CN110067791B

CN110067791B - Fluid system

Info

Publication number: CN110067791B
Application number: CN201810059322.1A
Authority: CN
Inventors: 莫皓然; 韩永隆; 黄启峰; 陈宣恺
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2018-01-22
Filing date: 2018-01-22
Publication date: 2021-11-16
Anticipated expiration: 2038-01-22
Also published as: CN110067791A

Abstract

An integrated fluid system comprises a fluid actuating region having at least one flow guide unit for transmitting fluid flow and discharging the fluid from at least one outlet; a fluid channel, which is communicated with the at least one outlet of the fluid actuating area and is provided with a plurality of branch channels, so that the fluid transmitted by the fluid actuating area can be divided to form the required flow rate for transmission; a gas collection chamber connected to the fluid channel for accumulating fluid in the gas collection chamber; the valves are arranged in the branch channels and control the fluid transmission in the branch channels in an opening and closing state; and a plurality of sensors arranged in the plurality of branch channels for sensing the content of the specific monitored substances of the fluid in the plurality of branch channels.

Description

Fluid system

[ technical field ] A method for producing a semiconductor device

The present invention relates to a fluid system, and more particularly, to an integrated micro fluid control system with a sensing function.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

With the increasing development of science and technology, the applications of fluid delivery devices are becoming more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, the trails of wearable devices are seen, and it is seen that the conventional fluid delivery devices have gradually tended to be miniaturized and maximized in flow rate.

However, although the miniaturized fluid delivery device can continuously deliver gas, the design of the miniaturized limited volume chamber or channel requires to increase more gas delivery amount, which obviously has a certain difficulty, so that the design of the valve can not only control the continuation or interruption of the gas flow delivery, but also control the unidirectional flow of the gas, and make the limited volume chamber or channel accumulate the gas to increase the output of the gas amount.

[ summary of the invention ]

In order to solve the problem that the prior art can not meet the requirement of miniaturization of the fluid system, the scheme provides an integrated fluid system, which comprises a fluid actuating area, a fluid guide unit and a fluid outlet, wherein the fluid actuating area is provided with at least one flow guide unit which transmits fluid to flow and discharges the fluid from at least one outlet; a fluid channel, which is communicated with the at least one outlet of the fluid actuating area and is provided with a plurality of branch channels, so that the fluid transmitted by the fluid actuating area can be divided to form the required flow rate for transmission; a gas collection chamber connected to the fluid channel for accumulating fluid in the gas collection chamber; the valves are arranged in the branch channels and control the fluid transmission in the branch channels in an opening and closing state; and a plurality of sensors arranged in the plurality of branch channels for sensing the content of the specific monitored substances of the fluid in the plurality of branch channels.

In one embodiment, the valves are active valves, and the fluid system further includes a controller electrically connected to the valves to control the on/off states of the valves. The controller and the flow guide units form an integration in a system packaging mode. The fluid actuating area comprises a plurality of flow guide units, and the flow guide units are arranged in series and parallel to transmit fluid flow. The lengths and widths of the branched channels are preset according to the specific fluid transmission quantity or flow rate required, and the branched channels are arranged in series-parallel.

Through the arrangement, the fluid system can have a miniaturized volume and can obtain fluid output with specific flow rate, pressure and transmission quantity.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of a fluid system according to a preferred embodiment of the present disclosure.

Fig. 2A is a schematic structural diagram of a flow guide unit according to a preferred embodiment of the present disclosure.

Fig. 2B to fig. 2D are schematic operation diagrams of the flow guide unit shown in fig. 2A.

Fig. 3A is a schematic structural diagram of a fluid actuating region according to a preferred embodiment of the present disclosure.

Fig. 3B is a schematic structural view of the flow guide units of the present disclosure arranged in series.

Fig. 3C is a schematic structural diagram of the flow guide units of the present disclosure arranged in parallel.

Fig. 3D is a schematic structural diagram of the flow guide units of the present disclosure arranged in series-parallel.

Fig. 4 is a schematic structural diagram of a fluid actuating region according to another preferred embodiment of the present disclosure.

Fig. 5 is a schematic structural diagram of a fluid actuating region according to yet another preferred embodiment of the present invention.

Fig. 6A and 6B are operation diagrams of a first embodiment of the valve of the present disclosure.

Fig. 7A and 7B are operation diagrams of a second embodiment of the valve of the present disclosure.

[ notation ] to show

100: fluid system

10: fluid action zone

10 a: flow guiding unit

11: base material

12: the first chamber

13: resonance board

130: hollow hole

131: movable part

14: actuating plate

141: suspension part

142: outer frame part

143: voids

15: piezoelectric element

16: outlet plate

160: an outlet orifice

17: entrance plate

170: inlet aperture

18: second chamber

19: third chamber

20: fluid channel

20a, 20b, 21a, 21b, 22a, 22 b: branch channel

30: air-collecting chamber

40: sensor with a sensor element

50. 50a, 50b, 50c, 50 d: valve with a valve body

51: channel substrate

511: first through hole

512: first through hole

513: chamber

514: first outlet

515: second outlet

52: piezoelectric actuator

521: support plate

522: piezoelectric ceramics

53: connecting rod

531: blocking part

60: controller

610. 620: electrical connection circuit

g 0: gap

A: output area

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Please refer to fig. 1, which is a schematic structural diagram of a fluid control system according to a preferred embodiment of the present disclosure. The fluid system 100 includes a fluid actuation zone 10, a fluid channel 20, a plenum chamber 30, a plurality of sensors 40, a plurality of

valves

50a, 50b, 50c, and 50d, and a controller 60. In the preferred embodiment, all of the above components are system packaged on a substrate 11 to form an integrated micro-structure. The fluid actuating region 10 is formed by one or more flow guiding units 10a, the flow guiding units 10a can be arranged in a serial, parallel or serial-parallel arrangement, each flow guiding unit can generate a pressure difference in its interior after being activated, so as to suck a fluid which can be gas and discharge the fluid through an outlet hole (not shown in fig. 1) provided in the flow guiding unit, thereby achieving the fluid transmission.

In the present embodiment, the fluid actuating region 10 includes four flow guiding units 10a, and the flow guiding units 10a are arranged in series and parallel. The fluid channel 20 communicates with the outlet holes (not shown in fig. 1) of all the guide units 10a in the fluid actuating region 10 to receive the transmission fluid discharged from the guide units 10 a. The structure, operation and arrangement of the flow guide unit 10a and the fluid channel 20 will be described in detail later. The fluid channel 20 further has a plurality of

branch channels

20a and 20b to branch the transport fluid discharged from the fluid actuating region 10 to form the required transport volume, and in the embodiment, only the

branch channels

20a and 20b are used for illustration, which is not limited thereto. The sensors 40 are disposed in the

branched channels

20a and 20b, in this embodiment, at least one sensor 40 is disposed for each of the

branched channels

20a and 20b, or a plurality of sensors 40 are disposed in the

branched channels

20a and 20b, but not limited thereto, the sensors 40 are used to sense the content of a specific monitoring object contained in the fluid in the

branched channels

20a and 20 b; the gas collecting chamber 30 is connected to the fluid channel 20 through the

branch channels

20a and 20b, so that the transmission fluid can be accumulated in the gas collecting chamber 30 for storage, and when the fluid system 100 controls the required output, the transmission fluid can be supplied to the output of the fluid channel 20, thereby increasing the transmission fluid.

Although the above-mentioned manner of communicating the branched

passages

20a and 20b with the fluid passage 20 is shown by only the branched

passages

20a and 20b communicating with the fluid passage 20 arranged in parallel, it is not limited thereto, and a plurality of

branched passages

20a and 20b may be further arranged in series, or a plurality of

branched passages

20a and 20b may be arranged in series and parallel. The lengths and widths of the

branched channels

20a and 20b can be preset according to the required specific delivery amount, that is, the variation of the length and width setting of the

branched channels

20a and 20b can affect the flow rate and the size of the delivery amount, i.e., the preset length and width can be calculated according to the required specific delivery amount.

In the present embodiment, as shown in the figure, the divergent channel 20a further includes

divergent channels

21a, 22 a; similarly, the branched channel 20b also includes branched

channels

21b and 22b, and although only the branched

channels

21a and 22a are connected to the

branched channels

20a and 20b respectively and arranged in series, the present invention is not limited thereto, and the

branched channels

21a and 22a may be arranged in parallel, or the

branched channels

21a and 22a may be arranged in series and parallel. The

valves

50a, 50c, 50b and 50d may be active valves or passive valves, in this embodiment active valves, and are respectively disposed in the

branch passages

21a, 22a, 21b and 22b in sequence. The

valves

50a, 50c, 50b, and 50d can control the communication state of the

branch passages

21a, 22a, 21b, and 22b provided. For example, when the valve 50a is opened, the branch passage 21a may be opened to output fluid to the output area a; when the valve 50b is opened, the branch channel 21b can be opened to output the fluid to the output area A; when the valve 50c is opened, the branch passage 22a can be opened to output the fluid to the output area A; when the valve 50d is opened, the branch passage 22b may be opened to output the fluid to the output area a. The controller 60 has two

electrical connection lines

610, 620, the electrical connection line 610 is electrically connected to the on/off states of the

control valves

50a, 50d, and the electrical connection line 620 is electrically connected to the on/off states of the

control valves

50b, 50 c. In this way, the

valves

50a, 50b, 50c and 50d can be driven by the controller 60 to control a communication state of the corresponding

branched channels

21a, 22a, 21b and 22b, and thus control the output of the fluid to an output area a.

In addition, the sensors 40 in this embodiment may include a gas sensor or a liquid sensor, and may further include an ozone sensor, a particle sensor, a volatile organic compound sensor, a light sensor, or at least one of an oxygen sensor, a carbon monoxide sensor, and a carbon dioxide sensor, or a combination thereof; alternatively, the plurality of sensors 40 further comprises at least one of a temperature sensor, a humidity sensor, or a combination thereof.

Please refer to fig. 2A, which is a schematic structural diagram of a flow guiding unit according to a preferred embodiment of the present disclosure. In a preferred embodiment of the present invention, the flow guiding unit 10a may be a piezoelectric pump. As shown, each flow guide unit 10a is formed by sequentially stacking an inlet plate 17, a substrate 11, a resonator plate 13, an actuator plate 14, a piezoelectric element 15, and an outlet plate 16. The inlet plate 17 has at least one inlet hole 170, the resonator plate 13 has a hollow hole 130 and a movable portion 131, the movable portion 131 is a flexible structure formed by a portion of the resonator plate 13 not fixed on the substrate 11, and the hollow hole 130 is opened at a position near a center point of the movable portion 131. The first chamber 12 is formed between the resonator plate 13 and the inlet plate 17. The actuator plate 14 is a hollow floating structure having a floating portion 141, an outer frame portion 142 and a plurality of gaps 143. The floating portion 141 of the actuator plate 14 is connected to the outer frame 142 through a plurality of connecting portions (not shown), such that the floating portion 141 is suspended in the outer frame 142, and a plurality of gaps 143 are defined between the floating portion 141 and the outer frame 142 for the circulation of gas. The arrangement, implementation and number of the suspending portions 141, the outer frame portion 142 and the gaps 143 are not limited thereto, and may be changed according to the actual situation. Preferably, the actuator plate 14 is made of a metal material film or a polysilicon film, but not limited thereto. A gap g0 is provided between the actuator plate 14 and the resonator plate 13 to form a second chamber 18. The outlet aperture 160 is disposed in the outlet plate 16, and the third chamber 19 is formed between the actuation plate 14 and the outlet plate 16.

In some preferred embodiments of the present invention, the substrate 11 of the current guiding unit 10a further comprises a driving circuit (not shown) for electrically connecting the positive electrode and the negative electrode of the piezoelectric element 15, thereby providing a driving power source for the piezoelectric element 15, but not limited thereto; the driving circuit can be disposed at any position inside the flow guiding unit 10a, and can be changed arbitrarily according to the actual situation.

Referring to fig. 2A to 2C, fig. 2B to 2D are schematic operation diagrams of the diversion unit 10a shown in fig. 2A. The flow guiding unit 10a shown in fig. 2A is in an inactivated state (i.e., an initial state). When the piezoelectric element 15 is subjected to a voltage, i.e., deformed, the actuator plate 14 is driven to perform reciprocating vibration in a vertical direction. As shown in fig. 2B, when the floating portion 141 of the actuator plate 14 vibrates upwards to increase the volume and reduce the pressure of the second chamber 18, the fluid enters from the inlet hole 170 of the inlet plate 17 in compliance with the external pressure, collects at the first chamber 12, and flows upwards into the second chamber 18 through the central hole 130 of the resonator plate 13 corresponding to the first chamber 12.

Then, as shown in fig. 2C, the vibration of the floating portion 141 of the actuator plate 14 drives the resonator plate 13 to resonate, so that the movable portion 131 vibrates upwards, and the floating portion 141 of the actuator plate 14 vibrates downwards at the same time, which causes the movable portion 131 of the resonator plate 13 to stick and abut against the lower portion of the floating portion 141 of the actuator plate 14. At this time, the flow gap between the central hole 130 of the resonator plate 13 and the second chamber 18 is closed, the second chamber 18 is compressed to become smaller in volume and higher in pressure, and the third chamber 19 is increased in volume and lower in pressure, thereby forming a pressure gradient, so that the fluid in the second chamber 18 is pressurized to flow to both sides and flows into the third chamber 19 through the plurality of gaps 143 of the actuating plate 14. As shown in fig. 2D, the floating portion 141 of the actuator plate 14 continues to vibrate downward, and the movable portion 131 of the resonator plate 13 is driven to vibrate downward, so that the second chamber 18 is further compressed, and most of the fluid flows into the third chamber 19 for temporary storage.

Finally, the floating portion 141 of the actuator plate 14 vibrates upward, so that the third chamber 19 is compressed, the volume is reduced, the pressure is increased, and the fluid in the third chamber 19 is guided out from the outlet hole 160 of the outlet plate 16 to the outside of the outlet plate 16, thereby completing the fluid transfer. The above-mentioned operation is to complete a complete vibration operation process when the actuating plate 14 performs reciprocating vibration. When the piezoelectric element 15 is energized, the floating portion 141 of the actuator plate 14 and the movable portion 131 of the resonator plate 13 repeat the above operation, and the fluid is continuously guided from the inlet hole 170 to the outlet hole 160 and pressurized and discharged, thereby realizing the fluid transmission. In some embodiments, the vertical reciprocating vibration frequency of the resonance plate 13 can be the same as the vibration frequency of the actuating plate 14, i.e. both can be upward or downward at the same time, and can be varied according to the practical implementation, and is not limited to the implementation shown in this embodiment.

By generating a pressure gradient in the flow channel design of the flow guiding unit 10a of this embodiment, the fluid flows at a high speed, and is transmitted from the suction end to the discharge end through the impedance difference in the inlet and outlet directions of the flow channel, and the fluid can be continuously pushed out under the pressure at the discharge end, and the silencing effect can be achieved.

Please refer to fig. 3A, which is a schematic structural diagram of a fluid actuating region according to a preferred embodiment of the present disclosure. The fluid actuating region 10 includes a plurality of flow guiding units 10a, and the flow guiding units 10a can adjust the fluid transmission amount outputted by the fluid actuating region 10 according to a specific arrangement manner, in this embodiment, the flow guiding units 10a are arranged on the substrate 11 in a series-parallel manner.

Referring to fig. 3B to 3C, fig. 3B is a schematic structural view illustrating the flow guide units of the present disclosure arranged in series; fig. 3C is a schematic structural view of the flow guide units of the present disclosure arranged in parallel; fig. 3D is a schematic structural diagram of the flow guide units of the present disclosure arranged in series-parallel. As shown in fig. 3B, the flow guiding units 10a in the fluid actuating region 10 are arranged in series, and the fluid pressure value of the outlet hole 160 of the fluid actuating region 10 is increased by connecting the flow guiding units 10a in series; referring to fig. 3C, the diversion units 10a in the fluid actuation area 10 are arranged in parallel, and the diversion units 10a are connected in parallel, so as to further increase the output flow rate of the outlet hole 160 of the fluid actuation area 10; referring to fig. 3D, the flow guiding units 10a in the fluid actuating region 10 are arranged in series-parallel connection to synchronously increase the pressure value and output amount of the fluid output from the fluid actuating region 10.

Please refer to fig. 4 and 5. FIG. 4 is a schematic view of a fluid actuation area according to another preferred embodiment of the present disclosure; fig. 5 is a schematic structural diagram of a fluid actuating region according to yet another preferred embodiment of the present invention. As shown in fig. 4, the flow guiding units 10a in the fluid actuating region 10 are arranged in a ring-shaped manner to transmit fluid; referring to fig. 5, the flow guiding units 10a in the fluid actuating region 10 are arranged in a honeycomb manner.

In the present embodiment, the flow guiding unit 10a of the fluid system 100 can be connected with the driving circuit, and has a very high flexibility, and can be applied to various electronic components, and can simultaneously enable to transmit gas, so as to meet the requirement of gas transmission with a large flow rate; in addition, the flow guiding unit 10a and the other flow guiding unit 10a can also be controlled to operate or stop independently, for example: the flow guiding units 10a can be activated, the other flow guiding unit 10a can be deactivated, or alternatively operated, but not limited to this, so as to easily achieve the requirement of various gas transmission flow rates and achieve the effect of greatly reducing power consumption.

Please refer to fig. 6A and fig. 6B, which are operation diagrams of a first embodiment of the valve of the present disclosure. The valve 50 includes a channel substrate 51, a piezoelectric actuator 52 and a connecting rod 53, and the valve 50 of the present embodiment is disposed in the branch channel 21a, but the structure and operation of the valve 50 disposed in the

other branch channels

22a, 21b and 22b are the same, and will not be described in detail below. The channel substrate 51 has a first through hole 511 and a second through hole 512 respectively communicating with the branched channel 21a, and the channel substrate 51 is disposed to be separated from each other, and a chamber 513 is recessed above the channel substrate 51, the chamber 513 is provided with a first outlet 514 communicating with the first through hole 511 and a second outlet 515 communicating with the second through hole 512. The piezoelectric actuator 52 includes a carrier plate 521 and a piezoelectric ceramic 522, wherein the carrier plate 521 is made of a flexible material, and the piezoelectric ceramic 522 is attached to a surface of the carrier plate 521 and electrically connected to the controller 60 (as shown in fig. 1). The piezoelectric actuator 52 is disposed on the carrier plate 521 to cover the chamber 513. The connecting rod 53 is connected to the other surface of the carrier plate 521 and extends into the second outlet 515 to freely displace along a vertical direction, and one end of the connecting rod 53 has a blocking portion 531 with a cross-sectional area larger than the aperture of the second outlet 515 to close and limit the communication of the second outlet 515. The blocking portion 531 may be flat or mushroom-shaped.

As shown in FIG. 6A, in the unactuated state of the piezoelectric actuator 52 of the valve 50, the linkage 53 is in a normally open initial position. At this time, a flow space is provided between the blocking portion 531 and the second outlet 515, and the second through hole 512, the chamber 513, and the first through hole 511 are communicated with each other through the flow space and communicated with the branch passage 21a, so that the transfer fluid passes therethrough. On the contrary, as shown in fig. 6B, when the piezoelectric actuator 52 is activated, the piezoelectric ceramic 522 drives the carrier plate 521 to bend and deform upwards, and the link 53 is moved upwards by the linkage of the carrier plate 521, so that the blocking portion 531 blocks the aperture of the second outlet 515. At this time, the blocking portion 531 closes the second outlet 515 so that the transfer fluid cannot pass therethrough. By the above-mentioned actuating manner, the valve 50 can maintain the opening state of the branch passage 21a in the disabled state, and close the branch passage 21a in the enabled state; that is, the valve 50 controls the fluid output from the branch passage 21a by controlling a switching state of the second through hole 512.

Please refer to fig. 7A and 7B, which are operation diagrams of a second embodiment of the valve of the present disclosure. The structure of the valve 50 is the same, and therefore, the detailed description is omitted, and only the operation design of the valve 50 in the disabled state is a normally closed state.

As shown in FIG. 7A, in the unactuated state of the piezoelectric actuator 52 of the valve 50, the linkage 53 is in a normally closed initial position. At this time, the blocking portion 531 closes the aperture of the second outlet 515 so that the transfer fluid cannot pass therethrough. As shown in fig. 7B, when the piezoelectric actuator 52 is activated, the piezoelectric ceramic 522 drives the carrier plate 521 to bend and deform downward, and the link 53 is moved downward by the linkage of the carrier plate 521, a flow space is formed between the blocking portion 531 and the second outlet 515, so that the second through hole 512, the chamber 513 and the first through hole 511 are communicated with each other through the flow space and communicated with the branch channel 21a, so that the transmission fluid can pass through. By the above-mentioned actuating manner, the valve 50 can maintain the closed state of the branched passage 21a in the non-enabled state, and open the branched passage 21a in the enabled state; that is, the valve 50 controls the output of the fluid from the branch passage 21a by controlling a switching state of the second through hole 512.

In summary, the fluid system provided in the present disclosure transmits the gas into the gas collecting chamber through at least one flow guiding unit, and further controls and adjusts the flow rate, the flow velocity, and the pressure of the fluid output by the fluid system by using the valve in the branch channel; moreover, the flow guide unit, the number of the branch channels, the arrangement mode and the driving mode are flexibly changed, so that the device can meet the requirements of various devices and gas transmission flow, and can achieve the effects of high transmission capacity, high efficiency, high flexibility and the like; finally, the information of the fluid or gas passing through the branch channel can be obtained through the sensor in the branch channel, and the fluid system is reduced through an integrated process to generate a miniature fluid system, so that the flow rate, the flow speed and the pressure of the fluid can be flexibly controlled, and the information of the fluid and the gas can be synchronously detected.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

Claims

1. An integrated fluidic system, comprising:

a fluid actuating region having at least one flow guide unit for transmitting fluid flow and discharging the fluid from at least one outlet;

a fluid channel, which is communicated with the at least one outlet of the fluid actuating area and is provided with a plurality of branch channels, so that the fluid transmitted by the fluid actuating area can be divided to form the required flow rate for transmission;

a gas collection chamber connected to the fluid channel via the plurality of branch channels to accumulate fluid in the gas collection chamber for outputting to the plurality of branch channels of the fluid channel to increase fluid transmission amount;

the valves are arranged in the branch channels and control the fluid transmission in the branch channels in an opening and closing state; the valve comprises a channel substrate, a piezoelectric actuator and a connecting rod, wherein a cavity is concavely arranged above the channel substrate, the piezoelectric actuator covers the cavity, the connecting rod is connected with the piezoelectric actuator, and one end of the connecting rod is provided with a blocking part; and

and a plurality of sensors arranged in the plurality of branch channels between the fluid channel and the gas collection chamber so as to sense the content of a specific monitored object of the fluid in the plurality of branch channels.

2. The fluid system defined in claim 1, wherein the fluid action zone is configured to transport fluid flow from a plurality of flow directing units in a series arrangement.

3. The fluid system defined in claim 1, wherein the fluid action zone is configured to transport fluid flow in a parallel arrangement by a plurality of flow directing units.

4. The fluid system defined in claim 1, wherein the fluid action zone is configured to transport fluid flow from a plurality of flow directing units in a parallel-series arrangement.

5. The fluid system defined in claim 1, wherein the fluid-actuated region is configured to transport fluid flow by a plurality of flow-directing elements arranged in an annular pattern.

6. The fluid system defined in claim 1, wherein the fluid active region is formed by a plurality of flow cells arranged in a honeycomb pattern to transport fluid flow.

7. The fluid system of claim 1, wherein the flow directing unit is a piezoelectric pump.

8. The fluid system of claim 1, wherein the lengths of the plurality of divergent channels are predetermined according to a desired specific delivery volume.

9. The fluid system of claim 1, wherein the widths of the plurality of divergent channels are predetermined according to a desired specific delivery volume.

10. The fluid system of claim 1, wherein the valve is an active valve.

11. The fluid system of claim 10, wherein the active valve is opened and closed by a controller.

12. The fluid system of claim 1, wherein the valve is a passive valve.

13. The fluid system of claim 1, wherein the plurality of divergent channels are arranged in a series arrangement.

14. The fluid system of claim 1, wherein the plurality of divergent channels are arranged in a parallel arrangement.

15. The fluid system of claim 1, wherein the plurality of divergent channels are arranged in a series-parallel arrangement.

16. The fluid system of claim 1, wherein the sensor further comprises a gas sensor.

17. The fluid system of claim 1, wherein the sensor further comprises a liquid sensor.

18. The fluid system of claim 1, wherein the sensor further comprises an ozone sensor.

19. The fluid system of claim 1, wherein the sensor further comprises a particle sensor.

20. The fluid system of claim 1, wherein the sensor comprises a volatile organic compound sensor.

21. The fluid system of claim 1, wherein the sensor comprises an optical sensor.

22. The fluid system of claim 1, wherein the sensor further comprises at least one of an oxygen sensor, a carbon monoxide sensor, and a carbon dioxide sensor, or a combination thereof.

23. The fluid system of claim 1, wherein the sensor further comprises at least one of a temperature sensor and a humidity sensor or a combination thereof.