CN2580141Y - Multiple cavity piezoelectric membrane driving pump - Google Patents
Multiple cavity piezoelectric membrane driving pump Download PDFInfo
- Publication number
- CN2580141Y CN2580141Y CN 02275088 CN02275088U CN2580141Y CN 2580141 Y CN2580141 Y CN 2580141Y CN 02275088 CN02275088 CN 02275088 CN 02275088 U CN02275088 U CN 02275088U CN 2580141 Y CN2580141 Y CN 2580141Y
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- cavity
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- piezoelectric vibrator
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- pump housing
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Abstract
The utility model relates to a multiple cavity piezoelectric membrane driving pump which is used for conveying and controlling micro fluid. The multiple cavity piezoelectric membrane driving pump is composed of pump bodies, piezoelectric vibrators which are arranged in inner cavities of the pump bodies, inlet valves and outlet valves, wherein, each of the pump bodies is provided with a fluid ingress passage and a fluid egress passage. The utility model is characterized in that the multiple cavity piezoelectric membrane driving pump comprises at least two working cavity bodies which are composed of the piezoelectric vibrators and the pump bodies. The two working cavity bodies are connected in series or parallel. Since the liquid outputting performance of the multiple cavity piezoelectric membrane driving pump is equivalent to the liquid outputting performance of a plurality of single cavity piezoelectric pumps which are connected in series or parallel in operation, the outputting flow and the outputting pressure of the multiple cavity piezoelectric membrane driving pump are obviously increased. When the two working cavity bodies are connected in parallel, the fluid is outputted in each working period. The outputting ripple is small.
Description
Technical field
The utility model belongs to the pump that use in small fluid transmission and control, microelectromechanical systems field, is specifically related to a kind of multiple-cavity piezoelectric film driven pump.
Background technique
The piezoelectric film pump is another vibrational energy conversion equipment after piezoelectric ultrasound motor, and the vibration that it excites piezoelectric film directly acts on fluid and forms pressure or flow output, has the working principle and the feature structure that are different from all kinds of conventional pump fully.An important branch as piezoelectric actuator, plurality of advantages such as the piezoelectric film pump is simple in structure with it, volume is little, reaction is fast, no electromagnetic interference, easy operating, have a wide range of applications: accurately control the field and all can use at pharmacy, medical treatment, trace reagent proportioning or pressure, flow, its development enjoys countries in the world scholar's extensive concern.
The piezoelectric film pump that several different structures occurred at present has according to the form of valve: unidirectional stop valve (ball valve, tapered valve floats) piezoelectric film pump, collapsible tube, expansion tubular type Valveless piezoelectric membrane pump, thermal arrest valve piezoelectric film pump and steel tubing in different shapes Valveless piezoelectric membrane pump or the like.Because the structure difference of valve, the thin pump of the piezoelectricity of each form all has structural feature and the performance characteristic of himself.The development of piezoelectric film pump at present still is in theoretical research and experimental exploring stage, the principal element that hinders its suitableization process is that output capability (pressure, flow) lower (comparing with conventional pump), performance are stable inadequately, can only satisfy flow, the lower occasion of pressure requirement, for obtaining higher pressure and flow, must be cost to improve operating voltage, reduce the reliability of its work greatly; The frequency optimum traffic that is piezoelectric pump on the other hand is also lower, and output ripple is big, is unfavorable for realizing the accurate control of flow and pressure.
Summary of the invention
For solving the above-mentioned shortcoming that present piezoelectric film pump exists, the utility model proposes the multiple-cavity piezoelectric film driven pump of multi-cavity, many valves, improving its output flow or pressure, to reduce output ripple, and realize the accurate control of pressure and flow.
The utility model is made up of piezoelectric vibrator, the terminal valve of the pump housing that is provided with fluid inlet/outlet passage and pump housing inner chamber, is characterized in containing at least as follows two the series operation cavitys or the parallel operation cavity that constitute:
The A type: two piezoelectric vibrators are divided into pump housing inner chamber two cavitys of sealing respectively, the fluid inlet of one of them cavity is connected with inlet passage by inlet valve, the fluid output of its another cavity is connected with outlet passage by outlet valve, the passage that is connected with the one cavity is connected with another cavity by valve, this valve both had been the outlet valve of one cavity, also was the inlet valve of another cavity;
Type B: two piezoelectric vibrators are divided into pump housing inner chamber two cavitys of sealing respectively, and the fluid inlet of two cavitys is connected with inlet passage by inlet valve respectively, and fluid output is connected with outlet passage by outlet valve respectively.
Described piezoelectric vibrator is by piezoceramics film and metallic thin film is bonding is composited; Described valve is made by rubber-like metal or organic polymer thin film.
The described pump housing adopts bonding the combining of multilayer split.
The utility model also can be in a pump housing with above-mentioned A type series connection cavity, Type B cavity in parallel as elementary cell carry out also again, tandem compound forms.
The utility model can also be made another tandem multiple-cavity piezoelectric film driven pump by following mode of structure, at pump housing inner chamber three piezoelectric vibrators that be arranged in parallel up and down, constitute the working cavity of two sealings between the upper and lower adjacent piezoelectric vibrator of piezoelectric vibrator placed in the middle and its, constitute fluid respectively between its upper and lower piezoelectric vibrator and the upper and lower chamber of pump housing wall and go out, go into passage, on three piezoelectric vibrators, all have through-flow mouthful the valve that opens and closes by the same flow direction also is set.
Owing to the utlity model has the series and parallel formula structure of multiple pressure electric tachometer indicator, many active chambers, therefore, its output fluid pressure, flow increased substantially, and reduced output ripple greatly.
Description of drawings
Fig. 1 is the utility model cavity series-mode frame schematic representation;
Fig. 2 is the parallel structural representation of the utility model cavity;
Fig. 3 be the utility model with Fig. 1, Fig. 2 structure as elementary cell carry out also again, the tandem compound structural representation.
Fig. 4 is another series-mode frame schematic representation of the utility model.
Embodiment
The embodiment who provides below in conjunction with accompanying drawing describes in further detail the utility model structure.
With reference to Fig. 1, piezoelectric vibrator 4,5 is divided into the pump housing 3 inner chambers the cavity 6,7 of sealing respectively, the fluid inlet of cavity 6 is connected with inlet passage 1 by inlet valve 9, the outlet of the fluid of cavity 7 is connected with outlet passage 2 by outlet valve 11, the passage 8 that is connected with cavity 6 is connected with cavity 7 by valve 10, valve 10 both had been the outlet valve of cavity 6, also was the inlet valve of cavity 7.This is aforesaid A type pump.
Its working principle is: it is 180 ° ac voltage signal that two piezoelectric vibrator two ends apply phase difference respectively, can guarantee that like this pressure of fluid increases progressively.When piezoelectric vibrator 4 upwards vibrated, the inlet valve 9 of cavity 6 was opened, valve 10 cuts out, and has fluid to flow into cavity 6 by import 1; Also upwards vibration of piezoelectric vibrator 5 simultaneously, valve 10 cuts out, outlet valve 11 is opened, and has fluid to be flowed out through exporting 2 by cavity 7.In like manner, when two piezo-electric sheets all vibrated downwards, fluid flowed into cavity 7 through passage 8 by cavity 6.Two piezoelectric vibrators vibrate repeatedly, have realized that fluid is in the one-way flow that exports from entering the mouth to.
With reference to Fig. 2, piezoelectric vibrator 24,25 is divided into the pump housing 23 inner chambers the cavity 26,27 of sealing respectively, the fluid inlet of cavity 26,27 is connected with inlet passage 21 by inlet valve 28,29 respectively, and the fluid output of cavity 26,27 is connected with outlet passage 22 by outlet valve 30,31 respectively.This is aforesaid Type B pump.
Its working principle is: it is 180 ° ac voltage signal that two piezoelectric vibrator two ends also apply phase difference respectively, and making so all has the inflow of liquid and outflow in whole work period.When piezoelectric vibrator 24 upwards vibrated, the inlet valve 28 of cavity 26 was opened, outlet valve 30 cuts out, and has fluid to flow into cavity 26 by inlet passage 21; Simultaneously, piezoelectric vibrator 25 is upwards vibration also, and the inlet valve 29 of cavity 27 cuts out, outlet valve 31 is opened, and has fluid to be flowed out through exporting 22 by cavity 27.In like manner, when two piezo-electric sheets all vibrate, there is fluid to flow into cavity 27 downwards through inlet passage 21.Fluid in the cavity 26 flows out through exporting 22.Two cavitys alternately increase and reduce, and have realized the continuous-flow that all has fluid to export from entering the mouth in the cycle in whole circulation.
With reference to Fig. 3, be with series connection cavity shown in Figure 1 and cavity in parallel shown in Figure 2 as elementary cell, carry out also again, tandem compound forms.This embodiment is with after the 1 formula elementary cell parallel connection of two picture groups, connects with a picture group 2 formula elementary cells again.
Its working principle is: for improving its ability to work, piezoelectric vibrator 39,42,43 two ends apply the ac voltage signal of same phase, and piezoelectric vibrator 40,41,44 two ends apply the ac voltage signal that phase place differs 180 ° with it, and each driver element is obtained the best effort effect like this.Its working procedure is as follows:
Under a certain state, piezoelectric vibrator 39,40,43 makes progress simultaneously and vibrates, and has this moment fluid to flow into cavitys 53 from inlet channel 61, and has fluid to flow out and inflow cavity 57 from cavity 54; Simultaneously, piezoelectric vibrator 41,42 is vibration downwards simultaneously, and upwards vibration of piezoelectric vibrator 44 has fluid to flow into cavity 56 from cavity 55, and has fluid to flow out through exporting 62 from cavity 58.In like manner, under another state, piezoelectric vibrator 39,40,43 vibrates downwards, has fluid to flow into cavity 54 from cavity 53, and has fluid to flow out through outlet from cavity 57; Upwards vibration of while piezoelectric vibrator 41,42, piezoelectric vibrator 44 vibrates downwards, has fluid to flow into cavitys 55 from inlet channel 61, and has fluid to flow out and inflow cavity 58 from cavity 56.Therefore in entire work process, fluid continuous-flow also always has the inflow and the outflow of fluid.
With reference to Fig. 4, it is another series-mode frame of the utility model, three piezoelectric vibrators 78,79,80 be arranged in parallel up and down in the pump housing 81, piezoelectric vibrator 79 and 78,80 working cavities 76,77 that constitute two sealings of its upper and lower adjacent piezoelectric vibrator, constitute fluid entry and exit passage 72,71 respectively between piezoelectric vibrator 78,80 and the upper and lower chamber of pump housing wall, all have through-flow mouthful on the piezoelectric vibrator 78,79,80 valve 75,74,73 that opens and closes by the same flow direction also is set.
Its working principle is: the driving voltage phase difference of two adjacent piezoelectric vibrators is 180 °, and the distortion that can guarantee them like this makes the volume of relevant cavity increase jointly or reduces, so that the increasing progressively of pressure between two cavitys.When piezoelectric vibrator 80 vibrates downwards, upwards vibration of piezoelectric vibrator 79, cavity 77 volumes increase, and valve 73 is opened, valve 74 cuts out, and fluid enters cavity 77 from inlet channel 71; Simultaneously, piezoelectric vibrator 78 vibrates downwards, with piezoelectric vibrator 79 volume of cavity 76 is reduced, and valve 75 is opened, and fluid flows out from outlet passage 72.In like manner, when the piezoelectric vibrator vibration reduced cavity 77 volumes, the volume of cavity 76 increased, and valve 73 and valve 75 are closed, and valve 74 is opened, and fluid enters cavity 76 from cavity 77.Two cavity volume increase repeatedly and reduce, and have realized that fluid is in the one-way flow that exports from entering the mouth to.
Claims (6)
1, a kind of multiple-cavity piezoelectric film driven pump, advance by being provided with fluid, outlet passage (1), (2) the pump housing (3) and be arranged on the piezoelectric vibrator of pump housing inner chamber, advance, outlet valve is formed, it is characterized in that containing at least two series operation cavitys that constitute as follows: piezoelectric vibrator (4), (5) respectively the pump housing (3) inner chamber is divided into the cavity (6) of sealing, (7), the fluid inlet of cavity (6) is connected with inlet passage (1) by inlet valve (9), the fluid output of cavity (7) is connected with outlet passage (2) by outlet valve (11), the passage (8) that is connected with cavity (6) is connected with cavity (7) by valve (10), valve (10) both had been the outlet valve of cavity (6), also was the inlet valve of cavity (7).
2, a kind of multiple-cavity piezoelectric film driven pump according to claim 1 is characterized in that described piezoelectric vibrator is by piezoceramics film and metallic thin film is bonding to be composited; Described valve is made by rubber-like metal or organic polymer thin film; The described pump housing adopts bonding the combining of multilayer split.
3, a kind of multiple-cavity piezoelectric film driven pump, advance by being provided with fluid, outlet passage (21), (22) the pump housing (23) and be arranged on the piezoelectric vibrator of pump housing inner chamber, advance, outlet valve is formed, it is characterized in that containing at least two parallel operation cavitys that constitute as follows: piezoelectric vibrator (24), (25) respectively the pump housing (23) inner chamber is divided into the cavity (26) of sealing, (27) fluid inlet is respectively by inlet valve (28), (29) link cavity (26) with inlet passage (21), (27) fluid output is respectively by outlet valve (30), (31) be connected with outlet passage (22).
4, a kind of multiple-cavity piezoelectric film driven pump according to claim 3 is characterized in that described piezoelectric vibrator is by piezoceramics film and metallic thin film is bonding to be composited; Described valve is by the rubber-like metal or have gathering compound film to make; The described pump housing adopts bonding the combining of multilayer split.
5, a kind of multiple-cavity piezoelectric film driven pump, by the pump housing (81) be arranged on the piezoelectric vibrator of pump housing inner chamber, valve is formed, it is characterized in that at the pump housing (81) inner chamber three piezoelectric vibrators (78) that be arranged in parallel up and down, (79), (80), the piezoelectric vibrator (78) that piezoelectric vibrator (79) is neighbouring with it, (80) constitute the working cavity (76) of two sealings between, (77), piezoelectric vibrator (78), (80) with the pump housing on, constituting fluid between the cavity of resorption wall respectively goes out, inlet channel (72), (71), piezoelectric vibrator (78), (79), (80) all have the overflow port on and be provided with and close the valve (75) that opens by the same flow direction, (74), (73).
6, a kind of multiple-cavity piezoelectric film driven pump according to claim 5 is characterized in that described piezoelectric vibrator is make pottery to hand over the porcelain film and metallic thin film is bonding is composited by piezoelectricity; Described valve is made by rubber-like metal or organic polymer thin film; The described pump housing adopts bonding the combining of multilayer split.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02275088 CN2580141Y (en) | 2002-09-03 | 2002-09-03 | Multiple cavity piezoelectric membrane driving pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02275088 CN2580141Y (en) | 2002-09-03 | 2002-09-03 | Multiple cavity piezoelectric membrane driving pump |
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| Publication Number | Publication Date |
|---|---|
| CN2580141Y true CN2580141Y (en) | 2003-10-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02275088 Expired - Fee Related CN2580141Y (en) | 2002-09-03 | 2002-09-03 | Multiple cavity piezoelectric membrane driving pump |
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| CN (1) | CN2580141Y (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100418470C (en) * | 2004-09-22 | 2008-09-17 | 欧姆龙健康医疗事业株式会社 | Air pump, pump system, electronic blood pressure monitor, and massager |
| CN100427758C (en) * | 2004-03-01 | 2008-10-22 | 阿尔卑斯电气株式会社 | Liquid pump |
| CN106438301A (en) * | 2015-08-13 | 2017-02-22 | 深圳市合精密泵业科技有限公司 | Novel double-cavity piezoelectric pump |
| CN109505765A (en) * | 2017-09-15 | 2019-03-22 | 研能科技股份有限公司 | Air transporting arrangement |
| CN109578690A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| CN109578686A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| CN109578253A (en) * | 2018-09-12 | 2019-04-05 | 国网江苏省电力有限公司泰州供电分公司 | Multi-stage high-frequency piezoelectric pump and its control system |
| CN109578685A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| CN109578687A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| CN109578688A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| CN109578689A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| CN109931250A (en) * | 2019-03-03 | 2019-06-25 | 浙江师范大学 | A kind of series connection array of cavities declines type piezo gas compressor |
| CN110067791A (en) * | 2018-01-22 | 2019-07-30 | 研能科技股份有限公司 | Fluid system |
| US10920766B2 (en) | 2018-01-22 | 2021-02-16 | Microjet Technology Co., Ltd. | Fluid system |
| CN113289529A (en) * | 2021-05-10 | 2021-08-24 | 浙江大学 | Microfluid mixer based on piezoelectric type synthetic jet technology and mixing method thereof |
| US11162488B2 (en) | 2017-09-29 | 2021-11-02 | Microjet Technology Co., Ltd. | Fluid system |
| US11193479B2 (en) | 2017-09-29 | 2021-12-07 | Microjet Technology Co., Ltd. | Fluid system |
| US11204027B2 (en) | 2017-09-29 | 2021-12-21 | Microjet Technology Co., Ltd. | Fluid system |
-
2002
- 2002-09-03 CN CN 02275088 patent/CN2580141Y/en not_active Expired - Fee Related
Cited By (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100427758C (en) * | 2004-03-01 | 2008-10-22 | 阿尔卑斯电气株式会社 | Liquid pump |
| CN100418470C (en) * | 2004-09-22 | 2008-09-17 | 欧姆龙健康医疗事业株式会社 | Air pump, pump system, electronic blood pressure monitor, and massager |
| CN106438301A (en) * | 2015-08-13 | 2017-02-22 | 深圳市合精密泵业科技有限公司 | Novel double-cavity piezoelectric pump |
| CN106438301B (en) * | 2015-08-13 | 2019-08-06 | 深圳市合一精密泵业科技有限公司 | A kind of piezoelectric pump with double chambers |
| CN109505765A (en) * | 2017-09-15 | 2019-03-22 | 研能科技股份有限公司 | Air transporting arrangement |
| CN109578687A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| US11193479B2 (en) | 2017-09-29 | 2021-12-07 | Microjet Technology Co., Ltd. | Fluid system |
| CN109578685A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| US11162488B2 (en) | 2017-09-29 | 2021-11-02 | Microjet Technology Co., Ltd. | Fluid system |
| CN109578688A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| CN109578689A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| US11204027B2 (en) | 2017-09-29 | 2021-12-21 | Microjet Technology Co., Ltd. | Fluid system |
| CN109578686B (en) * | 2017-09-29 | 2021-07-27 | 研能科技股份有限公司 | Fluid system |
| CN109578690A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| CN109578688B (en) * | 2017-09-29 | 2021-07-23 | 研能科技股份有限公司 | Fluid system |
| CN109578686A (en) * | 2017-09-29 | 2019-04-05 | 研能科技股份有限公司 | Fluid system |
| US10920766B2 (en) | 2018-01-22 | 2021-02-16 | Microjet Technology Co., Ltd. | Fluid system |
| CN110067791A (en) * | 2018-01-22 | 2019-07-30 | 研能科技股份有限公司 | Fluid system |
| CN110067791B (en) * | 2018-01-22 | 2021-11-16 | 研能科技股份有限公司 | Fluid system |
| CN109578253A (en) * | 2018-09-12 | 2019-04-05 | 国网江苏省电力有限公司泰州供电分公司 | Multi-stage high-frequency piezoelectric pump and its control system |
| CN109578253B (en) * | 2018-09-12 | 2021-06-25 | 国网江苏省电力有限公司泰州供电分公司 | Multistage high-frequency piezoelectric pump |
| CN109931250A (en) * | 2019-03-03 | 2019-06-25 | 浙江师范大学 | A kind of series connection array of cavities declines type piezo gas compressor |
| CN109931250B (en) * | 2019-03-03 | 2024-03-15 | 浙江师范大学 | Series cavity array type micro piezoelectric gas compressor |
| CN113289529A (en) * | 2021-05-10 | 2021-08-24 | 浙江大学 | Microfluid mixer based on piezoelectric type synthetic jet technology and mixing method thereof |
| CN113289529B (en) * | 2021-05-10 | 2022-07-12 | 浙江大学 | Microfluid mixer based on piezoelectric type synthetic jet technology and mixing method thereof |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |