valve one and three are closed, stream
Body flow direction are as follows: the upper pump chamber three of import → upper pump chamber one, upper pump chamber two →, lower pump chamber one → lower pump chamber two, lower pump chamber three →
Outlet, this is suction process；During suction, sensing voltage becomes minimum value by maximum value again, and driving voltage commutates again；It drives
The alternating commutation of dynamic voltage forms the one-way flow of the cyclic bending vibration and fluid of energy converter；In the above-mentioned course of work,
The frequency of driving voltage is formed by sensing voltage maximum value and minimum value checker, i.e., driving frequency is according to transducing
Device deformation automatically forms, and energy converter deformation depends on output pressure and fluid viscosity, therefore self-excited driving works
The environmental suitability of mode is strong.
In the present invention, the quantity of energy converter group Dn can be determined according to required maximum fluid circular flow Q and driving pressure P,
Energy converter d is formed by equal thickness PZT4 chip and brass substrate bonding and when using water as circulatory mediator: In formula: ηq、ηpRespectively
For flow relevant to disc valve and energy converter and pressure coefficient, R, H are respectively pump chamber radius and height, when H is not less than P=0
Maximum input voltage acts on the deflection of lower energy converter central point, hpFor piezoelectric patches thickness, f is autoexcitation frequency, U0It is defeated for power supply
Voltage out, N are the quantity of energy converter group.
Piezoelectric pump inlet and outlet are connect through three position four-way directional control valve with hydraulic cylinder, and accumulator and piezoelectric pump import or export connect
Logical, piezoelectric pump has the motion state for changing hydraulic cylinder piston when fluid output by adjusting reversal valve: when reversal valve ends, piezoelectricity
The fluid of pump discharge output directly returns to import through reversal valve, and no fluid enters the upper and lower cavity of hydraulic cylinder, and hydraulic cylinder piston is in
Lock state；When reversal valve upper end is connected, fluid enters hydraulic cylinder cavity of resorption, hydraulic cylinder piston moves upwards；On the contrary, under reversal valve
When termination is logical, fluid enters hydraulic cylinder epicoele, hydraulic cylinder piston moves downward.
Feature and advantage of the present invention are: making power supply according to the pressure change of fluid in the system i.e. deformation state of energy converter
The driving DC voltage of output commutates, and realizes energy converter self-excited driving, and driving frequency matches with operating condition, driving frequency pair
The variations such as fluid viscosity, temperature and load it is adaptable.
Detailed description of the invention
Fig. 1 is the system principle of compositionality figure of motor in a preferred embodiment of the present invention；
Fig. 2 is the structural profile illustration pumped in a preferred embodiment of the present invention；
Fig. 3 is the A-A cross-sectional view of Fig. 2；
Fig. 4 is the structural schematic diagram of upper body in a preferred embodiment of the present invention；
Fig. 5 is the bottom view of Fig. 4；
Fig. 6 is the structural schematic diagram of lower body in a preferred embodiment of the present invention；
Fig. 7 is the top view of Fig. 6；
Fig. 8 is the structural schematic diagram of disc valve in a preferred embodiment of the present invention；
Fig. 9 is the structural schematic diagram of a preferred embodiment of the present invention middle valve plate；
Figure 10 is the B-B sectional view of Fig. 9；
Figure 11 is the waveform diagram of driving voltage in a preferred embodiment of the present invention；
Figure 12 is the waveform diagram of sensing voltage in a preferred embodiment of the present invention；
Figure 13 is the switch relation schematic diagram of energy converter deformation and disc valve in a preferred embodiment of the present invention.
Specific embodiment
A kind of driving type piezoelectric actuator hydraulic motor of the invention is by piezoelectric pump W, accumulator X, reversal valve Y hydraulic cylinder Z and pipeline
It constitutes, piezoelectric pump W is by upper body a, lower body b, disc valve c, energy converter group Dn, sealing ring e, one g of conducting wire group and two h of conducting wire group and electricity
Source f is constituted；The roof that upper body a is equipped with import a1, vestibule a6 and at least two body cavity a2, body cavity a2 be equipped with uuper valve chamber a3 and
Upper outlet a4, side wall are equipped with upward wiring slot a5；The uuper valve chamber a3 of leftmost side body cavity a2 is connected to import a1, the rightmost side it is upper go out
Mouth a4 is connected to vestibule a6, and the uuper valve chamber a3 in two adjacent body cavity a2 is connected to upper outlet a4；Lower body b be equipped with outlet b1,
Vestibule platform b6 with lower inlet b5 and the body cavity platform b2 equal with body cavity a2 quantity, leftmost side body cavity platform b2 are equipped with outlet valve chamber
B7 and lower valve chamber b3, remaining body cavity platform b2 are equipped with lower valve chamber b3 and lower outlet b4；Outlet valve chamber b7 is connected to outlet b1, most right
The lower valve chamber b3 of side is connected to lower inlet b5, and the lower valve chamber b3 on two adjacent body cavity platform b2 is connected to lower outlet b4；Upper body a warp
Screw is mounted on lower body b, and vestibule platform b6 is placed in vestibule a6 and sealed pad e ' sealing, and the upper outlet a4 of the rightmost side is through vestibule
A6 is connected to lower inlet b5；Body cavity platform b2 is placed in body cavity a2 and energy converter group Dn is crimped on each body of upper body a by sealed circle e
In chamber a2, energy converter group Dn is made of two energy converter d that sealed ring e1 is separated；Energy converter d is by substrate d1 and piezoelectric patches d2
It is bonded, the surface of energy converter d is coated with insulated paint or is bonded with insulation film；Two energy converters in each energy converter group Dn
The polarization direction of piezoelectric patches d2 is opposite in d and is relatively the installation direction of the energy converter group Dn in installation, two adjacent body cavity a2
I.e. the polarization direction of piezoelectric patches d2 is on the contrary, the polarization direction of piezoelectric patches d2 refers to that a polarization direction is directed toward from substrate d1 on the contrary
Piezoelectric patches d2, another polarization direction are to be directed toward substrate d1 from piezoelectric patches d2；Export the valve chamber b7 disc valve c be bonded in it
Constitute outlet valve O, uuper valve chamber a3 and lower valve chamber b3 and its interior be bonded disc valve c respectively constitute upper inlet valve sin and under into
Mouth valve xin；Disc valve c is successively bonded by the valve seat j of pressure ring k, valve block i and center band valve opening, and valve block i is by cover plate i1, ring
Piece i3 and at least three connection cover plate i1 and ring plate i3 flight i2 constitute, the two sides of ring plate i3 respectively with pressure ring k and valve
Seat j bonding；Flight i2 is got lodged on the valve opening of valve seat j to the side pre-bending of ring plate i3, bonding back cover plate i1 before valve block i is bonded；
Upper body a, energy converter d and sealing ring e constitute the upper pump chamber scn being serially connected, and lower body b, energy converter d and sealing ring e constitute mutual
Concatenated lower pump chamber xcn, upper pump chamber scn connect with lower pump chamber xcn；At least one energy converter d includes driver D and sensor S
The surface electrode of two parts, i.e. piezoelectric patches d2 at least one energy converter d is divided into driving unit d21 and sensing unit
D22, the area of driving unit d21 are far longer than the area of sensing unit d22；Driving unit d21 in substrate d1 and piezoelectric patches d2
It is respectively driver D and sensor S with the sensing unit d22 composite layer formed；Driver D and energy converter d is through one g of conducting wire group
It is connected with power supply f, sensor S is connected through two h of conducting wire group with power supply f；N in Dn, sin, scn represents serial number from left to right, n
=1,2,3 ...；N in xin, xcn represents serial number from right to left, n=1,2,3 ....
In the present invention, it is self-excitation when exporting DC voltage that the driving voltage of power supply f output, which is direct current or ac voltage signal,
Driving: power supply f exports identical d. c. voltage signal, and the sensing generated using sensor S to each energy converter d and driver D
Voltage signal judges the deformation and upper pump chamber scn and lower pump chamber xcn fluid pressure variable condition of energy converter d；When sensor S's
When sensing voltage reaches extreme value, i.e. the deflection and upper pump chamber scn and lower pump chamber xcn fluid pressure of driver D and energy converter d
When reaching extreme value, the deformation direction of power supply f output voltage and each energy converter d commutate；The alternating commutation of power supply f output voltage is shape
At the cyclic bending vibration of energy converter d and the one-way flow of fluid, therefore belong to self-excited driving.
For having the pumps in series there are three energy converter group Dn, from left to right: energy converter group Dn is successively defined as energy converter
A D1, two D2, three D3 are organized, upper pump chamber scn is successively defined as one sc1 of pump chamber, two sc2, three sc3, and upper inlet valve sin is successively fixed
Justice is one si1 of upper inlet valve, two si2, three si3；From right to left: lower pump chamber xcn be successively defined as lower one xc1 of pump chamber, two xc2,
Three xc3, lower inlet valve xin are successively defined as one xi1 of lower inlet valve, two xi2, three xi3.Energy converter above one D1 of energy converter group
D contains driver D and sensor S, the process of self-excited driving are as follows: power supply f exports positive direct-current voltages U0, energy converter group one D1 and three
D3 is bent upwards, two D2 of energy converter group is bent downwardly, upper one sc1 of pump chamber, two xc2 of three sc3 of upper pump chamber and lower pump chamber volume subtract
Small, the volume of upper two sc2 of pump chamber, one xc1 of lower pump chamber and lower three xc3 of pump chamber increase, one si1 of upper inlet valve, upper inlet valve three
Si3, lower inlet valve two xi2 and outlet valve O are closed, and two si2 of upper inlet valve, one xi1 of lower inlet valve and three xi3 of lower inlet valve are opened
It opens, fluid flow direction are as follows: upper one sc1 of pump chamber → upper two sc2 of pump chamber, three sc3 of upper pump chamber → one xc1 of lower pump chamber, lower pump chamber two
Xc2 → three xc3 of lower pump chamber, this is replacement process；In replacement process, sensor S is bent upwards with driver D, output voltage by
Minimum value-UgIt is stepped up maximum value Ug；When driver deflection maximum, i.e., upper one sc1 volume minimum of pump chamber, Fluid pressure
When maximum, the output voltage of sensor S reaches maximum value Ug, power supply f output voltage commutation, by positive direct-current voltages U0Become negative
DC voltage-U0, energy converter group one D1 and three D3 are bent downwardly, two D2 of energy converter group is bent upwards, upper one sc1 of pump chamber, upper pump
The volume of two xc2 of three sc3 of chamber and lower pump chamber increases, and the volume of upper two sc2 of pump chamber, one xc1 of lower pump chamber and lower three xc3 of pump chamber subtract
It is small, one si1 of upper inlet valve, three si3 of upper inlet valve, lower inlet valve two xi2 and outlet valve O open, two si2 of upper inlet valve, under into
Mouth one xi1 of valve and three xi3 of lower inlet valve is closed, fluid flow direction are as follows: and import a1 → upper one sc1 of pump chamber, two sc2 of upper pump chamber →
Upper three sc3 of pump chamber, one xc1 of lower pump chamber → two xc2 of lower pump chamber, lower three xc3 of pump chamber → outlet b1, this is suction process；Suction
Cheng Zhong, the output voltage of sensor S is again by maximum value UgBecome minimum value-Ug, power supply f output voltage commutates again；Power supply f is defeated
The alternating commutation of voltage forms the one-way flow of the cyclic bending vibration and fluid of energy converter d out；In the above-mentioned course of work,
The frequency of power supply f output voltage is formed by sensor S maximum output voltage and minimum value checker, i.e. excitation frequency
Rate is to be automatically formed according to energy converter d deformation, and energy converter d deformation depends on output pressure and fluid viscosity,
Therefore environmental suitability is strong.
In the present invention, the quantity of energy converter group Dn can be determined according to required maximum fluid circular flow Q and driving pressure P,
Energy converter d is formed by equal thickness PZT4 chip and brass substrate bonding and when using water as circulatory mediator: In formula: ηq、ηpRespectively
For flow relevant to disc valve c and energy converter d and pressure coefficient, R, H are respectively pump chamber radius and height, and H is not less than P=0
When maximum input voltage act on the deflection of lower energy converter d central point, hpFor the thickness of piezoelectric patches d2, f is autoexcitation frequency, U0
For the output voltage of power supply f, N is the quantity of energy converter group Dn.
The import a1 and outlet b1 of piezoelectric pump W is connect through three position four-way directional control valve Y with hydraulic cylinder Z, accumulator X and piezoelectric pump
The import a1 of W or outlet b1 connection, piezoelectric pump W have the fortune for the piston for changing hydraulic cylinder Z when fluid output by adjusting reversal valve Y
Dynamic state: when reversal valve Y ends, the fluid of the outlet piezoelectric pump W b1 output directly returns to import a1 through reversal valve Y, no fluid into
Enter the epicoele or cavity of resorption of hydraulic cylinder Z, the piston of hydraulic cylinder Z is in the lock state；When the upper end reversal valve Y is connected, fluid enters liquid
The piston upwards of the cavity of resorption of cylinder pressure Z, hydraulic cylinder Z；On the contrary, fluid enters hydraulic cylinder Z's when the lower end of reversal valve Y is connected
Epicoele, piston moves downward by hydraulic cylinder Z.
Claims (1)
1. a kind of driving type piezoelectric actuator hydraulic motor is made of piezoelectric pump, accumulator, reversal valve hydraulic cylinder and pipeline, piezoelectric pump by
Upper lower body, disc valve, energy converter group, sealing ring and electric power generating composition；It is characterized by: upper body is equipped with import, vestibule and at least
Two body cavitys, the roof of body cavity are equipped with uuper valve chamber and upper outlet, leftmost side uuper valve chamber and rightmost side upper outlet respectively with import
It is connected to vestibule, the uuper valve chamber in two adjacent body cavitys is connected to upper outlet；Lower body be equipped with outlet, the vestibule platform with lower inlet and
The body cavity platform equal with body cavity quantity, leftmost side body cavity platform is equipped with outlet valve chamber and lower valve chamber, remaining body cavity platform are equipped with down
Valve chamber and lower outlet；Outlet valve chamber and outlet, the valve chamber of the rightmost side are connected to lower inlet, the lower valve on two adjacent body cavity platforms
Chamber and lower outlet；Upper body is on the lower body, and vestibule platform is placed in that hole is intracavitary and sealed pad seals, and rightmost side upper outlet is through hole
Chamber is connected to lower inlet；Body cavity platform is placed in body cavity and energy converter group is crimped in each body cavity by sealed circle, energy converter group by
Two energy converters that sealed ring separates are constituted；It exports the valve chamber disc valve be bonded in it and constitutes outlet valve, upper lower valve chamber
The disc valve be bonded in it respectively constitutes inlet valve up and down；Upper body, energy converter and sealing ring constitute the upper pump being serially connected
Chamber, lower body, energy converter and sealing ring constitute the lower pump chamber being serially connected, and upper pump chamber is connected with lower pump chamber；One energy converter includes
Driver and sensor；Power supply exports identical d. c. voltage signal to each energy converter and driver and utilizes the sensing of sensor
Voltage signal judges energy converter deformation state, and the deformation direction of driving voltage and each energy converter commutates when sensing voltage reaches extreme value
And make the one-way flow of fluid；Piezoelectric pump inlet and outlet, which connect with hydraulic cylinder through reversal valve and pass through reversal valve, changes hydraulic cylinder piston
Motion state.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910191134.9A CN109899328B (en) | 2019-03-01 | 2019-03-01 | Piezoelectric driving type hydraulic motor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910191134.9A CN109899328B (en) | 2019-03-01 | 2019-03-01 | Piezoelectric driving type hydraulic motor |
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| Publication Number | Publication Date |
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| CN109899328A true CN109899328A (en) | 2019-06-18 |
| CN109899328B CN109899328B (en) | 2020-06-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910191134.9A Active CN109899328B (en) | 2019-03-01 | 2019-03-01 | Piezoelectric driving type hydraulic motor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111852829A (en) * | 2020-08-26 | 2020-10-30 | 长春工程学院 | Wafer type multi-vibrator piezoelectric hydraulic stepping driver applied to precise drip irrigation |
| CN112554848A (en) * | 2020-11-12 | 2021-03-26 | 中国石油天然气股份有限公司 | Crude oil conveying device |
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| CN1623740A (en) * | 2004-12-13 | 2005-06-08 | 华中科技大学 | Mini clamp with dual-chip |
| CN201705743U (en) * | 2010-04-30 | 2011-01-12 | 浙江师范大学 | Long-stroke precise stepping driver |
| CN102678527A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Piezoelectric vibrator bilateral fluid driven series connection pump |
| CN102678528A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Series-parallel hybrid-driven piezoelectric pump |
| CN108035869A (en) * | 2018-01-10 | 2018-05-15 | 浙江师范大学 | A kind of adaptive miniature piezoelectric pump installation capable of reversing of non-resonant |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1623740A (en) * | 2004-12-13 | 2005-06-08 | 华中科技大学 | Mini clamp with dual-chip |
| CN201705743U (en) * | 2010-04-30 | 2011-01-12 | 浙江师范大学 | Long-stroke precise stepping driver |
| CN102678527A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Piezoelectric vibrator bilateral fluid driven series connection pump |
| CN102678528A (en) * | 2012-05-23 | 2012-09-19 | 浙江师范大学 | Series-parallel hybrid-driven piezoelectric pump |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111852829A (en) * | 2020-08-26 | 2020-10-30 | 长春工程学院 | Wafer type multi-vibrator piezoelectric hydraulic stepping driver applied to precise drip irrigation |
| CN112554848A (en) * | 2020-11-12 | 2021-03-26 | 中国石油天然气股份有限公司 | Crude oil conveying device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109899328B (en) | 2020-06-23 |
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